Abstract: To achieve for a photographic film conveying device that no external force causing conveying speed to vary is applied to a photographic film during image reading, after a preceding photographic film is discharged from a reading conveying path, the time until a subsequent photographic film is conveyed to the reading conveying path is not long, or even if a photographic film set in a film supplying section is elongate, image reading of photographic films by an image reading section can be carried out efficiently, there is provided a photographic film conveying device comprising a section setting a discharge conveying section in a withdrawn state or a conveying state, a section controlling conveying of preceding and subsequent photographic films, or a section switching a conveying path of a photographic film.

Abstract: A method and rotational mask scanning apparatus for exposing a plurality of images on a workpiece, include a rotatable mask having a pattern of image segments thereon, an optical system for projecting the image segments onto the workpiece, and a device for at least one of rotating the mask and for moving the workpiece so as to continuously expose a plurality of regions on the workpiece with the pattern of image segments.

Abstract: A device for recording a refractive index pattern in a photosensitive optical fiber includes a rotary disc formed with a phase mask in a circular pattern, which is rotated by an axis. The phase mask is illuminated with laser light in a region so that a moving interference pattern is formed. The optical fiber is moved along a path in synchronism with the moving interference pattern so that the pattern becomes recorded in the fiber. The pattern can be formed continuously over long fiber lengths, e.g., of the order of one meter.

Abstract: The invention relates to a system for projecting or displaying images comprising a valve exhibiting a plurality of image-forming elements having a light transmission coefficient which can be controlled so as to present the image, and a means of illuminating the valve comprising a light source and an integrator having two lens arrays associated in such a way that each lens of the second array distributes over the valve the light received from a corresponding lens of the first array.

Abstract: In a photosensitive material exposure apparatus in which a plurality of rows of photosensitive materials can be subjected to scan-exposure, in a case in which there is only one row of a photosensitive material, scanning is not wasted and exposure time is reduced. Images are exposed by a single scan exposure system in which the column direction of a photographic printing paper (P) is a main scanning direction and a direction orthogonal to the column direction is a sub-scanning direction. In case of single row exposure, scan-exposure is effected only on a necessary row. Accordingly, exposure time can be reduced.

Abstract: A sheet guide in an image reading apparatus guides a sheet fed from a pair of rollers to a scanning point on a contact glass includes a pair of notched portions for bearing forces applied by at least one of the rollers, a sheet bearing portion for guiding the sheet fed by the rollers, wherein the image bearing portion guides the sheet fed out from the rollers to lower an angle incidence which the sheet forms with the contact glass. The sheet bearing edge is positioned toward a lower position of a nip between the rollers and changes the angle of incidence to become closer to horizontal with respect to the contact glass, than if the sheet were unguided.

Abstract: A novel device for image-shooting both surfaces of documents at a high rate by electronic means. The device has an upper transport system for allowing plural documents to descend/move by a pre-set number at a time towards the downstream and image-shooting means for image- shooting the descending/moving document. Image-shooting can be done simultaneously on both sides or side by side, either during free movement or controlled movement by tranporting means etc.

Abstract: An improved high speed package printer for producing a plurality of high quality photographs of varying size, shape, and style based on one or a plurality of different film negatives. The improved package printer of the present invention accomplishes the goal of increased throughput and speed through the use of an automatic paper-loading feature, ultrasonic proximity sensors for dynamically measuring paper-slack loops, off-center printing for eliminating the need to advance the paper for punching after each exposure, a rotational prism for creating 10".times.13" photographs without physically rotating the film, a 13-UP lens deck including 12 wallet lenses and a single 5".times.7" retro-focus lens for creating 12 wallet-sized photographs and one 5".times.

Abstract: A method and apparatus for exposing a substrate to light perform the steps of inputting position data of a peripheral region along an outline of a chip region on a substrate, which has been placed on a spin chuck, detecting a reference position at an outer edge of the substrate inputting axial directions of the position data and aligning axial directions of an orthogonal shifting mechanism. Based on the position data inputted, light of an irradiator is shifted along the peripheral region to expose the peripheral region in a staggered way along the outline of the chip region. The method and apparatus may also perform the steps of inputting a shape of the chip region on the substrate as image information, deriving position data of the peripheral region along the outline of the chip region from the image information, and exposing the peripheral region to light based on the position data derived.

Abstract: An illumination optical system having an afocal optical system includes a first group of lenses having negative refracting power, a second group of lenses having positive refracting power and being positioned further away from a light source than the first group of lenses, and a third group of lenses having positive refracting power and being positioned further away from the light source than the second group of lenses, wherein the afocal optical system expands a parallel beam of light emitted from the light source or converts the parallel beam of light into a parallel beam having equivalent magnification.

Abstract: An exposure apparatus in which a photographic light-sensitive material is exposed to a light image of an original, includes: a light illuminating member for illuminating a light to the original; an optical member for projecting a light transmitted through or reflected on the illuminated original onto an exposure position as a line image of the original; a material conveyor for conveying the material at a constant speed while the line image of the original is projected onto the material; a moving member for moving the original at a definite speed while the line image of the original is projected onto the material; and a start position determining member for determining a start position of the original at which the moving member starts moving according to magnification of the projected image of the original or image density of the original.

Abstract: An image printer includes a negative-film projection exposure unit capable of projecting and exposing image information of a negative film on to a photosensitive material adapted for negative films and a positive-film exposure unit capable of exposing image information of a positive film on to the photosensitive material adapted for negative films.

Abstract: A copying apparatus to copy a computer form paper has a conveying unit to convey a continuous original having a belt-like shape which is formed by a plurality of continuous pages such as computer form paper, an exposing unit to expose the image of the continuous original that is conveyed by the conveying unit at a fixed position, a copying unit to copy the image exposed by the exposing unit onto one cut sheet, a range setting unit to set an arbitrary desired range of the continuous original to be copied onto one cut sheet, and a magnification setting unit for setting a copy magnification. The conveying unit conveys the continuous original by a distance according to the copy range set by the range setting unit and at a speed according to the copy magnification set by the magnification setting unit.

Abstract: A film feeder/winder is capable of winding films compactly, feeding films backward and keeping films damage-free. A plurality of films wound in a magazine case are fed one by one into a film guide. The film guide is partially openable, so that a film being fed backward can be looped by protruding from the film guide. Films are fed into a scanner/exposure unit for scanning and printing. After printing, films are fed into another magazine case and wound into a roll. It is possible to print any additional films by inserting them into an inlet opening of an extra passage branching from the film feed path. Also, a film being fed backward may be guided into this extra passage until it protrudes from the inlet opening. Both magazine cases have guides and rollers for smoothly winding films around their respective film take-up cores.

Abstract: A projection exposure apparatus has an illumination optical system for directing exposure light to an illumination area with a predetermined shape on a mask with a pattern for transfer; a projection optical system for projecting an image of the pattern within the illumination area of the mask to a photosensitive substrate; a mask stage for scanning the mask in a predetermined scan direction with respect to the illumination area; and a substrate stage for scanning the photosensitive substrate in a direction corresponding to the scan direction in synchronism with the scanning of the mask. The relative positions of an image plane of the projection optical system and an exposure surface of the photosensitive substrate are changeable in the direction of the axis of the projection optical system and changed in a predetermined cycle when performing the scanning while projecting the image of the pattern of the mask to the photosensitive substrate.

Abstract: A picture image input device having the capabilities of a sheet fed scanner with respect to sheet-type original media and realizing the convenience of a hand scanner with respect to original media such as books and the like. The picture image input device includes a light source that emits light for reading an original medium, an image sensor, a projection optical system that composes an image of the original medium on the image sensor, a driving unit that moves the original medium relative to the image sensor and a folding joint unit that changes the usage state between one of an open state and a folded state. In the open state the picture image input device functions as a hand scanner. In the closed state the picture image input device functions as a sheet fed scanner. The reading position of the original medium is the boundary between a reading unit and a driving unit of the picture image input device in the folded state.

Abstract: In numerous applications of large-area patterning systems, the preferred image magnification is unity. However, in some applications, the size of the substrate may change slightly due to various thermal and/or chemical processing steps. To compensate for scale changes of the substrate, the magnification of the imaging system must vary slightly from unit magnification (typically by a fraction of a percentage) so that a layer already patterned on the substrate will have, after processing, proper image registration with the subsequent layer.This disclosure describes a lithography system for exposing large substrates at high imaging resolution and high exposure throughput, and specifically relates to a scan-and-repeat patterning system that employs a unitary mask-substrate stage and enables projection imaging of a substrate with capability to control the image magnification to compensate for changes of substrate dimensions occurring as a result of previous process steps.

Abstract: A reticle is scanned in a predetermined direction relative to an illumination field of a predetermined shape. In synchronism therewith, a shot-area defined on a photo-sensitive substrate (or wafer) is scanned in the opposite direction relative to an exposure field which is optically conjugate to the illumination field. Through these scanning operations, a pattern formed on the reticle is transferred onto the shot-area on the photosensitive substrate. The illuminance of an illumination light is measured during a time period when the illumination field is in an acceleration region and before reaching the shot-area, and the amount of exposure onto the shot-area is controlled based on the results of the measurement.

Abstract: A rotating drum recorder includes a rotatable mounted drum having a cylindrical outer surface and an internal cavity adapted to receive a strip of light-sensitive recording material. An exposure gate defines (1) an aperture extending through the cylindrical outer surface of the drum and (2) a radially inwardly-facing media-locating surface. A drive mechanism is adapted to transport a received strip of light-sensitive recording material through the exposure gate internal to the cylindrical outer surface of the drum, whereby centrifical force on the strip of light-sensitive recording material acts to press the strip of light-sensitive recording material against the media-locating surface of the exposure gate as the drum rotates. The exposure source includes a source of a collimated light beam and an electro-optic modulator between the source and the drum surface for varying the intensity of the collimated light beam.

Abstract: The illuminance of illumination light from an exposure light source is switched over in a plurality of steps in an open loop control, whereby, when a plurality of shot areas on one substrate to be exposed to light are exposed to the light with various integrated exposure quantities, the exposure quantity with respect to each shot area is correctly controlled. Pulse illumination light from an excimer laser light source is attenuated by a rough energy adjuster and a fine energy adjuster and then illuminates a reticle, while the reticle and a wafer are scanned with respect to a projection optical system, such that a pattern of the reticle is successively transferred to individual shot areas on the wafer. When the extinction ratio of the rough energy adjuster is switched over in an open loop control, the illuminance on the image surface is measured by an illuminance fluctuation sensor so as to adjust, based on the result of this measurement, the illuminance on the image surface.

Abstract: A projection imaging system is described for patterning large, flexible substrates at high exposure speeds and desired resolution, the substrates being in the form of a continuous band fed from a roller for cost-effective electronic module manufacturing. From the continuous band, segments of one panel size are sequentially exposed one at a time. The segment being exposed is held rigidly on a scanning stage, on which is also mounted a mask containing the pattern to be formed on the substrate. The imaging subsystem is stationary and situated above the scanning stage. The mask is illuminated with a hexagonal illumination beam and a region of similar shape is imaged on the substrate. The stage is programmed to scan the mask and substrate simultaneously across the hexagonal regions so as to pattern one whole panel.

Abstract: A method for producing a printer wherein tractor drives move a length of fan-fold, continuous-form paper upwardly from a stacked source thereof, through a print mechanism, across a paper directing assembly and then downwardly to refold onto an output stack, the method including steps for detecting misfolds of the fan-fold paper in the printer.

Abstract: A flow camera apparatus (10) operable for photographing large original documents in continuous, moving fashion includes a camera (74) located within the housing (12). An aperture adjustment mechanism (86) allows adjustment of the camera aperture from the outside of the housing (12) without opening the housing (12). The iris adjustment mechanism also allows the aperture to be changed during photographing of a document. The apparatus includes lamps (214, 216 and 218) for illuminating the document during photographing and a "T" mask assembly 22 provided with baffles (204 and 208) for allowing only light reflected from the document to enter the image path (88) to the camera (74). The apparatus (10) also includes precisely balanced detectors (126) for detecting entry of a document into the apparatus (10).

Abstract: Both a web of film and film in a cartridge can be selectively processed for printing. A rotary table is provided on a common base with a scanner assembly and a printing/exposure unit provided on opposite sides of the rotary table in an opposed manner. A web of film is fed on film guides to pass the scanner assembly, rotary table and printing/exposure assembly in a straight manner. A film in cartridge is fed through a cartridge feed portion onto the rotary table.

Abstract: A scanning system includes an illuminating device for illuminating an object with coherent illumination light, and a scanning device for relatively and scanningly moving the object relative to the illumination light, along a scan direction, wherein the illuminating device is arranged so that a direction of interference fringe to be produced on the object by the illumination light is inclined with respect to the scan direction.

Abstract: A printer film carrier turning apparatus for obtaining a photograph by irradiating light onto a film comprises a film carrier for supporting the film, a carrier supporting table for supporting the film carrier parallel with the film to make the film carrier turn through a 90.degree. range, and a light diffusion box for diffusing illuminance light to uniformly illuminate a film range which is to be printed. The film turning apparatus is constructed such that the film carrier turns in unison with the light diffusion box. Therefore, transferring rollers of the film carrier cannot interfere with the light diffusion box, which allows the light diffusion box to be placed very close to the film carrier and thereby increases the efficiency of the light source. Also, the film carrier can be turned in unison with the light diffusion box, thereby improving the operating mechanism.

Abstract: A photographic printing apparatus can process any of a roll of films, a strip of film and a film in a cartridge. A feed speed adjusting unit is provided between a scanner unit and a printing/exposure unit. A cartridge supply unit is provided upstream of the scanner unit and upstream of the printing/exposure unit. A strip of film is fed by a film carrier and a cartridge film is fed by a feed roller of a cartridge holder.

Abstract: A method of and printer for printing photographs on light-sensitive paper of a particular format from transparent masters on a roll of film by means of a projector. Both the film and a strip of the paper are advanced through a printing point. The paper is displaced across the direction the film travels in with the center of the prescribed paper format at a distance from the optical axis of the projector. The projector can be adjusted to project the image of the master larger or smaller than the paper format.

Abstract: A film transporting apparatus for a film processing system. The apparatus includes a pair of frame members pivotably connected to each other to be opened and closed, a transport mechanism provided to each of the frame members and operable to transport a film along a predetermined film transport passage when the frame members are closed, an optical sensor for detecting film information including a light emitting portion provided in one of the frame members and a light receiving portion provided in the other frame member, positioning engaging portions provided respectively to the frame members and coming into engagement with each other in association with a pivotal movement of the frame members to a closed state. The apparatus further includes a movable frame member movably provided to one of the frame members.

Abstract: A compact digitizer apparatus for accurately scanning an image on a transparent sheet is particularly useful for scanning and storing medical x-ray photographs and other photographic-based records. The apparatus includes a photosensitive device which scans the image, and an illumination device for passing light through the sheet to project the image onto the photosensitive device. A transport system transports the sheet between the illuminating device and the photosensitive device. A guide keeps at least a portion of the sheet which is being illuminated in a fixed orientation. For guidance of the sheet, a planar sheet support keeps contact with the bottom edge of the sheet. A carrier abuts against a rear edge of the sheet to move the sheet past the photosensitive scanner device.

Abstract: The present invention provides an image forming system having an original-stationary scanning mode and an original-through scanning mode characterized by control means for more shortening a sheet supply distance in the original-through scanning more than that in the original-stationary scanning mode.

Abstract: The present invention provides a double function-mode scanner. It includes a scanner body scanning a content of an article to be scanned, and a feeder connected to the scanner body to have the article transmitted through a passage between the scanner body and the feeder so that the content of the article can be scanned and having a light source for allowing the sheet-feed scanner to perform not only a reflection-mode scanning but a penetration-mode scanning.

Abstract: An automatic film feeder has an arrangement with which films can be reversed manually to reposition the frames of each film. A film magazine is mounted outside of an outer case of the printing machine. Films fed from the film magazine are guided into a film feed passage provided inside the outer case by means of a film guide. The film guide has a loop guide which is openably mounted. When a film is fed backward, it slackens and opens the loop guide forcibly.

Abstract: In front of an exposure stage and behind the exposure stage, loop spaces are provided on the roll paper transporting path of a printing/developing apparatus. The movement of the exposure stage is ensured by the loop. When the roll paper is fixed, one loop space is provided in front of the exposure stage, and one loop space behind the stage, thus allowing the exposure stage to move. Alternatively, the negative mask unit and lens unit of the apparatus are movable, so that roll paper is usable when the exposure stage is fixed.

Abstract: In a document handler for sequentially feeding document sheets over an imaging platen to be imaged with a constant velocity driven roller overlying the imaging platen, a document feeding control system which predicts when the constant velocity driven sheet feeding roller will be driven against the platen with no document sheet therebetween, an automatic lifting system which automatically lifts the feeding roller away from the platen in response to the document feeding control system predicting that no document sheet will be between the feeding roller and the platen and a forward roller driving signal being applied or when a reverse driving signal is being applied. The constant velocity feeding roller has at least four sections of two different diameters; an inner pair of common diameter feed roller surfaces and an outer pair of slightly smaller diameter surfaces on opposite sides providing document hold down and document edge detection image background.

Abstract: An automatic printer for making prints of normal and panoramic format negative filmstrip image frames arbitrarily interspersed in a single filmstrip. Normal and panoramic projection systems are provided for projecting normal and panoramic images onto respective projection planes of the photographic print paper. Normal and panoramic format image frames are distinguished, and the appropriate projection system is employed through the insertion or withdrawal of a first reflective mirror into the projection path of the image bearing light beam. Zoom lens systems in each projection system are set to the appropriate magnifications for the width of print paper employed. The panoramic projection system employs a precision variable conjugate controlled zoom lens in association with a second movable mirror to adjust object plane to image plane distance to avoid overlap of the normal and panoramic projection planes at each magnification for each paper width.

Abstract: A method and apparatus for fabricating a read only optical disc enables mass production of a read only optical disc at low cost in a short period of time. The method includes a source disc fabricating step and a duplicating step of duplicating information of the source disc to a target disc. The source disc has a transparent substrate and a predetermined opaque write layer coated thereon, and write holes for transmitting light on the write layer, thereby storing information according to the arrangement of the write holes. The target disc has a photochromic write layer which has different absorption coefficients before and after the duplication. Here, the method uses an optical writing apparatus for optically forming the write holes of the source disc and a duplicating apparatus for optically duplicating the information from the source disc to the target disc.

Abstract: Constant speed drive of a reticle and a wafer in a relative scanning direction and positioning of the reticle and the wafer are simultaneously performed with high precision by a slit scanning exposure scheme. A reticle side scanning stage for scanning a reticle relative to a slit-like illumination area in the relative scanning direction is placed on a reticle side base. A reticle side fine adjustment stage for moving and rotating the reticle within a two-dimensional plane is placed on the reticle side scanning stage. The reticle is placed on the reticle side fine adjustment stage. Constant speed drive and positioning of the reticle and a wafer are performed by independently controlling the reticle side scanning stage and the reticle side fine adjustment stage.

Abstract: Tractor drives of a high speed printer move a length of continuous-form paper longitudinally up from a box of fanfold stacked paper, through a print mechanism, across paper directing means, and downward to refold onto a fanfold stack. A misfold detector is positioned at the paper directing means to sense the jumble of paper caused by misfolding prior to jamming of paper movement through the tractor drive to prevent damage to the paper, complex restarting procedures, or data loss.

Abstract: An image scanner serving as an image reading device reads an image of an original by an image sensor. A first read mode in which an image of a stationary on a transparent platen is read by moving the image sensor and a second read mode in which an image of an original read by the image sensor when stationary. An original section is separated from the automatic original conveying section, and can be opened or closed by a small operating force. In the second read mode, an original set on an original tray mounted on an upper portion of the original pressing section is reversed in the automatic original conveying section and then, is discharged to a discharge stand on an upper surface of the original pressing section. The original tray is not projected toward the side of the image scanner.

Abstract: The present invention provides an automatic original feeding apparatus comprising first rotary supply means for supplying a sheet original, second rotary supply means disposed at a downstream side of the first supply means to supply the sheet original, control means for rotating the second rotary supply means reversely to return the sheet original toward an upstream side by a small amount, retract means for directing a trailing end of the returned sheet original out of a sheet path connecting between the first and second rotary supply means, controlling means for controlling the first rotary supply means to cause the first rotary supply means to feed a next sheet original until a leading end of the next sheet original is overlapped with the trailing end of the first sheet original, information means for the kind of sheet originals, and means for changing a return amount of the sheet original effected by the controlling means, in accordance with the kind of the sheet original from the information means.

Abstract: A reticle disk with an annular pattern area is used in a reduction projection lithography system in place of a reticle with a rectilinear pattern layout. The reticle disk is rotated on a continuous basis during patterning of a substrate, and the patterning-beam emanating from the annular pattern area is scanned over the substrate using an X-Y stage. The imaging beam, which is preferably an electron-beam, may be scanned across the annular pattern area in a radial direction to allow patterning a plurality of subfields.

Abstract: A photographic printing apparatus in which images recorded on a photographic film are printed onto a photographic paper as printed images of print sizes of different aspect ratios and in which a printed photographic paper is conveyed distances corresponding to the print sizes and is cut. Indications symbolizing the print sizes are recorded at the photographic paper. The print sizes are identified by detection of the indications. Areas of the photographic paper in which the indications are detected based on identified print sizes are controlled. Mistakes in cutting can thereby be prevented.

Abstract: An exposure apparatus for exposing a peripheral portion of a substrate to light comprises a rotating member for rotating a substrate to which a resist is applied, an irradiating system for irradiating the substrate with light which is sensed by the resist, a position detecting system for detecting a relative position between the light and the substrate in a radial direction of the substrate, a moving system for making a relative movement between the light and the substrate in the radial direction of the substrate, a periphery detecting member for detecting outer-periphery information corresponding to a shape of an outer periphery of the substrate, a control system for servo-controlling the moving system in accordance with the outer periphery of the substrate to make the width of the light emitted on the substrate constant, a characteristic detecting member for detecting a specific part of the peripheral portion of the substrate, and a control characteristic changing member for changing a control quantity of t

Abstract: The present invention provides an improved device for transporting photographic negatives mounted on carrying cards to the optical stage of a photographic printer. A storage bin houses a plurality of the carrying cards prior to being transported to the optical stage of the printer. A first vacuum member releasably engages one of the carrying cards and transports that carrying card to a predetermined intermediate location. A second vacuum member operates to transport the carrying card between the intermediate position and the optical stage of the photographic printer. A third vacuum member operates to transport the carrying card from the predetermined intermediate position to a discharge bin. A secondary carrying card transport assembly is adapted to transport at least one carrying card having a secondary photographic negative mounted thereon to the same predetermined location to simultaneously transport multiple negatives to the optical stage of the printer.

Abstract: The present invention is a type of office automation machine that is capable of copying a large size drawing by using an electronic photo method. The invention is designed to provide general printing function, a standard copying function, and a function of copying large size manuscripts such as design drawings. These functions are made possible by using a continuous printing paper in a reel form and by severing and discharging print output by an appropriate length. The printing paper is designed to refilled by a removable cassette. The transporting blades orbitally rotate to retrieve the developing agent from its container, so that the copying machine can be used efficiently and economically.

Abstract: An image forming apparatus including a lower half body; an upper half body which is mounted on the lower half body and has an axis arranged in parallel to a sheet passage so that the upper half body can be pivoted around the axis; and a platen cover provided on the upper half body so as to open or close in the same direction as that of the upper half body: wherein the sum of pivot angle of the upper half body and the platen cover is smaller than 90 degrees.

Abstract: An instant photocopying apparatus has a rod lens array for imaging fine areas of a manuscript on a photosensitive surface of an instant film. The apparatus has a carrier which is movable in a direction parallel to the manuscript. A flourescent lamp illuminates the manuscript. A filter holder is mounted to the lower end of the carrier, and an optical filter is provided for covering a light incidence portion of the rod lens array. The filter is removably mounted so as to enable changing the exposure and tint of the photosensitive surface of the instant film by mounting or dismounting the filter.

Abstract: Prior to a periphery exposing operation, a light emitting unit and a light receiving unit are retracted to a position separate from a wafer, and a calibrating operation is conducted in the retracted position utilizing a light shield plate different from the wafer to be exposed, thereby obtaining a servo control reference signal for the exposure. At the exposure of the periphery portion of the wafer, the exposure width is controlled according to the reference signal. It is therefore rendered possible to achieve exact peripheral exposure, including the intensity and intensity distribution of the exposing light beam immediately before the irradiation of the peripheral portion of the wafer.

Abstract: In a scanning type exposure apparatus for exposing an entire surface of a pattern region on a mask to a substrate by scanning the mask and the substrate with respect to a projection optical system in a predetermined direction with a speed ratio in accordance with a magnification of the projection optical system, there are provided a plurality of illumination optical systems for illuminating respective areas of the pattern region on the mask with respective light fluxes from respective light source; a plurality of projection optical systems arranged so as to correspond to the respective illumination optical systems, the projection optical systems projecting respective images of the areas illuminated by the respective illumination optical systems onto respective projection areas on the substrate; a memory device for obtaining and storing a change of shape of the substrate; a magnification changing device for changing a magnification of at least one of the projection optical systems in accordance with the change