Abstract: The present idea refers to a needle head, its use in a probe arrangement, and a method for electrically contacting multiple electronic components. The needle head comprises a body with a lower surface, needle electrodes emerging from the lower surface, and multiple outlets arranged in the lower surface. A channel is arranged between an inlet in the body and the outlets for conveying a medium from the inlet to the outlets. By this means, electronic components arranged in close distance under the lower surface of the needle head are directly exposed to the medium which provides a test environment during a test of the electronic components.
Type:
Grant
Filed:
May 19, 2011
Date of Patent:
February 4, 2014
Assignee:
Sensirion AG
Inventors:
Markus Graf, Hans Eggenberger, Martin Fitzi, Christoph Schanz