Abstract: An air duct connector and an air-cooled refrigerator are provided. The air duct connector includes a first connector, a first guiding structure, a positioning structure, and a second connector. An accommodation space is formed in the first connector, and is provided with an insertion opening. The first connector is further provided with a first air opening. The first guiding structure and the positioning structure are disposed on the wall of the accommodation space. The second connector is provided with a second air opening and a second guiding structure, and is adapted to be inserted, from the insertion opening, into the accommodation space of the first connector. The first guiding structure guides the second guiding structure until the second guiding structure slides to and engages with the positioning structure, such that the second connector is positioned in the accommodation space and the first air opening is connected to the second air opening.

Abstract: The present disclosure includes apparatuses and methods related to sublimation in forming a semiconductor. In an example, a method may include forming a sacrificial material in an opening of a structure, wherein the sacrificial material displaces a solvent used in a wet clean operation and removing the sacrificial material via sublimation by exposing the sacrificial material to sub-atmospheric pressure.

Abstract: A Method of producing a wooden product by means of a molding hot-pressing from a wooden blank which has one or several sections (A, B, C, D).

Abstract: A drying apparatus for temporary location within a damp or waterlogged room is disclosed. The apparatus includes sensors to sense the level of temperature and humidity within the room, a heater to provide heat for the room, an air circulation fan for selectively circulating heated air within the room or selectively exhausting warm and humid air from the room and for allowing outside ambient air into the room. The apparatus being adapted to cyclically continue until the sensed humidity reaches a required level, the apparatus thereafter indicating, directly or indirectly, the completion of the drying process. A method of drying a room using such apparatus is also disclosed which employs a technique whereby the rate of change of the temperature increase is used to determine when humid air should be exhausted from the room. A time limit can also be use to determine when said exhausting takes place.

Abstract: According to one embodiment, a supercritical drying method for a semiconductor substrate comprises introducing a semiconductor substrate, a surface of the semiconductor substrate being wet with a water-soluble organic solvent, to the inside of a chamber, hermetically sealing the chamber and increasing a temperature inside the chamber to not lower than a critical temperature of the water-soluble organic solvent, thereby bringing the water-soluble organic solvent into a supercritical state, decreasing a pressure inside the chamber and changing the water-soluble organic solvent in the supercritical state to a gas, thereby discharging the water-soluble organic solvent from the chamber, starting a supply of an inert gas into the chamber as the pressure inside the chamber decreases to atmospheric pressure, and cooling the semiconductor substrate in a state where the inert gas exists inside the chamber.

Abstract: A method and apparatus for drying a room within a building by sealing the room from outside ambient air ingress, heating the room internally, sensing humidity levels within the room, exhausting the air from within the room and drawing in outside ambient air, sensing water content within the room, and repeating the sequence until a dry status indication is received that the water content within the room has been reduced a predetermined level.

Abstract: A fluid heater includes a duct pipe through which a fluid to be heated flows, and a heating part configured to heat the duct pipe. One or more fillers is provided inside the duct pipe. A substrate processing apparatus includes: a supply source configured to supply a liquid of a volatile organic solvent; the aforementioned fluid heater configured to heat the liquid of the organic solvent supplied by the supply source so as to generate a steam of the organic solvent; and a chamber configured to accommodate a substrate W and to dry the substrate W accommodated therein, to which the steam of the organic solvent generated by the fluid heater is supplied.

Abstract: The present invention relates to an apparatus for removing liquid from a suspension. More particularly, the present invention relates to a filtration apparatus using vacuum pressure, compressed air and radiant heat to facilitate extraction of water from a suspension and an air flow within the vacuum chamber to remove the evaporate as a cost-efficient and resource-efficient means of filtering and drying solids in large volumes of suspension to remove interstitial and chemically bound liquids, resulting in up to 100% total solids.

Abstract: A method for torrefaction of water containing cellulosic materials is performed in an inert atmosphere. The cellulosic material is cascaded through the apparatus between a plurality of rotatable trays vertically stacked within multiple processing zones. Steam being generated from heating of the cellulosic material is recycled back to the apparatus to provide an inert atmosphere. The steam may be superheated in a heat exchanger. Exhaust from the torrefaction zone of the apparatus has some moisture and other volatiles removed prior to being reheated in a burner. The heated exhaust is used in the heat exchanger to superheat the recycled steam.

Abstract: According to one embodiment, a supercritical drying method for a semiconductor substrate comprises introducing a semiconductor substrate, a surface of the semiconductor substrate being wet with a water-soluble organic solvent, to the inside of a chamber, hermetically sealing the chamber and increasing a temperature inside the chamber to not lower than a critical temperature of the water-soluble organic solvent, thereby bringing the water-soluble organic solvent into a supercritical state, decreasing a pressure inside the chamber and changing the water-soluble organic solvent in the supercritical state to a gas, thereby discharging the water-soluble organic solvent from the chamber, starting a supply of an inert gas into the chamber as the pressure inside the chamber decreases to atmospheric pressure, and cooling the semiconductor substrate in a state where the inert gas exists inside the chamber.

Abstract: A lyophilization device configured for use in a lyophilization process has a body defining a chamber for receiving a liquid to be lyophilized, and a stopper creating a liquid-tight seal between the chamber and ambient atmosphere to form a sealed, empty sterile chamber. The stopper is adapted so that the chamber may be sterile filled with the substance through the stopper. A fluid passageway is formed through the stopper, through which the chamber is evacuated. The substance is lyophilized, the fluid passageway is closed, and the lyophilized substance is hermetically sealed within the chamber.

Abstract: A substrate processing method which can reduce the number of particles to be left on each substrate is provided. In the substrate processing method, substrates W to be processed are dried, by using a fluid heated by a heating apparatus having one or more heating mechanisms. The substrate processing method comprises a first step of supplying a mixed fluid containing a gas and a processing liquid and heated by the heating apparatus, into a processing chamber in which the substrates to be processed are placed, and a second step of supplying the heated gas into the processing chamber. The output of at least one of the heating mechanisms is kept at a preset constant value for a period of time during which a predetermined time passes after the start of the first step. In the second step, the output of the heating mechanism is determined under a feed back control.

Abstract: Device and method for lyophilizing a substance within the device and storing therein the lyophilized substance. The device defines a chamber for receiving therein the substance to be lyophilized, a penetrable and resealable portion of the device is penetrable or pierceable by a needle for filling the device with the substance, and a resulting hole therein is resealable by transmitting radiation from a radiation source thereon. A filter is connectable in fluid communication between an interior and exterior of the chamber for permitting fluid to flow therethrough in a direction from the interior to the exterior of the chamber, and for substantially preventing contaminants from flowing therethrough in a direction from the exterior to the interior of the chamber.

Abstract: An apparatus and method of drying and sanitizing sports gear or other clothing includes an upward-extending rack; a support base to support the rack; a plurality of arms on the rack to support the clothing, the arms angled like the arms of a tree; an ozone generator; and a removable, flexible enclosure that covers the rack and is secured to the rack so as to retain the ozone near to the clothing.

Abstract: A centrifugal bowl separator, including a bowl, a source of pressurized gas in selective flow communication with the bowl and operable to selectively supply pressurized gas to an interior portion of the bowl, and first and second pressure seals selectively established to provide a zone within a portion of the bowl such that when the pressurized gas is introduced, pressure within the portion of the bowl increases for enhanced removal of moisture and drying of solids within the portion of the bowl.

Abstract: A drying system includes a fluidized bed dryer and fluidizing gas loop. The system is a closed loop so that fluidizing gas used to dry particulate matter can be reconditioned and recycled to fluidize and dry additional particulate matter. The fluidizing gas is reconditioned by removing fine particulates and water vapor. The drying system includes oxygen control features to prevent oxygen from entering the system. A method for drying particulate matter includes fluidizing the particulate matter in a dryer with a fluidizing gas, heating the particulate matter to remove water, removing water vapor and fluidizing gas from the dryer, removing fines and water vapor from the fluidizing gas, recirculating the fluidizing gas to the dryer to fluidize additional particulate matter and removing dried particulate matter from the dryer. A modular drying system reduces the amount of construction necessary at the installation site.

Abstract: A device and related method are provided for lyophilizing a substance within the device and storing therein the lyophilized substance. The device is penetrable by a needle for filling the device with the substance to be lyophilized, and a resulting needle hole in the device is laser resealable by transmitting thereon laser radiation from a laser source. The device defines a chamber for receiving therein the substance to be lyophilized. A needle penetrable and laser resealable portion of the device is pierceable with a needle to form a needle aperture therethrough to fill the chamber with the substance to be lyophilized through the needle, and is laser resealable to hermetically seal the needle aperture by applying laser radiation thereto.

Abstract: A method and apparatus for drying a room within a building by sealing the room from outside ambient air ingress, heating the room internally, sensing humidity levels within the room, exhausting the air from within the room and drawing in outside ambient air, sensing water content within the room, and repeating the sequence until a dry status indication is received that the water content within the room has been reduced a pre-determined level.

Abstract: The present invention provides a moisture-absorbent formed body comprising 1) an amine compound and/or a thermally conductive material, 2) a hygroscopic agent, and 3) a resin component, for removing moisture from within the sealed atmosphere of an organic electroluminescent device, and thereby suppressing the occurrence of dark spots.

Abstract: The present invention provides devices and methods in which humidity is regulated within a housing to reduce over-drying of moisture, sweat, and any other deteriorating liquids introduced into a leather-based product by its use. This over-drying of the leather-based product results in an undesired reduction in the amount of moisture content remaining in the leather which decreases the life span and tactile sensitivity of the leather-based product. A moisture-absorbing chemical, enclosed within a container, is positioned within the housing to stabilize a humidity level within a desired range. This humidity level reduces over-drying of the leather-based product by regulating the amount of moisture that escapes the leather-based product while in the housing. As a result, the life of a leather-based product, such as a sporting glove, is extended by reducing the deleterious effects caused by over-drying of the leather within the product.

Abstract: A hopper for dehumidifying loose particulate material, of the type constituted by a container for the particulate material, which is provided, in an upper region, with a covering provided with a manifold for loading the hopper; an air dehumidification device being functionally connected to the hopper; an area for venting the air that is present in the container being provided on the covering and being functionally associable with the intake of the air dehumidification device. The hopper further comprises air filtering elements which are arranged substantially at the venting area.

Abstract: Parts to be chemically treated are processed in a controlled-environment processing chamber. The process includes applying a negative gauge pressure to the chamber to remove air or other non-condensable gases. The process includes introducing an oxygen free solvent or aqueous solution in a vapor or liquid state. A first system removes oxygen and volatile contaminants from the object being processed and chamber, and a second system further recovers residual solvent from the object and chamber. Eliminating oxygen from the process prevents deflagration within the system thus allowing for the use of flammable solvents within the process.

Abstract: This vacuum processing apparatus has a fixed processing chamber 24 and two movable load lock chambers 28a and 28b. A gate valve 26 is provided on the processing chamber 24, and gate valves 30 are respectively provided on the load lock chambers 28a and 28b. Each of the load lock chambers 28a and 28b is moved in a Y direction by a preparatory chamber moving mechanism 34. A vacuum seal 54, which is expandable and shrinkable so as to vacuum seal a gap G between the gate valves 26 and 30 which are set close to each other during the expansion, is provided around a peripheral edge portion of the processing chamber gate valve 26. Further, a substrate transporting mechanism for transporting a substrate 2 between the processing chamber 24 and each of the load lock chambers 28a and 28b set close thereto.

Abstract: An apparatus for treating articles, in particular vehicle bodies, with at least one tempered, directed air jet comprises a housing, in which are formed a treatment chamber and at least one pressure chamber, which is separated from the treatment chamber by a partition wall. The tempered air is suppliable to the pressure chamber and may then flow as a directed air jet into the treatment chamber through a nozzle device, which penetrates an opening of the partition wall. The nozzle device is insertable from the treatment chamber into the partition wall and fastenable from the treatment chamber to the partition wall. Consequently, subsequent work on the nozzle device, in particular an exchange thereof, may be carried out more easily.

Abstract: A fluid processing unit having first and second interleaved flow paths in a cross flow configuration is disclosed. The first flow paths are substantially longer than the second flow paths such that the pressure drop in the second flow paths can be maintained at a relatively low level and temperature variations across the second flow paths are reduced. One or more of the flow paths can be microchannels. When used as a vaporizer and/or superheater, the longer first flow paths include an upstream liquid flow portion and a downstream vapor flow portion of enlarged cross sectional area. A substantial pressure drop is maintained through the upstream liquid flow portion for which one or more tortuous flow channels can be utilized. The unit is a thin panel, having a width substantially less its length or height, and is manufactured together with other thin units in a bonded stack of thin metal sheets. The individual units are then separated from the stack after bonding.

Abstract: A boot dryer device, an associated kit for assembling the boot dryer device and a method of using same are disclosed for use in conveniently drying a pair of wet boots. The boot dryer device includes a T-junction conduit and an adaptor sleeve. The T-junction conduit has an input port and two outlet vent ports. The adaptor sleeve is operationally attached to the T-junction conduit so that it can efficiently transfer heated air from an electric air dryer into a pair of wet boots hung from the T-junction conduit. The kit includes the unconnected components of the device. The method includes the steps of enveloping, hanging, obtaining, plugging, pulling, removing, slipping, switching, turning, unplugging, and wrapping.

Abstract: A lumber drying kiln employs outside air pressure uses a flexible collapsing bag or cover alone or in combination with walls. The collapsing bag seals against a base to maintain the vacuum. The air pressure against the flexible top keeps the lumber layers from warping or cupping during drying. The lumber stack has alternating layers of hot plates or stickers separating layers of lumber. A bag having an open bottom and made of nylon-reinforced rubber or other strong flexible material is placed over the wood and sealed to the stainless steel platform. A vacuum pump is connected with the bag by means of a manifold and operated to remove air from the enclosed lumber stack, the vacuum strengthening the seal between the base and the bottom of the bag. This chamber design is easily scaled up or down to provide a desired drying capacity.

Abstract: The invention relates to a method for stocking and preserving green round wood and sawn timber, which is stored in an airtight and lighttight sealing cover. The oxygen inside the cover is decomposed by the respiratory process of fungi, bacteria and wood cells that are still alive, thereby forming CO2 and H2O. Fermentation processes also lead to the decomposition of hemicelluloses and saccharides which are converted to organic acids and CO2. The oxygen content in the cover is less than 0.1 vol. % after an adjustment time of 3 to 10 days of total stocking, while said CO2 content rises to more than 21 and up to 40 vol. %. This method enables green round wood a swan timber to be stocked over long periods without wastage or environmental damage.

Abstract: Treatment apparatus and a process for thermal desorption of hydrocarbon contaminants from excavated soil provides efficient contaminant removal by handling the soil in a thermally conductive treatment vessel that fits within an insulated treatment chamber. The soil is treated in this chamber with fresh air that is dried and electrically heated prior to contacting the treatment vessel. The dry air passes through the soil and the air mixed with contaminants is withdrawn from the chamber through piping in the treatment vessel. Excavating the soil directly into the treatment vessel allows the treated soil to be returned to the final disposition site in the same vessel, minimizing soil handling.

Abstract: A centrifugal dryer (10) for removing surface moisture from pellets of resin material having a diameter generally ranging between approximately 0.015 to approximately 0.25 inches received from an underwater pelletizer. In one embodiment of the present invention, the dryer is constructed with smaller dimensions enabling it to effectively operate at low volume rates and be easily assembled and disassembled to facilitate cleaning and replacement or interchange of components with its overall size enabling it to be effectively used in small applications. In other embodiments of the present invention, the dryer is constructed with larger dimensions enabling it to effectively operate at high volume rates for use in commercial applications.

Abstract: The present invention is directed to a controlled environment processing chamber of chambers in which parts are to be dried. The parts either contain water on or imbibed into the part. The process includes a means of applying a negative gauge pressure to the chamber to remove air or other non-condensable gases. Further, means are provided for introducing a solvent in a vapor state to the chamber to cause the water to flash off the part. A first system recovers water or aqueous solution(s) from the object being dried and the chamber. A second system, separate from the first system, further recovers residual solvent from the object and chamber after the drying process.

Abstract: The present invention is directed to a method for controlled environment processing of parts in a chamber or chambers wherein solvents and/or solutions used for processing the parts can be introduced. The process includes applying a negative gauge pressure to the chamber to remove air or other non-condensable gases. Next a solvent, solvent mixture or solution in either a liquid or vapor state is introduced to the chamber. A first system is then applied to recover the solvent(s) or solution(s) from the object being processed and chamber, and a second system, separate from the first system, is applied that further recovers residual solvent or solution from the object and chamber. Treatment of the part may be in the form of coating, etching, deposition, cleaning, stripping, plating, adhesion, dissolving, penetrating, anodizing, impregnating, debinding or any other process in which material is removed or deposited on a solid surface by transfer from or to a liquid or gas phase.

Abstract: Method for drying wood in a short period of time by maintaining the concentration of a combustion gas contained in a drying room atmosphere for use in drying the wood to a high value and by maintaining the pressure of the drying room atmosphere to a high value. Wood fuels such as waste wood are put into a combustion chamber ins lower area of a combustion gas generating furnace and then the wood fuels are burned, followed by introducing the high-temperature combustion gas generated by the burning of the wood fuels into an upper area of a drying room housing the green wood to thereby dry the wood. Thermal drying of the wood is carried out by maintaining the concentration of the combustion gas present in the drying room atmosphere at a the high value and by maintaining the pressure of the drying room atmosphere at a high value.

Abstract: An apparatus for treating workpieces comprises a treatment chamber enclosing a treatment zone for workpieces. A conveyor guides workpieces through the chamber. Said conveyor comprises drive elements located outside the chamber, and a carrier arm, extending through a slot along the conveyor's path of motion, in a wall of the chamber. A sealing arrangement comprises a first set of spring strips, which overlap laterally and are attached on one side of the slot to the wall, and an opposing second set of spring strips attached on the other side of the slot to the wall. In a resting position, the end zones of the spring strips overlap. Two deflecting devices, which move together with the carrier arm by the conveyor, open the sealing arrangement proximate the carrier arm by resiliently bending apart the spring strips. After passage of the carrier arm, the spring strips return to a sealing position.

Abstract: Disclosed is a method for controlling a heat treatment in the process of fabricating a high purity silica glass via a sol-gel process using a low temperature heater having an inhalation line and an exhaust line. Accordingly, the method includes the steps of (a) identifying whether or not the diameter of the exhaust line is varied; (b) controlling the mass flow of the process gas according to the changed diameter of the exhaust line in step (a); (c) measuring an exhaust gas velocity discharged through the exhaust line; (d) comparing the exhaust gas velocity measured in the step (c) with the exhaust gas velocity after the scale of the exhaust line is varied; and, (e) repeating steps (b)-(d) if the comparison result in step (d) is different.

Abstract: A metal plate (52) is connected to a wall (10). Plate (42) includes a vent opening (48) that communicates with vent ducting (18) with the wall (10). A magnetic sheet body (52) is connected to a vent tube (60) located at the back of a clothes dryer (64). The clothes dryer (64) is moved towards the wall (10) and the magnetic sheet body (52) is moved against the metal plate (42). A vent opening (54) in the magnetic sheet body (52) is put into alignment with the vent opening (48) in the metal plate (42). The magnetic sheet body (52) provides a seal between the two vent openings (54, 48).

Abstract: The invention relates to a dryer (1) for drying continuously conveyed products, e.g. a warp, comprising essentially a first dryer array (2) and a second dryer array (3). A passage (4) for passing through the product (W) is formed between the dryer arrays (2, 3). The second dryer array (3) is configured in such a way as to be able to move in relation to the first dryer array (2). When the dryer (1) is in stop position (S), the second dryer array (3) is disposed relative to the first dryer array (2) in such a way that the cross section of the passage (4) is bigger than in the operating position (B).

Abstract: Disclosed is a vacuum valve including a lid, a depression defined on the lid, a boss formed on the lid at a bottom of the depression, a rotary cover rotatably arranged in the depression, and a closure member detachably coupled to the rotary cover.

Abstract: To provide a substrate transfer apparatus capable of forming a hermetically-closed space integrated between a normal substrate processing apparatus which is not integrated with a substrate transfer unit and a substrate transfer container, the substrate transfer apparatus includes a main body in a box-like shape containing a substrate W, an upper opening (first opening) provided at the main body and connected to a bottom opening (substrate transfer port) of a container while maintaining an air tight state against outside air, a side wall opening (second opening) provided at the main body and connected to a substrate transfer port of the transfer processing apparatus while maintaining the air tight state against outside air, an exhaust pipe connected to the main body, an opening/closing mechanism for opening and closing a bottom lid relative to the bottom opening in a state in which the upper opening and the bottom opening of the container are connected and transfer mechanisms installed in the main body for tra

Abstract: A method and an apparatus for reducing the moisture content bound by capillary action in fiber cells. To include fine material economically and easily in the process, coarse material is sandwiched on top of fine material and then pressed and dried. The material prepared by grinding and screening is transferred as coarse material to a first spreader hopper, and the screened fine material is transferred over a chute and conveyor belt to a second spreader hopper. The fine material is spread in a thin layer through a vertically adjustable gate from the second spreader hopper onto a spreading, loading and filtering belt, and the coarse material is withdrawn on a transfer conveyor belt running below the first spreader hopper and then is spread through a vertically adjustable gate onto the fine layer, to form a sandwich-like mat.

Abstract: The present invention is an active microchannel fluid processing unit and method of making, both relying on having (a) at least one inner thin sheet; (b) at least one outer thin sheet; (c) defining at least one first sub-assembly for performing at least one first unit operation by stacking a first of the at least one inner thin sheet in alternating contact with a first of the at least one outer thin sheet into a first stack and placing an end block on the at least one inner thin sheet, the at least one first sub-assembly having at least a first inlet and a first outlet; and (d) defining at least one second sub-assembly for performing at least one second unit operation either as a second flow path within the first stack or by stacking a second of the at least one inner thin sheet in alternating contact with second of the at least one outer thin sheet as a second stack, the at least one second sub-assembly having at least a second inlet and a second outlet.

Abstract: In a load port mechanism of a substrate treatment unit, protuberances are provided on a sealing surface formed along a door with which a wafer carrier is to dock, or on a sealing surface formed around the door of the wafer carrier. The wafer carrier door is faced with the load port door with the protuberances therebetween, thereby separating the sealing surface of the substrate treatment unit from the sealing surface of the wafer carrier by only a predetermined distance. Thus, there is formed a channel along which clean air flows from the inside of the substrate treatment unit to the outside thereof. The load port structure and the wafer carrier structure improve the reliability of opening/closing action of the wafer carrier and prevent entry of extraneous particles into the treatment unit with sufficient reliability, and enable high-yield production of integrated circuits.

Abstract: A highly moisture-sensitive element and method of making such element includes an encapsulation enclosure encapsulating all of the highly moisture-sensitive electronic devices on a substrate and a sealing material positioned between the substrate and the encapsulation enclosure to form a complete seal between the substrate and the encapsulation enclosure around each highly moisture-sensitive electronic device or around groups of highly moisture-sensitive electronic devices, wherein the substrate or encapsulation enclosure, or both, contain vent holes and vent hole seal material or wherein the seal material contains gaps prior to spacing the substrate and the encapsulation enclosure within a predetermined range and the gaps are filled in by spreading the sealing material.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.

Abstract: A transport enclosure arranged between a first apparatus and a second apparatus, all located in a clean room, is shielded from the clean room and maintained a degree of cleanliness which is cleaner than that of the clean room. Accordingly, the volume of space within the clean room requiring the highest degree of cleanliness is minimized, thereby reducing overall costs.

Abstract: The invention relates to a method for drying substances sensitive to being moisturized by a solvent, which mainly consists in separating said substances from a surrounding atmosphere in which said solvent is present, by hermetically sealing said substances in an envelope advantageously having a wall region which does not adhere to said substances and in which said envelope essentially consists of a polymer membrane which is selectively permeable to the vapor of the humidifying solvent but excludes said solvent in the liquid state. The method according to the invention can also be used to prevent dry products from being humidified.

Abstract: The present invention provides an improved assembly for rotating and sealing a centrifugal dryer and a dryer including such a sealing assembly. A seal according to the present invention includes an end cap supporting a bearing that in turn rotationally supports a rotor. The end cap has an attachment portion and a seal ring including a groove receiving a v-ring seal that sealingly engages the stub shaft attached to the dryer rotor. The seal ring defines a drain cavity having at least one drain port out of which any fluid that infiltrates past the v-ring seal can drain from the end cap. The drain port is disposed at a lower level than the v-ring seal and the grease seal so that fluid can drain away without accumulating and infiltrating past the bearing grease seal and into the bearing compartment formed between the end cap and rotor the stub shaft.

Abstract: A transport enclosure arranged between a first apparatus and a second apparatus, all located in a clean room, is shielded from the clean room and maintained a degree of cleanliness which is cleaner than that of the clean room. Accordingly, the volume of space within the clean room requiring the highest degree of cleanliness is minimized, thereby reducing overall costs.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dirty-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.