Abstract: The invention concerns a device (1) for measuring and/or monitoring a process parameter, with a sensor (2), an intermittently working measurement circuit (3), which has at least one energy storer unit (16), wherein the measurement circuit (3) or individual components of the measurement circuit (3) are activated for a predetermined time span, the so-called active phase, and with a control center (14), wherein the measurement circuit (3) and the control center (14) are connected with one another over a two-wire line (12, 13) and wherein a control-/evaluation-unit (4) is provided, which activates the measurement circuit (3) at the earliest, when the energy in the energy storer unit (16) has reached a predetermined level.

Abstract: A fill-level detector operating by the radar principle gauges the fill-level of the lower of two substances layered one atop the other in a container. The detector incorporates first and second essentially straight, parallel electrical conductors having a signal generator and a transducer mounted to the upper ends of the conductors with the lower ends of the conductors protruding into the lower substance. The generator delivers a signal to the first conductor which signal is conducted into the lower substance with a portion of that signal being reflected at the interface of the two substances which signal portion is captured by the transducer. The detector is able to determine to fill level of the lower substance even when the upper substance displays a high dielectric constant.

Abstract: A coaxial probe includes a coaxial cable including an electrical conductor extending therethrough and projecting therefrom at an end thereof, a planar waveguide on which the electrical conductor projecting from the coaxial cable is mounted, and a sensor electrically connected to the electrical conductor through the planar waveguide. The planar waveguide may be comprised of a substrate, and a strip line formed on the substrate, the strip line being electrically connected at one end to the sensor and at the other end to the electrical conductor. The sensor may be comprised of a cantilever supported at a distal end thereof on the planar waveguide, and a probe mounted on a free end of the cantilever.

Abstract: An apparatus for measuring blade tip clearance in a gas turbine. The apparatus includes an ultrasonic sensor for measuring a distance between a stator shroud surface and a position of the ultrasonic sensor and providing a first signal indicative thereof; a radio frequency sensor for measuring a distance between rotating blade tips of the gas turbine and a position of the radio frequency sensor and providing a second signal indicative thereof; and a processor for receiving and processing the first and second signals to determine blade tip clearance of the gas turbine. The apparatus may also be used to measure blade tip clearances in a steam turbine, or a compressor.

Abstract: Level measuring instrument The invention specifies a level measuring instrument operating with microwaves which transmits highly focussed microwaves in the transmission direction during operation and has an antenna (9) with a low space requirement, having a microwave generator (13) for producing microwaves at frequencies of greater than 40 GHz, an antenna (9, 9a) which is powered by the microwave generator (13) and is used to transmit the microwaves in the direction of the filled product, an antenna (9, 9b) which is used to receive microwaves reflected at a filled product surface, and a reception and evaluation circuit (15) which ascertains a transit time for the microwaves and uses this to determine the present level.

Abstract: The invention relates to a device for determining and/or monitoring filling of a product or the position of the boundary surface between two media or phases in a container. Said device comprises a signal generating unit (2) that generates high-frequency measuring signals, an injection unit (3) and a surface waveguide (4), wherein the measuring signals are injected into the surface waveguide (4) by means of the injection unit (3) and directed toward the filling product via the surface waveguide (4). The device also comprises a receiver/evaluation unit (5, 6), which directly or indirectly determines filling of the product or the position of the boundary surface in the container during the running time of the measuring signals reflected on the surface or boundary surface of the filling product. The invention aims at providing a device which is configured in such a way that parasitic voltages are effectively diverted.

Abstract: A process for determining the position of the border areas between different mediums with the aid of electromagnetic waves, in which process a departing wave which is emitted from a wave transmitter has at least one propagation speed component that is parallel to the normal lines of the border area of the different mediums; the emitted departing wave is at least partially reflected at the border areas; the portions of the reflected returning wave are received by a wave receiver; the travel times between emission of the departing wave and reception of the returning wave are determined; the positions of the border areas are determined from the travel times, with account taken of the different propagation speeds of the wave in the different mediums, while the various portions of the reflected waves in the different mediums (4, 5) are made use of. It is important to take into account here the quadratic relationship of &egr;r to the reflection factor r.

Abstract: A probe for sensing the level of a material or the interface between materials contained in a vessel using Time Domain Reflectometry measurement techniques. The probe comprises a primary conductive rod and at least two secondary conductive rods in spaced relationship with the primary conductive rod for reducing loss of TDR signals propagating through the probe.

Abstract: A level measurement device for measuring the level of material inside of a vessel which includes a conductive element, a signal generating unit, and a receiving unit. The conductive element does not come into direct contact with the material being measured. The signal generating unit generates measurement signals which are transmitted along the conductive element. Each of the measurement signals produces an electromagnetic field which travels along the conductive element and is reflected when it reaches the surface of material in the vessel. The reflected electromagnetic field produces an echo signal which travels along said conductive element to the receiving unit. The receiving unit receives the echo signal and determines the level of material in the vessel. The conductive element can be located outside of the vessel.

Abstract: The invention relates to a filling level measuring device which is used to measure the level of a filling material in a container (1) and a probe (17) is provided, which protrudes inside said container. The filling level measuring device can be mounted and dismounted without the probe (17) needing to be moved in the container (1).

Abstract: A probe structure for sensing the level of a liquid or the interface between liquids contained in a vessel using Time Domain Reflectometry measurement technique. The probe comprises a conductive hollow rod and a conductive inner rod in a coaxially spaced relationship inside the hollow rod and extending along the length of the hollow rod. The hollow rod includes perforations along its length to maintain the same liquid level within the probe as that inside the vessel holding the liquid.

Abstract: A body scanning measurement, typing and profiling apparatus and method utilizing microwave energy. Microwaves are used to measure the size and shape of an individual. An array of miniaturized transmitting antennas direct RF energy to a similarly sized array of receiving antennas. Microwaves are directed toward an object, such as a human being, to be measured and the unabsorbed energy of the microwaves transmitted is measured and converted to a signal representative of the size and shape of the object being measured. A computer processor generates vital body measurements and stores such measurements for future use.

Abstract: A portable grain moisture measurement device automatically initiates testing at a predetermined grain compression and is calibrated to commercial moisture testers found in various commercial grain elevators so the user can select the commercial tester he wants to match moisture measurements with. The portable meter user can thus set the tester to match the commercial tester which will be testing his grain and can also perform calibration offset adjustments to further conform measurements between his meter and the particular commercial tester actually used, relative to the default moisture curves for each commercial tester, and each type of grain.

Abstract: A process and a system for measuring the distance of a moving body (12) from a fixed part (10), characterized the steps of: generating a first alternating signal (r(t)) having a frequency within the radio-wave range or elastic-wave range; emitting the first signal from the fixed part towards the moving body (12); receiving the first signal (r(t)) on the moving body (12) and generating, on the moving body (12), a second signal (s(t)) having a frequency (nf) equal to the frequency of the first signal (r(t)) multiplied by a constant factor (n), the second signal (s(t)) having an initial phase (&phgr;1) equal to the phase (2&pgr;ft1+&phgr;) at the instant (t1) in which it is received by the moving body (12); generating, on the fixed part, a third signal (u(t)) having a frequency (nf) equal to the frequency of the second signal (s(t)) and an initial phase (&phgr;0) equal to the initial phase of the first signal (r(t)); and determining the variation in distance of the moving body (12) in a pre-set time interva

Abstract: A level transmitter for use in a process application measures the height of a product level in a container, e.g., in a tank. The level transmitter includes an electromagnetic wave antenna directed into the tank. An electromagnetic wave source sends an electromagnetic wave signal through the electromagnetic wave antenna. An electromagnetic wave receiver receives the reflected electromagnetic wave signal. Measurement circuitry coupled to the source and receiver initiates transmitting of the electromagnetic wave signal and determines product level height based upon the received, reflected signal. Output circuitry transmits information related to product height. The device is suitable for use with containers having very small orifices for antenna insertion.

Abstract: A method is provided for creating a spectral EM frequency to calculate the thickness of a material with unknown permeability and conductivity using metallic transparencies. The method comprises the steps of testing empirically to approximate the conductivity, testing empirically to approximate the permeability, creating a first set of electromagnetic waves adjacent to the material to be measured of a relatively low frequency, impinging the first set of electromagnetic waves on the material for saturating the material, creating a second set of electromagnetic waves having specific constant amplitude of a higher frequency than the first set of electromagnetic waves, the second set of electromagnetic waves for engaging the material and generating a sensing signal having modified characteristics, and receiving the sensing signal through the saturated material such that the modified characteristics of the sensing signal are processed to determine the thickness of the material.

Abstract: A system is provided for detecting accumulation of material concurrently on multiple areas of a surface in real time. In one embodiment, it is used for detecting icing of airframes while in use or on the ground while awaiting use. It may use either Time Domain Reflectometry (TDR) or Frequency Modulated Continuous Wave (FM-CW) sources to provide a known energizing signal to a transmission line sensor. The system ascertains the signal's round trip travel time in the transmission line. As material accumulates around the transmission line sensor, the medium through which the signal propagates is indicated by the change in time for the signal to propagate in relation to propagation in a reference medium, e.g., air. By employing pre-specified spectral analysis algorithms and referencing to the dielectric constant of media of interest, a determination of the occurrence, location, and the rate and type of material accumulation can be made.

Abstract: A dynamic range sensor that measures the distance to a target or amount of material in a container. The sensor has a transducer and a controller that is coupled to the transducer. The controller generates a first command signal for the transducer, detects a first echo signal from the transducer, and determines whether the first echo signal was received by the transducer within a near-field time. If the first echo signal was received within the near-field time, the controller detects a second echo signal of a predetermined magnitude. If a second echo signal is not detected within a predetermined amount of time, the controller ignores the first echo signal and generates a second command signal different than the first command signal. The controller modifies the second command signal until a second echo signal is detected.

Abstract: A voltage divider (102) for high voltage and other applications uses a high voltage impedance element (104) and a low voltage impedance element (106) to isolate a sample node (110) from which to measure current, voltage, frequency response and other characteristics. The high voltage impedance element (104) includes a resistive network for reducing high voltages, for instance power line voltages of 20 kV or more, down to instrument levels to take measurements on insulation or other materials. The high voltage impedance element (104) is surrounded by one or more capacitive guard elements (118) which shunt stray capacitive currents to ground, improving frequency response and other characteristics. The voltage divider (102) be connected to a current receiver (112) for purposes of instrumentation.

Abstract: An apparatus for measuring blade tip clearance in a gas turbine. The apparatus includes an ultrasonic sensor for measuring a distance between a stator shroud surface and a position of the ultrasonic sensor and providing a first signal indicative thereof; a radio frequency sensor for measuring a distance between rotating blade tips of the gas turbine and a position of the radio frequency sensor and providing a second signal indicative thereof; and a processor for receiving and processing said first and second signals to determine blade tip clearance of the gas turbine. The apparatus may also be used to measure blade tip clearances in a steam turbine, or a compressor.

Abstract: The present invention provides an efficient thin film forming apparatus which is capable of correcting a film thickness so as to take care of a variation in distribution in the film thickness and to take care of the circumferential distribution of the film thickness, as well as a method for forming a thin film using this film forming apparatus.

Abstract: A system for efficiently and cost effectively monitoring the status of the interface between two dissimilar media is provided. In a preferred embodiment, the system uses principles applied from the theory of time domain reflectometry (TDR), together with novel circuitry and low cost narrow band telemetry, to provide real time monitoring on a continuous basis, as needed. The circuitry involved permits operation of the system without relying on relative values of signal amplitude while employing a novel feedback function that sets the pulse repetition frequency instantaneously to permit an optimum data collection rate as well as a separate measure of the status based on the system operating parameters. It has particular application to real time monitoring and alerting to the effect of scour events in waterways.

Abstract: A coupling for a reflectivity-measuring device connects a first shaft of a reflectivity-measuring device with a second shaft of a motor. The first shaft inserts into a first hole of a main portion of the coupling, and the second shaft inserts into a second hole of the main portion. The-main portion further comprises a third hole communicating with the first hole, a fourth hole communicating with the second hole; a first non-skid member and a second non-skid member. The first non-skid member inserts into the third hole and abuts the first shaft located inside the first hole. The second non-skid member inserts into the fourth hole and abuts the second shaft located inside the second hole.

Abstract: A measuring device for determining the thickness of a non-homogeneous medium such as the thickness of a road structure. The device includes a radar transmitter and two spaced receivers. Information on the timing of the transmitted signal as well as the signals received by the two receivers is used to calculate the material thickness while eliminating signal drift.

Abstract: The subject of the invention is a coating thickness gauge with at least one measuring probe (14) which has at least one sensor (15, 15′) as well as a device for the zero adjustment and/or calibration. The coating thickness device (10) is equipped with means to automatically activate zero adjustment and/or calibration when an interaction especially a contact or a relative movement between a sensor (15, 15′) and a reference plate (11, 11′).

Abstract: A method for the quick classification of structured inner and/or outer surfaces of heat exchanger tubes by means of Doppler radar spectroscopy. The measured variables are determined from the frequency spectra. Surface integral A, average value m and variance S (or standard deviation &sgr;={square root over (S)}) correlate directly with the geometric parameters of the structure morphology. They permit direct conclusions regarding the heat transfer characteristics (evaporation/condensation performance) of the respective structure, in particular no tube samples ready for use are needed for the heat transfer classification.

Abstract: A level transmitter for use in a process application measures the height of a product level in a container, e.g., in a tank. The level transmitter includes an electromagnetic wave antenna directed into the tank. An electromagnetic wave source sends an electromagnetic wave signal through the electromagnetic wave antenna. An electromagnetic wave receiver receives the reflected electromagnetic wave signal. Measurement circuitry coupled to the source and receiver initiates transmitting of the electromagnetic wave signal and determines product level height based upon the received, reflected signal. Output circuitry transmits information related to product height. The device is suitable for use with containers having very small orifices for antenna insertion.

Abstract: This level measuring instrument which operates with microwaves, has a radiation characteristic with a pronounced forward lobe and can be used to transmit and/or receive microwaves with a large frequency bandwidth. A housing section is designed as a waveguide short-circuited at one side and one end by a rear wall, and is virtually completely filled with an insert made of a dielectric. An exciter element, projects into the housing section and is connected to a microwave source. An antenna adjoins the housing section, for transmitting and/or receiving microwaves. A gap is arranged in the insert between the exciter element and the antenna. The gap forms a filter which is essentially non-transparent to higher modes of the waveguide.

Abstract: A scour sensor assembly includes a pair of substantially parallel electrically conductive leads for disposition in a water/sediment interface such that a first portion of a length of each lead is disposed in the sediment below the interface and a second portion of the length of each lead is disposed in the water above the interface. A pulse propagation electronics assembly is fixed at first ends of the pair of leads and is adapted to send periodic electromagnetic pulses of positive polarity through the leads toward second ends of the leads and to receive reflected pulses from the interface and the lead second ends. The electronics assembly is adapted to detect a pulse reflected from the interface and to thereupon send a new pulse, the reflected pulses received from the second ends of the leads and from the interface being of opposite polarity.

Abstract: A hydraulic actuator is disclosed having a cylinder with a piston that is moved by hydraulic fluid. A light guide in one end of the cylinder directs a laser beam into the cylinder, and off the piston where the beam is reflected. The beam then exits the cylinder through at least two light guides connected to two corresponding optical fibers. Each of the optical fibers are joined together into one fiber that carries the reflected beam of light to a photo-diode located remote from the cylinder. A control circuit measures the time of flight of the laser beam.

Abstract: In a reflectometer arrangement and a method for determining the reflectance of selected measurement locations on measurement objects reflecting in a spectrally dependent manner, the object of the invention is to reduce the time for measuring a measurement object with a robust and simple measurement structure to such an extent that compact radiation sources with low output compared to a synchrotron can be used at the site of production or of use of the measurement object to characterize the object characteristics in a manner suited to series production. A measurement beam bundle proceeding from a polychromatically emitting radiation source is directed onto the measurement location of the measurement object sequentially in modified manner by impressing spectral reference reflection characteristics and the radiation reflected from every measurement location is detected integrally.

Abstract: Disclosed is a method of using a low power radar level transmitter to calculate a dielectric constant of a product in a tank. Low Power Time Domain Reflectometry Radar (LPTDRR) circuitry is controlled to calculate a time delay between transmission of microwave energy down a termination extending into the product in the tank and reflection of the microwave energy. In some embodiments, the dielectric constant of the product is calculated as a function of the time delay. In other embodiments, the dielectric constant is calculated by controlling the LPTDRR circuitry to calculate amplitudes of transmit and receive pulses. The dielectric of the product is calculated as a function of the amplitudes of the transmit and receive pulses.

Abstract: A hand held diagnostic test device enables determination of the integrity of low observable (L.O.) properties in structures or surfaces of a structure, and includes a housing containing a first component for coupling energy signals into the structure or a surface of the structure, a second component for detecting the response energy signals, a third component for determining whether the response energy signals indicate flaws in the surface of the structure, and a fourth component for signaling an operator of the diagnostic test device of the results. The energy signal is an RF signal, and a microprocessor in the test device enables determination of the integrity of the structure of surface by comparing the returned signals against a stored acceptable signal. Acceptability or non-acceptability is signaled to the operator of the diagnostic test device by indicator lamps located on the sensor housing and/or a digital display.

Abstract: A distance measuring device is capable of measuring a distance to a piston with a cylinder both discretely and continuously. The distance measuring device includes a coupling probe located axially symmetrically with respect to a piston rod within the cylinder. The coupling probe transmits a continuous wave electromagnetic signal into the cylinder and detects its reflection to measure the distance to the piston while the piston is moving.

Abstract: A method for detecting the presence of a twin peak pulse in a waveform, generated by a microwave level transmitter, that is used to detect levels of first and second material interfaces relating to materials contained in a tank. The waveform develops a twin peak pulse when the first and second material interfaces are in close proximity to one another. The twin peak pulse contains overlapping first and second received wave pulses reflected from the first and second material interfaces, respectively. The method determines that the waveform contains a twin peak pulse when both a first peak point relating to the first received wave pulse and a valley are detected. A microwave level transmitter having an interface detection module that is configured to use the method of the present invention to detect the existence of a twin peak pulse in a waveform.

Abstract: A receiver that calculates the length of the transmission channel cable based on the receiver parameters is presented. The cable length is calculated based on the gain of an automatic gain control circuit or is based on the multiplier coefficients of an equalizer of the receiver. A comparison between a cable length calculated using the gain from the automatic gain control circuit and a cable length calculated using the multiplier coefficients of the equalizer indicates the quality of the cable.

Abstract: A system for a machine, in particular an automated production machine, has a large number of proximity sensors. Each proximity sensor has at least one secondary winding that is suitable for drawing power from a medium-frequency magnetic field. At least one primary winding, which is fed from a medium-frequency oscillator, is provided for supplying the proximity sensors with electrical power without using wires. Each proximity sensor is equipped with a transmitting device that emits radio signals, which contain sensor information of interest, to a central receiving device that is connected to a process computer for the machine. A proximity sensor and a primary winding for this purpose are also proposed.

Abstract: A method for the measurement of electrical properties of materials through non-magnetizable materials. The method also to calculate the thickness of a material with unknown permeability and conductivity using transparencies. The method comprising the steps of creating a first set of electromagnetic waves having specific constant amplitude of a known frequency, the first set of electromagnetic waves for engaging a system, impinging the first set of electromagnetic waves on the system under investigation, nulling the system, receiving a nulled signal, creating a change in the system, and receiving a modified signal associated with the change from the nulled signal such that the modified signal contains sufficient information to determine the change in the system.

Abstract: A process for measuring the distance of a moving body (12) from a fixed part (10), characterized in that it comprises the steps of:

Abstract: A method is provided for creating a spectral EM frequency to calculate the thickness of a material with unknown permeability and conductivity using metallic transparencies. The method comprises the steps of testing empirically to approximate the conductivity, testing empirically to approximate the permeability, creating a first set of electromagnetic waves adjacent to the material to be measured of a relatively low frequency, impinging the first set of electromagnetic waves on the material for saturating the material, creating a second set of electromagnetic waves having specific constant amplitude of a higher frequency than the first set of electromagnetic waves, the second set of electromagnetic waves for engaging the material and generating a sensing signal having modified characteristics, and receiving the sensing signal through the saturated material such that the modified characteristics of the sensing signal are processed to determine the thickness of the material.

Abstract: A coupling for a reflectivity-measuring device is provided. The coupling connects a first shaft of a reflectivity-measuring device with a second shaft of a motor. The first shaft inserts into a first hole of a main portion of the coupling, and the second shaft inserts into a second hole of the main portion. The main portion further comprises a third hole communicating with the first hole, a fourth hole communicating with the second hole, a first non-skid member and a second non-skid member. The first non-skid member inserts into the third hole and abuts the first shaft located inside the first hole. The second non-skid member inserts into the fourth hole and abuts the second shaft located inside the second hole.

Abstract: A level transmitter for use in a process application measures the height of a product level in a container, e.g., in a tank. The level transmitter includes an electromagnetic wave antenna directed into the tank. An electromagnetic wave source sends an electromagnetic wave signal through the electromagnetic wave antenna. An electromagnetic wave receiver receives the reflected electromagnetic wave signal. Measurement circuitry coupled to the source and receiver initiates transmitting of the electromagnetic wave signal and determines product level height based upon the received, reflected signal. Output circuitry transmits information related to product height. The device is suitable for use with containers having very small orifices for antenna insertion.

Abstract: A material analyzing apparatus comprises an analyzer body that contains a generally insulative material casing; a material analyzing circuitry that includes a transmitter, a receiver, and a control; an antenna system that includes a transmitting antenna, a receiving antenna, and a ground layer; a coupling structure that couples the antenna system to the material analyzing circuitry. The transmitter of the material analyzing circuitry generates a VHF electromagnetic wave signal that is adapted to be sent by the transmitting antenna and directed into the material to be analyzed. The receiving antenna receiving any returned signal from the material and sent to the receiver and to the control. The control then able to analyze the signal for material characteristics. The material characteristics including at least one of density and material segregation. The invention further includes a method for analyzing, as embodied by the invention.

Abstract: A sensor apparatus (1) designed for industrial applications is provided for transmitting electrical pulses from a signal line (2) into and out of a vessel to measure a process variable, which has a low outer diameter, preferably of 1½″ or lower, while providing high mechanical stability and maintaining a high degree of transmission efficiency.

Abstract: A level transmitter for use in a process application measures height of a product in a tank. The level transmitter includes a microwave antenna directed into the tank. A low power microwave source sends a microwave signal through the microwave antenna. A low power microwave receiver receives a reflected microwave signal. Measurement circuitry coupled to the source and receiver initiates transmitting of the microwave signal and determines product height based upon the received, reflected signal. Output circuitry coupled to a two-wire process control loop transmits information related to product height over the loop. Power supply circuitry in the level transmitter coupled to the two-wire process control loop receives power from the loop which powers the level transmitter including the microwave source and the microwave receiver.

Abstract: A method and a communications device are described, comprising a radio telephone (5) with connected antenna path (1) which can be used to locate precisely a defective area (F) in the antenna path (1) in order to be able to repair the antenna path (1) in a selective fashion. For this purpose, initially a wave with a starting frequency (f0) is coupled into the antenna path (1), and the amplitude of the standing wave at an angular position is measured. Then, the frequency of the wave is increased until a corresponding amplitude is detected at the same angular position. From the frequencies present then and from a reading (n) which indicates how often the corresponding amplitude has been obtained, the fault interval (Ed) between the detector (18) and defective area (F) is then calculated.

Abstract: A level transmitter for use in a process application measures the height of a product level in a container, e.g., in a tank. The level transmitter includes an electromagnetic wave antenna directed into the tank. An electromagnetic wave source sends an electromagnetic wave signal through the electromagnetic wave antenna. An electromagnetic wave receiver receives the reflected electromagnetic wave signal. Measurement circuitry coupled to the source and receiver initiates transmitting of the electromagnetic wave signal and determines product level height based upon the received, reflected signal. Output circuitry transmits information related to product height. The device is suitable for use with containers having very small orifices for antenna insertion.

Abstract: A hand-held diagnostic test device enables determination of the integrity of low observable (L.O.) properties in structures or surfaces of a structure, and includes a housing containing a first component for coupling energy signals into the structure or a surface of said structure, a second component for detecting the response energy signals, a third component for determining whether the response energy signals indicate flaws in the surface of said structure, and fourth component for signaling an operator of said diagnostic test device of the results. The energy signal is an RF signal, and a microprocessor in the test device enables determination of the integrity of the structure or surface by comparing the returned signals against a stored acceptable signal. Acceptability or non-acceptability is signaled to the operator of the diagnostic test device by indicator lamps located on the sensor housing and/or digital display.

Abstract: A method for the quick classification of structured inner and/or outer surfaces of heat exchanger tubes by means of Doppler radar spectroscopy.

Abstract: A high frequency plasma processing apparatus and a high frequency plasma processing method according to the invention can suitably be used for uniformly forming on a substrate a deposition film over a large area. The apparatus and the related method solve the problem wherein high frequency power supplied to a known plasma processing apparatus can become distorted to produce harmonics and give rise to difficulty in correctly reading the incident and reflected powers and realizing an accurate matching when a VHF is used in order to raise the processing rate.