Abstract: An apparatus for extracting essential oils and oleoresins from a plant material is disclosed. The apparatus comprises a circulation pump, a discharging pump, an extraction module, a reservoir, a first evaporator, and a first condenser. The discharge pump is fluidly connected to the circulation pump. The extraction module includes at least one extraction vessel. The reservoir is configured to store a solvent containing a C1 to C4 fluorinated hydrocarbon. In a short loop circulation mode the discharge pump pumps a solution comprising the solvent and one or more active components of the plant material dissolved therein from the bottom of the at least one extraction vessel, passing through the circulation pump, and then back to the top of the at least one extraction vessel.

Abstract: The present invention relates to a clothes dryer and method of drying clothes. A clothes dryer (10) comprising:—a drying chamber (31), arranged to accommodate clothes, defined by at least one wall,—an air pathway, along which air is arranged to flow from an air inlet to an air outlet, comprising the drying chamber (31), wherein,—the at least one wall comprises a cavity wall comprising a first curved surface (11), a cavity (16) and a second curved surface (15),—the first curved surface (11) of the cavity wall being arranged to define an exterior surface of the dryer and to facilitate a transmission of light energy to the cavity (16) and/or the second curved surface (15),—the cavity (16) being arranged as comprised in the air pathway, and,—the second curved surface (15) of the cavity wall being arranged to define at least a part of the drying chamber (31).

Abstract: The present invention proposes a large industrial vacuum sealer system. The system comprises the following working steps: after materials are placed, a box base moves upwards to be jointed with a box cover in a sealing manner; the first valve 120 is switched on; a rotary vane pump starts roughly pumping the air; next, a roots pump starts working; when the pressure reaches a preset value, the first valve 120 is switched off; valves 110 and the second valve 130 are switched on; diffusion pumps start working; after the air is pumped out completely, all pumps stop working. A box body comprises the box cover and the box base, wherein the box body is fixedly mounted. The box base is driven by air cylinders to move along a rail. In the present invention, a light curtain sensor is mounted between the box cover and the box base.

Abstract: A clothes treatment apparatus includes a cooling water pipe that is placed within a condensing duct to condense humidity contained in a circulating air current. The latent heat generated from the condensation of humidity causes the temperature of the cooling water in the cooling water pipe to rise. A thermoelectric pump mechanism collects heat from the higher-temperature cooling water and uses it in heating the circulating air.

Abstract: A freeze-drying method includes depressurizing containers filled with a liquid including a raw material and a medium with a freeze-drying device to freeze the liquid from a liquid surface. The depressurizing includes executing an exhaust mitigation process that performs the depressurizing at an exhaust capability that is less than a rated exhaust capability of the freeze-drying device, and using a partial pressure value of the medium to determine when the exhaust mitigation process ends. The executing an exhaust mitigation process includes maintaining an exhaust speed of a gas capture pump configured to discharge gas from a freeze-drying chamber accommodating the containers, and decreasing an exhaust speed of a positive-displacement pump configured to discharge gas from a space accommodating the gas capture pump.

Abstract: The invention relates to a dryer which is of modular construction and comprises a process air guide (15, 15?) into which a first air conducting element (161) for forming a condensation dryer (1) or a second air conducting element (16?) for forming a extraction air dryer (1?) may be installed. In the process air guide (15, 15?) is formed an insertion region (15d, 15d?) in which the first (161) or the second air conducting element (16?) is arranged, wherein the two air conducting elements (161, 16?) are designed compatibly in respect of their insertion in the insertion region (15d, 15d?), at least in certain regions.

Abstract: Example dryers and washer-dryers having a closed process air circuit having a drum, a condenser downstream from the drum for dehumidifying warm moist air, and a thermoelectric device having a cold side arranged in the process air circuit downstream from the drum are disclosed. Example thermoelectric devices have a warm side cooled by a fluid which is circulated in a liquid/air heat exchanger arranged in the process air circuit downstream from the condenser. Using the disclosed architectures, appliance design can be simplified without decreasing overall system performance.

Abstract: A dryer is provided. The dryer may include a second condenser integrally provided with an evaporator and employing a heat pump to maximize a condensation effect so as to enhance heat exchange efficiency, thereby enhancing dehumidifying capability. The dryer may be a circulation type heat pump dryer including a cabinet, a drum, a drying duct to circulate dry air back to the drum, an evaporator having a heat pump, a first condenser, a compressor, an expansion apparatus, and a second condenser to condense refrigerant condensed by the first condenser again so as to supercool the refrigerant during the refrigerant cycle, thereby enhancing dehumidifying capability in the evaporator.

Abstract: A method for removing a moistening liquid from a moistened medium includes providing a liquid-blocking barrier having a first surface and a second surface that is impermeable to a heating liquid. A surface of the moistened medium is brought into contact with the first surface of the liquid-blocking barrier. The heating liquid is brought into contact with the second surface of the liquid-blocking barrier, the heating liquid being at a temperature greater than a moistening-liquid boiling point. Heat is thus transferred through the liquid-blocking barrier from the heating liquid to the moistening liquid, vaporizing the moistening liquid and removing it from the moistened medium.

Abstract: A nozzle housing assembly, which is used in a convection heating furnace for a heat treatable glass sheet. The nozzle housing assembly comprises an elongated enclosure, at least one elongated heating resistance in the enclosure for heating convection air, and orifices in a bottom surface of the enclosure for blasting heated convection air against the glass sheet. The enclosure is divided with a flow-throttling partition into a top supply duct and a bottom nozzle box, the heating resistances being housed in the latter. Flow-throttling openings present in the partition are positioned to comply with the location and shape of the heating resistances.

Abstract: A clothing dryer having a cover structure capable of increasing quantity of air generated from a cooling fan. The clothing dryer includes a first cover covering the cooling fan and a second cover connected to the first cover. A cutoff is provided at a connection area between the first cover and the second cover to branch a flow of air and is positioned below a rotational center of the cooling fan.

Abstract: A home laundry drier (1) includes a laundry drum (4) which is located inside a casing (3) to rotate about an longitudinal axis (A), and a closed circuit hot-air generator (7) provided with: an air recirculating conduit (8) connected to laundry drum (4); a centrifugal fan (9) and heat-pump means (10). The heat pump means (10) includes first (12) and second air/refrigerant heat exchangers (13) located in the air recirculating conduit (8) to cool the airflow coming out from the laundry drum, and respectively, to heat the airflow returning back into laundry drum (4). The home laundry drier (1) further includes an electric motor (14) designed to simultaneously rotate both centrifugal fan (9) and the laundry drum (4) through transmission system means (16); and inverter means (23) controlling the electric motor (14) and configured to receive a predetermined speed which is associated to a nominal airflow rate within the air recirculating conduit (8) and to a nominal drum speed.

Abstract: A laundry treatment device is provided which includes a first space for laundry treatment, a second space formed separate from the first space, and an air supply device provided in the second space, the air supply device supplying heated dry air to the first space.

Abstract: A dryer is provided having a drying chamber for items to be dried and a process air duct in which are located a heater for heating the process air, a blower for driving the process air from the heater through the drying chamber, and a heat exchanger arrangement. Via the heat exchanger arrangement, heat can be withdrawn from the process air flowing away from the drying chamber, and the process air flowing toward the heater can be fed to the heat exchanger. The process air duct is divided into a main duct and a secondary duct, the secondary duct having an evaporator in which condensate that was separated from the process air in the heat exchanger arrangement can be evaporated into the process air flowing therethrough and is connected to the exhaust opening.

Abstract: A method and a device for rapidly drying ware shell, and a ware shell, are provided, in the field of precision casting technology. Conventionally, the ware shell drying process fails to ensure high quality of a ware shell and rapid drying simultaneously when the ware shell has a complex structure. The method includes the following steps: a. putting a ware shell to be dried in a sealed chamber; b. vacuuming the sealed chamber under the premise condition of controlling the ware shell in a constant temperature state, and cooling the gas in the sealed chamber in a predetermined time period to condense the moisture in the sealed chamber; c. vacuum injecting gas to the sealed vacuum chamber to make the chamber return to normal atmosphere pressure; d. determining whether the ware shell is dry. If result is YES, then end, otherwise back to step b.

Abstract: The laundry dryer (1) of the present invention comprises a drum (2) wherein the laundry desired to be dried is placed, a channel (5) having an inlet allowing the cycle air to enter into the drum (2) and an outlet allowing the cycle air to leave the drum (2), providing the cycle air to be circulated in a closed cycle, a condenser (4) that provides the cycle air leaving the drum (2) to be dehumidified by being condensed, a heater (3) that provides the dehumidified cycle air leaving the condenser (4) to be heated and at least one fan (6) that maintains the cycle air to move along the length of the channel (5).

Abstract: A top (119) is adapted to match and close from above a cabinet (110) of a laundry drying appliance (100). The top is formed as a ready-to-mount part ready to be mounted to the cabinet and forms a moisture condensing module for dehydrating drying air used to dry laundry within a drying drum of the laundry drying appliance. The top has a drying air inlet (510), a drying air outlet (515), fluid passageways defined thereinside from said drying air inlet to said drying air outlet for the passage of the drying air to be dehydrated, and moisture condensing means arranged inside the fluid passageways.

Abstract: A closed cycle dryer comprises a drum, an air blowing unit wherein the air is conveyed to the drum, a heating unit used to heat the air that is blown into the drum, and a condensing unit upstream the heating unit for removing moisture. The dryer further comprises a by-pass between a first portion of the air circuit downstream the condensing unit and a second portion downstream the drum in order to increase the energy efficiency of the drying process.

Abstract: A dishwasher and a controlling method thereof are provided. The dishwasher includes a tub, a door, a steam supplying unit, a fan, and a passage. The tub stores dishes. The door opens and closes the tub. The steam supplying unit supplies steam into the tub. The fan blows the steam. The passage forming unit is formed to circulate the steam blown by the fan inside the tub, or to discharge the steam to the outside of the tub.

Abstract: A clothes drying machine comprises a drum (1), a first fan (5) blowing a first flow of drying air through a drying-air conduit, a condenser (3) through which said flow of drying air passes, a cooling-air conduit conveying a second flow of fresh air through said condenser, said second flow being circulated by a second fan (6), and a motor adapted to drive said fans. There is provided an additional condensation element (11) run in parallel of said conduit of drying air, and a respective second air conduit connecting said additional condensation element to said drying air conduit; said additional condensation element is cooled by air at room temperature inside the dryer machine and/or by a wall of it, and the water there condensed is being passed to a common condense recovery reservoir (10).

Abstract: A condensation dryer is provided that includes a drying chamber for articles to be dried and a process air circuit in which a heater for heating the process air is located. The heated process air can be guided across the articles to be dried along a circulation route that includes a blower, an air/air heat exchanger, and a heat pump circuit having an evaporator, a compressor and a condenser. An additional heat exchanger is arranged in the heat pump circuit between the condenser and the evaporator, the additional heat exchanger being functionally coupled to the air/air heat exchanger.

Abstract: A drying apparatus for drying articles such as clothing is provided. The drying apparatus includes a chamber for containing articles to be dried and a system for supplying heated dry air at a first temperature to the chamber. The air supplying system comprises an air flow pathway having an evaporator for removing moisture from air exiting the chamber and for decreasing the temperature of the air to below dew point temperature. The air supply system further has a condenser for increasing the temperature of the air exiting the evaporator to the first temperature. The drying apparatus further has a heat pump system having a refrigerant loop which includes a compressor, the condenser, a TEV valve, and the evaporator.

Abstract: A drum-type washer/dryer having an evaporator (34) for performing dehumidification by cooling air drawn from the inner space of a drum (24) and also having condenser (35) for heating the air dehumidified by the evaporator (34), wherein the air heated by the condenser (35) is made to sequentially pass through a duct (40) and a blowhole (47) and blown as dry air to clothes in the drum (24). A backflow preventing portion (52) is provided in the duct (40), and when bubbles flow back into the duct (40) from the inner space of the drum (24) through the blowhole (47), the backflow preventing portion (52) functions as resistance for preventing the back flow of the bubbles.

Abstract: A drying apparatus has a heat pump comprising a compressor (31), a radiator (32), a throttle apparatus (33) and an evaporator (34), and also includes a structure in which drying air heated by heat of the radiator (32) is introduced to a subject (37) to be dried is dehumidified by the evaporator (34). The drying apparatus also includes a bypass circuit (39) through which a portion of dying air heated by the radiator (32) flows to an inlet of the evaporator (34) without coming into contact with the subject, a super heat detecting device (43, 44) for detecting super heat of the heat pump apparatus, and a throttle apparatus control device for controlling flow path resistance in the bypass circuit (39) using a value detected by the super heat detecting device (43, 44).

Abstract: A base module for a condenser tumble dryer housing the functional parts and air conduction components and additionally being configured as part of the support structure of the tumble dryer. The base module comprises perpendicular joint faces in relation to the front end shield and the rear process air cover. The joint faces lie essentially on at least one perpendicular plane or on at least two perpendicular planes that are offset in a staggered manner in relation to one another, have a large surface area and preferably extend over the entire width of the tumble dryer. The proposed base module has significant advantages in terms of its mechanical stability as an individual structural component and as part of the entire support structure and in terms of the effective conduction of the air streams, the production of the individual parts and the assembly of the final module.

Abstract: A lyophilization apparatus includes a chamber and plural drying shelves arranged in vertically spaced apart relation. Each shelf has an inlet, outlet, and flow passageway therebetween. Plural sets of shelves are independently coupled to separate sources of circulating heat exchange fluid. In a preferred embodiment, every second shelf is fluidically coupled to a first inlet manifold and a first outlet manifold, and every other shelf is fluidically coupled to a second inlet manifold a second outlet manifold. The first inlet and outlet manifolds are fluidically coupled to a first circulating source of heat exchange fluid and the second inlet and outlet manifolds are fluidically coupled to a second circulating source of heat exchange fluid, whereby the temperature of each drying shelf can be controlled independently of a vertically adjacent one of the drying shelves. In a further aspect, a lyophilization process is also provided.

Abstract: A condenser of a condensing-type dryer is provided. In the condensing-type dryer, a hydrophilic film is formed on a heat emission plate by a plasma discharge. In the heat emission plate, an indoor air can be heat exchanged with a circulation air cycling in a drum. A contact angle of a condensed waterdrop formed on the heat emission plate is decreased through the hydrophilic film, thereby making it possible to decrease a flow resistance due to the condensed waterdrop.

Abstract: A drying apparatus for drying articles such as clothing is provided. The drying apparatus includes a chamber for containing articles to be dried and a system for supplying heated dry air at a first temperature to the chamber. The air supplying system comprises an air flow pathway having an evaporator for removing moisture from air exiting the chamber and for decreasing the temperature of the air to below dew point temperature. The air supply system further has a condenser for increasing the temperature of the air exiting the evaporator to the first temperature. The drying apparatus further has a heat pump system having a refrigerant loop which includes a compressor, the condenser, a TEV valve, and the evaporator.

Abstract: A process and apparatus for drying a stack of lumber, wherein the dry comprises a condensation collection device for collecting liquid in the chamber interior space; and an evaporation system for evaporating collected liquid from the chamber interior space. Process water or effluent discharge from the drying process is reduced or eliminated.

Abstract: A drying apparatus having a purpose of shortening a drying time of laundry, comprising an accommodating chamber in which the laundry is accommodated, and executing a washing operation of the laundry and a drying operation after end of the washing operation in the accommodating chamber, the machine comprising: a refrigerant circuit in which a compressor, a gas cooler, an expansion valve, and an evaporator are successively connected to one another in an annular form via a piping; an air circulation path for discharging air which has exchanged heat with the gas cooler into the accommodating chamber by a blower to exchange the heat of the air passed through the accommodating chamber with the evaporator; and a control device for operating the compressor and the blower to perform the drying operation, wherein the control device starts the operation of the compressor before entering the drying operation.

Abstract: A closed-type drying system a drying chamber with glass windows to allow light entering, an condensation and heating system connected between two distal ends of the drying chamber and controlled by an automatic control system, the condensation and heating system including an air blower for blowing air through the drying chamber, a heater for heating air passing through the drying chamber, two evaporators for condensing moisture from output air of the drying chamber, a heat energy reclamation chamber connected between the air blower and the evaporator, a condenser mounted inside the heat energy reclamation chamber for preheating air passing through the heat energy reclamation chamber, a first compressor mounted in the heat energy reclamation chamber for heat exchange with the flow of air passing through reclamation chamber, and a second compressor adapted to provide low temperature conditions (if needed) in the drying chamber.

Abstract: The object of the present invention is to provide a microstructure drying treatment method by which a substrate having a microstructure has a fine pattern of less than 30 nm and a large-caliber substrate of 100 mm or more can be dried uniformly and in a short time without generating pattern collapse, and its apparatus and its high pressure vessel. The present invention is a microstructure drying treatment method of introducing a fluid that is gas at normal temperature and pressure and is liquid under high pressure inside a high pressure vessel in which a substrate having a microstructure in a state immersed in or wet with a rinsing liquid in a liquid or supercritical state. The method forms a specific gravity difference between the rinsing liquid and fluid inside the high pressure vessel and collects the rinsing liquid to the upper side or lower side of the high pressure vessel by changing at least one side of the temperature and pressure of the fluid and changing the specific gravity of the fluid.

Abstract: A separator for removing contaminants from compressed air, the separator including an elongate enclosure having an inlet end and an opposite outlet end, the inlet end of the separator being in flow communication with a source of compressed air, the separator defining a first air flow path between the inlet and outlet ends of the separator and a second air flow path between the outlet end of the separator and a wall member positioned adjacent outlet end of the separator for being contacted by air exiting the outlet end of the separator, wherein air traveling in the first flow path undergoes a volumetric expansion and substantial change of direction as it exits the separator and enters the second air flow path and further undergoes a change of direction as it impacts the wall member.

Abstract: A system for separating hydrocarbons from a material which includes a process chamber, a process pan operatively connected to the process chamber and removable therefrom, a blower operatively connected to the process chamber and to a heat source, the blower adapted to force heated air into the process chamber through the material disposed on the process pan, the forced heated air adapted to vaporize hydrocarbons and other contaminants disposed on the material, and at least one condenser operatively connected to the process chamber and adapted to condense the vaporized hydrocarbons and other contaminants is disclosed. Further, a method for separating hydrocarbons from a material which includes passing a stream of heated air over the material to volatilize the hydrocarbons, passing the stream of heated air containing the hydrocarbons through at least one condenser to form liquid hydrocarbons, collecting the liquid hydrocarbons, and recirculating the heated air is disclosed.

Abstract: A portable, atmospheric dehydrator and water condenser for dehydrating fruits and vegetables while producing pure atmospheric condensation from humidity found in the air and purifying the water for dispensing and drinking purposes.

Abstract: A device for performing surface treatment on semiconductor wafers has a cassette (1) for accommodating a plurality of wafers (5) in its interior (3); the wafers (5) are aligned in a first row. The wafer surfaces (51) are essentially in parallel with each other. The cassette (1) has a side-wall (10) which can be arranged essentially perpendicular with respect to the wafer surfaces (51); the side-wall (10) has openings (111′-145′) on its face (101) which is directed to the wafers (5), the openings (111′-145′) are aligned in second rows, the second rows are essentially parallel to the first row; the openings (111′-114′) are connected to respective supply channels (11′, 12′, 13′, 14′, 15′) for transporting a surface treatment medium which is fed to one (15′) of these supply channels via a feeding point (FP). The cross-section of the openings (111′-145′) is variable.

Abstract: An air drier comprises a base member with means for supplying and carrying away air to and from the air drier, respectively, a cylindrical, dome-shaped container releasably attached to the base member, and in the container a replaceable cartridge for desiccant. The cartridge is divided by a cylindrical dividing wall into a central compartment containing desiccant and an outer annular compartment. The top wall of the cartridge is provided with holes or passages for allowing air communication inside the container between the two compartments.

Abstract: Apparatus and method for condensing moisture from an air stream. The condensing comprises concentric cylinders having a common wall. The outer cylinder contains a cooling material, such as water, and upon contact therewith, the air stream is cooled and moisture contained therein is condensed.

Abstract: The invention relates to an industrial cleaning facility comprising at least one treatment chamber (8) which can be put in an open position or a closed position (operating position). To ensure that the treatment chamber (8) can be loaded and unloaded without difficulty and to permit easy adaptation to a discontinuous production line (2; 3), the treatment chamber is divided up and consists of at least one lower part (13) and at least one upper part (26). The lower parts (13) can be fixed to a rotating column (9) having several arms and the upper parts (26) can be fixed to immovable holding posts (7) and be height-adjustable. In holding stations (7) the upper parts (26) and the lower parts (13) can be connected by means of lifting devices (38) and moved into the operating position.

Abstract: An apparatus for processing an object with ultra-violet light is provided. The apparatus generally comprises a container, a transducer, coupled to the container; and a source of ultraviolet light configured to deliver ultraviolet light to an object disposed within said container. The UV source is configured to deliver the ultraviolet light through the vapor to process the object. The vapor and UV light react with a surface of the object to process the object. The apparatus is particularly suited to wet processing substrates in a single substrate processing system having multiple wet processing chambers configured within a process bench. The apparatus can include a robot arm having a pick-up, such as a vacuum wand, that adheres to a back side of the substrate.

Abstract: Nitrogen gas is jetted into a space on the liquid level of pure water in a drying chamber in which wafers are immersed. Simultaneously therewith, liquid-phase isopropyl alcohol is jetted at a temperature higher than the temperature of the wafers and in the vicinity of jetting openings for the nitrogen gas. When the wafers are exposed above the liquid level in the drying chamber, the pure water held on both front and rear surfaces of the wafers is replaced by the isopropyl alcohol of mist-form. The isopropyl alcohol is then evaporated, whereby the wafers are dried.

Abstract: The present invention is an active microchannel fluid processing unit and method of making, both relying on having (a) at least one inner thin sheet; (b) at least one outer thin sheet; (c) defining at least one first sub-assembly for performing at least one first unit operation by stacking a first of the at least one inner thin sheet in alternating contact with a first of the at least one outer thin sheet into a first stack and placing an end block on the at least one inner thin sheet, the at least one first sub-assembly having at least a first inlet and a first outlet; and (d) defining at least one second sub-assembly for performing at least one second unit operation either as a second flow path within the first stack or by stacking a second of the at least one inner thin sheet in alternating contact with second of the at least one outer thin sheet as a second stack, the at least one second sub-assembly having at least a second inlet and a second outlet.

Abstract: This Document is a Continuation in Part of U.S. patent application Ser. No. 09/093,029 filed on Jun. 8, 1998, said invention comprising an apparatus for evaporating water in a mixture of water and solids derived from the organic output of a waste water treatment plant. A low cost source of gaseous heat (as the exhaust from a gas turbine driver in combination with/or alternatively from a stand alone combustor) is used for evaporating said water and safe conditioning said evaporated water vapor after being combined with a portion of the exhaust from said gaseous heat source. The solids portion of said organic output from said waste water treatment plant is segregated and safe conditioned separately. This continuation in part filing supplements said basic reference patent filing by defining a specific heat exchange surface configuration for heat exchanger 17 which minimizes radiation heat losses to atmosphere.

Abstract: An alcohol vapor dryer system includes a vapor generating chamber, a heater, a process chamber, a gas supplier, a drain vessel, and a suction device. The vapor generating chamber of cylindrical shape contains liquid alcohol supplied from an outer source and includes a fan installed above the surface of the liquid alcohol. The heater installed below the vapor generating chamber heats the liquid alcohol contained in the vapor generating chamber at a temperature lower than the boiling point of the liquid alcohol. The process chamber communicates with the vapor generating chamber through a plurality of fluid ducts and includes a body and a cover plate for covering the body. The gas supplier generates heated nitrogen gas and supplies the gas in order to transfer the heated nitrogen gas and the alcohol vapors to the fluid ducts which are connected to the process chamber. The drain vessel communicates with the bottom of the body of the process chamber and also with the bottom of the vapor generating chamber.

Abstract: An apparatus for heat treating an object and specifically a substantially flat object described. The apparatus may be a hot plate post-baking apparatus for heat treating a substantially flat object such as a photomask used in a semiconductor photolithographic process. The apparatus is provided with an upper heat reflector plate that is equipped with upwardly curved edge portions such that the amount of heat reflected by the reflector can be controlled and the center region on the substantially flat object can be temperature compensated for achieving more uniform temperature profile across the entire surface of the mask. By utilizing the heat reflector plate in a post-baking apparatus, the normally observed 5.degree. C. temperature difference across a mask surface is substantially eliminated.

Abstract: Equipment provides more rapid drying of heating parts comprising hygroscopic, electric insulation made of cellulose and/or plastics. At least two condensers are present, one being used when heating the parts and the other in the distillation stage. As a result removal by distillation is possible any time during heating and during the time intervals when heating is interrupted and the pressure-dropping procedure is carried out in the vacuum vessel. Due to the second condenser (with a second, associated vacuum pump), the heating medium can be cleansed or distilled during the pressure-dropping procedure and simultaneously the suction or drying procedure can be carried out in the vacuum vessel. This feature leads to drying the electrical parts more rapidly than heretofore because the steps of drying the electrical parts and regenerating the heating medium no longer require being consecutive, but instead regeneration can be implemented simultaneously with the evacuation of the vicinity around the electrical parts.

Abstract: A method for thermocapillary drying of substrates includes the step of elevating a submerged substrate away from a rinsing liquid. Such movement of the substrate forms a meniscus on opposite sides of the substrate. The curved raised portion of the meniscus at each side of the substrate is gently heated in such a way as to induce thermocapillary flows, which cause the rinsing fluid to flow away from the substrate so that the withdrawing substrate may be pulled out dry and clean. Heating may be accomplished by directing a warm gas onto the meniscus or by heating the meniscus with rays from a radiation/light source. Apparatus is also provided for performing the various method steps.

Abstract: A cover is provided to an opening of a chamber in such a manner to open and close the opening and when the cover closes the opening, the chamber and the cover form a sealed drying process space. In this drying process space, nitrogen gas is supplied to purge the gas in the drying process space to turn into an inert gas filled space. Thereafter, substrates to be treated are brought into the drying process space. nitrogen gas is further supplied to the drying process space and then the substrates are being rotated to dry the same.

Abstract: A nozzle and an exhaust member are provided opposite to each other with an upward opening of a processing vessel interposed therebetween. A side wall of the processing vessel is smoothly curved inward as the opening is approached upward. The nozzle spouts a nitrogen gas fed from a nitrogen gas feeder as a jet for covering the opening toward an exhaust port of the exhaust member. The jet can effectively function as a curtain because the side wall of the processing vessel is curved. Therefore, a cooling coil necessary for a conventional apparatus is not required. Consequently, instability of the state of the IPA vapor caused by the cooling coil can be eliminated so that defective dryness is relieved or eliminated.

Abstract: Apparatus and method for condensing moisture from an air stream. The condensing comprises an outer container, a middle container within the outer container, and an inner container within the middle container. The outer container contains a cooling material, such as water, and upon contact therewith, the air stream is cooled and moisture contained therein is condensed. The inner container also can contain a cooling material.