Abstract: A viscoelastic body is interposed between a vibrating membrane vibrating in association with a piezoelectric vibrator composed of a piezoelectric element and a base and a support member supporting the vibrating membrane. The viscoelastic body attenuates vibration transmitted from the support member to the vibrating membrane and converts vibration of the vibrating membrane in the surface direction parallel to its main surfaces to vibration of the vibrating membrane in the direction nearly perpendicular to the surface direction. The vibrating membrane is annular with an opening at the center, and the base is joined to the vibrating membrane coaxially with opening.

Abstract: A multi-DOF piezoelectric actuator that may be constructed with sizes of about or less than one millimetre. The multi-DOF piezoelectric actuator is capable of generating motion of a rotor element or slider element, about or in, each of the three fundamental axes of three dimensional space. The actuator can comprise a piezoelectric element (10) having one or more sidefaces, a first endface, and a second endface, wherein at least one or more sidefaces comprise a plurality of separate sideface electrodes (11) and at least one of the first or second endfaces comprise an endface electrode (12). A transducer element (30,40) and isolation structure (5) for use in a piezoelectric actuator are also described.

Abstract: An ultrasonic transducer includes a case, a reflective portion, and a piezoelectric body. The case has a substantially cylindrical shape including one closed end in the center axis direction that defines a top. The piezoelectric body is disposed on the inner surface of the top of the case. The reflective portion is arranged to oppose and be spaced apart from the piezoelectric body. The distance between the piezoelectric body and the reflective portion is greater than the maximum displacement of the piezoelectric body and is substantially an odd number multiple of a ¼ wavelength of sound waves or less than or equal to the ¼ wavelength.

Abstract: An ultrasound transducer that includes a backing layer, an insulating layer disposed on top of the backing layer, and a plurality of conductive traces disposed on top of the insulating layer are disclosed. Each of the conductive traces has an upper face. A plurality of transducer elements, each having (a) a core of piezoelectric material and (b) a conductive coating disposed beneath the core, are bonded directly to the upper face of a respective one of the plurality of conductive traces. Methods for fabricating ultrasound transducers are also disclosed.

Abstract: A piezoelectric thin-film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode and an upper electrode that is located opposite the lower electrode across at least a part of the piezoelectric film. A mass load film is provided on the upper electrode. The mass load film includes a plurality of concave or convex patterns in at least a region that faces the lower electrode. The plurality of concave or convex patterns are densely arranged in a central portion of the region and are sparsely arranged in a peripheral portion of the region.

Abstract: An ultrasonic transducer for use in a fluid medium includes at least one transducer core having at least one acoustic/electric transducer element. The ultrasonic transducer furthermore includes at least one decoupling element which is configured to reduce a structure-borne noise coupling between the transducer core and a housing. The decoupling element includes at least one porous plastic material, in particular a foamed plastic material. The porous plastic material includes at least one thermosetting polymer and/or at least one thermoplastic.

Abstract: Disclosed is an apparatus used in an electronic device for providing haptic feedback. The apparatus includes a main board defining a mounting surface, a vibration unit mounted on the mounting surface of the main board, the vibration unit being capable of vibrating along a direction parallel to the mounting surface. At least two screws are provided to fix the vibration unit on the main board, and a pair of stop block is provided to restricting the position of the vibration unit.

Abstract: An ultrasonic transducer that improves workability of a housing, suppresses variations in resonant frequency, and has stable characteristics is constructed. The ultrasonic transducer includes a bottomed circular cylindrical housing and a piezoelectric element provided at substantially a center of a bottom of the housing. The bottom of the housing has a slope portion that gradually becomes thinner from a position at which the piezoelectric element is provided toward an inner wall surface of the housing, and a flat portion that extends from an outer edge of the slope portion to the inner wall surface of the housing while maintaining a thickness of the outer edge of the slope portion.

Abstract: The generation of secondary vibration different in oscillation frequency from primary vibration is suppressed. In a quartz-crystal resonator in which excitation electrodes are formed respectively on both surfaces of a quartz-crystal piece whose primary vibration is thickness shear vibration, a hole portion is formed at a portion, in the excitation electrode, where secondary vibration is generated, and a concave portion is formed in a region, in the quartz-crystal piece, corresponding to the hole portion. Alternatively, a convex portion are preferably provided symmetrically with respect to a center of the quartz-crystal resonator. Consequently, the secondary vibration attenuates and the oscillation frequency of the secondary vibration shifts to a high frequency side.

Abstract: In one embodiment of the invention, a composition for a damping wedge in an ultrasonic probe having a wedge body is disclosed, the composition including: a viscoelastic material having a ratio of the imaginary part to the real part of the modulus of elasticity of at least about 5% and an acoustic impedance less than that of the wedge body; a filament-shaped filler in an effective amount to provide good dispersability in the viscoelastic material and to substantially match the acoustic impedance of the damping wedge to the wedge body; and a viscosity enhancer in an effective amount to increase the viscosity of the composition to maintain a homogenous distribution of the filament-shaped filler by preventing the filament-shaped filler from settling.

Abstract: Disclosed herein is a piezoelectric actuator. The piezoelectric actuator includes a piezoelectric element generating vibrations by repetitively expanding and restoring according to power applied from the outside to be linearly driven; a support member contacts the piezoelectric element in order to support the piezoelectric element; and vibration control members attached to one surface of and the support member and the piezoelectric element.

Abstract: An acoustic resonator comprises: a substrate; a first electrode adjacent the substrate; a layer of piezoelectric material adjacent the first electrode; a second electrode adjacent the layer of piezoelectric material; and a passivation layer adjacent the layer of piezoelectric material. The passivation layer includes a recessed feature. Fill material is provided in the recessed feature of the passivation layer.

Abstract: In a particular embodiment, a system to dissipate heat in an information handling system includes a first heat-generating component adapted to process first data and a second heat-generating component adapted to process second data. The system also includes a cooling fluid guide including an electroactive material. The cooling fluid guide is adapted to change from a first shape to a second shape, in response to receiving a trigger voltage or in response to no longer receiving the trigger voltage. The system also includes a controller adapted to detect a data load processed at the second heat-generating component and, in response to detecting the data load, to cause the trigger voltage to be received at, or no longer received at, the cooling fluid guide. The cooling fluid guide is adapted to direct an increased portion of cooling fluid toward the first heat-generating component when the cooling fluid guide is in a form of the second shape, as compared to the first shape.

Abstract: The present invention relates to a transducer device (10), comprising: an acoustic membrane (14); a piezoelectric element (12) mounted to the acoustic membrane; two oppositely arranged elastic damping elements (16a, 16b) between which a peripheral portion (22) of the acoustic membrane is sandwichably supported; and a clamp (28) having two surfaces (30a, 30b) between which the two elastic damping elements are clamped so that the two elastic damping elements are pressed together, whereby the peripheral portion of the acoustic membrane is secured between the two elastic damping elements. The present invention also relates to a method of assembling such a transducer device.

Abstract: A manufacturing method of an ultrasonic probe that has a signal foil made of a copper foil patterned by an additive method is provided. The manufacturing method includes preparing a base material and forming an insulating layer on a surface of the material, patterning the insulating layer by exposure, development, and peeling according to a lithographic technique, forming a cavity reaching an upper surface of the base material in the insulating layer along the patterning, forming a signal foil by performing plating in the cavity in the order of copper plating and solder plating, and demolding the formed signal foil from the cavity.

Abstract: An acoustic wave device includes: a first piezoelectric thin film resonator including a first lower electrode, a first upper electrode and a first piezoelectric film sandwiched between the first lower and upper electrodes; a decoupler film provided on the first upper electrode; and a second piezoelectric thin film resonator provided on the decoupler film and including a second lower electrode, a second upper electrode and a second piezoelectric film sandwiched between the second lower and upper electrodes, wherein the first piezoelectric film and the second piezoelectric film comprise aluminum nitride and include an element increasing a piezoelectric constant of the aluminum nitride.

Abstract: The piezoelectric damping device is a passive piezoelectric vibration suppression and damping device for reducing amplitude of vibration in structures. The piezoelectric damping device includes a magnetic layer having opposed inner and outer faces, with the inner face thereof being adapted for releasable magnetic attachment to a vibrating structure, such as a metallic pipe, for example. A piezoelectric layer is secured to the outer face of the magnetic layer. Preferably, an electrically insulating layer is sandwiched between the magnetic layer and the piezoelectric layer. The electrically insulating layer is preferably an electrically insulating adhesive. An electrical shunting circuit is in electrical communication with the piezoelectric layer, such that vibration in the piezoelectric layer caused by the vibrating structure generates electrical energy, which is then dissipated by the electrical shunting circuit, thus damping vibration in the vibrating structure.

Abstract: Backing substrates for reducing parasitic echoes produced within a ultrasonic transducer are provided comprising a polymeric material, for example, an epoxy having a glass transition temperature (Tg) ranging from about 10 to 50° C.; or an epoxy having an acoustical attenuation that increases by at least about 2 dB/mm at 5 MHz in a temperature range of about 5° C. to 40° C. Transducer assemblies comprising the backing substrates and methods for producing the assemblies are also provided.

Abstract: A thin-film piezoelectric acoustic wave resonator that has a large k2, can trap acoustic energy in a resonating part, does not excite spurious resonance, or can finely adjust resonance frequency and a high-frequency filter using the thin-film piezoelectric acoustic wave resonator are provided without increasing the number of processes. At both ends of a vibrating part (1), fixing parts (8) are physically connected, and between the vibrating part (1) and each of the fixing parts (8), an acoustic insulating part (10) and a phase rotating part (11) are physically connected. As with the vibrating part (1), the acoustic insulating part (10) and the phase rotating part (11) are made up of an upper metal film (3), a piezoelectric thin film, and a lower metal film, and an acoustic wave reflector (6) is provided on each of an upper surface, a lower surface, and side surfaces of the vibrating part (1), the acoustic insulating part (10), and the phase rotating part (11).

Abstract: An ultrasonic sensor includes a substantially cylindrical case including a bottom portion and a side wall portion and a plurality of members disposed within the case. A reinforcement having a substantially ring shape is fitted on a thick section in the case at a location that is not in contact with an inner surface of a thin section of the side wall portion. A piezoelectric element is attached to an inner bottom surface of the case. An elastic member is fitted on the reinforcement so as to cover a substantially ring-shaped opening region of the reinforcement. A gap between the elastic member and an inner circumferential surface of the case is filled with a first filler. The terminal holding member is placed on the elastic member. A surrounding region of the terminal holding member is filled with a second filler.

Abstract: Embodiments of a missile, an airframe and a structure comprising piezoelectric fibers and a method for active structural response control are generally described herein. In some embodiments, a housing structure includes a composite material containing a plurality of piezoelectric fibers adapted to generate an electrical signal in response to a deformation in the structure and to deform the structure to provide low frequency stiffness and strength performance while attenuating high frequency vibrations.

Abstract: A thin-film bulk acoustic wave (BAW) resonator, such as SBAR or FBAR, for use in RF selectivity filters operating at frequencies of the order of 1 GHz. The BAW resonator comprises a piezoelectric layer (14) having first and second surfaces on opposing sides, a first electrode (16) extending over the first surface, and a second electrode (12) extending over the second surface, the extent of the area of overlap (R1) of the first and second electrodes determining the region of excitation of the fundamental thickness extensional (TE) mode of the resonator. The insertion loss to the resonator is reduced by providing a dielectric material (18) in the same layer as the first electrode (16) and surrounding that electrode. The material constituting the dielectric material (18) has a different mass, typically between 5% and 15%, from the material comprising the first electrode (16) it surrounds. The mass of the dielectric material (18) can be lower or higher than the mass of the first electrode (16).

Abstract: An ultrasonic sensor includes a cylindrical casing having a bottom portion. The casing has a piezoelectric element on a bottom surface thereof. A substrate is attached to an end surface of an opening portion of the casing with a damping member provided therebetween such that the damping member covers the opening portion. Pin terminals are arranged so as to extend through the substrate and the damping member and are electrically connected to the piezoelectric element with lead wires. An inner space of the casing is filled with foamable resin.

Abstract: Improved acoustic attenuation materials and applications are provided. An improved acoustic attenuation material may include a woven layer of fibers made of porous polymers, such as porous polytetrafluoroethylene (PTFE), that include interstitial space. An improved acoustic attenuation material may include sheets of porous polymers interleaved with layers of epoxy. The sheets of porous polymers may include through holes. An embodiment of an ultrasonic transducer that includes a backing with woven layers of porous PTFE fibers is provided. The ultrasonic transducer that includes a backing with woven layers of porous PTFE fibers may be used in a three-dimensional ultrasound imaging apparatus. An embodiment of an ultrasonic transducer that includes a plurality of sheets of porous PTFE interleaved with layers of epoxy is provided. The ultrasonic transducer that includes a plurality of sheets of porous PTFE may be used in an ultrasonic imaging catheter.

Abstract: An apparatus and method is provided to produce energy from movement of a user. At least one pair of plates is utilized to secure an array of cymbal transducers therebetween. The array of cymbal transducers is electrically interconnected with signal conditioning circuitry and power storage member. Electrical interconnections may comprise parallel and/or series connections between ones or groups of the cymbal transducers.

Abstract: A driving apparatus has a piezoelectric element as a driver. The driving apparatus includes a first vibrator which generates an elliptical vibration when a voltage of a predetermined frequency is applied; a first member which holds the first vibrator; a second member which includes a first sliding member to which the first vibrator is pressed and makes a relative displacement with respect to the first member by being driven by the elliptical vibration of the first vibrator; and a first resonance preventive member which is provided to the second member and prevents a resonance in the second member from being generated by the elliptical vibration of the first vibrator.

Abstract: A focused ultrasound transducer includes a first ultrasonic emitter and at least one metallic ultrasonic lens acoustically coupled thereto. The emitter generates ultrasonic energy that propagates along a beam path projecting therefrom. The at least one metallic ultrasonic lens is positioned at least partially in the beam path so that it can direct (e.g., focus, defocus, and/or collimate) in at least one direction (or along at least one plane) at least some of the ultrasonic energy propagating from the emitter. The metallic lens may be formed by extrusion, by molding (e.g., diecast molding or thermoforming), or by sintering (e.g., powder metallurgy). The metallic lens also advantageously functions as a heat sink, improving thermal performance of the ultrasound transducer.

Abstract: In a piezoelectric thin film device of the present invention, the degree of flexibility is enhanced in selection of a piezoelectric material constituting a piezoelectric thin film and the crystal orientation in the piezoelectric thin film. A piezoelectric thin film filter, including four film bulk acoustic resonators, has a configuration where a filter section for providing a filter function of the piezoelectric thin film filter is bonded with a flat base substrate mechanically supporting the filter section via an adhesive layer. In manufacturing of the piezoelectric thin film filter, a piezoelectric thin film is obtained by performing removal processing on a piezoelectric substrate, but the piezoelectric thin film obtained by removal processing cannot independently stand up under its own weight. For this reason, a prescribed member including the piezoelectric substrate is previously bonded to the base substrate as a support prior to the removal processing.

Abstract: A system for transporting particles includes a substrate and a plurality of spaced electrically conductive electrodes carried by the substrate. Further included is a carrier medium adapted for the retention and migration of particles disposed therein, wherein the carrier medium is in operational contact with the electrodes, and a vibration generator is positioned in relation to the substrate to impart vibrations into the carrier medium. In an alternative embodiment, the vibration generator is configured to generate an acoustic traveling wave, which includes a vibration component and a motivation component.

Abstract: A continuous drop emitter includes a liquid supply chamber containing a liquid held at a positive pressure. First and second nozzles are in fluid communication with the liquid supply chamber and emit first and second continuous streams of a liquid. First and second stream break-up transducers independently synchronize the break up of the first and second continuous streams of the liquid into first and second streams of drops. An acoustic damping material is located adjacent to or within the liquid supply chamber for damping sound waves generated within the liquid chamber by the first and second stream break-up transducer. The continuous drop emitter can be configured with a Helmholtz resonant chamber tuned to a critical stimulation frequency having an acoustic damping material located therein.

Abstract: Embodiments of the acoustic galvanic isolator comprise a carrier signal source, a modulator connected to receive an information signal and the carrier signal, a demodulator, and an electrically-isolating acoustic coupler connected between the modulator and the demodulator. The electrically-isolating acoustic coupler comprises series-connected decoupled stacked bulk acoustic resonators (DSBARs).

Abstract: Provided is a micro stage comprising: a body having a vertically perforated through-hole passing through a central portion thereof; a bobbin including a tip portion with an electron emission tip embedded in the center thereof, and passing through the through-hole of the body to be moved in the through-hole along a first axis perpendicular to a vertical direction; a first piezoelectric element disposed on the body and lengthened when a voltage is applied thereto to push the bobbin in one direction along the first axis; a second piezoelectric element disposed on the body and lengthened when a voltage is applied thereto to push the bobbin in the other direction along the first axis; and an upper cover that is coupled to an upper portion of the body and has a through-hole, through which the bobbin passes and communicates with the through-hole of the body, wherein the bobbin can be positioned as desired along the first axis by adjusting the voltages applied to the first piezoelectric element and the second piezoel

Abstract: An ultrasonic liquid treatment chamber has an elongate housing through which liquid flows longitudinally from an inlet port to an outlet port thereof. An elongate ultrasonic waveguide assembly extends within the housing and is operable at a predetermined ultrasonic frequency to ultrasonically energize liquid within the housing. An elongate ultrasonic horn of the waveguide assembly is disposed at least in part intermediate the inlet and outlet ports, and has a plurality of discrete agitating members in contact with and extending transversely outward from the horn intermediate the inlet and outlet ports in longitudinally spaced relationship with each other. The horn and agitating members are constructed and arranged for dynamic motion of the agitating members relative to the horn at the predetermined frequency and to operate in an ultrasonic cavitation mode of the agitating members corresponding to the predetermined frequency and the liquid being treated in the chamber.

Abstract: A first supporting section provided between a substrate section and a second supporting section. The first supporting section is structured by, e.g., a film formed from a material having a higher acoustic impedance than a piezoelectric body and the substrate section, or a film formed from a material having a smaller Q value than the piezoelectric body and substrate section. By inserting the first supporting section, most vibration from the second supporting section toward the substrate section is reflected, and also a vibration having been transmitted to the substrate section from the second supporting section is prevented from reflecting at the bottom of the substrate section 40 and then returning in a direction of the vibration section.

Abstract: Embodiments of the acoustic galvanic isolator comprise a carrier signal source, a modulator connected to receive an information signal and the carrier signal, a demodulator, and an electrically-isolating acoustic coupler connected between the modulator and the demodulator. The acoustic coupler comprises no more than one decoupled stacked bulk acoustic resonator (DSBAR). An electrically-isolating acoustic coupler based on a single DSBAR is physically small and is inexpensive to fabricate yet is capable of passing information signals having data rates in excess of 100 Mbit/s and has a substantial breakdown voltage between its inputs and its outputs.

Abstract: A piezoelectric multi-layer component is described herein. The component includes a plurality of ceramic layers, and one or more electrode layer. The one or more electrode layer has a material structure that is different than the plurality of ceramic layers and is configured to at least partially block a propagation in a longitudinal direction of pressure waves acting on the piezoelectric multi-layer component.

Abstract: The invention relates to a piezoelectric multi-layer component with a plurality of piezoelectric layers (1) lying one above the other and with electrode layers (2a, 2b) arranged between the piezoelectric layers, wherein an absorption layer (4) of absorbing mechanical vibration energy is arranged in the layer stack.

Abstract: A backing material that is advantageous in insulation property and can realize a desired acoustic impedance without making the cross-linking and curing reaction of elastomer or resin as a parent material unstable. The backing material is provided on a backside of vibrators for transmitting and/or receiving ultrasonic waves in an ultrasonic probe, and the backing material includes: a parent material containing elastomer or resin and having an insulation property; and composite powder dispersed to fill the parent material, and the composite powder includes powder of a material having a larger acoustic impedance than that of the parent material and an insulation coating for covering a surface of the powder, and the insulation coating contains an oxide of an element of group XIII to group XV except for carbon (C), nitrogen (N), phosphorus (P).

Abstract: An object of the present invention is to provide a piezoelectric thin film device including a single or a plurality of film bulk acoustic resonators wherein a frequency impedance characteristic is unsusceptible to spuriousness. In a film bulk acoustic resonator, a piezoelectric thin film is supported by a support substrate via an adhesive layer. An upper electrode and a lower electrode each having a predetermined pattern are formed on upper and lower surfaces of the piezoelectric thin film. Further, on the upper surface of the piezoelectric thin film, an additional film for adding a mass to an outside of an excitation region is formed as superposed on the upper electrode.

Abstract: The invention relates to an electromechanical motor having a stator that has a drive unit and a frame component in which the drive unit is held, and a sliding element that is constructed such that, actuated by the drive unit, it performs a movement with respect to the stator in a direction of translation, wherein the drive unit has at least one electromechanical drive element that extends in the direction of translation and a power transmission element that is constructed so as to transmit a movement of the drive element to the sliding element. The sliding element has a supporting component and a drive rail, the drive rail extending in the direction of translation and interacting with the power transmission element and the drive rail being held at both its end faces in the supporting component, and between the supporting component and the frame component of the stator, there is a bearing for supporting the sliding element in the frame component.

Abstract: A piezoelectric device is attached to an inner bottom surface of the outer case having a tubular shape including a bottom, and an inner case is disposed within the outer case. In an ultrasonic vibration acting surface of the inner case that is arranged to face the bottom surface of the outer case, a mass of the inner case is arranged to restrain vibration of the outer case, which is generated by the piezoelectric device. A first cutout is provided in a portion of the ultrasonic vibration acting surface and arranged to face the piezoelectric device so as to flatten an ultrasonic beam generated by vibrations of the piezoelectric device and the outer case. Second cutouts are provided at locations on the ultrasonic vibration acting surface spaced away from the first cutout in a line symmetrical relationship with a long axis of the first cutout defining a symmetrical axis.

Abstract: The active/passive absorber for extended vibration and sound radiation control includes principally two layers. The first layer has a low stiffness per unit area which allows motion in the direction perpendicular to its main plane. The second layer is principally a mass layer. These two combined layers have a frequency of resonance close to one of the main structure. The dynamic behavior of the coupled system makes the active/passive absorber a passive absorber; however, the first layer can be electrically actuated to induce motion in the direction perpendicular to its main plane. This addition property induces and/or changes the motion of the mass layer and therefore improves the dynamic properties of the active/passive absorber system. The active/passive absorber can have multiple mass layers and multiple elastic layers stacked one on top of the other. In addition, the mass layers can be continuous or discretized, and have varying thicknesses and shapes for sections and/or segments in the mass layer.

Abstract: An ultrasonic sensor includes a cylindrical outer case with a bottom and a piezoelectric element fixed to the inner side of the bottom portion of the outer case. A ring-shaped inner case having a central hole extending in the axial direction in the central portion thereof is disposed inside the sidewall portion of the outer case. A flat or substantially flat portion is provided around the central hole of the inner case, and a viscoelastic filler is arranged so as to extend from the central hole to the flat or substantially flat portion of the inner case. A tabular member is disposed on the flat or substantially flat portion so as to face the flat or substantially flat portion with the filler interposed therebetween. When the inner case vibrates, shear deformation occurs in the filler interposed between the flat or substantially flat portion and the tabular member since the tabular member is not substantially deformed, and the vibration is reduced by the viscoelastic damping effect.

Abstract: A solderless, direct cable interconnect for an array transducer and method for the fabrication thereof. An ultrasonic array transducer includes an acoustic backing layer, a piezoelectric layer containing an array of piezoelectric elements (typically created from a solid layer of piezoelectric material disposed over a matching layer cut with a dicing saw and fixed on a solid ground plane), and plurality of control wires, disposed between the backing layer and the piezoelectric layer. A solid backing material which will displace slightly at temperature and pressure is formed into the desired shape. Kerfs are precisely cut into the shaped backing material in a pattern such that they will line up with the center of each piezoelectric element in the piezoelectric layer.

Abstract: In one embodiment, a cascaded monolithic crystal filter is provided. A first filter includes two resonators having a pair of electrodes with the monolithic crystal between. At least one electrode has a periphery which includes a feature capable of shifting a frequency associated with an anharmonic mode in the filter. The filter has a second resonator acoustically coupled to the first resonator. A second filter is cascaded with the first filter. The second filter includes a pair of acoustically coupled resonators.

Abstract: A broad band energy harvesting system to harvest energy from a structure and associated methods are provided. The system includes a structure carrying a plurality of environmentally produced vibration frequencies extending over a frequency range and an energy harvesting apparatus positioned in vibration receiving communication with the structure to harvest energy from the structure. Each energy harvesting apparatus includes broadly tuned energy harvesting generators having relatively low quality factor and corresponding relatively wide bandwidth. The energy harvesting generators collectively provide energy harvesting over multiple modes to thereby provide energy harvesting over a substantial portion of the frequency range. Each energy harvesting generator can include a cantilevered beam connected to a common backbone comprised of a resilient material configured to transfer energy between adjacent generators to further enhance energy harvesting.

Abstract: A photoetchable glass ceramic is used to form a three dimensional structure for a transducer component. This photostructurable material allows generation of various shapes or structures. For example, a matching layer is formed, in part, using photoetchable glass ceramics with an anechoic-shaped gradient structure. The gradient structures are then filled with materials having desired impedance properties. By allowing generation of desired structures within the matching layer, a desired acoustic impedance property may be provided. As another example, a hollow column is photo etched and used for providing air backing in a backing layer. As yet another example, a transducer layer is formed within a framework of photostructurable material. A plurality of holes with associated shelves is provided for pick-and-place locating of transducer elements within an array. The photostructurable material assists in manufacturing.

Abstract: Microelectromechanical systems (MEMS) include critical devices for various highly sensitive applications. However, MEMS operation may be impaired by vibration. A modular vibration control pedestal for integration with a MEMS is provided according to embodiments of the present invention which includes a piezoelectric perovskite oxide disposed on a substrate and a shape memory alloy component component disposed on the piezoelectric perovskite oxide. In particular embodiments of a MEMS device including a modular VCP, vibration is reduced by at least 50%.

Abstract: A first supporting section 30 is provided between a substrate section 40 and a second supporting section 20. The first supporting section 30 is structured by, e.g., a film formed from a material having a higher acoustic impedance than a piezoelectric body 11 and the substrate section 40, or a film formed from a material having a smaller Q value than the piezoelectric body 11 and substrate section 40. By inserting the first supporting section 30, most vibration from the second supporting section 20 toward the substrate section 40 is reflected (arrow a), and also a vibration having been transmitted to the substrate section 40 from the second supporting section 20 is prevented from reflecting at the bottom of the substrate section 40 and then returning in a direction of the vibration section 10 (arrow b).

Abstract: An electrical component includes a ceramic substrate and a piezoelectric transformer, which is connected electrically and mechanically to the ceramic substrate.