Schottky Transistor (epo) Patents (Class 257/E21.374)
  • Patent number: 8410572
    Abstract: A base contact connection, an emitter structure and a collector structure are arranged on an n-layer, which can be provided for additional npn transistors. The collector structure is arranged laterally to the emitter structure and at least one of the emitter and collector comprises a Schottky contact on a surface area of the n-layer.
    Type: Grant
    Filed: October 22, 2009
    Date of Patent: April 2, 2013
    Assignee: EPCOS AG
    Inventor: Léon C. M. van den Oever
  • Patent number: 8183103
    Abstract: A method for manufacturing an integrated circuit structure is disclosed. First, a dielectric layer is formed on a substrate, the substrate has a transistor region and a diode region. Next, a contact hole and an opening are formed in the dielectric layer, a size of the opening being larger than that of the contact hole. Next, a first metal layer is formed on the dielectric layer and filled into the contact hole and the opening. Next, a portion of the first metal layer is removed to form a contact plug above the transistor region and form a metal spacer on a sidewall of the opening. Next, an ion implantation process is performed to form a lightly doped region in the substrate at a bottom of the opening. Finally, a contact metal layer is formed on the lightly doped region.
    Type: Grant
    Filed: March 4, 2010
    Date of Patent: May 22, 2012
    Assignee: United Microelectronics Corp.
    Inventor: Yan-Hsiu Liu
  • Publication number: 20110248375
    Abstract: A base contact connection, an emitter structure and a collector structure are arranged on an n-layer, which can be provided for additional npn transistors. The collector structure is arranged laterally to the emitter structure and at least one of the emitter and collector comprises a Schottky contact on a surface area of the n-layer.
    Type: Application
    Filed: October 22, 2009
    Publication date: October 13, 2011
    Inventor: Léon C. M. Van den Oever
  • Patent number: 8003504
    Abstract: A method for fabrication of a field effect transistor gate, with or without field plates, includes the steps of defining a relatively thin Schottky metal layer by a lithography/metal liftoff or metal deposition/etch process on a semiconductor surface. This is followed by depositing a dielectric passivation layer over the entire wafer and defining a second lithographic pattern coincident with or slightly inset from the boundaries of the previously defined metal gate layer. This is followed by etching the dielectric using dry or wet etching techniques and stripping the resist, followed by exposing and developing a third resist pattern to define the thicker gate metal layers required for electrical conductivity and also for the field plate if one is utilized. The final step is depositing gate and/or field plate metal, resulting in a gate electrode and an integral field plate.
    Type: Grant
    Filed: August 31, 2007
    Date of Patent: August 23, 2011
    Assignees: BAE Systems Information and Electronic Systems Integration Inc., Biogen IDEC MA Inc.
    Inventors: Anthony A. Immorlica, Pane-chane Chao, Kanin Chu
  • Patent number: 7928480
    Abstract: A semiconductor device has a semiconductor layer, and a first electrode (Schottky electrode or MIS electrode) and a second electrode (ohmic electrode) which are formed on the semiconductor layer apart from each other. The first electrode has a cross section in the shape of a polygon. A second electrode-side corner of the polygon has an interior angle of which an outward extension line of a bisector crosses the semiconductor layer or the second electrode. The interior angle of such a second electrode-side corner is larger than 90°.
    Type: Grant
    Filed: November 30, 2006
    Date of Patent: April 19, 2011
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Masaharu Yamashita, John Kevin Twynam
  • Patent number: 7829448
    Abstract: Disclosed herein are a structure of a metal oxide semiconductor pseudomorphic high electron mobility transistor (MOS-PHEMT) suitable for use in a semiconductor device, such as a single-pole-double-throw (SPDT) switch of a monolithic microwave integrated circuit (MMIC); and a method of producing the same. The MOS-PHEMT structure is characterized in having a gate dielectric layer formed by atomic deposition from a gate dielectric selected from the group consisting of Al2O3, HfO2, La2O3, and ZrO2, and thereby rendering the semiconductor structure comprising the same, such as a high frequency switch device, to have less DC power loss, less insertion loss and better isolation.
    Type: Grant
    Filed: October 7, 2009
    Date of Patent: November 9, 2010
    Assignee: National Chiao Tung University
    Inventors: Edward Yi. Chang, Yun-Chi Wu, Yueh-Chin Lin
  • Patent number: 7646043
    Abstract: A unit cell of a metal-semiconductor field-effect transistor (MESFET) is provided. The MESFET has a source, a drain and a gate. The gate is between the source and the drain and on an n-type conductivity channel layer. A p-type conductivity region is provided beneath the gate between the source and the drain. The p-type conductivity region is spaced apart from the n-type conductivity channel layer and electrically coupled to the gate. Related methods are also provided herein.
    Type: Grant
    Filed: September 28, 2006
    Date of Patent: January 12, 2010
    Assignee: Cree, Inc.
    Inventors: Saptharishi Sriram, Matt Willis
  • Patent number: 7605065
    Abstract: Provided are a Schottky barrier tunnel single electron transistor and a method of manufacturing the same that use a Schottky barrier formed between metal and semiconductor by replacing a source and a drain with silicide as a reactant of silicon and metal, instead of a conventional method of manufacturing a single electron transistor (SET) that includes source and drain regions by implanting dopants such that an artificial quantum dot is formed in a channel region. As a result, it does not require a conventional PADOX process to form a quantum dot for a single electron transistor (SET), height and width of a tunneling barrier can be artificially adjusted by using silicide materials that have various Schottky junction barriers, and it is possible to improve current driving capability of the single electron transistor (SET).
    Type: Grant
    Filed: August 16, 2007
    Date of Patent: October 20, 2009
    Assignee: Electronics and Telecommunications Research Institute
    Inventors: Moon Gyu Jang, Yark Yeon Kim, Jae Heon Shin, Seong Jae Lee
  • Patent number: 7586150
    Abstract: A method of manufacturing a local recess channel transistor in a semiconductor device. A hard mask layer is formed on a semiconductor substrate that exposes a portion of the substrate. The exposed portion of the substrate is etched using the hard mask layer as an etch mask to form a recess trench. A trench spacer is formed on the substrate along a portion of sidewalls of the recess trench. The substrate along a lower portion of the recess trench is exposed after the trench spacer is formed. The exposed portion of the substrate along the lower portion of the recess trench is doped with a channel impurity to form a local channel impurity doped region surrounding the lower portion of the recess trench. A portion of the local channel impurity doped region surrounding the lower portion of the recess trench is doped with a Vth adjusting impurity to form a Vth adjusting impurity doped region inside the local channel impurity doped region. The width of the lower portion of the recess trench is expanded.
    Type: Grant
    Filed: August 25, 2005
    Date of Patent: September 8, 2009
    Assignee: Samsung Electronic Co., Ltd.
    Inventors: Se-myeong Jang, Yong-chul Oh, Makoto Yoshida