Abstract: A vibrating reed includes: a base; and a vibrating arm which is extended from one end portion of the base, the vibrating arm having an arm portion which is disposed on the base side, a weight portion which is disposed on a tip side of the arm portion and has a larger width than the arm portion, main surfaces which are respectively disposed on front and back sides of the vibrating arm, side surfaces each of which extends in a longitudinal direction of the vibrating arm to connect the main surfaces on the front and back sides and which are formed so as to face each other, a first groove portion which is a bottomed groove formed at least one of the main surfaces along the longitudinal direction of the vibrating arm, a first excitation electrode which is formed on groove side surfaces each connecting a bottom of the first groove portion with the one main surface, a second excitation electrode which is formed on the both side surfaces, and a projection-in-groove which is disposed on the tip side of a bisector bise

Abstract: A lighting device implemented through utilizing an insulating type piezoelectric transformer in driving light-emitting-diodes (LEDs), comprising at least said insulating type piezoelectric transformer connected to an LED module, a primary side of said insulating type piezoelectric transformer is used to receive a pulse voltage, and that is converted into an AC voltage in a piezoelectric voltage transformation way, and said AC voltage is output from a secondary side of said insulating type piezoelectric transformer to said LED module in proceeding with lighting function. Due to its various advantages of small leakage current, good insulation capability, high voltage endurance, low operation temperature, compact size, thin profile, high energy conversion efficiency, said insulating type piezoelectric transformer can be used to not only raise lighting efficiency, but also reduce overall size of said lighting device.

Abstract: Described is an electroactive elastomer actuator having at least one first band-shaped electroactive elastomer coating and at least one first and one second surface electrode, which are separated by the at least one first electroactive elastomer coating. At least one second electroactive elastomer coating is applied to a surface of the second surface electrode facing away from the electroactive elastomer coating, which forms a band-shaped coating material jointly with the first and second surface electrodes and the first elastomer coating located between the two surface electrodes. The band-shaped coating material is wound around a flat coil form while forming at least two coating material layers. A surface of the first surface electrode facing away from the first elastomer coating makes surface contact with the second electroactive elastomer coating.

Abstract: Novel configurations for a miniature vibrating beam mechanical resonator provide low energy transfer to a supporting structure and low sensitivity to mounting misalignment. A symmetric suspended portion includes two vibrating beams that vibrate normal to a quiescent plane of the resonator, 180 degrees out of phase relative to one another. The vibrating beams are attached, at least at one end, to a torsional coupling element that is joined to a mounting pad along a non-translating suspension boundary. Counterbalances are attached to the vibrating beams, and the resonator is configured such that dynamic forces and moments coupled to each torsional coupling element from the vibrating beams are balanced along each nominal non-translating suspension boundary proximate to the symmetry axis and along the symmetry axis proximate to each nominal non-translating suspension boundary. Each non-translating suspension boundary is a torsional axis for a twisting deformation of the first torsional coupling element.

Abstract: The present disclosure provides a method for manufacturing piezoelectric devices by using a base wafer having through-holes manufactured in precise size. In the method for manufacturing a piezoelectric device comprises: a step of: forming an anticorrosive film (S121) on a first surface and on a second surface opposing the first surface of the base wafer made of a glass or a piezoelectric material; after forming a photoresist on the anticorrosive film and exposing, metal-etching the anticorrosive film (S121, S122) corresponding to the through-hole; after the metal-etching step, applying an etching solution onto the glass or the piezoelectric material and wet-etching (S123) the first surface and the second surface of the base wafer until before completely cutting through the glass or the piezoelectric material; and applying an abrasive from the second surface with the anticorrosive film remaining in place on the second surface, by sand-blasting method (S124).

Abstract: A piezoelectric device including an engraved nanostructure body and a method of manufacturing the same are provided. The piezoelectric device includes a matrix including a piezoelectric material, a nanopore may be disposed in the matrix, and the nanopore may be extended substantially in a predetermined direction. The method may include coating a piezoelectric material on a substrate having a nanostructure body disposed thereon, and selectively etching the nanostructure body.

Abstract: A crystal element manufacturing method for manufacturing a plurality of crystal elements at a wafer level and a crystal resonator is provided. The method provides that when the frequencies of the crystal elements are adjusted by adjusting the thickness of a crystal wafer that constitutes the crystal element in two stages by partial wet etching, the thicknesses of a large number of the step sections are coarse-adjusted in a first stage by collectively subjecting the step sections to partial wet etching, and then variations in the thicknesses of each group of a small number of the step sections are fine-adjusted in a second stage by collectively subjecting the step sections to partial wet etching.

Abstract: The present disclosure relates to a vibrating element which is planar parallelly to an electrical crystallographic axis of a piezoelectric material such as quartz. The element comprises a beam holding electrodes, a stationary portion rigidly connected to one end of the beam, and a solid portion rigidly connected to the other end of the beam. The structure with facets from the chemical machining of the element has an axis of symmetry parallel to the electrical axis, and the solid portion has a center of gravity on the axis of symmetry. The useful vibration modes of the vibrating element, according to which the solid portion is reciprocatingly rotated about the axis of symmetry and reciprocatingly moved parallel to the plane of the element, are uncoupled. The measurement of an angular speed by a rate gyroscope including said vibrating elements is more precise.

Abstract: A vibrator element includes: a base having a mounting surface; a vibrating arm which is extended from the base and has a first surface and a second surface that faces the first surface and is positioned on the mounting surface side, and which performs flexural vibration in a direction normal to the first and second surfaces; and a laminated structure which is provided on at least one of the first and second surfaces of the vibrating arm, and which includes at least a first electrode, a second electrode, and a piezoelectric layer disposed between the first and second electrodes, in which the vibrating arm is warped toward the mounting surface side.

Abstract: A piezoelectric vibrator element provided by performing wet etching on a piezoelectric substrate includes: a thin-wall section including a vibrating section; a thick-wall section thicker than the thin-wall section; and a slit section penetrating in a thickness direction, wherein the slit section is disposed in an area intervening between the thin-wall section and the thick-wall section.

Abstract: To efficiently fabricate a high quality piezoelectric vibrating piece regardless of an accuracy of an outer shape of a wafer, there is provided a method of fabricating a plurality of piezoelectric vibrating pieces at a time utilizing a wafer S, the method including a step of forming two or more of through holes 40 and forming outer shapes of a plurality of piezoelectric plates 10 simultaneously with the through holes by constituting reference points G by centers of the through holes by etching the wafer by a photolithography technology, a step of preparing a jig for a wafer having inserting pins formed to project by a number the same as a number of the through holes from above a flat plate portion, thereafter, mounting the wafer on the flat plate portion in a state of inserting the inserting pin into the through hole, a step of forming an electrode on outer surfaces of the plurality of piezoelectric plates, and a step of cutting to separate the plurality of piezoelectric plates from the wafer to fragment, and

Abstract: Micro-electromechanical acoustic resonators include a substrate having a cavity therein and a resonator body suspended over the cavity. The resonator body is anchored on opposing sides thereof (by support beams) to first and second portions of the substrate. These first and second portions of the substrate, which extend over the cavity as first and second ledges, respectively, each have at least one perforation therein disposed over the cavity. These perforations may be open or filled. The first and second ledges are formed of a first material (e.g., silicon) and the first and second ledges are filled with a second material having a relatively high acoustic impedance relative to the first material. This second material may include a material selected from a group consisting of tungsten (W), copper (Cu), molybdenum (Mo).

Abstract: A vibratory sensor includes a resonator element including (i) a first base portion and a second base portion, each ot the first and the second base portions having an upper main surface and a lower main surface, (ii) a resonating arm extended in a beam shape between the first and the second base portions to be vibrated at a predetermined resonance frequency, (iii) a first narrow portion formed by reducing a width of a portion extended from the first base portion to be smaller than a width of the first base portion in a direction orthogonal to an extending direction of the resonating arm, (iv) a second narrow portion formed by reducing a width of a portion extended from the second base portion to be smaller than a width of the second base portion in the direction orthogonal to the extending direction of the resonating arm, (v) a first support portion extended from the first narrow portion in a direction opposite to the first base portion, and (vi) a second support portion extended from the second narrow portio

Abstract: A component has a substrate and a compensation layer. A lower face of the substrate is mechanically firmly connected to the compensation layer. The lower face of the substrate and the upper face of the compensation layer have a topography.

Abstract: An actuator element includes a first element unit configured to have one end being a fixed end and the other end being a free end and bends when voltage is applied, and a second element unit configured to have a shorter element length than the first element unit, have one end connected to the first element unit and bend in the opposite direction to the first element unit when voltage is applied and may support the first element unit.

Abstract: Provided is a relatively easy-to-fabricate piezoelectric power generating element capable of generating a large amount of electric power while comprising a bridge-type vibration beam that is resistant to damage from external vibration. This element comprises a support member, a strip-shaped vibration beam, a piezoelectric layer, and electrodes. The first and second ends of the vibration beam are fixed to the support member. The piezoelectric layer and the electrodes are provided on the surface of the vibration beam. The vibration beam extends in a plane when it is not vibrating. The vibration beam has a first portion that extends from the first end fixed to the support member, a second portion that extends from the second end fixed to the support member, and a third portion that connects the end of the first portion opposite to the first end and the end of the second portion opposite to the second end.

Abstract: Piezoelectric nanostructures, including nanofibers, nanotubes, nanojunctions and nanotrees, may be made of piezoelectric materials alone, or as composites of piezoelectric materials and electrically-conductive materials. Homogeneous or composite nanofibers and nanotubes may be fabricated by electrospinning. Homogeneous or composite nanotubes, nanojunctions and nanotrees may be fabricated by template-assisted processes in which colloidal suspensions and/or modified sol-gels of the desired materials are deposited sequentially into the pores of a template. The electrospinning or template-assisted fabrication methods may employ a modified sol-gel process for obtaining a perovskite phase in the piezoelectric material at a low annealing temperature.

Abstract: A piezoelectric film includes crystals of a complex oxide having a perovskite structure with (100)-preferred orientation and represented as: Pb1+?[(ZrxTi1-x)1-yNby]Oz, where x is a value in a range of 0<x<1, y is a value in a range of 0.13?y?0.25, and ? and z are values within ranges where the perovskite structure is obtained and ?=0 and z=3 are standard, wherein a ratio between a diffraction peak intensity I(100) from a perovskite (100) plane and a diffraction peak intensity I(200) from a perovskite (200) plane as measured by X-ray diffraction satisfies I(100)/I(200)?1.25.

Abstract: An AT cut quartz crystal resonator element includes a quartz crystal element piece having an exciting part formed from an AT cut quartz crystal plate in a rectangular shape having an X-axis direction of a quartz crystal set to a long side, and an exciting electrode formed on each of front and back main surfaces of the exciting part, in which each side surface in the longitudinal direction of the exciting part is composed of two faces, an m-face of a quartz crystal and a crystal face other than the m-face.

Abstract: A piezoelectric actuator includes a piezoelectric member having piezoelectric pillars and grooves alternately arrayed. Each of the grooves has a first width at a bottom side of the piezoelectric pillars and a second width at an upper side of the piezoelectric pillars in a direction in which the piezoelectric pillars are arrayed. The first width is greater than the second width.

Abstract: A flexural resonator element includes a base body and a beam with a groove and a through-hole, the beam being extended in a Y direction from the base body and flexurally vibrating in an X direction orthogonal to the Y direction, the groove being formed on a surfaces of the beam perpendicular to a Z direction orthogonal to the X direction and the Y direction, and the through-hole having a smaller width in the X direction than a width of an opening of the groove in the X direction and penetrating from an inner surface of the groove formed on the surface of the beam to a surface of the beam opposite to the surface of the beam having the groove.

Abstract: Microelectromechanical systems with structures having piezoelectric actuators are described. The structures each have a body that supports piezoelectric islands. The piezoelectric islands have a first surface and a second opposite surface. The piezoelectric islands can be formed, in part, by forming cuts into a thick layer of piezoelectric material, attaching the cut piezoelectric layer to a body having etched features and grinding the piezoelectric layer to a thickness that is less than the depths of the cuts. Conductive material can be formed on the piezoelectric layer to form electrodes.

Abstract: An electrostrictive composite includes two electrostrictive layers spaced with each other. The electrostrictive layers extend from a first side to a second side. The first side is spaced with and correspond to the second side. The electrostrictive layers are electrically connected with each other at the first side. The electrostrictive layers are insulated from each other at the second side.

Abstract: A resonator element includes: a laminate formed by laminating a plurality of piezoelectric substrates in which thickness-shear vibration occurs.

Abstract: The present invention relates to a ferroelectret multi-layer composite (1) comprising at least two polymer films arranged one on top of the other and bonded together, wherein voids are formed between the polymer films, said voids being tubular channels, particularly running parallel to one another. The invention further provides a process for the production of a ferroelectret multi-layer composite with parallel tubular channels, and a device for carrying out the process for the production of the ferroelectret multi-layer composite according to the invention. In addition, the invention relates to a piezoelectric element containing a ferroelectret multi-layer composite according to the invention.

Abstract: An electrostrictive structure includes a flexible polymer matrix and a carbon nanotube film structure at least partly embedded into the flexible polymer matrix. The carbon nanotube film structure includes a number of carbon nanotubes combined by van der Waals attractive force therebetween. The carbon nanotube film structure extends in a curve in the flexible polymer matrix.

Abstract: A quartz crystal resonator element includes an AT-cut quartz crystal substrate, the substrate having edges parallel to each of a Z? axis obtained by rotating a Z? axis in a range of ?120° to +60° about a Y? axis and an X? axis perpendicular to the Z? axis when an angle formed by rotating a +Z? axis in a direction of a +X axis about the Y? axis is a positive rotation angle; a thin section that forms a resonating section; and a thick section adjacent to the resonating section, the thin section and the thick section being formed on the quartz crystal substrate by wet etching. The thin section is formed either on a main surface of the substrate corresponding to a +Y?-axis side or on a main surface of the substrate corresponding to a ?Y?-axis side.

Abstract: A resonator element includes a base portion in which a pair of notches is formed, a pair of resonating arms which is extended in parallel from one end side of a first portion of the base portion. The resonating arm is provided with a bottomed elongated groove which has an opening along at least one principal surface of both principal surfaces and a weight portion which is formed at the tip end side of the resonating arm on the opposite side of a root of the resonating arm attached to the base portion and which has a larger width than on the root side. The weight portion is formed so that the proportion of the length of the weight portion to the length from the root to the tip end side in a longitudinal direction of the resonating arm is within a range of 35% to 41%.

Abstract: Piezoelectric nanostructures, including nanofibers, nanotubes, nanojunctions and nanotrees, may be made of piezoelectric materials alone, or as composites of piezoelectric materials and electrically-conductive materials. Homogeneous or composite nanofibers and nanotubes may be fabricated by electrospinning. Homogeneous or composite nanotubes, nanojunctions and nanotrees may be fabricated by template-assisted processes in which colloidal suspensions and/or modified sol-gels of the desired materials are deposited sequentially into the pores of a template. The electrospinning or template-assisted fabrication methods may employ a modified sol-gel process for obtaining a perovskite phase in the piezoelectric material at a low annealing temperature.

Abstract: A piezoelectronic device and a method of fabricating the same are disclosed. The piezoelectronic device of the present invention comprises: a plurality of carbon nanotubes; at least one piezoceramic layer covering the plurality of carbon nanotubes; and a supporting material for supporting the carbon nanotubes and disposed between the carbon nanotubes, the supporting layer being coated with at least one piezoceramic layer, wherein the plurality of carbon nanotubes is arranged in a comb-shape. The piezoelectronic device of the present invention is advantageous in having excellent elasticity (durability) and excellent piezoelectronical property. The induced current obtained from the piezoelectronic device of the present invention is about 1.5 ?A or above as well as induced voltage being over 1V when the size of the piezoelectronic block is 2.5 mm×1 mm×1 mm (length×width×height).

Abstract: Provided are a piezoelectric micro-acoustic transducer and a method of fabricating the same. In the piezoelectric micro-acoustic transducer, a diaphragm is divided into a first region and a second region. The first region may be formed of a material capable of maximizing the exciting force, and the second region may be formed of a material having less initial stress and a lower Young's modulus than the first region. Also, the second region has a corrugated shape.

Abstract: A small scale electrical generator includes an elongated substrate and a first piezoelectric fine wire. The first piezoelectric fine wire is disposed along a surface of the substrate. The first piezoelectric fine wire has a first end and a spaced-apart second end. A first conductive contact secures the first end of the fine wire to a first portion of the substrate and a second conductive contact secures the second end of the fine wire to a second portion of the substrate. A fabric made of interwoven strands that includes fibers from which piezoelectric nanowires extend radially therefrom and conductive nanostructures extend therefrom is configured to generate electricity.

Abstract: Provided is a polymer actuator including: an electrolyte layer; and a pair of electrodes provided on both surfaces of the electrolyte layer in the thickness direction, wherein the polymer actuator is deformed when a voltage is applied across the pair of electrodes, and wherein the polymer actuator includes a support portion and a deformation portion, and the gap between the electrodes in the support portion is larger than the gap between the electrodes in the deformation portion.

Abstract: A piezoelectric element comprising a first electrode, a piezoelectric layer which contains lead, zirconium, and titanium, and which is formed above the first electrode, and a second electrode formed above the piezoelectric layer. A groove which exists between grains in the second electrode side surface of the piezoelectric layer, satisfies 0?d/??0.900 (where d: depth of groove, w: width of groove, ?: radius of curvature (d2+w2/4)/2d).

Abstract: Provided is a multi-layer piezoelectric element wherein durability is improved by effectively suppressing short-circuiting between adjacent internal electrode layers in an edge portion of a stacked body. A multi-layer piezoelectric element includes a prismatic stacked body wherein piezoelectric layers and internal electrode layers are alternately laminated, wherein the stacked body includes a chamfered portion formed by grinding a ridge portion of a side peripheral surface thereof, and a linear grinding trace on the chamfered portion extends in a direction along the internal electrode layers.

Abstract: A piezoelectric device includes: a substrate; a first electrode formed over the substrate; a first piezoelectric element formed over the first electrode; a low density region which is formed at a side of the first piezoelectric element and has density lower than that of the first piezoelectric element; a second piezoelectric element which is formed to cover the first piezoelectric element and the low density region; and a second electrode formed over the second piezoelectric element.

Abstract: The present invention provides for a composition comprising a thin film of BiFeO3 having a thickness ranging from 20 nm to 300 nm, a first electrode in contact with the BiFeO3 thin film, and a second electrode in contact with the BiFeO3 thin film; wherein the first and second electrodes are in electrical communication. The composition is free or essentially free of lead (Pb). The BFO thin film is has the piezoelectric property of changing its volume and/or shape when an electric field is applied to the BFO thin film.

Abstract: A MEMS structure having a temperature-compensated resonator member is described. The MEMS structure comprises an asymmetric stress inverter member coupled with a substrate. A resonator member is housed in the asymmetric stress inverter member and is suspended above the substrate. The asymmetric stress inverter member is used to alter the thermal coefficient of frequency of the resonator member by inducing a stress on the resonator member in response to a change in temperature.

Abstract: There is provided a polymer actuator including a first electrode layer as an active member layer made of a conductive polymer, a second electrode layer opposing to the first electrode layer, and an electrolyte placed between the first electrode layer and the second electrode layer, so that the polymer actuator is driven by a voltage applied between both the electrode layers, wherein the electrolyte is constituted by a first electrolyte layer having a sliding function and a second electrolyte layer having an insulation maintaining function.

Abstract: An acoustic wave resonator device comprising a resonant layer that comprises a series of side-by-side areas of first and second dielectric materials. In one embodiment the first dielectric material is a piezoelectric, in particular the first dielectric material can be a piezoelectric and the second dielectric material can be non-piezoelectric. In another embodiment, the first dielectric material is a piezoelectric of first polarity and the second dielectric material is a piezoelectric of opposite polarity or different polarity. Where needed, the resonant layer is supported on a reflector composed of series of layers of high acoustic impedance material(s) alternating with layers of low acoustic impedance material(s). For example, the reflector comprises AlN, Al2O3, Ta2O5, HfO2 or W as high impedance material and SiO2 as low impedance material.

Abstract: Provided are ultrasonic actuators and magnetic recording apparatuses that are stably equipped with superior driving performance without making the apparatus complex or raising cost. By providing an approximately equilateral triangular shaped vibrating member provided with piezoelectric deformation members that expand and contract upon the application of a driving signal, and a moving member that is in pressure contact with the three vertices of the vibrating member to cause relative movement with respect to the vibrating member. The moving member is caused to move relative to the vibrating member due to elliptical vibrations in the same rotational direction in basically the three vertices of the vibrating member due to a deformation vibration of the piezoelectric deformation parts.

Abstract: A MEMS structure having a stress-inducer temperature-compensated resonator member is described. The MEMS structure includes a frame disposed above a substrate. The frame has an inner surface and an outer surface and is composed of a first material having a first coefficient of thermal expansion (CTE) and a second material having a second CTE, different from the first CTE. A resonator member is coupled to the inner surface of the frame.

Abstract: Disclosed is an electromechanical transducer and the method for manufacturing the same, which can detect or control deformation and vibration of a structure and flow of fluids by applying controlling forces. The electromechanical transducer of the present invention comprises a base substrate to which initial stress is applied; an electro-active material layer attached on the base substrate; and electrodes installed on the top and bottom side of the electro-active material layer for actuating the electro-active material layer, the base substrate and the electro-active material layer which is deformed when initial stress is removed from the base substrate so that the base substrate and the electro-active material layer have curvatures.

Abstract: The present invention relates to a method for producing two- or multi-layer ferroelectrets with defined voids, with the exception of three-layer ferroelectrets with a perforated middle layer made of PTFE between two FEP layers, involving, introducing one or more clearances into at least one surface side of a polymer film element by means of a method of removal, applying a first covering to the surface side of the polymer film element comprising clearances formed in step A), and joining the polymer film element and the covering to form a polymer film composite, the clearances being closed while voids are formed, and to a two- or multi-layer ferroelectret, with the exception of three-layer ferroelectrets with a perforated middle layer made of PTFE between two FFP layers, in particular produced by this method. The invention also relates to a piezoelectric element containing a ferroelectret multi-layer composite according to the invention.

Abstract: A piezoelectric resonator includes: a piezoelectric plate having a vibrating portion surrounded by a peripheral portion; and an excitation electrode on the piezoelectric plate, wherein long sides of the vibrating portion and excitation electrode are parallel to a piezoelectric plate long side. Assuming a piezoelectric plate long side length X, a vibrating portion thickness t, a vibrating portion long side length Mx, an excitation electrode long side length Ex, and a piezoelectric plate flexure vibration wavelength ?, ?/2=(1.332/f)?0.0024 (piezoelectric resonator resonance frequency f), (Mx?Ex)/2=?/2, Mx/2={(½)+(¼)}? (where, I=1, 2, 3, . . . ), and X?20 t. A protruding portion is disposed on a vibrating portion extension line and parallel to a vibrating portion short side. Assuming a protruding portion length Dx, Dx=(?/2)×m (where, m=1, 2, 3, . . . ). Assuming a distance Sx between the vibrating and protruding portions, Sx=(?/2)×n±0.1? (where, n=1, 2, 3, . . . ).

Abstract: Crystal devices are disclosed that include a crystal frame having a crystal vibrating piece and an outer frame. The crystal vibrating piece includes excitation electrodes, and the outer frame supports the crystal vibrating piece. Each device has a base including connection electrodes on a first surface thereof and respective external electrodes on a second surface thereof, wherein the connection electrodes are electrically connected via respective through-holes to respective excitation electrodes and to respective external electrodes. The first surface of the base is bonded to the under-surface of the outer frame, and an upper surface of the outer frame is bonded to a crystal lid. The through-holes have non-circular transverse profiles and are filled with a sealing material such as a metal.

Abstract: A piezoelectric resonator element includes: a resonating arm extending in a first direction and cantilever-supported; a base portion cantilever-supporting the resonating arm; and an excitation electrode allowing the resonating arm to perform flexural vibration in a second direction that is orthogonal to the first direction. In the piezoelectric resonator element, the resonating arm includes an adjusting part adjusting rigidity with respect to a bend in a third direction that is orthogonal to the first and second directions.

Abstract: A vibrating reed includes: a base; and a vibrating arm which is extended from one end portion of the base, the vibrating arm having an arm portion which is disposed on the base side, a weight portion which is disposed on a tip side of the arm portion and has a larger width than the arm portion, main surfaces which are respectively disposed on front and back sides of the vibrating arm, side surfaces each of which extends in a longitudinal direction of the vibrating arm to connect the main surfaces on the front and back sides and which are formed so as to face each other, a first groove portion which is a bottomed groove formed at least one of the main surfaces along the longitudinal direction of the vibrating arm, a first excitation electrode which is formed on groove side surfaces each connecting a bottom of the first groove portion with the one main surface, a second excitation electrode which is formed on the both side surfaces, and a projection-in-groove which is disposed on the tip side of a bisector bise

Abstract: A resonator element includes: a base part; and a resonating arm part that extends from the base part in a first direction and performs flexing vibration, wherein the resonating arm part has one principal surface and the other principal surface opposed to the one principal surface, a first groove part provided along the first direction of the resonating arm part on the one principal surface, a second groove part provided in juxtaposition with the first groove part in a second direction orthogonal to the first direction in a plan view on the other principal surface, a third groove part provided in juxtaposition with the first groove part in the first direction in the plan view and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove part provided in juxtaposition with the second groove part in the first direction in the plan view and provided nearer the base part side than the second groove on the one principal surface, and wherein a sum of a depth of the

Abstract: Devices employing electroactive polymer actuators are disclosed. Acrylic dielectric material based actuators are optionally provided in which architectures are presented that allow for improved power output as compared with other known acrylic dielectric material based transducers. Such technology may be applied in motor-driven applications, lightweight flight applications and lighting applications among others.