Abstract: An inventive accelerometer includes a proof mass and a pair of vibrating sensors. An excitation-and-detection circuit drives one sensor at resonant frequencies f1 and F1, with f1?F1; a second excitation-and-detection circuit drives the other sensor at resonant frequencies f2 and F2, with f2?F2. The vibrational modes driven at the frequencies f1 and f2 are the same for each sensor; the vibrational modes driven at the frequencies F1 and F2 are the same for each sensor. Compressive or tensile loads oppositely applied by the proof mass to the vibrating sensors cause a difference frequency ?F=F1?F2 to vary monotonically with acceleration of the apparatus along a sensing axis, from which a measurement of acceleration can be generated.

Abstract: An inventive accelerometer includes a proof mass, vibrating sensors, and an excitation-and-detection circuit. The vibrating sensors are substantially identical, and each exhibits corresponding fundamental and higher-order vibrational modes characterized by corresponding fundamental and higher-order resonant mode frequencies. The excitation-and-detection circuit drives each corresponding vibrating sensor at one of its resonant mode frequencies f1 or f2; the vibrational modes driven at the frequencies f1 and f2 are the same for each sensor. Compressive or tensile loads oppositely applied by the proof mass to the vibrating sensors cause a difference frequency ?f=f1?f2 to vary monotonically with acceleration of the apparatus along the sensing axis. The excitation-and-detection circuit includes at least one low-pass filter with a low-pass cut-off frequency fLP that is less than ?f.

Abstract: An inventive accelerometer includes a proof mass and a pair of vibrating sensors. Excitation-and-detection circuits drive vibrational modes of one sensor at resonant frequencies f1, F1, and F?1, and drive those same vibrational modes of the other sensor at resonant frequencies f2, F2, and F?2. Compressive or tensile loads oppositely applied by the proof mass to the vibrating sensors cause difference frequencies ?f=f1?f2, ?F=F1?F2, and ?F?=F?1?F?2 to vary monotonically with acceleration of the apparatus along a sensing axis. A measurement of acceleration can be generated based at least in part on a linear or nonlinear function of one or more or all of f1, f2, F1, F2, F?1, or F?2, and can be generated using a trained neural network.

Abstract: A force sensor comprising a force sensitive resistor having a common electrode and an electrode array separated by a force sensitive resistor material. The sensor includes a preload structure, where the preload structure imparts a force on the force sensitive resistor material. The sensor may also include a signal conditioning board to read a signal from the electrode array and convert it to a digital output.

Abstract: A MEMS device is provided that includes a semiconductor substrate including a main surface extending perpendicular to a first direction and a side surface extending on a plane parallel to the first direction and to a second direction that is perpendicular to the first direction. At least one cantilevered member protrudes from the side surface of the semiconductor substrate along a third direction that is perpendicular to the first and second directions. The at least one cantilevered member includes a body portion that includes a piezoelectric material. The body portion has a length along the third direction, a height along the first direction and a width along the second direction, and the height is greater than the width. The at least one cantilevered member is configured to vibrate by lateral bending along a direction perpendicular to the first direction.

Abstract: There is provided a vibrational energy harvester comprising: a frame, a flexure assembly coupled to the frame, the flexure assembly comprising a flexure configured to flex in a first direction relative to the frame and a mass fixed to the flexure, wherein when the mass is displaced in the first direction from a rest position, the flexure provides a restoring force on the mass to bring the mass back to the rest position, and a transduction assembly configured to convert movement of the mass and flexure into electrical energy, wherein the frame comprises a cavity positioned so that, if the mass is displaced in the first direction beyond a threshold distance, a portion of the flexure assembly extends into the cavity so that compression or restriction of fluid in the cavity applies an additional force on the flexure assembly.

Abstract: Systems and methods for testing steam traps or other similar devices in a hot water or steam system are described. A tester includes a wand that is handheld that can communicate with a handheld electronic device which in turn can communicate with a central monitor for storing and compiling readings as historical profile data. The wand includes a probe to physically contact the device to acoustically sense the performance of the device. The probe includes a probe tip and a stack of acoustic elements, an electrode, a stack mass, and a head to covert the acoustic signal into an electrical signal. The handheld device includes circuitry to process the information, interact with the user, and transmit information to and from the handheld electronic device and/or the central monitor.

Abstract: A sensor device that senses proper acceleration. The sensor device includes a substrate, a spacer layer supported over a first surface of the substrate, at least a first tapered cantilever beam element having a base and a tip, the base attached to the spacer layer, and which is supported over and spaced from the substrate by the spacer layer. The at least first tapered cantilever beam element tapers in width from the base portion to the tip portion. The at least first cantilever beam element further including at least a first layer comprised of a piezoelectric material, a pair of electrically conductive layers disposed on opposing surfaces of the first layer, and a mass supported at the tip portion of the at least first tapered cantilever beam element.

Abstract: The present disclosure provides a flexible electric generator and methods for fabricating the same. The flexible electric generator comprises a flexible triboelectric layer covering the electrode layer of a flexible piezoelectric generator that enhances output power by combining piezoelectric effect and triboelectric effect. The reliability of the flexible electric generator under bending is also improved due to the presence of the flexible triboelectric layer. The fabrication methods of the disclosed flexible electric generators are simple, thereby enabling large-scale manufacturing.

Abstract: A seismic sensor assembly can include a housing that defines a longitudinal axis; a sensor; sensor circuitry operatively coupled to the sensor; and overvoltage protection circuitry electrically coupled to the housing.

Abstract: Provided is a low frequency vibrating actuator device. The low frequency vibrating actuator device includes a substrate including a pair of connection electrodes, an actuator provided on the pair of connection electrodes to generate vibration, a support provided on the actuator, a vibration membrane provided on the support to vibrate according to the actuator, and a vibrating mass provided on the vibration membrane to vibrate according to the vibration membrane. The actuator includes a plurality of laminated insulating layers and internal electrodes that are alternately laminated between the insulating layers adjacent to each other, and a top surface of the support, which contacts the vibration membrane, has an area that is equal to or less than that of a bottom surface of the support, which contacts the actuator.

Abstract: Described herein is a ruggedized microelectromechanical (“MEMS”) force sensor including both piezoresistive and piezoelectric sensing elements and integrated with complementary metal-oxide-semiconductor (“CMOS”) circuitry on the same chip. The sensor employs piezoresistive strain gauges for static force and piezoelectric strain gauges for dynamic changes in force. Both piezoresistive and piezoelectric sensing elements are electrically connected to integrated circuits provided on the same substrate as the sensing elements. The integrated circuits can be configured to amplify, digitize, calibrate, store, and/or communicate force values electrical terminals to external circuitry.

Abstract: A bone conduction device including an external component, the external component comprising a sound processor and transducer, the transducer configured to generate mechanical forces, and the external component configured for positioning behind a recipient's ear such that the mechanical forces are transmitted from the external component to a recipient's bone to generate a hearing percept via bone conduction.

Abstract: The invention relates to an electronic system for an accelerometer having a piezoelectric element and a first mechanical resonance frequency, comprising: a) a damping circuit configured to: —receive an acceleration signal from the piezoelectric element; —electronically dampen an amplitude of the first mechanical resonance frequency; and—generate a damped acceleration signal, b) an extender configured to: —receive the damped acceleration signal; —extend the frequency response; and—output an extended damped acceleration signal, wherein the extender is configured to have a first electronic anti-resonance frequency matching the damped first mechanical resonance frequency, and to have a frequency response between the first electronic anti-resonance frequency and a higher second frequency that is substantially opposite to a corresponding frequency response of the combination of the accelerometer and the damping circuit.

Abstract: A SAW device includes a mounting substrate including a mounting surface, a SAW chip mounted on the mounting surface, a dummy chip mounted on the mounting surface, and a resin part covering the acoustic wave chip and the dummy chip. The dummy chip includes an insulating dummy substrate, and one or more dummy terminals which are located on a surface of the dummy substrate on the mounting surface side and are bonded to the mounting surface. The dummy chip configures an open end when electrically viewed from the mounting substrate side.

Abstract: A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.

Abstract: A micro-vibration sensor and preparation method thereof. The method includes a metal sheet is coated with first curing material, and first curing material is cured into first cured layer; piezoelectric thin film element is attached to edge of first cured layer; one side, attached with piezoelectric thin film element, of first cured layer is vertically placed into second curing material, and second curing material is cured into second cured layer; and metal sheet is removed to obtain micro-vibration sensor. Due to fact that piezoelectric thin film element is arranged at a crack tip, during micro-vibration, stress in stress field of crack tip is rapidly increased due to crack stress deformation, and stress signal is efficiently converted into electric signal; and micro-vibration sensor has characteristics of being low in detection limit and high in accuracy.

Abstract: An electrical connector includes two lateral mounting bush. A knock sensor which delivers data representative of the operation of a fuel injector is integrally overmoulded in one of the mounting bush. The knock sensor includes a piezoelectric member arranged between a base member and a seismic member.

Abstract: A system includes a microphone unit coupled to a roof of an autonomous vehicle. The microphone unit includes a microphone board having a first opening. The microphone unit also includes a first microphone positioned over the first opening and coupled to the microphone board. The microphone unit further includes an accelerometer. The system also includes a processor coupled to the microphone unit.

Abstract: A method includes measuring a first signal from a set of pyroelectric devices at a first temperature and measuring a second signal from a set of piezoelectric devices at a first acceleration. The method also includes measuring a third signal from the set of pyroelectric devices at a second temperature and measuring a fourth signal from the set of piezoelectric devices at a second acceleration. The method further includes adjusting a piezoelectric calibration using the first, second, third, and fourth signals.

Abstract: An acoustically enhanced collar for monitoring vital signs of a pet animal, may comprise an elastic band having a working surface configured to wrap around a neck of a pet animal and an oppositely faced rear surface, at least one sensor element situated along a circumference of the band and configured to measure at least one bioparameter from the following bioparameters: temperature, heart rate, respiration rate, movement; at least one acoustic concentrator projecting as a bump toward the neck from the working surface on a first side of the at least one sensor element; at least one acoustic concentrator projecting as a bump toward the portion from the working surface on a second side of the at least one sensor element and acoustic balancers projecting from the rear surface at least partly behind the acoustic concentrators. Preferably, the acoustic concentrators and balancers have a base end having an “X”shape.

Abstract: A measuring device for the determination of at least one thermal property of a fluid, for example, the volumetric heat capacity and the thermal conductivity, wherein the measuring device includes a thermal property sensor and an evaluation unit, wherein the evaluation unit is adapted to determine the thermal property from a measurement signal determined by the thermal property sensor, wherein the thermal property sensor includes a heater, a first temperature sensor and a second temperature sensor, wherein the thermal property sensor includes a mounting plate with an opening, wherein the heater, the first temperature sensor and the second temperature sensor are arranged above or inside the opening.

Abstract: An energy harvester apparatus, system and method. A cantilevered beam resonator includes a cantilever beam and a base defined by the ends of the cantilever beam. The cantilevered beam resonator further includes a piezoelectric transducer composed of one or more piezoelectric components. The piezoelectric transducer is generally mounted beneath the base of the cantilevered beam resonator. In some example embodiments, the piezoelectric component can be configured in a split electrode configuration composed of a single split arrangement or more than one split (e.g., two splits, three splits, four splits, and so on).

Abstract: The disclosure relates to a piezoelectric acceleration sensor. The piezoelectric acceleration sensor includes: a charge output member comprising a base, a piezoelectric element disposed on the base and a mass, wherein the base includes a supporting portion and a connecting portion disposed on the supporting portion and extending in a first direction, and the piezoelectric element and the mass are sleeved on the connecting portion; a shielding cover sleeved on the connecting portion, wherein the shielding cover is connected to the connecting portion and the supporting portion, the shielding cover forms a shielding space outside a periphery of the connecting portion and above the supporting portion, and the piezoelectric element and the mass are arranged in the shielding space; and a housing coupled with the supporting portion, wherein the housing and the supporting portion form an accommodating space for accommodating the charge output member and the shielding cover.

Abstract: A sensor assembly includes a frame defining a sensor axis having opposing endplates with axially extending supports. The opposing endplates are connected by a pair of axially extending side beams. A suspended mass is within an interior of the frame suspended from the supports of the frame. A plurality of piezoelectric material layers are operatively connected to sides of respective spacers opposite the frame to damp vibrations of the suspended mass.

Abstract: Disclosed is a piezoelectric inertial drive stage including a piezoelectric inertial driver, a slider and a holder. The driver includes a mounting portion for the mounting on the holder, a friction portion coupling to the slider, a flexure portion between the mounting portion and friction portion, a piezoelectric element with a first end bonded to the mounting portion and a second end bonded to a movement portion, the movement portion transferring the motion of the piezoelectric element to the friction portion to drive the slider.

Abstract: A multi-axis, single mass acceleration sensor includes a three-dimensional frame, a test mass, a plurality of transducers, and a plurality of struts. The test mass may have three principal axes disposed within and spaced apart from the frame. The transducers are mechanically coupled to the frame. The struts are configured to couple to the central mass at each of the three principal axes, respectively, and to couple with respective sets of the transducers, thereby suspending the test mass within the frame. The sensor is thus responsive to translational motion in multiple independent directions and to rotational motion about multiple independent axes.

Abstract: A three-axis piezoelectric accelerometer, comprising: a housing, three charge output elements arranged inside the housing, and a connector electrically connected to the three charge output elements, wherein the three charge output elements are respectively used for detecting vibrations in directions along X-axis, Y-axis and Z-axis which are perpendicular to each other in pairs. The charge output element comprises: a support comprising a connecting part; a piezoelectric element being an annular structural body, wherein the piezoelectric element is connected to the connecting part in a sheathed manner and is provided with a first deformation groove penetrating a side wall of the piezoelectric element to disconnect the piezoelectric element in a circumferential direction; and a mass block being an annular structural body, wherein the mass block is connected to the piezoelectric element in the sheathed manner, and the piezoelectric element is in interference fit with the connecting part and the mass block.

Abstract: An ultrasound patch includes one or more transmit and receive piezoelectric transducer elements. In some embodiments, the transducer elements are positioned on a ramp on a patient pad of the patch that is configured to fit within an anatomic space between the trachea and the sternocleidomastoid muscle to orient the transducer elements toward a carotid artery. In some embodiments, a flexible phased array transducer includes a number of pillar piezoelectric elements joined by a flexible adhesive with metal electrodes deposited thereon. The phased array transducer is mounted to a flexible circuit board that allows the transducer to bend and conform to a subject's anatomy.

Abstract: The disclosure provides a piezoelectric acceleration sensor including a charge output element, a casing, a cable assembly and a connector. The casing is snap-fitted to a supporting portion of a base of the charge output element, and forms a receiving space for receiving the charge output element, the piezoelectric, and the mass block with the supporting portion. The cable assembly is connected to the supporting portion. The connector is connected to an end of the cable assembly facing away from the supporting portion, and is insulated from the cable assembly. One end of either of a first lead and a second lead of the cable assembly is electrically connected to the piezoelectric element, while the other end of the first lead is electrically connected to a conductive terminal of the connector and the other end of the second lead is electrically connected to a housing of the connector.

Abstract: Wireless piezoelectric accelerometers and systems are provided. A wireless piezoelectric accelerometer may comprise a piezoelectric sensing element configured to sense mechanical acceleration and produce an electrical charge signal in response of the sensed mechanical acceleration, a signal processing module (SPM) configured to convert the electrical charge signal into a voltage signal, and process and digitize the voltage signal, and a wireless module configured to modulate and transmit the digitized voltage signal as wireless signals. The piezoelectric sensing element, the SPM and the wireless module are packaged in a casing. The casing comprises a metallic shielding chamber configured to enclose the piezoelectric sensing element. The casing further comprises a non-metallic portion located in relative to the wireless module to allow transmission of the wireless signals. Corresponding wireless piezoelectric accelerometer systems are also provided.

Abstract: A metallic diaphragm disk incorporating a piezoelectric material bonded thereto and operatively coupled to a base rim of a housing provides for closing an open-ended cavity at the first end of the housing. In one aspect, plastic film adhesively bonded to at least one of an outer rim of the housing or an outer-facing surface of the disk provides for receiving an adhesive acoustic interface material to provide for coupling the housing to the skin of a test subject. In another aspect, an outer-facing surface of a base portion of the housing provides for receiving an adhesive acoustic interface material to provide for coupling the housing to the skin of a test subject, at least one inertial mass is operatively coupled to a central portion of the metallic diaphragm disk, and the opening in the first end of the housing is closed with a cover.

Abstract: A microelectro-mechanical system (MEMS) device includes a support structure formed of printed circuit board (PCB) materials; and a piezoelectric transducer formed at the support structure. Further, a MEMS assembly is described which shows such a MEMS device mounted at a component carrier. Furthermore, a method for manufacturing such a MEMS device is described.

Abstract: A device to determine integrity of a surface includes an exterior housing to contain and protect a plurality of components. The components include an accelerometer to measure a change in acceleration of the device, a microcontroller to monitor measurement data from the accelerometer and determine the integrity of the surface based on the measurement data. A communication circuit transmits or displays information regarding the integrity of the surface from microcontroller. A battery powers the plurality of components.

Abstract: A piezoelectric unit includes a piezoelectric element that expands and contracts in a first direction, a drive shaft connected with a first end surface of the piezoelectric element, a weight connected with a second end surface of the piezoelectric element, a protection member covering at least a part of the piezoelectric element, the drive shaft, and the weight, and a movable member engaged with the drive shaft. An inner wall surface of the protection member includes a weight position regulating portion that regulates a position of the weight, an element position regulating portion that regulates a position of the piezoelectric element, and a shaft position regulating portion that regulates a position of the drive shaft. An outer wall surface of the protection member has a movable member regulating portion that prevents the movable member from approaching the piezoelectric element.

Abstract: An elastomeric triboelectric generator housing structured for incorporation into a wheel for a vehicle is provided. The housing includes a least one cavity having a pair of opposed walls, and a triboelectric generator incorporated into the at least one cavity. The at least one cavity is structured to actuate responsive to application of at least one force to the housing along an axis extending through the at least one cavity and between a central axis of the housing and a circumference of the housing.

Abstract: A self-powered piezoelectric energy harvesting microsystem device has CMOS integrated circuit elements, contacts and interconnections formed at a proof mass portion of a die region of a semiconductor wafer. Piezoelectric energy harvesting unit components connected to the integrated circuit elements are formed at a thinned beam portion of the die region that connects the proof mass portion for vibration relative to a surrounding anchor frame portion. A battery provided on the proof mass portion connects to the integrated circuit elements. In a cantilever architectural example, the battery is advantageously located at a distal end of the proof mass portion, opposite the joinder with frame portion via the beam portion.

Abstract: An automotive component assembly comprises an input circuit portion for a sensor and a component portion. The input circuit portion is aligned with the component portion in a desired assembly position. A pocket is at least partially defined by the component portion to receive the input circuit portion and a clamping force retains the input circuit portion between a first layer and a second layer of the component portion forming the pocket. An overmold material is applied to retain the input circuit portion and the component portion to one another.

Abstract: A pressure sensor includes a sensor assembly and an evaluation unit. The; sensor assembly includes a sensor and an electrode arrangement. The sensor is configured to generate signals under the action of a pressure profile. The electrode arrangement is configured to transmit the signals to the evaluation unit. The evaluation unit includes an electric circuit board. The electric circuit board includes a base material that is electrically insulating with a specific volume resistance that is at least equal to 1015 ?cm at room temperature. The electric circuit board includes a high temperature region facing the sensor assembly and a normal temperature region that faces away from the sensor assembly.

Abstract: A sensor assembly includes a frame defining a sensor axis having opposing endplates with axially extending supports. The opposing endplates are connected by a pair of axially extending side beams. A suspended mass is within an interior of the frame suspended from the supports of the frame. A plurality of piezoelectric material layers are operatively connected to sides of respective spacers opposite the frame to damp vibrations of the suspended mass.

Abstract: An energy harvesting unit comprising: a package formed by a base and a lid, the package including a sealed interior volume and an exterior; a ledge formed in the sealed interior volume with a first cavity above and a second cavity below the ledge; a plurality of inner electrical contacts formed on the ledge; a plurality of outer electrical contacts formed on the exterior of the package wherein the outer electrical contacts are electrically connected to the inner electrical contacts through the package; and, a piezo-electric member in electrical communication with the inner electrical contacts and coupled to the ledge on a first side of the package and spanning across the cavity and coupled to the ledge on an opposite side of the package.

Abstract: A base end of a flexible plate-like structure body (111) having a first attribute is fixed to a pedestal (310) and a leading end thereof is connected to a connector between different attributes (112). Base end of a flexible plate-like structure body (113, 114) having a second attribute is connected to the connector between different attributes (112) and leading end thereof is given as free ends. Weight body (211, 212, 213) is connected to the lower surface of the connector between different attributes (112) and the leading-end lower surface of the plate-like structure body (113, 114) having the second attribute. When vibration energy is applied to the pedestal (310), the weight body (211, 212, 213) undergoes vibration, resulting in deformation of each of the plate-like structure bodies (111, 113, 114). The deformation energy is taken out by a charge generating element (400) such as a piezoelectric element to generate electric power.

Abstract: A piezoelectric ceramic plate which is slightly deformed by firing, includes a plate-shaped substrate, and an electronic component. The piezoelectric ceramic plate has a pair of main surfaces, a pair of opposing first side surfaces, and a pair of opposing second side surfaces. The pair of first side surfaces are baked surfaces, and the distance between the pair of first side surfaces measured at the center in the longitudinal direction is denoted by Lc and the distance between the pair of first side surfaces measured at ends in the longitudinal direction is denoted by Le. The ratio of the difference ?L between Le and Lc to Lc (?L/Lc) is 1.0% or less. The piezoelectric ceramic plate is suitably used as a piezoelectric ceramic plate having an area of each of the main surfaces of 360 mm2 or more and a thickness of 150 ?m or less.

Abstract: Capped microelectromechanical systems (MEMS) devices are described. In at least some situations, the MEMS device includes one or more masses which move. The cap may include a stopper which damps motion of the one or more movable masses. In at least some situations, the stopper damps motion of one of the masses but not another mass.

Abstract: A sensor device includes: a cylindrical casing; a vibration detecting unit including a detection probe, a bottomed cylindrical holder having a bottom in which a rear end of the detection probe is inserted and fixed, piezoelectric elements disposed rearward of the detection probe in the holder and configured to contact the rear end of the detection probe, and a push member held in the holder and configured to push the piezoelectric elements against the rear end of the detection probe, the vibration detecting unit being disposed in the casing; and a coil spring that is disposed rearward of the vibration detecting unit, is configured to contact the holder to bias the holder forward, and causes a tip of the detection probe to project from the casing, wherein the tip of the detection probe is pushed against a measurement object to detect vibration of the measurement object.

Abstract: A powder detection device includes a detection mechanism including an oscillation unit and a vibrated member, a vibrating member, and a detection unit. The oscillation unit outputs a signal having a frequency according to a state of a magnetic flux passing a space facing the oscillation unit. The vibrated member affecting the magnetic flux and disposed inside a container to face the oscillation unit via the container is vibrated by the vibrating member in a direction of facing the oscillation unit. The detection unit acquires frequency information of the signal at predetermined periods, determines presence/absence of an error of the detection mechanism based on error information associating a type of the error with a state of the signal, detects vibration of the vibrated member based on a change in the frequency information, and detects a remaining amount of powder in the container based on the detected vibration.

Abstract: A converter including a transducer layer which moves anchoring points to deform a piezoelectric diaphragm by bending. The converter includes a rigid arm between each anchoring point and a point for securing to the piezoelectric diaphragm to which it is attached, the rigid arm being tensioned between the anchoring point and the securing point and configured to transform movement of the anchoring points into a movement that deforms the piezoelectric diaphragm between bent and less bent positions. The securing point is located at the mid-point when the ends of the piezoelectric diaphragm are secured, with no degree of freedom, in a frame, and the securing point is located at one end of the piezoelectric diaphragm when the mid-point is secured, with no degree of freedom, in the frame.

Abstract: A system capable of highly sensitive measurement of material concentration values in a sample using an optical spectroscopic method is disclosed. The system utilizes high-speed data acquisition and high resolution sampling of the raw signals output by the sensors with reduced total channel counts, and performs frequency analysis of the signals using the Fourier transform method to process all sensor channels in parallel. When each sensor is targeting the detection of some certain materials at some certain frequencies, the system is capable of simultaneous detection of multiple materials of interest in the sample with high measurement sensitivity and high speed.

Abstract: A piezoelectric actuator and a method of measuring a motion by using the piezoelectric actuator are provided. The piezoelectric actuator includes: a movable member that is disposed to face the fixed member; a piezoelectric element that is disposed between the fixed member and the movable member, and configured to operate in a shear mode based on input voltages applied to the piezoelectric element and move the movable member relative to the fixed member; and a position sensor that is disposed between the piezoelectric element and the movable member, and configured to measure a motion of the movable member.

Abstract: A micro-electro-mechanical device detects angular velocity, for example relating to a three axis gyroscope. The three axis gyroscope includes a two axis gyroscope structure and a one axis gyroscope structure. The gyroscope further includes a lever spring system coupling a linear drive mode oscillation of the two axis gyroscope structure and a linear drive mode oscillation of the one axis gyroscope structure into one combined primary motion. The lever spring system causes the one and two axis gyroscope structures to have equal drive mode oscillation amplitudes. A symmetrical arrangement of the lever spring system causes any reactive forces created in the lever spring system to cancel each other.