Abstract: An articulated axis workslide assembly having a bridge plate with an upper surface and first and second bridge keyways. The bridge keyways are oriented precisely parallel to one another and a first longitudinal axis, and first and second bridge keys are slidably mounted in respective bridge keyways for reciprocation parallel to the first axis. There is a combination swivel/slide member having a lower surface, a slide keyway and a pivot hole, and a slide key is slidably mounted in the slide keyway. The swivel/slide is slidably and pivotally connected and supported with its lower surface facing the upper surface of the bridge member along a single interface plane. Such connection is preferably provided in part through pivotal connection of the slide key to the first bridge key, and through the slide pivot hole to the second bridge key.

Abstract: A positioning table for locating a workpiece (17) at a predetermined position in a thin film forming apparatus. A base plate (2) movable in X-direction is supported below a workpiece placing table (12) for placing the workpiece thereon. A reference member supporting member (4) mounted on the base plate is respectively movable both in Y-direction and .theta.-direction about a predetermined shaft. First, second, and third reference members (5a, 5b, 5c) capable of contacting the workpiece by an urging device are supported by the reference member supporting member. When each reference member is moved in the X-direction or the Y-direction so as to locate the workpiece at the predetermined position, the three reference members move together with the reference member supporting member (4) in each direction. When the workpiece is moved in the .theta.-direction, the three reference members reliably rotate about the predetermined shaft and the rotational center of the workpiece is fixed.

Abstract: A positioning device includes a table (101, 213) guided by a carriage (15, 199), the carriage (15, 199) being displaceable in two coordinate directions (X, Y) with respect to the base (3) and the table (101, 213) being displaceable with respect to the carriage (15, 199) in the same coordinate directions (X, Y) solely by Lorentz forces, while in a third coordinate direction (Z) the position of the table (101, 213) is determined by a static gas bearing. The two-step positioning device is particularly suitable for use in opto-lithographic devices.

Abstract: An apparatus for performing an exact in-feed in the X and/or Y direction in the plane of a bond head, e.g. a gripper, to a working station containing a sliding plate, a support element, a first and second drives for performing the in-feeds, a guide mechanism provided with a slide part and a guide part and an integrated measuring device for determining movements of the support element oriented in the X and/or Y direction. The support element is mounted in the horizontal plane with translational and rotational degrees of freedom by a vacuum-pressurizable air bearing on the sliding plate and vertically by a vacuum-pressurizable air bearing on the slide part, the latter additionally being mounted with a vacuum-pressurizable air bearing on the sliding plate and with a counterpressure air bearing between two webs of the guide part.

Abstract: A high-accuracy traveling table apparatus comprises a workpiece fixing device and a laser mirror for position measurement provided on a table capable of traveling at least in the direction of one axis. The table comprises a mount to which the workpiece fixing device and the laser mirror are fixed and at least one partially coupling member for partially coupling the mount to the table so as to prevent transmission of a distortion of the table to the mount.

Abstract: An improved printed circuit board inspection apparatus in which its inspection probes are made to contact with a selected part or printed circuit section on a printed circuit board for making an inspection on the selected part or printed circuit section in terms of their performances or functions. The printed circuit board inspection apparatus uses two guide sets each having at least one pair of inspection probes and driving means to drive said inspection probes in X- and Y-directions to selected coordinate positions in the printed circuit board. A central processing unit controls said driving means so that the inspection probes of one guide set are used to make an inspection at a selected coordinated position while the other inspection probes are traveling to another selected coordinate position for subsequent inspection according to a predetermined program.

Abstract: A high-accuracy traveling table apparatus comprises a workpiece fixing device and a laser mirror for position measurement provided on a table capable of travelling at least in the direction of one axis. The table comprises a mount to which the workpiece fixing device and the laser mirror are fixed and at least one partially coupling member for partially coupling the mount to the table so as to prevent transmission of a distortion of the table to the mount.

Abstract: A dual axis translation device and system in accordance with this invention, for translating an optical beam along both an x-axis and a y-axis which are perpendicular to one another, has a beam directing means acting on said optical beam for directing the beam along a particular path transverse to said x and y axes. An arrangement supporting said beam directing means for movement in the x and y direction within a given plane is provided. The arrangement includes a first means for translating said beam directing means along the x-axis in said given plane in order to translate the beam along said x-axis. The arrangement comprises a second means for translating said beam directing means along the y-axis in said given plane in order to translate the beam along said y-axis.

Abstract: A two-dimensional positioning mechanism, comprising a moveable platform, a first translating device connected to the platform to move the platform in a first direction, and a second translating device connected to the platform to move the platform in a second direction orthogonal to the first direction. The first translating device includes first and second links, each of which is pivotally connected to the platform, and a first linear actuator pivotally connected to the first and second links to move those links in the first direction. The first and second links, the moveable platform and the linear actuator form a pivotal parallelogram structure to maintain the orientation of the platform substantially constant during movement thereof. Preferably, the positioning mechanism further includes a control system connected to the first and second translating devices to control those translating devices to move the platform from a first position to a second position.

Abstract: A positioning device for a table on which a semiconductor wafer is moved into an inspection position is described. It comprises a pneumatic stage supporting the table and movable both in the x and y directions, a moving device using wire which moves the stage in the x or y direction, and a fine resolution lifting device which moves or lifts the table vertically.

Abstract: A positioning table includes a pair of direct drive motors mounted on a flat surface of a base. One of the direct drive motor drives a parallel crank mechanism so as to move a table in one direction. The other direct drive motor drives an arm member connected to the table through a rail, so as to move the table in the other direction perpendicular to the one direction. Thus, the table can be moved in a common plane into a desired position by driving the pair of direct drive motors.

Abstract: A stage device usable, e.g., in an X-ray exposure apparatus, for moving a semiconductor wafer placed in a vacuum ambience and held by a wafer chuck, is disclosed. In the stage device, the wafer chuck holds the wafer so that the surface of the wafer onto which a circuit pattern is to be transferred is placed in a vertical plane, and the wafer chuck is moved vertically and horizontally for step-and-repeat exposure of the wafer. The device includes a guide mechanism, locking mechanism and a constant-tension spring mechanism, to thereby ensure high-accuracy movement of the wafer chuck in the vertical direction as well as high-precision positioning of the wafer. Further, in the stage device, a drive source producing a drive to move the wafer chuck is disposed in a vacuum ambience while, on the other hand, the supply of operating fluids to air bearing assemblies, for guiding the movement of the wafer chuck, is achieved by use of metal pipes coupled by rotary joints.

Abstract: A vertical stepper transfers a circuit pattern formed on a mask onto a wafer using synchrotron radiation instead of a light source. The vertical stepper includes a wafer stage for having the wafer mounted thereon in the vertical direction and a mask stage for having the mask mounted thereon in the vertical direction. The wafer stage includes a coarse X-Y stage, a transfer member, and a wafer mounting member. The wafer mounting member is provided with a fine X-Y stage. The wafer mounting member is moved in the horizontal direction between a first position mounted on the coarse X-Y stage and a second position mounted on the mask stage by the transfer member. When exposed to the synchrotron radiation, the wafer mounting member is integrated with the mask stage. After the wafer and the mask are strictly correctly positioned by the fine X-Y stage, the wafer mounting member, integrated with the mask stage, is stepped and repeat exposed by scanning in the vertical direction.

Abstract: Table equipment which comprises a frame, a table that can fix an object and move relative to the frame, a table guide for guiding the movable table on the frame, in a line inclined to the horizontal plane, a power source for driving the table along the table guide, a power drive connection for drivingly connected the driving power source with the table, and a force applying member applying to the table a force which counterbalances the gravity at the table and the object mounted thereon, the force applying member having a counterweight smaller than the total weight of the movable table and the mounted object.

Abstract: A high-accuracy traveling table apparatus comprises a workpiece fixing device and a laser mirror for position measurement provided on a table capable of traveling at least in the direction of one axis. The table comprises a mount to which the workpiece fixing device and the laser mirror are fixed and at least one partially coupling member for partially coupling the mount to the table so as to prevent transmission of a distortion of the table to the mount.

Abstract: A vise capable of perfectly, accurately, neatly and effectively clamping thereon a workpiece is provided. The vise includes a base having two side walls an angular scale-provided elongate body attaching thereon a first jaw member, a connecting rod pivotally connecting together the base and the body, a movable seat attaching thereon a second jaw member, two following gears rotatably but untranslatably attached to the body, two guiding screw rods mounted in the following gears and horizontally spacedly urging against the movable seat, a shaft rotatably mounted in the body and mounting thereon an active gear meshed between the following gears, a driving handle, a reinforcing locking member having a threaded hole, and a bolt passing through one of the side walls to be threaded into the threaded hole and capable of being rotated to tightly urge the body against the one side wall.

Abstract: An alignment stage device comprising first and second stages supported on a base and movable in those directions which are perpendicular to each other on a horizontal plane, and a third stage provided with stands on which a workpiece is mounted, and movable relative to each of the stages, wherein when the first stage is moved, the second and third stages are moved together with the first stage and when the second stage is moved, the third stage is moved together with the second stage and wherein the first and second stages are square frames each having center opening and the second stage is arranged in the center opening of the first stage while the third stage is arranged in the center opening of the second stage.

Abstract: Two partial cylindrical, externally pressurized static air bearings are used to provide a self aligning air bearing platform. The self aligning air bearing platform is useful in a tape automated bonding system to bond a semiconductor device having a high pin count. A bottom bearing block has a top surface in the shape of an arc and at least one air outlet. A middle bearing block has a bottom surface configured to mate with the top surface of the bottom bearing block. The middle bearing block also has a top surface in a shape of an arc which is rotated 90.degree. with respect to the arc shaped top surface of the bottom bearing block and at least one air outlet. A top bearing block mates with the middle bearing block and provides the platform for holding the semiconductor device. Air bearings between the moving bearing blocks provide a low friction bearing for the aligning platform.

Abstract: A movable table is provided with a guide rail, a movable block capable to move along with the guide rail, a driving means, and a power transmitting means transmitting from the driving means to the movable block; the movable block has a hole to contain the power transmitting means therein, and a bearing is formed between the guide rail and the movable block, and therefore, when a pre-load is applied on the movable block, the parts thereof on which the bearing is formed do not bend in any direction, and proper pre-loaded state is constantly kept.

Abstract: An apparatus for loading a planar subject at a predetermined position has holding means operative to hold one one of the planar subject at a predetermined level, and regulating means for detecting the thickness of the planar subject from the amount of operation of the holding means and regulating the level of the other end of the planar subject. This loading apparatus is suitably used in a pattern depicting apparatus.

Abstract: An improved mirror mount assembly is disclosed. The mirror mount assembly provides a post assembly slidable in a Y-axis orientation and a nut plate assembly slidable in an X-axis orientation and a device for simultaneously locking the post assembly and the key assembly in a fixed position.

Abstract: A stage mechanism usable in a semiconductor device manufacturing apparatus, for carrying and positioning a semiconductor wafer with high accuracy and at high speed, is disclosed. The stage device includes a reference portion and a stage portion resiliently supported by the reference portion. Further, a solid damper such as a rubber member is disposed between the reference portion and the stage portion, so as to provide a resistance to the displacement of the stage portion. Thus, with the disclosed device, any residual vibration of the stage portion after the displacement of the stage can be damped quickly, with a simple and compact structure.

Abstract: A device for holding an object in a spatial position containing a pallet-presetting structure on which a pallet is located. This pallet is held on the presetting structure. The presetting structure contains a base plate, a second plate setting on top of the latter, and a third plate. The second plate is connected both to the base plate and to the upper plate by hinges. The respective hinge pair each has an axis which is at right angles to the other. In this way, the plates can be swung open to define a right angle to one another. A vertical measuring column is also provided. By this device, a point of an object can be exactly measured or set in a horizontal position by the vertical measuring column.

Abstract: A positioning table includes a pair of parallel rails defining an axis of motion. A movable assembly including a first linear motor assembly disposed for motion along one of the rails. An outboard linear motor assembly on the other rail is rigidly bridged to the first linear motor assembly for concerted motion therewith. The first linear motor assembly includes a plurality of permanent magnets defining a plane at a predetermined angle to the horizontal and an armature defining a plane at the same angle closely spaced from the permanent magnets. The permanent magnets may be disposed on the movable element of the linear motor assembly or on the first rail. The armature is disposed on the other of the movable element and the first rail. First and second bearings on the movable element of the linear motor assembly, which may be air bearings support loads in the vertical and horizontal directions.

Abstract: A device for centering plastic webs automatically fed thereon one by one so as to feed it to a pair of cramp chains to be correctly gripped thereby at the opposite side edges. This comprises a bed consisting of a central frame and longitidinal as well as transverse arms respectively extended in opposite directions from the central frame for supporting the web of varied size. A plurality of pairs of centering members, each having an upwardly projected pin, are oppositely arranged and adapted to move toward and apart with each other so as to abut on the longitudinal and transverse side edges of web on the table with said pin for centering. It is preferable and sufficient to move said centering members by means of a belt and pulleys for treating a light web.

Abstract: The invention relates to a positioning device for the production of semiconductor components, particularly for wire bonding apparatuses, which positioning device is comprised of a cross table and separate x-direction and y-direction drive units.According to the invention, the two drive units, each comprised of a drive motor with an excursion measuring system (1; 17) affixed to the frame via a support plate (2; 18) are disposed in a parallel orientation. Each support plate (2; 18) also bears a bearing (3; 19) for a drive spindle (5; 20). A drive nut (6; 22) is disposed on the drive spindle (5; 20), where the nut is nonrotatably fixed. A vertical bearing (8) is mounted on the support plate (2), which bearing bears two adjustable levers (9, 11) oriented at a mutual 90.degree. angle, wherein the lever (9) is connected to the drive nut (6), and the lever (11) is connected to a x-direction guide a mechanism.

Abstract: A guiding device comprising a carriage portion (13), which is aerostatically journalled on a base portion (11) and is guided in a rectilinear movement by means of five pre-stressed air bearings (21) in two guide planes of the base portion (11) enclosing an angle with each other. The air bearings (21) are pre-stressed by means of a magnet system comprising a permanent magnetic part and a ferromagnetic part, which are provided on the base portion and the carriage portion. Due to the fact that the magnetic system is arranged at an angle so that the plane of symmetry through the centre line of the magnet system encloses an acute angle with the two guide planes, all air bearings are pre-stressed solely by the magnet system. With the use of a linear electric motor (29) with permanent magnets for the drive of the carriage portion (13), the armature (41) and the stator (31) of the electric motor act at the same time as magnet system for pre-stressing the pre-tension air bearings.

Abstract: Two shearing blades disposed along two lines which intersect each other are carried on the bottom edges of two adjacent walls of a four-sided ram structure. The ram is supported at four points whereby to provide greater stability. The workpiece is carried on the aligned top surfaces of a fixed bed and a movable carriage. The movable carriages is movable in a first direction. Finger grippers, joined by a connecting bar, are movable in slots along the top surface of the movable carriage in a second direction. Thus, the workpiece is moved in the first direction by movement of the movable carriage and in the second direction by movement of the finger grippers. The workpiece may be precisely and accurately positioned under the shearing blades making use of sensors in each of the finger grippers and a lateral sensor at the end of the movable carriage.

Abstract: A surface inspection apparatus is equipped with a transfer machine which includes a first storage unit for storing a plurality of wafers therein, a first transfer portion for receiving the wafers from the first storage unit one by one and transferring them along a horizontal plane, a first receiver moving vertically between a lower position and an upper position for receiving the wafers from the first transfer portion when the first receiver moves from its lower position to its upper position and moving them up and down, a chuck moving to a predetermined position under the wafers received by the first receiver when the first receiver is at or near its upper position and receiving the inspected elements from the first receiver when the first receiver moves from its upper position to its lower position, the chuck holding the wafers in their fixed condition and moving them in a given direction along a horizontal plane while they are inspected, a second receiver moving vertically between a lower position and an u

Abstract: A carriage for fine movement includes a stationary stage, a movable stage slidably provided thereon, a moving mechanism, coupled to the stationary and movable stages, for moving the movable stage relative to the stationary stage, wherein at least one of the stationary stage, movable stage and moving mechanism is of a fine ceramic material to prevent distortion and variation with time to enhance the abrasion resistance.

Abstract: The XY-positioning table of the present invention includes a base, an X-axis-movable table and a Y-axis-movable table, as well as, X-axis, and Y-axis driving means, attached to said base: where the X-axis-movable table is provided with an X-axis nut to engage with a threaded shaft driven by said X-axis driving means; while in the interior cavity or space of the X-axis-movable table is provided a Y-axis nut capable of engaging with another threaded shaft driven by the Y-axis driving means with auxiliary bearings being provided between the Y-axis nut box and the Y-axis table for effecting X-axis rectilinear-motion, thus realizing a smooth and accurate relative X-Y directional movement between the X-axis and Y-axis movable tables and the bed.

Abstract: A repair terminal is disclosed for reworking defective components on printed circuit boards. The terminal has a heater arm which lowers itself over the component, and directs hot gas thereon. A vacuum shroud surrounds the heat zone around the component and removes excess heat so as to minimize damage to surrounding components. The heater arm has inner and outer tubes, the inner tube delivering hot gas the outer tube removing it. Thus the outer tube prevents an operator from being burned by the dangerously hot temperature of the inner tube. A workholder is also disclosed for holding and aligning the circuit board with the heater arm. The workholder is capable of adjustment along the X- and Y-axes as well as in the theta orientation.

Abstract: A movable table system comprises a base horizontally mounted on a foundation with an intermediate base engaged with the base through first guides so as to be movable reciprocatively in one linear direction. A movable table is engaged with the intermediate base through second guides similar to the first guides so as to be movable reciprocatively in the same linear direction. A direct-acting type drive is interposed between the movable table and the intermediate base for providing relative movement between the table and the intermediate base. Preferably, the base is mounted on the foundation through vibration absorbers.

Abstract: An alignment and assembly tool 10 is disclosed for aligning the ends of two very large cylinders 36 and 38 so that the ends may be welded together, with a cylindrical strengthening section (tee ring) 18 inserted between the cylinders and aligned and welded into the joint. The tool 10 has a U-shaped main body 11 with a horizontal top section 13 and two legs 15, which are attached to the ends of top section 13 and extend outward and downward. Horizontal bottom sections 12 extend outward from the bottoms 14 of legs 15. Tool 10 has one inner jackscrew 20 and one outer jackscrew 22 on each side of its center, extending downward from top section 13. Each of the two bottom sections 12 has an attached side clamp 24 for clamping the alignment tool 10 to two opposing skin stringers 26 of cylinders 36 and 38.

Abstract: Apparatus for and a method of precisely positioning an object to be subjected to localized heating at precise temperatures at the second focal point of an elliptical reflector which has an infra-red source at its first focal point. The apparatus includes a platform to support the workpiece for vertical movement relative to the reflector and infra-red source, and a movable probe which has a free end positionable in the axis of the reflector and in the plane of its second focal point to guide movement of the platform and workpiece to the second focal point.

Abstract: A frictionless supporting apparatus comprising a horizontally plane working table having magnet portions on its peripheries. Pairs of stationary magnets define therebetween a vertical space into which the working table is inserted. Magnetic repulsion between the magnet portions of the working table and the pairs of stationary magnets frictionlessly hold the working table between the pairs of stationary magnets. The working table also has vertical guide portions made of magnets extending along a predetermined one horizontal direction. A plane auxiliary table is arranged substantially in parallel to the working table. A motor is mounted on the auxiliary table for moving the working table in the predetermined one horizontal direction with respect to the auxiliary table. Pairs of guide magnets are provided on the auxiliary table, defining therebetween a horizontal space into which the guide portions of the working table are inserted.

Abstract: A first frame is provided, having a pair of parallel pusher bars, the inside surfaces thereof pressing against outer surfaces of a unitary workpiece support block positioned within the frame, and a second frame has a pair of pusher bars having inside surfaces pushing against the remaining outer surfaces of the unitary support block. Stationary drive means cause the independent orthogonal motion of each frame to thereby position the unitary block fitted between the overlapping frames. In a second arrangement, the unitary support block or post means is replaced by first and second pairs of post members in contact with inside surfaces of the parallel pusher bars of the first frame and in contact with outside surfaces of the parallel pusher bars of the second frame, and third and fourth pairs of post members are similarly positioned with respect to the frames.

Abstract: A machine for operating on sheet stock workpieces having stock grippers mounted on a work positioning carriage for moving the sheet stock workpiece along first and second relatively transverse paths in the plane of the stock to position the workpiece at predetermined positions relative to the machine tools. Work grippers are mounted on the work positioning carriage for adjustment relative to the carriage when the work grippers are released and the work grippers are automatically clamped against movement relative to the carriage when the work grippers are actuated to grip the stock.

Abstract: In the reticle positioning system disclosed herein, a unitary structure is machined to form both a frame for holding a reticle and a compound linkage permitting lateral and rotational movement of the frame within its own plane under the control of three servo motors generating controllable displacements.

Abstract: The invention is of an X-Y coordinate positioning device, in which a U-shaped profiled rail is placed on a worktable. Within this rail, a lengthwise slide is moved along the X-coordinate by a first linear drive system driven by a stationary motor. Mounted on this lengthwise slide is a cross-slide for motion along the Y-coordinate. The cross-slide is moved by a second motor-driven linear drive system. In order to reduce the inertial loads, the second linear drive system includes a stationary stepping control motor, which drives a profiled toothed belt. The toothed belt engages toothed guide rollers at the ends of the cross-slide.

Abstract: An optical positioning stage arranged for the precise movement of light optical components composed of a pair of plates having rail receiving grooves, a pair of rails joining the plates and attached thereto by an adhesive, and a mounting table slideably disposed between the rails and the plates. The mechanical configuration of the unit allows multiple combinations to provide movement in all three dimensions.

Abstract: A guiding apparatus having a slider supported in a floating manner above a base by means of hydrostatic bearings, a pressurized fluid supplying means for supplying the hydrostatic bearings with a pressurized fluid, and detecting means for detecting the displacement of the slider with respect to a designated coordinate. The pressure of the pressurized fluid from the pressurized fluid supplying means is adjusted in accordance with a signal which is obtained as a result of the comparison between the value representing the reference position of the slider with respect to the base and the value actually measured by the detecting means, thereby adjusting the sizes of the gaps for forming hydrostatic fluid film for the hydrostatic bearings, thereby to correct the position of the slider to the designated position. With this arrangement, the absolute position of the slider is precisely determined without being affected by disturbance factors such as the precision of assembling of the base and the slider.

Abstract: A jig for automatically welding pipe frames used to form vehicle seats is disclosed. In this jig, there is provided on a frame carrying plate a guide element having the reference plane of one of two side portions of a frame, so that the one side portion of the frame can be welded while it is in abutment with the guide element. To weld the other side portion of the frame, the frame carrying plate is moved and two adjusters provided in a bed plate are used for the reference. With such structure, while a welding machine remains fixed, by changing the references according to the portions to be welded in the width direction of the pipe frame, it is possible to weld the two side portions of the frame accurately.

Abstract: A precise movement device of the type for guiding a movable member with hydrostatic pressure or a magnetic field and moving the movable member substantially without a friction. The device includes a mechanism for supporting the movable member by the use of hydrostatic pressure or a magnetic field and for guiding the movement of the movable member, and includes a mechanism for generating a resistance against the movement of the movable member when the movable member is to be stopped, such that the movable member can be stopped at a desired position accurately and in a reduced time.

Abstract: Method and apparatus are disclosed for precisely positioning a pair of components such as optical components, including optical fibers, utilizing an apparatus which includes a first support for mounting the first component, a second support for mounting the second component and an elastic joint formed on the first support for moving the first support in relation to the second support by bending the elastic joint. In a preferred embodiment, the elastic joint includes a pair of parallel elastically bendable arms formed on the first support and bendable in a first direction so that the elastic joint provides a translation module.

Abstract: A positioning table device which includes a flat table supported so as to be displaceable both angularly and linearly in a plane. Three pushers having end faces abutting respective rollers are provided such that linear movements of the pushers in a plane parallel to the plane of the table in different reciprocal directions allows exact positioning and rotational movements of the table with any arbitrary position on the table as the center of rotation. In the preferred embodiments, the rollers are rotatable about axes of rotation perpendicular to the plane of the table and two of the end faces are parallel, the third being perpendicular thereto.

Abstract: Apparatus for feeding platelike workpieces to a tool station of a machine tool comprises a frame carrying a straight track, and a carriage, which is guided by said track and carries transverse conveying means for conveying the workpieces. In order to ensure that the workpieces will be properly supported, the transverse conveying means comprise at least one pair of endless conveyors, which are arranged one behind the other in their direction of travel and are adapted to support a workpiece. The endless conveyors of said pair or of each of said pairs are spaced apart in their direction of travel to provide an adequate space for the operation of the tools of the tool station, or at least one endless conveyor of said pair or of each of said pairs is mounted on a carrier, which is movable relative to the carriage in the direction of travel of said endless conveyors.

Abstract: A hybrid integrated circuit (10), having a plurality of chip carriers (12) mounted thereon, is positioned on a nest (50) of an apparatus (30). An operator, while activating pneumatic switches (58), moves a selected one of the plurality of chip carriers (12) to an inspection site. A sensor plunger (62) detects the presence of the chip carrier (12) and enables a positioning assembly (34), which centers the chip carrier within the inspection site and locks the nest (50), to prevent further movement thereof. A viewing adaptor (70) is then lowered about the selected chip carrier (12) to enable the operator to simultaneously inspect all solder joints (22) positioned beneath the selected chip carrier. Thereafter, the operator releases switch actuator (60) which allows the viewing adaptor (70) to be raised and enables the positioning assembly (34) to unlock the nest (50) so that another chip carrier (12) may be moved to the inspection site for inspection by the operator.

Abstract: The present invention relates to a positioner for positioning a work piece such as a sheet or plate having first guide rails extending in the direction of the X-axis and second guide rails extending in the direction of the Y-axis, first and second carriages respectively movably supported on said first and second guide rails, clamp support members respectively supported by the first and second carriages and being movable in the direction perpendicular to the direction of the movement of the carriages, and clamping devices mounted to each clamp support member and adapted to clamp the work piece.

Abstract: A hydrostatic pressure XY table comprising first and second sliding tables mounted on a bed. The two sliding tables are driven perpendicularly to each other by separate motors through a first lead screw supported on the bed and a second lead screw supported on the first sliding table. The bed has a first trapezoidal groove and the first sliding table has a second trapezoidal groove running perpendicular to the first trapezoidal groove. The first sliding table is engaged with the first trapezoidal groove and the second sliding table is engaged with the second trapezoidal groove. Four hydrostatic pressure guides are provided in the bed, to engage with engaging surfaces of the first sliding table. Four hydrostatic pressure guides are also provided in the first sliding table to engage with engaging surfaces of the second sliding table. A plurality of fluid pressure lines are provided for supplying hydrostatic pressure to the engaging surfaces of the first and second sliding tables.