Abstract: An apparatus is provided for quantitatively measuring samples whose amount or other characteristic quality is to be determined. The samples are arranged in a predefined pattern and are excited in a magnetic field. The magnetizations of the magnetic particles are thereby caused to oscillate at the excitation frequency in the manner of a dipole to create their own fields. These fields are inductively coupled to at least one substantially flat sensor such as sensing coils fabricated in a gradiometer configuration.

Abstract: A sensor for monitoring a conductive film in a substrate during chemical mechanical polishing generates an alternating magnetic field that impinges a substrate and induces eddy currents. The sensor can have a core, a first coil wound around a first portion of the core and a second coil wound around a second portion of the core. The sensor can be positioned on a side of the polishing surface opposite the substrate. The sensor can detect a phase difference between a drive signal and a measured signal.

Abstract: A non-ferrous component comprising a thermally-affected adhesive applied to a surface of the component, and at least one ferrous metal wire attached to the surface of the component by the thermally-affected adhesive.

Abstract: The intensity of electric and magnetic component is measured at a high-speed without reducing spatial resolution. An electric and magnetic field detection device has an electric field detection device for detecting an electric field component, and a magnetic field detection device for detecting a magnetic field component. These detection devices are so formed on a multilayer printed circuit board that they can be operated independently.

Abstract: The invention relates to a system for detecting the presence of a user, in particular in relation to a motor vehicle door. The inventive system comprises: a handle (1) which is mounted on the door, and a presence sensing device comprising a control module, a sending electrode (7) and a reference electrode (6), each of said electrodes being connected to the control module and being disposed, at least in part, at the handle. The inventive system can be used to connect the aforementioned electrodes electromagnetically to one another in order to define a user presence detection zone. The detection of the user in said zone enables at least one given vehicle function to be controlled. According to the invention, the system also comprises means of creating at least one user presence non-detection zoned (10) through the local modification of the presence detection zone.

Abstract: A method for detecting changes of magnetic response of at least one magnetic particle provided with a external layer in a carrier fluid, comprising measuring the characteristic rotation time of the magnetic particle with respect to the external layer, and measuring Brownian relaxation in the carrier fluid under the influence of an external alternating magnetic field. The method implies that upon modification of the effective volume of the particle or its interaction with the carrier fluid, a hydrodynamic volume of the particle changes, which implies a change of the frequency (ƒmax) at which an out of phase component of the magnetic susceptibility has its maximum.

Abstract: A sensor arrangement with a first sensor (1) which comprises a measuring coil (2) that operates by the eddy current principle, and which detects the distance from a target (6), and a second sensor (3), the two sensors (1, 3) being arranged in a housing (4). To reduce the interaction of the sensors with each other, a panel (7) is positioned on the measuring side of the housing, with the panel being an active component of the second sensor (3). The second sensor is preferably a capacitive sensor, with the panel (7) being the active measuring surface of the capacitive sensor.

Abstract: A method for detecting a current density distribution in a fuel cell stack by detecting the magnetic field, which surrounds the fuel cell stack and which is caused by a current flow in the fuel cell stack, is provided. Sensors for an x-component, a y-component and a z-component of the magnetic flux density detect the magnetic flux density at several points outside the fuel cell stack. The position of the sensors for the magnetic flux density is detected in relation to the fuel cell stack. The thus detected values for the magnetic flux density and the allocated position are converted into current density values according to the position in the fuel cell stack by using a Maxwell equation which defines the magnetic field strength and the material equation which relates the magnetic field strength to the magnetic flux density.

Abstract: An electrical property evaluation apparatus for measuring an electrical property of an object to be measured, including: a magnetic field generating mechanism for generating a magnetic field in a target area on the object; a magnetic sensor for measuring the magnetic field near the target area; a contact having a conducting probe, the contact supported so that the probe can be brought into contact with the target area; a voltage source for applying a voltage to the probe; and an electrical property measuring section for measuring a current or an electrical resistance between the probe and the object in contact with each other.

Abstract: A metal detector that includes a substantially non-metallic housing that defines a hollow cavity and a human walking surface and a metal scanner element positioned in the hollow cavity defined by the non-metallic housing, wherein the walking surface receives a covered human foot. This invention allows travelers to leave their shoes on while transiting security checkpoints.

Abstract: A system and method for determining a component of an eddy current sensor (ECS) signal attributable to a substrate includes placing a substrate in a first position relative to an ECS at a first distance from the ECS. A first surface of the substrate can include a conductive film. A first ECS signal can be detected with the substrate in the first position. The substrate can then be inverted relative to the ECS. A second ECS signal is detected with the substrate in the second position. A difference signal is determined. The difference signal is equal to a difference between a first signal level on a calibration graph for the ECS and the second signal level.

Abstract: The testing results, etc. of surface flaws such as cracks formed in or just below a surface of a body to be detected are displayed using colors within different color regions in the color space when displaying, on the basis of a preset threshold value, the test signal ranging in magnitude from zero to the threshold value and the test signal falling in magnitude beyond the threshold value while changing the color and/or the depth of color little by little within each of the color regions according to the magnitude of the test signal. This enables small flaw signals, etc. to be displayed without exception, thereby preventing small flaws, etc. from being overlooked.

Abstract: Control apparatus for a horizontal boring tool is described which drives a boring lance via boring rods. The tool includes an input interface for receiving actual values of controlled variables of the horizontal boring tool, and an output unit for issuing control signals for controlling the horizontal boring tool. Between the input interface and the output unit is provided a fuzzy control unit which determines the control signals for activation of the horizontal boring tool from the actual values of the controlled variables and the desired values for the controlled variables by fuzzy logic while taking into account heuristic process values. The control apparatus permits automatic operation of the horizontal boring tool with good course steering and high precision.

Abstract: A system and method for determining a component of an eddy current sensor (ECS) signal attributable to a substrate includes placing a substrate in a first position relative to an ECS at a first distance from the ECS. The substrate can include a conductive film on a first surface of the substrate. A first ECS signal can be detected with the substrate in the first position. The substrate can then be inverted relative to the ECS such that the substrate is in a second position relative to the ECS at a second distance from the ECS. The second distance is equal to the first distance less about a thickness of the substrate. A second ECS signal is detected with the substrate in the second position. A difference signal is determined. The difference signal is equal to a difference between a first signal level on a calibration graph for the ECS and the second signal level. The second signal level being shifted a distance about equal to the thickness of the substrate.

Abstract: A method for inspecting pipe, the method, in at least certain aspects, including detecting an inspection parameter in at least a first part of a pipe, the pipe having a length, a hollow body, an outer surface, and a generally circular pipe wall with an inner diameter and an outer diameter, locating at a first location the first part of the pipe with respect to the length of the pipe and with respect to the outer diameter of the pipe; and such a method for inspecting pipe which, in at least certain aspects, includes detecting at least a first part of a first imperfection of the pipe.

Abstract: A method for separating electrical runout from mechanical runout includes positioning at least one position probe against a rotating part, positioning at least one proximity probe adjacent the rotating part, and calculating an electrical runout based on measurements obtained from the position probe and the proximity probe.

Abstract: A sensor that characterizes welds in materials. The sensor includes a meandering drive winding with at least three extended portions and at least one sensing element placed between an adjacent pair of extended portions. A time varying electric current is passed through the extended portions to form a magnetic field. The sensor is placed in proximity to the test material and translated over the weld region. An electrical property of the weld region is measured for each sensing element location. The weld quality is determined using a feature of the electrical property measurement and location.

Abstract: The thickness of a conductive film formed on a substrate can be measured efficiently at low cost with a film thickness measuring apparatus of the invention, which includes an eddy current coil sensor, disposable at a predetermined position near a conductive film, for generating a predetermined eddy current in the conductive film and for detecting a magnetic field caused by the eddy current. The apparatus also includes a displacement sensor for measuring a displacement between the eddy current coil sensor and the conductive film. The thickness of the conductive film is measured in accordance with a variation in inductance of the eddy current coil sensor and the amount of displacement measured by the displacement sensor.

Abstract: A device for detecting physical objects, each object having a detectable identifier, the objects being disposed in association with a graphic display device, comprising a detector operable to detect a location of said identifier relative to said graphic display device, and to output a signal bearing information of said first location, wherein said device is operable to determine, by electronic processing, from said signal, a relative location of said physical object in relation to said graphic display device.

Abstract: This invention relates to the method and apparatus for indicating roller wear in a media handling device. Such structures of this type, generally, employ the use of variable inductance to determine roller wear. The media transport roller has a non-conductive surface with a conductive core. Located just above the conductive core is a rod containing a power coil that is driven by AC excitation and a pick-up coil. The pick-up coil is connected to circuitry that measures the inductance. As the media transport roller wears, the conductive core moves closer to an inductive pick-up unit. The measured output voltage from the pick-up unit depends upon the distance between the core and the pick-up unit. This inductance change can then be correlated to media transport roller wear and relayed to the user through the use of an LED or other similar types of numerical/graphical displays.

Abstract: A method for measuring conductance of a sample using an eddy current probe with a sensing coil. The method includes N repetitions of measuring first and second voltage pairs including in-phase and quadrature components of an induced AC voltage in the sensing coil, calibrating the first signal based on the measured second signal at a different separation from the sample and reference material, determining a conductance function relating conductance with location along the selected curve, processing the calibrated first voltage pairs to generate a lift-off curve, determining an intersection voltage pair representing intersection of the lift-off curve with a selected curve, and determining the conductance of the sample from the intersection voltage pair and the conductance function.

Abstract: This invention is a system that tracks the 3-dimensional position and orientation of one or more bodies (20) in a volume by a light based as well as at least one non-light based mensuration sub-system. This overcomes the limitation of light based mensuration systems to the necessity of the bodies (20) to be in constant line-of-sight of its light based position sensors (26). The invention possesses most of the accuracy and stability of its light based position measurement sub-system (24, 26, 72), but can also work without direct line of sight either for short periods of time or within certain parts of the volume. It does so by incorporating other sensors (31, 34), such as inertial or magnetic, which are frequently recalibrated against the light based sub-system (24, 26, 72) while the bodies (20) are visible by the light based sub-system (24, 26, 72).

Abstract: An apparatus for measuring the magnetic field distribution of a magnetic sample includes a magnetic field sensor arrangement having three, orthogonally-disposed, Hall sensors for sensing the magnetic field produced by a magnetic sample at a given location, The sensor arrangement is scanned along a predetermined scan pattern. The apparatus then acquires sampling data from the sensor arrangement, the sampled data providing a representation of the magnetic field distribution of the magnetic sample. The data is preferably acquired by an interface card for a PC, which stores sampled data in the main memory of the PC for data analysis and display.

Abstract: A proximity switch for detecting a target in proximity with the proximity switch as a wireless transmitter for transmitting a first pulsed signal having a first carrier frequency to the target. The proximity switch also includes a wireless receiver for receiving a second pulsed signal having a second carrier frequency different from the first carrier frequency from the target. The proximity switch has a controller for providing an output indicative of whether a predetermined correspondence is satisfied between the first and second pulsed signals.

Abstract: A contamination resistant probe attachment device attaches over an opening in a top cover of a disc drive to couple a testing probe to the interior of the disc drive. The attachment device has a base for surrounding and attaching around the opening in the top cover in the disc drive and a centrally located aperture for communicating with an upwardly extending flexible tube. The flexible tube having a first and second end, the first end attaching to the base and a second end defining an engagement opening throughwhich a disc drive testing probe is inserted.

Abstract: The invention relates to an apparatus for measuring thickness and deviations from the thickness of thin conductive coatings on various substrates, e.g., metal coating films in semiconductor wafer or hard drive disks. The thickness films may be as small as fractions of microns. The apparatus consists of an inductive sensor and a proximity sensor, which are rigidly interconnected though a piezo-actuator used for displacements of the inductive sensor with respect to the surface of the object being measured. Based on the results of the operation of the proximity sensor, the inductive sensor is maintained at a constant distance from the controlled surface. Variations in the thickness of the coating film and in the distance between the inductive sensor and the coating film change the current in the inductive coil of the sensor.

Abstract: The intensity of electric and magnetic component is measured at a high-speed without reducing spatial resolution. An electric and magnetic field detection device 10 has an electric field detection device 1 for detecting an electric field component, and a magnetic field detection device 2 for detecting a magnetic field component. These detection devices are so formed on a multilayer printed circuit board 4 that they can be operated independently.

Abstract: A field generator/detector including at least one super-toroidal conductor and a device to energize the super-toroidal conductor to generate varying electric and magnetic fields. Where conductor has a length l, the super-toroidal conductor is energized with at least one frequency component equal to or greater than 2c/l, where c is the speed of light in free space. Then the near field generated at this frequency close to the super-toroidal conductor has a strongly inhomogeneous spatial distribution similar or more complex than that generated by four or more electric charges and/or current loops. At any particular moment in time, the amplitudes of the electric and magnetic fields components of such a complex field change significantly over a distance comparable with the smallest winding feature of the super-toroidal conductor. The field generator/detector may be used in a sample analyzer having a chamber and a sample holder within the chamber.

Abstract: A method of calibrating the magnetic coils of a magnetically enhanced reactive ion etcher includes taking magnetic field measurements outside of a closed plasma chamber and correlating such measurements to the magnetic field within the chamber. One or more factors are established which when applied to measurements taken externally yield results representative of measurements taken internally.

Abstract: In a method and device for measuring at least one parameter of a metal bed, measuring is obtained by a magnetic field being generated from one side of the metal bed so that eddy currents are generated in the metal bed as the metal bed moves relative to the magnetic field. The metal bed and the magnetic field are made to move relative to one another. A force related to the eddy currents affects a body and the action of the force on the body is detected by a detecting device, the detected force being a function of a desired parameter of the metal bed.

Abstract: A magneto-optical microscope magnetometer capable of simultaneously measuring a hysteresis loop and activation magnetic moment of a submicrometer-scale local area (about 0.3×0.3 &mgr;m). An electromagnet capable of applying a magnetic field to a magnetic material is attached to a polarizing optical microscope capable of observing a magnetized state of the magnetic material, such that images of the microscope varying with the strength of the applied magnetic field are grabbed in real time by a charge coupled device camera and then analyzed. The magneto-optical microscope magnetometer can measure a hysteresis loop and activation magnetic moment in a submicrometer-scale local area observed by the polarizing optical microscope. Further, the magneto-optical microscope magnetometer can measure hysteresis loops and activation magnetic moments simultaneously with respect to all CCD pixels of the camera and observe coercivity and activation magnetic moment distributions of the entire magnetic material.

Abstract: A method and mechanism for ensuring quality control in printed biological assays is provided. A multi-ejector system having a plurality of individual drop ejectors is loaded with a variety of biofluids. Biofluids include at least a carrier fluid, a biological material to be used in the testing, and markers, such as fluorescent dyes. Data regarding the biofluid loaded in each of the drop ejectors is stored along with an expected signature output of the biofluid. Particularly, the signature output represents signals from individual ones of the fluorescent markers included within the biofluid. Once a biological assay consisting of the biofluid drops has been printed, a scanner capable of detecting the markers scans the biological assay and obtains signature output signals for each of the drops of the biological assay.

Abstract: A stage system includes a movable stage, a first driving mechanism, having magnet and a coil unit, for moving the stage along a predetermined direction, the coil unit including a coil and a yoke, wherein the magnet is connected to the stage side, and a second driving mechanism for moving the coil unit along the predetermined direction. While a position or a speed of the stage is controlled as the stage is driven through the first driving mechanism, the coil unit is moved substantially in synchronism with the stage.

Abstract: Improved targets for use in DC magnetron sputtering of nickel or like ferromagnetic face-centered cubic (FCC) metals are included for forming metallization films having effective edge-to-edge deposition uniformity of 5% (3&sgr;) or better. Such targets may be characterized as having: (a) a homogeneous texture mix that is at least 20% of a <200> texture content and less than 50% of a <111> texture content, (b) an initial pass-through flux factor (% PTF) of about 30% or greater; and(c) a homogeneous grain size of about 200 &mgr;m or less.

Abstract: A product sensor system for use in a refreshment center configured to sense a number of metal product containers. The sensor device can comprise a support shelf mounted in the refreshment center, which holds the product containers. One or more sensor loops are arranged on the shelf below the product containers, and an analysis circuit is connected to the sensor loops to measure the changes in inductance at the sensor loop when product containers are removed from the refreshment center. A microprocessor compares the signals from the inductance sensing circuit with values stored in memory to determine the amount of product remaining.

Abstract: A contactless conductivity detector uses a signal electrode arranged longitudinally between two ground electrodes. Conveniently, the ground electrodes can be integral with a metal housing that electrically shields the detector electronics from external electrical noise. The ground electrodes are defined at the locations where a capillary separation channel extends through the housing. The signal electrode is coupled to an AC transmitter through a sense resistor; the signal electrode is also coupled to a receiver that provides an output corresponding to the magnitude of the AC signal developed at the signal electrode. The signal electrode is located at a voltage-divider node between the sense resistor and the resistances of the sample fluid between the signal electrode location and the ground electrode locations. Thus, the signal developed at the signal electrode reflects the sample fluid resistance, which is the inverse of its conductivity.

Abstract: A combined vacuum cup and sensor is utilized to lift parts. The vacuum cup defines a vacuum chamber between radially inner and outer lips. The sensor is mounted radially inwardly of the inner lip, but is isolated from the vacuum chamber. In this way, parts that are difficult for a larger cup to lift can be lifted easily. Moreover, the sensor need not be provided with a fluid tight seal.

Abstract: An apparatus is provided for quantitatively measuring combinations of magnetic particles combined with analytes whose amount or other characteristic quality is to be determined. The magnetic particles are complexed with the analytes to be determined and are excited in a magnetic field. The magnetizations of the magnetic particles are thereby caused to oscillate at the excitation frequency in the manner of a dipole to create their own fields. These fields are inductively coupled to at least one sensor such as sensing coils fabricated in a gradiometer configuration. The output signals from the sensing coils are appropriately amplified and processed to provide useful output indications.

Abstract: An apparatus and method used to detect metallized containers or other objects in closed packages traveling in a conveyor stream. The apparatus includes a pair of coil units mounted in association with a packaging conveyor such that the closed packages will pass therebetween. Appropriate field generation circuitry are connected to the coil units for producing a magnetic field. When the metallized containers pass through the magnetic field, the impedance across the coils will vary. The varying impedance is measured continuously, thus giving an indication as to whether the metallized object has been detected. If the package is nonconforming, steps can be taken to automatically remove it from the conveyor stream.

Abstract: A method and system for identifying thicknesses of inspection samples, such as semiconductor wafers is presented. The method and system includes a probe housing, comprising an eddy current sense coil and a linear motion controller, and a computer that controls the linear motion controller and the eddy current sense coil. The computer may be configured to identify a thickness of the inspection sample by a method comprising the generation of a natural intercepting curve based on resistance and reactance measurements of at least two data points. Then, a plurality of corresponding resistance and reactance measurements of a location on the inspection sample is obtained with the eddy current sensor, where the eddy current sensor makes a first measurement at a first distance from the inspection sample, and makes each of the remaining plurality of measurements at a distance that is incrementally further away from the inspection surface.

Abstract: A motor unit is provided for operating an internal hub transmission, and a speed sensor is mounted to the motor unit for detecting a speed signal external to the motor unit. Since the speed sensor is mounted to the motor unit, the position of the speed sensor can be securely fixed on the bicycle. Also, the wire for the speed sensor may be integrated into the wiring harness for the motor, thus eliminating the requirement of a separate wire route along the bicycle.

Abstract: A position sensing device including two spaced conductive coils constituting a primary and secondary winding of a transformer. A coupling member is mounted to a moveable object. This movement adjusts or alters the transformer coupling between the primary and the secondary and produces a variable output signal which can be correlated to the position of the moveable member. An electronic module is coupled to a programmable controller and adjusts an output from the linear position sensor to linearize the output with relative movement of first and second members such as components of a vehicle shock absorber.

Abstract: A guide device for linear guidance of elongated objects, particularly for positioning wires passing a nondestructive eddy current test device, can be the inlet nozzle or outlet nozzle, and has a brush arrangement integrated into a guide sleeve. The brush arrangement damps vibration of the wires or other elongated objects transiting the test device. A wire guided by the guide device is protected at its surface and subjected to little or no transverse vibration in the vicinity of the test probe of the test device, resulting in improved measurement accuracy.

Abstract: An inspection apparatus includes a component engagement apparatus, a detection apparatus, and a movement apparatus and is controlled by a cam. A drawer is slidably attached to the component engagement apparatus to receive and align a component including a TV-shaped opening. The detection apparatus is sized to receive an eddy current probe and is attached to the movement apparatus with an adjustable fixture. The movement apparatus identifies a relative position of the eddy current probe in relation to the TV-shaped opening being inspected and guides the movement of the detection apparatus.

Abstract: A method of aligning a lithographic fabrication tool to a substrate to be exposed or patterned by the tool includes the steps of providing a first conductive coil pattern on a surface of the substrate, applying electrical current to the coil pattern, providing a second conductive coil on a surface of the tool, sensing an electro-magnetic field generated by the first coil and the second coil, and aligning the tool according to the signal sensed from the first coil. The method contemplates that electrical current is provided to the first coil from either an external source or the tool. Electrical current is provided by the tool through electrical probes on the tool that contact the first coil, preferably at contact pads. A semiconductor processing lithography apparatus for maskless pattern generation is also disclosed.

Abstract: A system for determining spatial position and/or orientation of one or more objects. The system includes an optical subsystem and a non-optical subsystem. The optical subsystem includes optical subsystem light sources mounted to one or more of the objects and an optical subsystem sensor adapted to detect energy from the optical subsystem light sources. The optical subsystem has an optical subsystem coordinate system in a fixed relationship with the optical subsystem sensor. The optical subsystem sensor produces position and/or orientation signals relative to the optical subsystem coordinate system in response to optical subsystem light source detected energy. The non-optical subsystem has a non-optical coordinate system and is adapted to produce position and/or orientation signals of one or more of the objects relative to the non-optical subsystem coordinate system.

Abstract: A non-contacting thickness measurement apparatus is described, which is capable of on-line, highly accurate web thickness measurements. The apparatus is comprised of a first and second distance determining means which calculate a distance value from each distance determining means to the web surface. The distance determining means are on opposite sides of the web, so each measures the distance to a different side of the web. At the same time, the distance between the two distance determining means is measured to produce a z-sensor spacing value. The two distance values are thereafter subtracted from the z-sensor spacing value to get a web thickness value. An x-y position adjustment means is used to keep the measurement spot on the web for the two distance determining means at the same location on the web, and several techniques are combined to eliminate temperature-induced and/or other unknown variations or drifts in the web thickness value which are not caused by actual changes in the thickness of the web.

Abstract: First and second loop coils are located at respective positions separate from each other by a predetermined distance. A first electric signal is generated which depends on an inductance of the first loop coil. A second electric signal is generated which depends on an inductance of the second loop coil. Detection is made as to a speed of a vehicle, which passes through first and second given regions determined by the respective positions of the first and second loop coils, in response to the first and second electric signals. The first electric signal is compared with a reference signal to decide whether or not a vehicle passes through the first given region determined by the position of the first loop coil. The reference signal is controlled in response to conditions of the first electric signal which occur in a follow-up time. The follow-up time is changed in response to the detected vehicle speed.

Abstract: A device that can sense small changes in distance between opposed surfaces includes a ferromagnetic material and a giant magneto resistance effect sensor. A current source applies a current to the sensor to operate the sensor and read the magnetic field that impinges on the sensor from the ferromagnetic material. The magnetic field changes when the distance between the opposed surfaces changes. The device can be used in imaging apparatus to sense multifeeds and other conditions.

Abstract: In a device for electronically transforming displacement of automobile accelerator lever, an accelerator pedal and a return member are provided, the latter of which returns the accelerator lever back to an original position. A detector device is provided to detect a displacement of the accelerator lever to generate an electrical signal. The detector device has a magnetic plunger which mechanically moves in association with the accelerator lever, and further has primary and secondary coils to surround the magnetic plunger so that the magnetic plunger mechanically moves therethrough. The primary coil is energized to detect an electromotive force produced from the secondary coil. A housing encloses the plunger, and the primary and secondary coils. An engagement piece is fixed to the accelerator lever to actuate a switch which detects whether or not the accelerator pedal is stepped.