Force-actuated Patents (Class 338/47)
  • Patent number: 4845457
    Abstract: A deformable type variable resistor element using silicone gel with a penetration value of approximately 50 to 200 as a basic member in which electrically conductive fine particles as much as 20 to 50 weight percent are mixed, which basic member is provided with at least a pair of electrodes so that the conductive fine particles contained in the basic member come in contact each other to form a number of electrical passages between the pair of electrodes when the basic member is physically deformed by an external force.
    Type: Grant
    Filed: November 25, 1987
    Date of Patent: July 4, 1989
    Assignee: Kabushiki Kaisha Cubic Engineering
    Inventor: Motoyasu Nakanishi
  • Patent number: 4837548
    Abstract: A resistor is formed from a structure including at least one network of electrically conductive wires, and a matrix for supporting the aforementioned structure, the matrix formed from a flexible, electrically insulating material inside which the aforementioned structure is sunk, with a number of surface portions of the wires in the aforementioned networks being separated by small gaps, the resistor being formed by a manufacturing process substantially including the steps of forming a system including a structure having at least one network of electrically conductive wires, and arranging a liquid material between the wires of the aforementioned networks in the aforementioned structure, the aforementioned liquid material being designed to assume a state in which it is both solid and flexible; and in subsequently solidifying the aforementioned material in such a manner as to form a solid, flexible matrix for supporting the aforementioned structure.
    Type: Grant
    Filed: January 19, 1988
    Date of Patent: June 6, 1989
    Assignee: Leda Logarithmic Electrical Devices for Automation S.r.l
    Inventor: Paolo Lodini
  • Patent number: 4794365
    Abstract: A coaxial cable pressure sensor having a partially conductive layer of fibres or particles between the inner and outer coaxial conductors whereby pressure applied to the sensor produces a detectable change in resistance of the circuit passing through the partially conductive layer. One or more of the sensors may be incorporated into a vehicle weighing system, preferably in the form of a portable "mat" which may be folded or rolled up.
    Type: Grant
    Filed: October 2, 1986
    Date of Patent: December 27, 1988
    Assignee: Raychem Limited
    Inventor: John H. Dunbar
  • Patent number: 4782319
    Abstract: The sensor includes a rigid support and a diaphragm having a peripheral portion fixed by a layer of glue to the support. The central portion of the diaphragm is spaced from the support and, on its surface facing the support, carries at least one thick-film resistor acting as a piezo-resistive transducer. The diaphragm can deform resiliently towards the support when a pressure is exerted on its other surface. The surface of the support which is connected to the diaphragm is flat, and the layer of glue has a calibrated thickness such that the distance between the diaphragm and the surface of the support at rest is substantially equal to the deflection of the diaphragm corresponding to a predetermined maximum pressure measured.
    Type: Grant
    Filed: February 10, 1987
    Date of Patent: November 1, 1988
    Assignee: Marelli Autronica S.p.A.
    Inventors: Roberto Dell'Acqua, Giuseppe Dell'Orto, Gilberto Dendi
  • Patent number: 4779460
    Abstract: A sensor and system for measuring the level of a liquid includes a linear potentiometer having a resistance circuit element and a mechanism for changing the resistance of the circuit element including a conductor formed from a semiconducting composition having a resistance inversely proportional to the horizontal force it experiences. The sensor includes an elongated vertical support structure and a float mechanism which is mounted on the support structure to move vertically therealong at the level of the liquid in a fuel storage tank. The float mechanism includes a roller which rolls along the support structure and supplies the horizontal force to the semiconducting composition. The semiconductor composition cooperates with another conductor coupled to the resistance circuit element to produce an electrical signal which is the function of the vertical position of the roller on the support structure.
    Type: Grant
    Filed: November 2, 1987
    Date of Patent: October 25, 1988
    Assignee: BLTEC, Inc.
    Inventor: William T. Cruickshank
  • Patent number: 4775850
    Abstract: In a thick-film pressure sensor comprising a support plate on at least one surface of which are deposited at least one thick-film resistor acting as a piezo-resistive transducer and at least one pair of thick-film conductors acting as rheophores, the at least one thick-film resistor and the thick-film conductors are covered with a protective layer of dielectric material.
    Type: Grant
    Filed: March 10, 1987
    Date of Patent: October 4, 1988
    Assignee: Marelli Autronica S.p.A.
    Inventors: Roberto Dell'Acqua, Giuseppina Rossi
  • Patent number: 4757711
    Abstract: A dynamometer comprising a first member, a second member which is movable relative to the first member along a predetermined path, a piston and cylinder arrangement for resisting movement of the second member with respect to the first member in one direction along the predetermined path with a force which increases from zero with the distance moved from a rest position, and a potentiometer having a first elongate resistor element having two ends and a second wiper element which is in electrical contact with the resistor element and is movable with respect thereto to establish an electrical resistance between the wiper element and one end of the resistor element which increases with relative movement of the elements in one direction.
    Type: Grant
    Filed: July 24, 1986
    Date of Patent: July 19, 1988
    Inventor: Yoshiaki Omura
  • Patent number: 4748433
    Abstract: An elastomeric electro-conductive device (10) capable of providing within a predetermined range of elastic elongation (.lambda.) of the device (10) sensory signals representative of elastic elongation (.lambda.) imposed on the device includes an elastomeric electro-conductive member (11) bonded to an elastomeric substrate (12). Member (11) and substrate (12) have substantially similar resistance-to-stretch characteristics .phi. within the predetermined range. On a Mooney Plot for (.lambda..sup.-1) values in the range 0.5 to 0.8 .phi. is substantially constant at 0.4 M Nm.sup.-2.
    Type: Grant
    Filed: January 22, 1986
    Date of Patent: May 31, 1988
    Assignee: University of Strathclyde
    Inventors: John Jackson, Seyed A. Angadjivand
  • Patent number: 4745812
    Abstract: The sensitive high resolution microminiature tactile sensor comprises an array of unique micromachined bossed silicon transducer cells in conjunction with requisite electrical circuitry and components, which collectively provide an ability to sense torque by detecting both normal and lateral applied loads, thereby opening a new frontier in tactile sensing. One preferred embodiment comprises a four column by four row array arrangement providing sixteen unique bossed closely spaced silicon diaphragm tactile transducer elements or sensors fabricated from a silicon body member. Collectively the close spacing between the microminiature tactile sensing elements approaches the resolution of the human hand. Electrical signal information from sensor-incorporated internal and external related circuitry components can be analyzed via computer devices to yield specific loading characteristics on the sensor surface. The upper surface of the transducer cell array is protectively covered with a thin polymer layer.
    Type: Grant
    Filed: March 25, 1987
    Date of Patent: May 24, 1988
    Assignee: The United States of America as represented by the Secretary of the Army
    Inventors: Charles A. Amazeen, Steven S. Bishop
  • Patent number: 4729809
    Abstract: An anisotropically conductive adhesive composition (10) for use in electrically connecting at least one conductive area (14) on one substrate (12) with at least one conductive area (20) on a second substrate (18) is disclosed. The composition (10) is comprised of a mixture of conductive particles and a nonconductive adhesive binder (26). The conductive particles are dispersed throughout the binder in a plurality of noncontiguous conductive units (24) such that, upon applying a layer (30) of the composition (10) over both the conductive and insulating areas (14, 16) on one substrate (12) and positioning in a conducting relationship and adhering said at least one conductive area (20) on the second substrate (18) with said at least one conductive area (14) on the first substrate (12), the units (24) establish electrical connection between the adhered conductive areas (14, 20) on the two substrates (12, 18).
    Type: Grant
    Filed: February 17, 1987
    Date of Patent: March 8, 1988
    Assignee: AMP Incorporated
    Inventors: Ronald A. Dery, Warren C. Jones, William J. Lynn, John R. Rowlette
  • Patent number: 4728920
    Abstract: A fluid pressure transducer having a hollow enclosure with an elongated tubular guide supported therein around which a tubular piston moves in response to fluid pressure forces acting on one piston end. A spirally-wound wire resistance coil on the guide is contacted by one end of a conductor carried by the movable piston to effectively charge resistance through the conductor and parts of the coil. The conductor is connected to one end of a metal spring which opposes piston movement due to pressure forces. An opposite end of the metal spring is connected to a terminal to transmit the resistance changes.
    Type: Grant
    Filed: May 29, 1987
    Date of Patent: March 1, 1988
    Assignee: Chrysler Motors Corporation
    Inventors: William D. McKee, John L. Evans, Joseph T. Betterton, Alfred H. Glover, Thomas S. McKee
  • Patent number: 4710744
    Abstract: Disclosed is a pressure transducer package comprising a housing and a substantially cylindrical chamber formed into the housing, a first end of the chamber comprising a substantially flat surface. The package further comprises a substantially cylindrical interface plate having first and second substantially flat end surfaces, one end surface of the interface plate facing the first end surface of the chamber. The package further comprises a pressure transducer comprising a pressure sensitive silicon die mounted to a substantially cylindrical support member. The support member comprises first and second substantially flat end surfaces. The other end surface of the interface plate faces one end surface of the support member. The housing comprises plug apparatus for hermetically sealing the chamber, the plug apparatus having a substantially flat surface forming a second end of the chamber.
    Type: Grant
    Filed: April 8, 1985
    Date of Patent: December 1, 1987
    Assignee: Honeywell Inc.
    Inventor: David B. Wamstad
  • Patent number: 4703663
    Abstract: Force sensor for electric measuring of forces, mechanical stress or the like, which are converted in the interior of the force sensor into a mechanical normal stress field and then into an electric resistance change. Transverse to the normal stress .sigma..sub.j a piezo-resistive measuring element (17) consisting of at least one layer of resistance material is applied whose material constant c is selected such that a mechanical strain of the measuring element resulting from the strain of a carrier body (1) does not influence the measurement. The resistance layers may be overlying crossing patterns M.sub.1, M.sub.2 forming area elements (13) of equal area size which completely exhibits the mutually perpendicular strains .epsilon..sub.x, .epsilon..sub.y of the carrier body (1). For compensating disturbing influences exterior of the normal stress field a compensation element (18) is provided corresponding to the measuring element (17).
    Type: Grant
    Filed: March 24, 1986
    Date of Patent: November 3, 1987
    Inventor: Klaus Oppermann
  • Patent number: 4694231
    Abstract: A multi-layered tactile sensing skin is provided for a robotic arm or the like. The skin includes adjacent layers of electrically insulative film having opposed contiguous surfaces. An electrically conductive carbon based compound is applied uniformly to one of the surfaces, while the other surface is selectively coated with silver oxide to form a series of pairs of first and second electrically conductive regions separated from one another by a dielectric gap. The carbon based conductor bridges the gap betwen the conductive regions in each pair, permitting flow of electrical current between the regions. The current flow increases with an increase in pressure over the interface between the layers of film, and the amperage increase can be utilized to trigger a signal to the robot power supply, to decelerate, stop or reverse arm movement.
    Type: Grant
    Filed: April 18, 1986
    Date of Patent: September 15, 1987
    Assignee: Mecanotron Corporation
    Inventor: Joseph G. Alvite'
  • Patent number: 4670092
    Abstract: A monolithic accelerometer is fabricated with an integral cantilever beam sensing element which is etched out of a silicon wafer from the back surface. A thermal silicon oxide is formed on both surfaces of a (100) silicon wafer. Silicon oxide is removed from the back surface in a pattern which defines the sides of the cantilever beam and the sides of an alignment groove. The width and orientation of the openings in the silicon oxide are selected to control the depth of etching when the wafer is subsequently etched with an anisotropic etchant. An integrated circuit is then formed on the front surface and dry etching is used to complete the groove and separate the sides of the beam from the wafer.
    Type: Grant
    Filed: April 18, 1986
    Date of Patent: June 2, 1987
    Assignee: Rockwell International Corporation
    Inventor: Manouchehr E. Motamedi
  • Patent number: 4640137
    Abstract: A sensitive, durable, high resolution tactile sensor particularly suited for use as a robot end effector in an automated manufacturing process. The tactile sensor has an array of pressure sensing sites provided by a series of current emitter electrodes surrounded by a series of companion current collector electrodes both of which engage a rough conductive layer carried on the underside of a resilient platen. The emitters are electrically connected together in parallel rows, and the collectors are electrically connected together in parallel columns above and across the rows. The emitters and collectors are electrically insulated from one another as are the rows and columns. When the platen engages an object to apply pressure at one of the sites, and a positive voltage is applied to an emitter electrode, current flows from the emitter electrode and through the conductive layer to the companion collector electrode from which it is collected and measured.
    Type: Grant
    Filed: May 31, 1985
    Date of Patent: February 3, 1987
    Assignee: Lord Corporation
    Inventors: Michael W. Trull, Richard C. Powell
  • Patent number: 4639711
    Abstract: The invention relates to such signal transmitters for electrical signals which comprise an elastic body (1) consisting of an elastomer matrix containing carbon black as a filling agent. The invention solves the problem of extending the field of use of such signal transmitters and is based on the realization that this is attained if the elastic body is arranged so that, when deformed, it will be subjected to bending rather than compression. The carbon black should be of the structure-forming type and present in an optimized concentration interval, generally about 5-15 parts counted on 100 parts of the elastomer.
    Type: Grant
    Filed: August 8, 1984
    Date of Patent: January 27, 1987
    Inventors: Stig Edholm, Bengt Stenberg
  • Patent number: 4611497
    Abstract: A transducer for responding electrically to forces and torques applied to the transducer including a force-variable impedance element engaged by force members which are retained in bearing relationship with the impedance element by an annular retainer and which transmit applied forces to the impedance element.
    Type: Grant
    Filed: November 2, 1984
    Date of Patent: September 16, 1986
    Assignee: Marker International
    Inventors: Walter Knabel, Gerd Klubitschko
  • Patent number: 4600934
    Abstract: An etch stopped layer portion overlying a (100) or (110) major face of a diamond cubic semiconductor material is undercut anisotropically etched by orienting a side edge of the etch stopped layer portion which is to be undercut, at an angle to the most nearly parallel {111} trace on the (100) or (110) face. The etch time is further reduced by slotting through the etch stopped layer with slots oriented at an angle to the {111} traces on the underlying (100) or (110) face. Undercut bridge structures are formed by undercutting quadrilateral etch stopped layer portions from opposite sides of the quadrilateral or from the sides plus slots forming diagonals of {111} trace quadrilaterals having combined areas coextensive with the area to be undercut.
    Type: Grant
    Filed: January 25, 1984
    Date of Patent: July 15, 1986
    Assignees: Harry E. Aine, Barry Block
    Inventors: Harry E. Aine, Barry Block
  • Patent number: 4588975
    Abstract: An integrated sensor for force and motion, includes a solid insulating material body, a flexible metal strip for force transmission sealed to and extending out of the body, a piezoresistive probe in the form of a silicon wafer fastened on the metal strip in the body for mechanical loading by the metal strip, conductive connections sealed to and extending out of the body for application to an electrical instrument and for voltage supply to the probe, and at least two electrical terminals connected between the silicon wafer and the conductive connections.
    Type: Grant
    Filed: June 30, 1983
    Date of Patent: May 13, 1986
    Assignee: Siemens Aktiengesellschaft
    Inventors: Herbert F. Roloff, Hartwig W. Kollner
  • Patent number: 4555954
    Abstract: A tactile sensor (100) comprises a printed circuit board (102) having a plurality of spaced apart, electrically conductive foils (104) thereon, each coupled to a decoder (106) which selectively applies a voltage individually thereto. The foils are separated from each other by each of a plurality of upraised insulative portions (116) each comprised of a layer of photoresist material. An anisotropically electrically conductive rubber pad (107) having alternating electrically conductive and nonconductive strips (108, 110) overlies the substrate so that the conductive strips are supported in spaced relationship from the conductive foils by the upraised photoresist layers. Each conductive strip is coupled to a multiplexer (115). Upon the application of a force against the rubber sheet, the conductive strips are deformed into electrical contact with the conductive foils on the substrate.
    Type: Grant
    Filed: December 21, 1984
    Date of Patent: December 3, 1985
    Assignee: AT&T Technologies, Inc.
    Inventor: Byoung S. Kim
  • Patent number: 4528590
    Abstract: An electronic treadle (10) for generating an electrical signal proportioned to the degree of angular movement of a pivotally mounted treadle plate (14) includes a base (32) having side portions (26,28) which cooperate with corresponding side members (22,24) extending from the treadle plate. A pair of stops (76,78) are carried on one (26) of the side portions which cooperate with a tab (80) movable with the treadle plate (14) to limit the angular movement thereof. Movement of the treadle plate (14) is transmitted to a rotary potentiometer (66) carried on side portion (28) by a shaft (62) and socket (57) connecting the shaft to side member (22).
    Type: Grant
    Filed: November 9, 1983
    Date of Patent: July 9, 1985
    Assignee: Allied Corporation
    Inventors: Lenora A. Bisacquino, Larry E. Dienes, Rudolph J. Plasko
  • Patent number: 4503705
    Abstract: The flexible force sensor having an electrical conductor releasably attachable to a test site and a plurality of relatively spaced electrical contacts supported for varying contact with the conductor such that when a force is applied to the force sensor, the electrical contacts and electrical conductor move into and out of varying areas and/or paths of electrical contact to produce electrical resistances therebetween corresponding to the extent of such areas and/or paths and as a function of the applied force.
    Type: Grant
    Filed: March 14, 1983
    Date of Patent: March 12, 1985
    Assignee: The Langer Biomechanics Group, Inc.
    Inventor: Michael Polchaninoff
  • Patent number: 4493219
    Abstract: An energy conversion and transmission device is disclosed which, in its preferred embodiment, has a rigid substrate with a resistive area printed on its top surface, a spacer of non-conductive material with an aperture therethrough positioned in register with the rigid substrate resistive area, and a flexible substrate with a resistive area printed on its bottom surface in register with the aperture and the rigid substrate resistive area so that application of a force to the flexible substrate with an elastomeric actuator will move the flexible substrate resistive area to establish an electrical contact area with the rigid substrate resistive area, which electrical contact area increases and, thus, the resistivity of that area decreases as the applied force increases. Thus, when an electrical potential is applied across the two resistive areas, current flow through the two resistive areas increases as the applied force increases. Capacitive, inductive and other embodiments of the device are also disclosed.
    Type: Grant
    Filed: August 2, 1982
    Date of Patent: January 15, 1985
    Assignee: Illinois Tool Works, Inc.
    Inventors: Larry L. Sharp, Mark Klosinski
  • Patent number: 4481815
    Abstract: A tactile sensor in which the sensor elements are discrete, elastomeric, electrically conductive, electrically force-sensitive forcel units electrically insulated from one another, each forcel unit defining a local force-resolution region (forcel) for resolving a deflection pattern in the surface of the sensor, each sensor element being connected between a pair of electrical channels which produce a set of signals representative of the deflection pattern in the surface; a sensing system for determining a parameter of an object being contacted by the tactile sensor; and a method of fabricating the sensor.
    Type: Grant
    Filed: December 23, 1982
    Date of Patent: November 13, 1984
    Inventor: Kenneth J. Overton
  • Patent number: 4479392
    Abstract: A transducer for indicating changes of an applied physical force including a first electrically propertied means connected within an electrical circuit to create an electrical potential across the first means, a second electrically propertied means adapted to be placed in contact with the first means in a manner so as to reflect a linear relationship between the area of contact between the two means and the force applied to the second means. A preferred embodiment utilizes an elastomeric actuator to apply the force to the second means.
    Type: Grant
    Filed: January 3, 1983
    Date of Patent: October 30, 1984
    Assignee: Illinois Tool Works Inc.
    Inventors: John W. Froeb, Keith A. Engstrom
  • Patent number: 4451817
    Abstract: The transducing apparatus for a dynamometer includes a band shaped measuring element which is subjected to a load-dependent tensile force. The measuring element is made of an amorphous metal. It is band-shaped and may have one or two necked-down portions whose resistance varies as a function of applied force. Such measuring element has particularly desirable mechanical characteristics such as high limits of permissible applied force, resistance to creep, low hysteresis, and stability with respect to temperature variations.
    Type: Grant
    Filed: September 27, 1982
    Date of Patent: May 29, 1984
    Assignee: Mettler Instrumente AG
    Inventor: Hans-Rudolf Zulliger
  • Patent number: 4441097
    Abstract: A pressure sensing mat utilizes a thin sheet of semiconductor material that has an electrical conductivity generally invariable as to pressure applied to the mat material. The sheet of semiconductor material is sandwiched between sheets of copper, steel or aluminum foil which are in mechanical contact with the semiconductor sheet to define a pair of electrodes. The electrodes are connected to various circuits including a pressure (voltage) threshold detector, a learning circuit for establishing a learned threshold, a circuit for matching time-pressure patterns and a circuit for detecting pressures between a predetermined maximum and minimum level. A matrix of pressure sensing mats is utilized with various circuits to detect sequential pressure patterns.
    Type: Grant
    Filed: November 20, 1981
    Date of Patent: April 3, 1984
    Assignee: Antroy Enterprises, Inc.
    Inventor: Gary B. Anderson
  • Patent number: 4426884
    Abstract: The flexible force sensor having an electrical conductor releasably attachable to a test site and a plurality of relatively spaced electrical contacts supported for varying contact with the conductor such that when a force is applied to the force sensor, the electrical contacts and electrical conductor move into and out of varying areas of electrical contact to produce electrical resistances therebetween corresponding to the extent of such contact and as a function of the applied force.
    Type: Grant
    Filed: February 24, 1982
    Date of Patent: January 24, 1984
    Assignee: The Langer Biomechanics Group, Inc.
    Inventor: Michael Polchaninoff
  • Patent number: 4347505
    Abstract: A pressure sensing mat utilizes a thin sheet of semiconductor material that has an electrical conductivity generally invariable as to pressure applied to the mat material. The sheet of semiconductor material is sandwiched between sheets of copper, steel or aluminum foil which are in mechanical contact with the semiconductor sheet to define a pair of electrodes. The electrodes are connected to various circuits including a pressure (voltage) threshold detector, a learning circuit for establishing a learned threshold, a circuit for matching time-pressure patterns and a circuit for detecting pressures between a predetermined maximum and minimum level. A matrix of pressure sensing mats is utilized with various circuits to detect sequential pressure patterns.
    Type: Grant
    Filed: January 29, 1979
    Date of Patent: August 31, 1982
    Assignee: Antroy Enterprises, Inc.
    Inventor: Gary B. Anderson
  • Patent number: 4257305
    Abstract: An electronic musical instrument incorporates one or more pressure sensitive push-button controllers actuable independent of the keys or other note selecting elements of the instrument to vary a corresponding number of musical parameters. The specific controllers provide a sensitive, smooth, repeatable parameter variation in response to both the location and the force of the player's touch.
    Type: Grant
    Filed: December 23, 1977
    Date of Patent: March 24, 1981
    Assignee: ARP Instruments, Inc.
    Inventors: David Friend, Royce C. Kahler, Jr.
  • Patent number: 4252391
    Abstract: Anisotropically pressure-sensitive electroconductive composite sheets are provided which have a very low electric conductive resistance in the direction perpendicular to the plane of the sheet when compressed with an adequate pressure in the direction but a high insulating resistance in all directions within the plane of the sheet. The composite sheets are constructed so that electrically conductive fibers are uniformly dispersed in the matrix of an electrically insulating substance, the average length of the fibers ranging from 20 to 80% of the thickness of the sheet, and are aligned in the direction substantially perpendicular to the plane. They are useful as a switching material in various miniaturized electronic circuits.
    Type: Grant
    Filed: June 19, 1979
    Date of Patent: February 24, 1981
    Assignee: Shin-Etsu Polymer Co., Ltd.
    Inventor: Ryoichi Sado
  • Patent number: 4071838
    Abstract: Solid state folded leaf spring force transducers are fabricated by batch photolithographic and etching techniques from a monocrystalline material, such as silicon. The folded leaf spring structure includes elongated gaps separating adjacent leaf spring leg portions, such elongated gaps being oriented parallel to a crystallographic axis of the monocrystalline material. In a preferred embodiment the monocrystalline material is of diamond cubic type and the leaf spring gaps extend in mutually orthogonal directions parallel to the <011> and <011> crystallographic axes, respectively. In a preferred method of fabricating the spring structure, the structure is etched from a monocrystalline wafer by means of an anisotropic etchant so as to more precisely define angles and dimensions of the resultant spring structure.
    Type: Grant
    Filed: February 9, 1976
    Date of Patent: January 31, 1978
    Assignee: Diax Corporation
    Inventor: Barry Block
  • Patent number: 4050049
    Abstract: Solid state folded leaf spring force transducers are fabricated by batch photolithographic and etching techniques from a monocrystalline material, such as silicon. The folded leaf spring structure includes elongated gaps separating adjacent leaf spring leg portions, such elongated gaps being oriented parallel to a crystallographic axis of the monocrystalline material. In a preferred embodiment the monocrystalline material is of diamond cubic type and the leaf spring gaps extend in mutually orthogonal directions parallel to the <011> and <011> crystallographic axes, respectively. In a preferred method of fabricating the spring structure, the structure is etched from a monocrystalline wafer by means of an anisotropic etchant so as to more precisely define angles and dimensions of the resultant spring structure.
    Type: Grant
    Filed: February 9, 1976
    Date of Patent: September 20, 1977
    Assignee: Signetics Corporation
    Inventor: Albert P. Youmans
  • Patent number: 3952587
    Abstract: The invention is a device for sensing torque differential developed by the driven wheel of a vehicle and an indicator to indicate relative degrees of the developed torque.
    Type: Grant
    Filed: September 24, 1974
    Date of Patent: April 27, 1976
    Inventor: Richard Goodhart
  • Patent number: RE31459
    Abstract: Solid state folded leaf spring force transducers are fabricated by batch photolithographic and etching techniques from a monocrystalline material, such as silicon. The folded leaf spring structure includes elongated gaps separating adjacent leaf spring leg portions, such elongated gaps being oriented parallel to a crystallographic axis of the monocrystalline material. In a preferred embodiment the monocrystalline material is of diamond cubic type and the leaf spring gaps extend in mutually orthogonal directions parallel to the <011> and <011> crystallographic axes, respectively. In a preferred method of fabricating the spring structure, the structure is etched from a monocrystalline wafer by means of an anisotropic etchant so as to more precisely define angles and dimensions of the resultant spring structure.
    Type: Grant
    Filed: January 28, 1980
    Date of Patent: December 6, 1983
    Assignees: Harry E. Aine, Barry Block
    Inventor: Barry Block