Epitaxial Deposition Of Diamond (epo) Patents (Class 257/E21.105)
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Patent number: 8564122Abstract: Various circuit boards and methods of fabricating the same are disclosed. In one aspect, a method of manufacturing is provided that includes coupling an electrically non-functional component to a surface of a first circuit board. The electrically non-functional component has a first elevation. The surface of the circuit board is adapted to have a semiconductor chip mounted thereon. An electrically functional component is mounted to the surface inward from the electrically non-functional component. The electrically functional component has a second elevation less than the first elevation.Type: GrantFiled: December 9, 2011Date of Patent: October 22, 2013Assignees: Advanced Micro Devices, Inc., ATI Technologies ULCInventors: Neil R. McLellan, Liane Martinez, Yip Seng Low, Suming Hu
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Patent number: 8105955Abstract: An integrated circuit system includes a substrate, a carbon-containing silicon region over the substrate, a non-carbon-containing silicon region over the substrate, and a silicon-carbon region, including the non-carbon-containing silicon region and the carbon-containing silicon region.Type: GrantFiled: August 15, 2006Date of Patent: January 31, 2012Assignees: GLOBALFOUNDRIES Singapore Pte. Ltd., International Business Machines CorporationInventors: Jin Ping Liu, Richard J. Murphy, Anita Madan, Ashima B. Chakravarti
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Patent number: 7939367Abstract: The invention is a method for growing a critical adherent diamond layer on a substrate by Chemical Vapor Deposition (CVD) and the article produced by the method. The substrate can be a compound semiconductor coated with an adhesion layer. The adhesion layer is preferably a dielectric, such as silicon nitride, silicon carbide, aluminum nitride or amorphous silicon, to name some primary examples. The typical thickness of the adhesion layer is one micrometer or less. The resulting stack of layers, (e.g. substrate layer, adhesion layer and diamond layer) is structurally free of plastic deformation and the diamond layer is well adherent to the dielectric adhesion layer such that it can be processed further, such as by increasing the thickness of the diamond layer to a desired level, or by subjecting it to additional thin film fabrication process steps. In addition to preventing plastic deformation of the layer stack, the process also reduces the formation of soot during the CVD process.Type: GrantFiled: December 18, 2008Date of Patent: May 10, 2011Assignee: Crystallume CorporationInventors: Firooz Nasser-Faili, Niels Christopher Engdahl
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Patent number: 7888171Abstract: In one aspect, a method includes fabricating a gallium nitride (GaN) layer with a first diamond layer having a first thermal conductivity and a second diamond layer having a second thermal conductivity greater than the first thermal conductivity. The fabricating includes using a microwave plasma chemical vapor deposition (CVD) process to deposit the second diamond layer onto the first diamond layer.Type: GrantFiled: December 22, 2008Date of Patent: February 15, 2011Assignee: Raytheon CompanyInventors: Ralph Korenstein, Steven D. Bernstein, Stephen J. Pereira
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Patent number: 7884373Abstract: In one aspect, a method includes fabricating a gallium nitride (GaN) layer with a first diamond layer having a first thermal conductivity and a second diamond layer having a second thermal conductivity greater than the first thermal conductivity. The fabricating includes using a microwave plasma chemical vapor deposition (CVD) process to deposit the second diamond layer onto the first diamond layer.Type: GrantFiled: April 2, 2010Date of Patent: February 8, 2011Assignee: Raytheon CompanyInventors: Ralph Korenstein, Steven D. Bernstein, Stephen J. Pereira
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Patent number: 7736435Abstract: A method for producing a single crystals by preferential epitaxial growth of {100} face, comprising the steps of (1) growing the crystal on a single crystal {100} substrate; (2) forming on the side of the grown crystal a surface parallel to a {100} face different from the {100}face in the growth direction, and (3) growing the crystal on the formed {100} surface; and the steps (2) and (3) being performed once or more than once. A method for producing a single-crystal diamond using a metallic holder for the single-crystal diamond having a crystal holding portion which is raised above an outer peripheral portion of the holder, is part from the outer peripheral portion of the holder, and has a recessed shape. The methods enable the production of a large single-crystal diamond in a comparatively short time at low cost.Type: GrantFiled: November 16, 2005Date of Patent: June 15, 2010Assignee: National Institute of Advanced Industrial Science and TechnologyInventors: Yoshiaki Mokuno, Akiyoshi Chayahara, Yuji Horino, Naoji Fujimori
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Publication number: 20080318359Abstract: A method of manufacturing a silicon carbide semiconductor substrate is disclosed in which the density of basal plane dislocations (BPDs) in particular is reduced in an SiC crystal substrate. Irregularities in the surface of the substrate due to this reduction also can be flattened. A method of manufacturing a silicon carbide semiconductor substrate is disclosed in which, prior to forming an epitaxial growth layer on a silicon carbide substrate with an off-axis angle of 1° to 8°, parallel line-shape irregularities, which have an irregularity cross-sectional aspect ratio equal to or greater than the tangent of the off-axis angle of the silicon carbide substrate, are formed in the substrate surface. The irregularites have a height between 0.25 ?m and 5 ?m.Type: ApplicationFiled: June 13, 2008Publication date: December 25, 2008Applicant: FUJI ELECTRIC DEVICE TECHNOLOGY CO., LTD.Inventors: Yoshiyuki Yonezawa, Takeshi Tawara