Abstract: A spectroscopic measurement apparatus 1A comprises an integrating sphere 20 in which a sample S is located, an irradiation light supplying section 10 supplying excitation light via an entrance aperture 21 to the interior of the integrating sphere 20, a sample container 400 holding the sample S in the interior of the integrating sphere 20, a spectroscopic analyzer 30 dispersing the light to be measured from an exit aperture 22 and obtaining a wavelength spectrum, and a data analyzer 50 performing data analysis of the wavelength spectrum. The analyzer 50 includes a correction data obtaining section which obtains correction data of the wavelength spectrum considering light absorption by the sample container 400, and a sample information analyzing section which corrects and analyzes the wavelength spectrum to obtain sample information.

Abstract: In a total luminous flux measurement apparatus according to an embodiment, a total luminous flux emitted by an object is calculated based on a result of measuring illuminances using a measuring unit when providing relative movement between the object and an integrating unit to expose a substantially entire light emitting surface of the object to an inner space of the integrating unit. Specifically, under conditions that the object is disposed to penetrate the integrating unit from one sample hole to the other sample hole, a luminous flux of a portion of the object within the inner space of the integrating unit is measured, then the integrating unit is moved relative to the object, and a luminous flux of a portion accordingly contained in the inner space of the integrating unit is measured.

Abstract: A device is provided for optically measuring shapes and/or examining objects, comprising at least one camera, at least one lens, a scattering body and at least two light sources. The device is characterized in that the scattering body is opaque and that at least two light sources are disposed on the inside of the scattering body and illuminate the inside thereof, and that either only two light sources are used, which are disposed opposite from one another on an imaginary diameter line, or that the light sources are disposed at the corners of a—preferably equilateral—triangle or a cross.

Abstract: An apparatus for observing the appearance of the surface (2) of a sample (1), comprising a light source (11) for illuminating said surface (2) from a predetermined direction and means for observing the surface (2). The means of observing the surface (2) comprise a number of substantial flat mirrors (8) located in different directions with respect to said surface (2). The means furthermore comprise an optical system (6,14) for observing said flat mirrors (8). Each flat mirror (8) reflects an image of the surface (2) of the sample (1) to the image receiving part (6) of the optical system (6,14).

Abstract: The present invention provides an instrument and method for measuring total luminous flux of luminous elements, which forms an approximately uniform spatial intensity distribution by simultaneously lighting a plurality of luminous elements for measurement in an integrating sphere when comparing a total luminous flux standard lamp with the luminous elements to measure the total luminous flux of the luminous elements, thus not requiring spatial mismatch error correction.

Abstract: A device includes a housing, illumination means, a reflective plate, and a detector. The housing defines an aperture. The illumination means is for providing illumination (natural or artificial) along an optical axis that passes through the aperture. The reflective plate is movable, relative to the housing, between a retracted and a deployed position. The positions are defined so that during such movement, the optical axis traces a line across the reflective plate. The detector is aligned to detect illumination from the illumination means after light through the aperture is reflected from the reflective plate. A method is also described. The device is particularly suitable for moving the reflective plate temporarily in front of a pushbroom or whisk broom type sensor for calibration because the line traces across a first portion of the diffusing surface that is subject to sunlight degradation and a second portion that is always shielded from sunlight.

Abstract: A mirror is provided with a light source window and an illumination window each establishing communicative connection between an inner face side and an outer side of a hemispherical unit. The light source window is an opening to which a light source OBJ to be measured is attached mainly. The illumination window is an opening for guiding a flux of light from a correcting light source used for measurement of self-absorption toward the inner face of the hemispherical unit. A self-absorption correcting coefficient of the light source OBJ is calculated based on an illuminance by a correcting flux of light in a case where the light source to be measured OBJ in a non-light emitting state is attached to the light source window and an illuminance by a correcting flux of light in a case where a calibration mirror is attached to the light source window.

Abstract: The present invention discloses an apparatus that comprises a spectrometer, and computer and a dual integrating sphere measurement arrangement comprising a measurement integrating sphere, a sample integrating sphere, a sample platform, a filter, a lens system, a baffle and a light source. The sample integrating sphere encloses a sample to provide a constant environment for simulating the visual color grading environment. The computer controls the spectrometer and provides measurement parameters calculated from physical parameters of the measured sample, including, but not limited to, shape, dimensions, refractive index, intensity of fluorescence and cut grade. The computer then calculates spectral reflectance and colorimetric data, and determines an average color grade by checking a look-up-table that represents the relationship between the CIELAB coordinate and the average color grade.

Abstract: An apparatus for testing transmission of a lens includes a light source, a focusing device, an integrating sphere, a moveable carrier, a detector, and a processor. Light, in a specific wavelength range, is emitted from the light source. The focusing device is configured for collimating and focusing the light to transmit the light onto the lens being tested. The integrating sphere is configured for receiving light transmitted through the lens. The moveable carrier is configured for facilitating a relative movement between the lens and the integrating sphere. The detector includes a light sensor configured for detecting a light intensity received by the integrating sphere and transforming the light intensity into a comparing signal for comparison. The processor is configured for comparing a signal of the intensity of the light transmitted to the lens with the comparing signal to obtain a transmission efficiency/percentage of the lens.

Abstract: A parousiameter having a dual beam setup and method for use thereof is provided for producing measurements of optical parameters. The dual beam parousiameter includes a hemispherical dome enclosure 318 sealed at the bottom with a base 320. A radiation source 302 produces radiation in two beams, an illumination beam 304 for illuminating a sample surface 308 and a calibration beam 330 for providing optical characterization information about the illumination beam 304. Each beam is guided into the hemispherical dome enclosure 318 via separate optical paths. An optical imaging device 324 is positioned to acquire an image of scatter radiation 314 scattered by the sample surface 308 illuminated by the illumination beam 304, and acquire an image of the calibration beam, simultaneously. The calibration beam image is used to compensate for variability in optical output of the radiation source 302 when analyzing the scatter radiation data.

Abstract: An object image digitizing device using an integrating sphere wave source is provided which makes the degree of spatial uniformity and temporal stability of the spatial uniformity of the wave irradiation distribution over the output port surface of the integrating sphere for illumination of the transmissive object as precise as the degree of the digitalization requires.

Abstract: This invention belongs to the luminous flux measurement field, and especially relates to the equipment and method for LED's total luminous flux measurement with a narrow beam standard light source. The system for LED's total luminous flux measurement with a narrow beam standard light source in this invention comprises an integrating sphere, the light source, a narrow aperture fiber, a spectrometer and a driver for the light source. The light source is lighted by the driver. The narrow beam standard light source (both luminous flux standard and spectrum standard) is placed on the interior surface of integrating sphere, there is not any baffle in the sphere, and a narrow aperture fiber transfers the light to a multi-channel spectrometer which measures the spectrum distribution of LED and calculates its total luminous flux. The equipment in this invention is easy to use, has small error and low cost, and can achieve accurate results for LED's total luminous flux.

Abstract: A mirror is provided with a light source window and an illumination window each establishing communicative connection between an inner face side and an outer side of a hemispherical unit. The light source window is an opening to which a light source OBJ to be measured is attached mainly. The illumination window is an opening for guiding a flux of light from a correcting light source used for measurement of self-absorption toward the inner face of the hemispherical unit. A self-absorption correcting coefficient of the light source OBJ is calculated based on an illuminance by a correcting flux of light in a case where the light source to be measured OBJ in a non-light emitting state is attached to the light source window and an illuminance by a correcting flux of light in a case where a calibration mirror is attached to the light source window.

Abstract: The optical design of a measurement system is disclosed. The measurement system comprising a light source configured to provide light along a first axis. The measurement system has a reflecting lens aligned along a second axis where the reflecting lens has a first focus on the second axis and a second focus on the second axis where the second focus is between the first focus and the reflecting lens and where the second focus is positioned near the first axis. The measurement system has a field lens located on the second axis and positioned such that the second focus of the reflecting lens occurs inside the field lens. The measurement system has a relay lens system aligned to the second axis where the relay lens system forms a first focus at the second focus of the reflecting lens. The measurement system has a sensor located on the second axis at a second focus of the relay lens system and is configured to detect scattered light near the second focus of the reflecting lens.

Abstract: A light fixture, using one or more solid state light emitting elements utilizes a diffusely reflect chamber to provide a virtual source of uniform output light, at an aperture or at a downstream optical processing element of the system. Systems disclosed herein also include a detector, which detects electromagnetic energy from the area intended to be illuminated by the system, of a wavelength absent from a spectrum of the combined light system output. A system controller is responsive to the signal from the detector. The controller typically may control one or more aspects of operation of the solid state light emitter(s), such as system ON-OFF state or system output intensity or color. Examples are also discussed that use the detection signal for other purposes, e.g. to capture data that may be carried on electromagnetic energy of the wavelength sensed by the detector.

Abstract: The present invention relates to an integrating sphere for measuring a light-emitting property of a light source, and more particularly, to an integrating sphere having a means for controlling temperature inside the integrating sphere. An integrating sphere for measuring an optical property of a light source according to the present invention has a substantially spherical hollow space formed therein; a first through-hole provided such that a wire for supplying electric power to the light source installed inside the hollow space of the integrating sphere passes therethrough; and a second through-hole provided such that temperature-controlled air is supplied into the hollow space of the integrating sphere therethrough. A light source support, which has one end disposed at the center of the hollow space of the integrating sphere and the other end fixed to an inner peripheral surface so as to hermetically seal the first through-hole of the integrating sphere, is installed within the hollow space.

Abstract: A measurement system having dual measurements capabilities is disclosed. The measurement system has a light source configured to provide light along a first axis that illuminates a sample media. The measurement system has a first sensor configured to measure scattered light in a sample media. The measurement system has a second sensor configured to measure light passing through the sample media.

Abstract: A spectrophotometric system includes a zoom lens assembly that is mounted for axial translation relative to an integrating sphere. The zoom lens assembly includes first and second focusing lens mounted to an axially movable lens carrier. The lens carrier is positioned intermediate first and second sets of mirrors for reflecting/directing SCE and SCI beams toward fiber ports. A reference beam is also emitted from the integrating sphere and transmitted to a processor, thereby resulting in simultaneous tri-beam measurements. The disclosed spectrophotometric systems may also include an aperture plate detection assembly and/or a sample holder assembly that incorporates a dampening gas spring. The aperture plate detection system includes a detection disk that may include a plurality of pre-positioned sensors that interact with an activating ridge formed on the aperture plate for identification thereof.

Abstract: A problem in the inspection of transparent wafers and disks is the detection of top surface particles. More precisely, it is being able to assign a scattering site as being due to a particle at the top or bottom surface of a transparent wafer. A method of the present invention is to use an elliptical mirror, with a pinhole at its top focus, together with a focused beam. The focused beam will diverge as it passes through the transparent wafer and as a result any particle on the bottom surface will see a lower optical intensity and will appear weaker than a top surface particle. The suppression of scattered light from the bottom surface occurs because the source of the scattered light (the bottom surface) is far from the bottom foci of the elliptical mirror.

Abstract: A shape measuring apparatus and a shape measuring method suited for measuring an edge profile of a thin sample such as a semiconductor wafer or the like is provided. A distribution of surface angle and an edge profile of a measurement site is calculated by emitting light at sequentially different angle to the measurement site of a wafer by sequentially switching and lighting a plurality of LEDs each disposed at one of plurality of positions in one plane by an LED driving circuit, obtaining an image data showing a luminance distribution of the reflected light form the measurement site through a camera by a calculator each time light is emitted and, estimating an emitting angle of the light when the luminance of the reflected light becomes peak based on image data and emitting angle of the light corresponding to each LED by the calculator.

Abstract: A non-reciprocal nephelometer is disclosed herein that uses an integrating sphere with attached truncation-reduction tubes to contain the sample volume and to integrate the scattered light. The disclosed nephelometer improves on the imperfect angular response by using an integrating sphere design with forward (backward) truncation angles of ?1° (?179°), it reduces sampling losses by employing a substantially straight vertical flow path. In one disclosed embodiment, an illumination assembly consisting of one or multiple diffuse light sources is provided for homogenously illuminating the integrating sphere. An illumination aperture admits light from the light sources, a sensing aperture admits scattered light to an optical detector, and a dark aperture provides a dark background viewing area for the optical detector.

Abstract: A test and measurement system to assess performance characteristics of an endoscope or other optically based diagnostic or treatment devices. The performance characteristics can include the photometric characteristics, the imaging characteristics and the physical characteristics of the structural elements including mechanical, pneumatic and fluidic systems. The system comprises software and related devices for calibrating the measurement devices, collecting and controlling measurements, analyzing measurements and comparing them to established performance criteria. The system also analyzes previous measurements and provides analysis and reports to assess trends and plan for replacement or servicing.

Abstract: The disclosed light standard system provides flat field illumination through the use of an integrating light chamber which is in communication with a microprocessor. The light chamber has at least one high performance light source, such as LED's, recessed within the walls and positioned to prevent light from directly exiting the chamber. A photosensor monitors multiple parameters within the chamber and interacts with the microprocessor to control intensity, temperature and wavelengths. The lights standard operates in benchmark, ratio light, linearity and transient response modes with all parameters being programmable and storable within said microprocessor.

Abstract: Apparatus for optical inspection includes a source of optical radiation, which is adapted to scan a spot of the radiation over a sample, whereby the radiation is scattered from the spot. A detection system includes at least first and second detectors optically coupled to receive the scattered radiation and to generate respective first and second outputs responsive thereto, the detection system being configured so that the first detector detects variations in the scattered radiation with a greater sensitivity than the second detector, while the second detector saturates at a higher intensity of the scattered radiation than does the first detector. A signal processor is coupled to receive the first and second outputs and to determine, responsive to the outputs, locations of defects on the sample.

Abstract: A spectrophotometric system includes a zoom lens assembly that is mounted for axial translation relative to an integrating sphere. The zoom lens assembly includes first and second focusing lens mounted to an axially movable lens carrier. The lens carrier is positioned intermediate first and second sets of mirrors for reflecting/directing SCE and SCI beams toward fiber ports. A reference beam is also emitted from the integrating sphere and transmitted to a processor, thereby resulting in simultaneous tri-beam measurements. The disclosed spectrophotometric systems may also include an aperture plate detection assembly and/or a sample holder assembly that incorporates a dampening gas spring. The aperture plate detection system includes a detection disk that may include a plurality of pre-positioned sensors that interact with an activating ridge formed on the aperture plate for identification thereof.

Abstract: A test and measurement system to assess performance characteristics of an endoscope or other optically based diagnostic or treatment devices. The performance characteristics can include the photometric characteristics, the imaging characteristics and the physical characteristics of the structural elements including mechanical, pneumatic and fluidic systems. The system comprises software and related devices for calibrating the measurement devices, collecting and controlling measurements, analyzing measurements and comparing them to established performance criteria. The system also analyzes previous measurements and provides analysis and reports to assess trends and plan for replacement or servicing.

Abstract: A radiometrically stable, spectrally tunable, solid-state source combines the radiometric outputs of individually controlled, narrow bandwidth, solid-state sources (e.g., LEDs) with different spectral distributions in an integrating sphere so as to approximate any desired spectral distribution. By using a sufficient number of independent solid-state source channels, the source can be tuned to approximate the spectral distribution of any desired source distribution. A stable reference spectroradiometer, integrated into the solid-state light source, measures the spectral radiance or irradiance and is used to adjust the output of the individual channels of the individually controlled sources.

Abstract: A method is provided for determining one or more reflectance properties of a surface using a portable apparatus that includes reflecting a first beam of electromagnetic energy off of a measured surface, the first beam contacting the measured surface at an angle that is near normal to the measured surface. The method also includes reflecting a second beam of electromagnetic energy off of the measured surface, the second beam contacting the measured surface at an angle that is near grazing to the measured surface. Reflected portions of the first and second beams of electromagnetic energy are then collected and at least one reflectance characteristic value associated with the measured surface is determined based on the reflected portions of the first and second beams of electromagnetic energy.

Abstract: A plurality of image sensors are tested concurrently by supplying light emitted by a light source to a first integrating sphere having an input port that receives the light emitted by the light source and having an output port providing output light. The output light of the first integrating sphere is spatially divided to provide a plurality of divided lights and the plurality of divided lights are supplied to a plurality of second integrating spheres respectively, each second integrating sphere having an input port that receives a divided light and an output port providing an output light. The output lights of the second integrating spheres are directed onto active regions of respective image sensors.

Abstract: A prober for measuring the light output of digital devices integrally formed on a single wafer. The prober includes a light-integrating sphere sequentially aligned with selected devices. Each time that a device is aligned with the sphere, the device aligned with the sphere is activated, so that the light output of each device is individually measured. In the disclosed embodiment, the devices are vertical cavity surface emitting lasers (VCSELs) and light emitting diodes (LEDs).

Abstract: A test and measurement system to assess performance characteristics of an endoscope or other optically based diagnostic or treatment devices. The performance characteristics can include the photometric characteristics, the imaging characteristics and the physical characteristics of the structural elements including mechanical, pneumatic and fluidic systems. The system comprises software and related devices for calibrating the measurement devices, collecting and controlling measurements, analyzing measurements and comparing them to established performance criteria. The system also analyzes previous measurements and provides analysis and reports to assess trends and plan for replacement or servicing.

Abstract: Object: provide an accurate monitor of light of even intensity light. Construction: A beam splitter (4) being fixed on a base (1) in the path of a main beam (2) of a light system, a reflecting mirror (5) being fixed on a side of the beam splitter (4), an inlet 6a of an integrating sphere (6) is provided at an opposite side of the beam splitter (4), and a light sensor (8) is provided at a reflecting surface of the integrating sphere (6).

Abstract: In a detector for spectrometry attached to an integrating sphere, a plurality of detection elements having different spectral sensitivity characteristics is arranged side by side in the same plane on a base, and a side cover is provided such that the detection elements receive light. Thus, the measurement light is directly irradiated to the respective detection elements. Accordingly, the detector for spectrometry has a fast response speed and is excellent in the sensitivity characteristics in a wide wavelength region in the near-infrared area.

Abstract: A light integrator produces diffuse illumination from a beam of light wherein image artifacts due to debris within the integrator are suppressed. The light integrator includes an integrator block having an elongated cylindrical light integrating cavity enclosed by end walls and a longitudinal cylindrical chamber wall having a diffusely reflecting interior surface The chamber wall includes a longitudinally extending output slit for emitting light from the cavity. A dust-free zone exists within the cavity in the shape of a sector of a circle within which contaminants cannot come to rest without producing visible artifacts, wherein the origin of the sector is located at or nearby a plane of the original. An elongated light pipe extends into the cavity through one of the end walls, where the light pipe has an input port at one end thereof for introducing the beam of light and a treatment along its length for emitting light entering its port into the cavity.

Abstract: A method for characterizing a surface are disclosed. The system includes a light source optic which direct a beam of light toward the surface. Scattered light and a spectacular beam are reflected from the surface. A collector collects the scattered light and directs the scattered light to a detector. The detector measures the intensity of the scattered light. A shutter is advanced into position to intersect the scattered light and to block a segment not having substantially any anisotropic light scatter. The shutter further passes another segment having substantially all of the anisotropic light scatter. The detector measures the intensity of the passed segment. A roughness ratio indicative of the anisotropic roughness to the isotropic roughness is produced by evaluating the total intensity of the scattered light and the intensity of the passed segment.

Abstract: A media width detecting system is adapted to measure an absolute width of media without the need for human intervention or without the need for media to be referenced against a known location. The media width detecting system includes a measuring pattern that is provided across a media path for media. The measuring pattern can be in the form of, for example, a bar code pattern. The system further includes a reader that is provided relative to the measuring pattern so as to read the width of the measuring pattern. When media traverses the measuring pattern, a portion of the measuring pattern, for example, a subset of the bars of the bar code pattern, is covered by the media. The reader would then be adapted to determined a width of the measuring based on the covered portion of the media pattern in relation to the uncovered portion or uncovered bars.

Abstract: A method and apparatus for irradiating a specimen with a beam of radiation are provided. The method comprises the steps of providing an integrating sphere, a radiation source radiatively communicating with the sphere, and a specimen, the integrating sphere radiatively communicating with the specimen through an aperture in the sphere. The apparatus comprises a radiation source, an integrating sphere in radiative communication with the radiation source, and a specimen holder in radiative communication with the integrating sphere. The disclosed apparatus and method allow the irradiance of a beam of radiation impinging on the specimen to be maintained at a uniform level across the width of the beam to allow quantitative specimen evaluation.

Abstract: A laser beams inspection apparatus suitable for inspecting electronic components such as ICs mounted on a substrate. The inspection apparatus includes a scan mechanism. The scan mechanism works to move a laser beam emitted from a laser emitter to scan a target one of electronic components in a given scan range. The scan mechanism is designed to change orientation of emission of the laser beam to change the scan range as a function of the type (e.g., the size) of the target electronic component, thereby minimizing inspection errors regardless of the type of the electronic components to be inspected.

Abstract: A semiconductor wafer examination system can accurately and reliably detects defects of semiconductor wafers. The semiconductor wafer examination system 1 comprises a defect classification device for automatically classifying defects of semiconductor wafers on the basis of defect detection parameters and a knowledge base and a classification support device for supporting the operation of the defect classification device. The defect detection parameters define the permissible deviation of the surface image of a defective semiconductor wafer from that of a normal semiconductor wafer. The knowledge base contains data for the types of defects that can occur in semiconductor wafers and data for showing the characteristics of each type. The classification support device prepares data on isolated defective areas that are used for selecting and/or altering the defect detection parameters and preparing the knowledge base.

Abstract: A gas detecting apparatus includes a gas cell, a laser source, a light diffuser and a photodetector. The gas cell has a gas inlet hole for letting the target gas come inside and a gas discharge hole for discharging the target gas, and retains a target gas to be detected. The laser source emits coherent light into the gas cell in order to detect a concentration of the target gas. The light diffuser is disposed in the optical path of the coherent light output from the laser source to diffuse the coherent light, thereby eliminating coherence of the coherent light. The photodetector receives light diffused by the light diffuser.

Abstract: An apparatus for collecting and sensing light in a projector, comprising a cold mirror positioned directly in the incident light path from a lamp and illumination optics of the projector for reflecting a large portion of visible light towards a light imaging device while transmitting IR and UV light and a small portion of the visible light; a secondary mirror for reflecting the small portion of the visible light, an integrating box positioned to collect and integrate the small portion of visible light, a light tube in optical communication with the integrating box for further integrating and attenuating the small portion of visible light, and an electro-optic device within the light tube for measuring the small portion of visible light within the light tube and generating an electrical signal in response thereto.

Abstract: Calibration is provided for a diffuser panel (30) on board a spacecraft (10) employed in measuring the intensity of sunlight reflected from subjects on the earth. The calibration is accomplished by comparing the intensity of solar radiation reflected from the panel with the intensity of the solar radiation incident directly from the sun. The comparison is obtained by directing both radiation into an integrating sphere (60) through separate ports (62, 64) which are sized to admit substantially equal amounts of power of the reflected and the direct radiations. A detector (76) detects an average value of intensity of the reflected radiation while the direct rays are excluded by a shutter (94). Upon an opening of the shutter and a deflecting of the diffuser panel from the calibrating position, the detector detects the average value of radiation intensity from the direct rays of the sun.

Abstract: Object: provide an accurate monitor of light of even intensity light. Construction: A beam splitter (4) being fixed on a base (1) in the path of a main beam (2) of a light system, a reflecting mirror (5) being fixed on a side of the beam splitter (4), an inlet 6a of an integrating sphere (6) is provided at an opposite side of the beam splitter (4), and a light sensor (8) is provided at a reflecting surface of the integrating sphere (6).

Abstract: A color measurement instrument with improved sample targeting or positioning. The system includes an integrating sphere, a beam splitter, a video camera, and a spectrograph. The beam splitter is aligned with the viewing port of the spectrophotometer to deliver the light reflected from the sample to both the video camera and the spectrograph. The video camera provides an image of the position of the sample with respect to the viewing port of the sphere, enabling the visual observation and evaluation of the sample position prior to use of the spectrophotometer.

Abstract: A method and apparatus for automatically inspecting transparent or translucent materials, especially plastic materials, the apparatus including a light container, at least one camera, a digital processor, and a reject mechanism, the method comprising conveying a particle of the material through the light container, capturing an image of the particle with the camera, identifying defects in the image with the digital processor, and separating out defective material by communication between the digital processor and the reject mechanism. The light container is an illumination device, preferably an integrating sphere, that has two opposing openings through which a particle can pass and one or more other openings or windows through which one or more cameras view the particle.

Abstract: Apparatus for optical inspection includes a source of optical radiation, which is adapted to scan a spot of the radiation over a sample, whereby the radiation is scattered from the spot. A detection system includes at least first and second detectors optically coupled to receive the scattered radiation and to generate respective first and second outputs responsive thereto, the detection system being configured so that the first detector detects variations in the scattered radiation with a greater sensitivity than the second detector, while the second detector saturates at a higher intensity of the scattered radiation than does the first detector. A signal processor is coupled to receive the first and second outputs and to determine, responsive to the outputs, locations of defects on the sample.

Abstract: A system and method of utilizing spherical and hemispherical shaped devices to function as an optical switch is disclosed. The optical switch can contain mirrors that turn on and off, or are fixed in place with a movable spherical device. Additionally, the optical switches can contain grating patterns to deflect an optical signal from its original path. The grating patterns can vary in design and pattern to deflect the optical signal in almost any direction, or to not let the optical signal continue. The optical switch can also include photo sensors along the exterior of the sphere or along the reflection device. The optical switch can also include an integrated circuits.

Abstract: A light integrating interface having a housing made substantially of pressed polytetrafluoroethylene powder. The interface has a non-spherical integrating cavity with a reflective inner surface, as well as a light energy input port and a light energy output port operatively coupled to the integrating cavity.

Abstract: A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.

Abstract: An integrating sphere, and an integrating sphere-based reflectance colorimeter/spectrophotometer for the measurement of color and appearance, having multiple receivers capable of concurrently receiving optical radiation scattered/reflected from a diffusely illuminated sample surface, with the capability of multiple measurement modes (e.g., multiple specular component excluded (SCE), SCE and specular component included (SCI), multiple SCI), multiple areas-of-view for a given measurement mode, multiple viewing angles per measurement mode, and combinations thereof. An embodiment of the invention includes two SCI receivers and two SCE receivers, each disposed at an equal viewing angle relative to the sample surface. For each viewing mode, two sample areas-of-view are provided. The SCE receivers are opposite each other, such that the specular component of each SCE receiver is excluded by the port of the other SCE receiver.