Abstract: A spiral phase plate, according to one embodiment, for generating a Laguerre Gaussian beam by reflecting an incident beam emitted from a light source, may comprise: a first quadrant area in which the step height increase rate per unit angle decreases progressively in one direction from the point with the lowest step height to the point with the highest step height; and a second quadrant area in which the step height increase rate per unit angle increases progressively in the one direction.

Abstract: An electromagnetic accelerator system may include a barrel defining a bore through which an acceleration path extends. An electromagnetic coil may be positioned around the barrel such that the acceleration path extends through a core of the electromagnetic coil. A first electrical contact may be positioned along the acceleration path approximately within the core of the electromagnetic coil and electrically coupled to the electromagnetic coil. A second electrical contact may position along the acceleration path approximately within the core of the electromagnetic coil and spaced apart from the first electrical contact. The second electrical contact may be electrically coupleable to the first electrical contact to complete a circuit when a projectile to be accelerated is positioned therebetween.

Abstract: Methods and systems for electric propulsion are provided. An example method includes providing a magnetic shield using an accelerating channel made of a soft magnetic material; generating, by a magnetic system, a radial magnetic field in the accelerating channel to ionize a working substance, wherein the magnetic system includes a central magnetic pole, an outer annular pole, a magnetic circuit, and coils to carry an electrical current; and generating, using an outer hollow cathode and an anode-gas distributor disposed within the accelerating channel, an electrical discharge along the accelerating channel. The accelerating channel provides the magnetic shield to force the radial magnetic field to have a maximum gradient at a location of the central magnetic pole and at a location of the outer annular pole and to force ions of a working substance to pass isolators of magnetic poles, thereby decreasing erosion of the isolators.

Abstract: A filter is provided. The filter includes a mixed layer. The mixed layer includes aluminum, magnesium fluoride, and lithium fluoride. The mixed layer is composed of 1 part by volume of magnesium fluoride, 0.25 to 1 parts by volume of aluminum, and 0.003 to 0.02 parts by volume of lithium fluoride.

Abstract: A superconducting dipole magnet structure that includes coil boxes, a dewar and a support device is provided, wherein each of the coil boxes is of a one-piece structure in which a superconducting coil is provided, wherein the superconducting coils are opposite to each other so that a uniform dipole magnetic field is generated when the two superconducting coils are energized, and wherein the support device is fixed to the dewar and supports the coil box in the way of point contact.

Abstract: A device includes: a first magnet array; a first magnet support body; a second magnet array; a second magnet support body; a gap drive mechanism for performing vertical drive of the magnet support bodies to change a gap; first, second connection beams connected to the magnet support bodies; a mechanism for connecting the connection beams to the gap drive mechanism; a cancellation spring mechanism for cancelling a suction force that acts between magnet arrays; and a spring interlocking mechanism for connecting the cancellation spring mechanism to the magnet support bodies. In the spring interlocking mechanism, first and second spring support frames that are connected to the first and second connection beams via a connecting portion, and a guide mechanism for guiding vertical movements of the first and second spring support frames are mounted, and the cancellation spring mechanism are mounted to both the first and second spring support frames.

Abstract: A neutron beam source generator is provided, which includes an accelerator connecting to a beryllium target through a channel, a filter and a collimator. The beryllium target is disposed at an end of the channel and adjacent to the filter. The filter is disposed between the beryllium target and the collimator. The channel and the beryllium target have an angle ? therebetween, and the angle ? is between 0° and 90°. The channel and the direction normal to the surface of the filter have an angle ? therebetween, and the angle ? is between 0° and 90°. The cross-section of the channel is not circular.

Abstract: A vario-energy electron accelerator includes a resonant cavity consisting of a closed conductor, an electron source injecting a beam of electrons into the resonant cavity, an RF system coupled to the resonant cavity and generating an electric field in the resonant cavity, magnet units centred on a mid-plane and generating a field in a deflecting chamber in fluid communication with the resonant cavity, the magnetic field deflecting along a first deflecting trajectory of adding length an electron beam exiting the resonant cavity along a first radial trajectory to reintroduce it into the resonant cavity along a second radial trajectory, an outlet for extracting along an extraction path an accelerated electron beam from the resonant cavity towards a target, wherein at least one of the magnet units is adapted for modifying the first deflecting trajectory to a second deflecting trajectory, allowing a variation of the energy of the electron beam.

Abstract: Some embodiments include a system comprising: a particle power source configured to generate a particle power signal; a radio frequency (RF) power source configured to generate an RF power signal; a particle source configured to generate a particle beam in response to the particle power signal; a RF source configured to generate an RF signal in response to the RF power signal; and an accelerator structure configured to accelerate the particle beam in response to the RF signal; wherein a timing of the RF power signal is different from a timing of the particle power signal.

Abstract: Disclosed herein are superconducting gantry magnets that include multiple quadrupole winding sections placed in sequence on a curve such that the effective current direction is reversed between sections. This produces alternating quadrupole field regions along the length of the bend whose individual integral strengths can be tuned by the location of the current polarity transitions. A simple transition scheme to reverse the current between sections can be implemented to allow for the use of one continuous winding and power supply. Dipole windings can be included in the superconducting gantry magnets so that the magnets produce superposed dipole and alternating quadrupole fields. The disclosed design for the windings and transition scheme to reverse current polarity can be implemented for higher order multipoles as well.

Abstract: A Hall effect thruster arranged inside a wall and including a magnetic circuit and an electric circuit including an anode, a first cathode, and a voltage source. The magnetic circuit and the electric circuit are arranged in such a manner as to generate magnetic and electric fields around the wall. In every meridian section, the magnetic circuit presents an upstream magnetic pole and a downstream magnetic pole arranged at the surface of the wall and spaced apart from each other; and the anode and the first cathode are situated on either side of the upstream magnetic pole.

Abstract: A hybrid nuclear reactor for producing a medical isotope includes an ion source for producing an ion beam from a gas, a target chamber including a target that interacts with the ion beam to produce neutrons, and an activation cell positioned proximate the target chamber and including a parent material that interacts with the neutrons to produce the medical isotope via a fission reaction.

Abstract: A variable rotating capacitor or RotCo 5 that can be connected via a transmission line 3 to the dee 2 of a synchrocyclotron 1 so as to adjust a resonant frequency of the synchrocyclotron as a function of time and which comprises a cylindrical rotor 10 and a cylindrical stator 20 that are coaxial with the Z axis. The rotor comprises a plurality of circumferentially-distributed rotor electrodes 11 extending parallel to its rotation axis Z. The stator comprises a plurality of circumferentially-distributed stator electrodes 21 extending parallel to the rotation axis Z. Each stator electrode 21 consists of a single metal plate and all said plates are distributed over one and the same stator circumference 25. This makes it possible for the RF currents in the electrodes to be better distributed and thus reduces the local overheating. The present invention also relates to a synchrocyclotron comprising such a RotCo.

Abstract: A method and apparatus for implementing dynamic compensation of magnetic forces for undulators are provided. An undulator includes a respective set of magnet arrays, each attached to a strongback, and placed on horizontal slides and positioned parallel relative to each other with a predetermined gap. Magnetic forces are compensated by a set of compensation springs placed along the strongback. The compensation springs are conical springs having exponential-force characteristics that substantially match undulator magnetic forces independently of the predetermined gap. The conical springs are positioned along the length of the magnets.

Abstract: A method of bunch length compression method for a free electron laser (FEL) that avoids parasitic compressions by 1) applying acceleration on the falling portion of the RF waveform, 2) compressing using a positive momentum compaction (R56>0), and 3) compensating for aberration by using nonlinear magnets in the compressor beam line.

Abstract: A cyclotron that accelerates an ion using a magnetic field includes a hollow yoke and an ion source that is provided in the yoke and generates an ion. The ion source includes a conductive cylindrical body and a filament disposed in the cylindrical body. A current is supplied from a power supply to the filament, and a direction of the current supplied to the filament is changed.

Abstract: A low-voltage, multi-beam radio frequency source that operates at a voltage less than or equal to approximately 20-40 kV and that generates at least 600 kW at a pulse width of approximately 5-30 ms. The RF source includes an electron gun having a cathode configured to generate a plurality of beamlets. An input cavity and output cavity are common to the plurality of beamlets. A plurality of gain cavities are provided between the input and output cavities, each having a plurality of openings corresponding to the plurality of beamlets. The cathode may include 10-20 beamlet cathodes formed in a ring, each being configured to generate a single beamlet and each having beamlet optics independent of each other. A beam collector having a plurality of openings corresponding to each of the beamlets may be provided within the output section, where the openings have no RF coupling to each other.

Abstract: A circular accelerator of the present invention includes an electrode that applies a high frequency electric field for accelerating a charged particle beam, an electromagnetic device that bends the charged particle beam, and a direct current (or DC) power supply device that applies a direct current (or DC) electric field to the previous described electrode.

Abstract: A synchrocyclotron includes magnetic structures to provide a magnetic field to a cavity, a particle source to provide a plasma column to the cavity, where the particle source has a housing to hold the plasma column, and where the housing is interrupted at an acceleration region to expose the plasma column, and a voltage source to provide a radio frequency (RF) voltage to the cavity to accelerate particles from the plasma column at the acceleration region.

Abstract: A charged particle beam transport system is characterized in that in a fixed transport unit, a phase of a phase space distribution of a charged particle beam at an inlet of a rotating deflection unit that rotates around an gantry rotation axle of a rotating gantry coincides with a phase determined by a calculation based on an average value of a first phase advance and a second phase advance. The first phase advance is defined as a change in a phase, of the phase space distribution, that changes when the charged particle beam travels from the inlet of the rotating deflection unit to an isocenter in the case where a gantry angle is a gantry reference angle; the second phase advance is defined as a change in a phase at a time when the gantry angle is pivoted by 90° from the gantry reference angle.

Abstract: An accelerator includes an inflector through which a beam entering from an ion source passes and which introduces the beam to an acceleration orbit. The inflector includes a beam convergence unit that converges the beam passing through the inflector. A cyclotron, which accelerates a beam in a convoluted acceleration orbit, includes magnetic poles, D-electrodes, and an inflector. The magnetic poles generate a magnetic field in a direction perpendicular to the acceleration orbit. The D-electrodes generate a potential difference, which accelerates the beam, in the acceleration orbit. A beam, which enters in an incident direction perpendicular to the acceleration orbit, passes through the inflector, and the inflector bends the beam so as to introduce the beam to the acceleration orbit. The inflector includes a beam convergence unit that converges the beam passing through the inflector.

Abstract: The present disclosure relates to a cyclotron. Embodiments of the present disclosure may include an upper and lower magnet pole, an upper and lower superconducting coil arranged around each of the magnetic poles, a ring-shaped magnetic return yoke, a beam chamber between the upper and lower magnetic poles having one or more electrodes configured to accelerate ions moving substantially in the median plane, and a cryostat. The ring-shaped magnetic return yoke and the coils may form a cold mass contained within the cryostat. Further, the cryostat may not contain the upper and lower poles.

Abstract: The invention comprises a flattened magnet coil system that reduces space between a first magnet turning section and a second magnet turning section in a synchrotron accelerator, which reduces or eliminates need for one or more quadrupole focusing elements in the accelerator. Optionally, a coil, in the flattened magnetic coil system, is wrapped about a central metal member between yoke members of a magnet. The coil has a first width and a first thickness along the length of the magnet and a second width and a second thickness along the end of the magnet where the first width is larger than the second width and the second thickness is larger than the first thickness allowing a smaller distance between the first magnet turning section and the second magnet turning section while maintaining current flow in the coil.

Abstract: The invention relates to a method and apparatus for control of a charged particle cancer therapy system. A treatment delivery control system is used to directly control multiple subsystems of the cancer therapy system without direct communication between selected subsystems, which enhances safety, simplifies quality assurance and quality control, and facilitates programming. For example, the treatment delivery control system directly controls one or more of: an imaging system, a positioning system, an injection system, a radio-frequency quadrupole system, a ring accelerator or synchrotron, an extraction system, a beam line, an irradiation nozzle, a gantry, a display system, a targeting system, and a verification system. Generally, the control system integrates subsystems and/or integrates output of one or more of the above described cancer therapy system elements with inputs of one or more of the above described cancer therapy system elements.

Abstract: A lighting apparatus may include a plurality of light emitting devices, a temperature sensor, and a compensation circuit. The plurality of light emitting devices may include a first light emitting device configured to emit light having a first chromaticity, a second light emitting device configured to emit light having a second chromaticity different than the first chromaticity, and a third light emitting device configured to emit light having the second chromaticity. Moreover, the first, second, and third light emitting devices may be electrically coupled in series. The temperature sensor may be configured to generate a temperature sense signal responsive to heat generated by at least one of the plurality of light emitting devices.

Abstract: A septum magnet includes a yoke that can be separated at the approximately center portion thereof in the axis direction; a septum coil; a return coil; and a vacuum duct that is inserted between the septum coil and the return coil. The septum coil is formed in such a way as to be able to be separated into a first portion and a second portion in response to separation of the yoke; and in a space between the septum coil and the vacuum duct, there is provided an auxiliary coil, in two portions of which, corresponding to the first portion and the second portion of the septum coil, electric currents flow in opposite direction to each other in a circumferential direction.

Abstract: A laser accelerator driven electronic brachytherapy system, device, and method for particle based treatment of a tumor or other human diseases and conditions.

Abstract: A welding method of welding a cylindrical stiffening member to an outer circumference of a superconducting accelerator tube body uses a laser beam in a process of manufacturing a superconducting accelerator tube. The laser beam is configured such that a distribution profile of energy density on an irradiated face to which the laser beam is irradiated is a Gaussian distribution profile having a peak section, and the energy density of the peak section is 5.8×105 W/cm2 or more.

Abstract: A crossed field device, such as a magnetron or crossed field amplifier, that includes a cathode, an anode, one or more magnetic elements, and one or more extraction elements. In one embodiment, the crossed field device includes an annular cathode and anode that are axially spaced from one another such that the device produces an axial electric (E) field and a radial magnetic (B) field. In another embodiment, the crossed field device includes an oval-shaped cathode and anode that are radially spaced from one another such that the device produces a radial electric (E) field and an axial magnetic (B) field. The crossed field device may produce electromagnetic (EM) emissions having a frequency ranging from megahertz (MHz) to terahertz (THz), and may be used in one of a number of different applications.

Abstract: Provided herein are systems and methods for operating a traveling wave linear accelerator to generate stable electron beams at two or more different intensities by varying the number of electrons injected into the accelerator structure during each pulse by varying the electron beam current applied to an electron gun. The electron beams may be used to generate x-rays having selected doses and energies, which may be used for cargo scanning or radiotherapy applications.

Abstract: An apparatus to monitor a condition of a solid state charge device (SSCD) useful in electrostatic printing includes a power supply and a frequency detector. The power supply provides current to the SSCD, and includes a resonant controller. The frequency detector senses a frequency associated with the current, and since the frequency is representative of the condition of the SSCD, the frequency detector thereby monitors the condition of the SSCD. A method of monitoring the condition of the SSCD includes providing current to the SSCD using a power supply, and sensing a frequency associated with the current. The power supply includes a resonant controller, and the frequency is representative of the condition of the SSCD, and thus the method thereby monitors the condition of the SSCD. A corresponding computer-readable medium is also disclosed.

Abstract: A method is described wherein a beam of charged particles is confined to an orbit within a compact region of space as it is accelerated across a wide range of energies. This confinement is achieved using a non-scaling magnetic field based on the Fixed Alternating Gradient principle where the field strength includes non-linear components. Examples of magnet configurations designed using this method are disclosed.

Abstract: A drift-tube linear accelerator that passes an injected particle beam through inside a plurality of cylindrical drift-tube electrodes arranged in a cylindrical cavity in a particle beam traveling direction and accelerates the particle beam by a radio-frequency electric field generated between the plurality of cylindrical drift-tube electrodes, wherein at least part of a focusing device for focusing the particle beam is disposed inside an end drift-tube electrode that is arranged nearest the injection side of the cylindrical cavity among the plurality of cylindrical drift-tube electrodes, with the focusing device being positionally adjustable independently of the end drift-tube electrode.

Abstract: The present invention relates to a dual-frequency resonant cavity (6) for cyclotron which includes a dee (10), a pillar (20), and a conducting enclosure (40) surrounding the pillar and the dee, an end of the pillar being connected to the base of the conducting enclosure and an opposite end of the pillar (20) supporting the dee (10). The conducting enclosure and the pillar form a transmission line comprising at least three portions (20a, 20b, 20c), each portion having a characteristic impedance (Zc1, Zc2, Zc3). The characteristic impedance Zc2 of the intermediate portion (20b) is substantially lower than the characteristic impedances Zc1 et Zc3 of the two other portions (20a, 20b), which makes it possible to have the cavity resonate according to two modes in order to produce two distinct frequencies, without having to make use of moving components such as for example sliding short-circuits or mobile plates.

Abstract: A method for generating stabilized particle acceleration by a radio-frequency (RF) accelerator is described, comprising operating the accelerator in a warm-up mode during a warm-up time period, without injecting charged particles or without accelerating injected charged particles, and operating the accelerator in a beam-on mode during a beam-on time period after the warm-up time period, to accelerate charged particles injected by the charged particle source. Automatic frequency control to match an expected frequency of the accelerator during the beam-on time period, prior to the start of the beam-on time period, for stability, is also described.

Abstract: Provided is an apparatus for generating a proton beam, which includes a laser system providing a laser pulse, a target generating a proton beam by using the laser pulse, and a phase conversion plate disposed between the laser system as a light source and the target to convert the laser pulse into a circularly polarized laser pulse having a spiral shape.

Abstract: An example particle accelerator includes a magnet to generate a magnetic field, where the magnet includes first superconducting coils to pass current in a first direction to thereby generate the first magnetic field, and where the first magnetic field is at least 4 Tesla (T). The example particle accelerator also includes an active return system including second superconducting coils. Each of the second superconducting coils surrounds, and is concentric with, a corresponding first superconducting coil. The second superconducting coils are for passing current in a second direction that is opposite to the first direction to thereby generate a second magnetic field having a magnetic field of at least 2.5 T. The second magnetic field has a polarity that is opposite to a polarity of the first magnetic field.

Abstract: Biomass (e.g., plant biomass, animal biomass, and municipal waste biomass) is processed to produce useful products, such as fuels. For example, systems can use feedstock materials, such as cellulosic and/or lignocellulosic materials and/or starchy materials, to produce ethanol and/or butanol, e.g., by fermentation.

Abstract: An accelerator for accelerating two beams of charged particles and for producing a collision of the beams includes: an apparatus for producing an electrostatic potential field such that the two beams are acceleratable or deceleratable by the electrostatic field, a reaction zone for collision of the charged particles; first and second acceleration distances for the first and second beams, each acceleration distance directed towards the reaction zone, wherein the reaction zone is arranged geometrically with respect to the potential field and to the acceleration distances such that the particles of the beams are acceleratable towards the reaction zone along the first and second acceleration distances and, after interaction in the reaction zone and passage through the reaction zone, are deceleratable in the potential field, such that energy used by the potential field apparatus for accelerating the beams towards the reaction zone can be at least partially recovered by the deceleration.

Abstract: A DC high voltage source may include a capacitor stack having a first electrode that can be brought to a first potential, a second electrode arranged concentrically with the first electrode and which can be brought to a second potential different from the first potential, at least one intermediate electrode arranged concentrically between the first and second electrodes and which can be brought to an intermediate potential between the first and second potentials, a switching device for charging the capacitor stack, to which switching device the electrodes of the capacitor stack are connected and which is configured such that upon operation of the switching device the electrodes of the capacitor stack arranged concentrically with respect to each other can be brought to increasing potential levels, wherein the switching device comprises electron tubes, e.g., controllable electron tubes. A particle accelerator comprising such a DC high voltage source is also provided.

Abstract: Biomass (e.g., plant biomass, animal biomass, and municipal waste biomass) is processed to produce useful products, such as fuels. For example, systems can use feedstock materials, such as cellulosic and/or lignocellulosic materials and/or starchy materials, to produce ethanol and/or butanol, e.g., by fermentation.

Abstract: A method of operating an acceleration system comprises injecting charged particles into an RF accelerator, providing RF power to the accelerator, and accelerating the injected charged particles. The accelerated charged particles may impact a target to generate radiation. The RF power is based, at least in part, on past performance of the system, to compensate, at least partially, for dose and/or energy instability. A controller may provide a compensated control voltage (“CCV”) to an electric power source based on the past performance, to provide compensated electric power to the RF source. A decreasing CCV, such as an exponentially decreasing CCV, may be provided to the electric power source during beam on time periods. The CCV to be provided may be increased, such as exponentially increased toward a maximum value, during beam off time periods. The controller may be configured by a compensation circuit and/or software. Systems are also described.

Abstract: An accelerator for charged particle may include: a capacitor stack which includes a first electrode that can be brought to a first potential, a second electrode that is concentric to the first electrode and can be brought to a second potential differing from the first potential, and at least one intermediate electrode that is concentrically arranged between the first electrode and the second electrode and can be brought to an intermediate potential lying between the first potential and the second potential; a switching device to which the electrodes of the capacitor stack are connected and which is designed such that the concentric electrodes of the capacitor stack can be brought to increasing potential stages during operation of the switching device; a first and a second acceleration channel formed by first and second openings in the electrodes of the capacitor stack such that charged particles can be accelerated along the first and second acceleration channel by means of the electrodes; and a device which c

Abstract: A microwave device for accelerating electrons includes an electron gun providing an electron beam along an axis in a microwave structure for accelerating the electrons of the beam, an input for the electron beam, an output for accelerated electrons, and a series of coupled cavities along said axis, of central resonant frequency, an input for a microwave signal for excitation of the microwave structure by one of the cavities, a radiofrequency generator providing the excitation microwave signal to the acceleration microwave structure, and a central unit controlling the variation of energy of the electrons at the output of the microwave structure. The radiofrequency generator comprises a frequency control input for changing the frequency of the excitation microwave signal around the central resonant frequency, the change producing a variation of the energy of the accelerated electrons of the beam at the output of the microwave structure.

Abstract: An accelerator assembly includes a first chip and a second chip. An acceleration channel is formed into a surface of a first side of the first chip. The first side of the first chip is covalently bonded to a first side of the second chip such that the channel is a tubular void between the first and second chips. The channel has a tubular inside sidewall surface, substantially no portion of which is a metal surface. The channel has length-to-width ratio greater than five, and a channel width less than one micron. There are many substantially identical channels that extend in parallel between the first and second chips. In one specific example, the assembly is part of a Direct Write On Wafer (DWOW) printing system. The DWOW printing system is useful in semiconductor processing in that it can direct write an image onto a 300 mm diameter wafer in one minute.

Abstract: An RF generator has a hollow conductor having a conductive wall. The wall has a first slot, over which a first solid-state switch is arranged in order to apply a radiofrequency electrical voltage through the first slot.

Abstract: An on-axis rf power coupler for a superconducting particle accelerator includes a coaxial coupler tube that passes through a rf waveguide stub connected to a rf power source. The coupler tube is movable in translation along the axis of the beam path by a piezoelectric drive to permit variation of the coupling between the rf power source and the resonant signal in the accelerator. A tubular rf window extending through the waveguide stub, together with a vacuum bellows assembly connected to the coupler tube, isolate the vacuum inside the accelerator cavity from the vacuum in the rf waveguide and stub. A choke joint in the wall of the waveguide selectively passes unwanted HOM signals out of the waveguide stub and away from the accelerator cavity, where they are dissipated by ferrite tiles on the coupler tube. The upstream end of the coupler tube and a tubular extension of the accelerator cavity form a coaxial line for introducing rf power into the accelerator.

Abstract: A particle accelerator including an electrical field system and a magnetic field system that are configured to direct charged particles along a desired path within an acceleration chamber. The particle accelerator also includes a mechanical device that is located within the acceleration chamber. The mechanical device is configured to be selectively moved to different positions within the acceleration chamber. The particle accelerator also includes an electromechanical (EM) motor having a connector component and piezoelectric elements that are operatively coupled to the connector component. The connector component is operatively attached to the mechanical device. The EM motor drives the connector component when the piezoelectric elements are activated thereby moving the mechanical device.

Abstract: An actuator assembly for use within the vacuum field of a cyclotron, one embodiment of which comprises an interactor which is moveable between a first position and a second position, at least one support structure for supporting the interactor in the first and second positions, a shape memory alloy (SMA) element connected to the interactor and/or support structure and being adapted to exert a force on the interactor and/or support structure so as to urge the interactor from the first position to the second position, an electromagnetic activator operatively associated with the SMA element for causing the element to exert the force when the electromagnetic activator is selectably activated, and a return mechanism operatively connected to the interactor, the support structure and/or the SMA element so as to urge the interactor from the second position to the first position when the electromagnetic activator is deactivated.

Abstract: A particle accelerator that is a synchrocyclotron accelerating charged particles and which includes an acceleration electrode that accelerates the charged particles; a high frequency power source that supplies the electric power to the acceleration electrode; a control unit that adjusts the frequency of the electric power supplied from the high frequency power source based on energy of the charged particle which is accelerated; and a matching circuit that has a coil and a capacitor, and performing impedance matching between the acceleration electrode and the high frequency power source, wherein the matching circuit has an inductance adjustment unit electrically adjusting the inductance of the coil.