Abstract: An apparatus may include an RF power assembly, arranged to output an RF signal, and a drift tube assembly, arranged to transmit an ion beam, and coupled to the RF power assembly. The drift tube assembly may include a first ground electrode; an AC drift tube assembly, disposed downstream of the first ground electrode; and a second ground electrode, disposed downstream of the AC drift tube assembly, where the AC drift tube assembly comprises at least one variable length AC drift tube.
Type:
Grant
Filed:
November 6, 2020
Date of Patent:
November 30, 2021
Assignee:
Applied Materials, Inc.
Inventors:
Charles T. Carlson, Paul J. Murphy, Frank Sinclair, William Davis Lee
Abstract: Embodiments include a vacuum device, comprising: an enclosure configured to enclose a vacuum, the enclosure including an external base including an opening; an internal base within the enclosure; and an adjustable support assembly adjustably coupling the internal base to the external base and extending through the opening, the adjustable support assembly comprising: a threaded shaft extending along a longitudinal axis and coupled to the internal base; a threaded hole component threadedly engaged with the threaded shaft and coupled to the external base such that the threaded hole component is axially constrained in a direction along the longitudinal axis relative to the external base independent of the threaded shaft; and a flexible component coupled to the external base and the threaded shaft and sealing the opening.
Abstract: This invention relates to a microwave tube (3) for generation of an electromagnetic wave with frequency F, the tube comprises mechanical means for varying the frequency F composed of a set of rings (A, B, C, D) defining a periodic structure inside the tube and mechanical means (4, 5, 2, G) for displacing rings with respect to each other while maintaining a periodicity for periodic structure during displacement of the rings.