Abstract: A multi-stage microlens array with an array of compound lenses, each compound lens having a sequence of progressively smaller, higher-power lens elements. The array can have a high fill factor over the first-stage lens array, but still provide sufficient space between the terminal lens elements to accommodate structural support and components such as lens focus actuators. The microlens array can be incorporated into a printing system that includes an optical projection system, a scanning mechanism, an array of light-modulating image source elements providing an image source, and an image modulation mechanism that controls the image source as the printing surface is scanned. The microlens array can also be incorporated into an imaging system that includes an optical projection system, a scanning mechanism, an array of light-sensing detector elements, and a data acquisition system that records the detector response as the scanning mechanism operates.

Abstract: A first slidable assembly provided in an image reading unit of a digital copier has the slider pieces attached to the frame of the slidable assembly body thereof so that the slider pieces will move sliding over the guide elements. The upper part of the slider piece is an insert portion which is fitted through a passage hole formed in the frame and has engaging portions that pass through the passage hole as being deformed and become engaged with the rim of the passage hole.

Abstract: A method and apparatus for forming a single-exposure synthesized image on film is provided where an instantaneous image is combined with an image from a prepared picture on film. The preparation picture is reflected by a reflective mirror, and then is refracted by the objective lens of the camera to form a prepared image. The reflective mirror has a central hole that is located in front of the objective lens. The prepared picture also has a central hole, or a central transparent portion, and is located in a space between the objective lens and the reflective mirror, so that the reflecting surface of the reflective mirror faces the picture and the objective lens. Light rays from the prepared picture are reflected by the reflective mirror, pass through the central hole or the central transparent portion of the picture and through the objective lens to image the prepared picture image on the circumferential portion of the film.

Abstract: A stimulable phosphor sheet, on which a radiation image has been stored, is scanned with stimulating rays in a main scanning direction and moved in a sub-scanning direction, which is approximately normal to the main scanning direction. A read-out device photoelectrically detects the light, which is emitted by the stimulable phosphor sheet when the stimulable phosphor sheet is scanned with the stimulating rays in the main scanning direction, to obtain an image signal representing the radiation image. A light guiding mirror for reflecting the emitted light toward the read-out device is located to extend in the main scanning direction at a position in the vicinity of a position on the stimulable phosphor sheet, which position is scanned with the stimulating rays in the main scanning direction. The light guiding mirror is supported by a support member, which is formed from a metallic material and is electrically isolated from a ground, or which is formed from an electrical insulating material.

Abstract: A method for designing a circuit on a spherical shaped semiconductor device using a great circle and a small, which is either parallel or perpendicular to the great circle, to define critical dimensions needed for the circuit. A great-circle-small-circle framework is used that has at least one great circle and one small circle that define a critical dimension on the surface of the sphere.

Abstract: A microscopy and/or lithography system uses a comparatively low-resolution image projection system, which has a very small numerical aperture but large image field, in conjunction with a microlens array comprising miniature lens elements, each of which has a large numerical aperture but very small field. The projection system contains a small aperture stop which is imaged by the microlenses onto an array of diffraction-limited microspots on the microscope sample or printing surface at the microlens focal point positions, and the surface is scanned to build up a complete raster image from the focal point array. The system design thus circumvents the tradeoff between image resolution and field size which is the source of much of the complexity and expense of conventional wide-field, high-NA microscopy and microlithography systems.

Abstract: An exposure apparatus for a ball shaped substrate for manufacturing semiconductor devices. An exposure apparatus continually exposes light through a mask having a specified pattern to a surface of a ball shaped substrate. Holders each holding a ball shaped substrate are attached to an annular member that rotates continuously. Optics equipment guide the light from a light source to a surface of the substrate through a mask having a specified pattern. At the same time, optics equipment scans the light emission end to maintain the location relationship of the substrate with the annular member. The substrate is exposed while moving continuously.

Abstract: An illumination optical apparatus (8) includes a light source (10) and light conducting system (L) that conducts a light beam (14) from the light source to an object (M) such as a mask having a pattern, to be irradiated. A light-attenuating member (18) or other light-intensity controlling member, such as filter, for controlling the intensity of the light beam is arranged in the optical path between the light source and light conducting system. Also disclosed is a method for manufacturing semiconductor devices using the abovementioned illumination optical apparatus.

Abstract: An information card on which calculation information on photo-processing prices in accordance with orders and/or photo-printing information is recorded, wherein the information card is an index print. A photo-finishing method, a photo-finishing apparatus, a reprinting method, a reprinting apparatus, an information card preparation apparatus and a photo-printing apparatus are provided which employ the index print.

Abstract: In a method for structuring a photolithographic layer a first pattern is ated on a first plane light modulator. The first plane light modulator comprises a plurality of picture elements, and the first pattern is defined by a prescribed number of addressed picture elements. Then a second pattern is created on a second plane light modulator. The second plane light modulator comprises a plurality of picture elements, and the second pattern has a first region of addressed picture elements, which matches the first pattern or part thereof, and immediately adjacent to this a second region of addressed picture elements. Finally the first and the second pattern are imaged onto a region to be exposed of the layer to be structured.

Abstract: A photographic film and printing method and apparatus for the film are disclosed. The apparatus comprises reading means which reads an ID number at the time of print with film processing of the photographic film having the ID number printed thereon; print data entering means which enters print data about the exposure amount; storage means which associates and stores the ID number and the print data so that the print data obtained at the time of the print with film processing is saved; exposure controlling means which reads the ID number of said photographic film, retrieves the print data which corresponds to the ID number from said storage means, and automatically controls the exposure amount based on said print data when said photographic film is reprinted. As a result, the quality of the photographic film can be maintained constant without operator's help in either case of the print with film processing and the reprint.

Abstract: When negative images on a negative film are stored in a negative image storing unit, an index print image is constructed by an index constructing section in an image processing unit on the basis of the inputted images, which is displayed as a positive image on a monitor through a display instructing section. Images having different top-to-bottom directions in each of lateral and vertical image groups are indicated by key operation on a keyboard connected to the image processing unit with respect to the index print image displayed on the monitor. The direction of the indicated image is changed by a direction changing section in the image processing unit, and then the image is displayed on the monitor again. An index print image after changing the direction is displayed in an index printing section (on a liquid crystal panel). Thus an index print is prepared.

Abstract: A method and apparatus for producing prints of different formats from negatives in the form of strips. The negative images are printed in one reproduction scale on one section of a strip of stock during a first pass of the strip through the printing mechanism, the printing mechanism is readjusted, and the negative images are then printed in another, different scale on a subsequent section of the strip of stock during another pass of the strip through the printing mechanism.

Abstract: During the processing of an order in a photographic printer, a developed copy film strip can be scanned negative by negative and point-by-point in a scanning station of the printer. From the scan signals, density values for exposure time determination in three partial colors and details on the image field number of the scanned negative can be obtained, and these data are stored in a memory, coordinating the determined three partial exposure times with the corresponding image number. All negatives of the copy film strip are exposed successively on photographic paper on an enlarged scale, using the determined exposure times. In a further step, a number of successive negatives of the film strip are exposed on full-scale or reduced scale in matrix form onto a single sheet of said photographic paper.

Abstract: A filmstrip consisting of a series of coherent frames is passed through a copying station where images of the frames are projected onto an elongated band of copying paper to make proofs of the frames. The images are projected in such a manner that the relative orientations of the images are the same as the relative orientations of the frames.

Abstract: An index print preparation and feeding apparatus comprising: a means for preparing index prints for a film; an order identifying means for identifying order information of the film; a means for storing a multiplicity of the index prints; a collating means which has a first identifying mechanism for recognizing the order information of the index print and a second identifying mechanism for recognizing the order information on a DP bag or film placed, and which collates the order information recognized by the first and the second mechanisms; and a means for feeding the index print to the feeding position.

Abstract: It is an object of the invention to provide a catadioptric optical system with an arrangement for realizing a large numerical aperture and reducing the diameter of a concave mirror while ensuring a sufficient working distance on the image side, and also an exposure apparatus using this catadioptric optical system.A catadioptric optical system according to the invention includes a first imaging optical system for forming an intermediate image of a pattern on a first plane, a second imaging optical system for forming a reduced image of the intermediate image on a second plane, and an optical path deflecting member for guiding a light beam from the first imaging optical system to the second imaging optical system. The first imaging optical system has at least a first optical element group having a positive refracting power, and a second optical element group having a concave mirror and a meniscus lens component with a concave surface facing the first imaging optical system.

Abstract: A photographic exposure apparatus has a light path for directing an optical pattern of a display image from an image display to a photosensitive material and a light path for directing an optical pattern of a negative image from a negative film of the photosensitive material. The two light paths are selectively switched from one to the other to project each of the display and negative images onto the photosensitive material at a common exposure station. A mirror is disposed turnably to be movable across and between the two light paths. A mirror drive turns the mirror through a predetermined angle to switch between the light path for projecting the display image and the light path for projecting the negative image.

Abstract: A novel printing plate mounting device and procedure are provided. A small-scale single-color representation of a carton blank or other substrate and a complete usually multi-color image to be printed thereon is projected from an acetate film or other suitable substrate onto a carrier sheet to provide a full-scale single-color representation of the substrate and the image to be printed thereon. A small-scale usually multi-color representation of the carton blank and the complete usually multi-color image to be printed thereon is used as a template to determine which ones of a plurality of individual printing plate elements is used to print which ones of the color of the multi-color image. The individual printing plate elements for each color then are affixed to separate carrier sheets in the position shown by the full-scale single-color representation.

Abstract: This invention relates to an exposure apparatus for synchronously scanning a mask and a photosensitive substrate with respect to a plurality of projection optical systems, thereby properly transferring an entire pattern area on the mask onto the photosensitive substrate. A plurality of sets of mask-side reference marks and substrate-side reference marks are arranged at positions corresponding to each other on the mask surface and the photosensitive substrate surface and at least at two positions conjugate with the plurality of projection optical systems. The displacement amount between an image of a mask-side reference mark or a substrate-side reference mark formed on the corresponding substrate-side reference mark or mask-side reference mark through the projection optical system and the position of the substrate-side reference mark and the mask-side reference mark is measured. The imaging characteristics of the plurality of projection optical systems are corrected in accordance with the displacement amount.

Abstract: A projection exposure apparatus including a mask stage for supporting a mask, a wafer stage for supporting a wafer, and a projection optical system for projecting, on the wafer, an image of a circuit pattern of the mask, is disclosed. There are provided a surface position detecting system for detecting position of a surface of the wafer with respect to a direction of an optical axis of the projection optical system, an adjusting device for adjusting an interval between the wafer and the projection optical system, to position the wafer surface at a focus position of the projection optical system, and an outputting portion operable to direct a light beam to a reflection surface, provided at a predetermined site on the wafer stage, and to receive reflection light coming from the reflection surface through the projection optical system, the outputting portion producing a signal corresponding to a positional relationship between the reflection surface and the focus position of the projection optical system.

Abstract: An automatic printer for making prints of normal and panoramic format negative filmstrip image frames arbitrarily interspersed in a single filmstrip. Normal and panoramic projection systems are provided for projecting normal and panoramic images onto respective projection planes of the photographic print paper. Normal and panoramic format image frames are distinguished, and the appropriate projection system is employed through the insertion or withdrawal of a first reflective mirror into the projection path of the image bearing light beam. Zoom lens systems in each projection system are set to the appropriate magnifications for the width of print paper employed. The panoramic projection system employs a precision variable conjugate controlled zoom lens in association with a second movable mirror to adjust object plane to image plane distance to avoid overlap of the normal and panoramic projection planes at each magnification for each paper width.

Abstract: An image projection system for all surfaces of a three dimensional object such as a polyhedron in which direct and angle reflected image patterns are projected from superpositioned non-overlapping mask patterns mounted on different levels where the separation of the levels is related to the size of the object. The apparatus and process permits simultaneous photolithigraphic printing of conductors on the top and all sides of a cube shaped stack of integrated circuit chips.

Abstract: An apparatus for exposing a pattern, formed on a mask, on each of a plurality of partitioned areas on a photosensitive substrate by a step-and-repeat scheme includes a projection optical system for projecting the pattern of the mask on the photosensitive substrate, a substrate stage for holding the photosensitive substrate and two-dimensionally moving the photosensitive substrate within a plane perpendicular to the optical axis of the projection optical system, a detection unit for projecting a pattern image having a predetermined shape on the photosensitive substrate and photoelectrically detecting light reflected by the photosensitive substrate to detect a position at each of a plurality of points on the photosensitive substrate along the optical axis of the projection optical system, and a measurement unit for, when each of a plurality of measurement points in a partitioned area on which a pattern of the mask is to be exposed next coincides with or approaches the pattern image, detecting an offset amount b

Abstract: A photographic printer has a first polarizing beam splitter for splitting light from a light source into a first polarized light and a second polarized light. The first polarized light passes through a first liquid crystal cell having a liquid crystal material held between grid-like transparent electrodes. At this time, the plane of polarization of the first polarized light is changed in each small region formed in the liquid crystal cell. The first polarized light then enters a second polarizing beam splitter. On the other hand, the second polarized light enters the second polarizing beam splitter after its plane of polarization has been changed. At the second polarizing beam splitter, the first polarized light and the second polarized light are combined and then projected on a print paper via a photographic film so that an image recorded on the photographic film is exposed and printed on the print paper.

Abstract: An exposure apparatus includes a first reflective type photomask 18a, a first mask stage 100a for mounting the first reflected type photomask 18a, a second reflective type photomask 18b, and a second mask stage 180b for mounting the second reflective type photomask 18b. Light 11a from a light source 11 is directed to the first and second reflective type photomasks 18a and 18b. The first exposure light 110c and the second exposure light 110b reflected by the first and second reflective type photomasks 18a and 18b are merged by a half mirror 30 to form a third exposure light 110e to expose a resist film 21a on a semiconductor substrate 21.

Abstract: An image exposure apparatus and method generates a first optical image light and a second optical image light. The first optical image is input to a read side of a spatial light modulating element, and the second optical image light is input to a write side of the spatial light modulating element, so that the first optical image light is modulated by the second image light to be output from the read side again; and exposing the light sensitive material to the output image from the read side, that is the both images are combined, or the intensity of both image lights are modulated.

Abstract: A photographic printer for printing negative images on a negative film onto photographic paper. The printing direction can be changed over between "lateral" and "longitudinal" without changing the feed direction of the negative film. A reflecting mirror is inclined by 45.degree. with respect to the optical axis of the light emitted from a light source to the negative film and is supported to be rotatable about the optical axis. A driving unit is provided to rotate the reflecting mirror by 90.degree. about the optical axis between a reference position and a second position. Exposure stages are provided on the optical axes of the light beams reflected by the reflecting mirror when the mirror is in its reference position and second position, respectively. The photographic paper is guided through the exposure stages. According to the position of the mirror, negative images are printed on the paper at one of the two exposure stages.

Abstract: A 3D printer and method which uses a beamsplitter or a mirror to form a reflected image which is a mirror image of the actual image exposed on the print material. A CCD detector array is placed on the reflected image plane to monitor the key-subject registration. The beamsplitter or mirror is physically linked to the print material cassette so that the CCD detector array shares the same projected image that is exposed on the print material regardless of the printing position. With such an approach, the CCD detector array can directly detect any off-alignment due to mechanical errors or distortion/aberration by the projection lens.

Abstract: An alignment system for a unit magnification system (such as a Half-Field Dyson system) for use in microlithography is provided. The alignment system provides for aligning a pattern on a reticle with a complementary pattern on a wafer.

Abstract: A device for assisting a person in focusing a camera on a surface is provided. A mirror at an angle of 45.degree. to the horizontal, and an incandescent filament, are mounted on a device that may rest on the surface to be photographed. The distance from the filament to a point on the mirror equals the distance from that point to the surface. By focusing the camera on the image of the filament that appears in the mirror, the camera will be correctly focused on the surface.

Abstract: An exposure apparatus including a wafer holder for holding a wafer, a movable wafer stage for carrying thereon the wafer holder, a recording layer provided on the wafer holder, and a detector for detecting a predetermined pattern recorded in a portion of the recording layer.

Abstract: An exposure apparatus includes a first reflective type photomask 18a, a first mask stage 180a for mounting the first reflected type photomask 18a, a second reflective type photomask 18b, and a second mask stage 180b for mounting the second reflective type photomask 18b. Light 11a from a light source 11 is directed to the first and second reflective type photomasks 18a and 18b. The first exposure light 110c and the second exposure light 110b reflected by the first and second reflective type photomasks 18a and 18b are merged by a half mirror 30 to form a third exposure light 110e to expose a resist film 21a on a semiconductor substrate 21.

Abstract: A focusing method is disclosed wherein a substrate is moved substantially along a focal plane of a projection optical system up to a predetermined station adjacent to the focal plane of the projection optical system and then, at the predetermined station, the surface of the substrate is brought into substantial coincidence with the focal plane of the projection optical system. The method includes the steps of detecting a deviation of the surface of the substrate with respect to the focal plane of the projection optical system, before the substrate, being moved substantially along the focal plane of the projection optical system, is moved up to the predetermined station; and substantially correcting the deviation on the basis of the detection.

Abstract: A method and device for rotating images about an optical axis by changing the direction of a light path by a composite mirror unit having a simple structure. A printing device has a light source for emitting light to an image Xa on a negative film, a printing lens for adjusting the magnification of the light that passes through the image, and a composite mirror unit for reversing the light path to print an image Ya on a printing material. The entire composite mirror unit can be rotated through a predetermined angle about a rotary shaft by a driving motor. The composite mirror unit has two oppositely arranged mirrors which are mounted on separate blocks and so as to be inclined by 45.degree. with respect to the vertical. By turning the unit by .+-.45.degree. from the reference position (0.degree.), the image will rotate by 90.degree. or 270.degree. with respect to the image Xa.

Abstract: A projection exposure apparatus includes a first stage for supporting a first object; a second stage for supporting a second object; a projection optical system for projecting an image of the first object onto the second object; an image pickup system having a predetermined image pickup surface and being arranged to illuminate a mark of the first object with a radiation beam such that, with a reflected beam from the first object resulting from the illumination, a first image of the mark of the first object is projected onto the image pickup surface and that, with a reflected beam from the second object resulting from the illumination and being directed to the image pickup surface through the first object, a second image of the mark of the first object is projected onto the image pickup surface; and a detecting device cooperable with the image pickup system, for detecting a deviation of the surface of the second object with respect to a plane on which the image of the first object is to be focused, on the basi

Abstract: A duplicating camera, especially, a diffusion transfer type duplicating camera including an exposure box in which a scanner for scanning across the surface of an original in the form of a slit is incorporated and a transfer box in which a sheet of photosensitive material is exposed to light so that a set of slit images from the exposure box can be formed on the photosensitive material, and in which the image recorded on the photosensitive material is transferred to an image receiving material. These exposure and transfer boxes are arranged in an adjustable manner so that the scan axis of the scanning unit can be aligned with the transfer axis of the photosensitive material. In the exposure stage, an exposure table on which the photosensitive material is transferred is positioned above conveyor rollers disposed on both sides of the exposure table, so that a nominal rise occurs in the photosensitive material traveling above the exposure table.

Abstract: A plate making machine of a compact size has a mechanism for dealing with jamming, by which jammed master paper can be easily removed, and the maintenance of an exposure stage and a supply transfer system can be performed without disassembling the machine body. The supply transfer system for feeding the master paper X to the exposure stage 9 is provided in a generally horizontal direction at an upper portion of the plate making machine body 1. A lamp house 13 for projecting the original image is provided above the exposure stage 9. An exposure plate 24 is provided at the exposure stage 9, and the exposure plate is tiltable about tilting shaft 25 provided at the side thereof opposite to the supply transfer system. An endless feed belt 33 for feeding and discharging the master paper X relative to the exposure plate 24 is provided in surrounding relation to the exposure plate 24.

Abstract: A microfilm reader capable of printing out a printed image having the extension same as that of the original image recorded in the microfilm at a reduced size without the need of any instruction from the operator or other means. The microfilm used in the microfilm reader has a mark as an internal standard scale which is photographed on a marginal portion of each frame of the microfilm. The length of the scale mark is read and determined to know magnification ratio necessary for printing out a copy image having the same as the corresponding original, and the magnification ratio is varied by a zoom lens of optical system or an electronic processor for processing image signals. In a modified embodiment, a microfilm having an information mark (i.g., a bar code, numerals, characters or format) indicating the dimensions of the original or reducing ratio at the original image photographing step.

Abstract: A projection exposure apparatus having an irradiation optical system for irradiating a pattern formed on a mask with first irradiation light, a projection optical system for imaging and projecting the image of the pattern of the mask onto a photosensitive substrate, and a mark detection device for irradiating a predetermined mark formed on the photosensitive substrate with second irradiation light in a wavelength region which is different from that of the first irradiation light by the projection optical system and detecting light generated from the mark, the projection exposure apparatus including: a deflection member disposed on a pupil surface of the projection optical system or in a periphery in an adjacent plane of the same, shielding a beam, which is a portion of the first irradiation light generated from the mask and incident on the projection optical system, and which passes through the peripheral portion of the pupil surface of the projection optical system, deflecting the second irradiation light by

Abstract: An alignment arrangement for photographic recording apparatus having a lens plane, an object plane, and an image plane. The alignment arrangement comprises an alignment module including a mirror, and luminous indicia disposed in a plane parallel to the mirror's reflective surface. The alignment module may be mounted on the apparatus so that the mirror's reflective surface lies parallel to one of the planes of the apparatus. A second mirror may be placed in another plane of the apparatus so that its reflective surface is parallel to that plane. The alignment module includes a viewing system which allows the two mirrors to be simultaneously viewed. Multiple images of the indicia, created by the two mirrors, may be observed. The images assume only one of many different patterns when the reflective surfaces of the two mirrors are parallel.

Abstract: An exposure system includes a pulse light source emitting light in response to a trigger signal and giving a predetermined exposure light quantity by a plurality of times of light emission. A reticle has an alignment mark and a light exposure pattern. A projection lens contractedly projects the pattern of the reticle. A wafer has an alignment mark to be located. The wafer is exposed to a projection of the pattern. A wafer stage is movable and carries the wafer. A laser interferometer measures a position of the wafer stage. An alignment device serves to detect a condition of an alignment of the wafer with respect to the reticle in an exposure position.

Abstract: The apparatus is a visual design system for reliably reproducing kaleidoscope-type images. A design element is fixed rotationally, vertically and horizontally with various gradients in a projection system and illuminated. The resulting image is projected through a bellows, also including various possible configurations. An image receiving system with height and longitudinal adjustment and corresponding gradients receives the image on a translucent viewing screen. The image is received between two kaleidoscope-type mirrors with an adjustable angle therebetween. A camera records the resulting image.An opaque wedge in a filter-like position, along with an appropriate aperture and resulting depth of field, is used to assure an evenly illuminated image. Similarly, the focal plane can be inclined in order to reduce any distortion caused by the increase in object distance for a portion of the image caused by the kaleidoscope-type mirrors.

Abstract: A high speed multi-magnification photofinishing printer for selectively projecting images onto a projection plane containing photographic paper at a plurality of different magnifications is disclosed herein. This printer includes means for supporting a given image bearing photographic negative, means cooperating with the negative for producing a given image bearing light beam, and a plurality of spaced apart but fixed magnification lenses, each of which is designed to project the given image bearing light beam onto the photographic paper contained within the projection plane at different magnifications. The printer also includes light beam position altering means for selectively and alternatively causing the image bearing light beam to pass through any one of the plurality of fixed magnification lenses and onto the photographic paper, whereby to selectively and alternatively project the image bearing light beam onto the paper at one of the different magnifications.

Abstract: A mirror driving method, and device, for a photographic printer having a mirror diagonally movable into and out of a printing light path between a photographic film and a printing lens. The mirror is moved into the printing light path for reflecting light toward a photometric system of the photographic printer during light measurement before printing. During printing, the mirror is removed from the printing light path and is stopped at a rest position. When moving from the rest position into the printing light path, the mirror is controlled to move first at a high speed and then at a low speed. When the printer operation is interrupted for a period or terminated, the mirror is locked at a lock position which is removed from the printing light path.

Abstract: An exposure control apparatus for controlling exposure quantity of pulse energy to a resist, when pattern of a rectile is transcribed to the resist on a wafer, using pulse energy accompanied by energy variation within a predetermined range per each emission, i.e., coherent or non-coherent light energy, or pulse energy other than light, such as X-ray.

Abstract: A projection exposure apparatus comprises a projection optical system for forming an image of a predetermined pattern on a mask onto a photosensitive substrate under exposure light having a first wavelength, an illumination system for illuminating a mask on the photosensitive substrate with light having a second wavelength different from the first wavelength through the projection optical system so as to attain alignment, and a detection system for detecting light reflected by the mark. The illumination system comprises a light source for emitting the light having the second wavelength, a first field stop for defining an illumination field on the photosensitive substrate and a second field stop for defining an illumination field on the photosensitive substrate.

Abstract: A reader-printer selectively switchable to a reader mode allowing an image recorded in a microfilm to be projected on a screen and a print mode allowing the image light to be projected on an image-carrying member. This reader-printer is provided with a scanning unit which is selectively movable to a position for projecting the image on the screen and a position for projecting the image on the image-carrying member. This scanning unit in the printer mode causes the image to be projected as rotated 90 degrees on the image-carrying member and allows the image to impinge as though a scanning light on the image-carrying member. As a result, when the image laid widthwise on the screen is printed on the copying paper, this image is projected in a turned posture on the image-carrying member and the copying paper on which the image has been printed is discharged through the front face of the reader-printer.

Abstract: A mark detecting device usable in an alignment and exposure apparatus for aligning an alignment mark of a mask with an alignment mark of a wafer and for exposing a resist layer provided on the surface of the wafer to a pattern of the mask with radiation. The device including a portion for forming a photoprint of the alignment mark of the mask on the resist layer provided on the surface of the wafer, a portion for removing at least a portion of the resist layer adjacent to the alignment mark of the wafer, and a portion for detecting the alignment mark of the wafer and the photoprint of the alignment mark of the mask.

Abstract: A microfilm viewer/printer projection system particularly adapted for full plane plain paper copying has a first, a second and a third mirror which selectively project a document image from a horizontal object plane to a vertical viewing plane or a horizontal exposure plane. In the view mode, the first and second mirrors reflect the document image to a screen which defines the viewing plane. An AC motor movement drives the first and second mirrors to a print mode, in which the second mirror is parked in a parking zone which is enveloped by the projection path from the object plane to the exposure plane, which is defined by a belt type photoreceptor. In the print mode, the first mirror reflects the entire document image to the third mirror, which is a black mirror, and the third mirror reflects the entire document image to the photoreceptor, to expose the photoreceptor to the entire document image simultaneously.