With Insulated Gate (epo) Patents (Class 257/E21.457)
  • Patent number: 9741809
    Abstract: A nonplanar semiconductor device having a semiconductor body formed on an insulating layer of a substrate. The semiconductor body has a top surface opposite a bottom surface formed on the insulating layer and a pair of laterally opposite sidewalls wherein the distance between the laterally opposite sidewalls at the top surface is greater than at the bottom surface. A gate dielectric layer is formed on the top surface of the semiconductor body and on the sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric layer on the top surface and sidewalls of the semiconductor body. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Grant
    Filed: September 16, 2015
    Date of Patent: August 22, 2017
    Assignee: Intel Corporation
    Inventors: Uday Shah, Brian S. Doyle, Justin K. Brask, Robert S. Chau, Thomas A. Letson
  • Patent number: 8999775
    Abstract: A method for fabricating a pixel structure includes the following steps. A patterned semiconductor layer, an insulation layer, and a patterned metal layer are formed on a substrate sequentially. A first inter-layer dielectric (ILD) layer is formed to cover the patterned metal layer. A low temperature annealing process is performed after forming the first ILD layer. A hydrogen plasma treatment process is performed after the low temperature annealing process. A second ILD layer is formed to cover the first ILD layer after the hydrogen plasma treatment process. A third ILD layer is formed to cover the second ILD layer. A source electrode and a drain electrode are formed on the third ILD layer. A passivation layer is formed on the source electrode and the drain electrode. A pixel electrode is formed on the passivation layer. A pixel structure manufactured by the above-mentioned method is also provided.
    Type: Grant
    Filed: May 29, 2013
    Date of Patent: April 7, 2015
    Assignee: AU Optronics Corp.
    Inventors: Ssu-Hui Lu, Ming-Hsien Lee
  • Publication number: 20120001234
    Abstract: An image sensor includes first impurity regions formed in a substrate, second impurity regions formed in the first impurity regions, wherein the second impurity regions has a junction with the first impurity regions, recess patterns formed over the first impurity regions in contact with the second impurity regions, and transfer gates filling the recess patterns.
    Type: Application
    Filed: November 2, 2010
    Publication date: January 5, 2012
    Inventors: Sung-Won LIM, Jin-Woong Kim, Hyo-Seok Lee
  • Patent number: 7993952
    Abstract: A charge transfer device 1 has an P-type region, an N-type well provided to the surficial portion of the P-type region, and transfer electrodes having P-type conductivity, provided over the N-type substrate while placing an insulating film in between.
    Type: Grant
    Filed: May 3, 2010
    Date of Patent: August 9, 2011
    Assignee: Renesas Electronics Corporation
    Inventor: Eiji Matsuyama
  • Patent number: 7723145
    Abstract: A solid-state imaging device includes a semiconductor substrate including: a plurality of light-receptive portions that are arranged one-dimensionally or two-dimensionally; a vertical transfer portion that transfers signal electric charge read out from the light-receptive portions in a vertical direction; a horizontal transfer portion that transfers the signal electric charge transferred by the vertical transfer portion in a horizontal direction; a barrier region adjacent to the horizontal transfer portion, the barrier region letting only surplus electric charge of the horizontal transfer portion pass therethough; a drain region adjacent to the barrier region, into which the surplus electric charge passing through the barrier region is discharged; and an insulation film adjacent to the drain region. A portion of the drain region is located beneath the insulation film.
    Type: Grant
    Filed: November 20, 2008
    Date of Patent: May 25, 2010
    Assignee: Panasonic Corporation
    Inventor: Toshihiro Kuriyama
  • Patent number: 7704809
    Abstract: A silicon-on-insulator chip includes an insulator layer, typically formed over a substrate. A first silicon island with a surface of a first crystal orientation overlies the insulator layer and a second silicon island with a surface of a second crystal orientation also overlies the insulator layer. In one embodiment, the silicon-on-insulator chip also includes a first transistor of a first conduction type formed on the first silicon island, and a second transistor of a second conduction type formed on the second silicon island. For example, the first crystal orientation can be (110) while the first transistor is a p-channel transistor, and the second crystal orientation can be (100) while the second transistor is an n-channel transistor.
    Type: Grant
    Filed: March 18, 2008
    Date of Patent: April 27, 2010
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yee-Chia Yeo, Fu-Liang Yang
  • Publication number: 20080290390
    Abstract: A semiconductor device and a method for manufacturing the same are disclosed. The semiconductor device suitable for preventing a threshold voltage of a recess gate from decreasing due to a voltage of an adjacent storage node comprises a semiconductor substrate having an active region which includes a gate area and a storage node contact area and is recess in the gate area; a device isolation structure formed in the semiconductor substrate to define the active region and having a shield layer therein; a recess gate formed in the gate area of the semiconductor substrate; and a storage node formed to be connected with the storage node contact area of the active region.
    Type: Application
    Filed: September 10, 2007
    Publication date: November 27, 2008
    Applicant: Hynix Semiconductor Inc.
    Inventor: Seon Yong Cha
  • Patent number: 7456066
    Abstract: MOSFET gate structures comprising multiple width offset spacers are provided. A first and a second gate structure are formed on a semiconductor substrate. A pair of first offset spacers are formed adjacent either side of the first gate structure. Each of the first offset spacers comprises a first silicon oxide layer with a first dielectric layer overlying. A pair of second offset spacers are formed adjacent either side of the second gate structure. Each of the second offset spacers comprises a second silicon oxide layer with a second dielectric layer overlying. Ion implanted doped regions are formed in the semiconductor substrate adjacent the first and second offset spacers respectively to form a first and second MOSFET device. A maximum width of each of the first offset spacers is different from that of the second offset spacers. The first silicon oxide layer is thinner than the second silicon oxide layer.
    Type: Grant
    Filed: November 3, 2006
    Date of Patent: November 25, 2008
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Shien-Yang Wu
  • Publication number: 20080237653
    Abstract: A CMOS image sensor includes a pinned photodiode and a transfer gate that are formed using a thick mask that is self-aligned to at least one edge of the polysilicon gate structure to facilitate both the formation of a deep implant and to provide proper alignment between the photodiode implant and the gate. In one embodiment a drain side implant is formed concurrently with the deep n-type implant of the photodiode. After the deep implant, the mask is removed and a shallow p+ implant is formed to complete the photodiode. In another embodiment, the polysilicon is etched to define only a drain side edge, a shallow drain side implant is performed, and then a thick mask is provided and used to complete the gate structure, and is retained during the subsequent high energy implant. Alternatively, the high energy implant is performed prior to the shallow drain side implant.
    Type: Application
    Filed: March 26, 2007
    Publication date: October 2, 2008
    Applicant: Tower Semiconductor Ltd.
    Inventors: Clifford Ian Drowley, David Cohen, Assaf Lahav, Shai Kfir, Naor Inbar, Anatoly Sergienko, Vladimir Korobov
  • Publication number: 20080153196
    Abstract: A method of manufacturing image sensor devices, in which a dielectric protecting layer is formed on a photo-receiving region before a gate of a MOS is formed. Therefore, during the subsequent processes for forming the MOS component, damage to the surface of the photo-receiving region caused by plasma or etching can be avoided, and the dark current is improved. An image sensor device manufactured by the method is also disclosed and characterized in that a part of the gate stacks over the dielectric protecting layer and the surface of the photo-receiving region is smooth to obtain good performance.
    Type: Application
    Filed: March 5, 2008
    Publication date: June 26, 2008
    Inventor: Ching-Hung Kao
  • Patent number: 7368334
    Abstract: A silicon-on-insulator chip includes an insulator layer, typically formed over a substrate. A first silicon island with a surface of a first crystal orientation overlies the insulator layer and a second silicon island with a surface of a second crystal orientation also overlies the insulator layer. In one embodiment, the silicon-on-insulator chip also includes a first transistor of a first conduction type formed on the first silicon island, and a second transistor of a second conduction type formed on the second silicon island. For example, the first crystal orientation can be (110) while the first transistor is a p-channel transistor, and the second crystal orientation can be (100) while the second transistor is an n-channel transistor.
    Type: Grant
    Filed: March 7, 2005
    Date of Patent: May 6, 2008
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yee-Chia Yeo, Fu-Liang Yang
  • Patent number: 7341899
    Abstract: A method of fabricating a thin film transistor is disclosed. The method comprises forming an amorphous silicon layer overlying a substrate. A first heat treatment is then performed to reduce the hydrogen atom concentration of the amorphous silicon layer. Next, the amorphous silicon layer is patterned to form an island-shaped amorphous silicon pattern. An insulating layer is then formed over the island-shaped amorphous silicon pattern followed by forming a gate electrode on the insulating layer. Ions are then implanted into the island-shaped amorphous silicon pattern to form an ion doped region. A heat treatment is then performed to transfer the island-shaped amorphous silicon pattern into an island-shaped polysilicon pattern and simultaneously activate the ion doped region using laser annealing. A passivation layer is formed on the island-shaped polysilicon pattern followed by etching the passivation layer to form openings exposing the ion doped area.
    Type: Grant
    Filed: January 19, 2006
    Date of Patent: March 11, 2008
    Assignee: AU Optronics Corp.
    Inventor: Tien-Chun Huang
  • Patent number: 7294872
    Abstract: PROBLEM To provide a high quality solid state image pickup device. SOLUTION Impurities are implanted into a semiconductor substrate to form vertical transfer channels for transferring electric charges in a first direction and to form a drain near each of the vertical transfer channels via a gate which forms a barrier. A first silicon oxide film, a silicon nitride film and a second silicon oxide film are deposited in this order from the bottom, on the surfaces of the vertical transfer channels, gates and drains. A first layer vertical transfer electrode is formed on the second silicon oxide film above the vertical transfer channel, and an insulating film if formed on the surface of the first layer vertical transfer electrode. The second silicon oxide film and silicon nitride film are etched in such a manner that the silicon nitride film covers the vertical transfer channel and extends above the gate excepting a portion near the drain.
    Type: Grant
    Filed: March 20, 2006
    Date of Patent: November 13, 2007
    Assignee: Fujifilm Corporation
    Inventor: Masanori Nagase
  • Publication number: 20070257282
    Abstract: An image sensor applying a power voltage to a backside of a semiconductor substrate includes a first type semiconductor substrate, a first type semiconductor layer formed on the first type semiconductor substrate, a second type semiconductor layer formed on the first type semiconductor layer, and a power voltage receiver formed on a backside of the first type semiconductor substrate opposite the first type semiconductor layer with respect to the first type semiconductor substrate, wherein the power voltage receiver receives a power voltage from outside and applies the power voltage to the first type semiconductor substrate.
    Type: Application
    Filed: February 8, 2007
    Publication date: November 8, 2007
    Applicant: Samsung Electronics Co, Ltd.
    Inventors: Yo-han Sun, Jong-jin Lee, Bum-suk Kim, Yun-ho Jang, Sae-young Kim, Keun-chan Yuk, Getman Alexander