Abstract: To avoid any deterioration of the surface properties of objects of ceramic, glass, or a single-crystal insulating material which are subjected to a vacuum temperature process, a thin layer of a spin-on glass solution with a silicon-dioxide equivalent of not more than 10% is applied to the objects by spinning or spraying prior to the vacuum temperature process. This is particularly important to avoid the strong moisture dependence of capacitive or resistive pressure sensors having a substrate and a diaphragm to be joined together, forming a chamber sealed at least at the edge.

Abstract: An acceleration detector includes a beam having a strain gauge mounted thereon, an arm of synthetic resin fixed on the beam and a spherical weight fixed on the end of the arm. The weight, the arm and the beam are formed as a single unit by insert formation molding to provide a shock proof detector with good accuracy.

Abstract: A semiconductor strain sensor includes a silicon substrate, a strain resistive element and electrodes. The silicon substrate has a deformable portion which is deformed when stress is applied to it. The strain resistive element is formed on the deformable portion and has an at least a first layer and a second layer which form a heterojunction between them. The first layer is doped with impurities so that a two-dimensional carrier gas layer is formed in the second layer near the heterojunction. The two-dimensional carrier gas layer has carriers originating from the impurities. The electrodes electrically contact the two dimensional carrier gas layer. Change of resistance of the strain resistive element in accordance with the stress is detected through the electrodes.

Abstract: A self terminating supported printed circuit strain gauge structure has a printed circuit including at least one strain gauge, interconnecting circuitry interconnecting the strain gauge to a connector circuit arrangement of a connector for connecting the circuit to a PC board. The entire circuit including the strain gauge, the interconnecting circuitry and the connector arrangement is formed on a single contiguous flexible dielectric substrate. The interconnecting circuitry and the connector elements are formed of a highly conductive material at least partially overplated onto the strain gauge printed circuit. A resilient support layer is laminated to the surface of the base substrate opposite the circuit to form a spring support structure for reinforcing and supporting the strain gauge circuit.

Abstract: An electrical circuit such as a Wheatstone bridge has a conductive strip extending between a current input terminal and a current output terminal and includes two resistors having a connecting part therebetween, a conductive segment extending between the connecting part and a measuring terminal, the connecting part being formed as a wider portion of the conductive strip in the direction of the conductive segment, the conductive segment having an adjusting portion between the connecting part and the measuring terminal.

Abstract: A force sensor component comprising a dimensionally stable body of electrically conductive material, the body having a selected outer surface formed into a predetermined topography; the body including an electrically conductive material in an amount sufficient to render the body electrically conductive at least throughout the selected outer surface of the body; the predetermined topography of the outer surface of the body comprising a plurality of interconnecting ridges across the outer surface of the body.

Abstract: A pressure transducer for measuring high differential pressure media in a harsh environment where a diaphragm assembly is mounted to an intermediate support number which is mounted to a main support member where the high pressure media impinges on the diaphragm to create a force opposing that provided by the diaphragm support structure thereby loading the diaphragm in compression. The strain sensitive piezoresistive elements are protected and sealed from the low pressure media by a passivation layer and electrical signal leads are attached to bonding pads formed on the diaphragm assembly which are sealed to the intermediate support member by a sealing cap.

Abstract: From a silicon block or wafer a stationary frame is shaped and a seismic mass which is displaceable in rotation is mounted within the frame. The seismic mass is symmetrically suspended in the frame by two pairs of oppositely located flexible strips and either piezoresistive or capacitive detection of rotation is provided by the strips, the capacitive detection beeing provided with the help of parallel stationary electrodes connected to and insulated in the frame. In another embodiment an anchor stud in the center of the frame has two flexible interlaced spirals extending therefrom and their respective outer turns carry radial disposed masses with finger structures extending circumferentially in both directions. Stationary finger structures are provided to provide interfitting variable capacitors sensitive to rotary displacements.

Abstract: A strain gage includes four gages that constitute a bridge circuit, and at least one resistance device which is used to adjust the offset voltage of the bridge circuit formed by the four gages. The resistance device is disposed on the strain gage between one of the gages making up the bridge circuit and a terminal thereof. Finally, each resistance device disposed on the strain gage has a series of resisting elements which vary in size and which are connected in parallel fashion.

Abstract: A semiconductor pressure sensor chip has a pattern including first diffusion sections in which external connection contacts are formed. Resistors are connected to the first diffusion sections through second diffusion sections in a bridge circuit such that the distances between a contact and the second diffusion sections connected to a first diffusion section where the contact is disposed are equal. This arrangement reduces drift of the offset voltage with changes in temperature, thus providing a high precision semiconductor pressure sensor with an improved yield.

Abstract: A strain gage or a measuring transducer equipped with such a strain gage has, for supporting the measuring grid structure, a backing made of a polyphenylenesulfide film. Such a backing assures a plurality of desirable characteristics simultaneously and equally well for each characteristic.

Abstract: Disclosed herein is a load cell provided with a high-precision load-sensing member of ceramic on which are formed patterns of thin-film resistance for strain gages which are not subject to breakage and variation of resistance. The load cell comprises a bending beam of ceramic material and strain gages of thin-film resistance formed thereon, with the bending beam having a surface coated with amorphous glass on which are formed said strain gages of thin-film resistance. The strain gages are formed from an alloy composed of iron and one or more selected from chromium, cobalt, tungsten, molybdenum, niobium, and tantalum, and a small amount of impurities.

Abstract: A semiconductor device comprises a semiconductor base having an aperture to form a first cantilever having a weight integral therewith, a second cantilever and a third cantilever. The second and third cantilevers are formed on the opposite sides of the first cantilever. The semiconductor device also comprises first and second piezo resistors formed in the first cantilevers, a third piezo resistor formed in the second cantilever, and a fourth piezo resistor formed in the third cantilever. The first, second, third and fourth piezo resistors are connected in a four-arm bridge circuit having a first pair of opposite arms comprised of the first and second piezo resistors, respectively, and a second pair of opposite arms comprised of the third and fourth piezo resistors, respectively, to compensate the first and second piezo resistors for temperature.

Abstract: A force sensor in the integral/monolithic comprises a monolithic block of elastic material which includes a first, second and third plate; a first pair of leaf spring integrally interconnecting the first and second plate, so that the first and second plates can parallely vibrate relative to each other in a first direction; a second pair of leaf springs integrally interconnecting the first and the third plates so that the first and the third plates can parallely vibrate relative to each other in a second direction being at right angles to the first direction; a shaft clearing traverses a bore in the first plate and is affixed to the second plate; the third plate is provided for connection for force receiving; and strain gauges are placed on all the leaf springs to sense separately forces acting in the first and second directions.

Abstract: A torsion ring transducer has a sensing ring mounted in a ring housing by a first ring web between the housing and the sensing ring and by a second ring web between the sensing ring and a central load application body. The ring housing is secured to a mounting base by an isolation device, for example, a ring cylinder having a defined cylinder wall length in the direction of a central transducer axis and a defined cylinder wall thickness in the radial direction. The ring cylinder prevents mounting effects from reaching the sensing ring.

Abstract: In an acceleration pick-up (11), the bending spring (13) is a substrate plate, e.g. produced from Al.sub.2 O.sub.3, which is arranged at one side on an elevated portion (12) of a support (10) produced from mechanically rigid material. Accordingly, the resistors (19 to 22) and particularly the evaluating circuit (24) on an elevated portion (12) of the support (10) can be arranged jointly on the bending spring (13) and applied in a single work step using thick-film technology. In addition, a cut out portion (14) is formed in the bending spring (13), so that two bending webs (15, 16) can be formed at the greatest possible distance from one another. Two of the resistors (19, 21) are arranged on the bending webs (15, 16) and one of the remaining resistors (20, 22) is arranged in the area of the cut out portion (14). Accordingly, an electrical monitoring of the mechanical state of the bending spring (13) is made possible.

Abstract: A novel load cell for use in novel wheel load scales and novel weigh-in-motion scales is provided herein. The load cell comprises a metal rod or bar, with a strain transducer secured to a flattened portion of each of the upper and lower faces of the metal bar. A signal wire has its terminal secured to an end face of each of such strain transducer, and a strain relief means is interposed between each such signal wire terminal and its associated strain transducer. When mounted within a closed bore which is parallel to the upper surface of a flat plate of elastic material, e.g., sheet metal, in a particularly-recited manner, an improved wheel load scale or weigh-in-motion scale is provided. This provides a light weight, low profile, scale which is isolated from external interference, which improves the accuracy of the scale.

Abstract: The pressure sensor is formed of semiconductor material which is formed on insulating support, i.e., as a semiconductor-on-silicon. The sensor is comprised of four piezoresistive gauges formed in the semiconductor material. Two of the gauges, each have a pair of limbs joined by a base, such that they are U-shaped, and two others are I-shaped. Each of the four gauges comprise two half-gauges, and each half-gauge comprises an elongated sensing zone in semiconductor material and having a reduced width in the plane of the insulating support. Two ohmic contact zones are disposed at the ends of each of the half-gauges, and two connection zones in semiconductor material and of greater width are disposed between the sensing zones and the ohmic contact zones, the form of the two connection zones are the same for each of the eight half-gauges.

Abstract: A strain gauge primarily designed for dynamic measurements and requiring very little force to produce a change in length. The strain gauge is alternately concave and convex in shape, such as a sinusoidal curve with nodes of low resistance on the convex portions and strain gauges of high resistance on the concave portions. The gauge is unbonded and can be stretched with very little force. The strain gauge is utilized in an instrument to monitor infant respiration and detect episodes of apnea.

Abstract: A force detector for detecting forces exerted in axial directions or moments exerted about respective axes uses an origin as a working point in an XYZ three-axis coordinate system. Four bridge circuit portions on the upper surface of a substrate have resistance elements along positive and negative directions of the X and Y axes. The resistance elements have a property such that their electric resistances vary due to a mechanical deformation, and detection of a force is made by voltage variations so produced in the bridge circuits of the bridge circuit portions. A strain generative body is used in order to transmit an external force to the substrate. The strain generative body has a first flexible portion having a sufficient flexibility with respect to the Z axis direction and a second flexible portion having sufficient flexibility with respect to the directions perpendicular to the Z axis, thus permitting detection sensitivities with respect to each axis to be made uniform.

Abstract: An acceleration pickup for releasing occupant protecting devices in power vehicles has a housing, a ceramic plate which acts as a bending spring and is clamped at its one end in the housing, and expansion-sensitive resistances arranged in the ceramic plate. The housing is composed of several layers of ceramic structural parts and is produced by a thick film technique.

Abstract: A sensor is provided for detecting a physical quantity such as fluid pressure and acceleration of a mass and converting same into electrical signals. The sensor has a diaphragm made of a metal deformable by the physical quantity, a layered constructed insulating means of an insulating material which is formed on the diaphragm by means of a physical vapor desposition process, wherein the layered constructed insulating means has at least two insulating material layers, a strain gauge formed on the layered constructed insulating means opposite the diaphragm by means of a physical vapor deposition process, and a contact zone on the strain gauge to provide an electrical connection for a physical quantity sensing device to the sensor. Due to the layered construction of the insulating means, the thickness of the insulating means as a whole may be reduced below that of a single layer insulating means and maintain good insulative properties particularly at excessive strain.

Abstract: An accelerometer fabricated from silicon which is responsive to the three orthogonal components of an applied force. A method is also disclosed for etching the accelerometer from a single silicon substrate. Three rectangular beams or cantilevers are formed each having vertical sidewalls lying in crystalline planes orthogonal to one another. Each of the beams is directly responsive to one of the three orthogonal force components.

Abstract: A sensor for acceleration measurement, for example for automatic release of occupant protective devices in vehicles, especially power vehicles, in which during deceleration of the vehicle or vehicle part a control signal is produced. The sensor comprises a support, a pendulum with a seismic mass mounted on two bending bars formed in the support, resistances each provided on a respective one of the bending bars, and further resistances each arranged on the support in the region between the bending bars and on the pendulum in the region between the bending bars, the first mentioned resistances and the further resistances being connected in a Wheatstone bridge.

Abstract: A strain gauge for compensating the creep of a support and a process for obtaining a strain gauge. The gauge is bonded to a support and includes a piezoresistive pattern etched on one face of a flexible film. A layer of a material subject to relaxation is deposited on the other face of the film. The relaxation layer is bonded to a test piece of the same material as the support. A constant force is applied for producing a creep on the test piece and the resistance of gauge as a function of time is measured. The thickness of the relaxation layer is adjusted to cancel out the evolution of the resistance of the gauge.

Abstract: An acceleration detecting device includes an elastic flat plate, a supporting member for fixing both ends of the plate, a weight fixed to a substantial central portion of the plate and extended from the plate in vertical direction. Strain detecting devices are arranged in a horizontal plane adjacent the weight and stress indicating devices are provided for indicating an external force applied to the weight from the strains detected by the strain detecting devices.

Abstract: The pressure sensor has a housing, a sensing body mounted inside an internal space of the housing and having a cavity, one end thereof being open and other end thereof being closed, to form a pressure introducing portion therein, the closed end thereof having a thin thickness forming a diaphragm for receiving a pressure, and a semiconductor chip mounted on one surface of the closed end opposite to the diaphragm for receiving a pressure. The pressure sensor is characterized in that the sensing body is attenuated at a portion including at least the closed end thereof and has a diameter smaller than that of the remaining portion thereof, and a shoulder is provided therebetween, whereby the sensing body is fixedly connected to the internal space of said housing by abutting the shoulder thereof against a stopper portion provided in the internal space of the housing and the external surface thereof is placed in contact with the inner surface of the internal space of the housing.

Abstract: The present invention relates to a strain sensor, particularly a strain sensor which detects a mechanical strain using the electric resistance change of a non-single crystalline semiconductor which is proportional to mechanical strain. The strain sensor in the present invention consists of a non-single crystalline semiconductor containing Si wherein the activation energy determined from the temperature dependency of the dark conductivity is under 15 meV. The strain sensor particularly suits an application to a mechanical strain measurement under a comparatively strong magnetic field.

Abstract: A sensor chip subassembly for use in a transducer assembly includes a support member to which a pressure sensitive chip is elastically bonded at predetermined but spaced points to separate the chip from direct contact with the support member. The separation minimizes vibration and stress from being transmitted from the support member to the chip.

Abstract: The invention relates to a pressure sensor including a metallic housing having an open end with an opening, a ceramic diaphragm accommodated within the housing such that the diaphragm is exposed at its one major surface to a pressure of a fluid in an external space through the opening of the housing, and resistors formed integrally on the diaphragm. The electrical resistance of the resistors varies with the pressure acting on the ceramic diaphragm, whereby the pressure is determined by the electrical resistance. An electromagnetic shielding member is disposed within the metallic housing such that the shielding member is positioned between the resistor or resistors and the open end of the metallic housing. The shielding member is adapted to protect the resistors from an electromagnetic wave in the external space.

Abstract: An isometric control device or the like of the type having an elastic beam and strain guages attached to the surface of the beam characterized by at least a first group of three strain guages (D, F, G) each having an operative axis thereof inclined with a single predetermined angle with respect to the main axis (z) of said beam (10), and the strain gauges disposed at a first predetermined level along said beam (10).

Abstract: A pressure sensor including a ceramic diaphragm which is deformable in response to a pressure applied thereto, a ceramic base associated with a periphery of the ceramic diaphragm, for supporting the ceramic diaphragm, and at least one resistor formed on the ceramic diaphragm. Resistance value of the resistor are adapted to vary depending upon a magnitude of deformation of the ceramic diaphragm, and thereby represent the pressure applied to the ceramic diaphragm. The ceramic diaphragm and the ceramic base consist of a co-fired body obtained by co-firing an unfired diaphragm member and an unfired base member.

Abstract: An acceleration detecting device which detects an acceleration and/or deceleration. The acceleration detecting device comprises a beam, supporting member supporting both ends of the beam, a weight for twisting the beam in response to an applied acceleration substantially provided at the center of said beam, and, a detector for detecting the amount of the twisting deformation of said beam. When the acceleration is applied to the detecting device, the beam is bent and deformed in proportion to level of the acceleration. The deformation of the beam is detected by the detector, and the signal according to the level of the acceleration is output from the detecter.

Abstract: A force detecting device includes an insulative strain element, strain sensors, and leads. The insulative strain element is electrically insulative at least at its surface. The strain sensors are formed of a piezoresistive thin film and deposited as a piezoresistive thin film pattern on the surface of the insulative strain element integrally therewith. The leads are formed of a highly conductive thin film and deposited as a highly conductive thin film pattern on the surface of the insulative strain element integrally therewith.

Abstract: A strain gage wherein neutral impurity atoms forming neither donors nor acceptors are doped in a silicon substrate and a diffused resistance element is formed in the doped region, thereby decreasing the temperature coefficient of resistivity without changing the resistivity and decreasing the temperature coefficient of piezoresistance coefficient with no effect on the piezoresistance coefficient which governs the sensitivity of the strain gage.

Abstract: A semiconductor accelerometer includes a package containing damping liquid. A base is fixedly disposed within the package. A semiconductor plate is disposed within the package and is supported on the base. The semiconductor plate has a movable free end and a deformable diaphragm. A semiconductor strain gauge is associated with the diaphragm and deforms in accordance with deformation of the diaphragm. The base has a first surface opposing the semiconductor plate free end. The first surface of the base has a recess for limiting movement of the semiconductor plate free end. The recess extends to and opens at a second surface of the base which differs from the first surface.

Abstract: A force measuring device includes a rigid base plate and a first diaphragm symmetrical about a central normal axis and arranged in spaced parallel relationship to the base plate. An elastic connection between the base plate and a peripheral rim of said first diaphragm hermetically closes a cavity formed between the base plate and first diaphragm. A first projection is formed, for force introduction to the device, on an outer surface of the first diaphragm and extends along the central normal axis; a second projection extends from an inner surface along the central normal axis toward the base plate. A displacement sensor is arranged in the cavity between the base plate and second projection for sensing any displacement therebetween upon force application to the device, to generate an electrical signal indicative of the force applied.

Abstract: A pressure sensor in which a Ni-Si-B amorphous alloy strain gauge is covered and protected from the external impact and dust in the air by a protective film.

Abstract: A highly sensitive strain gage containing a thin discontinuous metal layer whose conduction effect is based predominantly on the tunnel effect and which is applied uniformly onto a thin, nonmetallic, dielectric or semiconducting substrate such as uniaxially oriented or partially crystalline plastic film, an ordered ultrathin layer or a silicone-coated plastic film, the diffusion processes in the applied metal layer being reduced and its structural stability improved as a result of interaction of the substrate with the metal layer.

Abstract: A multidirectional force-sensing transducer useful in automotive systems which require acceleration/deceleration detection. The transducer, in a preferred form, includes a unitary structure consisting essentially of silicon, and a substantially planar T-shaped force-sensing body integral with the unitary structure. The T-shaped force sensing body is comprised of base and cantilever beams defined in the unitary structure--the base and cantilever beams being strained principally in response to first and second forces acting upon the body in directions substantially within, and orthogonal to, the body's plane, respectively. Sensors (preferably thin film piezoresistors) operatively associated with the base and cantilever beams sense the strain of the base and/or cantilever beams and thus respectively detect the multidirectional forces acting upon the force-sensing body.

Abstract: A sensor array, usually a sensor matrix for sensing pressure, comprising a grid of conductors in a woven fabric, the row conductors crossing over the column conductors to form a matrix array of crossover points. The rows are separated from the columns by individually coating the conductors of one or both series with an electrically partially resistive fibrous material, so that when the conductors at any crossover point in the array are pressed closer together, the resistance between the two conductors at that crossover point decreases. By connecting the conductors to suitable electrical circuitry, the force applied at any crossover point and the location of that crossover point within the array can be determined.

Abstract: A strain sensitive element for use in a system for converting mechanical movement of relatively movable portions of the element into electrical signals, includes a substantially planar substrate comprising an N-type silicon crystal material wherein the substrate includes one or more grooves extending into the substrate defining an integral hinge portion between at least two relatively movable parts. At least one unitary strain gage extends across a groove without any separate support so that the strain gage and the hinge portion are spaced apart. The strain gage is a unitary member derived from the same silicon crystal material of the substrate and comprises P-type silicon material. The strain gage is joined to two of the relatively movable parts of the substrate. At least one unitary conductor extends across a groove without separate support so that the conductor and the hinge portion are spaced apart.

Abstract: A temperature compensation scheme for a piezoresistive pressure sensor utilizing resistors with carefully chosen temperature coefficients of resistivity to provide a totally passive network.

Abstract: Thin film strain gauge system consisting of an elastically deformable flexible metallic substrate on which an electrically insulating layer of a plasma-polymerized material, in particular of Si:N:O:C:H-containing compounds and thereon a structured resistance layer as well as an electrically readily conducting layer having a structure for the electrical contacting are provided.

Abstract: A strain gauge has two metallic resistance layers, contact layers associated therewith, and a support for holding the strain gauge. A partially conductive insulation layer is disposed between the two resistance layers.

Abstract: The sensor includes a rigid support and a diaphragm having a peripheral portion fixed by a layer of glue to the support. The central portion of the diaphragm is spaced from the support and, on its surface facing the support, carries at least one thick-film resistor acting as a piezo-resistive transducer. The diaphragm can deform resiliently towards the support when a pressure is exerted on its other surface. The surface of the support which is connected to the diaphragm is flat, and the layer of glue has a calibrated thickness such that the distance between the diaphragm and the surface of the support at rest is substantially equal to the deflection of the diaphragm corresponding to a predetermined maximum pressure measured.

Abstract: In a thick-film pressure sensor comprising a support plate on at least one surface of which are deposited at least one thick-film resistor acting as a piezo-resistive transducer and at least one pair of thick-film conductors acting as rheophores, the at least one thick-film resistor and the thick-film conductors are covered with a protective layer of dielectric material.

Abstract: A ring-shaped device for interposing between two bodies, to measure the force tending to urge them together or pull them apart in a direction coaxial with the ring. Both axial ends of the ring are robust and resist distortion, but between its ends the ring is of convoluted section so that when the ring shortens or lengthens axially under the applied load, hoop stresses are set up in the convoluted part. These stresses are detected by strain gauges located at intervals around the circumference of that part of the ring. The ring may be contained within a protective cylindrical casing, so designed as not to prevent the full magnitude of the applied load being communicated to the ring inside. To improve linearity of the correlation between the applied load and the response of the strain gauges, a stiffening ring may be attached coaxially to the ring; this sleeve may have robust axial ends, and a thinner cylindrical center part registering with the convoluted part of the ring.

Abstract: A pressure detector has a cylindrical housing projecting into an atmosphere the pressure of which to be measured, a pressure chamber formed within the housing, to which is the pressure to be measured is introduced, a metallic diaphragm formed on a surface of one portion of a wall defining the pressure chamber, which deforms in accordance with changes in the pressure which is to be measured, and a strain gauge provided in the diaphragm for generating an output signal corresponding to the strain generated due to the deformation of the diaphragm. The strain gauge is composed of a diamond monocrystal plate and a diamond semiconductor film formed on the diamond monocrystal plate. On the diamond monocrystal plate are piled a titanium film, a platinum film, and a gold film, in sequence. The gold film is joined to the diaphragm by brazing.

Abstract: A glass header structure for a pressure transducer employs a cylindrical member fabricated from a borosilicate glass having a thermal expansion coefficient which matches silicon. The glass header has a central aperture which extends from the top to the bottom surface. Positioned about the central aperture are four smaller apertures located at 90 degree intervals and each containing an elongated terminal pin. The pins are of a nail head configuration with a flat top head of a larger diameter than the diameter of the apertures and of the main pin body. Affixed to the flat top surfaces of the terminal pins by means of ball bonding are wires which connect to the terminal areas of a semiconductor pressure transducer which is mounted over the central aperture of the header.