Abstract: The object of the invention is to provide an improved structure for a microelectromechanical (MEMS) resonator. According to a first aspect of the invention, the resonator structure in accordance with the invention has a characteristic frequency of oscillation in combination with a given mechanical amplitude, whereby to set said mechanical amplitude, in the resonator structure, by way anchoring at an anchor point located at a given point of the resonator structure substrate, a first element is adapted oscillatory and a second element is adapted oscillatory in such a manner that at least one of said first element and of said second element are arranged to oscillate synchronously with regard to said anchor point, whereby the location of said anchor point is selected to be substantially within the joint projection defined by the dimensions of said first and said second element.

Abstract: A micromechanical resonator device and a method for measuring a temperature are disclosed. In one aspect, the device has a resonator body, an excitation module, a control module, and a frequency detection module. The resonator body is adapted to resonate separately in at least a first and a second predetermined resonance state, selected by applying a different bias, the states being of the same eigenmode but having a different resonance frequency, each resonance frequency having a different temperature dependence. The micromechanical resonator device may have a passive temperature compensated resonance frequency.

Abstract: A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the crystal axes of a quartz crystal. The quartz crystal resonator element includes a base, a pair of resonating arms extending from the base in the Y-axis direction, and a positive X-axis notch and a negative X-axis notch formed by notching the base in the X-axis direction. The positive X-axis notch is formed by notching the base from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch increases as it approaches the outer circumference.

Abstract: A tuning fork oscillating piece includes: a base; a pair of oscillating arms extending from the base in directions substantially parallel with each other; a drive piezoelectric element provided at least on one main surface or side surface of each of the oscillating arms to allow bending oscillation of the oscillating arms by piezoelectric distortion caused by applied charge; a detection piezoelectric element provided on the surface opposed to the surface of each of the oscillating arms on which the drive piezoelectric element is provided to convert the piezoelectric distortion caused by the bending oscillation of the oscillating arms into charge and output the charge. The drive piezoelectric element has a drive piezoelectric section. The detection piezoelectric element has a detection piezoelectric section. The absolute value of the piezoelectric d constant of the drive piezoelectric section is larger than the absolute value of the piezoelectric d constant of the detection piezoelectric section.

Abstract: A vibrating member includes a base portion, a plurality of vibrating arms which extend from one end portion of the base portion, are provided in parallel in a first direction, and extend in a second direction perpendicular to the first direction, a linking portion which is provided between the base end portions of two adjacent vibrating arms and extends from the other end portion of the base portion, and a support portion which is connected to the base portion through the linking portion.

Abstract: A MEMS resonator includes a main movable beam, at least one sub movable beam, and at least one exciting electrode. The main movable beam is electrically insulated from a substrate and fixed to at least one fixed end, the sub movable beam is formed to extend from the main movable beam, and the exciting electrode is provided to be close to the sub movable beam. The sub movable beam is excited by an electrostatic force to oscillate by exciting the exciting electrode using an alternating-current signal, such that the MEMS resonator resonates with at least one of a fundamental resonant frequency and harmonic frequencies thereof. The resonant frequency is changed by changing at least one of number of the at least one exciting electrode and a position of the exciting electrode relative to the sub movable beam.

Abstract: An oscillator includes resonator portions each mounted to a substrate via one or more mountings at one end and having an active resonance region defined between a set of electrodes. Each resonator portion has a longitudinal axis directed along the resonator portion from the mounted end to a free end. The resonator portions are mounted such that their longitudinal axes are directed in different directions, e.g. an anti-parallel arrangement, so that acceleration sensitivity vector components aligned with the longitudinal axis cancel each other out.

Abstract: There is provided with a resonator which can correct the resonance frequency of a vibrator in a wide range and with a high accuracy and also provided with an oscillator using the resonator. In the resonator configured by the vibrator 101, electrodes 4, 5 disposed so as to oppose to parts of the surface of the vibrator 101 via gaps, and variable voltage sources 24, 25 for applying a voltage to both or one of the vibrator 101 and the electrodes 4, 5, each of the electrodes 4, 5 is configured by plural electrodes. The electrodes 4, 5 are respectively disposed via gaps close to the portions of the vibrator 101 having different vibration amplitudes. The DC voltages being applied are independently adjusted with respect to the electrodes 4, 5 which differ in distances from the shaft of the vibrator among the plural electrodes close to the vibrator 101.

Abstract: A piezoelectric vibrator includes a base substrate and a lid substrate which are bonded to each other with a cavity formed therebetween; a piezoelectric vibrating reed which has a pair of vibration arm portions extending in parallel and is mounted on the base substrate within the cavity; and a getter material of a metallic film that is formed on the base substrate or the lid substrate so as to be arranged within the cavity and improve a degree of vacuum within the cavity by being heated. A restriction portion, which is arranged in the cavity and restricts a scattering direction of the getter material evaporated by the heating to suppress a scattering amount scattering toward the vibration arm portion, is formed in the base substrate or the lid substrate.

Abstract: There is provided an atomic force microscope (AFM) with increase the speed and sensitivity of detection of the resonant frequency shift in a cantilever. An AFM (1) extracts a reference signal and a phase shift signal from a detection signal from a displacement sensor of the cantilever. The reference signal is restrained from a phase change in accordance with the resonant frequency shift. The phase shift signal has a phase shifted in accordance with the resonant frequency shift. The AFM (1) determines the phase difference of the phase shift signal from the reference signal, as the resonant frequency shift. The AFM (1) may detect the phase difference between a plus-minus inversion point on the reference signal and a corresponding plus-minus inversion point on the phase shift signal. The AFM (1) may adjust phase before phase detection. The phase adjustment may move the detection point for the resonant frequency shift defined on the oscillation waveforms to the plus-minus inversion point.

Abstract: An object is to provide a crystal device in which an influence due to an electroconductive adhesive is reduced, and vibration characteristics of a crystal piece are favourably maintained.

Abstract: A vibrating device includes: a package having an internal space; and a vibrating reed housed in the internal space of the package, wherein the package has a porous portion formed of a communication hole communicating between the internal space and the outside and a porous body buried in the communication hole, and a metal film closing the internal space is arranged on the outside side of the porous portion.

Abstract: The present disclosure is directed to a MEMS resonant structure, provided with a substrate of semiconductor material; a mobile mass suspended above the substrate and anchored to the substrate by constraint elements to be free to oscillate at a resonance frequency; and a fixed-electrode structure capacitively coupled to the mobile mass to form a capacitor with a capacitance that varies as a function of the oscillation of the mobile mass; the fixed-electrode structure arranged on a top surface of the substrate, and the constraint elements being configured in such a way that the mobile mass oscillates, in use, in a vertical direction, transverse to the top surface of the substrate, keeping substantially parallel to the top surface.

Abstract: The packaged piezoelectric resonator comprises a case (170; 270) with a lid (140; 240) and a piezoelectric resonator element (110) housed in said case, The piezoelectric resonator element includes a planar tuning-fork-shaped part with two parallel vibrating arms (112, 114), and an additional attachment arm (118) intended for fixing the resonator element (110) to the bottom (172) of the case (170). The inside surface of the lid (140, 240) is stepped in such a way as to form a first portion (142) where the lid has a first thickness and a second portion (144) where the lid has a second thickness substantially greater than the first thickness, the first portion (142) extending at least over distal end portions (166, 168) of the vibrating arms (112, 114), and the second portion (144) extending at least over a part of the attachment arm (118).

Abstract: A vibrating reed includes: a base; and a vibrating arm which is extended from one end portion of the base, the vibrating arm having an arm portion which is disposed on the base side, a weight portion which is disposed on a tip side of the arm portion and has a larger width than the arm portion, main surfaces which are respectively disposed on front and back sides of the vibrating arm, side surfaces each of which extends in a longitudinal direction of the vibrating arm to connect the main surfaces on the front and back sides and which are formed so as to face each other, a first groove portion which is a bottomed groove formed at least one of the main surfaces along the longitudinal direction of the vibrating arm, a first excitation electrode which is formed on groove side surfaces each connecting a bottom of the first groove portion with the one main surface, a second excitation electrode which is formed on the both side surfaces, and a projection-in-groove which is disposed on the tip side of a bisector bise

Abstract: Provided is a MEMS oscillation circuit which performs temperature compensation of a MEMS resonator with a simple circuit, which is mild so that an output clock does not have jitter, and which makes the range of fluctuations of a reference frequency from a reference value equivalent to a range of digital processing. The MEMS oscillator includes a MEMS resonator, a temperature measurement unit for measuring a temperature and outputting a detected voltage corresponding to the temperature, and a bias voltage control circuit for applying the MEMS resonator with a bias voltage which changes the resonant frequency of the MEMS resonator in a manner opposite to a change of the resonant frequency of the MEMS resonator due to temperature change correspondingly to the detected voltage.

Abstract: To provide a piezoelectric resonator in which a casing houses a tuning-fork piezoelectric resonator element and whose failure occurrence caused when shavings of adjustment films scatter and adhere to excitation electrodes is prevented.

Abstract: An apparatus including a resonator electrode and a second electrode separated from the resonator electrode by a gap having a size that facilitates electron transfer across the gap, wherein the resonator electrode is a resonator electrode mounted for oscillatory motion relative to the second electrode that results in a size of the gap between the resonator electrode and the second electrode being time variable; a feedback circuit configured to convey an electron transfer signal dependent upon electron transfer across the gap as a feedback signal; and a drive electrode adjacent the resonator electrode configured to receive a feedback signal from a feedback circuit configured to provide a time-varying feedback signal dependent upon electron transfer across a gap.

Abstract: An apparatus including a resonator electrode and a second electrode separated from the resonator electrode by a gap having a size that facilitates electron transfer across the gap, wherein the resonator electrode is a resonator electrode mounted for oscillatory motion relative to the second electrode that results in a size of the gap between the resonator electrode and the second electrode being time variable; a feedback circuit configured to convey an electron transfer signal dependent upon electron transfer across the gap as a feedback signal; and a drive electrode adjacent the resonator electrode configured to receive a feedback signal from a feedback circuit configured to provide a time-varying feedback signal dependent upon electron transfer across a gap.

Abstract: Disclosed is a resonator including a plurality of resonator elements each including at least oscillation parts and lower electrodes with an intervening space therebetween, in which the plurality of resonator elements are disposed in a closed system and the oscillation parts of the plurality of resonator elements are continuously formed in an integrated manner.

Abstract: An object is to provide a tuning-fork type piezoelectric unit in which as well as maintaining the vibration characteristics in the stationary condition when miniaturized, the bond strength is maintained, and also the frequency change for before and after a drop impact test is suppressed.

Abstract: A resonator containing a plurality of resonator elements, respectively having an electrode and an oscillating component opposed while having a space in between, arranged so as to form a closed system. The oscillating component of the plurality of resonator elements is continuously formed in an integrated manner.

Abstract: To provide an oscillating current converter fabricated by utilizing the MEMS technology making it possible to further decrease the size yet improving the conversion efficiency. An oscillating current converter 1 fabricated by using the MEMS technology and comprising a cantilever 4 having an opening 5 formed on the distal end side thereof and is cantilevered on the proximal end side thereof, a coil 6 wound around the opening 5 of the cantilever 4, and a magnet 8 arranged so as to enter into the inside of the opening 5 of the cantilever 4, wherein the cantilever 4 oscillates to generate an induced electromotive force in the coil 6.

Abstract: Novel configurations for a miniature vibrating beam mechanical resonator provide low energy transfer to a supporting structure and low sensitivity to mounting misalignment. A symmetric suspended portion includes two vibrating beams that vibrate normal to a quiescent plane of the resonator, 180 degrees out of phase relative to one another. The vibrating beams are attached, at least at one end, to a torsional coupling element that is joined to a mounting pad along a non-translating suspension boundary. Counterbalances are attached to the vibrating beams, and the resonator is configured such that dynamic forces and moments coupled to each torsional coupling element from the vibrating beams are balanced along each nominal non-translating suspension boundary proximate to the symmetry axis and along the symmetry axis proximate to each nominal non-translating suspension boundary. Each non-translating suspension boundary is a torsional axis for a twisting deformation of the first torsional coupling element.

Abstract: One embodiment of the present invention sets forth a MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system includes a MEMS resonator, two or more resonator electrodes, and at least one resonator electrode shield. The resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.

Abstract: Method and systems are provided for adjusting real-time clocks to compensate for frequency offset, temperature effects, and/or aging effects.

Abstract: A resonator element includes: a resonating body having a first region and a second region, the first region receiving a compression stress or an extension stress by a vibration, the second region receiving an extension stress responding to the compression stress in the first region, or a compression stress responding to the extension stress of the first region; and at least one film layer, on a surface of the resonating body between the first and the second regions, having thermal conductivity higher than thermal conductivity of the resonating body. In the element, the film layer includes a recessed section in which at least one film layer is removed between the first and the second regions.

Abstract: A self-sustaining ultra-high frequency oscillator and method enable the ability to oscillate and output a signal. A balanced bridge circuit is utilized to null an embedding background response. A first vibrating nanoelectromechanical (NEMS) beam resonator is part of one of the branches of the balanced bridge circuit and determines the frequency of the oscillator's output signal. A feedback loop establishes and sets oscillation conditions of the oscillator's signal. Further, the feedback loop connects an output of the first resonator to an input of the balanced bridge circuit.

Abstract: A resonant structure for a micromechanical device includes a crystalline silicon beam and at least one mass attached to the beam. An excitation plane of the resonant structure is defined by the predominant motion of the excited resonant structure. The beam includes crystal axes aligned such that none of the crystal axes are parallel to the length of the beam and/or none of the crystal axes are normal to the excitation plane.

Abstract: An electronic apparatus comprises at least one quartz crystal oscillator comprised of a quartz crystal oscillating circuit having a quartz crystal resonator, an amplifier, at least one resistor, and capacitors. The quartz crystal resonator comprises a quartz crystal tuning fork resonator having a quartz crystal tuning fork base, quartz crystal tuning fork tines connected to the quartz crystal tuning fork base, and at least one groove formed in at least one of opposite main surfaces of the quartz crystal tuning fork tines. A length of the at least one groove formed in at least one of the opposite main surfaces of the quartz crystal tuning fork tines is within a range of 40% to 80% of a length of the quartz crystal tuning fork tines.

Abstract: An angular rate sensor includes a tuning-fork oscillator, a support portion, an oscillation absorption portion and a mounting portion. The tuning-fork oscillator has a base and arm portions extending from the base. The support portion supports the base of the tuning-fork oscillator at a front face thereof. The oscillation absorption portion is provided on a back face of the support portion opposite to the front face. The mounting portion mounts the support portion through the oscillation absorption portion.

Abstract: [Problem] To provide an oscillating current converter fabricated by utilizing the MEMS technology making it possible to further decrease the size yet improving the conversion efficiency. [Means for Solution] An oscillating current converter 1 fabricated by using the MEMS technology and comprising a cantilever 4 having an opening 5 formed on the distal end side thereof and is cantilevered on the proximal end side thereof, a coil 6 wound around the opening 5 of the cantilever 4, and a magnet 8 arranged so as to enter into the inside of the opening 5 of the cantilever 4, wherein the cantilever 4 oscillates to generate an induced electromotive force in the coil 6.

Abstract: Each one of resonators arranged in an N×M MEMS array structure includes substantially straight elongated beam sections connected by curved/rounded sections and is mechanically coupled to at least one adjacent resonator of the array via a coupling section, each elongated beam section connected to another elongated beam section at a distal end via the curved/rounded sections forming a geometric shape (e.g., a rounded square), and the coupling sections disposed between elongated beam sections of adjacent resonators. The resonators, when induced, oscillate at substantially the same frequency, in combined elongating/breathing and bending modes, i.e., beam sections exhibiting elongating/breathing-like and bending-like motions. One or more of the array structure's resonators may include one or more nodal points (i.e.

Abstract: One embodiment of the present invention sets forth a serrated tooth actuator for driving MEMS resonator structures. The actuator includes a fixed drive electrode having a serrated tooth surface opposing a MEMS resonator arm also having a serrated tooth surface, where the MEMS resonator arm is configured to rotate towards the drive electrode when an AC signal is applied to the drive electrode. Such a configuration permits higher amplitude signals to be applied to the drive electrode without the performance of the actuator being compromised by nonlinear effects. In addition, the serrated tooth configuration enables a sufficiently high actuating force to be maintained even though the distance traversed by the MEMS resonator arm during operation is quite small. Further, the serrated configuration allows a MEMS resonator system to withstand larger fluctuations in voltage and larger substrate stresses without experiencing a substantial shift in resonant frequency.

Abstract: One embodiment of the present invention sets forth a serrated tooth actuator for driving MEMS resonator structures. The actuator includes a fixed drive electrode having a serrated tooth surface opposing a MEMS resonator arm also having a serrated tooth surface, where the MEMS resonator arm is configured to rotate towards the drive electrode when an AC signal is applied to the drive electrode. Such a configuration permits higher amplitude signals to be applied to the drive electrode without the performance of the actuator being compromised by nonlinear effects. In addition, the serrated tooth configuration enables a sufficiently high actuating force to be maintained even though the distance traversed by the MEMS resonator arm during operation is quite small. Further, the serrated configuration allows a MEMS resonator system to withstand larger fluctuations in voltage and larger substrate stresses without experiencing a substantial shift in resonant frequency.

Abstract: One embodiment of the present invention sets forth a serrated tooth actuator for driving MEMS resonator structures. The actuator includes a fixed drive electrode having a serrated tooth surface opposing a MEMS resonator arm also having a serrated tooth surface, where the MEMS resonator arm is configured to rotate towards the drive electrode when an AC signal is applied to the drive electrode. Such a configuration permits higher amplitude signals to be applied to the drive electrode without the performance of the actuator being compromised by nonlinear effects. In addition, the serrated tooth configuration enables a sufficiently high actuating force to be maintained even though the distance traversed by the MEMS resonator arm during operation is quite small. Further, the serrated configuration allows a MEMS resonator system to withstand larger fluctuations in voltage and larger substrate stresses without experiencing a substantial shift in resonant frequency.

Abstract: In an electronic apparatus comprising a digital display portion and first and second oscillators comprising first and second oscillating circuits, each of the first and second oscillating circuits having a resonator, an amplifier, a plurality of capacitors, and at least one resistor, a mode of vibration of the resonator of the first oscillating circuit being the same as that of the resonator of the second oscillating circuit, an output signal being output from each of the first and second oscillating circuits, the output signal of one of the first and second oscillating circuits being a clock signal for use in operation of the electronic apparatus to display time information at the digital display portion.

Abstract: A vibratory gyroscope including a vibrator (10) integrally having a plate-like body portion (11) spreading along a reference plane, three drive arms (12, 13, 14) extending in a first direction from the body portion along the reference plane, and two detection arms (15, 16) extending in a second direction opposite to the first direction from the body portion along the reference plane. The three drive arms are composed of two exciting drive arms (12, 13) that are excited in mutually opposite phases in the reference plane and a non-exciting drive arm (14) located between the two exciting drive arms. Each of the three drive arms has an arm width in a width direction along the reference plane and perpendicular to the first direction. Each of the two detection arms has an arm width greater than that of the drive arm in the width direction, thereby suppressing generation of vibrations along the reference plane.

Abstract: A piezoelectric resonator element including: a base formed of a piezoelectric material and having a given length; a plurality of vibration arms extending from one part of the base; and a supporting arm extending from another part of the base spaced apart from the one part of the base by the given length in a width direction, the supporting arm extending in a common direction with the vibration arms outboard the vibration arms.

Abstract: There are many inventions described and illustrated herein.

Abstract: There are many inventions described and illustrated herein.

Abstract: There are many inventions described and illustrated herein. In one aspect, the present inventions relate to oscillator systems which employ a plurality of microelectromechanical resonating structures, and methods to control and/or operate same. The oscillator systems are configured to provide and/or generate one or more output signals having a predetermined frequency over temperature, for example, (1) an output signal having a substantially stable frequency over a given/predetermined range of operating temperatures, (2) an output signal having a frequency that is dependent on the operating temperature from which the operating temperature may be determined (for example, an estimated operating temperature based on a empirical data and/or a mathematical relationship), and/or (3) an output signal that is relatively stable over a range of temperatures (for example, a predetermined operating temperature range) and is “shaped” to have a desired turn-over frequency.

Abstract: Provided is an oscillator including: a MEMS resonator for mechanically vibrating; an output oscillator circuit for oscillating at a resonance frequency of the MEMS resonator to output an oscillation signal; and a MEMS capacitor for changing a capacitance thereof caused by a change in a distance between an anode electrode and a cathode beam according to an environmental temperature.

Abstract: A piezoelectric element of a tuning fork resonator comprises a base portion and a plurality of leg portions. Drive electrodes are formed on top and bottom major surfaces and both side surfaces of each leg portion. The drive electrodes have polarities different between on the top and bottom major surfaces and the both side surfaces. The drive electrodes on the side surfaces are connected to each other. Further, metal film for frequency adjustment is formed on a tip portion of each leg portion of the piezoelectric element. The frequency adjustment is performed by removing the metal film formed on at least one surface of side surfaces and a tip surface of the tip portion by beam irradiation.

Abstract: A piezoelectric resonator element, comprises: a base made of a piezoelectric material; at least a pair of resonating arms provided in a unified manner with the base and extending in parallel with each other from the base; a portion defining a long groove provided to each of the resonating arms along a longitudinal direction; and a driving electrode provided to the long groove. Each of the resonating arms includes a structure to adjust hardness balance between right and left structures with respect to a virtual central line extending in the longitudinal direction.

Abstract: A method for manufacturing a quartz oscillator having a stable temperature drift characteristic attributed to the quartz oscillating piece and a quartz oscillator are disclosed. The method comprises a quartz crystal etching step S1 of processing a quartz oscillating piece into a predetermined shape by etching, an electrode membrane forming step S2 of forming an electrode on the quartz oscillating piece, a quartz crystal mounting step S3 of mounting the quartz oscillating piece in an oscillator package, a leakage oscillation adjusting step S4 of driving the mounted quartz oscillating piece, detecting the leakage oscillation, and removing a part of the quartz oscillating piece depending on the detected leakage oscillation, and a re-etching step S6 of re-etching the quartz oscillating piece subjected to the removal.

Abstract: There are many inventions described and illustrated herein.

Abstract: There are many inventions described and illustrated herein. In one aspect, the present inventions relate to oscillator systems which employ a plurality of microelectromechanical resonating structures, and methods to control and/or operate same. The oscillator systems are configured to provide and/or generate one or more output signals having a predetermined frequency over temperature, for example, (1) an output signal having a substantially stable frequency over a given/predetermined range of operating temperatures, (2) an output signal having a frequency that is dependent on the operating temperature from which the operating temperature may be determined (for example, an estimated operating temperature based on a empirical data and/or a mathematical relationship), and/or (3) an output signal that is relatively stable over a range of temperatures (for example, a predetermined operating temperature range) and is “shaped” to have a desired turn-over frequency.

Abstract: A tuning fork type piezoelectric vibrating piece, comprising: a base unit having a base electrode for an external connection; a fork shaped arm unit extending from the base unit; a groove portion at least on a surface or a rear surface of the arm unit; a groove electrode on the groove portion; a side surface electrode on the arm unit without the groove portion; a first electrode connecting the base unit and the side surface electrode or the groove electrode; a second electrode connecting the groove electrode and the side surface electrode; and a side surface electrode set at a predetermined distance from the bottom of the fork part of the base unit. The piezoelectric vibrating piece may be packaged with a base electrode connected to an external output terminal. The piezoelectric oscillator may have an amplifier circuit and a feedback circuit with a resonant element determining the resonant frequency.

Abstract: Disclosed is an oscillator that relies on redundancy of similar resonators integrated on chip in order to fulfill the requirement of one single quartz resonator. The immediate benefit of that approach compared to quartz technology is the monolithic integration of the reference signal function, implying smaller devices as well as cost and power savings.