Schottky Barrier Gate Field-effect Transistor (epo) Patents (Class 257/E27.068)
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Patent number: 11798946Abstract: A Compact FINFET System including a material which forms rectifying junctions with both N or P-type Field Induced Semiconductor, including at least two FINS electrically connected thereto and projecting substantially away therefrom parallel to one another. There further being substantially non-rectifying junctions to the material which forms a rectifying junction with both N or P-type Field Induced Semiconductor, and distal ends of the at least two FINS.Type: GrantFiled: September 8, 2020Date of Patent: October 24, 2023Inventor: James D. Welch
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Patent number: 11522077Abstract: Various embodiments of the present disclosure are directed towards an integrated chip a first undoped layer overlies a substrate. A first barrier layer overlies the first undoped layer and has a first thickness. A first doped layer overlies the first barrier layer and is disposed laterally within an n-channel device region of the substrate. A second barrier layer overlies the first barrier layer and is disposed within a p-channel device region that is laterally adjacent to the n-channel device region. The second barrier layer has a second thickness that is greater than the first thickness. A second undoped layer overlies the second barrier layer. A second doped layer overlies the second undoped layer. The second undoped layer and the second doped layer are disposed within the p-channel device region.Type: GrantFiled: May 27, 2020Date of Patent: December 6, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Man-Ho Kwan, Fu-Wei Yao, Chun Lin Tsai, Jiun-Lei Jerry Yu, Ting-Fu Chang
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Patent number: 10522664Abstract: An electronic device includes a semiconductor layer, a tunneling layer formed of a material including a two-dimensional (2D) material so as to directly contact a certain region of the semiconductor layer, and a metal layer formed on the tunneling layer.Type: GrantFiled: February 26, 2018Date of Patent: December 31, 2019Assignee: Samsung Electronics Co., Ltd.Inventors: Kyungeun Byun, Jisoo Kyoung, Seongjun Park, Hyeonjin Shin, Hyunjae Song, Jaeho Lee
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Patent number: 9418992Abstract: A power cell designed for an RF power amplifier comprises an enhancement MOSFET formed in an P-Well in an P-Substrate and a Schottky MOSFET formed in an N-Well in the same P-Substrate with a horizontal or a vertical channel between the source, drain, and gate electrodes of the Schottky MOSFET. The source node of the enhancement MOSFET and source node of the Schottky MOSFET are connected together to form the power cell.Type: GrantFiled: March 7, 2016Date of Patent: August 16, 2016Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jun-De Jin, Tzu-Jin Yeh, Chewn-Pu Jou
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Patent number: 8680587Abstract: The present disclosure generally relates to a Schottky diode that has a substrate, a drift layer provided over the substrate, and a Schottky layer provided over an active region of the drift layer. The metal for the Schottky layer and the semiconductor material for the drift layer are selected to provide a low barrier height Schottky junction between the drift layer and the Schottky layer.Type: GrantFiled: September 11, 2011Date of Patent: March 25, 2014Assignee: Cree, Inc.Inventors: Jason Patrick Henning, Qingchun Zhang, Sei-Hyung Ryu, Anant Agarwal, John Williams Palmour, Scott Allen
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Patent number: 8618582Abstract: Elements of an edge termination structure, such as multiple concentric guard rings, are effectively doped regions in a drift layer. To increase the depth of these doped regions, individual recesses may be formed in a surface of the drift layer where the elements of the edge termination structure are to be formed. Once the recesses are formed in the drift layer, these areas about and at the bottom of the recesses are doped to form the respective edge termination elements.Type: GrantFiled: September 11, 2011Date of Patent: December 31, 2013Assignee: Cree, Inc.Inventors: Jason Patrick Henning, Qingchun Zhang, Sei-Hyung Ryu, Anant Agarwal, John Williams Palmour, Scott Allen
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Patent number: 8604568Abstract: A method for forming a stacked integrated circuit package of primary dies on a carrier die, includes forming electrically conductive pillars at connection pads defined on an active face of a carrier wafer incorporating carrier integrated circuits, the electrically conductive pillars providing electrical connections to said carrier integrated circuits; attaching primary dies to the active face of the carrier wafer, each supporting electrically conductive pillars at connection pads defined on an active face of the primary die; encapsulating the active face of the carrier wafer and the primary dies attached thereto in an insulating material; producing a wafer package by removing a thickness of the insulating layer sufficient to expose the electrically conductive pillars; and singulating the carrier wafer to form stacked integrated circuit packages, each package comprising at least one primary die on a carrier die.Type: GrantFiled: November 28, 2011Date of Patent: December 10, 2013Assignee: Cambridge Silicon Radio LimitedInventor: Simon Jonathan Stacey
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Patent number: 8450798Abstract: A monolithically integrated trench FET and Schottky diode includes a plurality of trenches extending into a FET region and a Schottky region of a semiconductor layer. A trench in the Schottky region includes a dielectric layer lining the trench sidewalls, and a conductive electrode having a top surface that is substantially coplanar with a top surface of the semiconductor layer adjacent the trench. An interconnect layer electrically contacts the top surface of the semiconductor layer adjacent the trench so as to form a Schottky contact with the top surface of the semiconductor layer adjacent the trench. A surface of the semiconductor layer in the Schottky region is lower relative to a surface of the semiconductor layer in the FET region.Type: GrantFiled: October 21, 2011Date of Patent: May 28, 2013Assignee: Fairchild Semiconductor CorporationInventor: Fred Session
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Patent number: 8384181Abstract: A power diode having a silicon mesa atop the drift region includes a first contact positioned on the silicon mesa. The silicon mesa is highly doped p-type or n-type, and the anode may be formed on the mesa. The mesa may include two separate silicon layers, one of which is a Schottky barrier height layer. Under a forward bias, the silicon mesa provides carriers to achieve desirable forward current characteristics. The substrate has a significantly reduced thickness. The diode achieves reverse voltage blocking capability by implanting junction barrier Schottky wells within the body of the diode. The diode utilizes a deeper portion of the drift region to support the reverse bias. The method of forming the diode with a silicon mesa includes forming the mesa within a window on the diode or by thermally or mechanically bonding the silicon layer to the drift region.Type: GrantFiled: February 9, 2007Date of Patent: February 26, 2013Assignee: Cree, Inc.Inventors: Qingchun Zhang, Sei-Hyung Ryu
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Publication number: 20120241819Abstract: There are disclosed herein various implementations of composite III-nitride semiconductor devices having turn-on prevention control. In one exemplary implementation, a normally OFF composite semiconductor device comprises a normally ON III-nitride power transistor and a low voltage (LV) device cascoded with the normally ON III-nitride power transistor to form the normally OFF composite semiconductor device. The LV device is configured to have a noise-resistant threshold voltage to provide the turn-on prevention control for the normally OFF composite semiconductor device by preventing noise current from flowing through a channel of the normally ON III-nitride power transistor in a noisy system.Type: ApplicationFiled: March 8, 2012Publication date: September 27, 2012Applicant: INTERNATIONAL RECTIFIER CORPORATIONInventor: Jason Zhang
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Patent number: 8227867Abstract: A portion of a top semiconductor layer of a semiconductor-on-insulator (SOI) substrate is patterned into a semiconductor fin having substantially vertical sidewalls. A portion of a body region of the semiconductor fin is exposed on a top surface of the semiconductor fin between two source regions having a doping of a conductivity type opposite to the body region of the semiconductor fin. A metal semiconductor alloy portion is formed directly on the two source regions and the top surface of the exposed body region between the two source regions. The doping concentration of the exposed top portion of the body region may be increased by ion implantation to provide a low-resistance contact to the body region, or a recombination region having a high-density of crystalline defects may be formed. A hybrid surface semiconductor-on-insulator (HSSOI) metal-oxide-semiconductor-field-effect-transistor (MOSFET) thus formed has a body region that is electrically tied to the source region.Type: GrantFiled: December 23, 2008Date of Patent: July 24, 2012Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Edward J. Nowak
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Patent number: 8183558Abstract: A compound semiconductor device includes a compound semiconductor substrate; epitaxially grown layers formed over the compound semiconductor substrate and including a channel layer and a resistance lowering cap layer above the channel layer; source and drain electrodes in ohmic contact with the channel layer; recess formed by removing the cap layer between the source and drain electrodes; a first insulating film formed on an upper surface of the cap layer and having side edges at positions retracted from edges, or at same positions as the edges of the cap layer in a direction of departing from the recess; a second insulating film having gate electrode opening and formed covering a semiconductor surface in the recess and the first insulating film; and a gate electrode formed on the recess via the gate electrode opening.Type: GrantFiled: February 8, 2011Date of Patent: May 22, 2012Assignee: Fujitsu LimitedInventors: Kozo Makiyama, Tsuyoshi Takahashi
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Patent number: 8174048Abstract: A III-nitride device includes a recessed electrode to produce a nominally off, or an enhancement mode, device. By providing a recessed electrode, a conduction channel formed at the interface of two III-nitride materials is interrupted when the electrode contact is inactive to prevent current flow in the device. The electrode can be a schottky contact or an insulated metal contact. Two ohmic contacts can be provided to form a rectifier device with nominally off characteristics. The recesses formed with the electrode can have sloped sides. The electrode can be formed in a number of geometries in conjunction with current carrying electrodes of the device. A nominally on device, or pinch resistor, is formed when the electrode is not recessed. A diode is also formed by providing non-recessed ohmic and schottky contacts through an insulator to an AlGaN layer.Type: GrantFiled: January 21, 2005Date of Patent: May 8, 2012Assignee: International Rectifier CorporationInventor: Robert Beach
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Publication number: 20120098038Abstract: A semiconductor device includes a high-side field-effect transistor including a high-side drain electrode, a high-side gate electrode, and a high-side source electrode; and a first low-side field-effect transistor including a first low-side drain electrode, a first low-side gate electrode and a first low-side source electrode, wherein the high-side source electrode and the first low-side drain electrode are shared as a single source and drain electrode, and the high-side drain electrode, the high-side gate electrode, the source and drain electrode, the first low-side gate electrode and the first low-side source electrode are arranged in this order while being interposed by gaps, respectively.Type: ApplicationFiled: June 15, 2011Publication date: April 26, 2012Applicant: FUJITSU SEMICONDUCTOR LIMITEDInventor: Ken SHONO
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Publication number: 20120074470Abstract: An undoped AlGaN layer 13 is formed on a buffer layer composed of a GaN series material formed on a semiconductor substrate, a drain electrode 15 and a source electrode 16 forming ohmic junction with the undoped AlGaN layer 13 are formed separately from each other on the undoped AlGaN layer 13. A gate electrode 17 composed of metal Ni and Au laminated in this order is formed between the drain electrodes 15 and the source electrode 16 on the undoped AlGaN layer 13. The end portion 17-2 of the gate electrode 17 is formed on the underlying metal 18 formed by a metal containing Ti via an insulating film 14 on a GaN buffer layer 12 surrounding the undoped AlGaN layer 13.Type: ApplicationFiled: November 30, 2011Publication date: March 29, 2012Applicant: Kabushiki Kaisha ToshibaInventor: Hisao KAWASAKI
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Patent number: 8138033Abstract: A semiconductor component that includes a Schottky device, an edge termination structure, a non-Schottky semiconductor device, combinations thereof and a method of manufacturing the semiconductor component. A semiconductor material includes a first epitaxial layer disposed on a semiconductor substrate and a second epitaxial layer disposed on the first epitaxial layer. The second epitaxial layer has a higher resistivity than the semiconductor substrate. A Schottky device and a non-Schottky semiconductor device are manufactured from the second epitaxial layer. In accordance with another embodiment, a semiconductor material includes an epitaxial layer disposed over a semiconductor substrate. The epitaxial layer has a higher resistivity than the semiconductor substrate. A doped region is formed in the epitaxial layer. A Schottky device and a non-Schottky semiconductor device are manufactured from the epitaxial layer.Type: GrantFiled: May 9, 2007Date of Patent: March 20, 2012Assignee: Semiconductor Components Industries, LLCInventors: Zia Hossain, Francine Y. Robb, Prasad Venkatraman
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Patent number: 8125008Abstract: A Schottky device and a semiconductor process of making the same are provided. The Schottky device comprises a substrate, a deep well, a Schottky contact, and an Ohmic contact. The substrate is doped with a first type of ions. The deep well is doped with a second type of ions, and formed in the substrate. The Schottky contact contacts a first electrode with the deep well. The Ohmic contact contacts a second electrode with a heavily doped region with the second type of ions in the deep well. Wherein the deep well has a geometry gap with a width formed under the Schottky contact, the first type of ions and the second type of ions are complementary, and the width of the gap adjusts the breakdown voltage.Type: GrantFiled: November 17, 2006Date of Patent: February 28, 2012Assignee: System General CorporationInventors: Chiu-Chih Chiang, Chih-Feng Huang, You-Kuo Wu, Long Shih Lin
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Patent number: 8067788Abstract: A semiconductor device includes a substrate common to a first field effect transistor and a second field effect transistor, a channel layer of a first conductivity type formed on the substrate and common to the first and second field effect transistors, a an upper compound semiconductor layer formed on the channel layer and common to the first and second field effect transistors, a compound semiconductor region of a second conductivity type formed in the same layer as the upper compound semiconductor layer, a gate electrode of the first field effect transistor in ohmic contact with the compound semiconductor region, and a gate electrode of the second field effect transistor in Schottky contact with the upper compound semiconductor layer.Type: GrantFiled: April 2, 2008Date of Patent: November 29, 2011Assignee: Renesas Electronics CorporationInventor: Yasunori Bito
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Patent number: 8049223Abstract: A junction FET having a large gate noise margin is provided. The junction FET comprises an n? layer forming a drift region of the junction FET formed over a main surface of an n+ substrate made of silicon carbide, a p+ layer forming a gate region formed in contact with the n? layer forming the drift region and a gate electrode provided in an upper layer of the n+ substrate. The junction FET further incorporates pn diodes formed over the main surface of the n+ substrate and electrically connecting the p+ layer forming the gate region and the gate electrode.Type: GrantFiled: May 25, 2008Date of Patent: November 1, 2011Assignee: Renesas Electronics CorporationInventors: Haruka Shimizu, Hidekatsu Onose
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Publication number: 20110227089Abstract: Semiconductor Schottky barrier devices include a wide bandgap semiconductor layer, a Schottky barrier metal layer on the wide bandgap semiconductor layer and forming a Schottky junction, a current spreading layer on the Schottky barrier metal layer remote from the wide bandgap semiconductor layer and two or more diffusion barrier layers between the current spreading layer and the Schottky barrier metal layer. The first diffusion barrier layer reduces mixing of the current spreading layer and the second diffusion barrier layer at temperatures of the Schottky junction above about 300° C. and the second diffusion barrier layer reduces mixing of the first diffusion barrier layer and the Schottky barrier metal layer at the temperatures of the Schottky junction above about 300° C.Type: ApplicationFiled: March 17, 2010Publication date: September 22, 2011Inventors: Van Mieczkowski, Helmut Hagleitner, Zoltan Ring
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Patent number: 7928480Abstract: A semiconductor device has a semiconductor layer, and a first electrode (Schottky electrode or MIS electrode) and a second electrode (ohmic electrode) which are formed on the semiconductor layer apart from each other. The first electrode has a cross section in the shape of a polygon. A second electrode-side corner of the polygon has an interior angle of which an outward extension line of a bisector crosses the semiconductor layer or the second electrode. The interior angle of such a second electrode-side corner is larger than 90°.Type: GrantFiled: November 30, 2006Date of Patent: April 19, 2011Assignee: Sharp Kabushiki KaishaInventors: Masaharu Yamashita, John Kevin Twynam
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Publication number: 20110079845Abstract: A monolithically integrated trench FET and Schottky diode includes a plurality of trenches extending into a FET region and a Schottky region of a semiconductor layer. A trench in the Schottky region includes a dielectric layer lining the trench sidewalls, and a conductive electrode having a top surface that is substantially coplanar with a top surface of the semiconductor layer adjacent the trench. An interconnect layer electrically contacts the semiconductor layer in the Schottky region so as to form a Schottky contact with the semiconductor layer.Type: ApplicationFiled: June 7, 2010Publication date: April 7, 2011Inventor: Fred Session
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Patent number: 7875950Abstract: In one embodiment, a semiconductor structure comprises a multi-portioned guard ring that includes a first portion and a second portion formed in a region of semiconductor material. A conductive contact layer forms a first Schottky barrier with the region of semiconductor material. The conductive contact layer overlaps the second portion and forms a second Schottky barrier that has an opposite polarity to the first Schottky barrier. The conductive contact layer does not overlap the first portion, which forms a pn junction with the region of semiconductor material.Type: GrantFiled: March 8, 2007Date of Patent: January 25, 2011Assignee: Semiconductor Components Industries, LLCInventors: Shanghui L. Tu, Fumika Kuramae
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Patent number: 7855098Abstract: A technique for altering or repairing the operating state of a semiconductor device comprises field-controlled diffusion of mobile dopant atoms within the metal oxide crystal lattice. When heated (e.g., above 550 K) in the presence of an electric field (e.g., bias to ground of +/?50 V) the dopant atoms are caused to collect to form an ohmic contact, leaving a depletion region. Metal-semiconductor junction devices such as diodes, photo-diodes, photo-detectors, MESFETs, etc. may thereby be fabricated, repaired or modified.Type: GrantFiled: May 10, 2010Date of Patent: December 21, 2010Assignee: Palo Alto Research Center IncorporatedInventors: Peter Kiesel, Oliver Schmidt
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Patent number: 7851831Abstract: A transistor includes a nitride semiconductor layer and a gate electrode layer. The gate electrode layer includes a tantalum nitride layer on the nitride semiconductor layer. The tantalum nitride layer forms a Schottky junction with the nitride semiconductor layer. The transistor also includes an insulating film on the nitride semiconductor layer. The insulating film surrounds the gate electrode layer. A first portion of the gate electrode layer, in contact with the nitride semiconductor layer, has a higher nitrogen mole fraction than a second portion of the gate electrode layer.Type: GrantFiled: September 24, 2007Date of Patent: December 14, 2010Assignee: Mitsubishi Electric CorporationInventors: Hidetoshi Koyama, Yoshitaka Kamo, Toshihiko Shiga
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Patent number: 7838330Abstract: A technique for creating high quality Schottky barrier devices in doped (e.g., Li+) crystalline metal oxide (e.g., ZnO) comprises field-controlled diffusion of mobile dopant atoms within the metal oxide crystal lattice. When heated (e.g., above 550 K) in the presence of an electric field (e.g., bias to ground of +/?50 V) the dopant atoms are caused to collect to form an ohmic contact, leaving a depletion region. The size of the depletion region controls the thickness of the Schottky barrier. Metal-semiconductor junction devices such as diodes, photo-diodes, photo-detectors, MESFETs, etc. may thereby be fabricated.Type: GrantFiled: May 10, 2010Date of Patent: November 23, 2010Assignee: Palo Alto Research Center IncorporatedInventors: Peter Kiesel, Oliver Schmidt
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Patent number: 7821075Abstract: A CMOS device and method of manufacture is provided for producing an integrated circuit that is not susceptible to various soft errors such as single-event upsets, multi-bit upsets or single-event latchup. The CMOS device and method utilizes a new and novel well architecture in conjunction with metal source/drain electrodes to eliminate soft errors. In one embodiment, the CMOS device uses a first metal source/drain material for the NMOS device and a second metal source/drain material for the PMOS device. The CMOS device further uses a multi-layered well-structure with a shallow N-well and a buried P-well for the PMOS device and a shallow P-well and a buried N-well for the NMOS device.Type: GrantFiled: October 12, 2006Date of Patent: October 26, 2010Assignee: Avolare 2, LLCInventors: John P. Snyder, John M. Larson
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Patent number: 7759759Abstract: An integrated circuit includes a high voltage NPN bipolar transistor and a low voltage device. The NPN bipolar transistor includes a lightly doped p-well as the base region of the transistor while the low voltage devices are built using standard, more heavily doped p-wells. By using a process including a lightly doped p-well and a standard p-well, high and low voltage devices can be integrated onto the same integrated circuit. In one embodiment, the lightly doped p-well and the standard p-well are formed by performing ion implantation using a first dose to form the lightly doped p-well, masking the lightly doped p-well, and performing ion implantation using a second dose to form the standard p-well. The second dose is the difference of the dopant concentrations of the lightly doped p-well and the standard p-well. Other high voltage devices can also be built by incorporating the lightly doped p-well structure.Type: GrantFiled: July 25, 2005Date of Patent: July 20, 2010Assignee: Micrel IncorporatedInventor: Hideaki Tsuchiko
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Patent number: 7754550Abstract: The gate oxide in the trenches of a trench type Schottky device are formed by oxidizing a layer of polysilicon deposited in trenches of a silicon or silicon carbide substrate. A small amount of the substrate is also oxidized to create a good interface between the substrate and the oxide layer which is formed. The corners of the trench are rounded by the initial formation and removal of a sacrificial oxide layer.Type: GrantFiled: July 6, 2004Date of Patent: July 13, 2010Assignee: International Rectifier CorporationInventors: Davide Chiola, Zhi He
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Controlled Growth of a Nanostructure on a Substrate, and Electron Emission Devices Based on the Same
Publication number: 20100171093Abstract: The present invention provides for an array of nanostructures grown on a conducting substrate. The array of nanostructures as provided herein is suitable for manufacturing electronic devices such as an electron beam writer, and a field emission device.Type: ApplicationFiled: March 16, 2010Publication date: July 8, 2010Applicant: SMOLTEK ABInventor: Mohammad Shafiqul Kabir -
Patent number: 7692222Abstract: A semiconductor structure and method wherein a recess is disposed in a surface portion of a semiconductor structure and a dielectric film is disposed on and in contract with the semiconductor. The dielectric film has an aperture therein. Portions of the dielectric film are disposed adjacent to the aperture and overhang underlying portions of the recess. An electric contact has first portions thereof disposed on said adjacent portions of the dielectric film, second portions disposed on said underlying portions of the recess, with portions of the dielectric film being disposed between said first portion of the electric contact and the second portions of the electric contact, and third portions of the electric contact being disposed on and in contact with a bottom portion of the recess in the semiconductor structure. The electric contact is formed by atomic layer deposition of an electrically conductive material over the dielectric film and through the aperture in such dielectric film.Type: GrantFiled: November 7, 2006Date of Patent: April 6, 2010Assignee: Raytheon CompanyInventors: Kamal Tabatabaie, Robert B. Hallock
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Patent number: 7655546Abstract: A depletion mode (D-mode) field effect transistor (FET) is monolithically integrated with an enhancement mode (E-mode) FET in a multi-layer structure. The multi-layer structure includes a channel layer overlaid by a barrier layer overlaid by an ohmic contact layer. Source and drain contacts of the D-mode and E-mode FETs are coupled to the ohmic contact layer. A gate contact of the D-mode and E-mode FETs is coupled to the barrier layer. An amorphized region is provided beneath the E-mode gate contact within the barrier layer. The amorphized region forms a buried E-mode Schottky contact with the barrier layer. An alternative embodiment couples the gate contact of the D-mode transistor to a first layer that overlies the barrier layer, and provides a similar D-mode amorphized region within the first layer.Type: GrantFiled: October 11, 2005Date of Patent: February 2, 2010Assignee: TriQuint Semiconductor, Inc.Inventor: Walter Anthony Wohlmuth
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Patent number: 7651905Abstract: An apparatus and method for the reduction of gate leakage in deep sub-micron metal oxide semiconductor (MOS) transistors, especially useful for those used in a cross coupled static random access memory (SRAM) cell, is disclosed. In accordance with the invention, the active element of the SRAM cell is used to reduce the voltage on the gate of its transistor without impacting the switching speed of the circuit. Because the load on the output of the inverter is fixed, a reduction in the gate current is optimized to minimize the impact on the switching waveform of the memory cell. An active element formed by two materials with different Fermi potentials is used as a rectifying junction or diode. The rectifying junction also has a large parallel leakage path, which allows a finite current flow when a signal of opposite polarity is applied across this device.Type: GrantFiled: April 19, 2005Date of Patent: January 26, 2010Assignee: Semi Solutions, LLCInventor: Ashok Kumar Kapoor
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Patent number: 7633135Abstract: This invention discloses a bottom-anode Schottky (BAS) diode that includes an anode electrode disposed on a bottom surface of a semiconductor substrate. The bottom-anode Schottky diode further includes a sinker dopant region disposed at a depth in the semiconductor substrate extending substantially to the anode electrode disposed on the bottom surface of the semiconductor and the sinker dopant region covered by a buried Schottky barrier metal functioning as an Schottky anode.Type: GrantFiled: July 22, 2007Date of Patent: December 15, 2009Assignee: Alpha & Omega Semiconductor, Ltd.Inventor: François Hébert
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Patent number: 7612426Abstract: A Schottky barrier diode includes a first semiconductor layer and a second semiconductor layer successively formed above a semiconductor substrate with a buffer layer formed between the first and second semiconductor layers and the semiconductor substrate. A Schottky electrode and an ohmic electrode spaced from each other are formed on the second semiconductor layer, and a back face electrode is formed on the back face of the semiconductor substrate. The Schottky electrode or the ohmic electrode is electrically connected to the back face electrode through a via penetrating through at least the buffer layer.Type: GrantFiled: November 15, 2005Date of Patent: November 3, 2009Assignee: Panasonic CorporationInventors: Manabu Yanagihara, Yasuhiro Uemoto, Tsuyoshi Tanaka, Daisuke Ueda
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Patent number: 7608907Abstract: An improved diode is disclosed. The diode comprises a Schottky diode and a LDMOS device coupled in series with the Schottky diode. In a preferred embodiment, a forward current from the Schottky diode is allowed to flow through the channel of a depletion mode LDMOS that allows gate control over Schottky forward current. Integrating the Schottky diode into the drain of the depletion mode LDMOS forms the device structure.Type: GrantFiled: January 6, 2005Date of Patent: October 27, 2009Assignee: Micrel, Inc.Inventor: Shekar Mallikarjunaswamy
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Patent number: 7518208Abstract: A semiconductor device has a first region and a second region formed on a surface of a substrate. Plural first conductors and second conductors are formed in the first and second regions respectively. A first semiconductor region and a second semiconductor region are formed between adjacent first conductors. The second semiconductor region is in the first semiconductor region and has a conductivity type opposite to that of the first semiconductor. A third semiconductor region is formed between adjacent second conductors. The third semiconductor region has the same conductivity type as the second semiconductor region and is lower in density than the second semiconductor region. The third semiconductor region has a metal contact region for contact with a metal, which is electrically connected to the second semiconductor region. A center-to-center distance between adjacent first conductors is smaller than that between adjacent second conductors.Type: GrantFiled: July 10, 2006Date of Patent: April 14, 2009Assignee: Renesas Technology Corp.Inventors: Nobuyuki Shirai, Nobuyoshi Matsuura, Yoshito Nakazawa
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Patent number: 7510953Abstract: A semiconductor device including a schottky device and a trench type semiconductor switching device such as a MOSFET formed in a common die.Type: GrantFiled: October 21, 2005Date of Patent: March 31, 2009Assignee: International Rectifier CorporationInventors: Donald He, Ritu Sodhi, Davide Chiola
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Structures and methods for forming Schottky diodes on a P-substrate or a bottom anode Schottky diode
Publication number: 20090039456Abstract: This invention discloses bottom-anode Schottky (BAS) device supported on a semiconductor substrate having a bottom surface functioning as an anode electrode with an epitaxial layer has a same doped conductivity as said anode electrode overlying the anode electrode. The BAS device further includes an Schottky contact metal disposed in a plurality of trenches and covering a top surface of the semiconductor substrate between the trenches. The BAS device further includes a plurality of doped JBS regions disposed on sidewalls and below a bottom surface of the trenches doped with an opposite conductivity type from the anode electrode constituting a junction barrier Schottky (JBS) with the epitaxial layer disposed between the plurality of doped JBS regions. The BAS device further includes an ultra-shallow Shannon implant layer disposed immediate below the Schottky contact metal in the epitaxial layer between the plurality of doped JBS regions.Type: ApplicationFiled: August 8, 2007Publication date: February 12, 2009Inventors: Anup Bhalla, Sik K. Lui, Yi Su -
Publication number: 20080308838Abstract: In an embodiment, a integrated semiconductor device includes a first Vertical Junction Field Effect Transistor (VJFET) having a source, and a gate disposed on each side of the first VJFET source, and a second VJFET transistor having a source, and a gate disposed on each side of the second VJFET source. At least one gate of the first VJFET is separated from at least one gate of the second VJFET by a channel. The integrated semiconductor device also includes a Junction Barrier Schottky (JBS) diode positioned between the first and second VJFETs. The JBS diode comprises a metal contact that forms a rectifying contact to the channel and a non-rectifying contact to at least one gate of the first and second VJFETs, and the metal contact is an anode of the JBS diode.Type: ApplicationFiled: June 13, 2007Publication date: December 18, 2008Inventors: Ty R. McNutt, Eric J. Stewart, Rowland C. Clarke, Ranbir Singh, Stephen Van Campen, Marc E. Sherwin
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Publication number: 20080277694Abstract: A semiconductor component that includes a Schottky device, an edge termination structure, a non-Schottky semiconductor device, combinations thereof and a method of manufacturing the semiconductor component. A semiconductor material includes a first epitaxial layer disposed on a semiconductor substrate and a second epitaxial layer disposed on the first epitaxial layer. The second epitaxial layer has a higher resistivity than the semiconductor substrate. A Schottky device and a non-Schottky semiconductor device are manufactured from the second epitaxial layer. In accordance with another embodiment, a semiconductor material includes an epitaxial layer disposed over a semiconductor substrate. The epitaxial layer has a higher resistivity than the semiconductor substrate. A doped region is formed in the epitaxial layer. A Schottky device and a non-Schottky semiconductor device are manufactured from the epitaxial layer.Type: ApplicationFiled: May 9, 2007Publication date: November 13, 2008Inventors: Zia Hossain, Francine Y. Robb, Prasad Venkatraman
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Publication number: 20080210989Abstract: A semiconductor device includes a p-type semiconductor layer made of a compound semiconductor provided on a substrate, a compound semiconductor layer provided on the p-type semiconductor layer, active regions that are provided on the compound semiconductor layer and are adjacent to each other across an isolation region, a connecting portion that is connected to the p-type semiconductor layer in the isolation region located between the active regions or a region adjacent to another region between the active regions, and FETs respectively provided in the active regions adjacent to each other, a source electrode of at least one of the FETs being connected to a potential of the connecting portion in a region other than the active regions.Type: ApplicationFiled: January 28, 2008Publication date: September 4, 2008Applicant: EUDYNA DEVICES INC.Inventor: Kohei NAITO
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Publication number: 20080191304Abstract: A power diode having a silicon mesa atop the drift region includes a first contact positioned on the silicon mesa. The silicon mesa is highly doped p-type or n-type, and the anode may be formed on the mesa. The mesa may include two separate silicon layers, one of which is a Schottky barrier height layer. Under a forward bias, the silicon mesa provides carriers to achieve desirable forward current characteristics. The substrate has a significantly reduced thickness. The diode achieves reverse voltage blocking capability by implanting junction barrier Schottky wells within the body of the diode. The diode utilizes a deeper portion of the drift region to support the reverse bias. The method of forming the diode with a silicon mesa includes forming the mesa within a window on the diode or by thermally or mechanically bonding the silicon layer to the drift region.Type: ApplicationFiled: February 9, 2007Publication date: August 14, 2008Applicant: Cree, Inc.Inventors: Qingchun Zhang, Sei-Hyung Ryu
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Patent number: 7402852Abstract: A charge coupled device (CCD) is disclosed which has a semiconductor body (20) comprising polymer or oligomer semiconductor material in place of the conventional silicon. A back electrode (22) of the device is electrically coupled to the semi-conductor body through a Schottky junction, reducing the availability of holes in the semiconductor body. Shift electrodes forming a shift register are driven by negative electrical potentials and accumulations of holes in p type semiconductor material represent data.Type: GrantFiled: December 16, 2004Date of Patent: July 22, 2008Assignee: The University of LiverpoolInventor: William Eccleston
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Publication number: 20080135889Abstract: A monolithically integrated trench FET and Schottky diode includes a plurality of trenches extending into a FET region and a Schottky region of a semiconductor layer. A trench in the Schottky region includes a dielectric layer lining the trench sidewalls, and a conductive electrode having a top surface that is substantially coplanar with a top surface of the semiconductor layer adjacent the trench. An interconnect layer electrically contacts the semiconductor layer in the Schottky region so as to form a Schottky contact with the semiconductor layer.Type: ApplicationFiled: May 11, 2007Publication date: June 12, 2008Inventor: Fred Session
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Publication number: 20070278519Abstract: The invention relates to a transistor structure with both enhancement and depletion mode transistors. In order to allow good control over the manufacture of both transistors, a first Schottky layer (10) and a second Schottky layer (12) are used made of first and second semiconductor materials respectively. The first and second materials having band gaps of at least 0.5V. For an n-type transistor the second Schottky layer has a low conduction band discontinuity with the first Schottky layer. Both the first and the second Schottky layers are used as etch stops in the method for making the transistor. The transistor is preferably a HEMT.Type: ApplicationFiled: September 22, 2005Publication date: December 6, 2007Applicant: KONINKLIJKE PHILIPS ELECTRONICS, N.V.Inventors: Pierre Baudet, Hassan Maher
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Patent number: 7195996Abstract: A manufacturing method for forming a region into which impurity ions are implanted, and an electrode is coupled to the region, in a self-aligned manner. An oxide film is formed on an n-type semiconductor layer composed of a silicon carbide semiconductor, and then the oxide film on regions in which source and drain regions are to be formed is removed by etching. Impurity ions are implanted into an exposed semiconductor layer and heat treatment is performed for activating the implanted impurity ions. A metal film to serve as ohmic electrodes is formed on the entire surface, and then the oxide film is removed by etching to thereby form a source electrode and a drain electrode. Leaving a part of the oxide film on regions on which source and drain electrodes are to be formed can prevent the oxide film from being deformed during the heat treatment for activation.Type: GrantFiled: August 9, 2005Date of Patent: March 27, 2007Assignee: New Japan Radio Co., Ltd.Inventors: Manabu Arai, Hiroshi Sawazaki