Abstract: A system and method for providing electromagnetic imaging through electroquasistatic sensing contains an electromagnetic sensor for imaging a sample. The electromagnetic sensor contains drive/sense electronics and a pixelated sensor array having an array of capacitive sensor electrodes that source electric fields that interact with the sample, and wherein the electrodes are individually drivable by the drive/sense electronics in a coordinated manner to establish a desired temporal and spatial pattern in which electrical properties of the electrodes are used to generate an image. Other components of the system include a precision motion controller, sensor head and associated electronics, and a computer for performing data acquisition and signal inversion.

Abstract: A micromechanical component is described having a substrate which has a movable mass which is connected via at least one spring to the substrate so that the movable mass is displaceable with respect to the substrate, and at least one fixedly mounted stator electrode. The movable mass and the at least one spring are structured from the substrate. At least one separating trench which at least partially surrounds the movable mass is formed in the substrate. The at least one stator electrode is situated adjacent to an outer surface of the movable mass which is at least partially surrounded by the separating trench, with the aid of at least one supporting connection which connects the at least one stator electrode to an anchor situated on the substrate and spans a section of the separating trench. Also described is a manufacturing method for a micromechanical component.

Abstract: Described herein is a device comprising a plurality of first reaction electrodes arranged in an array, the plurality of first reaction electrodes configured to be exposed to a solution and having a capacitance; first circuitry configured to controllably connect the plurality of first reaction electrodes to a bias source and controllably disconnect the plurality of first reaction electrodes from the bias source; and second circuitry configured to measure a rate of charging or discharging of the capacitance. Also described herein is a method of using this device to sequence DNA.

Abstract: An electrical device includes at least one graphene quantum capacitance varactor. In some examples, the graphene quantum capacitance varactor includes an insulator layer, a graphene layer disposed on the insulator layer, a dielectric layer disposed on the graphene layer, a gate electrode formed on the dielectric layer, and at least one contact electrode disposed on the graphene layer and making electrical contact with the graphene layer. In other examples, the graphene quantum capacitance varactor includes an insulator layer, a gate electrode recessed in the insulator layer, a dielectric layer formed on the gate electrode, a graphene layer formed on the dielectric layer, wherein the graphene layer comprises an exposed surface opposite the dielectric layer, and at least one contact electrode formed on the graphene layer and making electrical contact with the graphene layer.

Abstract: A particulate matter detection device that detects the diameter and the amount of particulates in exhaust gas while reducing detection error caused by deterioration such as the deterioration of electrodes is provided. In the particulate matter detection device, which measures particulates in a gaseous body, AC voltages having different frequencies are applied to a pair of electrodes disposed apart from each other. The resulting impedances to the different frequencies are detected. A resistance component and/or a capacitance component of the impedances to the different frequencies are calculated. The average diameter and/or the number of particulates in the gaseous body are estimated in accordance with changes in the resistance component and/or the capacitance component.

Abstract: A device includes a semiconductor die having a surface, a plurality of proximity connectors proximate to the surface, and a circuit coupled to at least one of the plurality of proximity connectors. The semiconductor die is configured to communicate voltage-mode signals through capacitive coupling using one or more of the plurality of proximity connectors. The circuit also includes a filter with a capacitive-summing junction to equalize the signals.

Abstract: A circuit arrangement includes: a reverse conducting IGBT configured to allow for conducting a load current in a forward direction and in a reverse direction, the IGBT having a load current path and a gate electrode; a gate control unit connected to the gate electrode and configured to activate or deactivate the IGBT by charging or, respectively, discharging the gate electrode in accordance with a gate control signal; a gate driver unit configured to detect whether the IGBT conducts current in the forward direction or the reverse direction by sensing a gate current caused by a change of a voltage drop across the load path due to a changing of the reverse conducting IGBT into its reverse conducting state, the gate control unit further configured to deactivate the IGBT or to prevent an activation of the IGBT via its gate electrode when the gate driver unit detects that the IGBT is in its reverse conducting state.

Abstract: A processing system for a capacitive sensor device comprises circuitry and logic; and the capacitive sensor device comprises a first plurality of sensor electrodes and a second plurality of sensor electrodes. The processing system is configured to acquire a first plurality of capacitive measurements by emitting and receiving first electrical signals with the first plurality of sensor electrodes of the capacitive sensor device. The processing system is also configured to select a first set of the first plurality of sensor electrodes based on the first plurality of capacitive measurements. The processing system is further configured to acquire a second plurality of capacitive measurements by emitting second electrical signals with the first set of the first plurality of sensor electrodes and receiving the second electrical signals with the second plurality of sensor electrodes.

Abstract: Three or more electrodes are arranged on either a window frame or window glass of an automobile. An electric field measurement unit measures the capacitance between various combinations of the electrodes to detect whether an object is located between the window frame and window glass. A control circuit varies the sensitivity of the electric field measurement unit by switching amongst the electrodes used for capacitance measurement based on the movement and position of the window glass.

Abstract: A capacitive proximity device for sensing a presence and/or absence of an object in the proximity of an electronic device includes an emission electrode capacitively coupled to a receiver electrode, an oscillator for generating an emission-signal being an alternating electric field between the emission electrode and the receiving electrode, and a sensing circuit connected to the receiving electrode. The sensing circuit receives a measured-signal from the receiver electrode and includes a first synchronous detection circuit together with a low-pass filter for generating an output-signal being proportional to a distance between the object and the electronic device. The sensing circuit further includes a noise-suppresser for reducing noise from the measured-signal before entering the first synchronous detection circuit.

Abstract: A hot stick power analyzer includes a housing mounted on a pole and a channel for a power line. A ground line extends from the housing and there is a power line conductive contact. A voltage sensor includes voltage sensing circuitry connected to the power line conductive contact and the ground line. There is a high voltage capacitance between the ground line and the voltage sensing circuitry. A current sensor includes windings about and spaced from the power line. A processing subsystem is responsive to the voltage sensing circuitry and to the current sensor and is configured to compute power analysis metrics.

Abstract: An apparatus for determining a thickness change of thermal interface material (TIM) disposed between first and second elements is provided. The apparatus includes a first part movable with the first element in a movement direction along which the TIM thickness is to be determined, a second part movable with the second element in the movement direction and a sensor to measure a distance between the first and second parts in the movement direction, the measured distance being related to the TIM thickness change.

Abstract: A method of making a transparent capacitor apparatus includes: providing a first transparent substrate including a first patterned conductive layer having a first pattern; providing a second transparent substrate including a second patterned conductive layer having a second pattern different from the first pattern; locating the first transparent substrate over the second transparent substrate so that the first patterned conductive layer is effectively parallel to the second patterned conductive layer. Overlapping portions of both the first conductive layer and the second conductive layer are patterned time into spatially matching conductive areas and non-conductive areas by locally applying heat to melt conductive materials in the non-conductive areas so that the surface tension of the conductive materials causes the conductive materials to coalesce into structures with a reduced conductive layer area.

Abstract: A voltage detector having a voltage detection printed board including a board having a penetration hole that penetrates the board, a first pattern wire formed at a periphery of the penetration hole, a second pattern wire formed at the periphery of the penetration hole, and a plurality of through holes that penetrate the board between the first and second pattern wires. Also provided is a conductive casing in which the voltage detection printed board is fixed, wherein, when a conductor, in which AC voltage is generated, is disposed to pass through the penetration hole, the pattern wires act with the conductor to function as electrodes of a capacitor.

Abstract: A position measuring sensor formed from opposing sets of capacitor plates measures both rotational displacement and lateral displacement from the changes in capacitances as overlapping areas of capacitors change. Capacitances are measured by a measuring circuit. The measured capacitances are provided to a calculating circuit that performs calculations to obtain angular and lateral displacement from the capacitances measured by the measuring circuit.

Abstract: A sensor assembly includes a housing assembly, an electrode arrangement and a diaphragm having a fixed portion secured to the housing assembly and an active portion movable relative to the electrode arrangement in response to a differential pressure applied to opposite sides of the diaphragm. The fixed portion of the diaphragm is secured at one or more locations relative to at least a portion of the housing assembly; and at least one groove is formed in the fixed portion of the diaphragm between the locations at which the diaphragm is fixed relative to the housing assembly and the active portion so as to relieve any stress on the active portion of the diaphragm. A method of making the sensor assembly is also disclosed.

Abstract: The high speed, high accuracy capacitive gauging system employs an oscillator fed through steep slope filter that is discriminates between very small changes in capacitance even in the presence of electrical noise. During intervals when the probe tip is retracted, the oscillator frequency is calibrated to match the sweet spot in the center of the linear operative region of the steep slope filter. This calibrates the system to overcome the effects of varying temperature and humidity in the manufacturing environment.

Abstract: A capacitive occupant detection system (10) comprises a sine signal generator (12) to apply a sine voltage signal to an antenna electrode (14) and a current measurement circuit (18, 20, 28, 30, 40) to measure current signals, based upon which a control and evaluation unit determines and outputs an occupancy state. The signal generator (12) is coupled to the antenna electrode via an amplitude adjustment stage (13), configured to adjust the amplitude of said sine voltage signal applied to said antenna electrode to an amplitude selected among at least two discrete amplitudes. The control and evaluation circuit selects one of the discrete amplitudes at a time and causes the amplitude adjustment stage to adjust the amplitude of said the voltage signal applied to the antenna electrode accordingly. The control and evaluation circuit carries out an interference detection mode and an occupant detection mode.

Abstract: A capacitive touchpad includes a plurality of parallel traces configured in a capacitance sensor layout scheme such that the maximum sensor gap is smaller than the sensor pitch to improve the sensor response linearity of the capacitive touchpad.

Abstract: A touch and proximity sensing device includes a circuit board and a sensed signal processing unit including only one sensed signal conversion engine. The circuit board includes a capacitor sensing electrode and a grounding conductor foil disposed on opposite surfaces of the circuit board, and has a proximity sensing electrode formed thereon. The grounding conductor foil is spaced apart from the proximity sensing electrode in a planar direction parallel to the surfaces of the circuit board. The sensed signal conversion engine is spaced apart from the capacitor sensing electrode and the proximity sensing electrode in the planar direction and detects electric sensed signals from the capacitor sensing electrode and the proximity sensing electrode.

Abstract: In an example embodiment, an apparatus includes a sensing device. The sensing device includes circuitry configured to sense self-capacitance and circuitry configured to sense mutual-capacitance, each configured to detect capacitance values corresponding to whether an object is proximate to a touch screen. The sensing device is configured to measure a first capacitance value using the self-capacitance circuitry during self-capacitance sensing operations and to measure a second capacitance value using the mutual-capacitance circuitry during mutual-capacitance sensing operations.

Abstract: An input device comprises a processing system coupled with a plurality of receiver paths. The processing system comprises a first capacitor and a bypass switch. The first capacitor is configured to be selectively coupled with the plurality of receiver paths. The bypass switch is configured for bypassing the first capacitor. The processing system is configured to selectively couple a first receiver path of the plurality of receiver paths with the first capacitor; acquire a measurement of a first resulting signal from at least one of the first receiver path or a second receiver path of the plurality of receiver paths while the first receiver path is coupled with the first capacitor and while the bypass switch is not bypassing the first capacitor; and determine whether the first receiver path is ohmically coupled with the second receiver path based on the measurement of the first resulting signal.

Abstract: A current or voltage sensor for use with a busbar has a support body having a proximal end juxtaposed with the busbar and a distal end spaced therefrom and a U-shaped conducting bar in the proximal end and having a pair of arms having free ends transversely engaging the busbar. A Rogowski coil in the proximal end is juxtaposed with the U-shaped conducting bar. A grounded screening element at the distal end is conductive and forms a chamber open toward the U-shape conducting bar. A source electrode has a proximal end engaging the U-shaped conducting bar outside the first chamber and a distal end in the chamber. An electrical field sensor in the first chamber is juxtaposed with the distal end of the source electrode.

Abstract: Disclosed is a test apparatus for measuring the common-mode parasitic capacitance between a first element and a second element being isolated from the first element. The test apparatus includes a signal generating device connected to the first element and having an internal signal source connected in series with a first internal impedance for sending a signal to the first element, and a signal receiving device connected between the second element and the first element and having a second internal impedance for measuring a signal response between the first element and the second element, thereby calculating the common-mode capacitance between the first element and the second element based on the signal response.

Abstract: A calibration method for an inertial drive actuator of detecting a position of a moving body based on an electrostatic capacitance is proposed. The calibration method includes driving the moving body; outputting a first signal for detecting the electrostatic capacitance of opposing parts of a moving body side electrode provided on the moving body and a detecting electrode provided opposing the moving body side electrode; receiving a second signal obtained after the first signal output at the outputting has passed through the moving body side electrode and the detecting electrode; and calculating an optimum first signal based on the second signal received at the receiving.

Abstract: A first operator control function is activated if it is detected by means of a first sensor that a first physical variable is higher than a predetermined first threshold value. In a similar way, a second operator control function is activated if it is detected by means of a second sensor that a second physical variable is higher than a predetermined second threshold value. A third operator control function is activated if it is detected by means of the first sensor that the first physical variable is higher than a predetermined third threshold value and if at the same time it is detected by means of the second sensor that the second physical variable is higher than a predetermined fourth threshold value, the third threshold value being higher than the first threshold value.

Abstract: A dynamic quantity detecting member includes: a base substrate of which a part or the whole including a contact portion is deformed in accordance with pressing of a contact object and of which an original shape is recovered when the pressing of the contact object disappears; electrodes serving as displacement electrodes of which the plurality of electrodes are fixed to a surface or inside of the base substrate and of which at least one electrode is disposed in a deformable portion (which is a region deformable and displaceable during the deformation) of the base substrate; and wirings which are connected to the electrodes. During deformation, the displacement electrodes are deformed and displaced with the deformation and displacement of the deformable portion without separation from the base substrate and without damaging conductivity. The deformation and displacement of the deformable portion are detected as a variation in capacitance between the electrodes.

Abstract: System and method for optimizing the consumption of power while maintaining performance in capacitive sensor arrays. A limited sensing area is used to improve the update rate and sensitivity of a row/column array of capacitive sensors. According to one embodiment, a method is provided for scanning a plurality of capacitive sensors by: detecting a stimulus in the field of capacitive sensors, scanning the field of capacitive sensors to determine the position of the stimulus. Once the position of the stimulus is determined, a subsection of the field comprising window corresponding to the position of the stimulus remains activated while the remaining sensors in the field are deactivated.

Abstract: A capacitive occupant detection apparatus comprising a sensor unit and a control unit is disclosed. The sensor unit includes a detection electrode and a periphery guard electrode. The control unit includes: a signal application circuit for applying an oscillation signal to the detection electrode; an operational amplifier for applying to the guard electrode a signal having the same phase and potential as the oscillation signal applied to the detection electrode; and a control circuit for receiving current and voltage values supplied to the detection and for determining a mounting state on a seat based on the inputted current and voltage values (including phase information). The periphery guard electrode is located to surround the detection electrode when viewed from an upper side of the detection electrode.

Abstract: A sensor device for determining the deviation of the position of a head support of a motor vehicle seat from a target position is provided that includes a capacitative proximity sensor that can be integrated in a head support, having two transmitting electrodes disposed at a vertical distance from each other and a common receiving electrode.

Abstract: A method and apparatus for non-destructively determining the wear resistance of an ultra-hard polycrystalline structure after being coupled to a downhole tool using capacitance measurements. The apparatus includes a capacitance measuring device having a positive and negative terminal, a leached component comprising a polycrystalline structure that has been coupled to a downhole tool, a first wire, and a second wire. The first wire electrically couples the positive terminal to a surface of the leached component and the second wire electrically couples the negative terminal to a surface of the downhole tool. The capacitance is measured for the leached component one or more times and compared to a calibration curve that shows a relationship between capacitance values and wear resistance, thereby allowing determination of an estimated wear resistance for the polycrystalline structure.

Abstract: A non-resistive contact sensor assembly includes an electric field sensor device, including a dry electrode component for receiving an electrical signal from an object of interest and a signal processing component for processing the electrical signal, and a casing in which the signal processing component is surrounded or embedded. The processing component may include communications capabilities.

Abstract: An integrated circuit for compensating for parasitic capacitance in a capacitive measuring apparatus wherein a capacitance measurement is done by repeatedly transferring charge from a capacitor to be measured to a reference capacitor.

Abstract: A testing apparatus for testing whether an occupant detection sensor normally operates is disclosed. The testing apparatus includes: a ground that is an electrically-conductive structural member of the seat; an electrode plate that is electrically-conductive and is on the seat at a time of testing; multiple capacitors that are electrically connected between the electrode plate and the ground and are different in electrostatic capacity from each other; a switch mechanism that selects and switches one capacitor of the multiple capacitors; and a determination result check portion that determines, while switching the one capacitor by the switch mechanism, whether a signal outputted from the occupant detection sensor is a determination result corresponding to the switched one capacitor.

Abstract: The invention relates to a lithography system. The lithography system has a projection lens system and a capacitive sensing system. The projection lens system is provided with a final projection lens. The capacitive sensing system is arranged for making a measurement related to a distance between the final projection lens and a target. The capacitive sensing system includes at least one capacitive sensor. Additional, the capacitive sensing system is provided with a flexible printed circuit structure and at least one integrated flex print connector. The at least one sensor is located in the flexible printed circuit structure. The flexible printed circuit structure has a flexible base provided with conductive electrodes for the at least one sensor and conductive tracks. The conductive tracks extend from the electrodes along the at least one integrated flex print connector.

Abstract: A sensor system and an evaluation method for monitoring surroundings on a mechanical component, having at least one capacitive sensor element that is attachable on the surface of machines or machine parts, in which at least one sensor element is made up of a layered structure of flexible, electrically conductive and electrically insulating layers, electrically conductive surfaces of one layer being positioned with lateral spacing above insulating layers lying between them in such a way that electrical field lines form between the conductive surfaces, which change measurably upon approach to and/or contact with a body or object.

Abstract: A capacitive sensing structure is formed from first electrically conductive sensor structures electrically coupled to each other in a first direction, and second electrically conductive sensor structures electrically coupled to each other in a second direction. Each first electrically conductive sensor structure includes a first diamond-shaped central region with electrically coupled first finger structures extending away therefrom. Each second electrically conductive sensor structure includes a second diamond-shaped central region with electrically conducting second finger structures extending away therefrom. Each second finger structure extends between two adjacent ones of the first finger structures. Floating structures may be included within an opening formed in the first diamond shaped central region. Floating structures may further be included between the first and second finger structures.

Abstract: A digital circuit block includes first to fourth conducting segments, a digital logic, first and second conducting layers, and a dielectric layer. The first and second conducting segments are coupled to first and second supply voltages, respectively. The digital logic and dielectric layer are between the first and second conducting segments. The third conducting segment includes a first end electrically connected to the first conducting segment, a second end not electrically connected to the second conducting segment, and a first portion located at the first conducting layer. The fourth conducting segment includes a first end electrically connected to the second conducting segment, a second end not electrically connected to the first conducting segment, and a second portion located at the second conducting layer. The first and second portions and dielectric layer are formed a first capacitive element to reduce the supply voltage drop between the first and second supply voltages.

Abstract: A handheld device providing an internal view through an obscuring wall or other obscuring surfaces of hidden structural or facilities elements (such as wooden studs, electrical, plumbing, or HVAC), or the absence thereof. A continuous and homogeneous luminescent gas or other visual display material whose optical characteristics change as a result of the applied electric field is used both to simultaneously detect capacitance changes associated with hidden objects and to display those detected those objects. Different types of chambers are disclosed for the gas as well as means to prevent fringing effects. The gas is held just at its ionization level at which point it becomes optically visible. Circuitry is disclosed for controlling the energy source based on current draw or light output of the gas and feedback circuitry is disclosed to neutralize the effects of ambient light. Also disclosed is a device and method for the detection and mapping of electric fields.

Abstract: Embodiments of the disclosure relate to an apparatus including a first sensor arrangement configured in a first layer; a second sensor arrangement configured in a second layer; wherein the sensor arrangements are configured to vary an input signal in response to a sensed parameter; and the apparatus also including an input configured to receive an input signal and an output configured to provide an output signal that depends on each of the first and second sensor arrangements.

Abstract: A control circuit turns on a switching element to discharge a capacitor, and after a voltage between both ends of the capacitor becomes zero, the control circuit turns off the switching element. The control circuit measures the voltage V1, V2 between both ends of the capacitor after the first predetermined time is passed and after the second predetermined time is passed, and calculate a change rate (V1/V2). If V1/V2 is equal to or less than 0.5, the disconnection is detected.

Abstract: A detector circuit for detecting the presence of a remote capacitive sensor having at least two terminals connected via a protection circuit that includes one or more capacitors, the detector circuit comprising: a current supply for changing the charge on the sensor and the protection circuit, a detector for measuring the voltage on one or more of the terminals; wherein the presence of the sensor is determined by changing the charge on the capacitive sensor and the one or more capacitors of the protection circuit in a predetermined manner such that the voltage measurement on the one or more terminals when the sensor is present is significantly different than when the sensor is absent.

Abstract: There is provided a capacitance sensing apparatus including: a driving circuit unit applying a driving signal having a common level potential and first and second level potentials different from the common level potential to a first capacitor; a sensing circuit unit detecting a change in capacitance generated in the first capacitor; and a gain controlling circuit unit controlling a gain of the sensing circuit unit, wherein the sensing circuit unit includes a second capacitor charged by the change in capacitance of the first capacitor when a level of the driving signal is changed from the first level potential to the common level potential or changed from the common level potential to the second level potential.

Abstract: A two-dimensional position sensor is formed by drive electrodes (52) and sense electrodes (62, 64, 66) both extending in the x-direction and interleaved in the y-direction. The sense electrodes comprise several groups, two of which co-extend in the x-direction over each different portions of extent in the x-direction. The drive and sense electrodes are additionally arranged to capacitively couple with each other. In use, drive signals are applied to the drive electrodes and then the resultant sense signals received from the sense electrodes measured. The position of a touch or stylus actuation on the sensor is determined in the x- and y-directions as follows. In the x-direction, the position is determined by an interpolation between sense signals obtained from co-extending pairs of sense electrodes, and in the y-direction by interpolation between sense signals obtained from different sequences of drive signals applied to the drive electrodes.

Abstract: The capacitive measuring circuit for a moved elongated test material contains at least two measuring capacitors, each of which is configured for receiving the test material. It further contains electrically actuatable selection means, by means of which one of the measuring capacitors can be selected in such a way that only the selected measuring capacitor contributes to the measurement, whereas the other measuring capacitors do not. As a result, the total capacitance of the measuring circuit is reduced and its sensitivity is increased.

Abstract: A capacitance sense system can include a capacitance sense input configured to receive an input signal that varies according to a sensed capacitance; an integrator/discharge circuit configured to integrate the input signal and discharge the integrated input signal toward the reference level in conversion operations; and a remainder retainer section configured to quantize the discharging of the integrated input signal, and retain any remainder of the integrated input signal that follows a quantization point for a next conversion by the integrator/discharge circuit.

Abstract: A MEMS microphone having an improved noise performance due to reduced DC leakage current is provided. For that, a minimum distance between a signal line of the MEMS microphone and other conducting structures is maintained. Further, a DC guard structure fencing at least a section of the signal line is provided.

Abstract: A capacitance-type occupant detection sensor of the present disclosure detects a vehicle occupant on a seat based on a difference of capacitance between a sensor body and a reference electric potential. The sensor body includes a main electrode and a parallel electrode. The parallel electrode is disposed in parallel with the main electrode with a gap interposed therebetween and has a detection voltage applied thereto. The main electrode and the parallel electrode each have a base material, a first electrode member disposed on the base material, and a second electrode member disposed on the base material to cover the first electrode member, where the second electrode member has an electric conductivity that is lower than the first electrode member. The first electrode member is disposed on a lateral perimeter of the second electrode member to surround a center of the second electrode member.

Abstract: A current sensing circuit includes a current sensing unit, a feedback control unit and a digital output unit. The current sensing unit senses a current and produces a pulse signal according to at least one reference signal and at least one feedback signal. The current sensing unit includes a first capacitor set and a second capacitor set. The current sensing unit selects at least one capacitor in the first capacitor set and at least one capacitor in the second capacitor set according to the current value so as to adjust the precision of the current sensing circuit. The feedback control unit is coupled to the current sensing unit and produces the feedback signals according to a clock signal and the pulse signal. The digital output unit is coupled to the current sensing unit and outputs a digital signal according to the pulse signal.

Abstract: According to one embodiment, a semiconductor device includes an electrostatic actuator including first and second lower electrodes, an upper electrode, and an insulating film provided between the upper electrode and the first and second lower electrodes, the first lower electrode and upper electrode configuring a first variable capacitance element, the second lower electrode and upper electrode configuring a second variable capacitance element, a first fixed capacitance element connected to the first lower electrode, a second fixed capacitance element connected to the second lower electrode, and a detection circuit connected to the upper electrode and configured to detect a charge amount stored in the insulating film.