Abstract: There is provided a vibration damping material capable of exhibiting excellent vibration damping performance and of reducing its own weight while having high rigidity. The vibration damping material of the present invention used so as to be installed on a panel of a vehicle includes a viscoelastic layer and a constraining layer provided on one surface of the viscoelastic layer, wherein a relationship between a strain ?a and a strain ?b is 0<?a/?b<1, the strain ?a being a strain on a surface of the constraining layer on the opposite side to the viscoelastic layer, and the strain ?b being a strain on a surface of the constraining layer on a side in contact with the viscoelastic layer.

Abstract: Systems, devices and methods for the management of glucose levels in the body of patient featuring user interface input mechanisms configured to provide haptic feedback to the user are provided.

Abstract: The present disclosure relates to circuitry for driving a piezoelectric transducer. The circuitry comprises pre-processor circuitry configured to process an input signal to generate a processed signal; driver circuitry coupled to the pre-processor circuitry and configured to generate a drive signal, based on the processed signal, for driving the piezoelectric transducer; and processor circuitry configured to determine a resonant frequency of the piezoelectric transducer. The pre-processor circuitry is configured to process the input signal based on the determined resonant frequency so as to generate the processed signal.

Abstract: There are provided a characteristic table generation system and so on capable of enhancing the convenience of the user.

Abstract: Operating a bi-directional double-base bipolar junction transistor (B-TRAN). One example is a method comprising: conducting a first load current from an upper terminal of the power module to an upper-main lead of the transistor, through the transistor, and from a lower-main lead of the transistor to a lower terminal of the power module; and then responsive assertion of a first interrupt signal, interrupting the first load current from the lower-main lead to the lower terminal by opening a lower-main FET and commutating a first shutoff current through a lower-control lead the transistor to the lower terminal; and blocking current from the upper terminal to the lower terminal by the transistor.

Abstract: The invention relates to a method and an actuator system for determining and applying a voltage to a piezoelectric actuator (PEA) to achieve a given setpoint displacement. The method involves determining a relation dcal(V) between a PEA displacement measure (d) and voltage (V) and a relation ttcal(V) between transition time (tt) and voltage and combining the determined relations to calculate a relation d(tt) between the displacement measure and transition time during an initial calibration procedure. This relation is characteristic for the PEA, and by determining a new relation ttnew(V) after repeated biasing of the PEA, a compensated relation dc(V) can be calculated by substituting ttnew(V) in the calculated d(tt). The compensated relation dc(V) compensates for piezo creep effects due to the wear and can be used to determine the voltage to be applied directly, or be used in other compensation algorithms.

Abstract: An optical element driving mechanism has an optical axis and includes a fixed portion, a movable portion, and a driving assembly. The movable portion is movable relative to the fixed portion. The driving assembly drives the movable portion to move relative to the fixed portion. The driving assembly moves in a first direction to move the movable portion in a second direction, wherein the first direction is different from the second direction.

Abstract: Circuitry for estimating a displacement of a piezoelectric transducer in response to a drive signal applied to the piezoelectric transducer, the circuitry comprising: monitoring circuitry configured to be coupled to the piezoelectric transducer and to output a sense signal indicative of an electrical signal associated with the piezoelectric transducer as a result of the drive signal; wherein the circuitry is configured to generate a difference signal based on the drive signal and the sense signal; and wherein the circuitry further comprises processing circuitry configured to apply at least one transfer function to the difference signal to generate a signal indicative of the displacement of the piezoelectric transducer.

Abstract: A hearing system is disclosed comprising a support unit, and at least one abutment unit, wherein the support unit supports the at least one abutment unit. The at least one abutment unit has a contact surface. The support unit is configured to be placed at a user's head such that the contact surface of the at least one abutment unit contacts the user's head in an area surrounding one of the user's ears, in particular, in an area of one of the user's mastoid bones. The at least one abutment unit comprises a contact element, the contact element being configured to transmit vibrations generated by a vibration generating unit towards the contact surface. The contact element is made of a fiber-reinforced plastic material.

Abstract: A humidifier includes a first housing removably connected to a second housing that includes the majority of the electrical components of the humidifier. The first housing includes a first air inlet for accepting air; a first air outlet; a central chamber for holding water; a piezoelectric transducer installed in the central chamber for atomizing water; and a first electrical connector electrically connected to the piezoelectric transducer. The first housing is configured to discharge humidified air from the first air outlet.

Abstract: An ultrasonic apparatus includes a transmitting circuit, an ultrasonic transducer, a receiving circuit, and a capacitance measuring circuit. The ultrasonic transducer is a three-terminal ultrasonic transducer that includes a transmitting electrode, a receiving electrode, and a common electrode. The transmitting circuit outputs a driving signal to the transmitting electrode to cause the ultrasonic transducer to transmit ultrasonic waves. The receiving circuit receives a receive signal from the receiving electrode. The capacitance measuring circuit is electrically connected to the receiving electrode to measure the electrostatic capacitance of the ultrasonic transducer.

Abstract: Systems and methods for the ultrasonic disruption of biofilm and algae growth on underwater structures utilize an ultrasonic actuator that produces a natural frequency in the ultrasonic range. In some embodiments, the ultrasonic actuator includes one or more piezoelectric transducers.

Abstract: A device includes a superconductor layer and a piezoelectric layer positioned adjacent to the superconductor layer. The piezoelectric layer is configured to apply a first strain to the superconductor layer in response to receiving a first voltage that is below a predefined voltage threshold and to apply a second strain to the superconductor layer in response to receiving a second voltage that is above the predefined voltage threshold. While the device is maintained below a superconducting threshold temperature for the superconductor layer and is supplied with current below a superconducting threshold current for the superconductor layer, the superconductor layer is configured to 1) operate in a superconducting state when the piezoelectric layer applies the first strain to the superconductor layer and 2) operate in an insulating state when the piezoelectric layer applies the second strain to the superconductor layer.

Abstract: A driving control apparatus controls an actuator that relatively moves a vibrator and a contact body contacting the vibrator, the vibrator being made to generate vibration by applying a first signal and a second signal having a phase difference. The driving control apparatus includes at least one processor or circuit configured to execute a plurality of tasks including a first determining task configured to determine the phase difference, and a second determining task configured to determine a voltage amplitude of power supplied to the actuator so that the voltage amplitude decreases as an absolute value of the phase difference decreases.

Abstract: An electromechanical actuator for electrical flight controls of an aircraft, the actuator comprising a transmission shaft, four electromechanical conversion members, each having a respective stator and rotor secured to the transmission shaft, and four control systems, each dedicated to respective ones of the electromechanical conversion members. The stator has teeth and windings surrounding at least one tooth, whereas the rotor is provided with permanent magnets. Each electromechanical conversion member is a flux-concentrating member and each winding is concentric and has a single layer. The electromechanical actuator is intended in particularly for controlling a hydraulic actuator via a mechanical transmission within an electrical flight control device of an aircraft.

Abstract: An electronic component package includes a lid, a first layer, a second layer disposed between the first layer and the lid and configuring a first frame, a third layer disposed between the second layer and the lid and configuring a second frame, a bonding member bonding the third layer to the lid, and a via wire electrically coupled to the lid and penetrating the second frame, in which, when an inner diameter of a first corner portion of the first frame is denoted by R1 and an inner diameter of a second corner portion of the second frame overlapping the first corner portion in a plan view is denoted by R2, R1<R2, and an inner surface of the second corner portion protrudes more than an inner surface of the first corner portion in a cross-sectional view.

Abstract: An inertia drive motor is disclosed which includes an element to be driven, and a stator, the stator having: an elastic frame, at least one friction element arranged on the elastic frame and configured to be brought into frictional contact with the element to be driven, and a first electromechanical actuator and a second electromechanical actuator, which are configured to cause, by interaction, a deformation of the elastic frame, upon excitation with different excitation voltages having a sawtooth signal, so as to displace the at least one friction element for driving the element to be driven by stick-slip contact with the friction element.

Abstract: According to one embodiment, a magnetic disk device including a disk, a head that writes data to the disk and reads data from the disk, an actuator that is rotationally driven and controls movement of the head mounted above the disk, a microactuator that is mounted on the actuator and finely swings the head in a radial direction of the disk by a piezoelectric element that extends and contracts when a drive voltage based on a bias voltage is applied to the piezoelectric element, and a controller that switches the bias voltage according to an operation state during an access process.

Abstract: A motion control system and method for controlling a stick-slip piezo motor includes an electronic controller and an analog driver for moving a mechanical device. When operating in a digital circuit mode, an electronic controller controls a digital-to-analog converter for moving the stick-slip piezo motor at a low speed. When operating in a faster analog circuit mode, the electronic controller, via an analog driver, operates to control an analog hardware circuit to move the stick-slip piezo motor at a high speed. The electronic controller operates in the digital circuit mode at start-up of the piezo motor.

Abstract: Provided are a fluid control device capable of operating a piezoelectric pump even in a case where a low discharge pressure or a slow pressurization speed is required and a sphygmomanometer including the fluid control device. A fluid control device includes a piezoelectric pump that includes a piezoelectric element, a self-excited circuit that performs, upon application of a driving power source voltage thereto, self-excited oscillation to drive the piezoelectric element, a switch that interrupts the driving power source voltage for the self-excited circuit, and a control circuit that changes an on duty ratio of the self-excited circuit by switching between states of the switch at a predetermined switching frequency and a predetermined on duty ratio.

Abstract: An ultrasonic apparatus includes an ultrasonic transducer, a transmitting circuit, a receiving circuit, a Q-factor measuring circuit, and a frequency measuring circuit. The ultrasonic transducer is a three-terminal ultrasonic transducer that includes a transmitting electrode, a receiving electrode, and a common electrode. The transmitting circuit outputs a driving signal to the transmitting electrode to cause the ultrasonic transducer to transmit ultrasonic waves. The receiving circuit receives a receive signal from the receiving electrode. The frequency measuring circuit measures a resonant frequency of the ultrasonic transducer from a reverberation signal in the receive signal. The Q-factor measuring circuit measures a Q factor of the ultrasonic transducer from the reverberation signal in the receive signal.

Abstract: A vibration device is provided that includes a vibration element with a piezoelectric vibrator and a driving device that causes the vibration element to vibrate. The vibration element includes a translucent body and the piezoelectric vibrator is electrically coupled to the driving device. The driving device includes a first circuit that applies an electric signal to the piezoelectric vibrator to render the vibration element in a resonant state, a second circuit that applies an electric signal to the piezoelectric vibrator according to a feedback signal output from the piezoelectric vibrator, and a switch that switches coupling between the first circuit and the piezoelectric vibrator and coupling between the second circuit and the piezoelectric vibrator at a certain timing.

Abstract: A vehicle system includes: an olfaction sensor comprising: a blower configured to draw air from a passenger cabin through an inlet; a sensor located downstream of the inlet and including one or more proteins configured to measure an amount of a chemical in the air passing the sensor; and a purge source configured to selectively flows a purge gas into the sensor; and a control module configured to selectively take one or more remedial actions based on the amount of the chemical in the air.

Abstract: A piezoelectric motor includes a driven member rotating around a rotation axis, and a plurality of piezoelectric vibrators rotating the driven member by transmitting drive forces to the driven member. The plurality of piezoelectric vibrators includes a first piezoelectric vibrator and a second piezoelectric vibrator at a larger distance from the rotation axis than the first piezoelectric vibrator. The control method for the driven member includes, for acceleration of the driven member, rotating the driven member by the drive force of the second piezoelectric vibrator when a rotation velocity of the driven member is lower than a first velocity, and rotating the driven member by the drive force of the first piezoelectric vibrator when the rotation velocity of the driven member is equal to or higher than the first velocity.

Abstract: The disclosed technology includes a fluid heating device that can include a heating chamber in communication with a heating element, and an ultrasonic transducer in communication with the heating chamber and for transmitting ultrasonic sound waves. The disclosed technology includes an ultrasonic transducer system that includes an assembly configured to attach to a fluid heating device, and an ultrasonic transducer affixed to the assembly. The disclosed technology also includes a method for ultrasonic cleaning within a fluid heating device that can include a controller configured to receive flow data from a flow sensor; based on the flow data, determine that fluid is flowing through a heating chamber; and output instructions for an ultrasonic transducer to output ultrasonic sound waves.

Abstract: The present disclosure relates to circuitry for driving a piezoelectric transducer based on an input signal. The circuitry comprises: primary driver circuitry configured to receive the input signal and to output a primary driving signal to the piezoelectric transducer based on the input signal; and secondary driver circuitry configured to receive an error signal indicative of an error between the input signal and the primary driving signal and to output a secondary driving signal to the piezoelectric transducer based on the error signal, wherein the primary driver circuitry and the secondary driver circuitry both comprise switching converter circuitry.

Abstract: A method for identifying a mechanical impedance of an electromagnetic load may include generating a waveform signal for driving an electromagnetic load and, during driving of the electromagnetic load by the waveform signal or a signal derived therefrom, receiving a current signal representative of a current associated with the electromagnetic load and a back electromotive force signal representative of a back electromotive force associated with the electromagnetic load. The method may also include implementing an adaptive filter to identify parameters of the mechanical impedance of the electromagnetic load, wherein an input of a coefficient control for adapting coefficients of the adaptive filter is a first signal derived from the back electromotive force signal and a target of the coefficient control for adapting coefficients of the adaptive filter is a second signal derived from the current signal.

Abstract: A drive circuit for charging a printhead for ejecting drops of ink is provided, the printhead having a capacitance. The drive circuit comprises a power supply comprising a first connection and a second connection. An inductor is connected to the first connection of the power supply, wherein the inductor is connected to a first drive connection of the printhead to provide a charge path for current to charge the capacitance. The second connection of the power supply is connected to a second drive connection of the printhead. The drive circuit also comprises means for applying a plurality of charging voltage pulses to the inductor to provide a single charge of the capacitance for a single cycle of ink ejection from the printhead. A method of operating the drive circuit is also provided.

Abstract: Provided is a control device for controlling an electromagnetic actuator that vibrates an operation device by driving the operation device supported by an elastic support part so as to be elastically vibrated in one direction in a vibrating direction thereof, the control device comprising: a current pulse supply unit configured to supply a driving current pulse to a coil of the electromagnetic actuator as a driving current for driving the operation device in accordance with a touch operation of the operation device, wherein the current pulse supply unit supplies the drive current pulse capable of starting the elastic vibration as a main driving current pulse, and then supplies the drive current pulse capable of adjusting attenuation period of the elastic vibration as a sub-driving current pulse.

Abstract: A control console for a powered surgical tool. The console includes a transformer that supplies the drive signal to the surgical tool. A linear amplifier with active resistors selectively ties the ends of the transformer primary winding between ground and the open circuit state. Feedback voltages from the transformer windings regulate the resistances of the active resistors.

Abstract: A method of distinguishing between a first-type touch event and a second-type touch event is disclosed. A force-measuring and touch-sensing system includes piezoelectric force-measuring elements (PFEs) and piezoelectric ultrasonic transducers (PUTs), wherein each PUT can be configured as a transmitter (PUT transmitter) and/or a receiver (PUT receiver). The force-measuring and touch-sensing system is configured at a sense region. Each PUT transmitter transmits ultrasound signals towards the sense region and voltage signals are generated at the PUT receivers in response to ultrasound signals arriving from the sense region. Voltage signals are generated at PFEs in response to a low-frequency mechanical deformation of the respective piezoelectric capacitors. An event is determined to be a first-type touch event or a second-type touch event depending on a PUT data decrease and a magnitude of PFE data.

Abstract: Various methods and systems are provided for a multi-frequency transducer array. In one example, the transducer array is fabricated by forming an interdigitated structure from a first comb structure with a first sub-element and a second comb structure with a second sub-element. The interdigitated structure is coupled to a base package, a matching layer, and a backing layer to form a plurality of multi-frequency transducers.

Abstract: A temporary cast that includes an exterior shell, a lining body including an inner layer, one or more integrated pressure sensors communicatively coupled to a controller, and a plurality of artificial muscles disposed between the inner layer and the exterior shell. Each of the plurality of artificial muscles is communicatively coupled to the controller and includes a housing including an electrode region and an expandable fluid region, a dielectric fluid housed within the housing, and an electrode pair positioned in the electrode region of the housing. The electrode pair includes a first electrode fixed to a first surface of the housing and a second electrode fixed to a second surface of the housing, where the electrode pair is actuatable between a non-actuated and actuated states such that actuation from the non-actuated state to the actuated state directs the dielectric fluid into the expandable fluid region, expanding the expandable fluid region.

Abstract: In a DC pulse power supply device according to the present invention, at the time of starting pulsing operation, the duty of the pulsing operation of a chopper circuit is controlled, a switching element is set to an ON state, and the pulse width at which the DC reactor is in an energized state is made variable over the period until the capacitor voltage is charged to a sufficient voltage to reset the magnetic saturation of the DC reactor. Gradually increasing the pulse width suppresses the degree of increase in the DC reactor current, and suppresses the DC reactor current below the magnetic saturazion level. As a result, the magnetic saturation of the DC reactor is suppressed at the time of starting pulsing operation.

Abstract: A drive control device 100, which controls driving of a vibration type actuator 200 including a vibrator 214 that includes a piezoelectric element 203, and a rotor 207, includes amplifier circuits 11 and 12 amplifying a power supply voltage to generate a drive voltage to be applied to the piezoelectric element 203, and a microcomputer unit 1. The microcomputer unit 1 performs a control to increase the amplitude of the drive voltage to perform acceleration from when the vibration type actuator 200 is started to when a target speed of the rotor 207 is reached, decrease the frequency of the drive voltage without changing the amplitude of the drive voltage when power supplied to the piezoelectric element 203 exceeds a first power limit P-Lim1, and increase the amplitude of the drive voltage when the power falls below a second power limit P-Lim2 during an operation of decreasing the frequency.

Abstract: A driving circuit for driving a piezoelectric load, can include: a rechargeable power supply; a power stage circuit coupled between the rechargeable power supply and the piezoelectric load; where during a first operation interval of an operation period, the rechargeable power supply charges the piezoelectric load through the power stage circuit, such that a power supply voltage signal provided to the piezoelectric load in the first operation interval corresponds to a reference voltage in a first interval; and where during a second operation interval of the operation period, the piezoelectric load charges the rechargeable power supply through the power stage circuit, such that the power supply voltage signal in the second operation interval corresponds to the reference voltage in a second interval.

Abstract: Methods and apparatus for reducing a transient glitch in ultrasound applications are disclosed. An example apparatus includes a transducer to (A) output a signal during a transmit phase and (B) receive a reflected signal corresponding to the signal during a receive phase; a receiver switch coupled to the transducer at a first node, the receiver switch to (A) open during the transmit phase and (B) close during the receive phase; and a clamp coupled to the transducer at the first node, the clamp to provide a high impedance during the transmit phase and the receive phase and provide a low impedance during a transient phase.

Abstract: The invention relates to a measuring device for a scanning probe microscope that includes a sample receptacle which is configured to receive a measurement sample to be examined, a measuring probe which is arranged on a probe holder and has a probe tip with which the measurement sample can be measured. A displacement device is configured to move the measuring probe and the sample receptacle relative to each other, in order to measure the measurement sample, such that the measuring probe, in order to measure the measurement sample, executes a raster movement relative to said measurement sample in at least one spatial direction. Movement measurement signals indicating a first movement component in a first spatial direction that disrupts the raster movement and a second movement component in a second spatial direction that disrupts the raster movement, which second spatial direction extends transversely to the first spatial direction.

Abstract: In a vibration unit, a first electrode of a sensor circuit of a control unit is electrically connected to a first external electrode of a first piezoelectric element, a second electrode of the sensor circuit is electrically connected to a second external electrode of the first piezoelectric element, a first electrode of a drive circuit is electrically connected to a first external electrode of a second piezoelectric element, and a second electrode of the drive circuit is electrically connected to a second external electrode of the second piezoelectric element. Only a relatively small voltage induced by an electromotive force occurring due to the flexure of the first piezoelectric element is applied to the sensor circuit. In addition, only a relatively large drive voltage to be applied to the second piezoelectric element is applied to the drive circuit.

Abstract: Ultrasound devices and methods are described, including a repeatable ultrasound transducer probe having ultrasonic transducers and corresponding circuitry. The repeatable ultrasound transducer probe may be used individually or coupled with other instances of the repeatable ultrasound transducer probe to create a desired ultrasound device. The ultrasound devices may optionally be connected to various types of external devices to provide additional processing and image rendering functionality.

Abstract: Provided is a driving apparatus that sets a signal wave in a low-frequency region having a frequency of 10 Hz or more and 250 Hz or less as a modulating wave and outputs to a piezoelectric actuator a driving signal having a waveform obtained by modulating an amplitude of a sine wave in a high-frequency region having a frequency of 20 kHz or more and 40 kHz or less with the modulating wave.

Abstract: An apparatus that includes at least one nebulizer that includes a mesh material having a plurality of pores, a vibrating actuator coupled to the nebulizer and configured to produce ultrasonic vibration when energized according to a set energy profile, and a reservoir receiver configured to receive a reservoir that holds a topical formulation, the reservoir being coupled to the nebulizer when received. When the nebulizer is placed in contact with the topical formulation, vibration of the mesh nebulizer by the vibrating actuator, according to the set energy profile, ejects droplets of the topical formulation from the plurality of pores, forming a spray.

Abstract: A pressure detection sensor having a piezoelectric film with a first region and a second region located outside the first region, the piezoelectric film being deformable by a pressing operation, a first electrode pair disposed on a first main surface and a second main surface in the first region of the piezoelectric film, and a second electrode pair formed on a first main surface and a second main surface in the second region of the piezoelectric film. When the piezoelectric film receives a pressing operation, the first electrode pair outputs a voltage having a polarity different from that of the second electrode pair.

Abstract: A hearing system is disclosed comprising a support unit, and at least one abutment unit, wherein the support unit supports the at least one abutment unit. The at least one abutment unit has a contact surface. The support unit is configured to be placed at a user's head such that the contact surface of the at least one abutment unit contacts the user's head in an area surrounding one of the user's ears, in particular, in an area of one of the user's mastoid bones. The at least one abutment unit comprises a contact element, the contact element being configured to transmit vibrations generated by a vibration generating unit towards the contact surface. The contact element is made of a fiber-reinforced plastic material.

Abstract: A vibration device includes a piezoelectric element, a vibration member to which the piezoelectric element is bonded, and a wiring member connected with the piezoelectric element. A method for vibrating the vibration device includes inputting a signal including a fundamental frequency component to the piezoelectric element through the wiring member, and vibrating the vibration device in a vibration mode that includes the fundamental frequency component and does not approximately include a high order frequency component that is n times (n represents an integer of 2 or more) the fundamental frequency component. The fundamental frequency component is lower than the resonance frequency component of the vibration device.

Abstract: In order to provide a piezo valve in which it is possible to accurately predict the remaining lifespan of a piezo actuator, there are provided a valve seat, a valve body that is able to move between a fully closed position in contact with the valve seat and a fully open position, a piezo actuator that drives the valve body, a drive circuit that receives an input signal, and outputs to the piezo actuator a corresponding drive voltage, and a leakage current detector that, when the drive circuit outputs a voltage equal to or greater than a maximum rated voltage that drives the valve body to the fully closed/open position, detects leakage current from the piezo actuator. When the leakage current is detected or in a state immediately prior to detection, a fluid is flowing between the valve seat and the valve body.

Abstract: A piezoelectric element driving circuit includes a boosting circuit, a driving circuit, a waveform shaping circuit, and a computing circuit. The driving circuit includes a differential amplifier circuit with an LPF, an amplifier circuit with a BPF, an inverter, a resistor, and a comparator. The driving circuit applies a driving signal to a piezoelectric element of a piezoelectric pump. The waveform shaping circuit extracts a voltage signal from the driving circuit. On the basis of the voltage signal, the waveform shaping circuit and the computing circuit determine a voltage value corresponding to driving current flowing through the piezoelectric element. The computing circuit outputs a control signal to the boosting circuit on the basis of the voltage value. The boosting circuit sets the value of a DC supply voltage on the basis of the control signal, and outputs the DC supply voltage.

Abstract: A piezoelectric element drive circuit includes a piezoelectric element driven at a predetermined frequency and having a resonant frequency of (2n+1) times the predetermined frequency (n is a predetermined natural number), and a drive voltage generator that has a first output terminal connected to a first terminal of the piezoelectric element and a second output terminal connected to a second terminal of the piezoelectric element. When the piezoelectric element is driven, a waveform of potential difference between the first output terminal and the second output terminal is a step wave which transitions while taking an intermediate potential. A time length for which the potential difference is the intermediate potential is around (t2?t1)/(2n+1) in a period of time from time t1 at which the potential difference falls to the intermediate potential to time t2 at which the potential difference falls to the intermediate potential subsequently.

Abstract: An ultrasonic device according to an aspect of the present disclosure includes a substrate in which an opening section piercing through the substrate in a thickness direction is provided, a vibration plate provided on the substrate to close the opening section, a piezoelectric element provided in a position corresponding to the opening section on a first surface at the opposite side of the substrate side of the vibration plate, and an elastic layer provided in contact with a second surface at the substrate side of the vibration plate at the inner side of the opening section of the substrate. The elastic layer includes a curved surface recessed to the vibration plate side at the opposite side of the vibration plate side.

Abstract: An optical system is provided. The optical system includes a first optical module. The first optical module includes a first fixed portion, a first movable portion, a first driving assembly, and a circuit assembly. The first movable portion is used for connecting to a first optical element, and the first movable portion is movably connected to the fixed portion. The first driving assembly is used for driving the first movable portion to move relative to the first fixed portion. The circuit assembly is electrically connected to the first driving assembly.