Abstract: A apparatus for drying a substrate includes a vacuum manifold positioned adjacent to an edge wheel. The edge wheel includes an edge wheel groove for receiving a peripheral edge of a substrate, and the edge wheel is capable of rotating the substrate at a desired set velocity. The vacuum manifold includes a proximity end having one or more vacuum ports defined therein. The proximity end is positioned at least partially within the edge wheel groove, and using supplied vacuum removes fluids that accumulate in the edge wheel groove and prevents re-deposit of trapped fluids around the peripheral edge of the substrate.

Abstract: A lyophilization apparatus includes a chamber and plural drying shelves arranged in vertically spaced apart relation. Each shelf has an inlet, outlet, and flow passageway therebetween. Plural sets of shelves are independently coupled to separate sources of circulating heat exchange fluid. In a preferred embodiment, every second shelf is fluidically coupled to a first inlet manifold and a first outlet manifold, and every other shelf is fluidically coupled to a second inlet manifold a second outlet manifold. The first inlet and outlet manifolds are fluidically coupled to a first circulating source of heat exchange fluid and the second inlet and outlet manifolds are fluidically coupled to a second circulating source of heat exchange fluid, whereby the temperature of each drying shelf can be controlled independently of a vertically adjacent one of the drying shelves. In a further aspect, a lyophilization process is also provided.

Abstract: A processing apparatus includes a first detection unit for detecting a temperature of an inner wall of the vacuum vessel, a second detection unit for detecting a temperature of the processing unit, and a first control unit for controlling a temperature of the gas. The first control unit controls the temperature of the gas based on a temperature gradient between the temperatures of the inner wall and the gas or a temperature gradient between the temperatures of the processing unit and the gas. A method for removing particles from a processing apparatus includes a first detection step for detecting a temperature of an inner wall of the vacuum vessel, a second detection step for detecting a temperature of the processing unit, a first control step for controlling a temperature of the gas, and a gas introduction step for introducing the gas into the inner space of the vacuum vessel.

Abstract: A vacuum drying apparatus and a vacuum drying method are provided wherein it is possible to reduce the drying time of an object to be dried and the surface condition of the object to be dried after drying is extremely satisfactory. A vacuum pump is connected to an exhaust port of a vacuum chamber through a suction pipe, and a frequency converter is provided on the input side of an alternating current motor for driving the vacuum pump to form a vacuum drying apparatus. A substrate coated with coating liquid is placed in the vacuum chamber of the vacuum drying apparatus.

Abstract: A device (1) for loading and unloading containers (2) into and out of an enclosure of an installation (3) for treating substances contained in containers (2). The device includes a support structure (17) and a third means (16, 19, 21) for moving a second means (14) to a position higher than the containers. The second means (14) acts as a stop during loading and as a pusher during unloading. The device includes an extendible platform (10), wherein the extendible platform unfurls from the support structure (17) and the third means comprise parts (16a 16b) that unwind from the support structure (17) to the interior of the enclosure. The device is completely automatic, fast, takes up little space and is easy to disassemble.

Abstract: A device for controlling dehydration during freeze-drying in an enclosure connected to a vacuum line includes an analyzer for analyzing the gases contained in the enclosure, the gas analyzer comprising a system for ionizing the gases comprising a plasma source in contact with the gases combined with a generator adapted to generate a plasma from the gases and a system for analyzing ionized gases comprising a radiation sensor situated in the vicinity of the area of generation of the plasma connected to apparatus for analyzing evolution of the radiation spectrum emitted by the plasma. The plasma source is preferably produced by inductive coupling and the analyzer for analyzing the evolution of the radiation spectrum is preferably an optical emission spectrometer.

Abstract: An apparatus and method for drying instruments using superheated steam. The apparatus comprises a chamber for receiving the instruments, a distribution means for distributing superheated steam within the chamber and an exhaust means for purging vaporized moisture from the chamber. The chamber has at least one inlet port which is connected to the distribution means. The method comprises sterilizing the instruments using saturated steam generated by the steam generation means and drying the instruments using superheated steam generated by the steam generation means to vaporize moisture within the chamber and purging the vaporized moisture from the chamber using the exhaust means.

Abstract: A spherical vacuum desiccator consists of two substantially identical shells which are connected together at an engagement region. A receiving segment and connecting segment are positioned in a spaced-apart relationship within the engaging region of each hemispherical shell. In the assembled condition of the invention, each hemispherical shell is disposed in an inverted position with respect to the other shell and the connecting segment of the two hemispherical shells engage at the receiving segment.

Abstract: A low pressure dryer for granular or powdery material includes a plurality of canisters rotatable about a common vertical axis serially among material heating, vacuum drying and material inventory discharge positions; pneumatic piston-cylinder means for rotating the canisters about said axis among said heating, vacuum drying and inventory discharge positions; means for heating contents of a canister at said heating position; means for sealing and drawing vacuum within a canister at said vacuum drying position and means for selectably permitting downward flow of dried granular or powdery material out of a canister at said discharge position where said canisters move collectively and unitarily one with another.

Abstract: An apparatus for processing a substrate is provided which includes a proximity head proximate to a surface of the substrate when in operation. The apparatus also includes an opening on a surface of the proximity head to a cavity defined in the proximity head where the cavity delivers an active agent to the surface of the substrate through the opening. The apparatus further includes a plurality of conduits on the surface of the proximity head that generates a fluid meniscus on the surface of the substrate surrounding the opening.

Abstract: The present invention relates to a method and apparatus for filtering and drying a product. In a preferred embodiment, the apparatus comprises a container having a plurality of porous walls and a plurality of solid walls that divide the container into a plurality of product chambers, a plurality of vacuum chambers, and, preferably, a plurality of heat transfer chambers. Each product chamber shares at least one porous wall with an adjacent vacuum chamber. Each product chamber preferably shares at least one solid wall with an adjacent heat transfer chamber. According to the method of the present invention, a product is introduced into the product chambers, where the product is held while a substance is filtered from the product through the porous walls and the product is dried by reducing the pressure in the vacuum chambers and the product chambers.

Abstract: A vacuum processing apparatus which includes a means for transferring substrates from a loader, with a transferring device, to a double lock chamber; and, then to a selected vacuum processing chamber. The substrates are returned to a substrate, by the vacuum loader, into their original position in the substrate table. The surfaces of the substrates are maintained in a horizontal position during processing.

Abstract: A system for reclaiming effluent from a freeze drying process has at least one condenser apparatus used during a freeze-drying cycle to collect effluent from material being freeze-dried, and a recovery reservoir positioned for collecting material from the condenser apparatus. The system is characterized in that ice crystals formed from the effluent are removed from the condenser after the freeze drying cycle into recovery reservoir to be re-used. Product systems include both freeze-dried material and the effluent collected during freeze drying.

Abstract: In a method of manufacturing a liquid crystal panel including a panel assembly, a nozzle mechanism is located at a vicinity of a liquid crystal filling port of the panel assembly with leaving a space between an intake of the nozzle mechanism and the liquid crystal filling port. The nozzle mechanism sucks surrounding gaseous to generate negative pressure and a continuous gaseous flow around the liquid crystal filling port. The negative pressure discharges an excess of liquid crystal filled in the panel assembly while the continuous gaseous flow blows the discharged liquid crystal. The blown liquid crystal is sucked into the intake of the panel assembly. Thus, a gap of the panel assembly is adjusted within a proper range in a short time.

Abstract: A freeze dryer comprising a chamber having a rectangular slot through which vials are inserted into the chamber, and a slot door for forming a seal with the chamber to close the slot. To enable the vials to be subsequently removed from the chamber, the slot door is raised. As the door is raised, it is rotated to expose the rear surface of the door for cleaning purposes.

Abstract: A method of treating a waste stream comprises a vacuum treatment to promote disintegration of the waste material by “flash vapor” production, causing a swiftly vaporizing fraction inside the material to literally explode or shred apart the matrix of the material as a whole. A main processor operates at a level of vacuum that determines a given boiling temperature for a vaporizing fraction, and one which lower than the fraction's boiling temperature for the local vicinity's barometric pressure (eg., atmospheric pressure). The input stream is pre-heated to above the given boiling temperature for that fraction as determined by the main processor's vacuum level without, however, going over the boiling temperature for the local barometric pressure. It is then introduced into the vacuum of the main processor whereby a minor percentage of the vaporizing fraction flashes into vapor, and this presumptively promotes destruction and/or disintegration of the material.

Abstract: A method of separating the membrane and mineral fractions from an input stream of broken empty egg shells comprises a vacuum treatment to promote the membrane fraction to “eject” or detach from the attached or adhered scraps of mineral, ie., mineral shards or powder. A main processor operates at a level of vacuum that determines a given boiling temperature for water, and one which lower than water's boiling temperature for the local vicinity's barometric pressure (eg., atmospheric pressure). The input stream is pre-heated to above the given boiling temperature for water as determined by the main processor's vacuum level without, however, going over the boiling temperature for the local barometric pressure. It is then introduced into the vacuum of the main processor whereby a small percentage of the water content flashes into steam, and this presumptively promotes membrane matter to eject or detach from the shards or powder of mineral.

Abstract: A method of manufacturing heat-sensitive pharmaceutical powder is disclosed. The original pharmaceutical substances are dissolved in a solution or suspended in a suspension, which is sprayed through an atomizing nozzle and frozen in a cold gas phase or liquid nitrogen atomized directly in the spray-freeze chamber or gas jacket at the same time (for cooling purposes). The particles are freeze-dried at roughly atmospheric pressure in a down-stream fluid flow with exit filter thereby to remove moisture entrapped on or inside the frozen particles. The system has applicability for forming other powders.

Abstract: A lint trap having an enclosure with an interior surface, an open end, with an inlet spaced from an outlet on the interior surface. A cover is removably mountable to the open end of the enclosure with a filter secured to the cover, where side edges of the filter slidably engage with the interior surface between the inlet and outlet.

Abstract: The invention concerns a method for obtaining dry plant extracts under mild conditions, in which a liquid plant extract is introduced into a vacuum drying equipment having a multi-shaft stirrer extending through a cylindrical mixing and drying chamber and with its own drive, together with a chopper rotating through a stator, and the liquid plant extract is dried at a vessel shell temperature of 20° C. to 50° C., a product temperature between 20° C. and 40° C., a pressure between 0.

Abstract: A desolventizing system for removing solvent from a quantity of solvent-laden particles such as flakes comprises first and second desolventizer units, each having an inlet port for receiving solvent-laden particles, an outlet port for discharging at least partially desolventized particles, and a solvent vapor port. A solvent trap is connected between the outlet port of the first desolventizer through a first airlock, and to the inlet port of the second desolventizer unit. Particles entering the solvent trap through the first airlock are conveyed to the inlet port of the second desolventizer. The second desolventizer unit has an airlock connected to the outlet port of the second desolventizer unit.

Abstract: An etching processing apparatus 1 has a transfer chamber 2, a plurality of processing chambers 3 and 4, and a plurality of cassette chambers 7 and 8. Inside the transfer chamber 2, a transfer mechanism 14 is provided. A control device 17 pauses the operation of the vacuum pump 16 after closing an opening/closing valve 15 of a vacuum evacuating mechanism, which vacuum evacuates the transfer chamber 2 in which the transfer mechanism 14 is provided, when the operation of the transfer mechanism 14 is paused for a predetermined time or longer. Accordingly, conservation of energy becomes possible without causing decrease of productivity.

Abstract: A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.

Abstract: A device for enhancing removal of liquid from fabric, such as a vacuum head device for removing liquid from carpet, includes a first and second surface forming an extraction slot. The first surface may include a plurality of channels extending towards the extraction slot configured to direct the liquid toward the extraction slot. Alternatively, the first surface may have a smaller surface area and the second surface may be configured with a lower surface in order to penetrate the carpet and act as a squeegee. The cross-sections of the first and second surfaces are preferably circular. In another embodiment, the cross-sections of the first and second surfaces may comprise, but are not limited to, a semi-rectangular cross section, a V-shaped cross-section, or an elliptical cross-section.

Abstract: A method by which a freeze-drying process may be developed from a single freeze-drying experiment. The method uses in-process manometric temperature measurement (MTM) data to optimize the primary drying conditions. Manometric temperature measurement is a procedure by which the product temperature at the sublimation interface and the resistance of the previously dried product to vapor flow may be determined. The inventive method can be used in an inventive freeze-drying system. The system comprises a freeze-dryer, a measurement system including hardware and software necessary for generation of MTM data and a control system including hardware and software for interpretation of the generated MTM data and control of the freeze-dryer. The measurement system and control system may be combined into a single device.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.

Abstract: A freeze dryer having a collector chamber is provided with a sensor for detecting the presence of moisture in the chamber so that the vacuum pump cannot be operated if moisture is present. The refrigeration system can also be deactivated. This precludes moisture from being pulled into the vacuum pump where it will mix with pump oil and shorten the life of the pump. The moisture sensor is also coupled with a warning circuit which advises the operator that the system is inoperable and is capable of displaying the reason for inoperability.

Abstract: In drying a coating liquid such as a resist applied to a substrate under reduced pressure, a coating film in a peripheral portion tends to lose good shape regardless of duration of a drying period, and it is difficult to set an appropriate exhaust flow rate. After the substrate is loaded in an airtight container, a pressure is reduced from atmospheric pressure to a pressure slightly higher than the vapor pressure of a solvent, for example. Then, the solvent actively evaporates from the coating liquid. Here, evacuation is performed initially based on a first flow rate set value Q1, and thereafter, it is performed based on a second flow rate set value larger than Q1. Rounding of the surface in the peripheral portion is corrected by evacuation based on Q1, and more active evaporation of a solvent component is attained by switching to Q2.

Abstract: A hair styling vacuum device for removing a liquid from hair wrapped around a curler. The device includes a vacuum assembly and a suction nozzle member. The vacuum assembly includes a housing which defines an interior space. The vacuum assembly includes a motor assembly positioned within the interior space, a vent portion extending trough a perimeter wall of the housing, a filter member and a reservoir member. The housing includes a spout portion in environmental communication with the reservoir member. Preferably, the filter member is positioned between the spout portion and the reservoir portion. The suction nozzle member is operationally coupleable to the spout portion. The suction nozzle is positionable around a curler to facilitate suction from the motor assembly being directed around the curler.

Abstract: In one of the many embodiments, a method for processing a substrate is disclosed which includes generating a first fluid meniscus and a second fluid meniscus at least partially surrounding the first fluid meniscus wherein the first fluid meniscus and the second fluid meniscus are generated on a surface of the substrate.

Abstract: Disclosed is a freeze-drying apparatus for foodstuffs, medicaments, etc., wherein liquid material is directly and distributively poured into upright cylindrical tubes, then, in its isolated state from external atmosphere for perfect sterilization, the liquid material is frozen with uniform thickness onto inner wall surface of the tubes, with further possibility of uniform heating of the freeze-dried layer. The main body of this apparatus is constructed with upright cylindrical tubes for freezing liquid material onto inner surface of tubes and jackets to surround the outer periphery of each of the tubes in a substantially concentric cylindrical shape, within which to circulate heat medium; then, a duct communicating to the vacuum exhaust system is connected to the upper end side of these tubes, while, a recovery chamber provided with valve is connected to the lower end side of tubes; and an inlet port is defined for feeding liquid material into inner cavity of tubes.

Abstract: A system for reclaiming effluent from a freeze drying process has at least one condenser apparatus used during a freeze-drying cycle to collect effluent from material being freeze-dried, and a recovery reservoir positioned for collecting material from the condenser apparatus. The system is characterized in that ice crystals formed from the effluent are removed from the condenser after the freeze drying cycle into recovery reservoir to be re-used. Product systems include both freeze-dried material and the effluent collected during freeze drying.

Abstract: A drying unit for removing solvent from moist material, and a method for drying moist material with the drying unit. The unit comprises at least one drying chamber (23) having at least one stand plate (2) for holding vessels (3), which are filled with moist material, or flat layers of moist material, the drying chamber (23) being connected to a condenser (22) via a vapor passage (15), in which sublimed solvent can be separated out, the stand plates (2) being connected to a temperature-controlled heating/cooling circuit, the chamber (23) having heating/cooling plates (4) or (4?) which are connected to a second heat-transfer circuit, wherein the heating/cooling plates (4) or (4?) are substantially thermally isolated from the chamber wall (6).

Abstract: A grooming device having a first unit and upper hand-held unit connected to the first unit is disclosed. A vacuum unit in the first unit creates a vacuum air flow in a vacuum chamber in the hand-held unit, while a heating unit in the first unit generates a heated air flow to a heat chamber in the hand-held unit. The heat chamber and vacuum chamber are contained within a vessel in the hand-held unit. The heat chamber is separated from the vacuum chamber by a wall having regularly spaced pores. When both the vacuum unit and heating unit of the device are switched on, the vacuum flow in the vacuum chamber pulls heated air from the heat chamber through pores in the wall so that dry, heated air flows along the length of the vessel. Thus, hair placed in the vacuum chamber of the hand-held unit is exposed to the combined effect of the vacuum and flow of heated air. In a further embodiment, the wall of the vacuum chamber is heated by a heating element thereby causing the vacuum flow to be heated.

Abstract: A chamber for a freeze-drying device with storage surfaces, whose temperature can be regulated, for containers containing the product that is to be freeze-dried. The chamber includes an optical shield comprised of shield components, whose temperature can be regulated. The shield is positioned between the storage surfaces and the interior wall surfaces of the chamber.

Abstract: A substrate drying system for drying substrates after the substrates are washed typically using deionized water, is disclosed. The substrate drying system comprises a substrate cleaning tank in which the substrates are washed. A dry pump is provided in fluid communication with the substrate cleaning tank. A container which contains a supply of a liquid drying fluid, typically isopropyl alcohol (IPA), is further provided in fluid communication with the substrate cleaning tank. In application, the dry pump induces a reduced pressure inside the substrate cleaning tank and the drying fluid container. This reduces the vapor pressure, and thus, the boiling point of the drying fluid, such that the drying fluid is vaporized and remains in a vaporized state throughout transit to the substrate cleaning tank and during drying of the substrate.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.

Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.

Abstract: A material drying apparatus for substantially eliminating the liquid content of a sludge, the apparatus including a first stage operating at ambient pressure for heating the sludge; a second stage operating with partial vacuum for receiving heated sludge from the first stage for further heating and for drying the sludge by evaporation of substantially all liquid therefrom leaving a dry particulate material; and an evacuated cyclonic stage for applying sufficient centrifugal force to the dry particulate material to render this material odorless.

Abstract: An instantaneous pressure reducing heating and drying apparatus for an object, such as a wafer, includes a pressure reducing chamber; a vacuum pump for reducing a pressure in the pressure reducing chamber to below atmospheric pressure; a drying chamber installed within the pressure reducing chamber for drying the object that is loaded in the drying chamber; a pressure regulating valve installed in a wall of the drying chamber, wherein when the pressure regulating valve is opened a pressure in the drying chamber is instantaneously reduced to the pressure of the pressure reducing chamber; and a heating means for heating the drying chamber. In operation, the vacuum pump reduces a pressure of the pressure reducing chamber to below atmospheric pressure, and the pressure regulating valve installed in a wall of the drying chamber opens thereby instantaneously reducing the pressure the drying chamber to the reduced pressure of the pressure reducing chamber.

Abstract: The disclosed invention provides an improved method of drying wet or water damaged surfaces. The method uses a vacuum source, a manifold, and a plastic sheet covered grid. The grid includes a lattice formation with spaces to permit moisture and air to pass from and beneath the surface to the vacuum source.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.

Abstract: A clothes drying apparatus is provided. This clothes drying apparatus comprises a cabinet with an interior region to receive clothes. At least one door is operably connected to the cabinet to allow access to the interior region thereof. Attached to the cabinet is a first intake passage for accessing and receiving air from the exterior environment of a building. A vacuum unit is also attached to the cabinet. This vacuum unit draws air from the exterior of the building, through the passage, and into the interior region of the cabinet. A second passage linked to the interior environment and a switching mechanism may also be provided to permit selective operation of the clothes drying apparatus to draw air from outdoors or indoors based on environmental conditions. Also provided is a method of drying clothes with the clothes drying apparatus.

Abstract: A lumber drying kiln employs outside air pressure uses a flexible collapsing bag or cover alone or in combination with walls. The collapsing bag seals against a base to maintain the vacuum. The air pressure against the flexible top keeps the lumber layers from warping or cupping during drying. The lumber stack has alternating layers of hot plates or stickers separating layers of lumber. A bag having an open bottom and made of nylon-reinforced rubber or other strong flexible material is placed over the wood and sealed to the stainless steel platform. A vacuum pump is connected with the bag by means of a manifold and operated to remove air from the enclosed lumber stack, the vacuum strengthening the seal between the base and the bottom of the bag. This chamber design is easily scaled up or down to provide a desired drying capacity.

Abstract: The invention provides an improved method of drying wet or water damaged surfaces using a vacuum source, a manifold, and a plastic sheet covered grid having a lattice formation with spaces to permit the passing of moisture and air from and beneath the surface to the vacuum source.

Abstract: An etching processing apparatus 1 has a transfer chamber 2, a plurality of processing chambers 3 and 4, and a plurality of cassette chambers 7 and 8. Inside the transfer chamber 2, a transfer mechanism 14 is provided. A control device 17 pauses the operation of the vacuum pump 16 after closing an opening/closing valve 15 of a vacuum evacuating mechanism, which vacuum evacuates the transfer chamber 2 in which the transfer mechanism 14 is provided, when the operation of the transfer mechanism 14 is paused for a predetermined time or longer. Accordingly, conservation of energy becomes possible without causing decrease of productivity.

Abstract: A cost effective and environmentally sound method for quickly removing liquid from surfaces of a substrate under manufacture without leaving behind substantial residue (e.g., silicon elements from the substrate, commonly known in the field as “water marks”). The process includes first providing a substrate (e.g., a semiconductor wafer, glass flat panel, or disc media), which has undergone one or more liquid-based processes (e.g., cleaning, scrubbing, rinsing, etc.). An upper surface and a lower surface of the substrate are then subjected to vacuum suction, thereby removing liquid thereon. An apparatus for removing liquid from surfaces of a substrate is also provided. The apparatus includes a plurality of vacuum application members configured for applying vacuum suction to surfaces of a substrate, thereby removing liquid therefrom.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chamber are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.