Abstract: A substrate holder for a lithographic apparatus has a planarization layer provided on a surface thereof. The planarization layer provides a smooth surface for the formation of a thin film stack forming an electronic component. The planarization layer is of substantially uniform thickness and/or its outer surface has a peak to valley distance of less than 10 ?m. The planarization layer may be formed by applying two solutions of different concentration. A surface treatment may be applied to the burls to repel a solution of the planarization layer material.

Abstract: Some embodiments of the invention provide a starter system including a starter, capable of being in communication with an electronic control unit. The starter can include a motor coupled to a circuit and a pinion including a plunger, and a plurality of solenoid assemblies including a plurality of biasing members. The plurality of solenoid assemblies can include at least one solenoid winding capable of moving the plunger, and at least one solenoid assembly capable of holding the plunger, and at least one solenoid assembly capable of controlling current flow to the motor. Some embodiments include a first switch coupled to the circuit that is capable of being activated by the plunger to control current flowing to at least a portion of the circuit. Some embodiments include at least two power isolation switches capable of controlling a current flow within the circuit.

Abstract: A mover (344) moving a stage (238) along a first axis, along a second axis and along a third axis includes a magnetic component (354), a conductor component (356), and a control system (324). The magnetic component (354) includes a plurality of magnets (354D) that are surrounded by a magnetic field. The conductor component (356) is positioned near the magnetic component (354) in the magnetic field. Further, the conductor component (356) interacts with the magnetic component (354) when current is directed to the conductor component (356) to generate a controllable force along the first axis, a controllable force along the second axis, and a controllable force along the third axis. The conductor component (356) can include a split coil design, having a first conductor array (356A) and a second conductor array (356B) that is positioned substantially adjacent to the first conductor array (356A).

Abstract: A ground fault circuit interrupter device is described.

Abstract: A ground fault circuit interrupter device is described.

Abstract: A ground fault circuit interrupter device is described.

Abstract: An electrostatic clamp for use in a lithographic apparatus includes a layer of material provided with burls, wherein an electrode surrounded by an insulator and or a dielectric material is provided in between the burls. The electrostatic clamp may be used to clamp an object to an object support in a lithographic apparatus.

Abstract: A ground fault circuit interrupter device is described.

Abstract: An exposure apparatus which aligns a substrate by a stage device for driving a movable element, mounted with a substrate thereon, by using a plane motor. The stage device includes (i) a stator unit having a coil group, and (ii) the movable element, which moves on the stator unit. The stator unit includes (a) an exposure region where the substrate is to be subjected to a process of exposing the substrate, and (b) a measurement region where the substrate is to be subjected to a process of measuring a position of the substrate. The coil group in the stator unit is temperature-controlled independently between the exposure region and the measurement region.

Abstract: This invention pertains to a simple, economical, reliable secure operation mechanism that can be adapted to factory production, or for post-sale, on any electrical shutdown device in a cabinet, that is designed to enable the shutdown device to be switched, while the cabinet is open, only after an additional voluntary action is performed by the operator on a secondary handle provided inside said cabinet.

Abstract: Integral solenoid and starter motor having four or more poles for internal combustion engines has an electrically conductive disc carried by the armature or core of the solenoid for movement in response to energization and de-energization of the solenoid coil. Three stationary contacts of electrically conductive material are disposed in circumferentially spaced relation about the longitudinal axis of the core for sequential engagement by the movable disc. One of the stationary contacts, connected to an electrical energy source, is disposed at a position closer to the movable disc than the other stationary contacts. The other stationary contacts are connected in parallel circuits to two poles of the starter motor whereby each contact carries one-half the current supplied by the energy source. The disc is tiltably mounted on the core for making initial contact with the first stationary contact and later, with the two other contacts in response to the solenoid being energized.

Abstract: The electromagnetic relay has a pair of normally closed and normally open fixed terminals which are disposed opposing each other. At least two normally closed fixed contacts are mounted on the normally closed fixed terminal, and at least two normally open fixed contacts are mounted on the normally open fixed terminal. The normally closed and normally open fixed terminals are commonly used by a plurality of relay units. Therefore, the relay can be small enough to be installed on a small area, and allows high-density electric circuits to be provided on circuit boards.

Abstract: A plurality of individual electrical load switches each having an operating tab are so mounted and oriented that the operating tabs extend toward a central axis to define a circle substantially normal to the central axis and operate substantially in the direction of the central axis. An operating arm having ends thereof arranged to be brought into register with each operating tab at mutually exclusive angular positions is normally tilt mounted in a first direction upon a rotor that may be positioned in selected ones of a plurality of angular positions by a step motor. Upon one end of the arm being brought into register with a switch operating tab, the arm is tilted in the opposite direction to effect the operation of the operating tab with which the one end thereof is in register to place the corresponding individual electrical load switch in a selected circuit condition.

Abstract: An elongated unitary arm of a rigid material is tiltably mounted upon a rotor supported for rotation about a central axis and is spring force tilted in a first direction. This assembly is located in such a manner that the arm may be placed in register with any one of the operating tabs of a plurality of electrical load switches so mounted and oriented that the operating tabs extend toward the central axis to define a circle. Upon being placed in register with a switch operating tab, the arm is tilted in the opposite direction by the action of a solenoid actuated plunger.

Abstract: On an insulating baseboard with a central opening there are located contacts. There are also auxiliary contacts intended for connecting local control circuits of the device. A rotational electromechanical drive is provided to rotate a contactor, and an electromagnetic drive is adapted to reciprocate said contactor for operating contacts. The electromagnet drive has an electromagnet for closing contacts and a plurality of electromagnets for opening contacts. The number of the electromagnets corresponds to the number of the contact fixing devices. The armature of each electromagnet is connected with one of the contact fixing devices.

Abstract: An electric circuit switchgear includes main contacts circumferentially arranged on a fixed panel and auxiliary contacts. The switchgear also includes a rotary electromechanical drive connected with a driving shaft and enabling the latter to be turned through a pre-set angle. The driving shaft is rotated together with an actuating element of an electromagnetic drive provided with a contactor and a disconnector both having at least one projection interacting with the main and auxiliary contacts through contact closing and disconnecting mechanisms having locks.

Abstract: A magnetizing current switch particularly adaptable for use in gas insulated substations comprising a sealed housing including two spaced-apart electrical conductors and a movable contact for electrically connecting or disconnecting the electrical conductors. A rotatable drive shaft is coupled to drive means, which translate the rotation of the drive shaft to a generally straight-line motion, and the straight-line motion moves an insulating rod which is secured to the contact, thereby positioning the contact either in contact with both conductors, or spaced apart from at least one of them. The drive means includes a pair of support members and a pair of spaced-apart pivot links pivotally coupled to the support members. One of the pivot links is coupled to the drive shaft, and a link connector couples the pivot links together.