Thin-film Jfet (epo) Patents (Class 257/E29.314)
  • Patent number: 8829574
    Abstract: A semiconductor device includes a III-nitride substrate, a first III-nitride epitaxial layer coupled to the III-nitride substrate and having a mesa, and a second III-nitride epitaxial layer coupled to a top surface of the mesa. The semiconductor device further includes a III-nitride gate structure coupled to a side surface of the mesa, and a spacer configured to provide electrical insulation between the second III-nitride epitaxial layer and the III-nitride gate structure.
    Type: Grant
    Filed: December 22, 2011
    Date of Patent: September 9, 2014
    Assignee: Avogy, Inc.
    Inventors: Donald R. Disney, Isik C. Kizilyalli, Hui Nie, Linda Romano, Richard J. Brown, Madhan Raj
  • Patent number: 8704279
    Abstract: A device includes a buried well region and a first HVW region of the first conductivity, and an insulation region over the first HVW region. A drain region of the first conductivity type is disposed on a first side of the insulation region and in a top surface region of the first HVW region. A first well region and a second well region of a second conductivity type opposite the first conductivity type are on the second side of the insulation region. A second HVW region of the first conductivity type is disposed between the first and the second well regions, wherein the second HVW region is connected to the buried well region. A source region of the first conductivity type is in a top surface region of the second HVW region, wherein the source region, the drain region, and the buried well region form a JFET.
    Type: Grant
    Filed: May 25, 2012
    Date of Patent: April 22, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jen-Hao Yeh, Chih-Chang Cheng, Ru-Yi Su, Ker Hsiao Huo, Po-Chih Chen, Fu-Chih Yang, Chun Lin Tsai
  • Patent number: 8643065
    Abstract: A JFET is a semiconductor device allowing more reliable implementation of the characteristics essentially achievable by employing SiC as a material and includes a wafer having at least an upper surface made of silicon carbide, and a gate contact electrode formed on the upper surface. The wafer includes a first p-type region serving as an ion implantation region formed so as to include the upper surface. The first p-type region includes a base region disposed so as to include the upper surface, and a protruding region. The base region has a width (w1) in the direction along the upper surface greater than a width (w2) of the protruding region. The gate contact electrode is disposed in contact with the first p-type region such that the gate contact electrode is entirely located on the first p-type region as seen in plan view.
    Type: Grant
    Filed: December 11, 2009
    Date of Patent: February 4, 2014
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Kazuhiro Fujikawa, Hideto Tamaso, Shin Harada, Yasuo Namikawa
  • Patent number: 8513675
    Abstract: Semiconductor devices and methods of making the devices are described. The devices can be junction field-effect transistors (JFETs). The devices have raised regions with sloped sidewalls which taper inward. The sidewalls can form an angle of 5° or more from vertical to the substrate surface. The devices can have dual-sloped sidewalls in which a lower portion of the sidewalls forms an angle of 5° or more from vertical and an upper portion of the sidewalls forms an angle of <5° from vertical. The devices can be made using normal (i.e., 0°) or near normal incident ion implantation. The devices have relatively uniform sidewall doping and can be made without angled implantation.
    Type: Grant
    Filed: May 21, 2012
    Date of Patent: August 20, 2013
    Assignee: Power Integrations, Inc.
    Inventors: David C. Sheridan, Andrew P. Ritenour
  • Patent number: 8294151
    Abstract: A plurality of gate lines having gate electrodes are formed on a substrate and a semiconductor layer is formed on a gate insulating layer covering the gate lines. A plurality of data lines intersecting the gate lines are formed on the gate insulating layer and a plurality of drain electrodes are formed extending parallel with and adjacent to the data lines. Furthermore, a plurality of storage capacitor conductors are formed to be connected to the drain electrodes and to overlap an adjacent gate line. A passivation layer made of an organic material is formed on the above structure and has a contact hole. Furthermore, a plurality of pixel electrodes are formed to be electrically connected to the drain electrodes through the contact hole.
    Type: Grant
    Filed: January 7, 2010
    Date of Patent: October 23, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kyung-Wook Kim, Joo-Ae Youn, Seong-Yeong Lee
  • Patent number: 8278691
    Abstract: There is provided a low power memory device with JFET device structures. Specifically, a low power memory device is provided that includes a plurality memory cells having a memory element and a JFET access device electrically coupled to the memory element. The memory cells may be isolated using diffusion based isolation.
    Type: Grant
    Filed: December 11, 2008
    Date of Patent: October 2, 2012
    Assignee: Micron Technology, Inc.
    Inventor: Chandra Mouli
  • Patent number: 8264058
    Abstract: A MOSFET driver compatible JFET device is disclosed. The JFET device can include a gate contact, a drain contact, and a source contact. The JFET device can further include a first gate region of semiconductor material adjacent the gate contact and a second region of semiconductor material adjacent the first gate region. The first gate region and the second gate region can form a first p-n junction between the first gate region and the second gate region. The JFET device can further include a channel region of semiconductor material adjacent the source contact. The channel region and the second gate region can form a second p-n junction between the second gate region and the channel region.
    Type: Grant
    Filed: February 12, 2010
    Date of Patent: September 11, 2012
    Assignee: University of South Carolina
    Inventors: Enrico Santi, Zhiyang Chen, Alexander Grekov
  • Patent number: 8058674
    Abstract: A 4-Terminal JFET includes a substrate having a first conduction type and an upper layer having a second, opposite, conduction type over the substrate. A gate and a source are embedded in the upper layer. A gate pad is electrically connected to the gate. A region, which has a first conduction type, is formed in the upper layer and separates the upper layer into two sections. This region reduces the overall capacitance between the gate pad and the source. Reduced overall gate to source capacitance can result in reduced noise amplification in the JFET.
    Type: Grant
    Filed: October 7, 2009
    Date of Patent: November 15, 2011
    Assignee: Moxtek, Inc.
    Inventors: Derek Hullinger, Keith Decker
  • Patent number: 8058655
    Abstract: Semiconductor devices and methods of making the devices are described. The devices can be junction field-effect transistors (JFETs). The devices have raised regions with sloped sidewalls which taper inward. The sidewalls can form an angle of 5° or more from vertical to the substrate surface. The devices can have dual-sloped sidewalls in which a lower portion of the sidewalls forms an angle of 5° or more from vertical and an upper portion of the sidewalls forms an angle of <5° from vertical. The devices can be made using normal (i.e., 0°) or near normal incident ion implantation. The devices have relatively uniform sidewall doping and can be made without angled implantation.
    Type: Grant
    Filed: November 5, 2009
    Date of Patent: November 15, 2011
    Assignee: SS SC IP, LLC
    Inventors: David C. Sheridan, Andrew P. Ritenour
  • Patent number: 7944017
    Abstract: An n type impurity region is continuously formed on the bottom portion of a channel region below a source region, a gate region and a drain region. The n type impurity region has an impurity concentration higher than the channel region and a back gate region, and is less influenced by the diffusion of p type impurities from the gate region and the back gate region. Moreover, by continuously forming the impurity region from a portion below the source region to a portion below the drain region, the resistance value of a current path in the impurity region is substantially uniformed. Therefore, the IDSS is stabilized, the forward transfer admittance gm and the voltage gain Gv are improved, and the noise voltage Vno is decreased. Furthermore, the IDSS variation within a single wafer is suppressed.
    Type: Grant
    Filed: August 5, 2008
    Date of Patent: May 17, 2011
    Assignees: Sanyo Electric Co., Ltd., Sanyo Semiconductor Co., Ltd.
    Inventors: Mitsuo Hatamoto, Yoshiaki Matsumiya
  • Patent number: 7838900
    Abstract: A single-chip common-drain JFET device comprises a Drain, two gates and two source arranged such that two common-drain JFETs are formed therewith. Due to the two JFETs merged within a single chip, no wire bonding connection is needed therebetween, thereby without parasitic inductance and resistance caused by bonding wire, and therefore improving the performance and reducing the package cost. The single-chip common-drain JFET device may be applied in buck converter, boost converter, inverting converter, switch, and two-step DC-to-DC converter to improve their performance and efficiency. Alternative single-chip common-drain JFET devices are also provided for current sense or proportional current generation.
    Type: Grant
    Filed: April 17, 2009
    Date of Patent: November 23, 2010
    Assignee: Richtek Technology Corp.
    Inventors: Liang-Pin Tai, Jing-Meng Liu, Hung-Der Su
  • Patent number: 7838901
    Abstract: A single-chip common-drain JFET device comprises a drain, two gates and two source arranged such that two common-drain JFETs are formed therewith. Due to the two JFETs merged within a single chip, no wire bonding connection is needed therebetween, thereby without parasitic inductance and resistance caused by bonding wire, and therefore improving the performance and reducing the package cost. The single-chip common-drain JFET device may be applied in buck converter, boost converter, inverting converter, switch, and two-step DC-to-DC converter to improve their performance and efficiency. Alternative single-chip common-drain JFET devices are also provided for current sense or proportional current generation.
    Type: Grant
    Filed: April 17, 2009
    Date of Patent: November 23, 2010
    Assignee: Richtek Technology Corp.
    Inventors: Liang-Pin Tai, Jing-Meng Liu, Hung-Der Su
  • Patent number: 7838902
    Abstract: A single-chip common-drain JFET device comprises a drain, two gates and two source arranged such that two common-drain JFETs are formed therewith. Due to the two JFETs merged within a single chip, no wire bonding connection is needed therebetween, thereby without parasitic inductance and resistance caused by bonding wire, and therefore improving the performance and reducing the package cost. The single-chip common-drain JFET device may be applied in buck converter, boost converter, inverting converter, switch, and two-step DC-to-DC converter to improve their performance and efficiency. Alternative single-chip common-drain JFET devices are also provided for current sense or proportional current generation.
    Type: Grant
    Filed: April 17, 2009
    Date of Patent: November 23, 2010
    Assignee: Richtek Technology Corp.
    Inventors: Liang-Pin Tai, Jing-Meng Liu, Hung-Der Su
  • Patent number: 7772619
    Abstract: A semiconductor device includes a silicon on insulator (SOI) substrate, comprising an insulation layer formed on semiconductor material, and a fin structure. The fin structure is formed of semiconductor material and extends from the SOI substrate. Additionally, the fin structure includes a source region, a drain region, a channel region, and a gate region. The source region, drain region, and the channel region are doped with a first type of impurities, and the gate region is doped with a second type of impurities. The gate region abuts the channel region along at least one boundary, and the channel region is operable to conduct current between the drain region and the source region when the semiconductor device is operating in an on state.
    Type: Grant
    Filed: May 2, 2008
    Date of Patent: August 10, 2010
    Assignee: SuVolta, Inc.
    Inventor: Ashok K. Kapoor
  • Patent number: 7772620
    Abstract: A junction field effect transistor comprises a silicon-on-insulator architecture. A front gate region and a back gate region are formed in a silicon region of the SOI architecture. The silicon region has a thin depth such that the back gate region has a thin depth, and whereby a depletion region associated with the back gate region recedes substantially up to an insulating layer of the SOI architecture.
    Type: Grant
    Filed: July 25, 2008
    Date of Patent: August 10, 2010
    Assignee: SuVolta, Inc.
    Inventor: Ashok K. Kapoor
  • Patent number: 7768033
    Abstract: A single-chip common-drain JFET device comprises a drain, two gates and two source arranged such that two common-drain JFETs are formed therewith. Due to the two JFETs merged within a single chip, no wire bonding connection is needed therebetween, thereby without parasitic inductance and resistance caused by bonding wire, and therefore improving the performance and reducing the package cost. The single-chip common-drain JFET device may be applied in buck converter, boost converter, inverting converter, switch, and two-step DC-to-DC converter to improve their performance and efficiency. Alternative single-chip common-drain JFET devices are also provided for current sense or proportional current generation.
    Type: Grant
    Filed: April 17, 2009
    Date of Patent: August 3, 2010
    Assignee: Richtek Technology Corp.
    Inventors: Liang-Pin Tai, Jing-Meng Liu, Hung-Der Su
  • Patent number: 7759695
    Abstract: A single-chip common-drain JFET device comprises a drain, two gates and two source arranged such that two common-drain JFETs are formed therewith. Due to the two JFETs merged within a single chip, no wire bonding connection is needed therebetween, thereby without parasitic inductance and resistance caused by bonding wire, and therefore improving the performance and reducing the package cost. The single-chip common-drain JFET device may be applied in buck converter, boost converter, inverting converter, switch, and two-step DC-to-DC converter to improve their performance and efficiency. Alternative single-chip common-drain JFET devices are also provided for current sense or proportional current generation.
    Type: Grant
    Filed: April 17, 2009
    Date of Patent: July 20, 2010
    Assignee: Richtek Technology Corp.
    Inventors: Liang-Pin Tai, Jing-Meng Liu, Hung-Der Su
  • Publication number: 20100171155
    Abstract: Silicon-on-insulator JFET having a body bias and a fully depleted body and fabrication methods therefore are disclosed. SOI JFETs offer leakage advantages over bulk silicon JFETs. However, some SOI JFETs have poor switching characteristics (e.g., high switch on time), and have poor leakage performance at high temperatures. The techniques herein introduced include a fully-depleted body SOI-JFET, with a non-zero bias applied to its body. In one example, the body region of the JFET can be fully depleted by tuning the thickness of the silicon containing layer of the SOI substrate. Additionally, the deep depletion can be induced by applying a non-zero bias to the body region, at a range of operating temperatures. Full body depletion and/or the application of body bias offers the benefits of suppressed leakage current at higher operating temperatures (e.g., between or above 25-115 C) and improved AC performance (e.g., faster switching time).
    Type: Application
    Filed: January 8, 2009
    Publication date: July 8, 2010
    Inventor: Samar Kanti Saha
  • Patent number: 7704813
    Abstract: The present invention provides a high-voltage junction field effect transistor (JFET), a method of manufacture and an integrated circuit including the same. One embodiment of the high-voltage junction field effect transistor (JFET) (300) includes a well region (320) of a first conductive type located within a substrate (318) and a gate region (410) of a second conductive type located within the well region (320), the gate region (410) having a length and a width. This embodiment further includes a source region (710) and a drain region (715) of the first conductive type located within the substrate (318) in a spaced apart relation to the gate region (410) and a doped region (810) of the second conductive type located in the gate region (410) and extending along the width of the gate region (410).
    Type: Grant
    Filed: November 1, 2007
    Date of Patent: April 27, 2010
    Assignee: Texas Instruments Incorporated
    Inventors: Kaiyuan Chen, Joe Trogolo, Tathagata Chatterjee, Steve Merchant
  • Patent number: 7655964
    Abstract: A programmable junction field effect transistor (JFET) with multiple independent gate inputs. A drain, source and a plurality of gate regions for controlling a conductive channel between the source and drain are fabricated in a semiconductor substrate. A first portion the gate regions are coupled to a first gate input and a second portion of the gate regions are coupled to a second gate input. The first and second gate inputs are electrically isolated from each other. The JFET may be programmed by applying a programming voltage to the first gate input and operated by applying a signal to the second gate input.
    Type: Grant
    Filed: March 21, 2005
    Date of Patent: February 2, 2010
    Assignee: Qspeed Semiconductor Inc.
    Inventors: Chong Ming Lin, Ho Yuan Yu
  • Publication number: 20100019290
    Abstract: A junction field effect transistor comprises a silicon-on-insulator architecture. A front gate region and a back gate region are formed in a silicon region of the SOI architecture. The silicon region has a thin depth such that the back gate region has a thin depth, and whereby a depletion region associated with the back gate region recedes substantially up to an insulating layer of the SOI architecture.
    Type: Application
    Filed: July 25, 2008
    Publication date: January 28, 2010
    Inventor: Ashok K. Kapoor
  • Publication number: 20090302356
    Abstract: A semiconductor device having a cell region and a peripheral region includes an silicon on insulator (SOI) substrate having a stack structure of a silicon substrate, a buried insulation layer, and a silicon layer. An epi-silicon layer is formed in the buried insulation layer of the peripheral region and connects a peripheral portion of a channel area of the silicon layer to the silicon substrate. A gate is formed on the silicon layer and junction areas are formed in the silicon layer on both sides of the gate.
    Type: Application
    Filed: December 12, 2008
    Publication date: December 10, 2009
    Inventor: Ki Bong NAM
  • Publication number: 20090302355
    Abstract: A design structure, and more particularly, to a design structure for manufacturing a JFET in SOI, a JFET and methods of manufacturing the JFET are provided. The JFET includes a gate poly formed directly on an SOI layer and a gate oxide layer interposed between outer edges of the gate poly and the SOI layer.
    Type: Application
    Filed: June 4, 2008
    Publication date: December 10, 2009
    Inventors: John J. Pekarik, Richard A. Phelps, Robert M. Rassel, Yun Shi
  • Patent number: 7566904
    Abstract: A thin film transistor has a semiconductor thin film including zinc oxide, a protection film formed on entirely the upper surface of the semiconductor thin film, a gate insulating film formed on the protection film, a gate electrode formed on the gate insulating film above the semiconductor thin film, and a source electrode and drain electrode formed under the semiconductor thin film so as to be electrically connected to the semiconductor thin film.
    Type: Grant
    Filed: June 7, 2006
    Date of Patent: July 28, 2009
    Assignee: Casio Computer Co., Ltd.
    Inventor: Hiromitsu Ishii
  • Patent number: 7535032
    Abstract: A single-chip common-drain JFET device comprises a drain, two gates and two source arranged such that two common-drain JFETs are formed therewith. Due to the two JFETs merged within a single chip, no wire bonding connection is needed therebetween, thereby without parasitic inductance and resistance caused by bonding wire, and therefore improving the performance and reducing the package cost. The single-chip common-drain JFET device may be applied in buck converter, boost converter, inverting converter, switch, and two-step DC-to-DC converter to improve their performance and efficiency. Alternative single-chip common-drain JFET devices are also provided for current sense or proportional current generation.
    Type: Grant
    Filed: June 24, 2005
    Date of Patent: May 19, 2009
    Assignee: Richtek Technology Corp.
    Inventors: Liang-Pin Tai, Jing-Meng Liu, Hung-Der Su
  • Publication number: 20080272407
    Abstract: A semiconductor device includes a silicon on insulator (SOI) substrate, comprising an insulation layer formed on semiconductor material, and a fin structure. The fin structure is formed of semiconductor material and extends from the SOI substrate. Additionally, the fin structure includes a source region, a drain region, a channel region, and a gate region. The source region, drain region, and the channel region are doped with a first type of impurities, and the gate region is doped with a second type of impurities. The gate region abuts the channel region along at least one boundary, and the channel region is operable to conduct current between the drain region and the source region when the semiconductor device is operating in an on state.
    Type: Application
    Filed: May 2, 2008
    Publication date: November 6, 2008
    Applicant: DSM Solutions, Inc.
    Inventor: Ashok K. Kapoor
  • Patent number: 7411231
    Abstract: The present invention provides a JFET which receives an additional implant during fabrication, which extends its drain region towards its source region, and/or its source region towards its drain region. The implant reduces the magnitude of the e-field that would otherwise arise at the drain/channel (and/or source/channel) junction for a given drain and/or source voltage, thereby reducing the severity of the gate current and breakdown problems associated with the e-field. The JFET's gate layer is preferably sized to have a width which provides respective gaps between the gate layer's lateral boundaries and the drain and/or source regions for each implant, with each implant implanted in a respective gap.
    Type: Grant
    Filed: December 1, 2006
    Date of Patent: August 12, 2008
    Assignee: Analog Devices, Inc.
    Inventors: Craig Wilson, Derek Bowers, Gregory K. Cestra
  • Patent number: 7397086
    Abstract: A thin-film transistor, such as a top-gate thin-film transistor, is provided herein. The thin-film transistor has a performance-enhancing layer, such as a performance-enhancing bottom layer, comprising a polymer other than a polyimide. In specific embodiments, the polymer is selected from the group consisting of polysiloxane, polysilsesquioxane, and mixtures thereof. In other embodiments, it is a self-assembling polymeric monolayer of a silane agent and an organophosphonic acid. The performance-enhancing layer directly contacts the substrate. The layer improves the carrier mobility and current on/off ratio of the thin film transistor.
    Type: Grant
    Filed: December 23, 2005
    Date of Patent: July 8, 2008
    Assignee: Xerox Corporation
    Inventors: Yiliang Wu, Beng S. Ong, Paul F. Smith
  • Patent number: 7312481
    Abstract: The present invention provides a high-voltage junction field effect transistor (JFET), a method of manufacture and an integrated circuit including the same. One embodiment of the high-voltage junction field effect transistor (JFET) (300) includes a well region (320) of a first conductive type located within a substrate (318) and a gate region (410) of a second conductive type located within the well region (320), the gate region (410) having a length and a width. This embodiment further includes a source region (710) and a drain region (715) of the first conductive type located within the substrate (318) in a spaced apart relation to the gate region (410) and a doped region (810) of the second conductive type located in the gate region (410) and extending along the width of the gate region (410).
    Type: Grant
    Filed: October 1, 2004
    Date of Patent: December 25, 2007
    Assignee: Texas Instruments Incorporated
    Inventors: Kaiyuan Chen, Joe Trogolo, Tathagata Chatterjee, Steve Merchant
  • Patent number: 7288792
    Abstract: Exemplary embodiments of the present invention are intended to provide a semiconductor device that can readily address or achieve high integration. Exemplary embodiments provide a semiconductor device constructed to include a transistor and a multi-layer wiring structure electrically connected to the transistor, the multi-layer wiring structure having a first wiring layer disposed in the same layer as the semiconductor layer of the transistor.
    Type: Grant
    Filed: February 22, 2005
    Date of Patent: October 30, 2007
    Assignee: Seiko Epson Corporation
    Inventor: Ichio Yudasaka
  • Patent number: 7271412
    Abstract: The series TFT comprises a semiconductor layer including a first body, a second body and a connecting portion serially connecting the first body to the second body. The first body has a first channel region and first source/drain regions positioned at both sides of the first channel region. The second body has a second channel region and second source/drain regions positioned at both sides of the second channel region. And the connecting portion is interposed between the first source/drain region and the second source/drain region to serially connect the first body to the second body and having a conductive type different from that of at least one of the first source/drain region and the second source/drain region. A first gate is positioned to correspond to the first channel region, and a second gate is positioned to correspond to the second channel region. An active matrix OLED can be manufactured using such series TFTs.
    Type: Grant
    Filed: August 31, 2004
    Date of Patent: September 18, 2007
    Assignee: Samsung SDI Co., Ltd.
    Inventor: Won-Kyu Kwak
  • Patent number: 7214965
    Abstract: A plurality of gate lines having gate electrodes are formed on a substrate and a semiconductor layer is formed on a gate insulating layer covering the gate lines. A plurality of data lines intersecting the gate lines are formed on the gate insulating layer and a plurality of drain electrodes are formed extending parallel with and adjacent to the data lines. Furthermore, a plurality of storage capacitor conductors are formed to be connected to the drain electrodes and to overlap an adjacent gate line. A passivation layer made of an organic material is formed on the above structure and has a contact hole. Furthermore, a plurality of pixel electrodes are formed to be electrically connected to the drain electrodes through the contact hole.
    Type: Grant
    Filed: December 10, 2004
    Date of Patent: May 8, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kyung-Wook Kim, Joo-Ae Youn, Seong-Young Lee
  • Publication number: 20070012946
    Abstract: A junction field effect transistor is described. The transistor is made from a wide bandgap semiconductor material. The device comprises source, channel, drift and drain semiconductor layers, as well as p-type implanted or Schottky gate regions. The source, channel, drift and drain layers can be epitaxially grown. The ohmic contacts to the source, gate, and drain regions can be formed on the same side of the wafer. The devices can have different threshold voltages depending on the vertical channel width and can be implemented for both depletion and enhanced modes of operation for the same channel doping. The devices can be used for digital, analog, and monolithic microwave integrated circuits. Methods for making the transistors and integrated circuits comprising the devices are also described.
    Type: Application
    Filed: August 18, 2006
    Publication date: January 18, 2007
    Inventors: Igor Sankin, Jeffrey Casady, Joseph Merrett
  • Patent number: 7038260
    Abstract: A method for fabricating a dual gate structure for JFETs and MESFETs and the associated devices. Trenches are etched in a semiconductor substrate for fabrication of a gate structure for a JFET or MESFET. A sidewall spacer may be formed on the walls of the trenches to adjust the lateral dimension for a first gate. Following the formation of the first gate by implantation or deposition, a buffer region is implanted below the first gate using a complementary dopant and a second sidewall spacer with a thickness that may be the same or greater than the thickness of the first sidewall spacer. Subsequent to the buffer implant, a second gate is implanted beneath the buffer layer using a third sidewall spacer with a greater thickness than the first sidewall spacer.
    Type: Grant
    Filed: March 4, 2003
    Date of Patent: May 2, 2006
    Assignee: Lovoltech, Incorporated
    Inventor: Ho-Yuan Yu