With Aperture Mask Patents (Class 356/310)
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Patent number: 7248358Abstract: A spectral measurement device comprising an entrance aperture for receiving an electromagnetic energy and a mask located at the entrance aperture in the form of a two-dimensional encodement pattern. An optical element conditions the electromagnetic energy received from the mask for presentation to the spectral dispersion element and the and a spectral dispersion element disperses the electromagnetic energy in one or more dimensions. Additionally, the optical element conditions the dispersed electromagnetic energy onto an array of detector elements.Type: GrantFiled: October 4, 2005Date of Patent: July 24, 2007Assignee: Plain Sight Systems, Inc.Inventors: Frank Geshwind, Ronald R. Coifman, Andreas Coppi, Richard A. Deverse, William G. Fateley
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Publication number: 20070165220Abstract: A spatial filter for an optical system, such as an optical spectrometer, collects and spatially filters light using a fiber bundle having a plurality of fibers disposed therein. At an input end of the fiber bundle, the fibers are typically packed tightly together to optimize the collection efficiency. At an output end, the fibers are spread out from the fiber bundle and arranged within a two-dimensional output area according to a two-dimensional pattern corresponding to a coded aperture function. As a result, the two-dimensional pattern of the output end spatially filters the light collected by the input end. Corresponding methods are also described.Type: ApplicationFiled: June 2, 2006Publication date: July 19, 2007Inventors: David J. Brady, Prasant Potuluri, Michael E. Sullivan
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Patent number: 7180588Abstract: A spectral measurement device comprising an entrance aperture for receiving an electromagnetic energy and a mask located at the entrance aperture in the form of a two-dimensional encodement pattern. An optical element conditions the electromagnetic energy received from the mask for presentation to the spectral dispersion element and the and a spectral dispersion element disperses the electromagnetic energy in one or more dimensions. Additionally, the optical element conditions the dispersed electromagnetic energy onto an array of detector elements.Type: GrantFiled: March 7, 2005Date of Patent: February 20, 2007Assignee: Plain Sight Systems, Inc.Inventors: Frank Geshwind, Ronald R. Coifman, Andreas Coppi, Richard A. Deverse, William G. Fateley
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Patent number: 7167292Abstract: The invention provides a spectroscope that provides variable masks 24a and 24b that limits the light path of separated light beams in the spectrum direction and composite masks 24c and 24d that limit the same in the perpendicular direction. In addition, the invention provides a confocal scanning microscope that equipped with this spectroscope.Type: GrantFiled: January 29, 2004Date of Patent: January 23, 2007Assignee: Olympus CorporationInventor: Takehiro Yoshida
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Patent number: 7126682Abstract: Spectroscopic system and spectrometers including an optical bandpass filter unit having a plurality of bandpass regions and a spatial encoding unit for encoding discrete frequencies of light passing through the optical filter. The incorporation of the encoding unit allows the spectrometer system to use a detector having one or a small number of elements, rather than using a more expensive detector array typically used with filter-based spectrometers. The system can also include an integrating chamber that collects the light that is not transmitted through the bandpass filter unit, and redirects this light to strike the filter unit again, resulting in a significant increase in the optical power passing through the filter. The integrating chamber maximizes the return of the reflected light to the filter assembly and minimizes optical losses. The integrating chamber may be an orthogonal design to preserve the optical geometric characteristics of the light entering the chamber.Type: GrantFiled: April 11, 2001Date of Patent: October 24, 2006Assignee: Rio Grande Medical Technologies, Inc.Inventors: Robert K. Rowe, Russell E. Abbink, Stephan P. Corcoran
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Patent number: 7123398Abstract: Device (1) and method for delimiting a field (3) impinged with light from a light source (2), particularly on the surface of an optical element (4) and/or sample (5), having a slit diaphragm (6) including a slit height (7) and a slit width (8), which includes first and second linearly movable slides (9, 9?), positioned parallel to one another on two separate parallel lines, which are movable at least partially symmetrically to one another in relation to an optical axis (10), each of the two slides (9, 9?) including at least one optical opening (11, 11?), which—for continuous adjustment of at least the slit height (7) or the slit width (8)—may be positioned at least partially on the optical opening (11?, 11) of the neighboring slide (9?, 9) in the region of the optical axis (10).Type: GrantFiled: July 12, 2004Date of Patent: October 17, 2006Assignee: Tecan Trading AGInventors: Lutz Niggl, Karl Puchegger
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Patent number: 7102752Abstract: An analyzer useful in determining the presence of an analyte using a diffraction based sensing device and methods and systems using this device. The present invention may be used with a variety of different diffraction-based diagnostic methods and systems. The analyzer enhances the accuracy and/or usefulness of these devices in detecting analytes, while providing more ease-of-use and convenience to the user. The analyzer may include a light source, a photodiode, a microprocessor and a display system for informing the user of the result. Other features include mirrors, lenses, a sample holder, and a mask for blocking out some light. The analyzer and related method and system may be used in a large number of environments, including commercial, professional, and individual.Type: GrantFiled: December 11, 2001Date of Patent: September 5, 2006Assignee: Kimberly-Clark Worldwide, Inc.Inventors: Rosann Marie Kaylor, Difei Yang, Zdravko Savov Atanassov, Michael Eugene Knotts
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Patent number: 7068368Abstract: An internal qualities inspection system having a receiving tray for placing an inspecting object thereon with a receiving seat and a transmission light passage formed in the receiving tray is arranged to detect light transmitted through the object from below the receiving tray. The inspection system is capable of efficiently detecting the transmission light from inside of each of inspecting objects of varied shapes and varied kinds by adjusting the quantity of light projected on the object according to its size and kind. The system includes in combination a light receiving part and a calibration arrangement which are not affected by any disturbance light to ensure a highly reliable measuring accuracy.Type: GrantFiled: September 21, 2000Date of Patent: June 27, 2006Assignee: Kabushikikaisha KajitsuhihakaihinshitsukenkyujoInventors: Atsuhiro Nagayoshi, Hiromu Maeda
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Patent number: 6999165Abstract: Method and apparatus for analyzing radiation using analyzers and encoders employing the spatial modulation of radiation dispersed by wavelength or imaged along a line.Type: GrantFiled: May 3, 2001Date of Patent: February 14, 2006Assignee: Aspectrics, Inc.Inventor: Thomas W. Hagler
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Patent number: 6995840Abstract: Method and apparatus for analyzing radiation using analyzers and encoders employing the spatial modulation of radiation dispersed by wavelength or imaged along a line.Type: GrantFiled: March 6, 2003Date of Patent: February 7, 2006Assignee: Aspectrics, Inc.Inventor: Thomas W. Hagler
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Patent number: 6982788Abstract: A disc serving as a spatial radiation modulator has dispersed radiation filters thereon. Each filter has a transmittance or reflectance modulation function of the form sin2(m?+p?/4), where m is a positive integer and p has one of the four values 0, 1, 2, 3. A radiation beam including selected wavelength components is diffracted into an elongated image dispersed according to wavelength. Different wavelength components are focused onto different filters on the modulator and are encoded by correspond filters. Since the modulation functions of the filters are orthogonal to one another, it is possible to extract the amplitude of each wavelength component after it has been encoded or modulated by corresponding filter from the total detected signal during one measurement.Type: GrantFiled: June 4, 2004Date of Patent: January 3, 2006Assignee: Aspectrics, Inc.Inventor: Thomas W. Hagler
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Patent number: 6930774Abstract: Apparatus and methods are disclosed for providing a desired spectral intensity profile from a broadband light source. The apparatus comprises separation means for separating light provided by the broadband light source into radiation having a continuum of wavelengths; a blocking element having a first side and a second side, the first side having a two-dimensional surface with a desired blocking contour configured thereon, the blocking element positioned relative to the separation means so as to receive the radiation separated into the continuum of wavelengths onto the first side thereof and allow a portion of the radiation to pass from the first side to the second side, wherein the portion of the radiation conforms to the desired blocking contour; and recombination means for recombining the portion of the radiation conforming to the desired blocking contour into the desired spectral intensity profile.Type: GrantFiled: May 1, 2003Date of Patent: August 16, 2005Inventor: David A. Morrison
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Patent number: 6897952Abstract: A disc serving as a spatial radiation modulator has dispersed radiation filters thereon. Each filter has a transmittance or reflectance modulation function of the form sin2(m?+p?/4), where m is a positive integer and p has one of the four values 0, 1, 2, 3. A radiation beam including selected wavelength components is diffracted into an elongated image dispersed according to wavelength. Different wavelength components are focused onto different filters on the modulator and are encoded by corresponding filters. Since the modulation functions of the filters are orthogonal to one another, it is possible to extract the amplitude of each wavelength component after it has been encoded or modulated by corresponding filter from the total detected signal during one measurement.Type: GrantFiled: June 25, 1999Date of Patent: May 24, 2005Assignee: Advanced Photometrics, Inc.Inventor: Thomas W. Hagler
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Patent number: 6870619Abstract: An entrance slit of the spectrometer is illuminated with optical radiation. An optical component images the entrance slit to an optical modulator by the optical radiation and disperses the optical radiation into a spectrum. The spectrum is modulated by the optical modulator The optical component composes spectral non-dispersive measurement radiation of the spectrum and images the entrance slit included in the measurement radiation to an exit slit which may be the same one as the exit slit or a different one. Measurement radiation is detected from the entrance slit with a detector, which converts the measurement radiation into an electrical measurement signal.Type: GrantFiled: September 27, 2000Date of Patent: March 22, 2005Assignee: Valtion Teknillinen TutkimuskeskusInventors: Jussi Tenhunen, Jouko Malinen, Markku Känsäkoski
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Patent number: 6864975Abstract: The present invention proposes a method of and system for analyzing samples (particularly, bio-samples), wherein the continuous spectrum white light pulse generated from an ultra-short optical pulse is used in a simple manner. By a system according to the invention, continuous spectrum white light pulses generated by converging ultra-short optical pulses on a point in a transparent substance 23 are dispersed into a spectrum of light by a dispersing element 25, and a plurality of objective wavelength components are separately selected by small reflection mirrors 37, masked mirrors or the like. The selected objective wavelength components are combined by the dispersing element 25 into a composite optical pulse containing the objective wavelength components. The composite optical pulse is irradiated onto the bio-sample 28 or other samples, whereby only the desired fluorescent substances are excited by the objective wavelength components corresponding to them.Type: GrantFiled: December 5, 2002Date of Patent: March 8, 2005Assignee: Shimadzu CorporationInventors: Kazuyoshi Itoh, Kiichi Fukui, Kunihiko Ohkubo
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Patent number: 6859275Abstract: Encoded spatio-spectral information processing is performed using a system having a radiation source, wavelength dispersion device and two-dimensional switching array, such as digital micro-mirror array (DMA). In one aspect, spectral components from a sample are dispersed in space and modulated separately by the switching array, each element of which may operate according to a predetermined encoding pattern. The encoded spectral components can then be detected and analyzed. In a different aspect, the switching array can be used to provide a controllable radiation source for illuminating a sample with radiation patterns that have predetermined characteristics and separately encoded components. Various applications are disclosed.Type: GrantFiled: March 1, 2001Date of Patent: February 22, 2005Assignee: Plain Sight Systems, Inc.Inventors: William G. Fateley, Ronald R. Coifman, Frank Geshwind, Richard A. DeVerse
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Patent number: 6801359Abstract: The invention relates to an optical arrangement provided for a spectral fanning out of a light beam (1), preferably the detection beam path of a confocal microscope, especially for the subsequent splitting of the fanned out beam (2) out of the dispersion plane thereof. The optical arrangment is also provided for detecting the fanned out spectral regions (4), whereby the incoming light beam (1) is focused on a pinhole (7). The invention is characterized in that the pinhole (7) has a polygonal passageway (8) in order to realize a high dynamic response when the light beam is split into spectral regions (4) or into spectral colors.Type: GrantFiled: July 27, 2000Date of Patent: October 5, 2004Assignee: Leica Microsystems Heidelberg GmbHInventors: Johann Engelhardt, Heinrich Ulrich, Hilmar Gugel
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Publication number: 20040174522Abstract: Method and apparatus for analyzing radiation using analyzers and encoders employing the spatial modulation of radiation dispersed by wavelength or imaged along a line.Type: ApplicationFiled: May 3, 2001Publication date: September 9, 2004Inventor: Thomas W. Hagler
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Patent number: 6762833Abstract: A disc serving as a spatial radiation modulator has dispersed radiation filters thereon. Each filter has a transmittance or reflectance modulation function of the form sin2(m&thgr;+p&pgr;/4), where m is a positive integer and p has one of the four values 0, 1, 2, 3. A radiation beam including selected wavelength components is diffracted into an elongated image dispersed according to wavelength. Different wavelength components are focused onto different filters on the modulator and are encoded by correspond filters. Since the modulation functions of the filters are orthogonal to one another, it is possible to extract the amplitude of each wavelength component after it has been encoded or modulated by corresponding filter from the total detected signal during one measurement.Type: GrantFiled: February 1, 2002Date of Patent: July 13, 2004Assignee: Advanced Photometrics, Inc.Inventor: Thomas W. Hagler
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Patent number: 6680778Abstract: A remote sensing method for detecting and analyzing gases, vapors and flame plumes using an imaging spectrometer. The spectrometric instrument uses Image Multispectral Sensing (IMSS) technology, enhanced by advanced imaging processing techniques and micro-miniature circuitry. These enhancements provide a portable instrument with the capability to remotely detect and image gases, including gas leaks. The technology also provides an analysis of the gas including chemical species and concentrations. The instrument can also remotely detect, image and analyze flames and plumes in the same manner, providing an analysis of the chemical species and concentrations in the flame. Advanced image processing techniques are used to provide gas and plume images and analysis to the operator. These processing algorithms are implemented in micro-miniature circuits such as digital signal processors (DSP's) and field programmable gate arrays (FPGA's) to provide a field portable instrument.Type: GrantFiled: November 8, 2001Date of Patent: January 20, 2004Inventors: Michele Hinnrichs, Robert Hinnrichs
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Patent number: 6667215Abstract: A method for making transistors comprises depositing source electrode and drain electrode features onto a substrate through a single aperture in a stationary shadow mask, said aperture having at least two opposing edges; wherein the shapes of the features are defined by the aperture and location of source materials in relation to the substrate.Type: GrantFiled: May 2, 2002Date of Patent: December 23, 2003Assignee: 3M Innovative PropertiesInventors: Steven D. Theiss, Paul F. Baude, Michael A. Haase, Silva K. Theiss
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Patent number: 6665068Abstract: An arrangement for wavelength-dependent adjustment of light beam, preferably laser radiation of different wavelengths, preferably in a laser scanning microscope, wherein the light beam is split by a dispersive element and reaches a concave mirror, and an adjustable device for at least partially cutting out individual wavelengths or wavelength ranges of the incident and/or reflected beam is located in front of the concave mirror.Type: GrantFiled: October 13, 2000Date of Patent: December 16, 2003Assignee: Carl Zeiss Jena GmbHInventors: Guenter Schoeppe, Stefan Wilhelm
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Patent number: 6657722Abstract: An object of inside-quality inspection being conveyed on a conveyer is irradiated sideways with beams of light from projection lamps concentratedly. A photodetecting device detects light transmitted through the object irrespective of the size and thickness of the skin of the object without being influenced by extraneous light. A white-level calibrating device is provided to the photodetecting means. The projection lamps project and concentrate their beams of light onto one side of the object in an inspection position at different angles from different positions diagonally distributed from the oblique front to the oblique back. Fractions of light transmitted through the object and emerging from the other side of the object are condensed by a condenser lens A shutter for opening/closing the optical path is provided between a light receiving window of the condenser lens and a light-inputting face of an optical fiber for directing light to a spectrometer.Type: GrantFiled: December 20, 2001Date of Patent: December 2, 2003Assignee: Kabushikaisha KajitsuhihakaihinshitsukenkyujoInventor: Atsuhiro Nagayoshi
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Publication number: 20030203502Abstract: An exemplary system and method for detecting at least one analyte in a sample comprises inter alia a source of radiation (300), a near-field aperture array (315), a chromatographic field (330), a detector (350), and a data processor (370). Disclosed features and specifications may be variously controlled, adapted or otherwise optionally modified to improve detection of any sub-diffraction-limited scale phenomena. Exemplary embodiments of the present invention representatively provide for improved S/N, increased sample throughput, refined spectral resolution and enhanced detection sensitivity.Type: ApplicationFiled: April 30, 2002Publication date: October 30, 2003Inventors: Frederic Zenhausern, Chia-Fu Chou
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Patent number: 6580091Abstract: A top surface of a wafer is provided with an n-type source region, an n-type drain region, and an n-type semiconductor region. Dry etching using a plasma is performed with respect to an interlayer insulating film deposited on the wafer to form openings reaching the respective regions, followed by light etching for removing a damaged layer. In this case, exciting light is supplied intermittently to the n-type semiconductor region. The progression of the removal of the damaged layer and the stage of development of a newly damaged layer are sensed by monitoring the change rate of the intensity of reflected probe light in the presence and absence of the exciting light, resulting in the formation of a semiconductor device having low and equal contact resistance. In-line control using optical evaluation enables the implementation of semiconductor devices with excellent and consistent properties.Type: GrantFiled: July 5, 2000Date of Patent: June 17, 2003Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Koji Eriguchi, Takayuki Yamada, Masanori Okuyama
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Patent number: 6529276Abstract: In optical filter systems and optical transmission systems, an optical filter compresses data into and/or derives data from a light signal. The filter way weight an incident light signal by wavelength over a predetermined wavelength range according to a predetermined function so that the filter performs the dot product of the light signal and the function.Type: GrantFiled: April 6, 1999Date of Patent: March 4, 2003Assignee: University of South CarolinaInventor: Michael L. Myrick
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Patent number: 6504943Abstract: A programmable optical filter for use in multispectral and hyperspectral imaging. The filter splits the light collected by an optical telescope into two channels for each of the pixels in a row in a scanned image, one channel to handle the positive elements of a spectral basis filter and one for the negative elements of the spectral basis filter. Each channel for each pixel disperses its light into n spectral bins, with the light in each bin being attenuated in accordance with the value of the associated positive or negative element of the spectral basis vector. The spectral basis vector is constructed so that its positive elements emphasize the presence of a target and its negative elements emphasize the presence of the constituents of the background of the imaged scene. The attenuated light in the channels is re-imaged onto separate detectors for each pixel and then the signals from the detectors are combined to give an indication of the presence or not of the target in each pixel of the scanned scene.Type: GrantFiled: June 29, 1999Date of Patent: January 7, 2003Assignee: Sandia CorporationInventors: William C. Sweatt, Stephen M. Gentry, Clinton A. Boye, Carter L. Grotbeck, Brian R. Stallard, Michael R. Descour
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Patent number: 6495818Abstract: A microscopic hyperspectral imaging scanner has a microscopic front objective lens, a spatial window for selectively passing a portion of the image therethrough, and a CCD array for receiving the passed portion of the image. The spatial window and CCD array are mounted for tandem reciprocating movement relative to the front object lens. In one embodiment, the spatial window is a slit and the CCD array is one-dimensional, and successive rows of the image in the focal plane of the front objective lens are passed to the CCD array by an image relay lens interposed between the slit and the CCD array. In another embodiment, the spatial window is a slit, the CCD array is two-dimensional, and a prism-grating-prism optical spectrometer is interposed between the slit and the CCD array so as to cause the scanned row to be split into a plurality of spectral separations onto the CCD array.Type: GrantFiled: September 18, 2000Date of Patent: December 17, 2002Assignee: The Institute for Technology DevelopmentInventor: Chengye Mao
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Patent number: 6480273Abstract: A multispectral imaging system (1) and method utilize an optical processor (3) for simultaneously comparing an input wavelength spectrum observed in a single spatial pixel in a scene image from a multispectral imager (2) with a plurality of template wavelength spectra to find a correlation. The optical processor exploits the three-dimensional attributes of optical correlation to perform massively parallel correlation processing by modulating (4) respective ones of a plurality of spectral bands of the input wavelength spectrum of an incident light beam (6) with modulating elements (5) to alter at least one property of the incident light beam by a value corresponding to the observed intensity of the input spectrum in the respective spectral band. In a disclosed embodiment, the modulated beam is expanded and transited through a spatial light modulator (7) having a two-dimensional array of modulating elements.Type: GrantFiled: May 10, 2000Date of Patent: November 12, 2002Assignee: TRW Inc.Inventors: John C. Brock, Richard L. Davis
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Publication number: 20020057431Abstract: Encoded spatio-spectral information processing is performed using a system having a radiation source, wavelength dispersion device and two-dimensional switching array, such as digital micro-mirror array (DMA). In one aspect, spectral components from a sample are dispersed in space and modulated separately by the switching array, each element of which may operate according to a predetermined encoding pattern. The encoded spectral components can then be detected and analyzed. In a different aspect, the switching array can be used to provide a controllable radiation source for illuminating a sample with radiation patterns that have predetermined characteristics and separately encoded components. Various applications are disclosed.Type: ApplicationFiled: March 1, 2001Publication date: May 16, 2002Inventors: William G. Fateley, Ronald R. Coifman, Frank Geshwind, Richard A. DeVerse
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Publication number: 20020012120Abstract: A spectral rejection device for forming an image on an optical sensor, including a system for forming a beam of light rays coming from an observed scene, a scanning system, a system for spectrally dispersing the beam in a direction, at least one mask disposed on the path of the dispersed rays to intercept a narrow band of wavelengths, and a system for combining the dispersed rays into a beam of parallel rays focused by a lens onto an optical sensor.Type: ApplicationFiled: June 25, 2001Publication date: January 31, 2002Applicant: ARCHITECTURE, TRAITEMENT D'IMAGES ET SIMULATIONInventor: Yves Guern
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Patent number: 6288382Abstract: The micro-scanning multislit confocal image acquisition apparatus of the present invention is a confocal image acquisition apparatus that comprises a nonscanning multislit confocal image acquisition system using a slit array instead of a pinhole array and a multislit-image microscanning mechanism for moving the image of the slit array in a small back and forth motion with respect to the object during each exposure of the two-dimensional arrayed photodetector in one complete measurement. Microscanning the image of the slit array with an amplitude equal to half the distance between adjacent slits increase the aperture ratio of the pixels to 100 percent, reducing blind regions to zero. As a result, this apparatus can measure a small object that cannot be measured by a conventional nonscanning confocal image acquisition apparatus because of blind regions.Type: GrantFiled: October 14, 1999Date of Patent: September 11, 2001Assignee: Takaoka Electric Mfg. Co., Ltd.Inventor: Mitsuhiro Ishihara
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Publication number: 20010019408Abstract: A disc serving as a spatial radiation modulator has dispersed radiation filters thereon. Each filter has a transmittance or reflectance modulation function of the form sin2(m&thgr;+p&pgr;/4), where m is a positive integer and p has one of the four values 0, 1, 2, 3. A radiation beam including selected wavelength components is diffracted into an elongated image dispersed according to wavelength. Different wavelength components are focused onto different filters on the modulator and are encoded by correspond filters. Since the modulation functions of the filters are orthogonal to one another, it is possible to extract the amplitude of each wavelength component after it has been encoded or modulated by corresponding filter from the total detected signal during one measurement.Type: ApplicationFiled: May 1, 2001Publication date: September 6, 2001Inventor: Thomas W. Hagler
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Patent number: 6271917Abstract: A disc serving as a spatial radiation modulator has dispersed radiation filters thereon. Each filter has a transmittance or reflectance modulation function of the form sin2(m&thgr;+p&pgr;/4), where m is a positive integer and p has one of the four values 0, 1, 2, 3. A radiation beam including selected wavelength components is diffracted into an elongated image dispersed according to wavelength. Different wavelength components are focused onto different filters on the modulator and are encoded by correspond filters. Since the modulation functions of the filters are orthogonal to one another, it is possible to extract the amplitude of each wavelength component after it has been encoded or modulated by corresponding filter from the total detected signal during one measurement.Type: GrantFiled: June 26, 1998Date of Patent: August 7, 2001Inventor: Thomas W. Hagler
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Patent number: 6208413Abstract: The invention relates to a Hadamard spectrometer which enables the detection of a range of polyatomic gases or liquids for example using infrared absorption. The aim of the invention is to produce a spectrometer of this type which provides higher resolution, improved wavelength precision and an improved signal-to-noise ratio using conventional detector lines and which allows a small and compact design. To this end, a detector line (30) with a set interval (a) between the individual detector areas (31) is used for a detector unit (3), and a linear assembly (10) is also used for a light-emitting respective reflective assembly (1). The linear assembly includes (n) adjoining identical light sources (11, 12, 13, 14), n always remaining ≧3, which can be activated individually according to the Hadamard Principle.Type: GrantFiled: September 10, 1999Date of Patent: March 27, 2001Assignee: Institut fuer Physikalische Hochtechnologie e.V.Inventors: Torsten Diehl, Norbert Lenk, Rainer Riesenberg, Jürgen Schöneich
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Patent number: 6204941Abstract: An optical filtering device incorporates first and second prisms, the latter prism counteracting the angular dispersion of the former prism. A spatial light modulator provides a positionally variable optical stop located to block radiation within a wavelength interval and received from a location within a scene. Unobscured radiation from that and other scene locations passes to a camera, which produces an image on a display. Opaque pixels in the stop are positioned to block unwanted light sources. The invention attenuates potentially dazzling monochromatic radiation while retaining radiation at other wavelengths for imaging purposes.Type: GrantFiled: November 7, 1996Date of Patent: March 20, 2001Assignee: The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Northern IrelandInventors: Marc I J Beale, Meirion F Lewis
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Patent number: 6195412Abstract: A method for imaging a target volume comprises the steps of: radiating a small bandwidth of energy toward the target volume; focusing the small bandwidth of energy into a beam; moving the target volume through a plurality of positions within the focused beam; collecting a beam of energy scattered from the target volume with a non-diffractive confocal coded aperture; generating a shadow image of said aperture from every point source of radiation in the target volume; and, reconstructing the shadow image into a 3-dimensional image of the every point source by mathematically correlating the shadow image with a digital or analog version of the coded aperture. The method can comprise the step of collecting the beam of energy scattered from the target volume with a Fresnel zone plate.Type: GrantFiled: March 10, 1999Date of Patent: February 27, 2001Assignee: UT-Battelle, LLCInventors: Kenneth William Tobin, Jr., Clarence E. Thomas, Jr.
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Patent number: 6166373Abstract: A focal plane scanner having a front objective lens, a spatial window for selectively passing a portion of the image therethrough, and a CCD array for receiving the passed portion of the image. All embodiments have a common feature whereby the spatial window and CCD array are mounted for simultaneous relative reciprocating movement with respect to the front objective lens, and the spatial window is mounted within the focal plane of the front objective. In a first embodiment, the spatial window is a slit and the CCD array is one-dimensional, and successive rows of the image in the focal plane of the front objective lens are passed to the CCD array by an image relay lens interposed between the slit and the CCD array. In a second embodiment, the spatial window is a slit, the CCD array is two-dimensional, and a prism-grating-prism optical spectrometer is interposed between the slit and the CCD array so as to cause the scanned row to be split into a plurality of spectral separations onto the CCD array.Type: GrantFiled: July 21, 1998Date of Patent: December 26, 2000Assignee: The Institute for Technology DevelopmentInventor: Chengye Mao
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Patent number: 6128077Abstract: A confocal spectral imaging system comprises a light source, a light modulator forming an illumination aperture and directing an illumination pattern to conjugate object locations, and analyzing means with a detection aperture, dispersive elements and a detector, wherein the illumination and detection apertures are in conjugate optical planes, and the light modulator consist of an array of light modulator elements, a group of which being arranged according to the illumination pattern and forming the illumination aperture, and are controlled such that the illumination pattern is directed to time-dependent changing conjugate locations of the object.Type: GrantFiled: November 17, 1998Date of Patent: October 3, 2000Inventors: Thomas M. Jovin, Quentin Hanley, Peter Verveer
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Patent number: 6104486Abstract: A method of fabricating a semiconductor device includes the steps of illuminating a structure formed on a surface of a substrate by an incident optical beam incident to the structure with a predetermined incident angle with respect to the surface, measuring a polarization state of an exiting optical beam exiting from the structure in response to an illumination of the structure by the incident optical beam, and evaluating a size of the structure in a direction parallel to the surface from the polarization state of the exiting optical beam, and adjusting a parameter of production of a semiconductor device in response to the size.Type: GrantFiled: December 27, 1996Date of Patent: August 15, 2000Assignee: Fujitsu LimitedInventor: Hiroshi Arimoto
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Patent number: 6088096Abstract: An end-point detector for a plasma etcher, includes a converging lens for receiving strip-like plasma light produced between a pair of opposed electrodes and a spectroscope, having a slit located at a substantial rear-side focal plane of the converging lens, for detecting an etching end time point from a time-based variation of spectrum light intensity of the plasma light which has been converged at the slit and has passed through the slit. The converging lens has a pupil diameter of not greater than ##EQU1## where W is a width of a short side of the strip-like plasma light produced between the electrodes, 1 is a distance between an end of each electrode and a pupil face of the converging lens, NAm is a numerical aperture required by the spectroscope, and h is a width of a short side of the slit of the spectroscope. The converging lens has a numerical aperture of not less than NAm.Type: GrantFiled: June 12, 1998Date of Patent: July 11, 2000Assignee: Tokyo Electron LimitedInventors: Masahiro Aoki, Susumu Saito
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Patent number: 6078389Abstract: A method is presented to perform accurate property measurements using spectroscopic measurements at multiple wavelengths using nondispersed radiation with one, or sometimes two, detectors sensing all the requisite wavelengths simultaneously and calculating the value of the property by optical means. The heart of our invention is the utilization of an optical device opaque everywhere but at the finite and limited number of wavelengths where the transmittance measurements are being made, and whose transmittance at the measuring wavelengths is proportional to the coefficient for that wavelength in a predictive equation for the property value. The process which is our invention passes nondispersed light through a sample, with the transmitted light being led onto an optical device passing only the measuring wavelengths onto a detector.Type: GrantFiled: August 18, 1999Date of Patent: June 20, 2000Inventor: Mark S. Zetter
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Patent number: 6031609Abstract: Fourier transform spectrometer using a multielement liquid crystal display. A ferroelectric liquid crystal mask is used as an optical encoder for a solid-state Fourier transform spectrometer. A 1.times.64 element array was striped and used as a 1.times.4 element device. The device intersected dispersed radiation and encoded each spectral component thereof with a carrier signal by applying half-wave potentials to each of the four striped (1.times.16) liquid crystal elements which varied the transmitted amplitude of the light from 0.03% to 28% of full scale. The light was spectrally recombined and imaged onto a photomultiplier and the resulting carrier frequencies (and their amplitudes) detected by Fourier transformation of the time-varying signal. Spectra of colored-glass filters were taken to demonstrate the spectrometer.Type: GrantFiled: May 29, 1997Date of Patent: February 29, 2000Assignee: The Regents of the University of CaliforniaInventors: David J. Funk, David S. Moore
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Patent number: 5963320Abstract: A grating spectrometer employing digital control of an oscillating component (a mirror) and phase-locked digital recording of the intensity profile within the narrow spectral domain defined by an oscillation frequency. Flexible choice of oscillation frequency permits measurement in a quiet region of the noise spectrum. Reference waveforms acquired with the same insturment can be stored and later used to deconvolute a more complex spectrum. The use of multiple detector/slit combinations along a Rowland circle makes the spectrometer sensitive to specific atomic elements.Type: GrantFiled: June 8, 1998Date of Patent: October 5, 1999Assignee: General AtomicsInventors: Neil H. Brooks, Sergey N. Tugarinov, Nicolae N. Naumenko, Torkil H. Jensen, Daniel Finkenthal
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Patent number: 5923036Abstract: An infrared imaging microscope uses spatial encoding to divide an sample being examined into a plurality of pixel regions. The spatial encoding is provided by a digitally controlled mask, which is preferably a multiple mirror array, and which masks the imaging radiation directed from a radiation source to the sample. The signal reflected or transmitted from the sample is detected using a single-element detector. As the mask pattern provided by the mask changes, the output signal of the detector is monitored, and the spectroscopic composition of each of the pixel regions is resolved using a spatial decoding method, such as a Hadamard transform. The digital control of the mask allows fast, easily-implemented changes to the masking pattern, and provides a low processing load relative to imaging devices that use multiple-element detectors.Type: GrantFiled: February 11, 1997Date of Patent: July 13, 1999Assignee: Bruker Instruments, Inc.Inventors: Thomas J. Tague, Jr., Norman Mortensen, Michael K. Bellamy
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Patent number: 5867264Abstract: An apparatus for spectral detection of remote objects. The apparatus consists of an input optic which focuses the field of view onto an image receiving surface consisting of an addressable spatial mask. The mask sequentially projects portions of the scene onto a diffractive optical element which focuses onto a photodetector array. The first image receiving surface of mask is partitioned into independently addressable and controllable subsurfaces, or gates, adapted to receive an electronic control signal from a programmable control signal generator. Each gate in the receiving mask directs a portion of the image incident thereon to a diffractive lens in response to a control signal communicated thereto. This gated image is dispersed by the diffractive lens and focused upon the photosensitive surface of a photodetector array. The photodetector array is partitioned into pixels having a number in ratio to the gates in the addressable mask.Type: GrantFiled: October 15, 1997Date of Patent: February 2, 1999Assignee: Pacific Advanced TechnologyInventor: Michele Hinnrichs
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Patent number: 5815261Abstract: A spectrometer that determines a spectral correlation between an optical signal and a reference spectra over a broad spectral range while maintaining a relatively high resolution. The spectrometer uses a mask that has high resolution slits at wavelengths corresponding to the reference spectra. Relative oscillatory movement is induced between the mask and the imaged spectra of the optical signal is induced and the light passing through the slits is collected by an optical sensor. A lock-in amplifier monitors a signal from the optical sensor as well as a signal representative of the oscillatory movement and determines a correlation between them.Type: GrantFiled: April 16, 1997Date of Patent: September 29, 1998Assignee: General AtomicsInventors: Neil H. Brooks, Sergey N. Tugarinov, Nicolae N. Naumenko, Torkil H. Jensen
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Patent number: 5748308Abstract: The present invention provides a programmable filter for use as a standard in correlation spectrometers. Also provided is the use of the programmable standard in a process for determining the concentration of an optically absorbing compound. Also provided is a method and apparatus for noninvasively determining the concentration of an optically absorbing biological sample which incorporates the programmable standard of the invention.Type: GrantFiled: February 2, 1996Date of Patent: May 5, 1998Assignee: Abbott LaboratoriesInventors: John M. Lindberg, Robert Eric Heinz
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Patent number: 5737076Abstract: The invention relates to a procedure for determining an identification of a sample of material, or its properties. Electromagnetic radiation from a radiation source (1) is reflected or transmitted through the sample. The radiation from the sample is collected and analyzed over several channels (7, 7', 7"), which modulate the radiation with a spectral transmission function which is unique for each channel. The modulated radiation is transmitted to one or several detectors (9, 9', 9") which produce output signals which are further electronically processed. The spectral range of each of the individual channels is common to all of the channels. Within the common range the channels are provided with different spectral transmission functions (7, 7',7") which are optimally chosen for a given application.Type: GrantFiled: June 7, 1995Date of Patent: April 7, 1998Inventors: Ulrich Walter Glaus, Martin Labhart, Heinz Wagner
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Patent number: 5737075Abstract: A new system for millimeter wave electronic imaging is described. This system utilizes a spatial light modulator in the focal plane of the collection optics. Each pixel of the modulator is driven by a specific high duty cycle modulation function provided by a modulation function generation circuit. Thus the throughput radiation at each pixel is uniquely labeled(encoded). A post modulation detector sums the signal from all the pixels. Subsequent to detection, the appropriate transform of the sum signal yields specific pixel throughput radiation intensity levels. Several configurations are described including one transmittance configuration and two reflectance configurations. Three specific millimeter wave transmittance embodiments and one reflectance embodiment are also described.Type: GrantFiled: December 13, 1994Date of Patent: April 7, 1998Inventors: Mark E. Koch, William E. Case