Abstract: A device for measuring the radius of curvature of a surface comprises a main body that is held above the surface being measured; and a non-contact sensor mounted to the main body that measures a distance between the surface being measured and the sensor, the device calculating the radius of curvature of the surface based on the measured distance. The device can further include a display mounted to the main body that displays the calculated radius of curvature. The non-contact sensor can be, for example, an acoustical distance sensor or an optical distance sensor. In one embodiment, the device includes two arms extending from the main body of the device and being substantially symmetric about the non-contact sensor, the arms terminating in contact points that make contact with the surface being measured.

Abstract: A slider holding a measuring tool moves along an approximately reverse U-shaped guide rail provided in parallel with a moving direction of the measuring tool without being rotated. Accordingly, a cross section of the guide rail can be enlarged without increasing the size of the entirety of a drive unit. As a result, high rigidity can be obtained while reducing the size and weight of the drive unit as compared to a conventional arrangement having two shafts. Further, linearity of the slider and the measuring tool moving along a reference surface of the guide rail can be attained with high accuracy. Further, since a pre-load means for biasing the slider toward a guide rail is provided, a position or orientation of the slider and the measuring tool can be stabilized, thus securely repeating movement of the measuring tool.

Abstract: A micro-geometry measuring device capable of reducing measuring force thereof for avoiding damage on micro-geometry of workpiece surface and measuring at a high-speed is provided. The micro-geometry measuring device has a stylus mechanism having a stylus mechanism provided to an arm and having a stylus body, a measuring force adjusting mechanism for adjusting a measuring force working between the stylus body and the workpiece, a displacement sensor for detecting a position of the arm, and a measuring force controller for controlling the measuring force adjusting mechanism. The stylus mechanism includes a vibrator for resonantly vibrating the stylus body, and a detector for detecting vibration status changing when the stylus body touches the workpiece. The change in vibration of the stylus body vibrated by the vibrator is directly detected by the detector and a signal therefrom is fed back to the measuring force controller to keep constant measuring force working between the stylus body and the workpiece.

Abstract: A surface-tracking measuring machine is provided, in which measurement range is enlarged while keeping a measuring force, responsivity, resolution thereof. For the object, the surface-tracking measuring machine has a frame (10), a probe (11) swingably supported by the frame (10) and having a tracer (15) at an end thereof, a measuring force controller (21) for controlling the measuring force applied to the probe, a displacement detector (31) for detecting a displacement of the probe, a measuring force detector (41) for detecting the measuring force applied to the probe, and a controller (51) for comparing a measuring force detected value detected by the measuring force detector and a previously commanded measuring force command value and to control the measuring force controller so that the measuring force detected value is equal to the measuring force command value.