Abstract: An apparatus for chemical mechanical polishing of a wafer includes a process chamber and a rotatable platen disposed inside the process chamber. A polishing pad is disposed on the platen and a wafer carrier is disposed on the platen. A slurry supply port is configured to supply slurry on the platen. A process controller is configured to control operation of the apparatus. A set of microphones is disposed inside the process chamber. The set of microphones is arranged to detect sound in the process chamber during operation of the apparatus and transmit an electrical signal corresponding to the detected sound. A signal processor is configured to receive the electrical signal from the set of microphones, process the electrical signal to enable detection of an event during operation of the apparatus, and in response to detecting the event, transmit a feedback signal to the process controller.

Abstract: An electro-holographic light field generator device is disclosed. The light field generator device has an optical substrate with a waveguide face and an exit face. One or more surface acoustic wave (SAW) optical modulator devices are included within each light field generator device. The SAW devices each include a light input, a waveguide, and a SAW transducer, all configured for guided mode confinement of input light within the waveguide. A leaky mode deflection of a portion of the waveguided light, or diffractive light, impinges upon the exit face. Multiple output optics at the exit face are configured for developing from each of the output optics a radiated exit light from the diffracted light for at least one of the waveguides. An RF controller is configured to control the SAW devices to develop the radiated exit light as a three-dimensional output light field with horizontal parallax and compatible with observer vertical motion.

Abstract: A reticle stage is provided, including an electrostatic chuck and an acoustic wave transducer. The electrostatic chuck includes multiple chucking electrodes embedded in a dielectric body and configured to secure a reticle to a chuck surface of the dielectric body by electrostatic attraction. The acoustic wave transducer is disposed on the chuck surface and configured to impart a surface acoustic wave to the chuck surface to vibrate the chuck surface, thereby removing the reticle from the reticle stage.

Abstract: Provided is a surface acoustic wave device using a novel and steadily suppliable piezoelectric material that is resistant to a high-temperature environment and enables the surface acoustic wave device to use a 2 GHz to 2.5 GHz band or higher. The surface acoustic wave device includes: a piezoelectric substrate formed from a monocrystal of gehlenite (CAS: Ca2Al(AlSi)O7); and interdigital transducers formed on a surface acoustic wave propagation plane of the piezoelectric substrate.

Abstract: A liquid specimen sensor includes a pair of first IDT electrodes and a pair of second IDT electrodes, a pair of first input connection conductors connected to one of the pair of first IDT electrodes and extending to the outside of the flow path, a pair of first output connection conductors connected to the other of the pair of first IDT electrodes and extending to the outside of the flow path, a pair of second input connection conductors connected to one of the pair of second IDT electrodes and extending to the outside of the flow path, and a pair of second output connection conductors connected to the other of the pair of second IDT electrodes and extending to the outside of the flow path. The sum of the line lengths in the flow path of the pair of first input connection conductors and the pair of first output connection conductors and the sum of the line lengths in the flow path of the pair of second input connection conductors and the pair of second output connection conductors are equal.

Abstract: An acoustic wave device includes: a substrate; an input terminal that is located on a first surface of the substrate, and to which a high-frequency signal is input; a resonator that is connected to the input terminal, and to which a high-frequency signal input to the input terminal is input; and an insulating layer that is located between the input terminal and the substrate, and has a permittivity smaller than that of the substrate.

Abstract: The IDT electrode has the first bus bar and second bus bar; the plurality of first electrode fingers and the plurality of second electrode fingers mutually intersect; the plurality of first dummy electrodes and the plurality of second dummy electrodes which have front ends facing front ends of the plurality of first electrode fingers and the plurality of second electrode fingers with the gap s1; the plurality of first auxiliary electrodes which protrude laterally from the front end side portions of the pluralities of first dummy electrodes; and the plurality of second auxiliary electrodes which protrude laterally from the front end side portions of the plurality of second dummy electrodes. The plurality of first auxiliary electrodes have edge portions located a side of the second bus bar. The edge portions are located a side of the second bus bar the more to a side of the front end.

Abstract: A duplexer includes: a reception filter connected between a reception terminal and an antenna terminal; a transmission filter connected between a transmission terminal and the antenna terminal; and a wiring substrate including the reception filter and the transmission filter on an upper surface, the reception terminal, the transmission terminal and the antenna terminal being formed on a lower surface, and a reception electrode electrically connected to the reception terminal, a transmission electrode electrically connected to the transmission terminal, an antenna electrode electrically connected to the antenna terminal, and a circular metal layer surrounding the reception, transmission and antenna electrodes, and electrically connected to a ground being formed on an upper surface, wherein a shortest distance between a side of the circular metal layer closest to the reception and transmission terminals and the reception electrode is larger than a width of the side of the circular metal layer.

Abstract: An acoustic wave device comprising a piezoelectric layer on an omnidirectional acoustic mirror and excitation and/or reception means on a surface of said piezoelectric layer, capable of exciting waves in a band gap of the acoustic mirror.

Abstract: In a parametric G-Rake receiver, a method an apparatus computes initial estimates of one or more scaling parameters and initial combining weights for the parametric G-Rake receiver; estimates the SINR of a received signal based on a mean pilot symbol estimate and the initial combining weights; computes revised estimates for one or more scaling parameters based on the estimated SINR and the initial combining weights; and computes revised combining weights based on one or more revised scaling parameter estimates.

Abstract: An anti-reflective acoustic diffusion device is provided by a group of irregularly dimensioned diffusing elements positioned on an acoustic wave substrate end that diffuse the SAW and eliminate unwanted acoustic reflections from the end of the substrate. The irregularly dimensioned diffusing elements are substantially irregular in size, shape, composition, and location and provide the desired diffusion into a nearly uniform distributed acoustic energy with a random phase. The anti-reflective acoustic diffusion device can be used with SAW, BAW or multiple acoustic wave configurations. This invention also encompasses an anti-reflective acoustic diffusion system and methods for diffusing acoustic reflections with anti-reflective acoustic diffusing elements.

Abstract: An acoustic wave device comprising a piezoelectric layer on an omnidirectional acoustic mirror and excitation and/or reception means on a surface of said piezoelectric layer, capable of exciting waves in a band gap of the acoustic mirror.

Abstract: Channel quality can be detected accurately in a wireless transmission system such as an HSDPA method. In the case of estimating a channel quality of a signal transmitted by a Code Division Multiple Access method and of estimating the channel quality in a system having a synchronization channel not orthogonal to a channel receiving data, a noise component of a desired channel is estimated; degree of a noise component caused by the synchronization channel is estimated with respect to the estimated noise; and a channel quality of a receiving channel is detected based on the estimated degree of the noise component.

Abstract: The present invention discloses a double TRU (Transceiver Unit) (45). The output signals from the power amplifiers (64, 84) are combined to one common output signal provided to an antenna arrangement (91). A DSP (Digital Signal Processor) (52, 72) of each TRU (50, 70) comprises means for a constant-envelope modulation scheme (54, 74) and a non-constant envelope scheme (53, 73). The DSP:s (52, 72) select the modulation scheme according to modulation information (49, 69). In such a way, a switching between different modulation schemes can be performed even on a time-slot basis. For non-constant-envelope modulation, the modulated signal is separated into two component signals. Each TRU (50, 70) takes care of the amplification of one component. A phase compensation of at least one of the TRU:s (50, 70) is performed in order to correct for different paths of phases of the power amplifiers (64, 84). The non-constant envelope modulated signal can also be a multi-carrier signal, e.g.

Abstract: The number of times for averaging operation for averaging a correlation value of a received signal and a reference signal is properly controlled. When the correlation value is not averaged, since a lower limit value TH_A of a correlation level of a distribution of timings of which a path exists is larger than an upper limit value TH_B of a correlation level of a distribution of timings of which a path does not exist, the correlation value of a path is hidden by noise. Since the averaging operation is repeated until the relation of TH_A>TH_B is satisfied, the averaging operation is stopped when the relation is satisfied. The TH_A and TH_B are decided in accordance with RSCP and ISCP of a pilot channel and RSSI of a received base band signal.

Abstract: A method of Partial Parallel Interference Cancellation (PPIC) is provided for recursively eliminating the Multiple Access Interference from a received signal. Such method is to use a recursion way to eliminate all the Multiple Access Interference (MAI) one by one from the received signal. Moreover, the present invention is to take the output of the pre-stage as the input of the present stage with the recursion method so that we can use only one operating circuit to obtain the function the MAI eliminating.

Abstract: The present invention provides a surface acoustic wave device that allows a plurality of surface acoustic wave filters to be formed on a single chip and permits greater miniaturization. The surface acoustic wave device comprises a piezoelectric substrate, a first surface acoustic wave resonator formed on the piezoelectric substrate, and a second surface acoustic wave resonator formed on the piezoelectric substrate in the surface acoustic wave propagation direction of the first surface acoustic wave resonator. The positions in which the first and second surface acoustic wave resonators are formed on the piezoelectric substrate are in an at least partially overlapping relationship in a surface acoustic wave propagation region that is defined by virtually extending the respective openings of the first and second surface acoustic wave resonators.

Abstract: An integrated circuit includes a number of terminals to transfer signals. Each of the terminals has an adjustable termination impedance. The integrated circuit also includes a control circuit coupled to the terminals to adjust the value of the termination impedance of each of the terminals to improve signal detection at the terminals.

Abstract: Electrodes are formed on both top and bottom surfaces of a dielectric plate and grounded coplanar lines, as transmission lines, are formed on the top surface of the dielectric plate. A plurality of micro-strip lines, each composed of high-impedance lines and low-impedance lines alternately connected in series, is arranged at a pitch shorter than the wavelength of a wave traveling along the grounded coplanar lines. A spurious mode propagation blocking circuit thus constructed prevents a spurious mode wave, such as a parallel-plate mode, from traveling.

Abstract: Electrodes are formed on both top and bottom surfaces of a dielectric plate and grounded coplanar lines, as transmission lines, are formed on the top surface of the dielectric plate. A plurality of micro-strip lines, each composed of high-impedance lines and low-impedance lines alternately connected in series, is arranged at a pitch shorter than the wavelength of a wave traveling along the grounded coplanar lines. A spurious mode propagation blocking circuit thus constructed prevents a spurious mode wave, such as a parallel-plate mode, from traveling.

Abstract: There is provided a surface acoustic wave device for use as a filter in a television receiver set which can reduce reflection waves generated from outermost electrodes of input and output interdigital transducers to improve various filter characteristics. In the surface acoustic wave device having, on a piezoelectric substrate, the input interdigital transducer for converting an electric signal into a surface acoustic wave and the output interdigital transducer, disposed to oppose the input interdigital transducer, for converting the surface acoustic wave resulting from the conversion by the input interdigital transducer into an electric signal, a first dummy electrode is provided to a first outermost electrode finger of the output interdigital transducer, the first outermost electrode finger being located at one end of the output interdigital transducer opposite to the input interdigital transducer, and having an electrode aperture length of .lambda.

Abstract: A radio switching apparatus is provided which is actuated upon reception of a radio signal and which is capable zero or near-zero standby electric power consumption. The radio switching apparatus includes a receiving antenna; a surface-acoustic-wave device to which a signal received by the antenna is fed and which extracts a specific pattern contained in the signal; a storing circuit for storing output electric power of the surface-acoustic-wave device; and a switch circuit which is turned on when the output voltage of the storing circuit exceeds a set value.

Abstract: It consists of several channels (V1, V2) in parallel, which exhibit an inter-transducer gap difference (2.sub.1 -4.sub.1 ; 2.sub.2 -4.sub.2) equal to an even multiple of the half-wavelength (.lambda.) at the central frequency, from one channel to the next, so as to cancel the delay line transfer function which corresponds to the direct path between transducers.

Abstract: Surface-wave arrangement (1) having at least one surface structure (21, 22), by means of which those components of surface waves (19) which are produced in the arrangement are rendered ineffective with respect to interference which would otherwise occur, for which a sump is provided in a known manner at the end of the substrate.

Abstract: A method and apparatus in which signal output of an acoustic wave device is separated into desired and undesired components. An excitation signal to an input of the acoustic wave device is periodically interrupted for durations based upon the time required for acoustic waves to travel from the input to the output of the device. The duration of excitation is less than the time required for wave travel, allowing electromagnetic interference to complete its passage to the output before the arrival of acoustic wave energy. The non-simultaneous arrival of electromagnetic interference and acoustic wave-generated energy allows the electromagnetic interference to be gated from the output. Electrical switches are employed, such as double-balanced mixers or PIN diode switches. The period of pulses for providing the interruptions of excitation is at least as great as the sum of the required time for acoustic wave travel and the time during which the device is excited.

Abstract: A surface acoustic wave element is provided with a piezoelectic substrate, a first input transducer, a second input transducer and an output device such as output electrode. The piezoelectric substrate has a first and a second surfaces which are mutually faced. The first input transducer is formed on the first surface of the substrate to generate a first surface acoustic wave which propagates in a predetermined direction. The second transducer is formed on the first surface of the substrate to generate a second surface acoustic wave which propagates in a direction opposite to the predetermined direction. The output device is formed on the first surface of the substrate to extract a signal produced by an interaction of the first and second surface acoustic waves. At least part of the second surface of the substrate is caused to be inclined in a direction perpendicular to the predetermined direction with respect to the first surface.

Abstract: A two track surface wave arrangement has improved selection property resulting from crosstalk signals of parasitic transmission paths within the arrangement being suppressed. What can be achieved with a displacement of the surface wave arrangement of one track relative to that of the other track by a dimension of nearly half a wavelength is that crosstalk signals mutually cancel on the basis of interference without affecting the useful signal.

Abstract: In a surface acoustic wave transducer including a substrate made of a piezoelectric material, an input side IDT structure having positive and negative electrodes arranged in an interdigit manner and floating electrodes arranged between successive positive and negative electrodes, and an output side IDT structure having positive and negative electrodes arranged in an interdigit manner and floating electrodes arranged between successive positive and negative electrodes, the electrodes of the input and output side IDT structures are arranged such that a surface acoustic wave propagates in one direction, distances between corresponding tracks in the input and output side IDT structures are linearly changed and lengths of these tracks are changed in accordance with a predetermined window function.

Abstract: A multiple-reflection, long-path wave transmission device is fabricated from a single crystal silicon plate by micromachining straight walled rectangular cavities into the plate to reflect ultrasonic waves along an extended transmission path defined by the rectangular cavities. An input transducer is coupled to the silicon plate to introduce ultrasonic waves into the plate in response to an input signal. The ultrasonic waves travel in the silicon plate along the transmission path defined by the straight walled reflective cavities. An output transducer is similarly coupled to the silicon plate to receive the ultrasonic waves at the completion of the transmission path and to generate an output signal representative thereof. Additional sloped wall cavities are formed in the silicon plate to border the extended transmission path. The sloped wall cavities prevent cross coupling of waves traveling in different portions of the path and absorb energy traveling in undesired directions and modes.

Abstract: An acoustic transducer for an acoustic wave device which includes an acoustic wave propagating substrate, the transducer adapted to couple to an electrical load and/or source. The transducer includes at least a pair of comb electrodes formed on the substrate. It includes apparatus for applying an electrical load and/or source across the pair of comb electrodes. The first of the combs has a plurality of electrode fingers. The second comb has at least one electrode finger. The widths of the electrode fingers are the same. Gaps of at least two different widths are disposed between the electrodes.

Abstract: Biasing electrodes on a piezoelectric acoustic vibrator alter the sensitivity of the acoustic vibrator and can be used to compensate for external stresses applied to the acoustic vibrator. The biasing electrodes and the circuitry providing electric signals to them are separate from the RF circuitry feeding the RF signal electrodes of the acoustic vibrator. Biasing electrodes can be used on bulk acoustic wave devices or surface acoustic wave devices. The biasing electrodes can be energized by a static D.C. voltage source, or can be used in a dynamic biasing arrangement to provide instantaneous compensation for changing environmental conditions.

Abstract: A surface device with a conversion structure (12) mounted on the substrate (2) but outside the surface of the substrate provided for surface wave propagation. The conversion structure eliminates undesirable surfaces which occur.

Abstract: A surface acoustic wave device employs in-line input and output transducers disposed on a piezoelectrically active surface. Two U-configured multi-strip couplers are disposed between the input and output transducers in an overlapped, opposing configuration in order to convolve the side lobe energy from the input transducer across substantially all of the aperture of the output transducer.

Abstract: A surface acoustic wave (SAW) transducer comprises a piezoelectric substr, a pair of metal bus bars positioned on the substrate parallel to and separated from each other a preselected distance and a plurality of interdigital electrode fingers extending from each of the metal bus bars. A plurality of slots are positioned along each metal bus bar so that the bus bar metallization is reduced and the acoustic wave velocity is increased in the metal bus bar region.

Abstract: A surface acoustic wave device according to the present invention can be molded surely with resin, leaving a free space over exciting portions and a propagating portion by disposing a recess portion formed over the exciting portions and the propagating portion on a piezoelectric substrate without using any metallic package.

Abstract: The difficulty of making Doppler shift velocity measurements in a chirp pulse echo ranging system is overcome by employing a pulse frequency compression filter, suitably a SAW compressor 45, having individual outputs 64, 65, 66, 67 respectively relating to adjacent contiguous frequency bands A, B, C, D, (FIG. 3) each having a bandwidth approximately equal to the chirp frequency swing. Signal detection and processing means 70 senses the occurrence of a compressed pulse on any of the outputs and measures the amplitudes of signals on all the outputs. A computer then computes the Doppler shift from the amplitude ratio of the sensed signals to adjacent frequency bands, determines the target velocity therefrom and uses the result also to correct the range measured by the counter 5.

Abstract: The invention features a theft resistant security system for motor vehicles. The system has receptacle with a coupling coil. A SAW (surface acoustical wave) device associated with the receptacle for relative movement thereto is also provided. The SAW device has a code and its own coupling coil for interaction with the receptacle coupling coil. A testing mechanism is connected to the receptacle for determining whether the code of the SAW device is valid for operation of the motor vehicle. Problems of crosstalk and wave reflection may produce spurious code pulses in systems of this type. The invention provides techniques for eliminating or reducing these unwanted pulses.

Abstract: A technique for adjusting the frequency of odd mode transverse waves propagating in a SAW device is described. A pair of localized regions of frequency determining trimming material are deposited onto selected portions of a surface wave propagating surface, to provide localized regions on said surface where the odd order transverse mode has energy maxima. These regions change the acoustic properties and hence the velocity characteristics of the surface wave propagating surface in said regions. The frequency of the odd mode transverse wave is changed accordingly and is preferably changed to match that of the fundamental transverse propagating wave. This decreases the insertion loss of the device at the fundamental frequency and eliminates the odd mode transverse wave propagation characteristic within the operating frequency range of the resonator.

Abstract: A surface acoustic wave (SAW) device is provided which includes a piezoelectric substrate, an input transducer formed on the substrate for launching acoustic surface waves along a propagation path on the substrate, an output transducer formed on the substrate across the propagation path from the input transducer for receiving acoustic surface waves generated by the input transducer, and at least one area of acoustic energy absorbing material, preferably polyimide, formed on the substrate between the edge of the substrate and a corresponding transducer. The acoustic absorber is patterned on the SAW device substrate while the device is still in wafer form using photolithographic processing techniques.

Abstract: A SAW slanted array correlator (SAC) comprises a piezoelectric substrate, an input and an output interdigital transducer deposited on the piezoelectric substrate, and a reflective array aligned with the transducers. The input and output transducer are slanted at equal and opposite appropriate angles to each other. The reflective array is disposed on the substrate at an angle the same as the angle of emplacement of the output transducer. The transducers comprise a number of interdigital electrodes with varying periodicity, the periodicity being the same for corresponding portions of the two transducers. The reflective array comprises a number of shorted interdigital electrodes having a periodicity corresponding to the periodicity of the output transducer. The reflective array comprises portion of selected electrodes which are active, partially active or inactive.

Abstract: In a surface acoustic wave elastic convolver capable of showing sufficiently high convolution efficiency with a simple structure, the convolver comprises a piezo-electric substrate, plural input transducers formed on the substrate for respectively generating surface acoustic waves corresponding to input signals, an output transducer for obtaining a convolution signal of the input signals, from a surface acoustic wave generated by non-linear interaction, of the surface acoustic waves generated by those input transducers, and a dielectric film of a non-linear effect larger than that of the substrate, formed on the substrate in at least an area where the output transducer is formed.

Abstract: A surface wave acoustic delay line is formed of a set of electrode assemblies disposed on the surface of a block of crystalline material propagative of a surface acoustic wave. In each of the assemblies, the electrodes are arranged in an interdigitated pattern. Reflected waves are cancelled by the construction of an additional electrode in each of an electrode assembly, the additional electrode extending only one-half the distance of the other electrodes and being spaced from an adjacent electrode by one-quarter wavelength. This introduces a 180.degree. phase shift between portions of relected waves which then cancel to remove the reflection. Also, in the case of closely spaced electrode assemblies, additional electrodes, equal in shape and size to the electrodes of the assemblies, are introduced between the assemblies in the form of a grid which propagates surface waves without reflection.

Abstract: A system for recognizing touch positions along a predetermined coordinate axis includes a surface wave propagating substrate on which is disposed at least one surface wave transducer. An array of surface wave reflective elements directs the surface wave from the transducer. The reflective elements are composed of a frit material.

Abstract: A cantilever mount for a substrate lamina of a surface wave device wherein the substrate lamina 42 of the component is attached only at its one end 45 and is a wedge-shaped structure. The tapered end 46 of the substrate lamina 42 which is remote from the atachment location is mounted above the surface 41 of the base plate 41 which causes minimization of disturbing influences.

Abstract: A guided-wave acoustooptic spectrum analyzer comprises a planar optical waveguide layer with electrodes of a transducer thereon. The electrodes are positioned at the center of a light path under which light is propagated. The light is deflected in response to frequencies of electric signals applied to the electrodes. With the invention, the detectable minimum pulses width of a pulse signal is reduced as compared with the prior art, while the frequency resolution therein is maintained at the same level.

Abstract: In order to present an asymmetric frequency characteristic in an unidirectional acoustic surface wave device with a simple external phase shifter, a transducer formed on a substrate have three interaction areas (acoustic sources) defined by different three electrodes, first electrode being common, second electrode being connected to one end of the phase shifter, third electrode being connected to another end of the phase shifter, and distances between interaction areas being unequal to 2n (n:integer).

Abstract: An improved manufacturing technique for producing a certain class of Surf Acoustic Wave (SAW) devices, namely those having input and output transducers in close proximity. A much higher manufacturing yield results from eliminating the cutting of a slot in the substrate between input and output transducers as formerly done. This frequently destructive step is replaced by ion-milling of a deep groove between the ports and backfilling with a metal of proper configuration to provide elecromagnetic shielding. The technique produces a new device that is at least equal to the prior art in rejection of unwanted couplings between input and output.

Abstract: A multichannel surface acoustic wave encoder/decoder having a common electrical input is designed so that the insertion losses of the channels differ despite the apparent design constraint of closely matched channel output impedances. The input transducing device or SAW transmitter is divided into individual transducers (or into subtransducers) having different numbers of finger overlaps, thus achieving different acoustic output levels which in turn result in different insertion losses for different channels. The finger spacing of the SAW transmitters can differ between the respective input transducers or subtransducers so as to optimize the center frequency of each channel.

Abstract: A surface acoustic wave device comprising a surface acoustic wave substrate member composed by forming an aluminum oxide film and a thin zinc oxide film successively on a glass substrate. The thickness h.sub.1 of the aluminum oxide film and the thickness h.sub.2 of the zinc oxide film are set within ranges of 0.1.ltoreq.h.sub.1 /.lambda..ltoreq.10 and 0.05.ltoreq.h.sub.2 /.lambda..ltoreq.0.35 (where .lambda. is representative of wavelength of Sezawa wave) respectively, thereby to utilize Sezawa wave or a similar mode wave transmitted on the surface acoustic wave substrate member in multi-layer structure.

Abstract: Acoustic surface wave devices of a novel class characterized by the provision of coupling means comprising at least several spaced filamentary electrical conductors extending over a first region and a second region for causing acoustic surface waves propagated across the coupling means in the first region to interact with acoustic surface waves propagated across the coupling means in the second region, by means of alternating electric signals induced on the filamentary electric conductors. The regions to be coupled are preferably formed on piezoelectric material, but modified forms of the coupling means can be made operable with other materials and suitable biassing fields.