Epitaxial Deposition Of Diamond (epo) Patents (Class 257/E21.105)
  • Patent number: 8564122
    Abstract: Various circuit boards and methods of fabricating the same are disclosed. In one aspect, a method of manufacturing is provided that includes coupling an electrically non-functional component to a surface of a first circuit board. The electrically non-functional component has a first elevation. The surface of the circuit board is adapted to have a semiconductor chip mounted thereon. An electrically functional component is mounted to the surface inward from the electrically non-functional component. The electrically functional component has a second elevation less than the first elevation.
    Type: Grant
    Filed: December 9, 2011
    Date of Patent: October 22, 2013
    Assignees: Advanced Micro Devices, Inc., ATI Technologies ULC
    Inventors: Neil R. McLellan, Liane Martinez, Yip Seng Low, Suming Hu
  • Patent number: 8105955
    Abstract: An integrated circuit system includes a substrate, a carbon-containing silicon region over the substrate, a non-carbon-containing silicon region over the substrate, and a silicon-carbon region, including the non-carbon-containing silicon region and the carbon-containing silicon region.
    Type: Grant
    Filed: August 15, 2006
    Date of Patent: January 31, 2012
    Assignees: GLOBALFOUNDRIES Singapore Pte. Ltd., International Business Machines Corporation
    Inventors: Jin Ping Liu, Richard J. Murphy, Anita Madan, Ashima B. Chakravarti
  • Patent number: 7939367
    Abstract: The invention is a method for growing a critical adherent diamond layer on a substrate by Chemical Vapor Deposition (CVD) and the article produced by the method. The substrate can be a compound semiconductor coated with an adhesion layer. The adhesion layer is preferably a dielectric, such as silicon nitride, silicon carbide, aluminum nitride or amorphous silicon, to name some primary examples. The typical thickness of the adhesion layer is one micrometer or less. The resulting stack of layers, (e.g. substrate layer, adhesion layer and diamond layer) is structurally free of plastic deformation and the diamond layer is well adherent to the dielectric adhesion layer such that it can be processed further, such as by increasing the thickness of the diamond layer to a desired level, or by subjecting it to additional thin film fabrication process steps. In addition to preventing plastic deformation of the layer stack, the process also reduces the formation of soot during the CVD process.
    Type: Grant
    Filed: December 18, 2008
    Date of Patent: May 10, 2011
    Assignee: Crystallume Corporation
    Inventors: Firooz Nasser-Faili, Niels Christopher Engdahl
  • Patent number: 7888171
    Abstract: In one aspect, a method includes fabricating a gallium nitride (GaN) layer with a first diamond layer having a first thermal conductivity and a second diamond layer having a second thermal conductivity greater than the first thermal conductivity. The fabricating includes using a microwave plasma chemical vapor deposition (CVD) process to deposit the second diamond layer onto the first diamond layer.
    Type: Grant
    Filed: December 22, 2008
    Date of Patent: February 15, 2011
    Assignee: Raytheon Company
    Inventors: Ralph Korenstein, Steven D. Bernstein, Stephen J. Pereira
  • Patent number: 7884373
    Abstract: In one aspect, a method includes fabricating a gallium nitride (GaN) layer with a first diamond layer having a first thermal conductivity and a second diamond layer having a second thermal conductivity greater than the first thermal conductivity. The fabricating includes using a microwave plasma chemical vapor deposition (CVD) process to deposit the second diamond layer onto the first diamond layer.
    Type: Grant
    Filed: April 2, 2010
    Date of Patent: February 8, 2011
    Assignee: Raytheon Company
    Inventors: Ralph Korenstein, Steven D. Bernstein, Stephen J. Pereira
  • Patent number: 7736435
    Abstract: A method for producing a single crystals by preferential epitaxial growth of {100} face, comprising the steps of (1) growing the crystal on a single crystal {100} substrate; (2) forming on the side of the grown crystal a surface parallel to a {100} face different from the {100}face in the growth direction, and (3) growing the crystal on the formed {100} surface; and the steps (2) and (3) being performed once or more than once. A method for producing a single-crystal diamond using a metallic holder for the single-crystal diamond having a crystal holding portion which is raised above an outer peripheral portion of the holder, is part from the outer peripheral portion of the holder, and has a recessed shape. The methods enable the production of a large single-crystal diamond in a comparatively short time at low cost.
    Type: Grant
    Filed: November 16, 2005
    Date of Patent: June 15, 2010
    Assignee: National Institute of Advanced Industrial Science and Technology
    Inventors: Yoshiaki Mokuno, Akiyoshi Chayahara, Yuji Horino, Naoji Fujimori
  • Publication number: 20080318359
    Abstract: A method of manufacturing a silicon carbide semiconductor substrate is disclosed in which the density of basal plane dislocations (BPDs) in particular is reduced in an SiC crystal substrate. Irregularities in the surface of the substrate due to this reduction also can be flattened. A method of manufacturing a silicon carbide semiconductor substrate is disclosed in which, prior to forming an epitaxial growth layer on a silicon carbide substrate with an off-axis angle of 1° to 8°, parallel line-shape irregularities, which have an irregularity cross-sectional aspect ratio equal to or greater than the tangent of the off-axis angle of the silicon carbide substrate, are formed in the substrate surface. The irregularites have a height between 0.25 ?m and 5 ?m.
    Type: Application
    Filed: June 13, 2008
    Publication date: December 25, 2008
    Applicant: FUJI ELECTRIC DEVICE TECHNOLOGY CO., LTD.
    Inventors: Yoshiyuki Yonezawa, Takeshi Tawara