Abstract: A remotely operated device for inspecting and/or cleaning a subsea flexible pipe joint comprises a support assembly. In addition, the device comprises a tool positioning assembly coupled to the support assembly. The tool positioning assembly includes a rotating member disposed about a central axis. The tool positioning assembly is rotatable relative to the support assembly about the central axis. Further, the device comprises a cleaning assembly including a cleaning device adapted to clean the flexible pipe joint. The cleaning device is axially moveable relative to the rotating member. Still further, the device comprises a clamping assembly coupled to the support assembly. The clamping assembly has an open position disengaged with the section of the flexible pipe joint and a closed position engaging the section of the flexible pipe joint.

Abstract: An active vibration isolator including a movable stage provides good vibration isolation performance. An active vibration isolator includes: a stage moving under thrust to position a mounted object; a vibration isolation table supporting the stage; a servo valve imparting, to the vibration isolation table, a control force that reduces vibrations of the vibration isolation table; a position/thrust obtaining unit obtaining a position of the stage on a movement track and the thrust actually applied to the stage with movement of the stage; and a vibration control FF control unit performing feed-forward control of the servo valve, based on what is obtained by the position/thrust obtaining unit, to allow the servo valve to generate a control force commensurate with vibrations of the vibration isolation table caused by the movement of the stage.

Abstract: Provided are a workpiece holding apparatus capable of detecting lateral displacement of a workpiece (w) in a planar direction, and a method of detecting lateral displacement of a workpiece (w) with use of the workpiece holding apparatus. The workpiece holding apparatus, which is configured to hold the workpiece (w), with an adhesive pad (2) mounted on a support plate, includes: a capacitance measuring device (5) including an electrode pair formed of first and second electrodes (3a, 3b) and arranged at least at a part of a position corresponding to a peripheral edge portion of the workpiece (w), the capacitance measuring device (5) being configured to measure capacitance of the electrode pair; and a comparator circuit (6) configured to compare the measured capacitance with a predetermined reference value, to thereby detect lateral displacement of the workpiece (w) in a planar direction of the support plate (1).

Abstract: The present invention relates to a planar 3-DOF (degree of freedom) stage, which includes: a transitional manipulator section having parallel 2-DOF; a rotation manipulator section having rotation 1-DOF so as to carry out motion independently from the transitional manipulator section; and a stage base mounted with the transitional manipulator section and the rotation manipulator section and having a fixing section inside and a driving section outside. According to the planar 3-DOF stage, transitional motion and rotational motion are independently carried out so that it is possible to reduce motion errors and simplify control and design.

Abstract: An apparatus and method for efficient cutting and shaping of radiused cuts in materials. The apparatus provides a lower pivot shaft base secured to a cutting table and an upper pivot bushing secured to a workpiece. The lower pivot shaft base and upper pivot are shaped and sized to mate with one another, thus fixing the position of the workpiece while allowing rotation about a common axis.

Abstract: A mechanical device for maintaining parallelism includes first, second, third and fourth bars. The first side surface of the first bar and the first side surface of the second bar are bridged by a first flexure, leaving a gap between the bottom surface of the first bar and the upper surface of the second bar; the second side surface of the second bar and the second side surface of the third bar are bridged by a second flexure, leaving a gap between the bottom surface of the second bar and the upper surface of the third bar; and the first side surface of the third bar and the first side surface of the fourth bar are bridged by a third flexure, leaving a gap between the bottom surface of the third bar and the upper surface of the fourth bar.

Abstract: A system for positioning an object includes a base and a platform for detachably retaining the object. A first linear actuator is pivotably coupled to a first pivot axis of the platform and a first pivot axis of the base. A second and a third linear actuator are pivotably coupled to a second pivot axis of the base and the first pivot axis of the platform. A fourth linear actuator is pivotably coupled to the second pivot axis of the base and a second pivot axis of the platform. The first, second, third and fourth linear actuators being selectably adjustable in length to position the platform at a select position about a predetermined arc of travel.

Abstract: A surface texture measuring instrument includes: a measuring device that includes a detector for detecting surface texture of a workpiece and an X-axis movement mechanism for moving the detector in a measurement direction; an elevation inclination adjuster capable of adjusting an elevation position and an inclination angle of a table on which the measuring device is mounted; a stage on which the workpiece is mounted; and a controller that controls the measuring device and the elevation inclination adjuster. The controller includes: a measurement controller that controls the X-axis movement mechanism to conduct a preliminary measurement and main measurement of the workpiece; a computing unit that acquires a result of the preliminary measurement from the detector and obtains an inclination angle of the workpiece at which the workpiece is inclined to the measurement direction; and a positioning controller for adjusting the inclination angle of the table based on the obtained inclination angle.

Abstract: The invention relates to a positioning system for positioning and/or measuring a movable object, wherein the movable object (10) has an object position that is defined with respect to a at least two axes (X, Y) extending in at least two different directions. The movable object (10) has a first surface (SX) and a second surface (SY) having mutually different orientations. The first surface (SX) makes a first angle (?) with the first direction and the second surface (SY) makes a second angle (?) with the second direction.

Abstract: Described are flexure-based high precision positioning stages. The stages are constrained to motion along each axis by a system of symmetrical flexure linkages. The linkages may be formed of link coupled by flexure joints. Magnetic linear servomotors may provide motive force for the stages. In some embodiments, the stages may have no frictional contact joints.

Abstract: An exemplary device (27) for adjusting angle of a base plate (2710) includes: two side walls (21) being parallel to and spaced apart from each other, each of the side walls including a pivot hole (217); a base plate disposed between the two side walls and pivotally attached to the side walls via the pivot axles; and a plurality of magnetism members (211, 212 and 2715) disposed on the base plate (2710) and the side wall. The magnetism members configures for holding the base plate stably in a starting position and further configures to allow the base plate to be displaced from the starting position by manual pressure applied to the base plate, such that a tilt angle of the base plate relative to the two side walls is adjustable up or down as desired. An exemplary apparatus (2) for testing display modules using the angle adjusting device is also provided.

Abstract: An improved sine vise that overcomes the deficiencies and limitations of conventional sine vises through the use of the following features: a circular sawtooth ratchet quick clamping system; a rotating dual jaw with one V cut depression face; a set of extended opening upper jaw lips; angle adjustment stays with counter rotating locking screws; a T shaped jaw clamping drawbar; a zero tolerance roll hinge; and a lipped vise base adapted for robust clamping to the cutting tool table with conventional T slot bolts and dogs.

Abstract: The invention relates to a positioning system for positioning and/or measuring a movable object, wherein the movable object (10) has an object position that is defined with respect to a at least two axes (X, Y) extending in at least two different directions. The movable object (10) has a first surface (SX) and a second surface (SY) having mutually different orientations. The first surface (SX) makes a first angle (?) with the first direction and the second surface (SY) makes a second angle (?) with the second direction.

Abstract: A motorized leveling stage capable of adjusting the angular position of a work piece relative to a reference plane includes an upper stage, a lower stage, and a hinge coupling corresponding edges of the two stages together for relative pivotal movement of the stages. A first spring pivotally biases the upper and lower stages toward each other about the axis of the hinge. A slide is disposed for sliding movement on an upper surface of the lower stage in a direction generally perpendicular to the hinge axis. The slide includes an upper surface defining an inclined plane disposed in sliding abutment with a lower surface of the upper stage such that movement of the slide toward and away from the hinge respectively raises and lowers the upper stage relative to the lower stage. A motorized drive assembly is operable to control movement of the slide relative to the hinge.

Abstract: A method for manufacturing a turbine nozzle assembly using a fixture including a biasing mechanism. The method includes moving the biasing mechanism from a biased first position to a second position using at least one of hydraulic, pneumatic, and electrical power, positioning at least one datum of the turbine nozzle assembly adjacent at least one datum location point on the fixture, and aligning the turbine nozzle assembly at least one datum with the at least one datum location point by releasing the biasing mechanism such that the biasing mechanism moves from the second position into contact with the turbine nozzle assembly.

Abstract: A precision motion transducer is provided in the present invention. The precision motion transducer is provided with a first elastic body. An end of the first elastic body is connected to an end of a second elastic body, while the other end of the second elastic body is fixed to a base via a fixing means. A motion input means is connected to the other end of the first elastic body for inputting motion inputs, while a motion output means is provided at a location where the first elastic body is connected with the second elastic body for outputting motion outputs. The modulus of elastic of the first elastic body is smaller than the modulus of elastic of the second elastic body, whereby relatively large motion inputs can be converted to more precise and finer motion inputs, so as to attain precise positioning control.

Abstract: An exemplary height-adjusting device (10) includes a base (12), a sliding block (14) and at least one fixing member (18). The base has a sliding slot (122) defined therein and a first sidewall (123), a second sidewall (124), a third sidewall (125), and a fourth sidewall (126) surrounding the sliding slot. At least one fixing hole (1232) defined in the first sidewall. The at least one fixing hole communicates with the sliding slot. The sliding block is slidably received in the sliding slot and partly protruding outwardly from the sliding slot. At least one fixing member cooperates with the at least one fixing hole to selectively fix the sliding block in the base.

Abstract: For determining a space coordinate of a measurement point on a measuring object, the measurement point is approached with a probe head arranged on a displacement mechanism having at least two supports movable parallel to one another. Each support is moved by its own drive. The space coordinate of the measurement point is determined as a function of the respective displacement position of the supports. The two drives are controlled by a common regulator.

Abstract: An example pivot plate leveler includes a first plate having one of a protrusion and a cavity and a second plate having the other of the protrusion and the cavity. The first plate is pivotable with respect to the second plate to provide a level surface. An appliance is received on the level surface. In one example, the protrusion and the cavity are spherical. The protrusion is at least partially received within the cavity to provide a pivotable connection between the first plate and the second plate.

Abstract: A flexure carriage assembly (24) has a carriage (25) formed of a substantially rigid material. The carriage has four elongate columns (32A, 32B, 32C, 32D) arranged spaced apart and parallel to one another. Each of the elongate columns has first and second ends. The flexure carriage (25) has four first cross members disposed between adjacent pairs of elongate columns and arranged to interconnect the first ends. The flexure carriage also includes four second cross members (38A-D) arranged between adjacent pairs of elongate columns and arranged to interconnect the bottom ends. The elongate columns and first and second cross members define a three-dimensional rectangular structure. The flexure carriage also has disposed centrally between the four elongate columns a translating section (29) spaced equidistant between the first and second ends of the columns.

Abstract: A pin array includes a plurality of pins arranged in an array; and one or more flexible tubes in contact with each of the pins such that, when pressurized, each of the flexible tubes applies pressure to sides of the pins to prevent further movement of the pins. A method of locking a pin array that includes a plurality of pins arranged in an array; and one or more flexible vessels in contact with each of the pins, the method comprising controlling a pressure of a fluid in the flexible vessels to selectively allow or prevent movement of the pins with respect to the flexible vessels.

Abstract: Determination of the actual position of the rotation axis of a transportation mechanism relative to a reference axis, in particular relative to gravity, is performed with at least one inclination sensor mounted to the transportation mechanism having at least one measurement axis, and comprises the measurement of the inclination of at least the one inclination sensor along the at least one measurement axis in a first rotation position of the transportation mechanism, and the measurement of the inclination of the at least one inclination sensor along the at least one measurement axis in a second rotation position. The actual position of the rotation axis of the transportation mechanism may be determined from the measurement values of the inclination sensor and the angular separation between the rotation positions. The process is suitable in particular for a process to align the rotation axis of a transportation mechanism and for a process for replacing a transportation mechanism.

Abstract: Laser interferometers and high-quality linear encoders both are competitive linear measurement systems used in high-precision machines. Plane laser interferometry allows measuring to a target that moves perpendicular to the measurement direction and to set up the laser beam in line with the functional point. In this way, a stacking of measurement systems can be avoided and a measurement configuration complying with the Abbe principle can be configured. On the other hand, laser interferometry is known to be sensitive to environmental changes. High-quality linear scales are used as an alternative. A disadvantage of linear scales is that the target is only allowed to move along the measurement axis. For targets translating in more than one direction with a range over several millimeters, this leads to a simple stacking of several linear scales together with the supporting slides. This indirect way of measuring introduces errors and partially destroys the accuracy provided by modern linear scales.

Abstract: This invention refers to a device that has a direct applicability in the oil industry, detecting on a prevention basis, failures that may be externally visualized on the walls of the risers. Externally coupled to a pipe in free catenary, called riser, the device involves such a pipe in its entire perimeter and allows for the making of non-destructive inspections of several natures concurrently, while the device moves along all its extension. The device moves along the riser downwards and upwards by a combination of gravity, buoyancy, thrusters and action of expansion of gases.

Abstract: A metrology system comprises a support structure, a fixture having a bottom surface resting on a surface of the support structure and moveable relative to the support structure, and a first measurement assembly for interacting with a workpiece held by the fixture to measure a characteristic of the workpiece. One of the bottom surface of the fixture and the surface of the support structure comprises sapphire, and the other of the bottom surface of the fixture and the surface of the support structure comprises a metal.

Abstract: A disc centering device includes a base plate, a chuck which is installed on the base plate, a hub unit which is detachably engaged to the chuck and receives discs to be stacked, disc pushers which are slidably provided outside the hub unit and include corresponding pressure members which center the discs by pushing circumferences of the discs, and a driving unit which slides the disc pushers simultaneously. Accordingly, as the accuracy of centering the discs is improved, discs with data recorded thereon having a uniform quality can be obtained. Additionally, vibration of a rotation body can be minimized due to the simple configuration the disc centering device. Therefore, in view of the simplified maintenance and repair of the disc centering device, the productivity and manufacturability of HDDs can be improved.

Abstract: What is described is a pre-mounting system for pre-mounting a structural part to an attachment surface, wherein at least two heads, respectively provided as eccentrics, are provided at the attachment surface, the structural part comprises at least one recess and can be hung up on the attachment surface by said heads engaging said recess/recesses.

Abstract: A metrology system comprises a support structure, a fixture having a bottom surface resting on a surface of the support structure and moveable relative to the support structure, and a first measurement assembly for interacting with a workpiece held by the fixture to measure a characteristic of the workpiece. One of the bottom surface of the fixture and the surface of the support structure comprises sapphire, and the other of the bottom surface of the fixture and the surface of the support structure comprises a metal.

Abstract: An XY stage module, a storage system including the same and a method for facating the XY stage module are provided. The XY stage module includes: a base; an XY stage horizontally moving above the base in a first direction and a second direction that is orthogonal to the first direction; a supporting unit disposed at the base for elastically supporting the XY stage; a stiffener for preventing the XY stage from being rotated; and a position sensor having a movable comb-shaped structure disposed at one side of the stiffener and having at least one movable comb and a fixed comb-shaped structure fixed on the base and having at least one fixed comb meshed with the movable comb to be separated at a predetermined gap for measuring a movement of the XY stage in the first direction and the second direction.

Abstract: A test table for measuring lateral forces and displacements while simultaneously applying, if necessary, normal forces, particularly in nanoidenters and in scratch and wear testers. The test table is mounted in a manner that enables it to be laterally displaced, and the lateral force and displacement can be determined by means of a measured-value acquisition. The test table is fixed between at least two vertically upright leaf springs, which can be laterally deflected in the direction of the lateral (horizontal) motion of the test table to be effected.

Abstract: A small-scale positioning device employing a platform, a levering mechanism and a floating actuator device. The platform is movably attached to a fixed frame by a lever, a pair of levers, or more. The floating actuator device is coupled between at least one lever and the platform. When the actuator device is activated, it generates a force on the platform and an equal but opposite force on the levering mechanism, causing one or more levers to rotate around their respective fulcrums, thereby controlling the position of the movable platform relative to the fixed frame. The amount of displacement of the platform is dependent upon the effective expansion or contraction of the actuator device and the lever ratio. If the pair of levers are symmetrical, then motion is created in only a single degree of motion. Flexures may be included to prevent motion in unwanted directions.

Abstract: The invention provides a circularity and cylindrical shape measuring device that can decrease the measurement errors generated due to the weight of a measured workpiece.

Abstract: An apparatus for supporting a platform (84) relative to a base (82), has first, second, and third flexible shaft couplings (80). Each flexible shaft coupling (80) is mechanically coupled between the platform (84) and the base (82). Each flexible shaft coupling (80) has a rigid intermediate member (12) and a platform coupling (104) with a plurality of folded sheet flexures (20). Each folded sheet flexure (20) is coupled to the rigid intermediate member (12) on one side of a fold (36) and coupled to the platform (84) on the opposite side of the fold (36). Each flexible shaft coupling (80) also has a base coupling (102) with a plurality of folded sheet flexures (20) wherein each folded sheet flexure (20) is coupled to the rigid intermediate member (12) on one side of a fold (36) and coupled to the base (82) on the opposite side of the fold (36).

Abstract: A planar positioning system having a rigid base, and first and second linear actuator means mounted to the rigid base, the first and second linear actuator means being arranged orthogonal to one another. A rigid reference surface (2A, 2B) is mounted to the base, (1) and a moveable platform (17) for holding a workpiece is supported for movement on the rigid reference surface (2A, 2B). First and second guiding means are coupled to moveable portions of the respective first and second actuator means, the first and second guiding means being arranged to bear on the moveable platform for transmission of forces thereto from the respective first and second actuator means to effect movement of the platform (17) on said rigid reference surface (2A, 2B). The first actuator means may comprise two linear actuators (4A, 4B) parallel to one another and spaced apart with the second linear actuator means (8) orthogonal thereto and arranged in an H-shaped configuration.

Abstract: This invention relates to a stage device which is moved with high accuracy in an X-Y direction and a rotating direction using a planar motor. The invention is aimed at reducing the size of the stage device and at performing accurately measurement of a position of the stage to the base. The stage device comprises a scale unit having a scale part on the entire plane of the base, and three two-dimensional angle sensors disposed on a bottom surface of a movable stage part. The scale unit and the two-dimensional angle sensors form a surface encode. A position of the movable stage part is measured by the surface encoder.

Abstract: A stage apparatus may include a first stage, a second stage movable with respect to the first stage, at least one flexure hinge to connect the first stage with the second stage, a plurality of actuators provided between the first stage and the second stage to push the first stage and the second stage and to be symmetric with respect to a center of the first stage and the second stage, and a controller to control the plurality of actuators to move one of the first stage and the second stage with respect to the other one of the first stage and the second stage. Thus, a position error of the stage can be reduced, which enables an ultra precision position control. Further, a piezoelectric driver using piezoelectric elements may be used as the actuator to decrease the position error more than a conventional driver such as a motor. The position error may be decreased to ±10 nm.

Abstract: The invention relates to a holder for test objects, which are composed of at least two targets and at least one connecting element, comprising at least one carrier, at least one guide, which is arranged on or/and in the at least one carrier, and seats for the targets of at least one test object, wherein at least one seat can be moved along the at least one guide such that an adaptation of the position of the at least one movable seat to the position of one target of the test object is possible. Furthermore, the invention relates to a test object for the holder previously mentioned, comprising at least two targets and at least one connecting element, wherein the targets and connecting elements can be selected from a given set of single targets and single connecting elements and combined to form a test object.

Abstract: A work piece holder includes a base plate, a slide plate, a rotary indexing device, a support assembly, a spindle, and a pallet receiver. The slide plate is manually slidable over the base plate between a plurality of predetermined positions. The rotary indexing device is affixed to the slide plate, and has the support assembly secured thereto and rotated thereby into a desired angular orientation about a first axis of rotation. The spindle is secured to the support assembly, and defines a second axis of rotation that is generally perpendicular to the first axis of rotation. The spindle is manually rotatable about the second axis of rotation between a plurality of predetermined rotary positions. The pallet receiver, which is secured to the spindle and is rotatable therewith about the first and second axes, is adapted to releasably receive a pallet to which a work piece is mounted.

Abstract: An apparatus and method for precise angular positioning of an object. A first pivot arm and a second pivot arm each is pivotally mounted with respect to a base. A pivot base flex member is operatively connected to the first pivot arm and allows the first pivot arm to pivot with respect to the base, within a particular plane. A second pivot base flex member is operatively connected to the second pivot arm and allows the second pivot arm to pivot with respect to the base, and also within either the same plane or a different plane as the plane within which the first pivot arm pivots. Support structures maintain each of the first pivot arm and the second pivot arm within the particular plane or planes. An interconnect flex member connects the first pivot arm and the second pivot arm. With a relatively small base and thus overall apparatus, an input movement, such as a linear input of about 10 mm can be translated into an output movement of about 7200 radians.

Abstract: A mechanical support device for assisting individuals in setting up, creating, and verifying concentricity and roundness of a step cylindrical feature. The mechanical support device comprises a base and an adjustable section that is removably coupled to the base. The angle present in a groove located between the base and the adjustable section is designed to be either sixty, ninety, or one hundred twenty degrees. Items that are designed to be concentric with extremely low standards for variance would be placed flat within the groove and hand-rotated to check for any variance present. The mechanical support device can alternatively be used as a planer gage.

Abstract: A 3-axis straight-line motion stage and a sample test device using the same for supporting a predetermined sample, and comprising X-axis, Y-axis and Z-axis stages for moving the sample independently and precisely in the direction of the X-axis, the Y-axis or the Z-axis of rectangular coordinates.

Abstract: A flexure carriage assembly (24) has a carriage (25) formed of a substantially rigid material. The carriage has four elongate columns (32A, 32B, 32C, 32D) arranged spaced apart and parallel to one another. Each of the elongate columns has first and second ends. The flexure carriage (25) has four first cross members disposed between adjacent pairs of elongate columns and arranged to interconnect the first ends. The flexure carriage also includes four second cross members (38A–D) arranged between adjacent pairs of elongate columns and arranged to interconnect the bottom ends. The elongate columns and first and second cross members define a three-dimensional rectangular structure. The flexure carriage also has disposed centrally between the four elongate columns a translating section (29) spaced equidistant between the first and second ends of the columns.

Abstract: A plain surface stage apparatus includes a platen having a plain surface, stationary type supports comprising at least three supporting members, and displacement type supports, each of which supports the platen and forms a displacement type supporting point at a position other than those of supporting points formed by the stationary type supports, wherein the displacement type supports expand and contract in a direction perpendicular to the plain surface of the platen so as to be displaced, and holds a selected displaced state of the displacement type supports.

Abstract: A goniometer includes a base, a compound member supported by the base, a light-directing element operably mounted on the compound member, optically connected to a coherent light source, and disposed toward an optical filter, a first actuator disposed along a first axis and operably coupled to the base for translating the light-directing element along a first arcuate path disposed in a first plane; and a second actuator disposed along a second axis and operably coupled to the compound member for translating the light-directing element along a second arcuate path disposed in a second plane, wherein the first plane is orthogonal to the second plane, and wherein the first and second axes are co-planar, for directing coherent light at an angle that is normal to the optical filter.

Abstract: A method enables a component to be secured for inspection. The method comprises providing a tool including a first clamping member and a second clamping member coupled to a guide rail assembly, fixedly securing the first clamping member to the guide rail assembly, slidably coupling the second clamping member to the guide rail assembly such that the second clamping member is substantially parallel to the first clamping member, and securing the component within the tool between the first and second clamping members such that the first and second clamping members are fixedly secured in position with respect to the guide rail assembly.

Abstract: A microscopic positioning device having machine rigidity and being capable of achieving nano-order positioning accuracy and a method of compensating tool position and orientation. A driving unit comprises two piezoelectric elements P1 and P2 arranged into alignment along an expanding/shrinking direction. Both ends of the piezoelectric element P1, facing in the expanding/shrinking direction, are fixed to a base member and a movable member, respectively. The other piezoelectric element P2 is fixed to the base member only at one end. A gap L is formed between the piezoelectric element P2 and the movable member. Where expanding displacement amounts of the piezoelectric elements P1 and P2 are a1 and a2, respectively, voltage applied to the piezoelectric elements P1 and P2 is so controlled to satisfy an equation, a1+a2=a?L. It is possible to position the movable member at a position within a maximum stroke a in the nano-order.

Abstract: The body tool has a rectangular shape with two projections and a central passage for a Pinewood Derby® car body. The holes in one projection align with the other projection. A child places a car body into the passage so the kerf for an axle aligns with the holes in the projections. Alternately, the body alignment tool has two jaws upon a threaded rod closed by a wing nut that grasp a car body. The child then drills through the holes and the car body to straighten the kerf to accept an axle. The child then removes the car body from the body tool and inserts an axle into the new kerf.

Abstract: An apparatus provided with wedge-shaped elements is proposed for the precision positioning of objects 37 to be measured or machined. A wedge-shaped translational body 32 is carried by two bearing wedges 24, 26. In accordance with the invention the wedges can be independently translated in the x direction. The body is translated in the z direction by moving the bearing wedges over an equal distance but in opposite directions. The body is translated in the y direction by moving the bearing wedges over an equal distance in the same direction. The mutually moving parts of the apparatus are carried by means of fluid bearings. A high precision is thus obtained, because fewer errors due to non-infinite stiffnesses and error motions are accumulated. A laser measuring apparatus 74, 38, 40 is used for measuring and adjusting the position of the object carrier 35.

Abstract: An apparatus for supporting a combined substrate structure, comprising first and second substrates combined, includes: level-adjustable supporting mechanisms for supporting plural supporting points of a bottom surface of the combined substrate structure; a level-detecting system for detecting respective levels of corresponding points of a top surface of the combined substrate structure to the plural supporting points of the bottom surface; and a control system for receiving the detected levels from the level-detecting system and for controlling the plurality of level-adjustable supporting mechanism in respective level-adjustment operations in accordance with the detected levels.

Abstract: A precision positioning device is provided. The precision positioning device comprises a precision measuring/vibration isolation mechanism. A first plate is provided with the precision measuring mean secured to the first plate. A second plate is secured to the first plate. A third plate is secured to the second plate with the first plate being positioned between the second plate and the third plate. A fourth plate is secured to the third plate with the second plate being positioned between the third plate and the fourth plate. An adjusting mechanism for adjusting the position of the first plate, the second plate, the third plate, and the fourth plate relative to each other.