Abstract: An apparatus for effecting measurements on the geometry of the suspensions of a motor vehicle, to be applied to a vehicle lift, characterised by comprising on at least one runway (4), in a position corresponding with at least one wheel (12, 4 0), a pair of rollers (20, 22; 50, 52) which substantially do not project from the runway surface when at rest, but can be raised to adhere to said wheel (12, 40) on opposite sides of the region of contact with said runway, said pair of rollers (20, 22; 50, 52) being associated with means (26, 36; 42, 68) for causing them to translate, when raised, along the corresponding runway (4).

Abstract: A method is disclosed by which precision alignment of optical fiber to wave-guide or other optical elements can be carried out with an adjustable microstructure in active alignment mode fiber attachment. A microstructure containing three elongated U-grooves can be combined effectively to produce a movable and adjustable V-groove structure, which can be used to achieve sub-micron scale alignment control with zero rotational torque. This device not only makes fiber alignment easy and fast but also maintains the fiber attachment position after alignment and epoxy bonding. Multiple fiber array alignment can be carried out with only a global alignment of two end fibers.

Abstract: An automated system includes improved height sensing. In one aspect, a on-head camera performs the dual functions of fiducial imaging and height sensing using an auxiliary off-axis light source and triangulation. In another aspect, an on-head height sensor is positioned to measure height at a location that is not beneath any nozzles. The sensor provides height information at a plurality of locations over the board, and a height map of the board is created. In yet another aspect of the invention, the above features are combined to provide an on-head camera that images fiducials and measures height at a plurality of locations such that a height map is created.

Abstract: A method and an apparatus for providing nanometer precision motion are provided. According to the invention, a parallel kinematic micromanipulator is formed using at least three kinematic links. The kinematic links may include a high resolution, non-contact encoder to provide position information. Movement of the micromanipulator is effected using piezoelectric linear actuators provided in connection with each of the kinematic links. The combination of a parallel kinematic structure and piezoelectric linear actuators provides a micromanipulator capable of positioning components or instruments with high accuracy or repeatability. In accordance with the present invention, kinematics of three and six degrees of freedom may be provided.

Abstract: A measurement block 10 which moves longitudinally on a road surface includes disk-shaped first, second, and third rollers 11, 12, and 13 having the same outer diameter with a predetermined spacing set therebetween, a first coupling rod 14 which is mounted on rotary shafts of the first and second rollers in a revolving manner, a second coupling rod 15 which has the same length as the first coupling rod and which is mounted on rotary shafts of the second and third rollers in a revolving manner, a distance measurement device 16 which is mounted on the rotary shaft of the first or second roller, and a rotary encoder 18 which is mounted on the second coupling rod to detect an angle between the first and second coupling rods. Each time the measurement block moves by a length between the first and second coupling rods, the angle between the first and second coupling rods is detected by the angle detection means to thereby create a longitudinal profile based on the detected value.

Abstract: A device for measuring alignment of a golf club is provided, and allows measurement of the lie angle and loft angle simultaneously. The strike face of the club is placed against an abutment member that is fixed to a base member, and held in place with a clamping member. An alignment member is coupled to the base member and spaced from the clamping member in generally opposing relation thereto. The alignment member is movable with respect to the clamping member to receive the golf club shaft in a cradle.

Abstract: An adjustable end arm effector alignment system and process is provided. The system includes an arm having a working end and an alignment support in a known location relative to said arm. An adjustable end arm effector including at least two alignment members is attached to one of said working end of said arm and said alignment support. A control system is also provided that is operable to move the working end of the arm into a first and a second alignment position, each permitting appropriate adjustment of the adjustable end arm effector with respect thereto.

Abstract: An alignment tool for assembling a rear plate and a frame of a flat display panel is introduced. The rear plate includes a front surface, a rear surface opposing to the front surface for adhering with the frame in an aligning process, and an alignment mark located at the front surface. The alignment mark has a predetermined thickness and is protruded from the front surface. The alignment tool includes a base, a clamp arm and an upper arm. The base further includes a base top surface and an alignment notch. The base top surface is used for contacting with the front surface of the rear plate and the alignment notch has at least two alignment sides for matching with the alignment mark. The clamp arm is protruded from the base, and the upper arm is protruded from the clamp arm and used for aligning with the frame. The upper arm includes an arm lower surface parallel to and spaced apart from the base top surface by a predetermined distance for forming an open space in between.

Abstract: A longitudinal profile measuring apparatus including a relative distance meter located on a frame supported by more than two wheels in a row in a direction of a measuring line for measuring relative distance to a target surface, a moving distance meter for measuring moving distance of movement along the measuring line on the target surface, and a data processing unit for finding spatial data, which shows a rough profile of the target surface, along the measuring line from the relative distance measured by the relative distance meter.

Abstract: A hole center detecting apparatus for positioning the hole of a spool and a cord accurately by determining the coordinates of two points of intersection between the inner circumference of the spool hole and a virtual straight line to compute the coordinates of the center of the hole and by moving the cord according to the computed coordinates of the hole center. A straightness measuring apparatus for measuring the curvature of a cord automatically by detecting the coordinates of three longitudinal points of the cord. A measurement apparatus for measuring a residual torsion automatically by measuring the rotation angle of the end portion of the cord before and after clamped, electrically.

Abstract: A method for measuring the height variability of a stack of materials comprises placing a stack of materials onto a holder that comprises a base and at least two sides extending from the base such that the stack of materials rests on the base and is generally flush with the sides. A distance of a top of the stack of materials relative to a fixed plane is measured at various locations along the top of the stack of materials. The height variability of the stack is determined based on the measurements.

Abstract: An apparatus and method are provided for determining the position of an elongate member such as a shaft in relation to a vessel in which the elongate member operates. The apparatus includes a mounting component adapted for placement over the open end of the vessel, one or more movable plungers, and one or more transducers that interact with the respective plungers. The plungers and transducers are supported by the mounting component and disposed below the mounting component. Thus, upon placement of the mounting component over the vessel, the plungers and transducers reside within the vessel while permitting the elongate member to be disposed at its normal operating position within the vessel. If the position of the elongate member is offset from a predetermined desired position within the vessel, the plunger is displaced by a certain magnitude that is detected by the transducer.

Abstract: Apparatus for measuring vehicle wheel alignment comprising a yoke having a pair of aligned center pins engageable with a transverse axis in the vehicle; a collimated beam projector connectable to the yoke and adapted to project its beam at right angles to the axis of the center pins, and longitudinally of the vehicle with reference to the transverse axis and a target for the beam so attachable to a wheel of the vehicle that alignment of the wheel can be measured. In one embodiment the target is a mirror and the projector is provided with a transverse scale for measuring the reflected beam. In the other embodiment the target comprises a set of scales hung or clamped to the wheel.

Abstract: The apparatus for the positioning of a measuring device has an annular or arcuate track to which a measuring device is attached. To position the sensing head of the measuring unit radially with respect to the material under test, a crossbeam is provided which supports the measuring device. Bearings are arranged between the track and the crossbeam. In the apparatus for positioning, the position of the crossbeam with the measuring device can be changed in a radial direction to the track with respect to the track.

Abstract: A locating system for an adjustable clamp frame of a molding machine is disclosed. The locating system can be used to repeatably configure the clamp frame to an appropriate perimeter size for a desired mold without the use of measurements or the mold itself. The inventive locating system includes two sets of a first and a second plate, a pair of end locating members, two sets of a first and a second bracket, and a pair of side locating members. The locating members, the plates, and the brackets each include indicia to provide an assembly code that can be used to facilitate configuring the clamp frame.

Abstract: The inside diameter measuring method and apparatus are capable of making accurate measurement. In the inside diameter measuring method of measuring an inside diameter of a cylindrical work by supplying compressed air from one end of the work and by detecting a back pressure of the compressed air, a correction amount of measured value of the inside diameter according to a length of the work is obtained in advance by determining a change of measured value of the inside diameter with respect to a change of the length of the work, whereby the measured value of the inside diameter is corrected according to the length of the work. Thereby, even in the case where a plurality of works having a different length are measured, accurate measurement can always be made.

Abstract: An apparatus and method for aligning a housing such as a flywheel housing with a crankshaft or other rotating member. The apparatus includes a main shaft and a mount by which the main shaft is mounted to the center axis of a member rotating in a housing. A sleeve is received upon and rotates relative to the main shaft and is provided with a mount for a dial indicator. The dial indicator is positioned so that any misalignment between the rotating member and the housing is output by the dial indicator as the sleeve is rotated relative to the housing. Depending upon the output of the dial indicator, the position of the housing is changed relative to the rotating member to align the center axis of the rotating member with the center axis of the housing.

Abstract: A hand-held adjustable scribe block for aiding in the installation of trim around doors and windows includes a first body member and a second body member in a slidable relationship to each other. First body member has a generally planar engagement surface that is in a facing relationship with a generally planar engagement surface on the second body member. First body member includes a longitudinal slot disposed along its longitudinal axis for receiving a pin member to prevent rotation of the first body member relative to the second body member. A locking mechanism, comprising a screw member having an arm member attached thereto, locks the first body member to the second body member to set the longitudinal offset of the two body members. Once set, the user can utilize the scribe block to set the amount of distance the trim is set back from the door jamb or window opening. The first ends of both body members is shaped at a 90 degree angle to facilitate locating the inside corner of the door or window trim.

Abstract: A tool for hanging fascia board includes three parts. A first part consists of a t-bar having two pieces attached perpendicularly together and designed to be removably mounted on the end of a rafter board with the flat elongated member lying against a side wall of the rafter and with a portion of the second perpendicular member overlying the top of the rafter and removably affixed to it through the use of nails driven through openings in the second perpendicular member. A support hanger is pivotably mounted to the t-bar and has a slot sized and configured to slidably receive a fascia board. A depth adjuster is mounted on the support hanger and may be reciprocated and fixed in a desired position to adjust the depth of the slot of the support hanger. Thus, the depth of the slot may be adjusted to facilitate attachment of fascia boards of varying dimensions such as, for example, 2×4, 2×6, 2×8, 2×10, and 2×12.

Abstract: A tool for use by a machinist in testing the accuracy of a workpiece has an edge to be abutted against the workpiece to be tested and an encased light source connected by a plurality of passages extending within the member to conduct light emitted from the source to an array of apertures spaced at intervals in a bevel of the edge. The array of apertures directs the light at the workpiece on one side of the edge so that defects in accuracy are illuminated to the machinist viewing the workpiece from the other side of the edge. Preferably, a plurality of fiber optic cords extend in the passages from the light source to the apertures.

Abstract: A transfer roll 1 for conveying a strip of substantially flat material from one device to another. The strip passes over the transfer roll as the transfer roll rotates. The transfer roll includes a flat and smooth cylindrical outer skin which comprises at least two cylindrical elements. Between the cylindrical elements is arranged a mean 7 for reducing the mechanical stiffness of the cylindrical skin relative to the stiffness of the remainder of the cylindrical skin 2. Suitable means such as a welded joint 9 of reduced cross sectional thickness compared to the remainder of the cylinder are described. Such means separate the cylinder mechanically into a plurality of measurement areas with a predetermined degree of crosstalk. The transfer roll may be used to measure force or tension in strip material more accurately than with previous devices.

Abstract: The flatness measuring equipment can highly precisely measure flatness of a surface of a large-sized planar member, e.g., an abrasive plate. In the equipment, an elongated member is provided above and parallel to the surface of the planar member to be measured. A movable member is provided to the elongated member and capable of moving along the elongated member. A distance sensor, which is provided to the movable member, measures distance between the movable member and the surface of the planar member. A laser beam source emits a laser beam, at a fixed level, toward the movable member. A light receiving sensor detects a variation of a level of the movable member with respect of the fixed level of the laser beam.

Abstract: An alignment tool for fitting a helmet to a wearer's hear and aligning helmet mounted visual display systems to the wearer's eyes in a reproducible manner. The alignment tool includes latch points that are connected to corresponding connection points on the helmet. These connection points are also the connection points for the helmet mounted visual display systems. The alignment tool allows for accurate measurement, alignment and fitting of the helmet to the wearers head based on the special relationship between the connection points and the wearer's eye. Once the helmet is fitted using the alignment tool, the helmet mounted visual display systems are connected to the helmet connection points and the wearer's eyes are substantially aligned for use with the visual display system.

Abstract: An accurate, portable skate blade gauge comprises an extruded body having a blade-receiving recess, a clamping screw for pressing the blade against a side wall of the recess, and a pivoted indicator arm having a base near the pivot for engagement with the blade edge, and a pointer remote from the pivot for indicating squareness of the blade. The pivot is a resilient pin of spring metal disposed in a hole in the gauge body and fixed to the bottom of the hole. A clearance between the pin and the wall of the hole allows the pin to flex when the skate blade is pressed against the base of the indicator. The resilience of the pin ensures that the blade remains in firm contact with the base of the indicator arm to achieve precise and accurate measurements.

Abstract: A portable surface inspector comprises a straight guide rail, a table engaging the guide rail to be movable along the guide rail, a stage engaging the table to be movable in the direction of a transverse axis crossing at right angles with the longitudinal axis of the guide rail, a non-contact displacement sensor fixed to the stage, a first driving means for driving the table, a first coordinate detecting means for detecting the longitudinal axis coordinate of the non-contact displacement sensor, a second driving means for driving the stage, a second coordinate detecting means for detecting the transverse axis coordinate of the non-contact displacement sensor, and a coordinate correcting means for correcting the transverse axis coordinate of the non-contact displacement sensor with the deflection in the direction of the transverse axis of the guide rail.

Abstract: A device and a method for axle alignment, in which an angle between a wheel of a vehicle and a reference direction is determined, the angle being determined using a transducer, which contains at least one rotation speed sensor. The transducer is set so that it assumes a known position with respect to the reference direction. The angle obtained for the transducer arranged on the wheel of the vehicle is a measure of a trail angle or a camber angle of the wheel.

Abstract: A portable surface inspector comprises a straight guide rail, a table engaging the guide rail to be movable along the guide rail, a stage engaging the table to be movable in the direction of a transverse axis crossing at right angles with the longitudinal axis of the guide rail, a non-contact displacement sensor fixed to the stage, a first driving means for driving the table, a first coordinate detecting means for detecting the longitudinal axis coordinate of the non-contact displacement sensor, a second driving means for driving the stage, a second coordinate detecting means for detecting the transverse axis coordinate of the non-contact displacement sensor, and a coordinate correcting means for correcting the transverse axis coordinate of the non-contact displacement sensor with the deflection in the direction of the transverse axis of the guide rail.

Abstract: An automated system includes improved height sensing. In one aspect, a on-head camera performs the dual functions of fiducial imaging and height sensing using an auxiliary off-axis light source and triangulation. In another aspect, an on-head height sensor is positioned to measure height at a location that is not beneath any nozzles. The sensor provides height information at a plurality of locations over the board, and a height map of the board is created. In yet another aspect of the invention, the above features are combined to provide an on-head camera that images fiducials and measures height at a plurality of locations such that a height map is created.

Abstract: The invention relates to a method of and a device for detecting the flatness of a metal band product at high temperature, using a measuring roll (1) having a cylindrical external face (13) comprising an angular contact sector with the band and a free sector.

Abstract: An economical, compact guide for introducing multiple bends in one or more planes in a pipe, conduit, or other tube-like item. The guide has a gauge section rotatably attached to a mounting section and is affixable by means of a non-deforming clamp to the end of a pipe segment to be bent. The gauge section has a bend-angle gauge and a bend-plane level. The bend-angle gauge is a plumb arm mounted so as to measure and indicate the bending of a pipe to any degree of bend. The bend-plane guide is a 360° level mounted on an upper face of the plumb arm. Multiple bends are made in the pipe segment without removing or re-aligning the guide. This ensures that the initial reference position is maintained throughout the bending process and ensures that all bends are in the proper bend-plane, thus avoiding “dogging” between successive bends.

Abstract: A hole center detecting apparatus for positioning the hole of a spool and a cord accurately by determining the coordinates of two points of intersection between the inner circumference of the spool hole and a virtual straight line to compute the coordinates of the center of the hole and by moving the cord according to the computed coordinates of the hole center. A straightness measuring apparatus for measuring the curvature of a cord automatically by detecting the coordinates of three longitudinal points of the cord. A measurement apparatus for measuring a residual torsion automatically by measuring the rotation angle of the end portion of the cord before and after clamped, electrically.

Abstract: A method and portable apparatus to evaluate the planar flatness of a paper sheet comprises a pair of closely spaced horizontal edges secured in relative parallelism. The horizontal edges are separated by about three feet. The horizontal edges define a horizontal reference plane over which a sheet section of paper web is mildly tensioned with the web machine direction of the paper sheet oriented transversely of the edges. Substantially between the horizontal edges but slightly below the horizontal reference by about ⅛ to ½ inch is a comparison line in the form of a wire, for example. A fixture supporting the comparison line provides a plurality of wire-end attachment points. Supporting the horizontal edges are a pair of scissor frames that are held open to a predetermined angle by a compression gusset. Opposite ends of a horizontal edge are secured to respective upper ends of each scissor frame.

Abstract: A measuring roller for determining flatness deviations when rolling metal strip measures the stress distribution, for example, with the aid of force measuring sensors over the width of the strip, said sensors being arranged in recesses in the measuring roller at a distance from the wall of the recess and thus being surrounded by an annular gap. The annular gap is closed off to the outside and connected to axially parallel ducts for the feed and discharge of a coolant.

Abstract: A self-adjusting accessory for a table that includes a guide for sliding in the guide groove of the work supporting table of a table saw and which is biased against the edge of the guide groove which is closest to the cutting table. The guide bar is used in conjunction with the plurality of table saw fixtures such as a miter gauge, an alignment gauge and a stop gauge. The alignment gauge also forms part of apparatus for carrying out a method of verifying the straightness of the labor for the cutting blade the alignment of the arbor relative to the guide groove of the work supporting table and the flatness of the cutting blade. The invention also include an apparatus for adjusting the alignment of the arbor relative to the guide groove of the work supporting table.

Abstract: A longitudinal profile measuring apparatus including a relative distance meter located on a frame supported by more than two wheels in a row in a direction of a measuring line for measuring relative distance to a target surface, a moving distance meter for measuring moving distance of movement along the measuring line on the target surface, and a data processing unit for finding spatial data, which shows a rough profile of the target surface, along the measuring line from the relative distance measured by the relative distance meter.

Abstract: A transfer roll 1 for conveying a strip of substantially flat material from one device to another. The strip passes over the transfer roll as the transfer roll rotates. The transfer roll includes a flat and smooth cylindrical outer skin which comprises at least two cylindrical elements. Between the cylindrical elements is arranged a means 7 for reducing the mechanical stiffness of the cylindrical skin relative to the stiffness-of the remainder of the cylindrical skin 2. Suitable means such as a welded joint 9 of reduced cross sectional thickness compared to the remainder of the cylinder are described. Such means separate the cylinder mechanically into a plurality of measurement areas with a predetermined degree of crosstalk. The transfer roll may be used to measure force or tension in strip material more accurately than with previous devices.

Abstract: Disclosed is a hand held radius alignment tool with an adjustable pointing device, which is pivotally mounted at one end of a single u-shaped rectangular casing for finding the rotational and desired angle from 0 to 90 degrees on the radius alignment tool. The radius alignment tool is positioned on the new piece of tubing and is allowed to slide up and down and rotate around the axis of the tubing. The technician will align the pointing device's centerline to the centerline on an existing piece of tubing while sliding the radius alignment tool up and down and rotating the tool on the new tubing. Once the tubing alignment tool and its pointing device are properly aligned with the existing tubing's centerline, the technician will use the alignment-indexing marks on the tubing's grooved radius block (which is installed in the radius alignment tool) to show where to pencil mark the new tubing. The technician will mark the starting position and the orientation position on the tubing.

Abstract: A yoke straightening fixture adapted to engage the ears of a yoke shaft which is in turn attached to an axle shaft. The fixture has a longitudinal extending central bore to facilitate an aligned rotatable connection to a connecting member of a straightening device. The fixture comprises a pair of opposing recesses configured to receive and retain opposite ears of the yoke which is in turn attached to the shaft to be straightened. The opposing recesses are dimensioned to align the shaft with the fixture and consequently align the shaft with the straightening device. Two pairs of opposing recesses may be employed in a single fixture to facilitate connection to different size yokes. A front projection member is also formed to penetrate the yoke. The projection member is dimensioned to snugly fit between the ears of the yoke to form a positive aligned connection between the shaft and straightening device.

Abstract: A grinding machine includes a swing-arm mounted to pivot on a frame, a lens-holder shaft which is mounted to rotate on the swing-arm about a rotation axis parallel to the pivot axis of the swing-arm, and on which a calibration template can be mounted, and a tool-holder shaft which is mounted to rotate on the frame at a distance from the pivot axis of the swing-arm and on which a machining tool can be mounted. A method of calibrating the machine includes an approach phase during which the swing-arm, which is fitted with a calibration template, is moved toward the tool-holder shaft, which is equipped with a machining tool. The approach phase is interrupted as soon as contact is detected between the calibration template and the machining tool. Applications include machines for grinding ophthalmic lenses.

Abstract: An alignment system includes a laser transmitter and receiver. The receiver includes a linear photodetector array centered at a predetermined location with respect to machined surfaces that define a receiver reference plane. An indicator on the receiver displays a deviation of the position of the laser beam from a predetermined location on the photodetector array thereby to quantify any misalignment of a surface supporting the receiver with respect to the transmitted laser beam.

Abstract: Laser alignment methods and apparatus are disclosed whereby pipe and similar materials may be aligned. The methods and apparatus are adapted to be utilized on the end of pipe or other material and thereby using as a reference point that pipe or other material with the reference beam generated by the laser providing a center reference point from the pipe on which the laser is mounted. In a preferred embodiment, the laser apparatus mounting is threaded so as to be used in mating relationship with the ends of complimentarily threaded pipes. Another preferred embodiment utilizes caps of various sizes, adapted to be placed on a pipe end, with mounting means for the laser.

Abstract: A flatness measuring apparatus is adapted to measure the flatness of the surface of a plate-shaped object such as a disk in a non-contact fashion. A disk is removably held by a measuring table, with the projection of the measuring table engagedly received in a central through hole of the disk. A plurality of eddy current undulation sensors are arranged in a sensor head that is arranged so as to be able to linearly move back and forth along the measuring table. Said eddy current undulation sensors generate an eddy current in said disk and detect any undulation on the surface of said disk. A flatness map is produced for the surface of the disk based on a signal representing the position of the sensor head and on signals from the eddy current undulation sensors, and then is output to a display and/or a printer.

Abstract: Apparatus for measuring vehicle wheel alignment comprising a yoke having a pair of aligned center pins engageable with a transverse axis in the vehicle; a collimated beam projector connectable to the yoke and adapted to project its beam at right angles to the axis of the center pins, and longitudinally of the vehicle with reference to the transverse axis and a target for the beam so attachable to a wheel of the vehicle that alignment of the wheel can be measured. In one embodiment the target is a mirror and the projector is provided with a transverse scale for measuring the reflected beam. In the other embodiment the target comprises a set of scales hung or clamped to the wheel.

Abstract: A combination leveling and edge trimming tool for use during the application of a wallpaper material to a wall surface. The tool includes a substantially thin and elongate planar shaped body having a first face and a second face as well as a first end and a second end. A bottom face of the body extends between the first and second faces and first and second ends and is suitable for receiving an elongate and substantially rigid blade edge suitable for use in leveling and adhering the wallpaper material to the wall surface. First and second level indicators are incorporated within the body and are operable about respective first and second rotating planes. A non-slip gripping material is secured to a selected first or second face and, upon orienting the tool at a specified angle relative to the wall surface, provides a secure engagement to permit trimming of excess wallpaper material.

Abstract: An alignment fixture that may be used to align the components of a wafer etching machine. The fixture includes a base supporting at least one first alignment guide and a plurality of second alignment guides. The components to be aligned using the fixture may include inner and outer concentric rings. The outer ring may include one or more first position locator guides that are matched with the first alignment guide to establish a known positional relationship with the base. The inner ring may include one or more second position locator guides that are matched simultaneously with one or more first position locator guides and the second alignment guides to establish a known positional relationship between the outer ring and the inner ring. The outer and inner ring may be secured together in the established positional relationship using a conventional fastening means known in the art.

Abstract: A self-adjusting accessory for a table saw that includes a guide for sliding in the guide groove of the work supporting table of a table saw and which is biased against the edge of the guide groove which is closest to the cutting blade. The guide bar is used in conjunction with the plurality of table saw fixtures such as a miter gauge, an alignment gauge and a stop gauge. The alignment gauge also forms part of apparatus for carrying out a method of verifying the straightness of the arbor for the cutting blade, the alignment of the arbor relative to the guide groove of the work supporting table and the flatness of the cutting blade. The invention also includes an apparatus for adjusting the alignment of the arbor relative to the guide groove of the work supporting table.

Abstract: A fixture and method for providing accurate and repeatable alignment and attachment of a semiconductor wafer to a corner cube exposure fixture includes a vacuum-assisted wafer holder of rectangular shape. The wafer holder is first placed upon an L-shaped loading fixture so that a wafer may be positioned against the front surface of the holder and manipulated until the pair of wafer flats abut each leg of the L-shaped fixture. When so aligned, a vacuum is applied to secure the attachment and alignment of the wafer vis-à-vis the wafer holder. The wafer holder is thereafter inserted in a corner cube exposure fixture, where the fixture is formed to include a right-angle bracket with alignment features formed in one leg of the angle. The wafer holder also includes alignment features in its bottom surface, where these features are formed to mate with the bracket upon attachment.

Abstract: A method for, without contact and with the aid of a measuring device, measuring in connection to an envelope surface of a measured object with respect to its cylindricity and/or its straightness relative to a straightness reference arranged parallel with the axis of rotation of the measured object, which measuring device besides said straightness reference comprises a measuring stand and a measuring carriage at which at least one measuring means is arranged, which measuring carriage is traversed along a support member parallel to said axis of rotation.

Abstract: A calibration tool for calibrating the leveling and tilting of a wafer transporting blade and a method for using such tool are provided. The calibration tool is constructed by a body portion and a leg portion each having a surface that are provided with a multiplicity of calibration lines facing each other such that a two-dimensional calibration can be performed on a blade simultaneously by positioning the blade between the body portion and the leg portion. The capability of measuring a plane, i.e., leveling and tilting, simultaneously is a great benefit made possible by the present invention method and apparatus.

Abstract: An apparatus and method for surface profile measurements of large samples. The sample is held by a stationary chuck, while a four-axis (X, Y, Z and theta axis) positioning assembly manipulates and positions an overhead scan assembly and measurement stylus to perform the profilometry. To observe the sample surface in the vicinity of the measurement stylus, an illumination and imaging capability is also provided. Backlash and error are reduced in the Z axis assembly through use of cams and cam followers, and in the scan assembly through use of multiple tensioned wires, with low-friction sliding elements. The apparatus reduces vibration and supports heavy (up to 400 kg) samples while allowing accurate profile measurements.