Abstract: A light deflection device includes a substrate including a planar portion and a recess; a spacer member disposed at a bottom of the recess; a supporting section disposed on the spacer member; a movable part rotatably supported by the supporting section and having a reflecting surface configured to reflect light at a height equal to or higher than a height of the planar portion; and a light transmissive member disposed on the planar portion and covering the movable part.

Abstract: The present disclosure provides a linear vibration motor, including a casing with an accommodation space, a vibration unit accommodated in the accommodation space, a vibration unit suspended in the accommodation space and a coil fixed on the casing and driving the vibration unit to vibrate. The casing includes a copper ring arranged around the vibration unit. In the linear vibration motor provided by the utility model, the copper ring is arranged around the vibration unit to provide a damping function for the linear vibration motor. Compared with the foam damping member in the related art, the linear vibration motor provided by the present disclosure may be arranged by an automatic device during the production and manufacture of the linear vibration motor, thereby greatly improving the production efficiency, and improving the automation degree.

Abstract: A vibration actuator includes: a movable body including a core around which a coil is wound in a state in which a tip part of the core is exposed; a fixed body including one or more magnets disposed away from and facing the tip part of the core; and a shaft part rotatably supporting the movable body on a side of a base end part of the core, and generates vibration by oscillation of the tip part of the core around the shaft part with respect to the one or more magnets by cooperation among the coil, the core and the one or more magnets.

Abstract: A self-contained actuating magnetic pump (SCAMP) having an inlet valve and discharge valve, a piston, a compression cavity, an electromagnetic coil, a frame, and an armature to drive the piston. In one embodiment, the electromatic coils are isolated from the working fluid. In one embodiment, the SCAMP includes a housing that allows for thermal transfer from the electromagnetic coil to the working fluid. In one embodiment, the SCAMP includes a control unit that enables operation of the SCAMP in a power mode, a coast mode, and a retraction mode.

Abstract: An ejector for a printing system is disclosed. The ejector body may include an internal cavity, a nozzle in communication with the internal cavity, one or more segmented solenoid coils wrapped at least partially around the ejector body, and a piston disposed within the internal cavity of the ejector body. A method of ejecting liquid from an ejector is also disclosed, including introducing a material for ejection into an ejector cavity. The method of ejecting liquid from an ejector may include advancing a piston configured for translational motion within an ejector towards an ejector nozzle which may further include de-energizing a first segment of a segmented solenoid wrapped partially around the ejector, energizing a second solenoid segment of a segmented solenoid wrapped partially around the ejector. The method of ejecting liquid from an ejector may also include ejecting a drop of the material for ejection from the ejector nozzle.

Abstract: The present invention provides a vibration motor having a housing with an accommodation space; a vibrator; a stator; and an elastic support assembly suspending the vibrator in the accommodation space. The elastic support assembly includes one elastic support between the vibrator and the housing. The elastic support includes a first fixed part, a second fixed part, a first elastic support arm connecting the first fixed part and the second fixed part, and spaced from the vibrator, and a first flange formed by bending and extending from the first elastic support arm. The first flange keeps a distance from the vibrator or the housing. Such a vibration motor has enhanced stiffness.

Abstract: Method for controlling a linear pump (9) of a vapour recovery system in a fuel dispensing unit (1). The linear pump (9) is flow controlled by a signal. The method comprises applying (SI) a known voltage to a solenoid coil (10) of the linear pump (9) for a predetermined time period, measuring (S2) a current consumption of the solenoid coil (10) during the predetermined time period, and adjusting (S3) the signal based on the measured current consumption. The invention also relates to a vapour recovery system for recovering vapour from a motor vehicle tank via a fuel dispensing nozzle (7) to a vapour tank.

Abstract: The invention relates to a method for controlling a linear pump of a vapour recovery system in a fuel dispensing unit. The linear pump is flow controlled by a signal. The method comprises applying a known voltage to a solenoid coil of the linear pump for a predetermined time period, measuring a current consumption of the solenoid coil during the predetermined time period, and adjusting the signal based on the measured current consumption. The invention also relates to a vapour recovery system for recovering vapour from a motor vehicle tank via a fuel dispensing nozzle to a vapour tank.

Abstract: The present disclosure discloses a feeding apparatus, which includes a motor, a driving unit, and a noise reduction module. The noise reduction module includes an audio receiving unit and a control unit. The audio receiving unit receives the sound generated by the feeding apparatus when the motor is running. The control unit is electronically connected to the driving unit and the audio receiving unit. The control unit sequentially supplies a plurality of motor drive data to the driving unit to drive the motor to run. The control unit sequentially receives a plurality of sound signals corresponding to those motor drive data from the audio receiving unit. The control unit analyzes the sound signals and selects one of the sound signals as an optimized sound signal. The control unit stores the motor drive data corresponding to the optimized sound signal as a setting motor drive data.

Abstract: Techniques facilitating mechanical vibration management for cryogenic environments are provided. In one example, a system can comprise a processor that executes computer executable components stored in memory. The computer executable components can comprise a linearization component and a drive component. The linearization component can translate data indicative of a nonlinear drive signal into a linear drive signal. The drive component can dynamically control operation of a compressor of a cryocooler using the linear drive signal. The cryocooler can provide cooling capacity for a cryogenic environment.

Abstract: A driving mechanism is provided, including a fixed part, a movable part for holding an optical element, a driving assembly, and a positioning structure. The movable part is connected to the fixed part. The driving assembly is configured to drive the movable part to move relative to the fixed part. The positioning structure is formed on the movable part or the fixed part for positioning the optical element or at least one part of the driving assembly.

Abstract: A vibration generator includes a housing; a vibrator; an elastic member that connects the housing and the vibrator; and a driver that causes the vibrator to vibrate. The elastic member includes a housing connection portion that is connected to the housing, a vibrator support portion that supports the vibrator, and a spring portion that connects the housing connection portion and the vibrator support portion. The housing connection portion and the vibrator support portion are in the same plane. The spring portion is formed so as to be approximately perpendicular to the housing connection portion and the vibrator support portion.

Abstract: Certain aspects of the present disclosure generally relate to methods and apparatus for driving haptic actuators. An example actuator driver circuit generally includes a driver and calibration circuitry. The driver has at least one output for coupling to at least one input of an actuator. The calibration circuitry is configured to: detect a phase of a voltage signal at the at least one output of the driver, detect a phase of a current signal at the at least one output of the driver, determine a phase difference between the phase of the voltage signal and the phase of the current signal, and adjust a frequency of an oscillating signal for the driver, based at least in part on the phase difference.

Abstract: Embodiments of the present disclosure include a motor controller with a processor and a machine readable medium. The medium includes instructions that, when loaded and executed by the processor, cause the processor to receive an estimated or sensed speed of a motor, extract a mechanical frequency component from the estimated or sensed speed, transform the mechanical frequency into direct quadrature (DQ) domain at the mechanical frequency, control the mechanical frequency to zero, and generate a dampening signal for torque based upon the controlled mechanical frequency.

Abstract: Improvements in a battery optimization and restoration device that uses a means of varying the regulator voltage as a function of time and discharge event timing and depth in order to establish a consistent power level for the charging of the capacitor. The device models the power supply regulation voltage as a first order factor as a function of time. The regulation voltage is modeled as a function of time so as to maintain an acceptable charging current at all times by charging a large capacitive load which is periodically discharged in a rapid pulse-like manner requires a modeled regulation voltage that is synchronized to the discharge frequency of the capacitor. The modeled charging is a function of the discharge depth and the charging height in initial capacitor voltage before the discharge and the final capacitor voltage after the discharge.

Abstract: A linear vibration motor includes a housing with a receiving space, a vibrator received in the receiving space, a coil for driving the vibrator to vibrate, a guide member for guiding movement of the vibrator, and a recover assembly fixed to a side of the vibrator. The vibrator includes a magnetic circuit system with first and second magnets. The recover assembly is closed to the first magnet. A magnetic polarity of an end of the magnetic recovery assembly facing the vibrator is reverse to that of an end of the first magnet away from the second magnet. When the vibrator is in an equilibrium position, a centroid of the vibrator is located between the magnetic recovery assembly and the coil. Magnetic force between the magnetic recovery assembly and the magnetic circuit system provides recovery force for the vibrator, thereby realizing large-stroke vibration.

Abstract: Disclosed is a system and method that provide an amplitude value and a phase delay value which relate to a sinusoidal signal to be measured. For this purpose, phase values of a reference signal, at which the signal to be measured exceeds or falls below the reference signal, are collected and transmitted to a computation unit. The computation unit determines the amplitude and delay values from the collected phase values. The system can be implemented in a cost-effective manner, in particular using an ASIC circuit or an FPGA circuit.

Abstract: A method for cleaning a screed of a paving machine includes activating a vibration generator to induce a vibration into the screed such that the screed is excited at a resonant frequency of the screed to cause dislodgement of a residual build-up of a material from the screed.

Abstract: A vibration actuator, includes: a movable body including a magnet; a fixing body including a coil; and an elastic support portion supporting the movable body, in which: the fixing body includes: a first fixing body disposed on one side of a vibration direction so as to cover the movable body, and a second fixing body that is bonded to the first fixing body and being configured to accommodate the movable body in such a way that the movable body is capable of vibrating, in which: the elastic support portion is a plate-shaped elastic body that includes one end portion fixed to the movable body and is provided to protrude from an outer periphery of the movable body in a radial direction, and another end portion of the elastic support portion is fixed while being sandwiched between the first fixing body and the second fixing body.

Abstract: A SCR doser includes an electrical adapter extending from an inner end electrically connected to the pins of a solenoid to an outer end having electrical terminals. The outer end outwardly protrudes from an aperture provided in a base wall of the housing of the SCR doser.

Abstract: A fuel delivery system includes a fuel pump assembly, an extension tube, and an injection nozzle assembly. The fuel pump assembly includes a pumping chamber, an inlet valve configured to direct fuel to the pumping chamber, a piston configured to pressurize fuel in the pumping chamber, an electromagnetic actuator operatively coupled to the piston, and an outlet check valve configured to direct pressurized fuel out of the pumping chamber. The electromagnetic actuator is configured to produce a force sufficient to move the piston to pressurize fuel in the pumping chamber and direct pressurized fuel through the outlet check valve. The extension tube is located downstream of the outlet check valve, and the injection nozzle assembly is located downstream of the extension tube. The injection nozzle assembly includes a nozzle check valve configured to selectively permit pressurized fuel received from the outlet check valve through the extension tube to exit the fuel delivery system.

Abstract: A hand-guided ground compaction machine, in particular a vibratory tamper or vibration plate compactor, having a superstructure, a drive device arranged on the superstructure and having at least one drive shaft, a substructure having a compaction plate driven by the drive device, and a sensor device comprising an accelerometer for determining the ground stiffness of a ground to be compacted, wherein the sensor device is supplied with electrical power, in particular solely, by a generator driven by the at least one drive shaft.

Abstract: Vehicles and methods for controlling operation of a vehicle and/or reducing aerodynamic drag of a vehicle are provided. A method for controlling operation of an unoccupied vehicle includes determining that the vehicle is unoccupied. The method further includes identifying an energy savings resulting from a reduction of aerodynamic drag of the vehicle due to a controlled vibration of a component of the vehicle. Also, the method includes applying the controlled vibration to the component of the vehicle.

Abstract: The SmartVent and Atmospheric Controller Apparatuses, Methods and Systems (“SmartVent”) transforms user desired environmental setting and SmartVent measurement inputs via SmartVent components into SmartVent adjustment messages and environmental change outputs. In one embodiment, a SmartVent system may include a self-regulating HVAC system, comprising a plurality of smart HVAC vents disposed in wireless communication with a remote computing device. Where the remote computing device includes a memory and a processor disposed in communication with the memory, configured to record calibration data from each of said plurality of smart HVAC vents. The calibration data may include temperature and flow rate data from each of said plurality of smart HVAC vents.

Abstract: The invention relates to a dosing device comprises a fluid-side module (12,12?) and a dry module (13), the fluid-side module (12,12?) comprises a chamber (14) and a magnetic piston (16) which is drivingly moved into the chamber (14) by a magnetic drive, the piston is penetrated by a channel provided with a seal (20,56). The magnetic drive for the magnetic piston (16) is arranged in the dry module (13).

Abstract: The invention relates to a method for operating an asynchronous machine comprising the steps: determining an operating point trajectory for the asynchronous machine for a plurality of desired torques of the asynchronous machine by calculating 2-tuples from longitudinal current values and cross current values in a synchronously rotating coordinate system of the asynchronous machine; calculating a slip frequency of the asynchronous machine for each of the 2-tuples calculated from longitudinal current values and cross current values; determining a current rotor speed of the asynchronous machine; calculating an excitation frequency of the asynchronous machine by summation of the calculated slip frequency and the current rotor speed weighted with the number of pole pairs of the asynchronous machine; and comparing the calculated excitation frequency of the asynchronous machine with at least one predetermined resonance frequency value of the asynchronous machine.

Abstract: A movable support configured to support an object, the support including: a support plane to support the object, an actuator assembly to move the movable support in a first direction and in a second direction perpendicular to the first direction, wherein the first direction and the second direction extend in a plane parallel to the support plane, wherein the actuator assembly includes: a first actuator configured to exert a first actuation force in a first actuation direction, the first actuation direction being parallel to the support plane, a second actuator configured to exert a second actuation force in a second actuation direction, the second actuation direction being parallel to the support plane, wherein the first actuation direction and the second actuation direction are arranged non-parallel and non-perpendicular with respect to each other.

Abstract: A method for balancing rotating machinery, such as gas turbine engines, to minimize vibrations. The method involves operation of the engine for a period of time at varying power levels and ranges of other operational parameters representative of the system operating envelope to obtain vibration data (amplitude and phase) for the full range of dynamic responses of interest. This usually includes time at elevated power settings until the engine reaches thermal stability, altitude variation, etc. as well as the full engine operating range. The full set of vibration data measured during the engine run is analyzed to generate unique unbalance states. The unique unbalance states are then analyzed and the mean unbalance state is identified. Balancing masses can then be installed or removed in accordance with a balance solution that is equal and opposite to the mean unbalance state.

Abstract: A motor control unit includes an H-bridge circuit, a current detection part and a control part. The current detection part includes current detection resistors provided at both sides of a DC motor. The control part feedback-controls high-side arm switches and low-side arm switches of the H-bridge circuit so that a detection value of the current detection part follows a target value. In the feedback control, normal control and current circulation control are performed alternately. In the current circulation control, either the high-side arm switches or the low-side arm switches are turned on for both of normal rotation time and reverse rotation time. The control part performs the feedback control based on a detection value of the current detection resistor, which has the same potential reference between the normal control and the current circulation control under the same rotation direction.

Abstract: A device for detecting the motion of a rotatable compactor roller about a compactor roller axis of rotation includes at least one motion sensor and an energy supply for the at least one motion sensor. The energy supply includes a generator having a stator and a rotor rotatable about a rotor axis of rotation with respect to the stator.

Abstract: A percussion unit for a rotary hammer and/or percussion hammer includes a control unit that is configured for open-loop and/or closed loop control of a pneumatic percussion mechanism. In at least one operating state in which the control unit changes from an idle mode to a percussion mode, the control unit is configured to adjust at least one operating parameter temporarily to a starting value.

Abstract: A shaker test system with a class D power amplifier having an analog to digital converter to receive an analog input signal and convert the analog input signal to a digital signal, pulse width modulation logic coupled to the analog to digital converter to provide a delay time to a delay line to control a transition time of a pulse width modulated signal responsive to an output of the analog to digital converter, and a class D power output stage coupled to the delay line and responsive to the pulse width modulated signal to provide an output of the class D power amplifier stage. The class D amplifier allows use of a low cost microcontroller to obtain very small pulse width increments using a low cost microcontroller to provide a low cost shaker test system incorporating the class D power amplifier.

Abstract: A controlling device for a vibration type actuator includes an AC voltage generating unit in which at least one of parameters, namely a frequency, an amplitude, and a phase of an AC voltage for use in applying an excitation force to a vibrating member, is settable; a measuring unit which measures some physical quantities caused by a vibration of the vibrating member; a variation imparting unit which imparts a predetermined variation to at least one of the parameters of the AC voltage; a frequency-response characteristic measuring unit which finds a frequency-response characteristic of at least one predetermined frequency between a first signal according to the variation and a second signal according to the measured physical quantity; and a frequency controlling unit which controls the frequency of the AC voltage according to the frequency-response characteristic.

Abstract: A drive signal generating unit generates a drive signal used to alternately deliver a positive current and a negative current to a coil. The drive signal is such that nonconducting periods are set before and after a positive current conducting period and the nonconducting periods are set before and after a negative current conducting period. A driver unit generates the drive current in response to the drive signal generated by the drive signal generating unit and then supplies the drive current to the coil. The drive signal generating unit sets the width of a nonconducting period such that, after the drive start of the linear vibration motor, the width of a nonconducting period to be set before at least the first conducting period of the drive signal is shorter than the width of a nonconducting period to be set before each conducting period during steady operation of the linear vibration motor.

Abstract: An electric motor drive apparatus includes multiple inverter sections arranged corresponding to winding sets of a motor, multiple relays that controls power supplies to the inverter sections, and a control unit. Each inverter section and corresponding winding set are referred to as a system. The control unit includes an obtaining section that obtains a winding current, a determination section that determines a fault occurrence, a specifying section that specifies a faulty system in which the fault occurs, an interrupting section that controls the relay corresponding to the faulty system to interrupt the power supply to the faulty system, and a vibrating section that controls the inverter section of a properly-operating system to add a vibration to an output torque from the electric motor. The vibrating section gradually increases a vibration component of the vibration added to the output torque from the electric motor.

Abstract: A magnetic actuator system which includes a case (10) and a spindle (22) which extends through the case comprising a magnetizable material such as iron. The actuator further includes a pair of permanent magnet assemblies (14, 16) positioned fixedly within the casing with a longitudinal space there between, wherein the permanent magnet assemblies comprise an alternating plurality of north pole/south magnet sections (18) which extend longitudinally or circumferentially of the actuator. The actuator further includes a coil winding (24) which surrounds the spindle, positioned between the two permanent magnet assemblies. Magnetic pole assemblies (28, 30) attached to the spindle are positioned within the volume encompassed by the permanent magnet assemblies, such that an alternating drive signal produces an oscillating action of the spindle of desired frequency and amplitude.

Abstract: A fan array vibration control system may include a fan array having a plurality of fans, and a control unit operatively connected to the fans. The control unit is configured to operate the plurality of fans and detect a phase relationship among the plurality of fans. The control unit is configured to reduce the phase relationship among the plurality of fans in order to reduce vibrations within the fan array.

Abstract: A linear actuator driving device is provided. The linear actuator driving device includes an electromagnetic driving unit which makes a moving element reciprocate in response to a driving command and an offset correcting unit which corrects the driving command to carry out offset energization to make the center of reciprocation of the moving element be moved in the direction in which deviation between the center of reciprocation of the moving element and the center of the movement possible range is eliminated. The offset correcting unit is configured such that the amplitude information is acquired and, with respect to the amplitude value corresponding to the acquired amplitude information, if the movable amplitude is in a movable area insufficient condition, correction of the driving command is performed and, on the other hand, if the movable amplitude is not in the movable area insufficient condition, correction of the driving command is released.

Abstract: Linear compressor comprising a resonant linear motor (4) having a stator (9) and a linear displacer (3), the linear motor (4) cooperating with a resonant spring (2) that is driven by the linear displacer (3) at one of the ends of the resonant spring (2) with the opposite end of the resonant spring (2) cooperating with a mechanical actuation element (1). A variation sensor of magnetic flux (5) cooperates with the resonant spring (2). Said variation sensor of magnetic flux (5) comprising a fixed part (7) and a movable part (6), the movable part (6) coupled to the end of the resonant spring (2) opposite to the end cooperating with the linear displacer (3). The variation sensor of magnetic flux (5) is the sole means required to determine the displacement amplitude and the frequency of oscillation of the displacer (3) of the linear motor (4). Corresponding method for controlling the stroke in such a linear compressor.

Abstract: An apparatus including at least one vibrator motor for vibrating the apparatus; a controller connected to the at least one vibrator motor; and at least one sensor connected to the controller. The at least one sensor is configured to sense drop motion of the apparatus. The controller is configured to control the at least one vibrator motor to change orientation of the apparatus during a portion of the drop motion.

Abstract: The present invention provides a driving circuit for a vibration motor and a driving method for the vibration motor. The driving circuit comprises: a detecting unit, coupled to the vibration motor, for detecting rotating position and rotating speed of the vibration motor and accordingly generating a detecting result; and a control unit, coupled to the detecting unit and the vibration motor, for controlling acceleration and deceleration of the vibration motor according to the detecting result. The driving method comprises: providing a detecting unit for detecting rotating position and rotating speed of the vibration motor and accordingly generating a detecting result; and providing a control unit for controlling acceleration and deceleration of the vibration motor according to the detecting result.

Abstract: The current application is directed to various types of linear vibrational modules, including linear-resonant vibration modules, that can be incorporated in a wide variety of appliances, devices, and systems to provide vibrational forces. The vibrational forces are produced by linear oscillation of a weight or member, in turn produced by rapidly alternating the polarity of one or more driving electromagnets. Feedback control is used to maintain the vibrational frequency of linear-resonant vibration module at or near the resonant frequency for the linear-resonant vibration module. Both linear vibration modules and linear-resonant vibration modules can be designed to produce vibrational amplitude/frequency combinations throughout a large region of amplitude/frequency space.

Abstract: A method and apparatus of driving a motor in a light scanning arrangement. The method includes the following steps: (1) driving a drive coil with a drive signal to oscillate a scan mirror and a light beam reflected from the scan mirror; (2) generating a feedback signal having zero crossings during oscillation of the scan mirror by a feedback coil in proximity to the drive coil; (3) integrating the feedback signal to generate an integrated feedback signal; and (4) processing the integrated feedback signal to generate a periodic drive signal that has the same time period as the feedback signal.

Abstract: In summary, the present invention relates to a device, a method and a computer program enabling a rotating and translating movement by means of a single motor. An electric motor (102) for linear and rotary movement can comprise a stator (104) having a multi-phase coil arrangement including a number of coils or coil sets and a rotor (106) being movable along a direction of its rotational axis and having a number of poles respectively comprising at least one permanent magnet. A control unit (108) may determine currents based on at least the number of coils or coil sets, an angle of rotation of the rotor and a parameter depending on an axial position of the rotor, and supply the determined currents to the coils or coil sets.

Abstract: The motion of the magnetized movable masses of a bilinear electrodynamic motor comprising two movable masses moving in opposite senses parallel to the axis (x-x) of the motor is balanced. At least one first magnetic sensor and at least one second magnetic sensor are provided which are able to deliver respectively a first electrical signal (s1(t)) and a second electrical signal (s2(t)) respectively representative of the motion of a first and of a second movable mass. An error signal (?s(t)) equal to the difference between the said first (s1(t)) and second (s2(t)) electrical signals is recorded. A harmonic analysis of the error signal performed. A sinusoidal excitation signal (e1(t)) at a given frequency f0 is applied to the first movable mass.

Abstract: In order to track the position of a component driven by an electric motor, wherein rotational movements of the electric motor are detected and used for a position count, deviations from an anticipated position count are determined and added to the position given by the position count as an uncertainty region.

Abstract: In a drive control circuit of a linear vibration motor, the drive signal generating unit generates a drive signal whose phase is opposite to that of the drive signal generated during the motor running, after the running of the linear vibration motor has terminated; this drive signal of opposite phase includes a high impedance period during which the driver unit is controlled to a high impedance state. An induced voltage detector detects an induced voltage occurring in the coil. A comparator has a function as a hysteresis comparator in which the output level does not vary in a predetermined dead band, and the comparator outputs a high-level signal or a low-level signal during the high impedance period. When an in-phase signal is consecutively outputted from the comparator during the consecutive high-impedance periods, the drive signal generating unit determines that the linear vibration motor has come to a stop.

Abstract: In a drive control circuit of a linear vibration motor, a drive signal generating unit generates a drive signal used to alternately deliver a positive current and a negative current to a coil. A driver unit generates a drive current in response to the drive signal generated by the drive signal generating unit and supplies the drive current to the coil. An induced voltage detector detects an induced voltage occurring in the coil. After a running of the linear vibration motor has terminated, the drive signal generating unit generates a drive signal whose phase is opposite to that of the drive signal generated during the motor running; this drive signal of opposite phase includes a high impedance period during which the driver unit is controlled to a high impedance state. The induced voltage detector detects the induced voltage occurring in the coil during the high impedance period.

Abstract: A system is provided for controlling the amplitude of a vibrating resonant sensor through a drive signal applied to the resonator. The system comprises a controller that provides the drive signal to a forcer coupled to the resonator to excite the resonator into vibration at its resonant frequency. The system further comprises a buffer having an input node that receives charge of a pickoff capacitor of the resonator that is a measure of the resonator vibration and a current reference waveform. The buffer provides an output that is a difference signal that represents an error of the resonator vibration that corresponds to a difference between the measured resonator vibration and the current reference waveform, wherein the controller adjusts the drive signal in order to null the difference signal.

Abstract: A metal elastic member to be used for beams 4 for supporting a movable unit 3 at respective ends with respect to a fixed unit 2 in a miniature machine including at least one movable unit 3, the fixed unit 2 and the beams 4, and capable of swinging the movable unit about an axis P with the beams 4 serving as torsional rotation axes, includes a metal bar 4a having a predetermined length, a fixed unit pad 4b that is provided at a first end of the metal bar 4a and is fixed to the fixed unit 2, and a movable unit pad 4c formed on the other end side of the metal bar 4a and fixed to the movable unit 3. At least the metal bar 4a is molded to have a sectional area of 1 mm2 or less by using a physical or chemical processing method excluding a mechanical processing method and swings the movable unit 3 within a frequency of 150 Hz to 500 Hz.