Abstract: A system and method concurrently processes multiple wafers. A cassette structure includes multiple chucks and a drive spool for supporting and rotating the chucks. Each chuck holds a wafer in position while rotating. The cassette structure is loaded into a process chamber. Each chuck includes a self-locking mechanism that is activated by the centrifugal force generated from the rotation of the chuck. The self-locking mechanism centers and holds a wafer in position with respect to the chuck. A drive motor drives the drive spool, which causes the chucks to rotate. As the chucks are being rotated, a dispensing assembly delivers a processing chemical to the wafers.

Abstract: A wheel chuck includes a plurality of moveable jaws mounted upon a support structure. A plurality of moveable counterweights are mounted upon the support structure with each counterweight opposite from and connected to a corresponding one of the jaws. Upon rotation of the chuck the counterweights develop forces in opposition to centrifugal forces acting upon the jaws.

Abstract: A universal substrate holder of the invention for treating wafer substrates in liquids is provided with a shaft and a rod slidingly inserted into the central opening of the shaft. The end of the shaft that protrudes into the bowl supports a base platform for the substrate, while the end of the rod that protrudes into the bowl has radial arms that rigidly support an annular plate with pins that can pass through the opening of the base platform so that they can support the substrate above the surface of the platform. The annular plate supports clamping jaws made in the form of two-arm levers with shorter arms and longer arms. The longer arms are heavier and therefore in the stationary state of the holder keep the jaws turned into an open position. When the shaft begins to rotate, the jaws are turned under the effect of centrifugal forces into positions of clamping the substrate with the shorter arms.

Abstract: A rotating holder for tools or work pieces includes a chuck in the form of a hydraulic clamp bushing. The clamp bushing comprises a thin inner sleeve or wall, a solid outer sleeve and a plastic or hydraulic pressure medium which is entrapped between the sleeves. The thin inner sleeve is arranged to both center and firmly clamp a rotating tool or work piece when the hydraulic pressure medium is being pressurized. The clamp bushing is integrated with a mounting cone or with a machine spindle by a welding or soldering joint. The clamp bushing is formed with a bore at the periphery thereof for providing an opening to some type of means for pressurizing the hydraulic pressure medium. A protection ring is formed around the periphery of the clamp bushing and is rotatable to at least two positions, in one position of which the protection ring covers the bore for the pressurization means and in another position of which a passageway is opened to the pressurization means.

Abstract: A coupling device for high speed rotation applications comprised of a first member about a longitudinal axis having a collar integrally attached to a solid base and a second member about a longitudinal axis having a sleeve which is receivable within the collar. When the first and second members are rotated the sleeve expands within the collar to minimize or eliminate any clearance that may exist between the sleeve and collar. The coupling device may, among other applications, be utilized for machine tools such as milling cutters.

Abstract: A rotary tool is provided with a shank and a collar-like section, and further includes a plurality of screw-threaded holes drilled in a vertical end face of the collar-like section, in parallel relationships with the axis of the collar-like section. A plurality of balancing weights are removably screwed in the holes as required to balance the tool.