Multilayer Patents (Class 310/364)
  • Patent number: 8471652
    Abstract: An acoustic wave component includes a layer system having a piezoelectric layer and a first metal layer arranged on the piezoelectric layer, a first resonator having a first electrode in the first metal layer, where the first metal layer includes electrode structures periodically arranged in a direction of propagation of a wave through the acoustic wave component, and a second resonator coupled to the first resonator and electrically isolated from the first resonator. The layer system includes a waveguide for guiding a guided bulk acoustic wave in a lateral direction of the acoustic wave component.
    Type: Grant
    Filed: September 26, 2005
    Date of Patent: June 25, 2013
    Assignee: EPCOS AG
    Inventors: Veit Meister, Werner Ruile
  • Publication number: 20130140156
    Abstract: A piezoelectric actuator according to an embodiment of the present invention includes a base substrate provided with cantilevers and a piezoelectric element formed on each cantilever. The piezoelectric element includes: a lower electrode layer; a piezoelectric layer formed on the lower electrode layer; and an upper electrode layer having a conductive oxide layer formed on the piezoelectric layer. Because the conductive oxide layer has covalent bonds or ionic bonds, and therefore produces little plastic deformation, relaxation of the stress is less likely to occur. Thus, even with repetitive motion in the piezoelectric actuator, the as-deposited internal stress (film stress) can be stably maintained for a long period of time.
    Type: Application
    Filed: November 30, 2012
    Publication date: June 6, 2013
    Applicant: TAIYO YUDEN CO., LTD.
    Inventor: Taiyo Yuden Co., Ltd.
  • Patent number: 8456257
    Abstract: A bulk acoustic wave resonator desirably suppressing spurious modes includes a frame-like structure of mass loading contacting one electrode, wherein the frame-like structure is defined within inner and outer boundaries and wherein a central area extends through the resonator within an envelope of the inner boundary and a border region extends through the resonator within the inner and outer boundaries of the frame-like structure. A second electrode is positioned within the envelope and substantially missing from within the border region. A layer of piezoelectric material is embedded between the first and second electrodes. An active resonator area is substantially within the central area. The resonator structure is carried on a substrate and an acoustically reflective mirror having multiple and alternating layers of low and high acoustic impedance material.
    Type: Grant
    Filed: November 12, 2009
    Date of Patent: June 4, 2013
    Assignee: TriQuint Semiconductor, Inc.
    Inventor: Gernot G. Fattinger
  • Publication number: 20130127299
    Abstract: The present invention relates to a piezoelectric device of a multi-layered structure on which first electrodes and second electrodes are sequentially stacked on a piezoelectric polymer and single surfaces or both surfaces of piezoelectric polymer. In accordance with the present invention, the vibration response characteristics of the piezoelectric polymer can be improved by using the graphene or the composite thereof as a surface electrode material to the piezoelectric polymer; and, there are effects that the response characteristics of the piezoelectric device are excellent and the reliability thereof is excellent by forming a second electrode having an excellent conductivity and a protection electrode thereof.
    Type: Application
    Filed: November 21, 2012
    Publication date: May 23, 2013
    Applicant: Samsung Electro-Mechanics Co., Ltd.
    Inventor: Samsung Electro-Mechanics Co., Ltd.
  • Patent number: 8446075
    Abstract: To provide a conductive film that is flexible, extendable and contractible, and for which the electrical resistance hardly increases even when the conductive film is extended. The conductive film contains an elastomer and metallic filler particles, and satisfies a condition (A) [an average value of reference numbers is 0.8 (1/?m) or more, or the metallic filler particles include flake-like metallic filler particles having a thickness of 1 ?m or less and an aspect ratio of 26 or more and the average value of the reference numbers is 0.4 (1/?m) or more] and a condition (B) [a number of unit areas for which an area percentage of the elastomer is 60% or more is 20 or more], the condition (A) being a conductivity indicator and the condition (B) being a flexibility indicator.
    Type: Grant
    Filed: January 26, 2012
    Date of Patent: May 21, 2013
    Assignee: Tokai Rubber Industries, Ltd.
    Inventors: Wataru Takahashi, Hitoshi Yoshikawa, Jun Kobayashi
  • Patent number: 8441174
    Abstract: In a multilayer piezoelectric element in which a plurality of piezoelectric layers and a plurality of metal layers are stacked alternately, the plurality of metal layers include a plurality of low-filled metal layers having a lower filling rate of metal composing the metal layers than oppositely disposed metal layers adjacent to each other in a stacking direction. In a multilayer piezoelectric element in which a plurality of piezoelectric layers and a plurality of metal layers are stacked alternately, the plurality of metal layers include a plurality of thin metal layers having a smaller thickness than oppositely disposed metal layers adjacent to each other in a stacking direction.
    Type: Grant
    Filed: June 15, 2006
    Date of Patent: May 14, 2013
    Assignee: Kyocera Corporation
    Inventors: Takeshi Okamura, Masaki Terazono, Tomohiro Kawamoto, Takafumi Tsurumaru, Shigenobu Nakamura, Ken Yamamoto
  • Patent number: 8419967
    Abstract: A perovskite oxide represented by a general expression, (Aa, Bb)(Cc, Dd, Xx)O3. (where, A: an A-site element, A=Bi, 0<a, B: one or more types of A-site elements, 0?b<1.0, C: an B-site element, C=Fe, 0 <c<1.0, D: one or more types of B-site elements, 0?d<1.0, 0<b+d, X: one or more types of B-site elements, the average valence of which is greater than the average valence of C and D in chemical formula, 0<x<1.0, (average valence of A-site in chemical formula) +(average valence of B-site in chemical formula)>6.0, O: oxygen, and standard molar ratio among A-site elements, B-site elements, and oxygen is 1:1:3, but it may deviate from the standard within a range in which a perovskite structure is possible.
    Type: Grant
    Filed: July 16, 2009
    Date of Patent: April 16, 2013
    Assignee: FUJIFILM Corporation
    Inventors: Tsutomu Sasaki, Yukio Sakashita, Hiroyuki Kobayashi
  • Patent number: 8421316
    Abstract: The invention provides a transducer for converting between mechanical and electrical energies. The transducer comprises an EAP laminate with a layer of an elastomer material arranged between two electrode layers, each electrode layer comprising a second layer of a plastically deformable material, e.g. metal or a thermoplastic material, and a third layer of an electrically conductive material. Due to the layer of plastically deformable material, the electrode layers can be shaped into various shapes which can provide anisotropic characteristics of the transducer.
    Type: Grant
    Filed: June 4, 2009
    Date of Patent: April 16, 2013
    Assignee: Danfoss PolyPower A/S
    Inventors: Michael Tryson, Mohamed Benslimane, Hans-Erik Kiil, Michael Allen Zumbrum
  • Patent number: 8410670
    Abstract: A laminate includes a ceramic substrate, a piezoelectric element, and an intermediate layer. The piezoelectric element includes a lower electrode. The intermediate layer is formed between the substrate and the lower electrode of the piezoelectric element. The intermediate layer contains a metal or an oxide thereof as a main component. The metal is different from a metal contained in the lower electrode. The intermediate layer further contains holes.
    Type: Grant
    Filed: August 20, 2012
    Date of Patent: April 2, 2013
    Assignee: NGK Insulators, Ltd.
    Inventors: Takaaki Koizumi, Naoki Ogawa
  • Publication number: 20130077449
    Abstract: To provide a terminal connecting structure for an electronic component which achieves prevention of an increase in the electric resistance value between a through electrode and an electrode connected thereto and ensuring preferable conductive performance, a package, a piezoelectric vibrator, an oscillator, an electronic instrument, and a radio timepiece having a substrate of this terminal connecting structure for the electronic component. There is provided a terminal connecting structure for an electronic component including; a through electrode penetrating through a base substrate: and an external electrode electrically connected to the through electrode, wherein an outer end surface of the through electrode is formed with a coating film of a conductive oxide which covers the outer end surface, and the through electrode and the external electrode are electrically connected via the film of the conductive oxide.
    Type: Application
    Filed: September 26, 2012
    Publication date: March 28, 2013
    Applicant: SEIKO INSTRUMENTS INC.
    Inventor: Seiko Instruments Inc.
  • Publication number: 20130069490
    Abstract: A piezoelectric actuator that includes a piezoelectric substrate, first and second electrodes, and a conductive layer. The first and second electrodes are configured to apply a voltage to the piezoelectric substrate. The conductive layer is formed on the first electrode. The conductive layer is made of a metal or an alloy different in color from the second electrode.
    Type: Application
    Filed: November 13, 2012
    Publication date: March 21, 2013
    Applicant: MURATA MANUFACTURING CO., LTD.
    Inventor: Murata Manufacturing Co., Ltd.
  • Patent number: 8373329
    Abstract: A surface acoustic wave device includes an electrode and a dielectric layer laminated on a piezoelectric substrate, in which the electrode includes a first electrode film containing Pt, Au, Ag, or Cu and a second electrode film containing Al, the normalized film thickness h/? of the first electrode film is about 0.005 or more and at most about 0.015 in the case of Pt, the normalized film thickness h/? of the Al film is about 0.06 or more and at most about 0.185, and the normalized film thickness h/? of the dielectric layer is about 0.2 or less.
    Type: Grant
    Filed: March 28, 2012
    Date of Patent: February 12, 2013
    Assignee: Murata Manufacturing Co., Ltd.
    Inventor: Norihiko Nakahashi
  • Patent number: 8373334
    Abstract: There are provided a piezoelectric vibrating reed which can be reliably bonded ultrasonically and which can be efficiently manufactured, a piezoelectric vibrator, a method of manufacturing a piezoelectric vibrator, an oscillator, an electronic apparatus, and a radio-controlled timepiece. A piezoelectric vibrating reed includes: a piezoelectric plate having vibrating portions and a base portion adjacent to the vibrating portions; excitation electrodes formed in the vibrating portions; mount electrodes formed in the base portion; lead-out electrodes for making the excitation electrodes and the mount electrodes electrically connected to each other; and a passivation film which is formed of an electrically insulating material and covers the excitation electrodes and the lead-out electrodes. These electrodes disposed on one surface of the base portion are formed only in a region covered by the passivation film.
    Type: Grant
    Filed: November 19, 2010
    Date of Patent: February 12, 2013
    Assignee: Seiko Instruments Inc.
    Inventor: Kiyoshi Aratake
  • Patent number: 8365372
    Abstract: In a method for manufacturing a piezoelectric oscillating circuit in thin film technology, wherein the oscillating circuit includes a predetermined natural frequency and a plurality of layers, first of all at least a first layer of the piezoelectric oscillating circuit is generated. Subsequently, by processing the first layer a frequency correction is performed. Subsequently, at least a second layer of the piezoelectric oscillating circuit is generated and processed for performing a second frequency correction.
    Type: Grant
    Filed: November 14, 2008
    Date of Patent: February 5, 2013
    Assignee: Contria San Limited Liability Company
    Inventors: Robert Aigner, Lueder Elbrecht, Martin Handtmann, Stephan Marksteiner, Winfried Nessler, Hans-Joerg Timme
  • Publication number: 20130020913
    Abstract: An electronic component has an element body, an external electrode, and an insulating material. The element body has a pair of end faces opposed to each other, a pair of principal faces extending so as to connect the pair of end faces and opposed to each other, and a pair of side faces extending so as to connect the pair of principal faces and opposed to each other. The external electrode is formed on the end face side of the element body and covers a partial region of the principal face and/or a partial region of the side face adjacent to the end face. The insulating material covers a surface of the element body except for one face which is the principal face or the side face and at least a part of which is covered by the external electrode, and the external electrode formed on the surface.
    Type: Application
    Filed: July 11, 2012
    Publication date: January 24, 2013
    Applicant: TDK CORPORATION
    Inventors: Yukihiko SHIRAKAWA, Tatsuo INAGAKI, Shintaro KON, Hiromitsu NOGIWA
  • Patent number: 8358051
    Abstract: A piezoelectric actuator comprises a co-fired stack of piezoelectric elements formed from a piezoelectric material and a plurality of positive internal electrodes interdigitated with a plurality of negative internal electrodes throughout the stack to define active regions of the piezoelectric material which are responsive to a voltage applied across the internal electrodes, in use. An external positive electrode connects with the positive internal electrodes and an external negative electrode connects with the negative internal electrodes. The actuator is characterized in that the stack further comprises means for deliberately creating artificial cracks within the stack at a location at which the artificial cracks do not give rise to a short circuit between the internal electrodes but serve to relieve stresses within the piezoelectric material.
    Type: Grant
    Filed: July 7, 2006
    Date of Patent: January 22, 2013
    Assignee: Delphi Technologies Holding S.arl
    Inventors: Russell H. Bosch, Michael Peter Cooke, Christopher Andrew Goat
  • Patent number: 8351160
    Abstract: First and second piezoelectric element overlapped portions of an insulating layer of a flexure part is formed with first and second connecting openings, respectively. There are provided on an upper surface of the insulating layer, first and second lower conductive adhesive agents that electrically connect lower electrode layers of first and second piezoelectric elements to a voltage supply wiring through the first and second connecting openings, and a surrounding insulative adhesive agent that is arranged so as to surround the first and second lower conductive adhesive agents in a plan view.
    Type: Grant
    Filed: May 12, 2011
    Date of Patent: January 8, 2013
    Assignee: Suncall Corporation
    Inventor: Yasuo Fujimoto
  • Patent number: 8339017
    Abstract: To provide a multi-layer piezoelectric element having high strength against breakage, high insulation and excellent displacement performance, and an injection apparatus that incorporates the same. The multi-layer piezoelectric element comprising a stack 4 constituted from a plurality of piezoelectric layers 1 stacked one on another via internal electrode layers 2, wherein at least a part of peripheral areas 31, that are disposed between two piezoelectric layers 1, 1 located adjacently in the stacking direction and are located between an edge 2a of the internal electrode layer 2 and side face 4a of the stack 4, is dispersed areas where a plurality of metallic regions are dispersed via voids 21.
    Type: Grant
    Filed: August 29, 2006
    Date of Patent: December 25, 2012
    Assignee: Kyocera Corporation
    Inventors: Junya Shoji, Masahiro Inagaki, Shigenobu Nakamura
  • Publication number: 20120306322
    Abstract: An electrical component comprises a lead-based perovskite crystal material layer between a lower electrode on the surface of a substrate and an upper electrode, characterized in that the lower electrode comprises a stabilizing first layer made of a first material and a seeding second layer made of a second material, the first and second materials having the same chemical composition but different structural parameters and/or densities. A process for fabricating a component is also provided, in which the material with a perovskite structure may be PZT with a (100) or (111) orientation.
    Type: Application
    Filed: May 25, 2012
    Publication date: December 6, 2012
    Applicant: Commissariat a L'Energie Atomique et aux Energines Alternatives
    Inventors: Matthieu CUEFF, Emmanuel DEFAY, Gwenaël LE RHUN
  • Patent number: 8314535
    Abstract: A piezoelectric multilayer component has a stack of green piezoceramic layers arranged one on top of the other. A first electrode layer is applied onto a piezoceramic layer and contains a first metal. A structured sacrificial layer is applied onto a further piezoceramic layer, adjacent to the first electrode layer in the stacking direction, and contains a higher concentration of the first metal than does the first electrode layer. When the intermediate product is sintered, the first metal diffuses from the structured sacrificial layer to the first electrode layer and in the process leaves cavities which form a weak layer.
    Type: Grant
    Filed: July 20, 2010
    Date of Patent: November 20, 2012
    Assignee: EPCOS AG
    Inventors: Oliver Dernovsek, Alexander Glazunov
  • Patent number: 8310138
    Abstract: An actuator includes an ion-conductive polymer layer made of a first ion-conductive polymer, a pair of electrode layers provided one on each side of the ion-conductive polymer layer and made of a second ion-conductive polymer and conductive powder, and ions contained in the ion-conductive polymer layer and electrode layers. The first and second ion-conductive polymers differ in functional group type from each other.
    Type: Grant
    Filed: March 19, 2010
    Date of Patent: November 13, 2012
    Assignee: Sony Corporation
    Inventors: Nobuyuki Nagai, Masayuki Sugasawa, Kazuomi Murakami
  • Publication number: 20120280595
    Abstract: A metallization can be used for components working with acoustic waves. The metallization includes a base having a bottom layer comprising titanium, and an upper layer comprising copper. A top layer of the metallization disposed on the base comprises aluminum.
    Type: Application
    Filed: December 1, 2010
    Publication date: November 8, 2012
    Applicant: EPCOS AG
    Inventors: Charles Binninger, Ulrich Knauer, Helmut Zottl, Werner Ruile, Tomasz Jewula, Rudolf Nuessl
  • Publication number: 20120268533
    Abstract: A piezoelectric element comprises a first electrode including platinum, a piezoelectric layer disposed above the first electrode, made of a complex oxide having a perovskite structure containing at least bismuth, and a second electrode disposed above the piezoelectric layer. An oxide containing bismuth and platinum is disposed at the interface of the piezoelectric layer with the first electrode.
    Type: Application
    Filed: April 19, 2012
    Publication date: October 25, 2012
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Tomohiro SAKAI, Koichi MOROZUMI
  • Patent number: 8288925
    Abstract: To provide a method of manufacturing a quartz resonator element having a small CI value, a quartz resonator element manufactured by this method, a quartz resonator, and a quartz oscillator. In a method of manufacturing a quartz resonator element in which on a surface of a plate-shaped quartz piece, a thin film-shaped electrode in order to excite the quartz piece is provided, a first metal layer that is composed of chromium and whose thickness is not less than 20 ? nor more than 45 ? is formed on the surface of the quartz piece (P4), and next, a second metal layer that is composed of gold or silver and whose thickness is not less than 500 ? nor more than 950 ? is formed on an upper surface of the first metal layer (P5), and then, the electrode made up of the first metal layer and the second metal layer is provided (P6). Thereafter, a quartz substrate on which the electrode is formed is heated at a temperature range of not less than 200° C. nor more than 400° C.
    Type: Grant
    Filed: September 10, 2009
    Date of Patent: October 16, 2012
    Assignee: Nihon Dempa Kogyo Co., Ltd.
    Inventor: Takehiro Takahashi
  • Publication number: 20120248944
    Abstract: There are provided a piezoelectric resonator and an electrode structure thereof. The piezoelectric resonator includes: a piezoelectric body oscillated according to an electrical signal; and first and second electrodes each including first and second electrode layers stacked on respective both surfaces of the piezoelectric body, wherein the first electrode layer includes one or more selected from the group consisting of chromium (Cr), nickel (Ni), titanium (Ti), and an alloy including any one thereof, the ratio of the thickness of the first electrode layer to the thickness of the first or second electrode is 3% to 30%; and the second electrode layer includes copper (Cu) or an alloy including copper (Cu), and the ratio of the thickness of the second electrode layer to the thickness of the first or second electrode is 70% to 97%.
    Type: Application
    Filed: October 6, 2011
    Publication date: October 4, 2012
    Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
    Inventor: Jang Park
  • Patent number: 8276567
    Abstract: To provide a multi-layer piezoelectric element that is improved to mitigate the decrease in the amount of displacement under such harsh operating conditions, the multi-layer piezoelectric element, the multi-layer piezoelectric element comprising: a stacked body comprising a plurality of piezoelectric material layers and a plurality of internal electrodes, the stacked body being formed by stacking the plurality of internal electrodes and the piezoelectric layers alternately on each other; and an external electrode formed on a side face of the stacked body, wherein the external electrode comprises a base portion and a first protrusion protruding from the base portion toward an outside.
    Type: Grant
    Filed: December 26, 2008
    Date of Patent: October 2, 2012
    Assignee: Kyocera Corporation
    Inventor: Shigenobu Nakamura
  • Publication number: 20120235544
    Abstract: A lead type piezoelectric resonator device includes a piezoelectric resonator plate and a lead terminal that supports the piezoelectric resonator plate. The piezoelectric resonator plate is provided with a terminal electrode that is electrically connected to the lead terminal, and the lead terminal is provided with a bonding layer that is electrically connected to the piezoelectric resonator plate. The piezoelectric resonator plate and the lead terminal are electromechanically bonded to each other by the terminal electrode and the bonding layer. A bonding material containing an Sn—Cu alloy is produced from the terminal electrode and the bonding layer by the bonding of the terminal electrode and the bonding layer.
    Type: Application
    Filed: December 3, 2010
    Publication date: September 20, 2012
    Applicant: DAISHINKU CORPORATION
    Inventors: Tatsuya Murakami, Tadataka Koga, Koichi Kishimoto
  • Patent number: 8264125
    Abstract: A piezoelectric component with a monolithic stack, has electrode layers and piezoceramic layers arranged alternately one on top of the other, the piezoceramic layers have a piezoceramic, and having at least one porous security layer arranged in the stack for the formation of a crack if mechanical overload of the stack should occur. The piezoelectric component has an infiltration barrier arranged between the security layer and a lateral surface section of the stack for suppressing the penetration of a foreign substance into the security layer. The piezoelectric component can be as a piezoactuator for controlling a valve, particularly a valve of an internal combustion engine.
    Type: Grant
    Filed: March 26, 2008
    Date of Patent: September 11, 2012
    Assignee: Siemens Aktiengesellschaft
    Inventors: Michael Denzler, Christoph Hamann, Harald Johannes Kastl, Stefan Kohn, Maximilian Kronberger, Christian Reichinger, Carsten Schuh, Claus Zumstrull
  • Patent number: 8248731
    Abstract: An electrical connecting structure for a piezoelectric element enables wiring to the piezoelectric element to be carried out without deteriorating the productivity and reliability of the piezoelectric element. The electrical connecting structure is formed by facing a common electrode of the piezoelectric element to a terminal that supplies power to the common electrode and by injecting a conductive adhesive into a through hole, which is formed substantially at the center of the piezoelectric element, from an opening of the through hole that is on the opposite side of the common electrode, thereby securing electrical connection between the terminal and the common electrode of the piezoelectric element.
    Type: Grant
    Filed: December 22, 2009
    Date of Patent: August 21, 2012
    Assignee: NHK Spring Co., Ltd.
    Inventor: Hideki Fuchino
  • Publication number: 20120194038
    Abstract: A piezo film ultrasonic transducer has a piezo film including first and second opposing surfaces and a working portion and a lead-out portion. A first plated metal electrode layer is on the first surface of the working portion and the lead-out portion of the piezo film; a first conductive layer is on the first metal plated electrode layer; and a second metal electrode layer is on the opposite surface of the working portion and the lead-out portion. A first conductive layer is on the first metal electrode layer and a second conductive layer is on the second metal electrode layer.
    Type: Application
    Filed: March 19, 2010
    Publication date: August 2, 2012
    Applicant: Measurement Specialities (China) Ltd.
    Inventor: Wanjie Wang
  • Patent number: 8209826
    Abstract: A method for manufacturing a coupled resonator device includes forming a first BAW-device on a first substrate, forming a second BAW-device on a second substrate, and bonding the first and the second BAW-device such that the bonded first and second BAW-device are sandwiched between the first and second substrate.
    Type: Grant
    Filed: April 28, 2008
    Date of Patent: July 3, 2012
    Assignee: Avago Technologies Wireless IP (Singapore) Pte. Ltd.
    Inventors: Martin Handtmann, Klaus-Guenter Oppermann, Martin Fritz
  • Publication number: 20120161587
    Abstract: A haptic actuator using a cellulose electro-active paper film is provided. The haptic actuator includes a cellulose electro-active paper film exhibiting a piezoelectric phenomenon and a metal electrode for applying electricity to the electro-active paper film, so that the haptic actuator can be provided in the form of a thin film, can manifest high transparency, and can produce displacement to the magnitude of sufficiently stimulating the sensor receptors of a user's skin in response to the applied electricity. Also, the haptic actuator is friendly to the environment and humans thanks to the use of cellulose which is an environmentally friendly material.
    Type: Application
    Filed: November 14, 2011
    Publication date: June 28, 2012
    Applicant: INDUSTRY COLLABORATION FOUNDATION OF KOREA UNIVERSITY OF TECHNOLOGY AND EDUCATION
    Inventors: Sang yeon KIM, Jae hwan KIM
  • Patent number: 8198783
    Abstract: In a method for the production of a gradient encapsulation layer 20 on a piezoelectric actuator 1, based on this gradient encapsulation layer 20, the piezoelectric actuator 1 does not 5 require an additional housing-like enveloping structure in order to be protected externally. The gradient encapsulation layer 20 is produced by cold gas spraying of particles having different material properties.
    Type: Grant
    Filed: April 24, 2007
    Date of Patent: June 12, 2012
    Assignee: Siemens Aktiengesellschaft
    Inventors: Heiner Bayer, Hellmut Freudenberg, Axel Ganster, Christoph Hamann, Oliver Henning, Jens Dahl Jensen, Günter Lugert, Randolf Mock, Carsten Schuh
  • Patent number: 8198958
    Abstract: An RF system includes a power amplifier with output impedance and a BAW filter with an input impedance and output impedance. A matching network includes an inductance connecting the power amplifier to the BAW filter and an impedance transformation ratio of at least 1:10 is provided at the output impedance of the power amplifier to the output impedance of the BAW filter.
    Type: Grant
    Filed: March 30, 2009
    Date of Patent: June 12, 2012
    Assignee: Triquint Semiconductor, Inc.
    Inventors: Robert Aigner, Gernot G. Fattinger, Mikhail S. Shirokov, Jun C. Jadormio
  • Publication number: 20120132729
    Abstract: A multi-layer piezoelectric element includes a stacked body configured so that piezoelectric layers and internal electrode layers are alternately laminated, and an external electrode composed of a sintered material of both electrically conductive particles and a glass, the external electrode which is bonded to a side surface of the stacked body and makes electrical connection with the internal electrode layers. The external electrode has a stacked body-side layer region containing glass as secondary constituent at its stacked body-facing side, and an exterior-side layer region containing glass as minor constituent at its exterior side. The glass of the exterior-side layer region is distributed along grain boundary of the conductive particles on an outermost surface of the exterior-side layer region.
    Type: Application
    Filed: May 26, 2010
    Publication date: May 31, 2012
    Applicant: KYOCERA CORPORATION
    Inventor: Shigenobu Nakamura
  • Patent number: 8188637
    Abstract: A laminated piezoelectric element having a laminated structure in which a plurality of piezoelectric layers and a plurality of internal electrodes are alternately laminated is provided. This laminated structure has an opposing section wherein an internal electrode on an anode side and an internal electrode on a cathode side which are adjacent to each other in the laminating direction, oppose in the laminating direction, and an end-side non-opposing section situated in a position closer to end in the laminating direction than the opposing section. This end-side non-opposing section has a porous section having porosity larger than that of the internal electrodes.
    Type: Grant
    Filed: June 12, 2009
    Date of Patent: May 29, 2012
    Assignee: Kyocera Corporation
    Inventors: Takeshi Okamura, Ichitaro Okamura
  • Patent number: 8183749
    Abstract: The present invention provides an electronic device with improved characteristics and a method of making the electronic device. In a method of making an electronic device (piezoelectric device) 74 according to the present invention, an outer edge R1 of a piezoelectric film 52A formed on an electrode film 46A of a laminate 60 is located inside an outer edge R2 of the electrode film 46A. For this reason, in removal of a monocrystalline Si substrate 14 from a multilayer board 61, where an etching solution permeates between polyimide 72 and laminate 60, the etching solution circumvents the electrode film 46A before it reaches the piezoelectric film 52A. Namely, a route A of the etching solution to the piezoelectric film 52A is significantly extended by the electrode film 46A. In the method of making the electronic device 74, therefore, the etching solution is less likely to reach the piezoelectric film 52A.
    Type: Grant
    Filed: July 7, 2009
    Date of Patent: May 22, 2012
    Assignee: TDK Corporation
    Inventors: Kenichi Tochi, Masahiro Miyazaki, Takao Noguchi, Hiroshi Yamazaki, Ken Unno, Hirofumi Sasaki
  • Publication number: 20120120161
    Abstract: A piezoelectric element comprises a electrode and a piezoelectric layer made of a complex oxide having a perovskite structure containing at least bismuth, barium, iron, and titanium. A layered compound containing iron, barium, titanium and oxygen is formed between the piezoelectric layer and the electrode.
    Type: Application
    Filed: November 14, 2011
    Publication date: May 17, 2012
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Tomohiro SAKAI, Koichi MOROZUMI, Tsutomu ASAKAWA
  • Patent number: 8164398
    Abstract: A resonator includes a substrate, a lower electrode, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. The lower electrode includes a first film provided on the substrate, and a second film that is provided on the first film and has a specific gravity greater than that of the first film. The piezoelectric film is provided on the second film. The upper electrode includes a third film provided on the piezoelectric film, and a fourth film provided on the third film, the third film having a specific gravity greater than that of the fourth film. The third film is thicker than the second film.
    Type: Grant
    Filed: August 25, 2009
    Date of Patent: April 24, 2012
    Assignee: Taiyo Yuden Co., Ltd.
    Inventors: Shinji Taniguchi, Tokihiro Nishihara, Masufumi Iwaki, Masanori Ueda, Go Endo, Tsuyoshi Yokoyama, Takeshi Sakashita, Motoaki Hara
  • Patent number: 8149542
    Abstract: A wiring connecting structure for a piezoelectric element is capable of performing wiring to the piezoelectric element without deteriorating the quality and reliability of the piezoelectric element. The piezoelectric element is arranged between a base and head of an object, to minutely move the head in a sway direction according to deformation that occurs on the piezoelectric element in response to a voltage applied from a terminal to an electrode of the piezoelectric element. The wiring connecting structure includes first and second liquid stoppers arranged between the terminal and the electrode, the second liquid stopper being arranged outside the first liquid stopper. The wiring connecting structure also includes an adhesive part to connect the electrode to the terminal. The adhesive part has a conductive adhesive part defined by the first liquid stopper and a sealing adhesive part defined by the second liquid stopper. The sealing adhesive part seals the first liquid stopper and conductive adhesive part.
    Type: Grant
    Filed: December 21, 2009
    Date of Patent: April 3, 2012
    Assignee: NHK Spring Co., Ltd.
    Inventor: Toshiki Ando
  • Publication number: 20120062074
    Abstract: A piezoelectric element includes a first electrode, a first multilayer composite disposed on the first electrode, a second multilayer composite disposed on the first electrode with a distance from the first multilayer composite, and a covering layer covering the side surfaces of the first and second multilayer composites and the surface of the first electrode between the first multilayer composite and the second multilayer composite. The first and second multilayer composites each include a piezoelectric layer and a second electrode over the piezoelectric layer. The first electrode contains a metal that can react with chlorine, and has at least one of a bump and a dip at the surface thereof between the first multilayer composite and the second multilayer composite.
    Type: Application
    Filed: September 7, 2011
    Publication date: March 15, 2012
    Applicant: Seiko Epson Corporation
    Inventor: Hideki Hahiro
  • Publication number: 20120056513
    Abstract: Tuning-fork type quartz-crystal vibrating pieces are disclosed that exhibit low CI and low interconnection resistance. An exemplary vibrating piece includes vibrating arms extending in a predetermined direction from a base, respective excitation electrodes, a base connected to the vibrating arms, respective supporting arms disposed outboard of respective vibrating arms and extending from the base in the predetermined direction, and respective extraction electrodes connected to respective excitation electrodes. Each excitation electrode comprises two metal layers, including a first metal layer comprising at least one metal selected from Cr, Ni, Ti, Al and W, and a second metal layer overlying the first metal layer and comprising Au or Ag.
    Type: Application
    Filed: August 26, 2011
    Publication date: March 8, 2012
    Inventor: Shunsuke Ueno
  • Publication number: 20120056945
    Abstract: A piezoelectric element according to an embodiment of the invention includes a first electrode containing a noble metal, a first multilayer composite disposed on the first electrode, a second multilayer composite disposed on the first electrode with a distance from the first multilayer composite, an oxide film partly disposed on the surface of the first electrode between the first multilayer composite and the second multilayer composite, and a covering layer. The covering layer covers the side surfaces of the first and second multilayer composites, and the oxide film and the surface of the first electrode between the first multilayer composite and the second multilayer composite. The first multilayer composite and the second multilayer composite each include a piezoelectric layer, and a second electrode over the piezoelectric layer.
    Type: Application
    Filed: September 2, 2011
    Publication date: March 8, 2012
    Applicant: Seiko Epson Corporation
    Inventor: Masao Nakayama
  • Patent number: 8123983
    Abstract: An ion-conducting layer for an actuator element including (I) a fluorine-containing polymer having a functional group and (II) an ionic liquid. The functional group is selected from —OH, —COOH, —COOR, —CN, iodine atom, epoxy group and (meth)acryloyl group, and is contained in a side chain and/or at an end of a trunk chain of the fluorine-containing polymer. Also disclosed is an electrode layer including (I) the fluorine-containing polymer having a functional group, (II) an ionic liquid and (III) an electroconductive nano-filler. Also disclosed is an actuator element including the ion-conducting layer and at least two electrode layers formed on the surfaces of the ion-conducting layer and insulated from one another, in which flection or deformation can be caused by applying an electric potential between the electrode layers.
    Type: Grant
    Filed: January 22, 2007
    Date of Patent: February 28, 2012
    Assignee: Daikin Industries, Ltd.
    Inventors: Yuzo Komatsu, Keiko Hirata, Haruhiko Mohri, Hirokazu Aoyama
  • Patent number: 8120233
    Abstract: Methods are disclosed for manufacturing piezoelectric vibrating pieces and devices including such pieces. According to an embodiment of the method, a piezoelectric vibrating piece is produced from a piezoelectric wafer. To form the piece, a profile of the piezoelectric vibrating piece is formed in a piezoelectric wafer. A first metal film (chromium; Cr) is formed on the surface of the piezoelectric piece. The chromium film is surface-oxidized to form a film having Cr foundation layer and an oxidized surface. A second metal film (gold; Au) is formed on the oxidized surface. Then, in selected regions not destined to become electrodes, the second metal film is removed, leaving electrode patterns at designated regions of the piezoelectric vibrating piece.
    Type: Grant
    Filed: December 3, 2009
    Date of Patent: February 21, 2012
    Assignee: Nihon Dempa Kogyo Co., Ltd.
    Inventors: Mitoshi Umeki, Takahiro Inoue, Yoshiaki Amano, Takefumi Saito
  • Publication number: 20120024980
    Abstract: Provided is a highly durable multi-layer piezoelectric element wherein a conductive connection member is not broken even in the case of continuous driving for a long period in a high electric field under high pressure. A multi-layer piezoelectric element includes a stacked body configured so that piezoelectric layers and internal electrode layers are alternately laminated, an external electrode bonded to a side surface of the stacked body and electrically connected to the internal electrode layers, and a conductive connection member which is disposed on a surface of the external electrode and of which surface has projections and depressions formed repeatedly at least in a stacked direction of the stacked body.
    Type: Application
    Filed: February 24, 2010
    Publication date: February 2, 2012
    Applicant: KYOCERA CORPORATION
    Inventor: Shigenobu Nakamura
  • Patent number: 8104155
    Abstract: The method of manufacturing a piezoelectric actuator, includes the steps of: forming a lower electrode film on an insulating substrate; forming a piezoelectric film on the lower electrode film; forming a slit on the piezoelectric film to expose a portion of the lower electrode film on an upper surface side of the piezoelectric film; forming an insulating layer which covers a portion of the piezoelectric film; forming an upper electrode film so as to span the insulating layer and the piezoelectric film; forming, on the piezoelectric film, a lower wire in connection with the portion of the lower electrode film exposed through the slit; depositing a first metal film on the lower wire and thereby making a film thickness of the lower wire greater than a film thickness of the lower electrode film; and depositing a second metal film on a portion of the upper electrode film on the insulating layer and thereby making a film thickness of the portion of the upper electrode film on the insulating layer greater than a fil
    Type: Grant
    Filed: March 27, 2009
    Date of Patent: January 31, 2012
    Assignee: Fujifilm Corporation
    Inventor: Tsuyoshi Mita
  • Publication number: 20110316392
    Abstract: There are provided an electrode structure of a piezoelectric resonator and a piezoelectric resonator including the same. The piezoelectric resonator includes: a piezoelectric plate vibrated by an electrical signal; and first and second electrodes having first to fourth layers stacked on both surfaces thereof, wherein the first and third layers are made of at least one selected from the group consisting of Ti, Ni, Cr, an alloy including Ti and an alloy including Cr and the second and fourth layers are made of Ag or an alloy including Ag.
    Type: Application
    Filed: September 1, 2011
    Publication date: December 29, 2011
    Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
    Inventors: Jong Beom JEON, Katsushi YASUDA, Jong Pil LEE, Jang Ho PARK
  • Patent number: 8063544
    Abstract: A method for producing a component as monolithic multilayer element or multilayer bending element, comprising at least two layer stacks each having 1-400 layers of piezoelectrically active material which are separated by at least one layer stack comprising 0-100 layers of piezoelectrically inactive material, wherein the inner electrodes of the active layer stacks contain at least the following materials: a) pure silver b) electrically non-conductive material having a proportion by weight of 0% to at most 30% and the material of the piezoelectrically active layers has a sufficient activity in a thermal process such that sintering below the melting point of the material of the inner electrodes is possible and performed.
    Type: Grant
    Filed: December 15, 2006
    Date of Patent: November 22, 2011
    Assignee: Ceramtec GmbH
    Inventors: Reiner Bindig, Kurt Handschuh, Claudia Voigt, Jürgen Schmidt, Hans-Jürgen Schreiner
  • Publication number: 20110261120
    Abstract: There is provided a piezoelectric device comprising a first electrode, a piezoelectric layer that is formed above the first electrode, a second electrode that is formed above the piezoelectric layer and a coating layer that is formed above the second electrode consisting of tungsten or titanium.
    Type: Application
    Filed: April 26, 2011
    Publication date: October 27, 2011
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Toshihiro SHIMIZU, Hiroshi ITO, Jiro KATO, Eiju HIRAI