Abstract: An inspection system and method is provided herein for increasing the detection range of the inspection system. According to one embodiment, the inspection system may include a photodetector having a plurality of stages, which are adapted to convert light scattered from a specimen into an output signal, and a voltage divider network coupled for extending the detection range of the photodetector (and thus, the detection range of the inspection system) by saturating at least one of the stages. This forces the photodetector to operate in a non-linear manner. However, measurement inaccuracies are avoided by calibrating the photodetector output to remove any non-linear effects that may be created by intentionally saturating the at least one of the stages. In one example, a table of values may be generated during a calibration phase to convert the photodetector output into an actual amount of scattered light.

Abstract: The invention relates to an optical inspection station (1) comprising: an illumination system (6) capable of delivering a series of light beams illuminating an inspection region of the object at various angles of incidence; a camera (8) equipped with a lens for producing images of the inspection region during rotation of the object (2); and a unit for analyzing and processing the images taken by the camera so as to detect the presence of reflecting defects in the images. According to the invention, the optical inspection station includes a series of optical elements (11) for deflecting, in the air, rays reflected by the inspection region, these being placed between the inspection region and the lens so as to form, in each image, a series of views of the inspection region taken at different angles of viewing.

Abstract: An apparatus which measures a size and a shape of a transparent sheet includes a conveyor, a lighting apparatus, an imaging device and a process controller. The conveyor moves the transparent sheet. The lighting apparatus projects light onto the transparent sheet. The imaging device receives reflected light reflected from the transparent sheet. A thickness is input into the process controller. A sheet temperature from a sheet temperature sensor and/or a structure temperature from a structure temperature sensor are output to the process controller. An image is output from the imaging device to the process controller. The process controller outputs the size and the shape of the transparent sheet. The outputs from the process controller are used to adjust machine tools used to fabricate the transparent sheet.

Abstract: A system for inspecting container bottoms with an observation device, which observe the container bottoms, with a plurality of viewing windows, which are arranged underneath the container bottoms and which have viewing sections, through which the observation device observes the container bottoms, where the viewing windows are mounted in a carrier plate. Also, holding devices are provided, which transport the containers a certain distance above the carrier plate, and the viewing sections are at least partially offset from a projection of the containers in a direction perpendicular to the carrier plate.

Abstract: An apparatus can correctly discriminate between types of a recording medium, and obtain good fixed image by performing fixing in the optimum fixing conditions for a variety of different types of recording media. The apparatus includes an LED 101 serving as a first irradiation section, an LED 104 serving as a second irradiation section, a phototransistor 103 serving as a first reading section, and a phototransistor 102 serving as a second reading section. The light output from the LED 101 operating as the light source and passing through a slit 111 illuminates a surface of recording paper P on a recording paper conveyance guide 105. Besides, the recording paper conveyance guide 105 has a window opened for illuminating the recording paper from its underside in the present embodiment. The reflected light from the recording paper P is gathered via slits 112 and 113 and is received by the phototransistors 102 and 103.

Abstract: When measuring an edge region, a photo detector with an angle not influenced by the diffracted light, the diffracted light causing noise, is selected to thereby allow for inspection that minimizes the sensitivity reduction. This allows for the management of foreign matters in the outer peripheral portion, which conventionally could not be measured, and this also eliminates the oversight of critical defects on the wafer, thus leading to reduction of failures of IC.

Abstract: A method of measuring the topography of a large, thin, non-flat specular substrate in a production environment with minimal movement of a majority of the measurement apparatus. A gimbal-mounted reflecting element is used to steer a short coherence length probe beam such that the probe beam is substantially perpendicular to a local surface of the substrate. The probe beam and the reference beam are combined and the resulting interference pattern used to characterize defects on the local surface.

Abstract: The invention generally relates to a compact, inexpensive-to-manufacture, device of few components for optically inspecting a surface and a method for same employing the device. The section of the surface to be investigated is illuminated by a semitransparent mirror and a field lens, employing a telecentric beam path, and at least part of the light reflected or scattered by the surface is imaged onto the entrance pupil of the optics of an electronic camera by the field lens, via the semitransparent mirror. All optical and electronic components, along with a light- and dust-tight housing, are carried on a specially configured mounting block such that they are self-aligning. The method for inspecting a surface involves automatically recording a series of images of the surface under various types of illumination situations. Those images are assembled into an image of the entire section of the surface to be investigated and analyzed using known image-processing methods.

Abstract: The surface of an epitaxial wafer is inspected using an optical scattering method. The intensities of light scattered with a narrow scattering angle and light scattered with a wide scattering angle reflected from laser light scatterers (LLS) on the wafer surface are detected. If the intensifies of narrowly and widely scattered lights are within a prescribed sizing range, it is judged whether the laser light scatterer is a particle or killer defect by deciding into which zone (410, 414, 418, 439) within the sizing range the PLS size based on the narrowly scattered light intensity and the PLS size based, on the widely scattered light intensity fall. If the intensity of the narrowly or widely scattered light exceeds the sizing range (417, 420, 421, 423, 424, 425), or if a plenty of laser light scatterers are continuous or concentrated (422), the laser light scatterers are judged to be killer defects.

Abstract: The invention relates to an apparatus for forming or working optical elements and/or optical forming elements (1) comprising a working apparatus (18) for forming surfaces of form parts by machining or an abrasive technique, wherein at least one measuring device (17) is provided for measuring changes in form and/or surface roughness of said surface when said surface is being worked and, on the basis thereof controlling said working apparatus (18).

Abstract: In order to realize an inspection with higher accuracy of an excrescence adhering to a front or rear surface of an inspection subject, the present invention provides an inspection apparatus including, a stage allowing an inspection subject to be mounted thereonto, an illumination unit for emitting diffused light to the inspection subject, an imaging unit disposed to face the illumination unit with the inspection subject interposed therebetween, for taking the diffused light that is emitted from the illumination unit and is transmitted through the inspection subject, a first refracting member disposed between the inspection subject and the illumination unit, and the first refracting member having a first convex surface to face the illumination unit, a second refracting member disposed between the illumination unit and the first refracting member, and the second refracting member having a second convex surface to face the first convex surface, and a processing unit inspecting the inspection subject based on a r

Abstract: Inclusions in a transparent panel (5) are detected by placing a light transmissive interface (3) in contact with the panel (5), and transmitting a beam of light (1) through interface (3) into panel (5). Within the panel (5), the light beam (7) propagates along a path including total internal reflections at surfaces of panel (5). When the light beam (1) intercepts inclusions (10) or other defects at least some of it is scattered, and leaves the panel (5). This scattered light is then observed. Thus, a large zone of the panel (5) can be inspected, with light only being detected in the case that it arises from scattering by inclusions or other defects.

Abstract: Apparatus for inspecting contour of a container sidewall includes at least one light source for directing light energy onto the container sidewall and at least one light sensor disposed to receive light energy from the light source reflected from the container sidewall. The light sensor is responsive to such reflected light energy to provide signals indicative of position of the container sidewall relative to the sensor at at least two locations on the container sidewall spaced from each other in the direction of the container axis. An information processor is responsive to such signals to determine contour of the container sidewall as a function of sidewall positions at such locations. The at least two locations on the container sidewall preferably are nominally aligned with each other in a direction parallel to the container axis.

Abstract: The invention relates to a device and a corresponding method for detecting scratches on the surface (2) of a material, in particular glass. Said device comprises an illumination unit (3) and a recording unit (4), which register a scanning line (6) on the surface (2) of the material and can be displaced in relation to said surface (2). In order to more accurately identify scratches, the illumination unit (3) comprises at least one light strip (9), which generates parallel light pools transversally to the scanning line (6), said pools being diffuse or quasi-diffuse along the scanning line (6) and preferably at least one light source (16), which generates a diffuse or quasi-diffuse light transversally to the scanning line (6).

Abstract: A method for measuring the sagging of a glass panel in the process of bending the glass panel on a ring mould. The method includes measuring the sagging at a glass panel's measuring point and the measurement data is applied to control progress of the bending process, especially heating of the glass panel or abortion of the bending process. A reference plane stationary with respect to the ring mould is established, a distance gauge is used for measuring a distance between the reference plane and the distance gauge, and a distance gauge is used for measuring a distance between the glass panel's measuring point and the distance gauge. The glass panel's sagging is determined by comparing the distance between the reference plane and the distance gauge to the distance between the glass panel's measuring point and the distance gauge.

Abstract: An optoelectronic sensor device is described for recording of soiling on a transparent cover, with at least one light source that emits at least two light beams, a test surface arranged in the cover, having a concave surface exposed to environmental effects, through which the light beams emerge and reenter, as well as at least one receiver that measure the radiation powers of the light beams, on which the light beams are imaged independently of each other after reentry.

Abstract: An apparatus for identifying the condition of a conveyor belt (6) has a capturing device (12) which can be used to capture two-dimensional images (B) of successive belt sections (15) of the conveyor belt (6) during operation of the conveyor belt (6). The capturing device (12) and the evaluation device (13) have a data-processing connection, so that the captured images (B) can be transmitted to the evaluation device (13). The evaluation device (13) compares the images (B) transmitted to it with two-dimensional reference images (R) which are associated with the belt sections (15), determines at least one statement about the condition of the belt on the basis of the comparison, and outputs the statement about the condition of the belt.

Abstract: Disclosed is a method for the detection and quantification of defects in transparent substrates and, more particularly, in glass sheets. The method comprises providing a transparent planar substrate having a top surface and a bottom surface. The surface topography of at least a portion of the top surface of the provide transparent planar substrate is measured to obtain a three dimensional top surface profile having a sub-nanometer level of precision. From the three dimensional surface profile measurement, the existence of one or more surface variations in the three dimensional surface profile having an amplitude greater than a predetermined tolerance can be identified and/or quantified.

Abstract: In an optical method for determining surface defects and/or material shortage on the neck ring (3) of a container having an axis of symmetry (X) comprises illuminating the surface(s) of the neck ring (3) of the container with an incident light beam, a uniform ring of light (C) is obtained that converges towards a point of convergence located on the axis of symmetry (X) of the container with a variable diameter (D) and/or variable width (E). The diameter (D) of the convergent ring of light (C) at a given value in relation to a desired mean angle of incidence (?) to illuminate the surface of the neck ring (3) of the container and/or the width (E) of the convergent uniform ring of light (C) at a given value in relation to the width (L) of surface of the neck ring (3) of the container are selected.

Abstract: There is disclosed a defect inspection apparatus, wherein a light source projects a linear light onto a transparent film to inspect, so that a light receiver receives light beams transmitted through the film. The light receiver is placed to look down the film, with its optical axis inclined by a cross angle ?1 to a normal line that is perpendicular to the film surface, and the cross angle ?1 is set in a range from 30° to 50°. The optical axis of the light receiver is also turned about the normal line by a rotational angle ?2 to a transport direction (S) of the film. The rotational angle ?2 is set in a range from minus 60° to plus 60°, on the assumption that the transport direction is zero degree.

Abstract: A focused light beam is directed onto a surface patch of a mask and decomposed into partial beams by diffraction at a structure formed on the surface of the mask. Detectors are set such that the intensity of at least two orders of diffraction can be measured. The measured intensities are compared with one another. By way of example, a quotient can be ascertained. The operations are repeated for adjacent surface patches. If the absolute values of the measured intensities fluctuate with a constant quotient, then a variation of the reflection or transmission over the surface of the mask is inferred. If the quotient varies as well, then line width fluctuations within the structure on the mask are inferred.

Abstract: A minute groove M1 is formed from one end 101a of a division-planned line 101 to the other end 101b thereof by use of a cutter 14A by moving a first working head A, and while the groove M is being irradiated with laser beam L, inspection is performed by use of an inspection device 15 to check whether or not a crack has propagated from the groove M1 and division has been performed. Storage means 13A stores the position of an undivided portion on the basis of a detection signal of this inspection device 15. Thereafter, after the backward movement of the first working head 7A, the undivided portion is again irradiated with laser beam L, with the above-described cutter 14A supported above, whereby the undivided portion is completely divided. Material glass 2 can be divided exactly according to the division-planned line 101 without forming a groove M double in the division-planned line 101.

Abstract: The condition of a glazing panel (2) is investigated using a viewing device (1) to view an illuminating electromagnetic radiation profile at a target zone. Data relating to the viewed radiation profile is compared to datum data, to produce an output related to the condition of the glazing panel at the target zone.

Abstract: An apparatus and method for detecting defects in a transparent substrate by simultaneously using a combination of bright field and dark field light sources for illuminating the substrate. The apparatus is capable of detecting both inclusions and surface defects simultaneously while the substrate is in motion, simplifying the characterization of substrates in a manufacturing setting.

Abstract: The invention provides a device to inspect an illumination optical device and a method to inspect an illumination optical device that make it possible to efficiently inspect illumination optical devices and to control manufacturing cost. A lens array inspecting device is provided with a light source device to emit a parallel luminous flux, lens array holders to retain lens arrays, which are test objects that split the parallel luminous flux into a plurality of partial luminous fluxes, and a ground glass on which the optical images of the luminous fluxes emitted through the lens arrays are projected. On the ground glass, a parting frame appropriate to a design illumination region is formed. Therefore, whether the lens arrays are defective or non-defective can be determined by checking whether the optical images projected onto the ground glass include the area of the parting frame.

Abstract: Methods for measuring laser light transmissivity of a specific position in a work piece prior to the work piece undergoing laser welding at the specific position with a laser beam having a specific welding wavelength. To obtain a baseline measurement reading, a laser light source projects a laser beam at the welding wavelength directly into a detector. Thereafter, the work piece becomes suspended between the laser light source and detector whereby an output of the detector now corresponds to a work piece measurement reading. Differences between the two readings reveal whether the work piece will yield a satisfactory weld at the specific position when later welded by a laser beam at the welding wavelength. Preferred work pieces include inkjet printhead lids and bodies.

Abstract: Spatial filtering is disclosed that improves the signal to noise ration of a sample inspection system of the type having a detector and collection optics that receive radiation scattered from a point on a sample surface and direct the scattered radiation toward the detector. The spatial filtering may screen the detector from substantially all of the forward-scattered radiation from back-scattered radiation that is scattered in a at an elevation angle less than about 45° with respect to a normal to the surface. Forward scattered noise is screened from the detector while backscattered signal reaches the detector. Programmable spatial filters may be used to selectively block scattered noise due to surface roughness while transmitting scattered signal due to surface defects.

Abstract: Apparatus (10) for measuring absolute specular reflectance of a surface of a sample (22) includes a sample holder (12), a light source (18) for transmitting an incident light beam (16) onto a surface of the sample (22) and a detector (26 ) for detecting a specularly reflected component of the incident light. The light source (18), sample holder (12) and detector (26) are mounted and operatively associate (14, 24, 28) to be relatively moveable to vary the angle of incidence of light (16) onto sample (22) and to correspondingly automatically vary the relative position of the detector (26) such that the angle of reflection equals the angle of incidence. In the absence of the sample (22) or upon removal of the sample holder (12), light (16) impinges directly onto detector (26) to directly allow measurement of the absolute intensity of the light beam (16) as a reference measurement. This avoids the need to use intervening optical components such as mirrors which may degrade over time.

Abstract: An object detection apparatus for a vehicle includes a light emitter covered with an emission window, a light receptor covered with a reception window, a defect detection light emitter, a defect detection light receptor and a fracture detection circuit. The light emitter emits a light in front of the vehicle. The light receptor receives the light reflected by an object. The defect detection light emitter emits a detection light into one side of at least one of the emission and reception windows. The defect detection light receptor receives the detection light transmitted through the at least on emission and reception windows at another side. The fracture detection circuit determines whether either of the emission and reception windows are fractured based on the detection light received by the defect detection light receptors.

Abstract: A method and system of evaluating a turbine component comprises obtaining data relating to respective surface conditions at a plurality of different surface locations of the turbine component and calculating the total profile efficiency loss for the turbine component based on the data. Calculating the total profile efficiency of the turbine component may include calculating the local profile efficiency loss percentage for each of the surface conditions at the different surface locations (and/or sub-areas of the different surface locations) and calculating an average of the local profile efficiency loss percentages, each of the local efficiency loss percentages being weighted by respective predetermined weight factors. The turbine component may be a nozzle or a bucket and each of the turbine component's surface locations may be an admission suction surface, an admission pressure surface, a discharge suction surface or a discharge pressure surface.

Abstract: A method of detecting a distortion on a surface is described. A layer of liquid crystal material is formed on the surface with molecules of the material aligned in planes parallel to the surface. The molecules in each select plane have axes aligned with one another. A phase shift of electromagnetic radiation is detected. The phase shift is due to a distortion in the alignment of the molecules out of a select plane in a region of and due to the distortion on the surface.

Abstract: Methods for measuring laser light transmissivity of a specific position in a work piece prior to the work piece undergoing laser welding at the specific position with a laser beam having a specific welding wavelength. To obtain a baseline measurement reading, a laser light source projects a laser beam at the welding wavelength directly into a detector. Thereafter, the work piece becomes suspended between the laser light source and detector whereby an output of the detector now corresponds to a work piece measurement reading. Differences between the two readings reveal whether the work piece will yield a satisfactory weld at the specific position when later welded by a laser beam at the welding wavelength. Preferred work pieces include inkjet printhead lids and bodies.

Abstract: The invention relates to a method for optical inspection with a scanner which is arranged for detection and measurement of defects in or on a material which is inspected. The inspection takes place in successive sweeps essentially in the transverse direction of the material, with each respective sweep corresponding to a plurality of pixels in said scanner. The invention is characterized in that it comprises a rolling buffer storing at least one sweep which precedes another sweep in which at least one pixel indicates triggering corresponding to a detected defect in the material. The invention also relates to a device for such inspection. By means of the invention, an improved measurement accuracy is obtained when detecting defects using the measurement system described.

Abstract: A monitoring apparatus and method for measuring light output gradient of a faceplate panel includes a top plate having a center detector and a plurality of corner detectors mounted along a major surface thereof. Lenses are optically coupled to a respective detector, and radiometers are electrically coupled to a respective detector. A bottom plate spaced apart from the top plate has a plurality of light outputs mounted along a major surface thereof and positioned to be opposite each detector. A light source is optically coupled to each light output through a splitter. A computer is electrically coupled to the light source for receiving feedback therefrom and for controlling the light source. The computer is also electrically coupled to each radiometer for recording data therefrom. During monitoring, a faceplate panel having a matrix applied thereto is accurately positioned between the top and bottom plates such that the center detector is located approximately above the center of the faceplate panel.

Abstract: The system has a single pulse spectrum capability for sensing the presence of contamination on a surface to be interrogated. The system includes a narrow frequency bandwidth visible pulse and broadband infrared pulse that are directed to the surface. An output wavelength discriminator receives the reflected sum-frequency that is generated. The output wavelength discriminator is substantially non-transmissive at the frequencies of the visible pulse and the infrared pulse, but is substantially transmissive at the sum-frequency of the visible pulse and the infrared pulse. The output of the wavelength discriminator is a broadband output. A frequency disperser receives the output of the wavelength discriminator and provides a physical separation of output wavelengths of the broadband output. A multi-channel analyzer analyzes the intensity of the physically separated output wavelengths as a function of their physical positions.

Abstract: Detecting a defect in the sample is accomplished by photoacousticly exciting acoustic longitudinal, surface Rayleigh, and shear waves at a first point on a near surface of a sample; photoacoustically detecting acoustic waves at a second point spaced from the excitation first point for intercepting shear waves reflected from the far surface of the sample at approximately the angle of maximum shear wave propagation; and detecting the energy level of the intercepted reflected shear waves representative of the flaw in the sample.

Abstract: A support structure utilizes a combination of positive pressure openings and negative pressure openings to precisely position a workpiece, such as a sheet of float glass. The positive pressure openings are supply openings that direct a flow of fluid, such as air, onto the surface of the workpiece. The negative pressure openings are exhaust openings that are used to regulate the leakage of fluid from between the workpiece and the support structure. In the preferred embodiment, the surface of the support structure includes raised regions that surround the exhaust openings and that function as self-regulating pinch valves. This arrangement enables an equilibrium condition to be quickly established and maintained upon placement of the workpiece on the support structure.

Abstract: A surface inspection system and method is provided which detects defects such as particles or pits on the surface of a workpiece, such as a silicon wafer, and also distinguishes between pit defects and particle defects. The surface inspection system comprises an inspection station for receiving a workpiece and a scanner positioned and arranged to scan a surface of the workpiece at the inspection station. The scanner includes a light source arranged to project a beam of P-polarized light and a scanner positioned to scan the P-polarized light beam across the surface of the workpiece. The system further provides or detecting differences in the angular distribution of the light scattered from the workpiece and for distinguishing particle defects from pit defects based upon these differences.

Abstract: A system for regulating gate oxide layer formation is provided. The system includes one or more light sources, each light source directing light to one or more gate oxide layers being deposited and/or formed on a wafer. Light reflected from the gate oxide layers is collected by a measuring system, which processes the collected light. The collected light is indicative of the thickness and/or uniformity of the respective gate oxide layers on the wafer. The measuring system provides thickness and/or uniformity related data to a processor that determines the thickness and/or uniformity of the respective gate oxide layers on the wafer. The system also includes a plurality of gate oxide layer formers where each gate oxide former corresponds to a respective portion of the wafer and provides for gate oxide layer formation thereon. The processor selectively controls the gate oxide layer formers to regulate gate oxide layer formation on the respective gate oxide layer formations on the wafer.

Abstract: A system for regulating nitrided gate oxide layer formation is provided. The system includes one or more light sources, each light source directing light to one or more nitrided gate oxide layers being deposited and/or formed on a wafer. Light reflected from the nitrided gate oxide layers is collected by a measuring system, which processes the collected light. The collected light is indicative of the nitrogen concentration of the respective nitrided gate oxide layers on the wafer. The measuring system provides nitrogen concentration related data to a processor that determines the nitrogen concentration of the respective nitrided gate oxide layers on the wafer. The system also includes one or more nitrided gate oxide layer formers where a nitride gate oxide former corresponds to a respective portion of the wafer and provides for nitrided gate oxide layer formation thereon.

Abstract: Apparatus for spatial filtering includes a Fourier lens, adapted to collect radiation emitted from a point and to separate the collected radiation into spatial components in a Fourier plane of the lens, and a programmable spatial filter, positioned at the Fourier plane. An image sensor is optically coupled to capture an image of the spatial components of the collected radiation in the Fourier plane, while the components are incident on the filter. A filter controller is coupled to receive and analyze the image captured by the image sensor and, responsive thereto, to control the spatial filter so as to block one or more of the spatial components.

Abstract: A system and method of visually inspecting a transparent body and a translucent body comprises applying light to a reverse surface of an object to be inspected by a transmission light source, and applying light, at a low angle, to at least one of an obverse surface and the reverse surface of the object to be inspected by a reflection light source. Concave defects and adherents of the object to be inspected are detected by use of transmitted light emitted from the transmission light source, and adherents of the object to be inspected are detected by use of reflected scattered light emitted from the reflection light source.

Abstract: A device for inspecting solder connections between a component and a substrate or between two components or substrates, wherein the component is disposed upon the surface of the substrate, the device including an image receiving unit. An image transmitting device, the image transmitting device including a first end and a second end, the first end coupled to the image receiving unit. A tip assembly removably coupled to the second end of the image transmitting device, the tip assembly further including a mirror and an image receiving aperture, the tip assembly configured to transmit an image of the solder connections received by the mirror, through the image transmitting device, to the image receiving unit, and an illumination device, the illumination device including a light source, at least one light transmitting device, and at least one light emitting aperture disposed adjacent the image receiving aperture, the light emitting aperture directed towards the solder connections to be inspected.

Abstract: A surface inspection system and method is provided which detects defects such as particles or pits on the surface of a workpiece, such as a silicon wafer, and also distinguishes between pit defects and particle defects. The surface inspection system comprises an inspection station for receiving a workpiece and a scanner positioned and arranged to scan a surface of the workpiece at the inspection station. The scanner includes a light source arranged to project a beam of P-polarized light and a scanner positioned to scan the P-polarized light beam across the surface of the workpiece. The system further provides for detecting differences in the angular distribution of the light scattered from the workpiece and for distinguishing particle defects from pit defects based upon these differences.

Abstract: The invention relates to a method for detecting optical errors, especially in refractive power, in large surface panels made of transparent material such as glass, by evaluating an observed image. The steps of the inventive method include: projection of a defined model consisting of regular sequences, whereby the sequences includes two varying light intensities and arrangement of the panel in the optical path of projection. The inventive method enables detection of optical errors in at least one dimension of a panel without a reference screen by projecting the model onto a camera, whereby a model sequence is respectively represented on a certain number of adjacent camera pixels and the number is an integral multiple of the sequence.

Abstract: A substrate treating method and apparatus which can perform in-situ monitoring of surface state of a semiconductor substrate. The substrate treating apparatus comprises substrate treating means for subjecting the substrate to a required treatment, means for condensing infrared radiation emitted by an infrared radiation source onto an outer peripheral part of the substrate and introducing the infrared radiation into the substrate, means for detecting the infrared radiation which has undergone multiple reflection inside the substrate and exited from the substrate, means for analyzing the detected infrared radiation, means for monitoring the surface state of the substrate, and control means for controlling the substrate treating means, based on the monitored surface state of the substrate.

Abstract: An inspection system for the edge of a sheet of glass e.g. automobile glass. The system has at least one laser, with the laser beam directed at the edge of the glass. Light reflected from the edge is recorded e.g. with a camera. The path length from the laser to the glass edge and back to the camera is maintained constant as the glass moves through the apparatus.

Abstract: An image processing system is disclosed. The system includes a first light source operable to illuminate an image plane in a first direction and a second light source operable to illuminate the image plane from a second direction. Also included is a sensing device operable to detect light from the first and second light source that interacted with the image plane. A processor operable to receive information from the sensing device and determine an image and image defects is coupled to the sensing device.

Abstract: A method and structure for improving a coating on a substrate comprises a chamber further comprising a rotatable holder, which holds the substrate; a supply of coating material for coating the substrate in the chamber; a window in the wall of the chamber; and a supply of liquid for coating at least a portion of the window on the interior side of the chamber. The chamber is preferably adapted to house the window in multiple configurations. A camera (or other optical detector), which is positioned outside of the chamber, monitors the substrate through the window.

Abstract: The invention concerns a method and device for automatic cleaning of opto-electronic measuring systems used in process-technology for the analysis of substances in liquids and gases by means of optical absorption and fluorescence. The method is characterized in that the soiling degree is detected by the opto-electronic sensor system itself and, with predetermined soiling degree, a cleaning liquid cleans the soiling-sensitive optical components and detects the residual soiling, which is then evaluated quantitatively and compensated for in the signal analysis.