Abstract: An electronic device for calibrating a nip measuring device associated with nip rollers includes a sensor selection circuit configured to receive signals from a sensor array that includes a plurality of nip sensors that are configured to detect operational parameters of the nip rollers, a plurality of sensor channel lines electrically connected between respective ones of the plurality of nip sensors and the sensor selection circuit, a calibration array including one or more calibration resistors, and a calibration channel line electrically connected between the calibration array and the sensor selection circuit. A signal on a respective one of the plurality of sensor channel lines is configured to be sampled by a respective one of a plurality of gain resistances. A nip sensor resistance of a sensor is determined based on the sampled signal on the sensor channel lines and the gain resistances. Related methods and systems are also described.

Abstract: An apparatus includes a control device configured to serve as a principal controlling agent in an electric power conversion device incorporating a switching circuit configured to be a bidirectional inverter. The control device is configured to subtract, from a reference signal that is determined in accordance with an operation mode of the electric power conversion device, a multiplied signal obtained by multiplying a control-target current of the switching circuit by a prescribed coefficient to generate, based on a result of the subtraction, a control signal for controlling the bidirectional inverter.

Abstract: Radio frequency (RF) filtering circuitry includes a number of filtering elements and switching circuitry configured to rearrange the filtering elements between a common node, a first input/output node, a second input/output node, and a third input/output node such that the RF filtering circuitry is capable of supporting carrier aggregation between RF signals within a first RF frequency band and RF signals within a second RF frequency band, as well as between RF signals within a first portion of the second RF frequency band and a second portion of the second RF frequency band.

Abstract: A DC-to-DC voltage converter comprising a differential charge pump that utilizes a differential clocking scheme to reduce output electrical noise by partial cancellation of charge pump glitches (voltage transients), and a corresponding method of operating a differential charge pump. The differential charge pump can be characterized as having at least two charge pump sections that initiate charge pumping in opposite phases of a clock signal to transfer (pump) charge to storage capacitors. The differential charge pump is particularly well suited for implementation in integrated circuit chips requiring negative and/or positive voltages, and multiples of such voltages, based on a single input voltage.

Abstract: A coupling apparatus having plurality of branches and a resistive element is disclosed. Each branch may be configured to couple at least one of (i) a first input node and (ii) a second input node to a first output node through a plurality of switches and a plurality of capacitors. The resistive element generally connects the first output node to a second output node. The first output node may be loaded by a respective parasitic capacitance of at least one of the switches.

Abstract: A variable bandwidth filter includes a first filter branch in parallel with a second filter branch. The first filter branch includes a first resistance in series with an input and a first output, and N parallel paths across the first output. The second filter branch includes a second resistance in series with the input and a second output, and N parallel paths across the second output. A clock tunes the first and second filter branches to a center frequency. A combiner produces a difference signal including a difference between the output of the first filter branch and the output of the second filter branch to provide a filter output having an adjustable bandwidth with reference to a center frequency. The bandwidth is adjusted by changing a value of at least one resistor or at least one capacitor in one or more of the first filter branch or the second filter branch.

Abstract: A band-pass filter made up by an operational amplifier and by an input circuit. The input circuit is formed by a capacitive filtering element, connected to the input of the operational amplifier; a coupling switch, coupled between an input node and the capacitive filtering element; a capacitive sampling element, coupled between the input of the filter and the input node; and a sampling switch, coupled between the input node and a reference-potential line. The coupling switch and the input sampling switch close in phase opposition according to a succession of undesired components sampling and sensing steps, so that the capacitive sampling element forms a sampler for sampling the undesired component in the undesired components sampling step, in the absence of the component of interest, and forms a subtractor of the undesired components from the input signal in the sensing step.

Abstract: A band-pass filter made up by an operational amplifier and by an input circuit. The input circuit is formed by a capacitive filtering element, connected to the input of the operational amplifier; a coupling switch, coupled between an input node and the capacitive filtering element; a capacitive sampling element, coupled between the input of the filter and the input node; and a sampling switch, coupled between the input node and a reference-potential line. The coupling switch and the input sampling switch close in phase opposition according to a succession of undesired components sampling and sensing steps, so that the capacitive sampling element forms a sampler for sampling the undesired component in the undesired components sampling step, in the absence of the component of interest, and forms a subtractor of the undesired components from the input signal in the sensing step.

Abstract: A down-conversion filter is provided, using first and second input terminals to receive signals that are differentially outputted by a preceding circuit, and using an output terminal to output a down-converted and filtered signal. An output capacitor is coupled to the output terminal. A first switched-capacitor network is arranged between the first input terminal and the output terminal. A second switched-capacitor network is arranged between the second input terminal and the output terminal. Each switched-capacitor network has capacitors, charging switches and charge-summing switches. The charging switches are designed to alternatively couple the capacitors to the first (or second) input terminal. The charge-summing switches are designed to couple the capacitors to the output terminal.

Abstract: A left-handed filter of the present invention includes an interstage coupling element connected to a first capacitor and a ground, a second capacitor connected to the interstage coupling element, a third capacitor connected to the second capacitor, a first inductor connected to the connection point of a fourth capacitor and the second capacitor, and the ground, a second inductor connected to a fifth capacitor and the ground, a first input and output coupling element connected to a sixth capacitor, and a second input and output coupling element connected to the third capacitor. The first and second capacitors, the third and sixth capacitors, the first and second inductors, and third and fourth inductors are respectively arranged in symmetrical positions with respect to an interstage coupling element.

Abstract: A switched capacitor circuit with switching loss compensation mechanism includes a resonant unit and a loss compensation unit. The resonant unit generates a resonant frequency and includes a capacitor switching unit for switching an output capacitor. The loss compensation unit is coupled to the resonant unit for providing loss compensation when the capacitor switching unit outputs different capacitance values.

Abstract: A switched-capacitor circuit including at least one first capacitor and a circuit for switching at least one armature of the first capacitor alternately to one and the other of two terminals at a switching frequency. The circuit further includes a second capacitor connected to the first capacitor at a node; and a filtering circuit connecting the node to a virtual ground only for frequencies belonging to a frequency range.

Abstract: Exemplary embodiments of the present disclosure provide a method and controller for damping multimode electromagnetic oscillations in electric power systems which interconnect a plurality of generators and consumers. The controller for damping such oscillations includes a phasor measurement unit (PMU) and a power oscillation damper (POD) controller. Each oscillating mode signal is damped and then superposed to derive a control signal. A feedback controller is used to feedback the control signal to a power flow control device in the power system.

Abstract: The invention relates to a lossy triphase low-pass filter (34) having a filter choke (18), a filter capacitor (20), and an attenuation element (32) per phase of said low-pass filter (34), wherein one filter capacitor (20) and one attenuation element (32) each are electrically connected in series. According to the invention, two diodes (36, 38) are provided as attenuation elements, which are electrically connected to each other in an anti-parallel manner. In this manner a lossy triphase low-pass filter (34) is obtained, the power loss of which is significantly reduced without any loss of the attenuation effect.

Abstract: The present invention aims at providing a sampling filter capable of changing a filtering characteristic without use of a complicate waveform as a control signal. A sampling filter 100 has a control section 140, a plurality of integrators, and a plurality of switches. An input current is accumulated in a plurality of capacitors in one clock; adds up electric charges accumulated in the integrators in several preceding clocks to one preceding clock; and outputs a result of addition. When electric charges are accumulated in the integrators in each clock, output electric charges can be subjected to, while being weighted, addition by switching an electric current to be input, so that the filtering characteristic is changed.

Abstract: To provide a charge sampling filter circuit and a charge sampling method. A charge sampling filter circuit includes a first capacitor that samples an input signal, and in which at least a portion of electric charge stored in the first capacitor by sampling is output to a second capacitor that is connectable with the first capacitor. The charge sampling filter circuit is characterized by including a switching portion that switches a circuit mode including a sampling mode that causes the first capacitor to sample the input signal, and an output mode that causes the first capacitor and the second capacitor to be connected. A capacitance value of the first capacitor in the output mode is set to be lower than the capacitance value in the sampling mode.

Abstract: A band-pass filter made up by an operational amplifier and by an input circuit. The input circuit is formed by a capacitive filtering element, connected to the input of the operational amplifier; a coupling switch, coupled between an input node and the capacitive filtering element; a capacitive sampling element, coupled between the input of the filter and the input node; and a sampling switch, coupled between the input node and a reference-potential line. The coupling switch and the input sampling switch close in phase opposition according to a succession of undesired components sampling and sensing steps, so that the capacitive sampling element forms a sampler for sampling the undesired component in the undesired components sampling step, in the absence of the component of interest, and forms a subtractor of the undesired components from the input signal in the sensing step.

Abstract: A down conversion filter with a plurality of sampling capacitor, wherein at least one sampling capacitor is discharged in sampling phases or charge-summing phases of the other sampling capacitors.

Abstract: An RF-energy modulation system dynamically adjusts tuned receiving circuits within a plurality of slave devices, thereby regulating the level of power reception in each slave device. The slave devices receive power from a single master device, through coupling of a primary antenna in the master device with a secondary antenna in each slave device. The amount of the power received by each slave device is a function of the antenna separation distance, and is thus different at each slave device location. The RF-energy modulation system monitors the power requirements of the slave device within which the modulation system is included, and modulates the tuning of the secondary antenna to maintain the proper power reception level. Advantageously, such modulation controls the power reception by the slave device, versus dissipating energy already received by the slave device.

Abstract: A discrete inductive-capacitive (LC) filter selects between at least two inductor banks to tune the LC filter. The filter receives an input signal that includes one or more bands of frequencies. A control signal selects a band of frequencies for processing. A first inductor bank is selected to filter a first band of frequencies, and a second inductor bank is selected to filter a second band of frequencies. A switch circuit couples the input signal to either the first inductor bank or the second inductor bank. The switch circuit selects the first inductor bank if the first band of frequencies is selected, and selects the second inductor bank if the second band of frequencies is selected. The switch circuit electrically isolates the switching of the input signal to the first and the second inductor banks, so as to enhance the Q factor of the LC filter. Circuit and techniques are disclosed to reduce parasitic capacitance in a capacitive bank that employs MOS transistors.

Abstract: A circuit for correcting the offset of an amplification and filtering chain having a predetermined gain and cut-off frequency depending on the value of at least one capacitor, comprising: a correction means for subtracting from the chain input a correction signal depending on the value of a programmable digital word; a digital automaton for, in a setting phase, searching, then memorizing one of two consecutive values of the digital word between which the output signal of the chain switches sign, the input signal being canceled during a setting phase; and comprising a means for, during the setting phase, reducing the value of said at least one capacitor with respect to its normal operating value.

Abstract: A series capacitive component for use in signal processing applications such as analog-to-digital (A/D) converters, switched capacitor circuits and the like that require matched capacitors is presented. A series capacitive component consists of multiple capacitors connected in series. By utilizing series capacitive components in integrated circuits, significantly lower loads are provided for the same resulting capacitor mismatch range as previous solutions. Additionally, for the same load and noise, using series capacitive components provides a substantially reduced match over previous solutions. Thus a circuit designer has more flexibility when making tradeoffs between circuit area and capacitor mismatch and therefore manufacturing yields.

Abstract: A non-inverting-side first switch is formed in a first area on one of sides of a differential amplifier, meanwhile a non-inverting-side second switch is formed in a second area on the other of sides of the differential amplifier, the non-inverting switches being for resetting a non-inverting input terminal of the differential amplifier. Similarly, An inverting-side first switch is formed in the first area, meanwhile an inverting-side second switch is formed in the second area, the inverting switches being for resetting a non-inverting input terminal of the differential amplifier. Further, a non-inverting-side line connecting the non-inverting-side first switch and the non-inverting input terminal, and an inverting-side line connecting the inverting-side first switch and the inverting-side second switch are provided next to each other. A signal line crossing one of the lines is provided so as to cross the other of the lines.

Abstract: The invention relates to a tuning circuit for tuning a filter stage, which has an RC element (1) with an RC time constant (&tgr;), with the RC time constant (&tgr;) being the product of the resistance of a resistor (R1) in the RC element (1) and the capacitance of a capacitor (C1), which is connected in series with the resistor (R1), in the RC element (1), having a comparator (10) for comparison of the voltage which is produced at the potential node (4) between the resistor (R1) and the capacitor (C1), with a reference ground voltage; and having a controller (15) which varies the charge on the capacitor (C1) in the RC element (1) until the comparator (10) indicates that the voltage which is produced at the potential node (4) is equal to the reference ground voltage, with the controller (15) switching a capacitor array (26) as a function of the charge variation time, which capacitor array (26) is connected in parallel with the capacitor (C1) in the RC element (1), in order to compensate for any discrepancy bet

Abstract: A radio communication apparatus is provided, which realizes a desired impedance matching state between a retractable antenna and a circuit connected thereto in both a situation where the antenna environment is similar to a free space and a situation where the antenna environment is dissimilar from a free space.

Abstract: A filter switching circuit includes first and second amplifiers, relays, and bandpass filters in which a bandpass filter having a higher frequency passband is selected by a smaller number of relays and the selected bandpass filter is connected in a decreased distance. A first relay is disposed near the input or output end of the first or second amplifier, respectively, and the other relays are positioned to correspond to the filters. The other relays are provided in opposite sides of a line connecting the output and input end, and the switching terminals of each pair of relays on the same side of the line are sequentially connected to one fixed terminal of each of the relays so that the other relays are sequentially connected to first and second fixed terminals of the first relay and each relay is connected to each second fixed terminal of each of the other relays.

Abstract: A non-inverting-side first switch is formed in a first area on one of sides of a differential amplifier, meanwhile a non-inverting-side second switch is formed in a second area on the other of sides of the differential amplifier, the non-inverting switches being for resetting a non-inverting input terminal of the differential amplifier. Similarly, An inverting-side first switch is formed in the first area, meanwhile an inverting-side second switch is formed in the second area, the inverting switches being for resetting a non-inverting input terminal of the differential amplifier. Further, a non-inverting-side line connecting the non-inverting-side first switch and the non-inverting input terminal, and an inverting-side line connecting the inverting-side first switch and the inverting-side second switch are provided next to each other. A signal line crossing one of the lines is provided so as to cross the other of the lines.

Abstract: The sound quality regulation apparatus has one attenuation unit and one amplification unit connected in series in this order in the signal line of the apparatus. The output of the attenuation unit is fed to a multiplicity of sound regulators associated with the split frequency bands of the input signal. Each sound regulator includes a switched capacity filter and a selector for selectively supplying the output of the sound regulator to either the attenuation unit, amplification unit, or none of these units. The sound quality regulation apparatus is thus capable of individually attenuating, enhancing, or not changing split frequency bands of the input signal.

Abstract: A hybrid loop filter includes an integrator having an input and an output wherein the output forms an output of the hybrid loop filter, a plurality of transconductance amplifiers having an input and an output wherein each output of the plurality of transconductance amplifiers is coupled to the input of the integrator, a switched capacitor low pass chain having an input and a plurality of branches wherein each of the plurality of branches is coupled to the input of a separate one of said plurality of transconductance amplifiers, and a feedthrough branch having an input and an output wherein the input is coupled to the input of the switched capacitor low pass chain to form an input of said hybrid loop filter, and the output is coupled to the input of a separate one of the plurality of transconductance amplifiers.

Abstract: A hybrid loop filter includes an integrator having an input and an output wherein the output forms an output of the hybrid loop filter, a plurality of transconductance amplifiers having an input and an output wherein each output of the plurality of transconductance amplifiers is coupled to the input of the integrator, a switched capacitor low pass chain having an input and a plurality of branches wherein each of the plurality of branches is coupled to the input of a separate one of said plurality of transconductance amplifiers, and a feedthrough branch having an input and an output wherein the input is coupled to the input of the switched capacitor low pass chain to form an input of said hybrid loop filter, and the output is coupled to the input of a separate one of the plurality of transconductance amplifiers.

Abstract: A programmable resistive-capacitive filter circuit enabling on-chip digital control of the frequency response includes a switched resistive type voltage divider network where one of the resistors forms an element of an RC filter and wherein the voltage divider additionally provides a DC bias on an output terminal. One preferred embodiment of the invention is directed to a programmable bandpass filter including MOSFET type semiconductor devices which are utilized as switched resistive elements of the filter.

Abstract: A programmable driver/equalizer with an alterable FIR enables the equalization of serial links or other transmission systems to adapt to a variety of transmission media and impairments specifically, intersymbol interference (ISI). Current mode differential drive circuits are coupled to a transmission media via a Finite Impulse Response (FIR) filter operating in the Z transform mode. The filter transfer function is of the general form of H(Z)=AB0+AB1Z−1+AB2Z2Z−2+ABnZ−N. The driver circuit is coupled to A and B coefficient setting circuits for the filter. The driver circuit also includes A coefficient level driver compensation and B coefficient level driver compensation to reduce the self-induced ISI from the driver while the filter coefficients are activated. The driver includes logic to further reduce ISI by switching off high capacitance paths when the filter coefficients are inactive.

Abstract: A variable bandpass filter system passes a selected range of frequencies while rejecting other frequencies in an RF input signal. The system includes a switch and an oscillator. The switch receives the RF input signal and an oscillating calibration signal, and passes the RF input signal or said oscillating calibration signal based on a control signal. The oscillator receives an output of the switch, and frequency and gain control signals. The frequency control signal selects an operating frequency of the oscillator, such that the operating frequency determines a range of frequencies to pass. The gain control signal selects gain of the oscillator, where the oscillating calibration signal allows the oscillator to be calibrated by varying the gain such that the oscillator acts as a filter.

Abstract: A complex filter minimizing mismatch error by averaging the mismatch error by integrating the real and imaginary input signals using the same integrator. A further advantage is that, as compared to known devices, the complex filter uses fewer number of components thereby reducing the consumed power. The complex filter may be used in a complex bandpass sigma-delta modulator, thereby increasing the performance of the sigma-delta modulator. The complex filter used in a sigma-delta modulator analog to digital converter increases performance of the analog to digital conversion since the mismatch noise is minimized. The complex bandpass sigma-delta modulator analog to digital converter include any number of complex filter stages.

Abstract: A switched-capacitor cosine filter circuit includes a differential amplifier and a switched-capacitor circuit. A set of control signals cause the switched-capacitor circuit to selectively couple the inputs and output of the differential amplifier thereby producing a switched input signal for the differential amplifier. During alternating states of the control signals, the switched-capacitor cosine filter circuit samples the input signal as a noninverting and inverting integrator circuit.

Abstract: A hybrid loop filter includes an integrator having an input and an output wherein the output forms an output of the hybrid loop filter, a plurality of transconductance amplifiers having an input and an output wherein each output of the plurality of transconductance amplifiers is coupled to the input of the integrator, a switched capacitor low pass chain having an input and a plurality of branches wherein each of the plurality of branches is coupled to the input of a separate one of said plurality of transconductance amplifiers, and a feedthrough branch having an input and an output wherein the input is coupled to the input of the switched capacitor low pass chain to form an input of said hybrid loop filter, and the output is coupled to the input of a separate one of the plurality of transconductance amplifiers.

Abstract: An impedance matching system and a network for automatic impedance matching at a driver circuit output for high frequency input-output devices. The impedance matching network comprises a control circuit which varies a control voltage proportionally to the frequency of voltage transients that occur on the driver circuit output, an adjustment mechanism which provides a linear motion proportional to the control voltage, and an adjustable length transmission line whose length is adjusted in proportion to the frequency of voltage transients on the driver circuit output and whose impedance, which is purely reactive, is proportional to its length. The purpose of the adjustable length transmission line is to reduce transient voltages by providing a matching impedance for the reactive component of the impedance of the receiver network to the driver circuit. In the preferred embodiment, the impedance matching network is manufactured on the same chip as the driver circuit.

Abstract: A switched capacitor wherein one of the plates of the capacitor to be switched is fed with the input signal via a transistor switch receiving as control signal at the gate thereof a pulse train with predetermined frequency. For compensating the parasitic capacitance of the transistor switch, a compensation component is located between the transistor switch and the capacitor to be switched. This compensation component is formed as an incomplete transistor structure, such as only 1/2 of a transistor, has a drain region in common with transistor switch and has an insulated gate. The parasitic capacitance of the compensation component thus is established mainly by the capacitance between the insulated gate and the drain region and thus corresponds to the parasitic capacitance of the transistor switch, whereby complete compensation with optimized charge transfer is achieved.

Abstract: An apparatus for detecting a damaged, disconnected or disabled RF load in an RF communications system wherein an RF source sends forward RF signals to the RF load. In general, the apparatus consists of an alarm circuit, and a device which passes RF signals reflected from the RF load to the alarm circuit. In one illustrative embodiment, the device is a circulator electrically connected to the RF source, the RF load and the alarm circuit such that, when there is an impedance mismatch between the RF source and the RF load, a portion of the forward RF signal reflects back through the circulator to the alarm circuit. The alarm circuit then checks whether the reflected portion of the forward RF signal (i.e. the reflected signal) meets a particular criterion indicating that a substantial impedance mismatch exists between the RF load and the RF source, thus indicating that the RF load is damaged disconnected or disabled.

Abstract: Briefly, in accordance with one embodiment of the invention an integrated circuit includes: a digital feedback control circuit to adjust the impedance of an interface circuit output buffer based, at least in part, on having adjusted the impedance of a non-data signal output buffer coupled to an external impedance. Briefly, in accordance with another embodiment of the invention, a method of digitally adjusting the impedance of an interface circuit output buffer comprises: digitally adjusting the impedance of a non-data signal output buffer coupled to an external impedance, and digitally adjusting the impedance of the interface circuit output buffer based, at least in part, on the digitally adjusted impedance of the non-data signal output buffer.

Abstract: A high power microwave or radio frequency network is disclosed which utilizes [2] two movable capacitive probes in order to provide complete vector tuning [in 4 axis by] utilizing the capacitive reactance of the two capacitive probes to provide [2] two tuning axis and the inductive reactance of two fixed inductive posts to provide [the] two additional [axis] axes of tuning, thereby allowing four axes of tuning with the movement of only two members, the capacitive probes. A third capacitive probe/inductive post set can be added to the two probe configuration for extremely high reflection correction at all phase angles.

Abstract: An impedance stabilizing unit including an input port; an output port connected to the input unit; an inductance matching circuit connected to ground and at least one of the input port and the output port, the value of the impedance of the inductance matching circuit being adjusted in accordance with a change of the impedance on the side of said output port. The above unit can be made small, realizing a lowered insertion loss.

Abstract: A method of impedance matching for coating SiO.sub.2 on a bare glass. The method includes the steps of outputting a matching voltage for matching an impedance of an oscillator with an impedance of a coating unit. A converted voltage is then produced by converting the amplitude of the matched voltage to a predetermined amplitude. The converted voltage is then stabilized and the phase is detected. Next, the phase of the matched voltage is controlled according to the phase of the converted voltage.

Abstract: An RF plasma system employs frequency tuning to change the frequency of an RF generator within a frequency range to match the impedance of a plasma chamber. Forward power and reflected power magnitudes are obtained from a bidirectional sensor. The ratio of reflected power to forward power is obtained for one frequency, and then the frequency is changed. The tuning algorithm compares the ratio of reflected to forward power at the new frequency with the ratio obtained earlier. If this ratio is smaller, the frequency is changed again in the same direction, but if larger, then the frequency is changed in the other direction. These steps are iterated until the ratio of reflected to forward power reaches a minimum. The tuning algorithm can be implemented in hardware or in software.

Abstract: A gas in a vacuum plasma processing chamber is ignited to a plasma by subjecting the gas to an r.f. field derived from an r.f. source having a frequency and power level sufficient to ignite the gas into the plasma and to maintain the plasma. The r.f. field is supplied to the gas by a reactive impedance element connected via a matching network to the r.f. source. The matching network includes first and second variable reactances that control loading of the source and tuning a load, including the reactive impedance element and the plasma, to the source. The value of only one of the reactances is varied until a local maximum of a function of power coupled between the source and the load is reached. The value of only the other reactance is varied until a local maximum of the function is reached. The two varying steps are then repeated as necessary.

Abstract: A piezoelectric filter is one not changing in the holding position of resonator in spite of impulse, small in the number of parts, easy to assemble from one direction, small, thin, and stable in characteristic. For example, as shown in FIG. 7, on electrode patterns on a package 10 forming wiring electrode patterns 11, holding protrusions 13 for holding resonators, and partition boards 14 for positioning resonators, a rectangular plate type piezoelectric resonators 12 are adhered with conductive adhesive. The rectangular plate type piezoelectric resonators 12 and the package 10 are adhered and reinforced from above with a vibration absorbing member 15, and wiring is formed from above the resonators by a wire bonding 16, thereby wiring resonators in a ladder form. Or, as shown in FIG.

Abstract: A switched capacitor includes two capacitors. During the charging period, the first capacitor is connected to an input potential and a first reference potential, and the second capacitor is connected to the input potential and a second reference potential. During the discharging period, those electrodes of the first and second capacitors which have been connected to the input potential are connected to a first and a second reference potential, respectively, and those which have been connected to the first and second reference potentials, respectively, are connected to an output terminal. The switched capacitor also has a circuit that is connected to the first and second reference potentials to produce an intermediate potential therebetween so that, before the charging period, the first capacitor is connected to the intermediate potential and the first reference potential and the second capacitor is connected to the intermediate potential and the second reference potential.

Abstract: An E-H matching apparatus includes an E-plane branch waveguide connected to an E-plane of a waveguide body, an H-plane branch waveguide connected to an H-plane of the waveguide body, and plungers provided in the E-plane branch waveguide and the H-plane branch waveguide, respectively. The plungers are moved to establish impedance matching between the waveguide and a load. The H-plane branch waveguide has a bend portion formed in close proximity to the waveguide body.

Abstract: The invention provides an impedance matching and power control system not resorting to mechanical control for a device for high frequency plasma treatment. An impedance matching unit 14 inserted in the terminal end of a power feed line 3 extending from a high frequency power oscillator 1 to a plasma chamber 2 comprises phase detecting means 17, a load-associated detector 19 having the function of detecting voltage, current, and phase angle, and an arithmetic and output section 21, whereby the impedance matching unit delivers a frequency control signal corresponding to the detected phase and a power signal representing the consumed power of the plasma chamber as calculated from the voltage, current and phase angle.

Abstract: Variable reactances of a matching network connected between an r.f. source and a plasma load of a vacuum plasma chamber processing a workpiece are varied so a tendency of the plasma to change in an unstable manner which can adversely affect processing of the workpiece is avoided while matching is approached. The plasma tendency to change in an unstable manner is detected by monitoring an electrical parameter resulting from r.f. current flowing between the source and load via the network. The parameter can be (1) statistically based, e.g. variance of percent delivered power, or (2) amplitude modulation in one or both of the 2-20 kHz and 50-200 kHz ranges.