Of Specified Material (epo) Patents (Class 257/E29.139)

  • Patent number: 9024388
    Abstract: One illustrative method disclosed herein includes forming replacement gate structures for an NMOS transistor and a PMOS transistor by forming gate insulation layers and a first metal layer for the devices from the same materials and selectively forming a metal-silicide material layer only on the first metal layer for the NMOS device but not on the PMOS device. One example of a novel integrated circuit product disclosed herein includes an NMOS device and a PMOS device wherein the gate insulation layers and the first metal layer of the gate structures of the devices are made of the same material, the gate structure of the NMOS device includes a metal silicide material positioned on the first metal layer of the NMOS device, and a second metal layer that is positioned on the metal silicide material for the NMOS device and on the first metal layer for the PMOS device.
    Type: Grant
    Filed: June 17, 2013
    Date of Patent: May 5, 2015
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Kisik Choi, Ruilong Xie
  • Patent number: 8941213
    Abstract: A semiconductor device includes: a spiral-shaped inductor formed to include a metal wire; and a horseshoe-shaped inductor formed to include the metal wire. The horseshoe-shaped inductor is arranged such that an opening of the horseshoe-shaped inductor is disposed opposite to the spiral-shaped inductor. Accordingly, unnecessary wave (spurious) output from a transmitting unit can be reduced as small as possible.
    Type: Grant
    Filed: April 18, 2013
    Date of Patent: January 27, 2015
    Assignee: Renesas Electronics Corporation
    Inventor: Takao Kihara
  • Patent number: 8941123
    Abstract: A structure and method of producing a semiconductor structure including a semi-insulating semiconductor layer, a plurality of isolated devices formed over the semi-insulating semiconductor layer, and a metal-semiconductor alloy region formed in the semi-insulating semiconductor layer, where the metal-semiconductor alloy region electrically connects two or more of the isolated devices.
    Type: Grant
    Filed: May 30, 2013
    Date of Patent: January 27, 2015
    Assignee: International Business Machines Corporation
    Inventors: Guy Cohen, Cyril Cabral, Jr., Anirban Basu, Jr.
  • Patent number: 8872286
    Abstract: A metal gate structure located on a substrate includes a gate dielectric layer, a metal layer and a titanium aluminum nitride metal layer. The gate dielectric layer is located on the substrate. The metal layer is located on the gate dielectric layer. The titanium aluminum nitride metal layer is located on the metal layer.
    Type: Grant
    Filed: August 22, 2011
    Date of Patent: October 28, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Tsun-Min Cheng, Min-Chuan Tsai, Chih-Chien Liu, Jen-Chieh Lin, Pei-Ying Li, Shao-Wei Wang, Mon-Sen Lin, Ching-Ling Lin
  • Patent number: 8823065
    Abstract: The invention relates to a contact structure of a semiconductor device. An exemplary structure for a contact structure for a semiconductor device comprises a substrate comprising a major surface and a trench below the major surface; a strained material filling the trench, wherein a lattice constant of the strained material is different from a lattice constant of the substrate; an inter-layer dielectric (ILD) layer having an opening over the strained material, wherein the opening comprises dielectric sidewalls and a strained material bottom; a semiconductor layer on the sidewalls and bottom of the opening; a dielectric layer on the semiconductor layer; and a metal layer filling an opening of the dielectric layer.
    Type: Grant
    Filed: November 8, 2012
    Date of Patent: September 2, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sung-Li Wang, Ding-Kang Shih, Chin-Hsiang Lin, Sey-Ping Sun, Clement Hsingjen Wann
  • Patent number: 8785939
    Abstract: A pixel electrode is provided, with a nanostructure-film deposited over an active matrix substrate, such that the pixel electrode makes electrical contact with an underlying layer. Similarly, auxiliary data pads and auxiliary gate pads are provided, which also have nanostructure-films deposited over an active matrix substrate, such that they make electrical contact with underlying layers.
    Type: Grant
    Filed: July 16, 2007
    Date of Patent: July 22, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Young-Bae Park, George Gruner, Liangbing Hu
  • Patent number: 8779486
    Abstract: A ferroelectric capacitor includes a ferroelectric film, a lower electrode in contact with one surface of the ferroelectric film, and an upper electrode in contact with the other surface of the ferroelectric film. At least one of the upper electrode and the lower electrode has a stacked electrode structure in which one or more oxide conductive layers and one or more metal layers are stacked alternately, and the stacked electrode structure includes at least one of two or more oxide conductive layers and two or more metal layers.
    Type: Grant
    Filed: June 8, 2012
    Date of Patent: July 15, 2014
    Assignee: Rohm Co., Ltd.
    Inventors: Yoshikazu Fujimori, Hiroaki Ito, Tomohiro Date
  • Patent number: 8749071
    Abstract: A semiconductor device may include a first interlayer dielectric layer including a plurality of contacts, a plurality of interconnection patterns disposed on the first interlayer dielectric layer and connected to the contacts, respectively, and a second interlayer dielectric layer disposed on the first interlayer dielectric layer and covering the interconnection patterns. Each of the interconnection patterns may include a first metal pattern, a second metal pattern disposed on the first metal pattern, a first barrier pattern between the contact and the first metal pattern, and a second barrier pattern between the first metal pattern and the second metal pattern. The second metal pattern may expose a portion of a top surface of the second barrier pattern, and the second interlayer dielectric layer may include an air gap between the interconnection patterns adjacent to each other.
    Type: Grant
    Filed: June 3, 2013
    Date of Patent: June 10, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dong-Sik Park, Sungjin Kim, Seungmo Kang
  • Publication number: 20130264713
    Abstract: Some embodiments include methods of forming conductive structures. An electrically conductive material may be deposited with a first deposition method. The first deposition method has a first deposition rate and forms a first portion of a conductive structure. A second portion of the conductive structure may be formed by depositing the electrically conductive material with a second deposition method having a second deposition rate. The second deposition rate may be different from the first deposition rate by at least about a factor of 3. In some embodiments, a region of the conductive structure is utilized as a transistor gate of a DRAM cell. Some embodiments include semiconductor constructions.
    Type: Application
    Filed: April 10, 2012
    Publication date: October 10, 2013
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Jaydeb Goswami, Hung Ming Tsai, Duane M. Goodner
  • Patent number: 8546885
    Abstract: An integrated circuit fabrication is disclosed, and more particularly a field effect transistor with a low resistance metal gate electrode is disclosed. An exemplary structure for a metal gate electrode of a field effect transistor comprises a lower portion formed of a first metal material, wherein the lower portion has a recess, a bottom portion and sidewall portions, wherein each of the sidewall portions has a first width; and an upper portion formed of a second metal material, wherein the upper portion has a protrusion and a bulk portion, wherein the bulk portion has a second width, wherein the protrusion extends into the recess, wherein a ratio of the second width to the first width is from about 5 to 10.
    Type: Grant
    Filed: July 25, 2011
    Date of Patent: October 1, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Hao Hou, Peng-Soon Lim, Da-Yuan Lee, Xiong-Fei Yu, Chun-Yuan Chou, Fan-Yi Hsu, Jian-Hao Chen, Kuang-Yuan Hsu
  • Publication number: 20130214417
    Abstract: A method of forming a metal silicide region. The method comprises forming a metal material over and in contact with exposed surfaces of a dielectric material and silicon structures protruding from the dielectric material. A capping material is formed over and in contact with the metal material. The silicon structures are exposed to heat to effectuate a multidirectional diffusion of the metal material into the silicon structures to form a first metal silicide material. The capping material and unreacted portions of the metal material are removed. The silicon structures are exposed to heat to substantially convert the first metal silicide material into a second metal silicide material. A method of semiconductor device fabrication, an array of silicon structures, and a semiconductor device structure are also described.
    Type: Application
    Filed: February 21, 2012
    Publication date: August 22, 2013
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Carla M. Lazzari, Enrico Bellandi
  • Patent number: 8507956
    Abstract: Provided are a wire structure, a method for fabricating a wire, a thin film transistor (TFT) substrate and a method for fabricating a TFT substrate. The wire structure includes a barrier layer formed on a substrate and including a copper layer and a copper solid solution layer.
    Type: Grant
    Filed: March 18, 2011
    Date of Patent: August 13, 2013
    Assignee: Samsung Display Co., Ltd.
    Inventors: Je-Hun Lee, Chang-Oh Jeong, Eun-Guk Lee, Do-Hyun Kim
  • Publication number: 20130187171
    Abstract: A method for forming silicide contacts includes forming a dielectric layer on a gate spacer, a gate stack, and a first semiconductor layer. The first semiconductor layer comprises source/drain regions. Contact trenches are formed in the dielectric layer so as to expose at least a portion of the source/drain regions. A second semiconductor layer is formed within the contact trenches. A metallic layer is formed on the second semiconductor layer. An anneal is performed to form a silicide region between the second semiconductor layer and the metallic layer. A conductive contact layer is formed on the metallic layer or the silicide region.
    Type: Application
    Filed: January 23, 2012
    Publication date: July 25, 2013
    Applicants: GLOBALFOUNDRIES Inc., INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Michael A. GUILLORN, Christian LAVOIE, Ghavam G. SHAHIDI, Bin YANG, Zhen ZHANG
  • Patent number: 8399883
    Abstract: The present invention provides a nitrogen-oxide gas sensor that is able to measure nitric oxide and nitrogen dioxide at the same time and ensure measurement accuracy and long stability. For these purposes, the nitrogen-oxide gas sensor includes: an oxide ion conductive solid electrolyte; a primary film that contacts the solid electrolyte and is made of a p-type semi-conductor metal oxide; a secondary film that contacts the solid electrolyte and is made of a p-type semiconductor metal oxide; an n-type semiconductor metal oxide that is included in at least one of the primary and secondary films; a power source that applies electric power to the primary and secondary films by electrically connecting a primary node to the primary film and a secondary node to the secondary film; and a measurement unit that measures the electric potential difference between the primary and secondary nodes.
    Type: Grant
    Filed: September 30, 2009
    Date of Patent: March 19, 2013
    Assignees: Iljin Copper Foil Co., Ltd., Cios Inc.
    Inventors: Jin Su Park, Byung Young Yoon, Jung Won Park, Jung Hwan Cho, Sang Beom Kim
  • Publication number: 20130040422
    Abstract: Formulations and methods of making solar cell contacts and cells therewith are disclosed. The invention provides a photovoltaic cell comprising a front contact, a back contact, and a rear contact. The back contact comprises, prior to firing, a passivating layer onto which is applied a paste, comprising aluminum, a glass component, wherein the aluminum paste comprises, aluminum, another optional metal, a glass component, and a vehicle. The back contact comprises, prior to firing, a passivating layer onto which is applied an aluminum paste, wherein the aluminum paste comprises aluminum, a glass component, and a vehicle.
    Type: Application
    Filed: September 13, 2012
    Publication date: February 14, 2013
    Applicant: FERRO CORPORATION
    Inventors: Nazarali Merchant, Aziz S. Shaikh, Srinivasan Sridharan
  • Publication number: 20120313246
    Abstract: The disclosure relates to integrated circuit fabrication, and more particularly to a semiconductor apparatus with a metallic alloy. An exemplary structure for an apparatus comprises a first silicon substrate; a second silicon substrate; and a contact connecting each of the first and second substrates, wherein the contact comprises a Ge layer adjacent to the first silicon substrate, a Cu layer adjacent to the second silicon substrate, and a metallic alloy between the Ge layer and Cu layer.
    Type: Application
    Filed: June 8, 2011
    Publication date: December 13, 2012
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yi Hsun CHIU, Ting-Ying CHIEN, Ching-Hou SU, Chyi-Tsong NI
  • Publication number: 20120256316
    Abstract: The signal line structure is disposed between a gate driver and a display area of a display. The signal line structure includes a substrate, first metal layers, a first insulation layer, second metal layers, a second insulation layer and third metal layers. The first metal layers are arranged in parallel and toward a first direction in the substrate. The first insulation layer is disposed in the substrate and covers the first metal layers. The second metal layers are disposed on the positions of the first insulation layer corresponding to the first metal layers. The second insulation layer is disposed on the second metal layers and the first insulation layer. The third metal layers are disposed on the positions corresponding to the second metal layers in the second insulation layer. The distance between two adjacent second metal layers is less than that between two adjacent first metal layers.
    Type: Application
    Filed: June 23, 2011
    Publication date: October 11, 2012
    Applicant: E INK HOLDINGS INC.
    Inventors: Wei-Chou LAN, Sung-Hui HUANG, Chia-Chun YEH, Ted-Hong SHINN
  • Patent number: 8247851
    Abstract: A manufacture method is provided for forming a semiconductor device. The method includes: forming a plurality of gate electrodes through etching a conductive film deposited on a semiconductor substrate; forming a first nitride film to cover the gate electrodes; partially exposing the semiconductor substrate in a region between adjacent two of the gate electrodes through performing an etch-back process on the first nitride film; thermally oxidizing a residual of the gate electrode film remaining in the region between the adjacent two of the gate electrodes to change the residual into an thermal oxide film; and forming a contact in the region between the adjacent two of the gate electrodes.
    Type: Grant
    Filed: March 23, 2009
    Date of Patent: August 21, 2012
    Assignee: Renesas Electronics Corporation
    Inventor: Kazuhiro Tasaka
  • Publication number: 20120205809
    Abstract: Embodiments of the invention relate to a silicon semiconductor device, and a conductive thick film composition for use in a solar cell device.
    Type: Application
    Filed: April 24, 2012
    Publication date: August 16, 2012
    Applicant: E I DU PONT DE NEMOURS AND COMPANY
    Inventors: Haixin Yang, Roberto Irizarry, Patricia J. Ollivier
  • Publication number: 20120168755
    Abstract: Disclosed are a transparent electrode including a first light-transmission layer, a metal layer, and a second light-transmission layer sequentially formed, an organic light emitting device including the transparent electrode, and a method of manufacturing the same. The second light-transmission layer includes a conductive oxide and a metal catalyst.
    Type: Application
    Filed: May 16, 2011
    Publication date: July 5, 2012
    Applicant: Samsung Mobile Display Co., Ltd.
    Inventor: Jong-Hyun Choi
  • Publication number: 20120153481
    Abstract: A semiconductor device and a method for manufacturing the same are disclosed, which can prevent a short-circuit between a bit line contact plug and a storage node contact plug, resulting in improved semiconductor device characteristics. A method for manufacturing a semiconductor device includes: forming a bit line contact hole from which an active region is protruded, by etching a semiconductor substrate; forming a conductive material over the semiconductor substrate including the bit line contact hole; etching the conductive material to form a bit line contact plug and a bit line, each of which has a smaller width than the bit line contact hole; and forming a spacer insulation film over the entire surface of the semiconductor substrate including the bit line contact hole, the bit line contact plug, and the bit line.
    Type: Application
    Filed: December 15, 2011
    Publication date: June 21, 2012
    Applicant: Hynix Semiconductor Inc.
    Inventor: Sung Hwan AHN
  • Publication number: 20120153487
    Abstract: A substrate for electron-beam drawing, characterized by including a base layer 20, a first layer 30 formed on the base layer 20 comprising one of Y, Zr, Nb, Mo, Tc, Ru, Rh, Pd, Ag, In, Sn, Sb, La, Ce, Pr, Nd, Pm, Sm, Hf, Re, Os, Ir, Pt, Au, Pb, and Bi, a second layer 40 formed on the first layer 30 comprising one of C and B and having a film-thickness of 100 ?m to 300 ?m, and a resist layer 50 formed above the second layer 40.
    Type: Application
    Filed: February 29, 2012
    Publication date: June 21, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventor: Keiichiro Yusu
  • Publication number: 20120112349
    Abstract: A semiconductor device is disclosed, which reduces the depth of a metal contact so that an etching margin is increased in forming a contact hole. In addition, the semiconductor device and the method for forming the same increase a contact area between a plate electrode and a metal contact so that a power source can be more easily provided to the plate electrode. Thus, a sensing noise is reduced and a process margin is improved, resulting in improvement of device operation characteristics.
    Type: Application
    Filed: November 4, 2011
    Publication date: May 10, 2012
    Applicant: Hynix Semiconductor Inc.
    Inventor: Hyun Jung KIM
  • Publication number: 20120104365
    Abstract: An embodiment relates to an electronic component that may consist of an organic LED or organic solar cell, that comprises at least one substrate, one active layer provided between a first and a second electrode and having an active layer protected from dioxygen and the water vapor of the air by the second electrode that encapsulates the active layer.
    Type: Application
    Filed: July 22, 2009
    Publication date: May 3, 2012
    Applicant: Centre National de la Recherche Scientifique - CNRS
    Inventors: Bernard Ratier, Jean-Michel Nunzi, Andre Moliton, Mohamad Chakaroun
  • Publication number: 20120098136
    Abstract: Structures having a hybrid MEMS RF switch and method of fabricating such structures using existing wiring layers of a device is provided. The method of manufacturing a MEMS switch includes forming a forcing electrode from a lower wiring layer of a device and forming a lower electrode from an upper wiring layer of the device. The method further includes forming a flexible cantilever arm over the forcing electrode and the lower electrode such that upon application of a voltage to the forcing electrode, the flexible cantilever arm will contact the lower electrode to close the MEMS switch.
    Type: Application
    Filed: December 24, 2008
    Publication date: April 26, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Peter J. LINDGREN, Anthony K. STAMPER
  • Publication number: 20120098137
    Abstract: Conventional printed circuit boards had a problem of being inferior in heat-radiation characteristic, and metal-core printed circuit boards adopted to improve the heat-radiation characteristic had problems in having low rigidity and a tendency to bend. The ductility of the metal can be obstructed, and the metal protected; by covering substantially the whole area of the front and back sides of the metal core, consisting of metal as the main material, with a first ceramic film and a second ceramic film that obstruct the ductility of the aforementioned metal-core; and covering each of the ceramic films with insulated resin films, to cover the fragility of these ceramics.
    Type: Application
    Filed: June 30, 2010
    Publication date: April 26, 2012
    Inventors: Ryosuke Usui, Yusuke Igarashi, Yasunori Inoue, Mayumi Nakasato, Masayuki Nagamatsu, Yasuhiro Kohara
  • Publication number: 20120098132
    Abstract: A semiconductor device with a stable structure having high capacitance by changing the pillar type storage node structure and a method of manufacturing the same are provided. The method includes forming a sacrificial layer on a semiconductor substrate including a storage node contact plug, etching the sacrificial layer to form a region exposing the storage node contact plug, forming a first conductive material within an inner side of the region, burying a second conductive material within the region in which the first conductive material is formed, and removing the sacrificial layer to form a pillar type storage node.
    Type: Application
    Filed: October 24, 2011
    Publication date: April 26, 2012
    Applicant: Hynix Semiconductor Inc.
    Inventors: Cheol Hwan PARK, Ho Jin Cho, Dong Kyun Lee
  • Publication number: 20120091453
    Abstract: The invention relates to transparent rectifying contact structures for application in electronic devices, in particular appertaining to optoelectronics, solar technology and sensor technology, and also a method for the production thereof. The transparent rectifying contact structure according to the invention has the following constituents: a) a transparent semiconductor, b) a transparent, non-insulating and non-conducting layer composed of metal oxide, metal sulphide and/or metal nitride, the resistivity of which is preferably in the range of 102 ?cm to 107 ?cm and c) a layer composed of a transparent electrical conductor wherein the layer b) is formed between the semiconductor a) and the layer c) and the composition of the layer b) is defined in greater detail in the description of the patent.
    Type: Application
    Filed: June 21, 2010
    Publication date: April 19, 2012
    Applicant: UNIVERSITAET LEIPZIG
    Inventors: Marius Grundmann, Heiko Frenzel, Alexander Lajn, Holger von Wenckstern
  • Publication number: 20120080798
    Abstract: Annular, linear, and point contact structures are described which exhibit a greatly reduced susceptibility to process deviations caused by lithographic and deposition variations than does a conventional circular contact plug. In one embodiment, a standard conductive material such as carbon or titanium nitride is used to form the contact. In an alternative embodiment, a memory material itself is used to form the contact. These contact structures may be made by various processes, including chemical mechanical planarization and facet etching.
    Type: Application
    Filed: December 12, 2011
    Publication date: April 5, 2012
    Applicant: ROUND ROCK RESEARCH, LLC
    Inventor: Steven T. Harshfield
  • Patent number: 8148231
    Abstract: A semiconductor device and a method of fabricating the same include an electrode having a nickel layer with impurities. The electrode having a nickel layer with impurities can be a gate electrode or a capacitor electrode. The electrode having a nickel layer with impurities may include a combination of a pure nickel layer and a nickel layer with impurities.
    Type: Grant
    Filed: December 24, 2008
    Date of Patent: April 3, 2012
    Assignee: Hynix Semiconductor Inc.
    Inventors: Kwan-Woo Do, Kee-Jeung Lee, Deok-Sin Kil, Young-Dae Kim, Jin-Hyock Kim, Kyung-Woong Park, Jeong-Yeop Lee
  • Publication number: 20120061844
    Abstract: A wiring metal contains a polycrystal of copper (Cu) as a primary element and an additional element other than Cu, and concentration of the additional element is, at crystal grain boundaries composing the Cu polycrystal and in vicinities of the crystal grain boundaries, higher than that of the inside of the crystal grains. The additional element is preferably at least one element selected from a group consisting of Ti, Zr, Hf, Cr, Co, Al, Sn, Ni, Mg, and Ag. This Cu wiring is formed by forming a Cu polycrystalline film, forming an additional element layer on this Cu film, and diffusing this additional element from the additional element layer into the Cu film. This copper alloy for wiring is preferred as metal wiring formed for a semiconductor device.
    Type: Application
    Filed: November 22, 2011
    Publication date: March 15, 2012
    Applicant: NEC CORPORATION
    Inventors: Makoto UEKI, Masayuki HIROI, Nobuyuki IKARASHI, Yoshihiro HAYASHI
  • Publication number: 20120049372
    Abstract: A titanium-nickel-palladium solderable metal system for silicon power semiconductor devices (10), which may be used for one or both of the anode (20) or cathode (30). The metal system includes an outer layer of palladium (40,70), an intermediate layer of nickel (50,80), and an inner layer of titanium (60,90). For certain applications, the nickel may be alloyed with vanadium. The metal system may be deposited on bare silicon (100) or on one or more additional layers of metal (110) which may include aluminum, aluminum having approximately 1% silicon, or metal silicide. The use of palladium, rather than gold or silver, reduces cost, corrosion, and scratching.
    Type: Application
    Filed: August 27, 2010
    Publication date: March 1, 2012
    Inventor: Roman HAMERSKI
  • Publication number: 20120042927
    Abstract: A photovoltaic module may contain a front contact configured to transfer electrical current from the module.
    Type: Application
    Filed: August 19, 2011
    Publication date: February 23, 2012
    Inventor: Chungho Lee
  • Patent number: 8115264
    Abstract: Provided is a semiconductor device that comprises a metal gate having a low sheet resistance characteristic and a high diffusion barrier characteristic and a method of fabricating the metal gate of the semiconductor device. The semiconductor device includes a metal gate formed on a gate insulating film, wherein the metal gate is formed of a metal nitride that contains Al or Si and includes upper and lower portions where the content of Al or Si is relatively high and a central portion where the content of Al or Si is relatively low.
    Type: Grant
    Filed: January 10, 2008
    Date of Patent: February 14, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sung-ho Park, Jin-seo Noh, Joong S. Jeon
  • Publication number: 20120032162
    Abstract: An object is to provide a semiconductor device which can hold stored data even when not powered and which achieves high integration by reduction of the number of wirings. The semiconductor device is formed using a material which can sufficiently reduce the off-state current of a transistor, e.g., an oxide semiconductor material which is a wide bandgap semiconductor. When a semiconductor material which allows a sufficient reduction in the off-state current of a transistor is used, data can be held for a long period. One line serves as the word line for writing and the word line for reading and one line serves as the bit line for writing and the bit line for reading, whereby the number of wirings is reduced. Accordingly, the storage capacity per unit area is increased.
    Type: Application
    Filed: July 27, 2011
    Publication date: February 9, 2012
    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventor: Daisuke MATSUBAYASHI
  • Publication number: 20120025386
    Abstract: A semiconductor memory device according to an embodiment includes a cell array block having a plurality of cell arrays stacked therein, each of the cell arrays including a plurality of memory cells and a plurality of selective wirings selecting the plurality of memory cells are stacked, a pillar-shaped first via extending in a stack direction from a first height to a second height and having side surfaces connected to a first wiring, and a pillar-shaped second via extending in the stack direction from the first height to the second height and having side surfaces connected to a second wiring upper than the first wiring, the second wiring being thicker in the stack direction than the first wiring and having a higher resistivity than the first wiring.
    Type: Application
    Filed: March 24, 2011
    Publication date: February 2, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventor: Takeshi MURATA
  • Publication number: 20120007246
    Abstract: A semiconductor device includes a substrate, a pattern including a conductive layer and a hard mask layer stacked over the substrate, a capping layer surrounding sidewalls of the pattern, and a stress buffer layer disposed between the hard mask layer and the capping layer. The stress buffer layer is configured to inhibit transfer of stress between the hard mask layer and the capping layer during a thermal process so as to inhibit leaning of the capping layer.
    Type: Application
    Filed: September 20, 2011
    Publication date: January 12, 2012
    Applicant: Hynix Semiconductor Inc.
    Inventors: Min-Gyu SUNG, Heung-Jae Cho, Kwan-Yong Lim
  • Publication number: 20110298048
    Abstract: The present teaching provides a semiconductor device capable of relaxing stress transferred to a contact region during wire bonding and improving reliability of wire bonding. A semiconductor device comprises contact regions, an interlayer insulating film, an emitter electrode, and a stress relaxation portion. The contact regions are provided at a certain interval in areas exposing at a surface of a semiconductor substrate. The interlayer insulating film is provided on the surface of the semiconductor substrate between adjacent contact regions. The emitter electrode is provided on an upper side of the semiconductor substrate and electrically connected to each of the contact regions. The stress relaxation portion is provided on an upper surface of the emitter electrode in an area only above the contact regions. The stress relaxation portion is formed of a conductive material.
    Type: Application
    Filed: February 16, 2009
    Publication date: December 8, 2011
    Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Masaru Senoo, Tomohiko Sato
  • Patent number: 8022383
    Abstract: A two-terminal resistance switching element, wherein two silicon films each doped with an impurity are arranged with a gap width in the order of nanometers. The gap width is in the range of from 0.1 nm to 100 nm. A semiconductor device can be obtained by providing the two-terminal resistance switching element in a memory, a storage device or other device.
    Type: Grant
    Filed: June 13, 2008
    Date of Patent: September 20, 2011
    Assignee: National Institute of Advanced Industrial Science and Technology
    Inventors: Yasuhisa Naitoh, Yukinori Morita, Masayo Horikawa, Tetsuo Shimizu
  • Publication number: 20110198756
    Abstract: Vapor deposition precursors that can deposit conformal thin ruthenium films on substrates with a very high growth rate, low resistivity and low levels of carbon, oxygen and nitrogen impurities have been provided. The precursors described herein include a compound having the formula CMC?, wherein M comprises a metal or a metalloid; C comprises a substituted or unsubstituted acyclic alkene, cycloalkene or cycloalkene-like ring structure; and C? comprises a substituted or unsubstituted acyclic alkene, cycloalkene or cycloalkene-like ring structure; wherein at least one of C and C? further and individually is substituted with a ligand represented by the formula CH(X)R1, wherein X is a N, P, or S-substituted functional group or hydroxyl, and R1 is hydrogen or a hydrocarbon. Methods of production of the vapor deposition precursors and the resulting films, and uses and end uses of the vapor deposition precursors and resulting films are also described.
    Type: Application
    Filed: August 25, 2006
    Publication date: August 18, 2011
    Inventors: ΓΌ Thenappan, Chien-Wei Li, David Nalewajek, Martin Cheney, Jingyu Lao, Eric Eisenbraun, Min Li, Nathaniel Berliner, Mikko Ritala, Markku Leskela, kaupo Kukli, Linda Cheney
  • Publication number: 20110146776
    Abstract: The invention relates to glass compositions useful in conductive pastes for silicon semiconductor devices and photovoltaic cells.
    Type: Application
    Filed: December 18, 2009
    Publication date: June 23, 2011
    Applicant: E.I. DU PONT DE NEMOURS AND COMPANY
    Inventors: Alan Frederick Carroll, Kenneth Warren Hang, Giovanna Laudisio, Brian J. Laughlin
  • Patent number: 7960186
    Abstract: The disclosure provides a method of forming a ferromagnetic material, including: forming a magnetic element layer on a semiconductor layer formed on an inhibition layer; and forming a ferromagnetic layer of a Heusler alloy layer on the inhibition layer by heat treatment to induce the semiconductor layer and the magnetic element layer to react with each other, and a transistor, and a method of manufacturing the same. The inhibition layer for inhibiting a reaction of the semiconductor layer and the magnetic element layer restricts a semiconductor to be supplied for a reaction of the semiconductor and the magnetic element. Therefore, it is possible to form a ferromagnetic material having a high composition ratio of a magnetic element.
    Type: Grant
    Filed: March 26, 2008
    Date of Patent: June 14, 2011
    Assignee: Tokyo Institute of Technology
    Inventors: Satoshi Sugahara, Yota Takamura
  • Patent number: 7960283
    Abstract: A method for forming silicide contacts in integrated circuits (ICs) is described. A spacer pull-back etch is performed during the salicidation process to reduce the stress between the spacer and source/drain silicide contact at the spacer undercut. This prevents the propagation of surface defects into the substrate, thereby minimizing the occurrence of silicide pipe defects. The spacer pull-back etch can be performed after a first annealing step to form the silicide contacts.
    Type: Grant
    Filed: June 28, 2010
    Date of Patent: June 14, 2011
    Assignee: Chartered Semiconductor Manufacturing, Ltd.
    Inventors: Jeff Jianhui Ye, Huang Liu, Alex K H See, Wei Lu, Hai Cong, Hui Peng Koh, Mei Sheng Zhou, Liang Choo Hsia
  • Publication number: 20110128667
    Abstract: In a semiconductor device including a carbon-containing electrode and a method for fabricating the same, an electrode has a high work function due to a carbon-containing TiN layer contained therein. It is possible to provide a dielectric layer having a high permittivity and thus to reduce the leakage current by forming an electrode having a high work function. Also, sufficient capacitance of a capacitor can be secured by employing an electrode having a high work function and a dielectric layer having a high permittivity.
    Type: Application
    Filed: December 29, 2009
    Publication date: June 2, 2011
    Inventors: Kwan-Woo Do, Kee-Jeung Lee, Young-Dae Kim, Mi-Hyoung Lee, Jeong-Yeop Lee
  • Patent number: 7948081
    Abstract: A semiconductor device uses a carbon nanotube structure, which reduces an electric resistance and a thermal resistance by increasing a density of the carbon nanotubes. An insulation film covers a first electrically conductive material. A second electrically conductive material is provided on the insulation film. A plurality of carbon nanotubes extend through the insulation film by being filled in an opening part that exposes the first electrically conductive material. The carbon nanotubes electrically connect the first electrically conductive material and the second electrically conductive material to each other. Ends of the carbon nanotubes are fixed to a recessed part provided on a surface of the first electrically conductive material.
    Type: Grant
    Filed: January 25, 2005
    Date of Patent: May 24, 2011
    Assignee: Fujitsu Limited
    Inventors: Akio Kawabata, Mizuhisa Nihei, Masahiro Horibe
  • Patent number: 7919795
    Abstract: Provided are a wire structure, a method for fabricating a wire, a thin film transistor (TFT) substrate and a method for fabricating a TFT substrate. The wire structure includes a barrier layer formed on a substrate and including copper, copper solid solution layer.
    Type: Grant
    Filed: December 20, 2007
    Date of Patent: April 5, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Je-Hun Lee, Chang-Oh Jeong, Eun-Guk Lee, Do-Hyun Kim
  • Publication number: 20110068470
    Abstract: An apparatus for depositing seed layers over a substrate, which substrate includes a patterned insulating layer with at least one opening surrounded by a field, and which opening has sidewalls, bottom surfaces and top corners, includes: a CVD chamber adapted to deposit one or more CVD seed layers over the substrate; a PVD chamber adapted to deposit one or more PVD seed layers over the substrate; and a controller which includes recipe information. The recipe information includes deposition sequence and process parameters for operation of the deposition chambers.
    Type: Application
    Filed: March 22, 2010
    Publication date: March 24, 2011
    Inventor: URI COHEN
  • Publication number: 20110057314
    Abstract: The invention relates to conductive pastes including one or more acids, or acid-forming components for silicon semiconductor devices and photovoltaic cells.
    Type: Application
    Filed: September 8, 2010
    Publication date: March 10, 2011
    Applicant: E. I. DU PONT DE NEMOURS AND COMPANY
    Inventor: Alan Frederick Carroll
  • Publication number: 20100288354
    Abstract: A photovoltaic device can include a transparent conductive oxide layer adjacent to a substrate and one or more barrier layers, which can include a silicon oxide or a silicon nitride.
    Type: Application
    Filed: May 18, 2010
    Publication date: November 18, 2010
    Applicant: First Solar, Inc.
    Inventors: Scott Mills, Dale Roberts, Zhibo Zhao, Yu Yang
  • Publication number: 20100288355
    Abstract: A photovoltaic device can include a transparent conductive oxide layer adjacent to a substrate and a barrier layer, which can include a silicon-containing material.
    Type: Application
    Filed: May 18, 2010
    Publication date: November 18, 2010
    Applicant: First Solar, Inc.
    Inventors: Scott Mills, Dale Roberts, Zhibo Zhao, Yu Yang