Abstract: A cooling grate for bulk material, having a carrying plate for accommodating a layer of the material for cooling, and having conveying elements by means of which the material for cooling is conveyed in a conveying direction on the resting carrying plate and which comprise pushers, which are arranged in a movable manner on that side of the carrying plate which is subjected to the action of material for cooling, and a drive, which is arranged on the other side of the carrying plate and is intended for executing a lifting movement, each pusher being assigned an opening in the carrying plate and a transmission member, which is guided thereby and connects the pusher to the drive. The carrying plate is provided, at the openings, with in each case one collar, which at least at the front and rear, as seen in the conveying direction, has a seal acting between the transmission member and collar.

Abstract: This invention provides a conveyor and tunnel oven, where the conveyor is continuous, the tunnel oven is gas fired, having its ignited and heated gases passed through a tubular system, being attracted by one or more blowers, to generate by conduction infrared energy to furnish curing to products passing along the continuous conveyor. A control system is provided for controlling the operating parameters such as conveyor speed, regulating emitted gas, the velocity generated by the blowers, and the capacity of the BTUs created, during operations of the oven.

Abstract: A critical point drying apparatus for sample preparation in electron microscopy and semiconductor wafer production includes a computer system to automate the operational modes in drying the specimen. These operational modes controlled by the computer system are: cooling, in which a drying chamber is cooled; starting, in which the specimen chamber is filled with a transitional fluid; purging, in which the transitional fluid purges an intermediary fluid from the drying chamber and the purged internediary fluid is collected by a collector condenser; heating, in which the drying chamber is heated to elevate the transitional fluid to its critical point temperature and pressure; and bleeding, in which the drying chamber is depressurized to atmospheric pressure at a very slow rate until the drying chamber is completely vented, which signals the end of the drying operation. The drying chamber incorporates concave surfaces for pressure dispersal and to facilitate purging the intermediary fluid completely.

Abstract: Treatment apparatus and a process for thermal desorption of hydrocarbon contaminants from excavated soil provides efficient contaminant removal by handling the soil in a thermally conductive treatment vessel that fits within an insulated treatment chamber. The soil is treated in this chamber with fresh air that is dried and electrically heated prior to contacting the treatment vessel. The dry air passes through the soil and the air mixed with contaminants is withdrawn from the chamber through piping in the treatment vessel. Excavating the soil directly into the treatment vessel allows the treated soil to be returned to the final disposition site in the same vessel, minimizing soil handling.

Abstract: A method of converting a single-zone, multi-conveyor dryer into a multi-zone multi-conveyor dryer (10) utilizes a conversion kit including a division plate (40) and first and second panels including exit openings (42, 44, 46) and entrance openings (52, 54). The division plate (40) divides the heat chamber (14) into an upper zone (14a) and a lower zone (14b). The first panel is located between a first air plenum (20a) and the heat chamber (14), with the first air plenum (20a) including first and second heat sources (22, 22a) for heating the upper zone (14a) to a temperature greater than the lower zone (14b). The second heat source (22a) is pivotal relative to the first heat source (22) between an operative position and a cleaning position. The second panel is located between a second air plenum (20b) and the heat chamber (14).

Abstract: Cooling machine for lollipops, comprising at least one support plate having a support surface for supporting lollipops during cooling, means for generating a cooling air flow past the support surface and means for shaking the support surface, the plate being a honeycomb panel having a honeycomb core and an upper cover plate, the core being made of metal and the cover plates being fixedly adhered to the core and the upper cover plate forming the support surface directly or not.

Abstract: A drying section for drying a web in a papermaking machine has a pre-drying section and a final drying section, wherein the pre-drying section includes a hot press formed by a first press member and a rotatable counter roll in engagement with each other so as to form a nip therebetween through which the web passes. The hot press further includes a heating device disposed in heat-transfer relation to the counter roll and operable to heat a surface region of the counter roll which then passes through the nip so as to heat the web therein, and an imprinting fabric arranged in an endless loop, the imprinting fabric defining an imprinting surface for imprinting the web and being arranged to pass through the nip of the hot press with the web against the imprinting surface such that the web is imprinted. The imprinting fabric continues to support the imprinted web downstream of the hot press at least up to the final drying section.

Abstract: Trays are provided with identical vertical spacers which enable the trays to be stacked on top of each other in a centered way, with a suitable or appropriate spacing between them, and enable the various adjacent stacks of trays to be raised and lowered in steps, by an elevating and lowering system which acts only on the bottom tray of each stack. The sides of the stacks of trays of the kiln are thus free and can be engaged by conveyors for the translation of the trays between the stacks, both in a normal operating cycle and in a short operating cycle. However, the lower translation conveyors, which transfer the trays from the stack with an unloading station to that with a loading station, are positioned in the conventional way, i.e., under the stacks of trays and transversely with respect to the trays.

Abstract: A hot air drying apparatus for noodles which makes possible steady production of high quality instant noodles by blowing hot air at an optimal velocity and in an optimal flow rate all over noodle ribbons to be dried in a short period of time and thereby makes a texture of noodle ribbons uniform and fine is to be provided. In a hot air drying apparatus, a conveyor runs from one end of a lengthwise direction of this apparatus to the other, and noodle ribbons carried from a preceding step riding on this conveyor move within an apparatus at a prescribed speed. The apparatus includes a plurality of drying chambers D1, D2, D3, D4, D5 and so forth into which it is divided in the lengthwise direction.

Abstract: A semiconductor wafer drying apparatus is provided. In one embodiment, this apparatus includes a bath which can contain much deionized water so that semiconductor wafers soak in the deionized water; a chamber providing a space where vapor flows over the bath; a vapor supply line supplying vapor to the internal space of the chamber; an exhaust line discharging vapor contained in the chamber; a deionized water exhaust line discharging deionized water in the bath; a semiconductor wafer holder supporting the semiconductor wafer in the bath; and pitch guides placed at left and right sides of the semiconductor wafer, movable to a first position and a second position in a vertical direction, wherein the pitch guides are separated from the semiconductor wafer at the first position and contact the semiconductor wafer at the second position thus preventing the movement of the semiconductor wafer.

Abstract: A heat-shrinking film packaging machine includes a conveyor for transporting an article to be packaged through a heating device to have a heat-shrinking film surrounding the article heated and shrunk and thus tightly packaging the article. The heating device includes a hot air flow control device including two air supply devices located on opposite sides of the conveyor to define a channel through which the article is transported. Each air supply device has a surface in which an array of openings is defined and arranged in rows and columns for supplying hot air toward the article. A blocking bar is movably mounted to the surface of each air supply device and associated with each row of the openings. The blocking bar is movable with respect to the openings to selectively and partially block the openings for controlling hot air flow through the openings.

Abstract: A wheel includes a peripheral outer wall onto which are sequentially loaded veneer panels. The panels are held in place by cable runs against a heated outer surface of the wheel outer wall. Drying of the veneer panels occurs during wheel rotation. A heated fluid medium such as hot oil flows through an annular chamber of the wheel. A series of inlet conduits supply the annular chamber with the heated medium while return conduits return same to a heat source. Multiple tensioned runs of cable confine each panel in place during wheel rotation. A modified form utilizes a continuous screen for panel retention. A drive system imparts rotation to the wheel by powered components in contact with the wheel periphery. A panel pre-heater and jet dryers are supplemental heat sources.

Abstract: A vacuum processing apparatus which includes a conveyor structure for transferring a substrate from a substrate storage device held on a substrate storage device mount table. The apparatus further includes a vacuum loader provided with an additional conveyor structure and a vacuum processing chamber for sequentially loading substrate to be processed. The conveyor structures are each provided with a robot.

Abstract: A vertical, centrifugal separator used for drying drill cuttings prior to transport or further processing. The separator is adapted to receive scavenged heat from any source and is further adapted to include internal conveyers, thereby lowering the overall operating profile and providing increased cuttings retention time within a heated environment.

Abstract: The invention relates to a roller belt drier. The drying of panel-shaped products often requires the drier to have considerable construction lengths in order to achieve a high capacity. Long roller belt dryers, which are usually equipped with chain drives and a motor for each chain, present the problem that very strong chains are required to transmit the necessary driving forces. When the drier reaches a certain length, it is no longer possible to provide chains that are able to accommodate these forces. According to known solutions, a chain is divided and the drives are located in the centre of the drier. This causes problem s in terms of sealing the drier, as well as extra expense for the driving and tension station. The aim of the invention is to create a drier which has a driving and tension system that is structurally simple and economical even for considerable construction lengths. A chain is equipped with two drives (15, 23), the second drive (23) being integrated in a tension device (24).

Abstract: A method and apparatus for merging the processes of hearth baking and conveyor baking to offer the benefits of the two processes while eliminating many of the shortcomings. In one aspect, the present invention is a horizontal food-grade product conveyor to transport and support food substances within or through a cooking chamber in a continuous motion. The product conveyor comprises a frame, a support structure, a drive mechanism, and rotating segments of ceramic, brick, firebrick, stone, baked clay, transite, quarry tile, or other non-metallic material which form an endless baking hearth. Each hearth segment interacts with the next adjacent hearth segment to facilitate turning around a radius while forming and maintaining a continuous, flat product support surface and preheated baking hearth.

Abstract: A drum washing machine with a draw-out inner spin basket is disclosed. The inner spin basket is spigotted movably on a driving shaft through a driving hole in the back plate of the inner spin basket. An axle of the spin basket is provided at a front plate of the inner spin basket. An end of the axle is inserted in a bearing. A cover is disposed in front of a front plate of the inner spin basket. The inner spin basket is rotatably attached to the cover through the axle of the spin basket and the bearing. A slide connection is disposed in a housing in a manner so that the inner spin basket can be drawn into or out of the housing. Since the inner spin basket can be drawn out of the housing in the drum washing machine, the laundry can be put or taken in outside of the housing.

Abstract: A centrifuge for draining washed egg trays comprises a centrifuge chamber in a housing (9). A bottom (8) for receiving a washed stack (7) of egg trays in a feeding position is displaceable with respect to said housing (9) between the feeding position and a centrifuging position. The stack (7) of egg trays is centred on the bottom in the centrifuging position, and in this position the bottom is in engagement with a rotational drive (22, 23), which is vertically non-displaceable with respect to the housing.

Abstract: An air blowing tool includes a connecting pipe (1) and an air blowing head (2). The air blowing head includes an inner wall (22) and an outer wall (21). An annular passage (24) is defined between the inner and outer walls. The inner wall encloses and defines a heating space (23) for accommodating a package (3) to be heated. An annular outlet (221) is defined in the inner wall. The annular outlet communicates with the annular passage and with the heating space.

Abstract: The invention relates to a dryer (1) for drying continuously conveyed products, e.g. a warp, comprising essentially a first dryer array (2) and a second dryer array (3). A passage (4) for passing through the product (W) is formed between the dryer arrays (2, 3). The second dryer array (3) is configured in such a way as to be able to move in relation to the first dryer array (2). When the dryer (1) is in stop position (S), the second dryer array (3) is disposed relative to the first dryer array (2) in such a way that the cross section of the passage (4) is bigger than in the operating position (B).

Abstract: An air blowing tool includes a connecting pipe (1) and an air blowing head (2). The air blowing head includes an inner wall (22), and an outer wall (21). An annular passage (24) is defined between the inner and outer walls. The inner wall encloses and defines a heating space (23) for accommodating a package (3) to be heated. A plurality of evenly distributed outlets (221) is defined in the inner wall. Each outlet is defined at an acute angle relative to the annular passage.

Abstract: An air knife or air nozzle manifold for drying or blowing off passing articles moved by a conveyor system is provided with a coupling that permits rotation of the air knife or air nozzle manifold relative to the air inlet duct leading from a blower. The air knife or air nozzle manifold has opposing ends located equidistant from a longitudinal axis of rotation relative to a stationary element of the coupling. Thrust nozzles are provided at each of the opposing ends of the air knife or air nozzle manifold to deflect a certain portion of the air from the plenum chamber to provide thrusting jets of air that rotate the air knife or air nozzle manifold about the longitudinal axis. The flow of air emitted from the air knife or air nozzle manifold is thereby directed onto the passing articles from different directions as the articles move by. The efficiency of drying and blowing off the articles to be processed is thereby significantly improved.

Abstract: The present invention comprises a wicket conveyor for conveying a series of wickets through pre-curing, curing and post-curing sections of a curing system. The wicket conveyor forms a continuous loop, having a straight upper track portion, a straight lower track portion and a pair of curved end portions of track that adjoin each end of the straight upper and lower track potions. Each wicket is attached to the wicket conveyor track such that the plane of the wicket is oriented at a predetermined angle. B wicket picks up a horizontally oriented sheet and carries it toward the pre-curing section. The wicket and substrate sheet are reoriented in response to the contour of the conveyor, into a near vertical planar orientation. While in the near vertical orientation, liquid coatings on the surface of the sheet substrate move down the substrate sheet in “sheet flow,” thereby leaving a smooth coating surface prior to curing.

Abstract: A vacuum processing apparatus which includes a cassette mount table for holding at least one cassette, a conveying structure which includes a robot for conveying a wafer held on the cassette mount table, a vacuum loader which includes an additional robot, an additional conveying structure and a plurality of lock chambers.

Abstract: A washed sand drying and handling plant (100) includes a belt feed hopper (1), a conveyor belt (2), a sand rinsing unit (3), a dewatering apparatus (4), a radial conveyor (5) and a sand drying and handling apparatus (6). The sand drying and handling apparatus (6) includes four vesssels or tanks (7). Each tank (7) is generally cylindrically shaped and has a cone-shaped base. Sand is held in the tanks (7) for a predetermined amount of time sufficient to allow the sand to dry to the desired level by gravity.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage maeans after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.

Abstract: An air blowing tool includes a connecting pipe (1) and an air blowing head (2). The air blowing head includes an inner wall (22), and an outer wall (21). An annular passage (24) is defined between the inner and outer walls. The inner wall encloses and defines a heating space (23) for accommodating a package (3) to be heated. A plurality of evenly distributed outlets (221) is defined in the inner wall. Each outlet is defined at an acute angle relative to the annular passage.

Abstract: An air blowing tool includes a connecting pipe (1) and an air blowing head (2). The air blowing head includes an inner wall (22) and an outer wall (21). An annular passage (24) is defined between the inner and outer walls. The inner wall encloses and defines a heating space (23) for accommodating a package (3) to be heated. An annular outlet (221) is defined in the inner wall. The annular outlet communicates with the annular passage and with the heating space.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.

Abstract: A drying section for drying a web in a papermaking machine has a pre-drying section and a final drying section, wherein the pre-drying section includes a hot press formed by a first press member and a rotatable counter roll in engagement with each other so as to form a nip therebetween through which the web passes. The hot press further includes a heating device disposed in heat-transfer relation to the counter roll and operable to heat a surface region of the counter roll which then passes through the nip so as to heat the web therein, and an imprinting fabric arranged in an endless loop, the imprinting fabric defining an imprinting surface for imprinting the web and being arranged to pass through the nip of the hot press with the web against the imprinting surface such that the web is imprinted. The imprinting fabric continues to support the imprinted web downstream of the hot press at least up to the final drying section.

Abstract: A wafer conveyor system for use in a vacuum processing apparatus wherein the conveyor structure is provided with a robot disposed in the conveyor chamber of the vacuum loader. The robot includes an arm which is extendible into the lock chambers which are connected to the conveyor structure.

Abstract: A wafer conveyor system for used in a vacuum processing apparatus wherein the conveyor structure is provided with a transfer structure and a robot apparatus is arranged on the transfer structure. The robot provides for rotation of the wafer horizontally from a position in a cassette to an opposite postion of the cassette.

Abstract: A vacuum processing apparatus which includes a cassette mount table for holding at least one cassette, a conveying structure that includes a robot, a cassette table for holding the cassette, an additional conveying structure for transferring a wafer held on the cassette table. Further, the apparatus is provided with a vacuum loader which is connected to the additional conveying device by a lock chamber. a controller system controls the second conveyor structure and manages the replacement of the cassette on the cassette table; and further, instructs the replacement of the cassette.

Abstract: Apparatus to transport and cool rolled products such as bars, round pieces, rods or similar, arrangable downstream of a coil-forming head, comprising a plurality of transport rollers, at least partly motorized and parallel to each other to define a substantially horizontal transport plane on which the rolled products arranged in coils are able to lie, ventilator in correspondence with the transport rollers to blow air towards the rolled products and a conveyor to convey more air towards the lateral edges of the coils than towards the central zone of the coils, the conveyor comprising a plurality of elements, arranged at intervals between the transport rollers. Each of the elements shaped to define transit channels having a first transverse section greater in correspondence with the ends of the transport rollers and a second transverse section less in correspondence with the median zone of the transport rollers.

Abstract: A transport enclosure arranged between a first apparatus and a second apparatus, all located in a clean room, is shielded from the clean room and maintained a degree of cleanliness which is cleaner than that of the clean room. Accordingly, the volume of space within the clean room requiring the highest degree of cleanliness is minimized, thereby reducing overall costs.

Abstract: A handler system is provided with an on-loader unit for loading at least one of strips deposited in a cassette, a drawer unit for holding the strip from the on-loader unit at a drawer picker, a strip transferring unit for fixing in a suction manner after the holding its picker head and for transferring the strip to a cutting device, cut it into a plurality of individual package devices, a package cleaning unit for cleaning the individual package devices using a brush and an air nozzle after to fixing and retaining the individual package devices thereon by using a suction vacuum force, a package drying unit for drying the individual package devices after the cleaning, a package deposit unit for moving and depositing after drying, a package pick-up unit for retaining and for arranging the individual package devices for a quality inspection, the package pick-up unit mounted on one side of the package deposit unit, a visual inspection means for inspecting the quality of the individual package devices being, and a

Abstract: A vacuum processing apparatus which includes a cassette mount table for holding a cassette, a conveying structure for transferring a wafer from the held on the cassette mount table, a robot, and a vacuum loader. The vacuum loader is provided with a vacuum conveyor chamber and a conveying structure which further include an additional robot.

Abstract: A method and an apparatus for transporting substrates in all organic light emitting diode (OLED) process is disclosed, which has a transferring chamber provided for transporting substrates between processing modules and the atmosphere condition therein is able to be adjusted to be the same as the processing module by an atmosphere conditioner unit. According to the present invention, the substrates are not contaminated by moisture and the process operation and the factory layout are more flexible. Moreover, the OLED yield is improved.

Abstract: A transport enclosure arranged between a first apparatus and a second apparatus, all located in a clean room, is shielded from the clean room and maintained a degree of cleanliness which is cleaner than that of the clean room. Accordingly, the volume of space within the clean room requiring the highest degree of cleanliness is minimized, thereby reducing overall costs.

Abstract: A handler system is provided with an on-loader unit for loading at least one of strips deposited in a cassette, a drawer unit for holding the strip from the on-loader unit at a drawer picker, a strip transferring unit for fixing in a suction manner after the holding its picker head and for transferring the strip to a cutting device, cut it into a plurality of individual package devices, a package cleaning unit for cleaning the individual package devices using a brush and an air nozzle after to fixing and retaining the individual package devices thereon by using a suction vacuum force, a package drying unit for drying the individual package devices after the cleaning, a package deposit unit for moving and depositing after drying, a package pick-up unit for retaining and for arranging the individual package devices for a quality inspection, the package pick-up unit mounted on one side of the package deposit unit, a visual inspection means for inspecting the quality of the individual package devices being, and a

Abstract: Apparatus for curing ink, paint and coatings on containers and articles which includes a rotatably mounted assembly that includes a plurality of workstations disposed about the periphery thereof, an emitter disposed next to the periphery of the rotatably mounted assembly, and apparatus sequentially positioning respective workstations in front of the emitter. In some forms of the invention the emitter is an ultraviolet radiation emitter and the apparatus for sequentially positioning includes apparatus for causing the workstations to dwell next to the emitter. Some forms of the invention include apparatus for selectively rotating at least some of the workstations when that workstation is in front of the emitter. Some forms of the invention include an apparatus for holding an associated work piece on at least some of the workstations.

Abstract: A device which is employed in drying of particulate, granular or powdered material, substantially fish-related material. The device has a drying chamber designed substantially as a vertical standing container. The drying chamber may be circular cylindrical and has a conically shaped tapering shape over its entire or parts of its height. The conically tapering shape may be directed towards the drying chamber's upper or lower portion. The material may be inserted in the bottom area or in the top of the standing container (1), through an inlet (5). In the drying chamber's bottom area there is placed a movement device (3) which sets the material in the drying chamber in rotary motion, thereby flinging the material towards the drying chamber's vertical wall, which is heated by means of a heating jacket (2).

Abstract: The invention concern a chamber for drying animal waste, in particular poultry manure, adapted to receive a mixture (M) of fresh waste and dry waste, the floor thereof being adapted to retain the mixture (M) while being permeable to air (A), said floor consisting of an assembly of elements (60, 60′) each capable of forming means for retaining the waste and including means (T) which periodically enable to transfer outside the chamber (1) and through said floor (6) a fraction of the dry waste.

Abstract: Holders (20) for articles such as newly-formed packets or groups of cigarettes are used to constrain and protect the articles while being conveyed by handling apparatus (22), e.g. in a packing machine (10). Holders (20) of similar external shape, adapted to interface with the handling apparatus, may be provided with differing internal features (28), adapted for receiving different articles, so that the articles may be readily conveyed by the same apparatus. The apparatus may be employed at the exit end of a cigarette packing machine to maintain the shape of newly-formed packets in a packet stabilising region. This region may comprise a reservoir including a series of compartmented drums (24,26) in which each compartment receives a line of abutting holders which is indexed in an axial direction during rotation of the drums.

Abstract: The object of the Patent is a drying tunnel for fruit and vegetables which is prismatic rectangular in shape and is internally divided by spacing walls (1) with a bucket conveyor travelling successively up and down. The buckets are elongate, parallel to the walls (1) and closed at their ends by irregular hexagonal plates (2) which may swivel about top half-shafts (3), their concave bottom allowing an airflow through it and consisting of longitudinal spaced rods (4). Shafts (5) are arranged at the top of the end walls (2) with bearing means (6) at their free end which, upon abutting on a flat inclined guide (7), cause the bucket to be tipped and emptied, allowing the fruit to exit.

Abstract: Apparatus for drying substantially ellipsoid products, such as, for instance, eggs, which are conveyed over a conveying path by a conveyor. The apparatus includes a number of nozzles which are connected to a compressor. The nozzles are designed and arranged relative to the conveying path, such that the drying air blown out by these nozzles has a main flow direction which is both directed substantially perpendicularly to the surface of a passing product and blows directly onto at least the areas adjacent the points of a passing product.

Abstract: Infectious wastes originating in hospitals or other locations are deposited into a sealable, pressure resistant, portable sterilizer vessel at the source of the wastes. The sterilizer vessel rides on wheels enabling travel of the filled vessel to a sterilization station at another location where steam is directed into the vessel to perform the sterilization. Operators need not transfer unprocessed infectious waste from a collection cart to a fixed sterilization vessel at the sterilization site. In the preferred form, handler exposure to unprocessed wastes is further reduced by creating an airflow from the vessel opening to a filter while the vessel is opened for deposit of wastes.

Abstract: In a conventional container centrifugal drying device, a problem exists in that a member is easily corroded by a detergent in use for a long period, and a rotating portion is heavy in weight so that energy at accelerating and decelerating times is large.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.

Abstract: Containers are conveyed through an oven on a conveyor to cause a foamable material on each container to foam and become a heat insulative layer. The containers are supported on respective holders of the conveyor, which prevent the containers from contacting one another. Preferably, the holders support the containers loosely, to enable the containers to wobble relative to the holders under the influence of oven air currents and conveyor vibration. The holders thus do not make contact with any given point on their respective containers for a time period that is sufficient to enable the holders to draw enough heat away from the container to adversely affect the foaming operation. The containers are conveyed in single file, along a serpentine path through the oven.