Having Hollow Cathode Patents (Class 313/618)
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Patent number: 11621157Abstract: A rare gas lamp device is disclosed.Type: GrantFiled: March 23, 2022Date of Patent: April 4, 2023Assignees: Samsung Electronics Co., Ltd., EI Lighting Co., Ltd.Inventors: Myungju Shin, Myonggi Jang, Youngchul Ko, Donghyo Kim, Jongwook Joo, Daehyun Sung, Jaegeun Ji
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Patent number: 9721765Abstract: A plasma source is provided. The plasma source includes at least three hollow cathodes, including a first hollow cathode, a second hollow cathode, and a third hollow cathode, each hollow cathode having a plasma exit region. The plasma source includes a source of power capable of producing multiple output waves, including a first output wave, a second output wave, and a third output wave, wherein the first output wave and the second output wave are out of phase, the second output wave and the third output wave are out of phase, and the first output wave and the third output wave are out of phase. Each hollow cathode is electrically connected to the source of power such that the first hollow cathode is electrically connected to the first output wave, the second hollow cathode is electrically connected to the second output wave, and the third hollow cathode is electrically connected to the third output wave. Electrical current flows between the at least three hollow cathodes that are out of electrical phase.Type: GrantFiled: November 16, 2015Date of Patent: August 1, 2017Assignees: AGC FLAT GLASS NORTH AMERICA, INC., ASAHI GLASS CO., LTD., AGC GLASS EUROPE S.A.Inventors: John Chambers, Peter Maschwitz
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Patent number: 8698384Abstract: This invention provides a sintered electrode for a cold cathode tube in a cylindrical form having a bottom part on one end and an opening part on the other end, characterized in that a lead-in wire is joined integrally to the bottom part and a requirement of d2/d1>1 is satisfied wherein d1 represents the density of the sintered electrode; and d2 represents the density of the lead-in wire. According to the sintered electrode for a cold cathode tube, the bonding strength between the sintered electrode and the lead-in wire is high, and the handleability is good. The main component of the sintered electrode is particularly preferably identical to the main component of the lead-in wire. Enhancing the density of the lead-in wire can contribute to a further improvement, for example, in reliability.Type: GrantFiled: March 16, 2007Date of Patent: April 15, 2014Assignees: Kabushiki Kaisha Toshiba, Toshiba Materials Co., Ltd.Inventors: Tsutomu Morioka, Fumihiko Yoshimura, Toshiaki Suto
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Patent number: 8638034Abstract: The multi-micro hollow cathode light source has a cathode plate, an insulation plate, an anode plate, and metal pieces. The insulation plate is sandwiched by the cathode plate and the anode plate. The cathode plate is made of copper. The centers of the cathode plate, insulation plate, and anode plate, are provided with holes, respectively. The holes form a penetrating though-hole. Linear slots are disposed in the cathode plate continuously extending from the hole in a cross shape. Each slot penetrates the cathode plate. Four metal pieces made of materials different from one another are inserted and buried in the four slots.Type: GrantFiled: February 8, 2011Date of Patent: January 28, 2014Assignees: National University Corporation Nagoya University, Meijo University, Nu Eco Engineering Co., Ltd., Katagiri Engineering Co., Ltd.Inventors: Masaru Hori, Masafumi Ito, Takayuki Ohta, Hiroyuki Kano, Koji Yamakawa
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Patent number: 8575855Abstract: A hollow cathode lamp is described with an end cap, an anode, and a cathode. A data storage device is part of the end cap and communicates data to and from a computing device. The data communicated with the computing device may include identification information and usage information corresponding to the hollow cathode lamp. Additionally, a method is described that includes activating a power supply to a hollow cathode lamp and communicating data with a memory device located in the hollow cathode lamp. The data communicated with the memory device includes usage information about an amount of time the hollow cathode lamp has been in use.Type: GrantFiled: December 30, 2010Date of Patent: November 5, 2013Assignees: PerkinElmer Health Sciences, Inc., PerkinElmer Singapore Pte. Ltd.Inventors: Sunita Carrasco, David Hager, Tack-Boon Yee
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Patent number: 8563924Abstract: An ionization device comprises: a plasma source configured to generate a plasma. The plasma comprises light, plasma ions and plasma electrons. The plasma source comprises an aperture disposed such that at least part of the light passes through the aperture and is incident on a gas sample. The ionization device further comprises an ionization region; and a plasma deflection device comprising a plurality of electrodes configured to establish an electric field, wherein the electric field substantially prevents the plasma ions from entering the ionization region.Type: GrantFiled: June 28, 2011Date of Patent: October 22, 2013Assignee: Agilent Technologies, Inc.Inventors: James Edward Cooley, Sameer Kothari
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Patent number: 8460045Abstract: A high intensity discharge lamp comprises a discharge vessel and two electrode rods having substantially flat ends facing to each other in opposite positions within the discharge vessel. A spiral coil of wire is wound at least on a part of the surface of at least one of the electrode rods. The spiral coil protrudes over said end of the corresponding electrode rod and thus forms a hollow cavity for extending dimmable wattage range of the lamp.Type: GrantFiled: June 25, 2007Date of Patent: June 11, 2013Assignee: General Electric CompanyInventors: Ágoston Böröczki, Csaba Horváth
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Publication number: 20130027697Abstract: The multi-micro hollow cathode light source has a cathode plate, an insulation plate, an anode plate, and metal pieces. The insulation plate is sandwiched by the cathode plate and the anode plate. The cathode plate is made of copper. The centers of the cathode plate, insulation plate, and anode plate, are provided with holes, respectively. The holes form a penetrating though-hole. Linear slots are disposed in the cathode plate continuously extending from the hole in a cross shape. Each slot penetrates the cathode plate. Four metal pieces made of materials different from one another are inserted and buried in the four slots.Type: ApplicationFiled: February 8, 2011Publication date: January 31, 2013Inventors: Masaru Hori, Masafumi Ito, Takayuki Ohta, Hiroyuki Kano, Koji Yamakawa
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Publication number: 20120313517Abstract: Some embodiments include methods of forming plasma-generating microstructures. Aluminum may be anodized to form an aluminum oxide body having a plurality of openings extending therethrough. Conductive liners may be formed within the openings, and circuitry may be formed to control current flow through the conductive liners. The conductive liners form a plurality of hollow cathodes, and the current flow is configured to generate and maintain plasmas within the hollow cathodes. The plasmas within various hollow cathodes, or sets of hollow cathodes, may be independently controlled. Such independently controlled plasmas may be utilized to create a pattern in a display, or on a substrate. In some embodiments, the plasmas may be utilized for plasma-assisted etching and/or plasma-assisted deposition. Some embodiments include constructions and assemblies containing multiple plasma-generating structures.Type: ApplicationFiled: August 23, 2012Publication date: December 13, 2012Applicant: MICRON TECHNOLOGY, INC.Inventors: Neal Rueger, Stephen J. Kramer
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Patent number: 8143788Abstract: An apparatus and method for achieving an efficient central cathode in a Hall effect thruster is disclosed. A hollow insert disposed inside the end of a hollow conductive cathode comprises a rare-earth element and energized to emit electrons from an inner surface. The cathode employs an end opening having an area at least as large as the internal cross sectional area of the rare earth insert to enhance throughput from the cathode end. In addition, the cathode employs a high aspect ratio geometry based on the cathode length to width which mitigates heat transfer from the end. A gas flow through the cathode and insert may be impinged by the emitted electrons to yield a plasma. One or more optional auxiliary gas feeds may also be employed between the cathode and keeper wall and external to the keeper near the outlet.Type: GrantFiled: August 30, 2008Date of Patent: March 27, 2012Assignee: California Institute of TechnologyInventors: Richard R. Hofer, Dan M. Goebel, Ronnie M. Watkins
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Publication number: 20120001539Abstract: Some embodiments include methods of forming plasma-generating microstructures. Aluminum may be anodized to form an aluminum oxide body having a plurality of openings extending therethrough. Conductive liners may be formed within the openings, and circuitry may be formed to control current flow through the conductive liners. The conductive liners form a plurality of hollow cathodes, and the current flow is configured to generate and maintain plasmas within the hollow cathodes. The plasmas within various hollow cathodes, or sets of hollow cathodes, may be independently controlled. Such independently controlled plasmas may be utilized to create a pattern in a display, or on a substrate. In some embodiments, the plasmas may be utilized for plasma-assisted etching and/or plasma-assisted deposition. Some embodiments include constructions and assemblies containing multiple plasma-generating structures.Type: ApplicationFiled: September 13, 2011Publication date: January 5, 2012Applicant: MICRON TECHNOLOGY, INC.Inventors: Neal Rueger, Stephen J. Kramer
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Patent number: 8021206Abstract: A fluorescent lamp that can be easily manufactured to provide high brightness and high efficiency, a method of manufacturing the same, and a backlight unit having the same are provided. First and second non-emissive glass tube are joined to an emissive glass tube coated with a phosphor, and first and second electrodes are formed on outer surfaces of the first and second non-emissive glass tubes. The first and second non-emissive tubes may have the same diameter as the emissive glass tube. The first and second non-emissive glass tubes are simply joined to the emissive glass tube, thereby reducing the manufacturing process and cost. The first and second non-emissive glass tubes are formed to be thinner than the emissive glass tube, thereby enhancing the brightness and efficiency of the fluorescent lamp.Type: GrantFiled: December 20, 2005Date of Patent: September 20, 2011Assignee: LG Display Co., Ltd.Inventors: Junghyun Yoon, Jinwoo Hong
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Patent number: 7786660Abstract: The invention relates to an electrode having a nano-hollow array on the surface thereof, the nano-hollow array comprising a plurality of nano-pores or nano-balls, each pore having a diameter of less than 500 nm, formed by a process comprising depositing a uniform metal film on the electrode structure surface at a rate of 2 ? per second or less, annealing the metal film under rapid anneal conditions at a temperature within about 100 degrees of the melting point of the metal film and without subjecting the metal film to a temperature ramp-up to create metal droplets, and anodizing and over-anodizing the metal droplets in the presence of an anodization agent for the metal at from 20 to 200 volts at 0.1 to 2 amps to create nano-pores in the metal droplets or nano-balls to, creating increased surface area and increased electric field around the electrode which enhances speed of fill gas ionization.Type: GrantFiled: February 6, 2007Date of Patent: August 31, 2010Assignee: General Electric CompanyInventor: Deeder Aurongzeb
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Patent number: 7755290Abstract: A Plasma Display Panel (PDP) includes a dielectric layer having a plurality of dielectric-layer perforated holes arranged in a matrix; and upper and lower electrode layers having electrode-layer perforated holes connected to the dielectric-layer perforated holes and arranged on both surfaces of the dielectric layer; the upper electrode layer includes a plurality of first electrodes extending in a first direction, the plurality of first electrodes surrounding a group of electrode-layer perforated holes arranged in the first direction; and the lower electrode layer includes a plurality of second electrodes extending in a second direction different from the first direction, the plurality of second electrodes surrounding a group of electrode-layer perforated holes arranged in the second direction.Type: GrantFiled: September 6, 2006Date of Patent: July 13, 2010Assignee: Samsung SDI Co., Ltd.Inventors: Sang-Hoon Yim, Yoon-Chang Kim, Min-Suk Lee, Hyoung-Bin Park
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Patent number: 7714487Abstract: It is possible to prolong service life of a discharge lamp of hot-cathode type and to reduce a diameter thereof. A discharge lamp 1 is provided with an electrode 3. The electrode 3 has a heater 4 made up a coil portion 4a, and a first lead wire portion 4b and a second lead wire portion 4c that respectively extend from rear ends of this coil portion 4a and applied by an electron emission material 3a. In the electrode 3, a first lead-in wires 6a is connected to the first lead wire portion 4b and a second lead-in wires 6b is connected to the second lead wire portion 4c, so that the coil portion 4a is arranged vertically along the tube axis of the glass tube 2. The electrode 3 is also provided a sleeve 7 covering surrounding of the coil portion 4a and having openings in the faces respectively opposite to the forward end and rear end of the coil portion 4a. An open end 7a of the sleeve 7 exceeds a forward end of the coil portion 4a, thereby protecting the coil portion 4a.Type: GrantFiled: January 19, 2005Date of Patent: May 11, 2010Assignee: Sony CorporationInventors: Yoshiichi Horikoshi, Yukio Hara, Masahiro Kikuchi, Hiroshi Takahashi, Ryouichi Yoshida, Hiroto Watanabe
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Patent number: 7656092Abstract: A Plasma Display Panel (PDP) includes a dielectric layer having a plurality of dielectric-layer perforated holes arranged in a matrix; upper and lower electrode layers each having electrode-layer perforated holes connected to the dielectric-layer perforated holes and arranged on both surfaces of the dielectric layer, the upper and lower electrode layers being adapted to receive electrical signals. The upper electrode layer includes a plurality of upper electrodes extending in a first direction, each of the plurality of upper electrodes surrounding a group of the electrode-layer perforated holes arranged in the first direction and including transparent individual electrodes surrounding the electrode-layer perforated holes and linear connection portions adapted to electrically connect the individual electrodes.Type: GrantFiled: September 6, 2006Date of Patent: February 2, 2010Assignee: Samsung SDI Co., Ltd.Inventors: Sanghoon Yim, Yoonchang Kim
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Patent number: 7638937Abstract: Roll to roll fabrication methods of the invention enable low cost mass production of microdischarge devices and arrays. A preferred embodiment method of fabricating a discharge device includes providing a dielectric layer sheet, a first electrode, and a second electrode sheet. A cavity is provided through at least a portion of the dielectric layer sheet. At least the dielectric layer sheet and second electrode sheet are rolled together. Another preferred embodiment method of fabrication a discharge device includes method of fabricating a discharge device includes providing a dielectric layer sheet and a cavity through at least a portion of the dielectric layer sheet. A first electrode is disposed as a film of conducting material on the dielectric layer sheet around a rim of the cavity. A second electrode sheet is provided. The dielectric layer sheet is rolled together with first electrode and second electrode sheets.Type: GrantFiled: March 1, 2005Date of Patent: December 29, 2009Assignee: Board of Trustees of the University IllinoisInventors: J. Gary Eden, Sung-Jin Park, Clark J. Wagner
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Publication number: 20090310134Abstract: [Object] To achieve a compact point light source exhibiting multielement emission spectra with which multi elements can be simultaneously analyzed. [Solving Means] The light source includes a glass vessel 40 containing He gas; a plurality of micro hollow pipes 11 that are cylindrical with a diameter of 1 mm or less and made of copper or a copper alloy; an anode mesh 32 provided at ends of the micro hollow pipes 11 with an insulating spacer 33 between the anode mesh 32 and the ends; a metal wire 14 provided in the micro hollow pipe 11, the metal wire being made of an element corresponding to a desired light-source spectrum.Type: ApplicationFiled: November 2, 2006Publication date: December 17, 2009Inventors: Masaru Hori, Masafumi Ito, Takayuki Ohta, Hiroyuki Kano
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Patent number: 7595594Abstract: The present invention is directed to an arrangement for switching high electric currents by way of a gas discharge at high voltages or for generating gas discharge plasma emitting EUV radiation. It is the object of the invention to find a novel possibility for generating a hollow cathode plasma that permits a longer life of the cathodes of short wavelength-emitting gas discharge radiation sources and pseudospark switches, also in high-power operation. This object is met in that the metal wall between the hollow cathode space and the discharge space has a thickness on the order of the centimeter range so that the openings of the metal wall change into relatively long channels and in that substantially radially extending cooling channels are introduced in the metal wall to reduce the ion erosion of the metal wall of the hollow cathode through efficient cooling.Type: GrantFiled: March 3, 2008Date of Patent: September 29, 2009Assignee: XTREME technologies GmbHInventors: Vladimir Korobochko, Alexander Keller, Juergen Kleinschmidt
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Publication number: 20080315769Abstract: A high intensity discharge lamp comprises a discharge vessel and two electrode rods having substantially flat ends facing to each other in opposite positions within the discharge vessel. A spiral coil of wire is wound at least on a part of the surface of at least one of the electrode rods. The spiral coil protrudes over said end of the corresponding electrode rod and thus forms a hollow cavity for extending dimmable wattage range of the lamp.Type: ApplicationFiled: June 25, 2007Publication date: December 25, 2008Inventors: Agoston Boroczki, Csaba Horvath
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Patent number: 7439676Abstract: A cold cathode fluorescent lamp (1) has feedthrough pins (5) made from molybdenum or a molybdenum alloy that form a glass-metal seal (6) with a glass composed of 55-75 wt. % SiO2, 13-25 wt. % B2O3, 0-10 wt. % Al2O3, 5-12 wt. % alkali oxides, 0-3 wt. % alkali earth oxides, 0-5 wt. % ZrO2, 0-10 wt. % TiO2 und 0-5 wt. % remaining oxides. The lamp has hollow cathodes (4) made from a material of the group molybdenum, molybdenum alloys, niobium, niobium alloys, and the lamp is manufactured in a compact form using conventional manufacturing parameters, and the resulting lamp has crack free, long-term vacuum-tight glass-metal seals.Type: GrantFiled: May 27, 2004Date of Patent: October 21, 2008Assignees: Plansee SE, Schott AGInventors: Herman Walser, Wolfram Knabl, Gerhard Leichtfried, Jörg Hinrich Fechner, Franz Ott, Ralf Diezel, Brigitte Hueber
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Patent number: 7397190Abstract: The invention relates to a gas discharge lamp for EUV radiation with an anode (1) and a hollow cathode (2), wherein the hollow cathode (2) has at least two openings (3, 3?) and the anode (1) has a through hole (4), which is characterized in that the longitudinal axes (5, 5?) of the hollow cathode openings (3) have a common point of intersection S lying on the axis of symmetry (6) of the anode opening (4).Type: GrantFiled: November 28, 2003Date of Patent: July 8, 2008Assignee: Koninklijke Philips Electronics, N.V.Inventors: Guenther Hans Derra, Joseph Robert Rene Pankert, Willi Neff, Klaus Bergmann, Jeroen Jonkers
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Publication number: 20080106202Abstract: The present invention provides a hollow cathode discharging apparatus including a hollow anode electrode, a hollow cathode electrode insulatedly fixed in the hollow anode electrode, a gas distribution pipe fixed in the hollow cathode electrode. The hollow anode electrode and the hollow cathode electrode are formed with anode openings and cathode openings respectively. Defined by the gas distribution pipe and the hollow cathode electrode and along the axis thereof is a spiral pathway winding through the cathode openings, so as to form a plurality of continuous and communicated reaction chambers. The gas distribution pipe is disposed with gas separation apertures communicated and adapted to introduce a reactive gas into the reaction chambers. The communicated reaction chambers enable uniform distribution of the reactive gas and thereby facilitate scale-up of the apparatus in axial. Accordingly, the present invention overcomes drawbacks of the prior art.Type: ApplicationFiled: January 31, 2007Publication date: May 8, 2008Inventors: Chen-Chung Du, Ming-Tung Chiang, Fu-Ching Tung, Chin-Feng Cheng, Tean-Mu Shen
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Patent number: 6989629Abstract: Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.Type: GrantFiled: January 21, 2005Date of Patent: January 24, 2006Assignee: EUV LLCInventors: Leonard E. Klebanoff, Daniel J. Rader, William T. Silfvast
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Patent number: 6943499Abstract: The present invention has an object to provide a cold-cathode fluorescent lamp which can suppress sputtering caused by electric discharge and reduce consumption of mercury so as to achieve a longer lifetime even if a lamp current is large and a lighting tube has a small diameter. The cold-cathode fluorescent lamp according to the present invention is characterized in that a distance between the inner surface of the lighting tube and the outer surface of a cylindrical electrode is set such that electric discharge develops mainly on the inner surface of the cylindrical electrode. When the lighting tube has an inside diameter D1 of 1 to 6 mm and the maximum lamp current is 5 mA or more, an outside diameter D2 of the cylinder electrode is preferably set at D1?0.4 [mm]?D2<D1.Type: GrantFiled: April 6, 2004Date of Patent: September 13, 2005Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Hirofumi Yamashita, Haruo Yamazaki, Toshihiro Terada, Shinji Kihara
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Patent number: 6936956Abstract: A discharge lamp with a high output power in which an increase of the current to be supplied to the discharge lamp can be enabled without the need to enlarge the discharge lamp and the surrounding system. The discharge lamp includes an arc tube having a pair of opposed electrodes, at least one of the electrodes having an electrode body in which a hermetically sealed interior space is formed, and a heat conductor partially filling the hermetically sealed interior space. This heat conductor consists of metal that has a higher thermal conductivity or a lower melting point than the metal comprising the electrode body.Type: GrantFiled: April 23, 2003Date of Patent: August 30, 2005Assignee: Ushiodenki Kabushiki KaishaInventors: Mitsuru Ikeuchi, Katsumi Shojo, Yoichi Kono
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Patent number: 6888297Abstract: Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.Type: GrantFiled: December 19, 2002Date of Patent: May 3, 2005Assignee: EUV LLCInventors: Leonard E. Klebanoff, William T. Silfvast, Daniel J. Rader
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Publication number: 20040239253Abstract: A cold cathode fluorescent lamp (1) has feedthrough pins (5) made from molybdenum or a molybdenum alloy that form a glass-metal seal (6) with a glass composed of 55-75 wt. % SiO2, 13-25 wt. % B2O3, 0-10 wt. % Al2O3, 5-12 wt. % alkali oxides, 0-3 wt. % alkali earth oxides, 0-5 wt. % ZrO2, 0-10 wt. % TiO2 und 0-5 wt. % remaining oxides. The lamp has hollow cathodes (4) made from a material of the group molybdenum, molybdenum alloys, niobium, niobium alloys, and the lamp is manufactured in a compact form using conventional manufacturing parameters, and the resulting lamp has crack free, long-term vacuum-tight glass-metal seals.Type: ApplicationFiled: May 27, 2004Publication date: December 2, 2004Applicants: Plansee Aktiengesellschaft, Schott GlasInventors: Herman Walser, Wolfram Knabl, Gerhard Leichtfried, Jorg Hinrich Fechner, Franz ott, Ralf Diezel, Brigitte Hueber
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Patent number: 6815891Abstract: A discharge device has a diode with a depletion region, a channel extending through a surface of the diode, and a gas within the channel. The gas is excited and a discharge formed by reverse biasing the diode and establishing an electric field in the depletion region of the diode.Type: GrantFiled: October 26, 2001Date of Patent: November 9, 2004Assignee: Board of Trustees of the University of IllinoisInventors: J. Gary Eden, Sung-Jin Park, Clark J. Wagner
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Patent number: 6800997Abstract: The present invention has an object to provide a cold-cathode fluorescent lamp which can suppress sputtering caused by electric discharge and reduce consumption of mercury so as to achieve a longer lifetime even if a lamp current is large and a lighting tube has a small diameter. The cold-cathode fluorescent lamp according to the present invention is characterized in that a distance between the inner surface of the lighting tube and the outer surface of a cylindrical electrode is set such that electric discharge develops mainly on the inner surface of the cylindrical electrode. When the lighting tube has an inside diameter D1 of 1 to 6 mm and the maximum lamp current is 5 mA or more, an outside diameter D2 of the cylinder electrode is preferably set at D1−0.4 [mm]≦D2<D1.Type: GrantFiled: March 27, 2002Date of Patent: October 5, 2004Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Hirofumi Yamashita, Haruo Yamazaki, Toshihiro Terada, Shinji Kihara
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Publication number: 20040189204Abstract: The present invention has an object to provide a cold-cathode fluorescent lamp which can suppress sputtering caused by electric discharge and reduce consumption of mercury so as to achieve a longer lifetime even if a lamp current is large and a lighting tube has a small diameter. The cold-cathode fluorescent lamp according to the present invention is characterized in that a distance between the inner surface of the lighting tube and the outer surface of a cylindrical electrode is set such that electric discharge develops mainly on the inner surface of the cylindrical electrode. When the lighting tube has an inside diameter D1 of 1 to 6 mm and the maximum lamp current is 5 mA or more, an outside diameter D2 of the cylinder electrode is preferably set at D1−0.4 [mm]≦D2<D1.Type: ApplicationFiled: April 6, 2004Publication date: September 30, 2004Applicant: Matsushita Electric Industrial Co., Ltd.Inventors: Hirofumi Yamashita, Haruo Yamazaki, Toshihiro Terada, Shinji Kihara
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Publication number: 20040164680Abstract: A hollow cathode having at least a portion of the inner, outer or both surfaces coated with a layer of a getter material is described. Some methods for the production of the hollow cathode of the invention are also described, which include cathodic and electrophoretic deposition of the getter layer onto the hollow cathode.Type: ApplicationFiled: March 18, 2004Publication date: August 26, 2004Applicant: SAES Getters S.p.A.Inventors: Alessandro Gallitognotta, Claudio Boffito, Alessio Corazza
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Patent number: 6780663Abstract: A method of forming a floating structure lifting up from a substrate and a method of manufacturing a field emission device (FED) employing the floating structure are provided. The method of forming a floating structure includes forming an expansion causer layer, which can generate a byproduct from the reacting with a predetermined reactant gas causing volume expansion, on the substrate; forming an object material layer for the floating structure on a resultant stack; forming a hole through which the reactant gas is supplied on a resultant stack; supplying the reactant gas through the hole so that the object material layer partially lifts up from the substrate due to the byproduct generated from the reaction of the expansion causer layer with the reactant gas; and removing the byproduct through the hole so that the portion of the object material layer lifting up from the substrate can be completely separated from the substrate to form the floating structure.Type: GrantFiled: September 11, 2002Date of Patent: August 24, 2004Assignee: Samsung SDI Co., Ltd.Inventors: Young-Jun Park, In-Taek Han
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Publication number: 20040119394Abstract: Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.Type: ApplicationFiled: December 19, 2002Publication date: June 24, 2004Inventors: Leonard E. Klebanoff, William T. Silfvast, Daniel J. Rader
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Patent number: 6703771Abstract: A light source with a sealed, light-transmissive tube filled with high pressure gases or high pressure gas mixtures and a microhollow cathode (MHC) discharge capable of excimer production are provided.Type: GrantFiled: June 7, 2001Date of Patent: March 9, 2004Assignee: Trustees of Stevens Institute of TechnologyInventors: Kurt F. Becker, Peter F. Kurunczi, Karl H. Schoenbach
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Patent number: 6657370Abstract: A microcavity discharge device generates radiation with wavelengths in the range of from 11 to 14 nanometers. The device has a semiconductor plug, a dielectric layer, and an anode layer. A microcavity extends completely through the anode and dielectric layers and partially into the semiconductor plug. According to one aspect of the invention, a substrate layer has an aperture aligned with the microcavity. The microcavity is filled with a discharge gas under pressure which is excited by a combination of constant DC current and a pulsed current to produce radiation of the desired wavelength. The radiation is emitted through the base of the microcavity. A second embodiment has a metal layer which transmits radiation with wavelengths in the range of from 11 to 12 nanometers, and which excludes longer wavelengths from the emitted beam.Type: GrantFiled: August 21, 2000Date of Patent: December 2, 2003Assignee: Micron Technology, Inc.Inventor: Joseph E. Geusic
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Patent number: 6624583Abstract: A method of treating a first chemical species in a gas using a plasma, the method including the steps of providing an array of micro-scale cavity discharge devices capable of sustaining the plasma where the first chemical species is capable of flowing proximate to the array of micro-scale cavity discharge devices, wherein the first chemical species is converted to a second chemical species within the plasma.Type: GrantFiled: June 28, 2002Date of Patent: September 23, 2003Assignee: Motorola, Inc.Inventors: Bernard F. Coll, Paul A. Vonallmen, Frederic Zenhausern
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Patent number: 6563257Abstract: A discharge device of the invention includes multiple bonded ceramic layers with electrodes formed between the layers. It can be combined with the various MCIC technologies to produce myriad useful devices. Contacts are made to the electrodes, which may be grouped in different arrangements. The electrodes contact a hole through some or all of the ceramic layers to define a discharge cavity. Different groupings of the electrodes will produce different types of discharge. Alternating the electrodes in interdigitated pairs permits an arbitrary extension of the discharge cavity length. Having consecutive anodes or cathodes permits formation of regions where electrons may cool. Another device of the invention includes a multilayer ceramic structure having a hole formed in a least one outer layer through an electrode on the outer side of the layer and in contact with an electrode between two layers. A contact is formed to the electrode between layers through any remaining layers in the multilayer ceramic structure.Type: GrantFiled: December 29, 2000Date of Patent: May 13, 2003Assignee: The Board of Trustees of the University of IllinoisInventors: Bruce A. Vojak, J. Gary Eden, Sung-Jin Park, Clark Wagner
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Patent number: 6548958Abstract: In a hollow cathode lamp comprising, in a bulb having a light exit port, a hollow cathode and an anode opposed to the light exit port, which comprises a tubular hood having a tubular shape, having one open end connected to the hollow cathode, having another open end opposed to the light exit port, and having an opening formed in a peripheral side face thereof, and an electron supply disposed at a position to front on the opening, discharge making use of thermoelectrons is implemented between the electron supply and the anode.Type: GrantFiled: August 22, 2001Date of Patent: April 15, 2003Assignee: Hamamatsu Photonics K.K.Inventors: Yuji Shimazu, Toshio Ito, Jyunichi Imakama
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Patent number: 6518692Abstract: A discharge device for operation in a gas at a prescribed pressure includes a cathode having a plurality of micro hollows therein, and an anode spaced from the cathode. Each of the micro hollows has dimensions selected to produce a micro hollow discharge at the prescribed pressure. Preferably, each of the micro hollows has a cross-sectional dimension that is on the order of the mean free path of electrons in the gas. Electrical energy is coupled to the cathode and the anode at a voltage and current for producing micro hollow discharges in each of the micro hollows in the cathode. The discharge device may include a discharge chamber for maintaining the prescribed pressure. A dielectric layer may be disposed on the cathode when the spacing between the cathode and the anode is greater than about the mean free path of electrons in the gas. Applications of the discharge device include fluorescent lamps, excimer lamps, flat fluorescent light sources, miniature gas lasers, electron sources and ion sources.Type: GrantFiled: October 31, 2001Date of Patent: February 11, 2003Assignees: Old Dominion University, OSRAM Sylvania, Inc.Inventors: Karl H. Schoenbach, Wojciech W. Byszewski, Frank E. Peterkin, Amin N. Dharami
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Patent number: 6346770Abstract: A discharge device for operation in a gas at a prescribed pressure includes a cathode having a plurality of micro hollows therein, and an anode spaced from the cathode. Each of the micro hollows has dimensions selected to produce a micro hollow discharge at the prescribed pressure. Preferably, each of the micro hollows has a cross-sectional dimension that is on the order of the mean free path of electrons in the gas. Electrical energy is coupled to the cathode and the anode at a voltage and current for producing micro hollow discharges in each of the micro hollows in the cathode. The discharge device may include a discharge chamber for maintaining the prescribed pressure. A dielectric layer may be disposed on the cathode when the spacing between the cathode and the anode is greater than about the mean free path of electrons in the gas. Applications of the discharge device include fluorescent lamps, excimer lamps, flat fluorescent light sources, miniature gas lasers, electron sources and ion sources.Type: GrantFiled: March 22, 2000Date of Patent: February 12, 2002Assignees: Osram Sylvania, Inc., Old Dominion UniversityInventors: Karl H. Schoenbach, Wojciech W. Byszewski, Frank E. Peterkin, Amin N. Dharamsi
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Publication number: 20020000775Abstract: In a hollow cathode lamp comprising, in a bulb having a light exit port, a hollow cathode and an anode opposed to the light exit port, which comprises a tubular hood having a tubular shape, having one open end connected to the hollow cathode, having another open end opposed to the light exit port, and having an opening formed in a peripheral side face thereof, and an electron supply disposed at a position to front on the opening, discharge making use of thermoelectrons is implemented between the electron supply and the anode.Type: ApplicationFiled: August 22, 2001Publication date: January 3, 2002Applicant: HAMAMATSU PHOTONICS K.K.Inventors: Yuji Shimazu, Toshio Ito, Jyunichi Imakama
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Patent number: 6194833Abstract: A microdischarge device having a gas or vapor contained in a microcavity and in electrical contact with a semiconductor substrate, preferably a silicon wafer. A preferred structure includes successive cathode substrate or film, dielectric, and conductive anode layers with the anode and dielectric layers penetrated by a plurality of microcavities to allow electrical contact between the discharge medium and the substrate cathode layer. A hollow cathode structure includes a microcavity that penetrates the cathode. An optical waveguide network may be used in addition to collect and concentrate emission from groups of individual microcavities. The small aperture of the cavity area, of about 1 to 400 micrometers in diameter, enable the electrons in the discharge to be ballistic under certain conditions and permit the gas pressure to exceed one atmosphere. In addition, the small dimensions permit resonance radiation, such as the 254 nm line of atomic mercury, to be extracted efficiently from the discharge volume.Type: GrantFiled: October 22, 1998Date of Patent: February 27, 2001Assignee: The Board of Trustees of the University of IllinoisInventors: Thomas A. DeTemple, James Frame, David J. Wheeler, J. Gary Eden
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Patent number: 6072273Abstract: A discharge device for operation in a gas at a prescribed pressure includes a cathode having a plurality of micro hollows therein, and an anode spaced from the cathode. Each of the micro hollows has dimensions selected to produce a micro hollow discharge at the prescribed pressure. Preferably, each of the micro hollows has a cross-sectional dimension that is on the order of the mean free path of electrons in the gas. Electrical energy is coupled to the cathode and the anode at a voltage and current for producing micro hollow discharges in each of the micro hollows in the cathode. The discharge device may include a discharge chamber for maintaining the prescribed pressure. A dielectric layer may be disposed on the cathode when the spacing between the cathode and the anode is greater than about the mean free path of electrons in the gas. Applications of the discharge device include fluorescent lamps, excimer lamps, flat fluorescent light sources, miniature gas lasers, electron sources and ion sources.Type: GrantFiled: May 12, 1999Date of Patent: June 6, 2000Assignees: Osram Sylvania Inc., Old Dominion UniversityInventors: Karl H. Schoenbach, Wojciech W. Byszewski, Frank E. Peterkin, Amin N. Dharamsi
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Patent number: 5939829Abstract: A discharge device for operation in a gas at a prescribed pressure includes a cathode having a plurality of micro hollows therein, and an anode spaced from the cathode. Each of the micro hollows has dimensions selected to produce a micro hollow discharge at the prescribed pressure. Preferably, each of the micro hollows has a cross-sectional dimension that is on the order of the mean free path of electrons in the gas. Electrical energy is coupled to the cathode and the anode at a voltage and current for producing micro hollow discharges in each of the micro hollows in the cathode. The discharge device may include a discharge chamber for maintaining the prescribed pressure. A dielectric layer may be disposed on the cathode when the spacing between the cathode and the anode is greater than about the mean free path of electrons in the gas. Applications of the discharge device include fluorescent lamps, excimer lamps, flat fluorescent light sources, miniature gas lasers, electron sources and ion sources.Type: GrantFiled: July 28, 1997Date of Patent: August 17, 1999Assignee: Osram Sylvania, Inc.Inventors: Karl H. Schoenbach, Wojciech W. Byszewski, Frank E. Peterkin, Amin N. Dharamsi
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Patent number: 5666018Abstract: An electron tube cathode has a hollow cylindrical structure formed by thermo-emissive wires mounted between two conductive supports. The two supports are mechanically fixed to each other. To prevent the deformation of the cathode when the heating is turned on and turned off, at least one spring is used, this spring being integrated with one of the supports and being placed in the vicinity of the thermo-emissive wires. The spring is made of a material possessing elastic properties which, at ambient temperature, are lower than or equal to the properties that it has at a temperature greater than ambient temperature.Type: GrantFiled: June 14, 1996Date of Patent: September 9, 1997Assignee: Thomson Tubes ElectroniquesInventors: Michel Langlois, Robert Frossard
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Patent number: 5483121Abstract: A hollow cathode discharge tube is used for atomic absorption analysis. The tube has a cathode which includes a first hollow portion and a second hollow portion connected to each other. The second hollow portion has a diameter greater than the first hollow portion and a close end. Inserted through the closed end is a rod-like anode which has a part within the hollow space of the cathode. There is a auxiliary electrode which can be an auxiliary anode that surrounds the rod-like anode and is insulated therefrom. There is an additional electrode which can be an auxiliary cathode at the front end portion of the cathode. The cathode is formed of a material that is a material or includes a material that is to be analyzed.Type: GrantFiled: April 22, 1993Date of Patent: January 9, 1996Assignee: Koto Electric Co., Ltd.Inventors: Hiroshi Okagaki, Takayuki Kameya, Hiroshi Ishizaki, Kazuya Abe
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Patent number: 5444332Abstract: Several different cold cathode configurations for a gas discharge device each having a plurality of grooves of selected spacing, depth and width to improve the emission of electrons in a gas discharge device. Each of the cold cathode configurations can be machined from a single piece of a selected material. Several of the configurations can be assembled with individual elements which is easily seen from the various figures.Type: GrantFiled: October 8, 1993Date of Patent: August 22, 1995Inventors: Jim J. Chang, Terry W. Alger
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Patent number: 5418423Abstract: An improved gas discharge trigger for a pseudogap cold cathode thyratron. Electrical trigger pulses are capacitively coupled through the vacuum envelope wall (16) causing a gas discharge adjacent to the rear of the hollow cathode (26). Coupling apertures (12) between the trigger discharge region and the hollow cathode allow ionization to propagate into the rear of the hollow cathode and trigger the pseudogap from a non conducting to conducting state.Type: GrantFiled: October 19, 1992Date of Patent: May 23, 1995Inventor: Gordon A. Murray
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Patent number: 5343115Abstract: A large area multi-channel flat fluorescent lamp with improved efficiency consists of two groups of closed hollow electrodes which are printed on the inner surfaces of the opposing ends of two flat glass substrates. The substrates are sealed together and have wave-guiding spacers which protect the lamp from implosion and also maintain a fixed spacing between the two substrates. A dielectric reflective layer is coated on the inner side of one of the substrates with an over-coat of phosphor, and the inner opposing surface of the other substrate is coated with only the phosphor. The space between the substrates is first evacuated and then filled with an inert gas and mercury vapor. The multi-channel closed hollow electrode structure with wave-guiding spacers, in combination with a reflective dielectric layer produces greater brightness with better brightness uniformity over a large area. In addition, the large area multi-channel flat fluorescent lamp maintains high efficiency and has a long life.Type: GrantFiled: May 15, 1992Date of Patent: August 30, 1994Assignee: Thomas Electronics IncorporatedInventors: Munisamy Anandan, Douglas Ketchum