Abstract: A liquid ejection apparatus is disclosed. One apparatus includes a piezoelectric element. The piezoelectric element includes an upper electrode and a lower electrode. The lower electrode has a partial overlapping portion and a non-overlapping portion. The partial overlapping portion at least partially overlaps the pressure chamber. The partial overlapping portion of the lower electrode has two ends in the transverse direction. The upper electrode has two ends in the transverse direction. A distance from the center of the pressure chamber in the transverse direction to one of the two ends of the upper electrode in the transverse direction is smaller than a distance from the center of the pressure chamber in the transverse direction to a corresponding one of the two ends of the partial overlapping portion in the transverse direction.

Abstract: A printer includes a printhead configured to eject high viscosity material and refill a reservoir in the printhead with high viscosity material. The printhead includes a transducer having an electroactive element and a member to which the electroactive element is mounted. An electrical signal activates the electroactive element to move the electroactive element and the member in the reservoir of high viscosity material. This movement thins the high viscosity material and enables the printhead to eject the thinned material while refilling the reservoir. The apertures through which the thinned material is ejected share a common manifold without separate chambers for each of the apertures.

Abstract: A liquid ejecting head includes a head body, a first member that has a first surface and a second surface and that holds the head body, a second member that has a third surface and that is adhered to the first surface by a first adhesive so that the third surface is along planar directions of the second surface, and a third member that is disposed so as to extend over the second surface and the third surface and that is adhered to the second surface and the third surface by a second adhesive. At an intersection portion at which the first adhesive and the second adhesive contact, an adhesive receiving portion that accepts inflow of at least one of the first adhesive and the second adhesive is formed.

Abstract: A liquid ejection head includes a plurality of ejection ports, a plurality of pressure chambers each communicating with each of the ejection ports, a piezoelectric actuator constituting part of walls of the pressure chambers, and a common liquid chamber containing liquid to be supplied to the pressure chambers. The pressure chambers and the common liquid chamber are opposed with an opposing wall interposed therebetween. The opposing wall faces the wall of the pressure chambers constituted by the piezoelectric actuator. A reinforcing portion that supports the opposing wall is provided in the common liquid chamber.

Abstract: Piezoelectric devices are described fabricated in packaging buildup layers. In one example, a package has a plurality of conductive routing layers and a plurality of organic dielectric layers between the conductive routing layers. A die attach area has a plurality of vias to connect to a microelectronic die, the vias connecting to respective conductive routing layers. A piezoelectric device is formed on an organic dielectric layer, the piezoelectric device having at least one electrode coupled to a conductive routing layer.

Abstract: Provided is a method for manufacturing a liquid ejecting head which includes a plurality of chips, each of which includes a plurality of segments, each segment including a pressure generating chamber communicating with a nozzle opening through which liquid is discharged, a diaphragm which is a portion of the pressure generating chamber, and a pressure generating unit causing a pressure change in the pressure generating chamber through the diaphragm, the method including measuring natural frequencies of the plurality of segments included in each of the chips, classifying the chips into ranks using the mode value of the natural frequencies of the chips as a reference, and manufacturing the liquid ejecting head which includes the chips selected based on the ranks.

Abstract: A method for forming a semiconductor device includes forming an insulating material layer above a semiconductor substrate and modifying at least a portion of a surface of the insulating material layer after forming the insulating material layer. Further, the method includes forming an electrical conductive structure on at least the portion of the surface of the insulating material layer after modifying at least the portion of the surface of the insulating material layer.

Abstract: A liquid ejecting apparatus includes a pressure chamber that communicates with a nozzle which has an opening at a nozzle formation surface; a communication plate where a common liquid chamber which supplies a liquid to the pressure chamber is formed; a liquid ejecting head having a flexible film which seals the opening surface at the nozzle formation surface side of the common liquid chamber in the communication plate; and a sealing member which has a cavity-shaped sealing hollow section and can be sealed by the nozzle formation surface being confronted in the sealing hollow section. The sealing member is configured so as to be sealable by at least a portion of the flexible film being confronted in the sealing hollow section in a sealed state of the nozzle formation surface.

Abstract: A manufacturing method of an epitaxial thin film piezoelectric element includes: providing a substrate; forming a bottom electrode layer on the substrate by epitaxial growth process; forming a first piezoelectric layer that has c-axis orientation on the bottom electrode layer by epitaxial growth process; forming a second piezoelectric layer that has c-axis orientation and different phase structure from the first piezoelectric layer on the first piezoelectric layer by epitaxial growth process; and forming a top electrode layer on the second piezoelectric layer. The thin film piezoelectric element has good thermal stability, low temperature coefficient and high piezoelectric constant.

Abstract: A wiring substrate includes a plurality of wiring patterns, a protective layer to cover the plurality of wiring patterns and regions between the plurality of wiring patterns, and a plurality of terminals communicating with the plurality of wiring patterns, respectively, the plurality of terminals not covered by the protective layer. Pitch between the plurality of terminals adjacent to each other includes a first pitch and a second pitch wider than the first pitch. At least one of the plurality of wiring patterns, the terminals of which are adjacent to each other at the second pitch, includes a portion of expanded width having a width wider than a width of the plurality of terminals. The portion of expanded width is covered with the protective layer.

Abstract: The present disclosure is drawn to a thin film stack including a substrate, a metal layer, and an adhesive layer. The adhesive layer comprises a blend of zinc oxide and tin oxide, and the adhesive layer is adhered between the substrate and the metal layer.

Abstract: There is provided a liquid discharging apparatus including: a substrate formed with a first pressure chamber and two second pressure chambers; a vibration film; a first piezoelectric element; two second piezoelectric elements; a first wire connected to the first piezoelectric element; two second wires connected to the two second piezoelectric elements, respectively; and three contact sections to which the first wire and the two second wires are connected, respectively. The first wire passes between the two second piezoelectric elements and extends toward one of the three contact sections corresponding thereto; and length in the first direction of second active portions in second piezoelectric portions of the two second piezoelectric elements, is shorter than that of a first active portion in a first piezoelectric portion of the first piezoelectric element; and length in the second direction of the second active portion is longer than that of the first active portion.

Abstract: A liquid ejecting head includes a plurality of stacked substrates that include a nozzle substrate having a nozzle from which liquid is ejected. A channel is formed in at least a part of the substrates and guides the liquid to the nozzle. The channel includes: a first channel that extends in an X direction intersecting a stacking direction in which the substrates are stacked; a curved section curved in a Z direction that intersects the X direction and contains a component of the stacking direction; and a second channel that extends from the curved section in the Z direction. A wall is formed in a corner portion inside the channel so as to intersect both the X and Z directions, and the corner portion is formed in the curved section between the inside walls of the first and second channels.

Abstract: A print head includes a plurality of chip-like tiles arranged on a common substrate, each tile having a front face with an array of recording elements disposed in the front face in a predetermined pattern, and a generally rectangular contour with a cut-out formed at at least one of its four corners, each cut-out being delimited by two reference-defining walls extending normal to one another and to the front face and serving as a reference for positioning the tiles on the substrate so as to establish a predetermined positional relationship between the recording elements of the different tiles. The substrate has a plurality of recesses accommodating each at least a part of a tile and having side walls that define engagement surfaces for each of the reference-defining walls of each tile, the substrate is formed of a material that is suitable for photo-lithographic processing, and the engagement surfaces of the substrate are surfaces formed by photo-lithographic techniques.

Abstract: The head has a passage member having a nozzle and a pressurizing chamber which is communicated with the nozzle and is positioned on the side opposite to the side where the nozzle is opened, a piezoelectric actuator substrate which is superimposed on the passage member so as to cover the pressurizing chamber, and a flexible printed circuit which faces the piezoelectric actuator substrate from the opposite side to the passage member. The piezoelectric actuator substrate has a piezoelectric body which is exposed on the flexible printed circuit side. The piezoelectric body has a via hole opened toward the flexible printed circuit and has a projection portion at the edge part of the via hole which projects to the flexible printed circuit side.

Abstract: A liquid ejection head includes a substrate in which a pressure generating chamber that communicates with a nozzle opening is formed; and a piezoelectric element having a piezoelectric layer, a first electrode that is formed on a surface of the piezoelectric layer on a side of the substrate so as to correspond to the pressure generating chamber, and a second electrode that is formed on a surface of the piezoelectric layer opposite to the side on which the first electrode is formed so as to extend over a plurality of the pressure generating chambers, wherein the second electrode is formed to extend to an outside of the pressure generating chamber in a longitudinal direction of the pressure generating chamber.

Abstract: An inkjet apparatus capable of achieving a good withstand voltage in a movable part of a piezoelectric element is provided. An inkjet apparatus is provided, wherein the inkjet apparatus comprises: an actuator substrate, partitioning a cavity for accumulating ink; a vibrating film, supported by the actuator substrate and partitioning the cavity; and a piezoelectric element, on the vibrating film, and comprising an upper electrode, a lower electrode, and a piezoelectric film between the upper electrode and the lower electrode; wherein the piezoelectric film extends along a space covering the whole cavity; and the upper electrode is constrained in an inner space of the cavity.

Abstract: A piezoelectric device includes a supporting body, a supporting layer that is stacked on the supporting body, a first electrode that is formed on a side opposite to the supporting body side of the supporting layer, a piezoelectric body that is formed on a side opposite to the supporting layer side of the first electrode, and a second electrode that is formed on a side opposite to the first electrode side of the piezoelectric body, in which the piezoelectric body is formed throughout an area covering the first electrode, the second electrode is formed throughout an area covering the piezoelectric body, and a recess portion which is recessed toward the supporting body is formed outside an area overlapping with the first electrode in the supporting layer.

Abstract: A liquid ejecting head includes a flow channel forming substrate that is provided with a space constituting a pressure generating chamber which communicates with nozzle openings, a vibration plate that is stacked on one surface of the flow channel forming substrate and seals the space, and a piezoelectric element that includes a first electrode, a piezoelectric layer, and a second electrode sequentially stacked on a surface of the vibration plate opposite to the flow channel forming substrate, in which the first electrode is formed, in which at least a width of a first direction along the opposite surface is narrower than the space in a region corresponding to the space, the piezoelectric layer is stacked so as to overlap the first electrode and at least a part of the vibration plate in the region corresponding to the space, the second electrode is stacked so as to overlap the piezoelectric layer in the region corresponding to the space, and as a thickness of a stacked direction of the piezoelectric element i

Abstract: In a head, a passageway member has a nozzle which is opened in a first major surface, and a pressurizing chamber which is communicated with the nozzle and is positioned on a second major surface side as the back face of the first major surface. A piezoelectric actuator substrate is superimposed on the second major surface and covers over the pressurizing chamber. An FPC 27 has an insulating base film, an interconnect which is provided on one major surface of the base film, and an insulating film covering the interconnect, and makes its insulating film side face to the side of the piezoelectric actuator substrate which is opposite to the passageway member side. Above the pressurizing chambers, a thickness T of the insulating film from the base film is different between one side and the other side in a predetermined direction along the second major surface.

Abstract: A manufacturing method of a liquid ejecting head includes providing a stepped region that is formed by half-blanking and has a height different from a plane surface region, and a protrusion that is formed by drawing within the stepped region and protrudes on a liquid ejection side in the plane surface region of a fixing plate defining a liquid ejection surface in which nozzles ejecting liquid are provided; and fixing the liquid ejection section having a flow path member in which a flow path supplying the liquid is provided on a side opposite to a side in which the protrusion protrudes to the flat plate.

Abstract: A liquid discharge head includes a piezoelectric element, a piezoelectric element-formed substrate, a drive IC, and a wiring board which has a first side and a second side intersecting each other. The wiring board has two surfaces including a first surface facing the drive IC and a second surface facing the piezoelectric element-formed substrate. The wiring board includes, on the first surface, a first input terminal for a drive signal to the piezoelectric element, a second input terminal for a control signal, a first wire connected to the first input terminal, and a second wire connected to the second input terminal. The first wire has a first connection terminal. The second wire has a second connection terminal. A distance along the second side from the first side to the first connection terminal is longer than a distance along the second side from the first side to the second connection terminal.

Abstract: According to an embodiment, an inkjet head includes nozzles. The nozzles are arranged on a nozzle plate. The inkjet head further includes actuators arranged corresponding to the nozzles one to one on the nozzle plate. The inkjet head further includes common electrodes and individual electrodes that apply voltage to the actuators. A connection terminal of the common electrode is arranged between connection terminals of the individual electrode.

Abstract: A liquid ejection head includes a plurality of structures arrayed in a predetermined direction, each structure including a nozzle to eject liquid, a pressure chamber in communication with the nozzle, and an ejection drive unit to increase pressure of the liquid in the pressure chamber. The ejection drive unit of each structure includes a diaphragm to form a wall of the pressure chamber, and an electromechanical transducer element including an electromechanical transducer film, the diaphragm being convex toward the pressure chamber. When an amount of curvature of the diaphragm for the pressure chamber of each structure is defined by a radius of curvature, an inclination difference of the radius of curvature with respect to the predetermined direction is equal to or less than 2500 ?m.

Abstract: A liquid ejection head includes structures arrayed in a predetermined direction, each structure including a nozzle to eject liquid, a pressure chamber in communication with the nozzle, and an ejection drive unit to increase pressure of the liquid in the pressure chamber. The ejection drive unit includes a diaphragm to form a wall of the pressure chamber, and an electromechanical transducer element including an electromechanical transducer film, the diaphragm being convex toward the pressure chamber. When an amount of curvature of the diaphragm for the pressure chamber is defined by a radius of curvature, a difference between minimum and maximum radii of curvature of the diaphragm for 20 channels of the pressure chambers is equal to or less than 1500 ?m, the 20 channels being counted from one of the pressure chambers at each of end portions of the structures in the predetermined direction.

Abstract: A piezoelectric material that has good insulating properties and piezoelectricity and is free of lead and potassium and a piezoelectric element that uses the piezoelectric material are provided. The piezoelectric material contains copper and a perovskite-type metal oxide represented by general formula (1): (1?x){(NayBa1?z)(NbzTi1?z) O3}-xBiFeO3 (where 0<x?0.015, 0.80?y?0.95, and 0.85 ?z?0.95). In the piezoelectric material, 0.04 mol % or more and 2.00 mol % or less of Cu is contained relative to 1 mol of the perovskite-type metal oxide. Also provided is a piezoelectric element that includes a first electrode, a piezoelectric material, and a second electrode, in which the piezoelectric material described above is used as the piezoelectric material.

Abstract: Provided is a piezoelectric element in which a first electrode, a piezoelectric layer, and a second electrode are sequentially stacked on a substrate, the piezoelectric layer being formed of composite oxide having a perovskite structure which contains at least Pb, Nb, and Ti, in which the piezoelectric layer has a tetragonal crystal structure, the crystal is oriented to {100} against the substrate, and regions are mixed in a crystal lattice, each region including a (100) plane and a (001) plane which are orthogonal to a stacking direction, and the composite oxide of the piezoelectric layer is represented by the following general expression.

Abstract: A transistor with favorable electrical characteristics is provided. A minute transistor is provided. Provided is a semiconductor device including a first insulator over a substrate, a second insulator over the first insulator, a semiconductor over the second insulator, a first conductor and a second conductor over the semiconductor, a third insulator over the semiconductor, a fourth insulator over the third insulator, a third conductor over the fourth insulator, and a fifth insulator over the first insulator, the first conductor, and the second conductor. In the semiconductor device, the second insulator and the third insulator each include at least one element other than oxygen included in the semiconductor, respectively, and the semiconductor includes a region having a carbon concentration of 3×1018 atoms/cm3 or lower.

Abstract: To enhance piezoelectric property. One aspect of the present invention is ferroelectric ceramics including a Pb(Zr1-xTix)O3 film, wherein: the x satisfies the following formula 1, the Pb(Zr1-xTix)O3 film has a plurality of columnar single crystals, the x axis, the y axis and the z axis of each of the plurality of columnar single crystals are oriented in the same direction, respectively, 0<x<1??formula 1.

Abstract: A liquid ejecting head includes a first case that houses a flow path member that is provided with a liquid flow path, a second case that includes a head unit, a seal member that includes a connecting portion that seals and liquid-tightly connects the liquid flow path on a first case side and a liquid flow path on a second case side. The liquid ejecting head ejects a liquid supplied from the flow path member from a nozzle of the head unit. A flow path-isolating member having higher gas barrier property than the seal member is disposed between the first case and the seal member. The flow path member is disposed in a sealed space that is defined in the first case by a flow path-isolating member being joined to the first case.

Abstract: A reproduction method of a liquid ejecting head including: a process of filling the flow path with an electrolyte solution containing metal, and filling a space between an electrode capable of applying a voltage to between itself and the upper protective film and the upper protective film with the electrolyte solution; and a process of applying a voltage to between the upper protective film and the electrode to make the metal contained in the electrolyte solution deposit on the surface of the upper protective film.

Abstract: A method for forming a fluidic ejection device is described. The method includes depositing a first layer on a silicon wafer, the first layer including a first photoresist, and exposing, at a first energy level, a portion of the first photoresist. The method also includes depositing a second layer on the first layer, the second layer including a second photoresist that is more sensitive to light than the first photoresist, and exposing, at a second energy level, a portion of the second photoresist. The second energy level is less than the first energy level. The method also includes developing unexposed portions of the first photoresist and the second photoresist to form an enclosed firing chamber and a nozzle.

Abstract: An inkjet apparatus capable of achieving a good withstand voltage in a movable part of a piezoelectric element is provided. An inkjet apparatus (1) is provided, wherein the inkjet apparatus (1) comprises: an actuator substrate (2), partitioning a cavity (5) for accumulating ink; a vibrating film (6), supported by the actuator substrate (2) and partitioning the cavity (5); and a piezoelectric element (7), on the vibrating film (6), and comprising an upper electrode (20), a lower electrode (18), and a piezoelectric film (19) between the upper electrode (20) and the lower electrode (18); wherein the piezoelectric film (19) extends along a space covering the whole cavity (5); and the upper electrode (20) is constrained in an inner space of the cavity.

Abstract: An apparatus for a piezoelectric ink-jet printhead is disclosed. Piezoelectric printheads, while more expensive are favored because they use a wider variety of inks. The piezoelectric printhead includes a plurality of ink ejectors with a nozzle, an ink chamber, at least one body chamber, at least one diaphragm material, and a top electrode. The diaphragm material consists of a foil with built up piezoelectric material. The deflection of the diaphragm on the body chamber contributes to a pressure pulse that is used to eject a drop of liquid from the nozzle. According to an exemplary embodiment disclosed, a thin-film piezoelectric printhead uses existing low-cost adhesive based jet stack fabrication processed with polymers and metal foil layers and avoids the cost and complexity of a Micro-electrical-mechanical (MEMS) based fabrication system. According to another exemplary embodiment of this disclosure, provided is a thick hybrid film piezoelectric printhead.

Abstract: A liquid discharge head includes nozzles, a channel plate, a diaphragm member, a supporting substrate, a common liquid chamber forming substrate, a common liquid chamber, a groove, and a fluid restrictor. The supporting substrate is disposed at a side opposite the channel plate, with the diaphragm member interposed in between. The common liquid chamber forming substrate is disposed at a side opposite the diaphragm member, with the supporting substrate interposed in between. The common liquid chamber is communicated with individual liquid chambers. The groove is formed in an in-plane direction of a bonded face of the supporting substrate bonded to the diaphragm member. The fluid restrictor is disposed between the common liquid chamber and the individual liquid chambers. The fluid restrictor is formed between the groove of the supporting substrate and a bonded face of the diaphragm member bonded to the supporting substrate.

Abstract: According to an embodiment, an inkjet head includes a pressure cell structure. The pressure cell structure includes pressure cells, flow control paths, and slits. The flow control paths are formed on both the sides of the pressure cells, and control flow of ink flowing into the pressure cells. The slits are in communication with the pressure cells and the flow control paths. The width of the slit is smaller than the width of the pressure cell.

Abstract: In a print head having a bimorph thin-film piezo actuator, the piezo-electric actuator is arranged on a membrane at a first side of the piezo-electric actuator and a passive layer is arranged on the piezo-electric actuator at a second side of the piezo-electric actuator, wherein the second side is opposite to the first side. The membrane is more compliant, at least in a lateral direction, for contraction than the passive layer. Thus, a bending direction of the actuator is affected. As a consequence, there is no need for a bias voltage on the actuator during a standby state of the print head. Omitting the bias voltage during standby results in an increased lifetime and stability of the actuator assembly.

Abstract: A liquid droplet ejecting method for ejecting a liquid from at least one ejection hole to form the liquid into liquid droplets, the method including: applying a vibration to the liquid in a liquid column resonance-generating liquid chamber, in which the ejection hole is formed, to form a standing wave through liquid column resonance, and ejecting the liquid from the ejection hole, which is formed in a region corresponding to an antinode of the standing wave, to form the liquid into liquid droplets.

Abstract: An inkjet head includes a substrate that defines a cavity in which ink is stored, a vibrating membrane that is supported by the substrate and that defines the cavity, and a piezoelectric device that is disposed on the vibrating membrane and that changes a volume of the cavity by displacing the vibrating membrane. The piezoelectric device includes a lower electrode, a piezoelectric membrane that is disposed on the lower electrode, and an upper electrode that is disposed on the piezoelectric membrane and that faces the lower electrode with the piezoelectric membrane interposed between the upper electrode and the lower electrode. The piezoelectric membrane includes a columnar structure layer and an amorphous structure layer of a piezoelectric material. The amorphous structure layer is stacked contiguously with the columnar structure layer.

Abstract: A printing apparatus is provided with a transport mechanism section that transports work, a printing mechanism section that has multiple nozzle groups, which perform printing by discharging an ink onto the work as liquid droplets, and control section that controls the actions of the transport mechanism section and the printing mechanism section. In addition, the printing mechanism section includes a first nozzle row that forms a first printing region, a second nozzle row that forms a second printing region, and an overlapping section in which the first nozzle row and the second nozzle row overlap. Further, the control section prohibits overlapping of the first printing region with the second printing region on the work when forming the third printing region.

Abstract: A liquid ejecting head includes: a substrate having pressure generating chambers; drive units configured to apply pressure vibration to the pressure generating chambers; and a head casing having first and second areas mutually exclusively disposed as viewed from the substrate, the first areas being disposed in a staggered arrangement as viewed from the substrate, the head casing storing the drive units in the first areas as viewed from the substrate, the head casing having recesses disposed in the second areas as viewed from the substrate.

Abstract: A liquid discharge apparatus includes: a pressure chamber; a film covering the pressure chamber; a piezoelectric element disposed on the film and including a piezoelectric part, a first electrode, and a second electrode, wherein the first electrode is disposed on a first side of the piezoelectric part facing the pressure chamber, and the second electrode is disposed on a second side of the piezoelectric part opposite the first side; a gold trace connected to the first electrode or the second electrode; and a first metal part made of a metal material except for gold and positioned between the film and the gold trace. The first metal part is laminated with the gold trace.

Abstract: A droplet discharge head includes a nozzle, a substrate, a diaphragm, and an electromechanical transducer element. The nozzle discharges droplets. The substrate includes a pressurization chamber communicated with the nozzle. The diaphragm is disposed on the substrate. The electromechanical transducer element is disposed on the diaphragm. The electromechanical transducer element includes an electromechanical transducer film, a lower electrode, and an upper electrode. The electromechanical transducer film includes a piezoelectric material. The lower electrode is disposed below the electromechanical transducer film, to apply voltage to the electromechanical transducer film. The upper electrode is disposed above the electromechanical transducer film, to apply voltage to the electromechanical transducer film. The diaphragm includes an SiO2 film, an SiN film, and a Poly-Si film laminated one on another. The diaphragm has, in a direction of lamination, a thickness of not less than 1 ?m and not greater than 3 ?m.

Abstract: An actuator (1), for a printhead, wherein the actuator (1) comprises: an actuating element (2) an obturator assembly (3), engageable with the actuator element (2); wherein the actuating element (2) is operable to assume, depending on a drive signal applied thereto: a rest configuration, in which the obturator assembly (3) is at a first distance (X0) from a reference plane (A); a first deformed configuration, in which the obturator assembly (3) is at a second distance (X1) from the reference plane (A) greater than the first distance (X0), and a second deformed configuration, in which the obturator assembly (3) is in contact with the reference plane (A), wherein: a control module (4) is configured for regulating a drive signal to the actuating element (2) to cause the obturator assembly (3) to move between the rest configuration and the first deformed configuration during a first operating cycle, to reduce the effects of impact on the obturator assembly.

Abstract: A piezoelectric element includes a plurality of individual electrodes, a piezoelectric layer formed on each of individual electrodes, and a common electrode which is formed on the piezoelectric layer and is an electrode common to the individual electrodes. Further, a protection film covering a region, which is not covered by the common electrode on the individual electrode, is provided.

Abstract: An organic EL element includes a hole injection layer that yields excellent hole conduction efficiency. The organic EL element includes an anode, a cathode, and functional layers that include organic material between the anode the cathode. The functional layers include a hole injection layer that injects holes into the functional layers. The hole injection layer is a metal oxide film that includes a metal oxide. The metal atoms constituting the metal oxide include both metal atoms at a maximum valence thereof and metal atoms at a valence less than the maximum valence, and the metal oxide film includes metal oxide crystals having a particle diameter on the order of nanometers.

Abstract: A manufacturing method is provided for a piezoelectric layer arrangement and a corresponding piezoelectric layer arrangement. The manufacturing method includes the steps: depositing a first electrode layer on a substrate; depositing a first insulating layer on the first electrode layer; forming a through opening in the first insulating layer to expose the first electrode layer within the through opening; depositing a piezoelectric layer on the first insulating layer and on the first electrode layer within the through opening; back-polishing the resulting structure to form a planar surface, on which a piezoelectric layer area, surrounded by the first insulating layer, is exposed; and depositing and structuring a second electrode layer on the first insulating layer, which contacts the piezoelectric layer area.

Abstract: A method for manufacturing a liquid jetting apparatus, which is provided with: a flow passage formation member including a pressure chamber, and a piezoelectric actuator having a vibration film provided on the flow passage formation member, a piezoelectric film arranged on the vibration film to correspond to the pressure chamber, first and second electrodes arranged on different surfaces of the piezoelectric film, a first protective film covering the piezoelectric film, a wire connected to the second electrode, and a second protective film covering the wire, includes: forming a first protective film on the vibration film to cover the piezoelectric film and the second electrode; forming the wire and the second protective film to cover the wire with the first protective film covering the piezoelectric film and the second electrode; and removing a part, of the first protective film, that overlaps with the second electrode, after forming the second protective film.

Abstract: An inkjet head (10) includes a displacement film (17), a substrate (11), and an ink discharge portion (21). The displacement film (17) includes a piezoelectric thin film (14) as a driving film operable to expand and contract in a direction perpendicular to its thickness direction to cause curving deformation of the displacement film (17) in its thickness direction. The substrate (11) has a dug portion (11a) as a hole portion formed in its thickness direction, and supports the displacement film (17) such that the displacement film (17) covers the dug portion (11a). The ink discharge portion (21) has an ink chamber (21a) holding ink, and discharges the ink outside with pressure applied to the ink by the curving deformation of the displacement film (17). The ink discharge portion (21) is provided opposite to the dug portion (11a) of the substrate (11) with respect to the displacement film (17).

Abstract: An inkjet head includes: a pressure chamber in which ink is filled; a nozzle plate which is provided on a first surface of the pressure chamber and which includes a nozzle communicating with the pressure chamber; and a planar drive section which is formed on the nozzle plate so as to extend from above a partition wall of the pressure chamber to above the pressure chamber, excluding a hole area around the nozzle and which has a piezoelectric body.