Abstract: Systems and methods of performing a stress measurement of a chemically strengthened glass using a light-scattering polarimetry system include adjusting the intensity of a light beam from a light source in an illumination system using a rotatable half-wave plate and a first polarizer operably disposed between the light source and a rotating light diffuser that has a rotation time tR. The first polarizer is aligned with a second polarizer in a downstream optical compensator to have matching polarization directions by rotating the rotatable half-wave plate to a position where the exposure time tE falls within an exposure range tR?tE. The method also includes performing an exposure using the exposure time tE to obtain the stress measurement. One or both of the half-wave plate and first polarizer can be tilted to avoid deleterious back-reflected light from entering the light source.

Abstract: A metrology target for use in measuring misregistration between layers of a semiconductor device including a first target structure placed on a first layer of a semiconductor device, the first target structure including a first plurality of unitary elements respectively located in at least four regions of the first target structure, the first plurality of elements being rotationally symmetric with respect to a first center of symmetry and at least a second target structure placed on at least a second layer of the semiconductor device, the second target structure including a second plurality of elements respectively located in at least four regions of the second target structure, the second plurality of elements being rotationally symmetric with respect to a second center of symmetry, the second center of symmetry being designed to be axially aligned with the first center of symmetry and corresponding ones of the second plurality of elements being located adjacent corresponding ones of the first plurality of e

Abstract: An aerosol detector system is described for spatially resolved detection of an aerosol distribution in an area. The system includes a wide field polarization preserving telescope having telecentric imaging optics for imaging the earth surface onto a detector that receives phase stepped images from the telescope, A controller is arranged to provide a resulting image as a function of corresponding pixel values of the multiple images to produce an image at a spatially resolved polarization state corresponding to said aerosol substance.

Abstract: A catadioptric photographic lens include; a first reflecting mirror, a second reflecting mirror, and a lens group, arranged in order from an object so that light reflected by the first reflecting mirror is reflected by the second reflecting mirror before passing through the lens group and forms an image of the object upon a predetermined image plane wherein; the first and the second reflecting mirror are off-center on the reference plane; reflection surfaces of the first and the second reflecting mirror are rotationally asymmetric aspheric surfaces; the reflection surface of the first reflecting mirror is concave toward the object on the reference plane and on the first orthogonal plane; and the surface closest toward the second reflecting mirror in the lens group having two lenses made from the same optical material as one another is a rotationally asymmetric aspheric surface.

Abstract: Methods, devices and systems for up to three-dimensional scanning of target regions at high magnification are disclosed.

Abstract: An apparatus for identifying defects within the volume of a transparent sheet, such as a glass sheet, is provided. The apparatus includes an illumination device that directs incident light onto at least a portion of a surface of the sheet so as to illuminate the sheet, and an image detector onto which the light backscattered from the sheet is directed to image the sheet. The apparatus generates at least two interference images under different capturing conditions in order to perform identification of defects by evaluating the at least two interference images.

Abstract: A segmented mask includes a set of cell structures, wherein each cell structure includes a set of features having an unresolvable segmentation pitch along a first direction, wherein the unresolvable segmentation pitch along the first direction is smaller than the illumination of the lithography printing tool, wherein the plurality of cell structures have a pitch along a second direction perpendicular to the first direction, wherein the unresolvable segmentation pitch is suitable for generating a printed pattern for shifting the best focus position of the lithography tool by a selected amount to achieve a selected level of focus sensitivity.

Abstract: An optical apparatus has a light detecting section which detects light and emits transmitted light where linearly polarized light, which is converted by a polarizing section, is transmitted through a subject. In addition, the optical apparatus has an orthogonal separating section which orthogonally separates the emitted light from the light detecting section and a light reception section which receives light which is orthogonally separated by the orthogonal separating section. A calculation apparatus outputs a rotation control signal to a rotation apparatus and rotation controls the light detecting section so that the rotation plane is orthogonal with regard to an optical path of the transmitted light. Then, the calculation apparatus measures the polarization state of the transmitted light, which is transmitted through the subject S using the intensity with which the light, is received by the light receiving section.

Abstract: A defect inspection apparatus includes: a seed light generator including a pulse signal generator that generates a pulse signal and a polarization modulator that outputs pulse light of any one of two polarization states orthogonal to each other in synchronization with the pulse signal output from the pulse signal generator; a wavelength converting unit including a branching mechanism that branches the pulse light output by the polarization modulator of the seed light generator using polarization and a converting unit that wavelength-converts the pulse light branched by the branching mechanism into beams of two different wavelengths, respectively; an illumination optical system that illuminates a surface of an inspected target material with the beams of the two different wavelengths converted by the wavelength converting unit; a detection optical system including a detecting unit that detects light generated by the beams of the two different wavelengths illuminated by the illumination optical system; and a sig

Abstract: A method for imaging skin includes illuminating a subject with at least one light source of one or more light sources. The method includes acquiring a first image of the subject in a first polarization with a respective photodetector of one or more photodetectors configured to acquire images of the subject as illuminated by the at least one light source, and acquiring a second image of the subject in a second polarization with the respective photodetector. The method also includes generating a subtraction image by subtracting at least a portion of the first image from a corresponding portion of the second image, and providing at least a portion of the subtraction image for display.

Abstract: An apparatus to calibrate a polarizer in a polarized optical system at any angle of incidence. The apparatus decouples the polarization effect of the system from the polarization effect of the sample. The apparatus includes a substrate with a polarizer disposed on the surface. An indicator on the substrate indicates the polarization orientation of the polarizer, which is in a predetermined orientation with respect to the substrate.

Abstract: Described herein are systems, devices, and methods facilitating optical characterization of scattering samples. A polarized optical beam can be directed to pass through a sample to be tested. The optical beam exiting the sample can then be analyzed to determine its degree of polarization, from which other properties of the sample can be determined. In some cases, an apparatus can include a source of an optical beam, an input polarizer, a sample, an output polarizer, and a photodetector. In some cases, a signal from a photodetector can be processed through attenuation, variable offset, and variable gain.

Abstract: A polarimeter based on coherent detection and a method for measuring the optical rotation of a polarized light beam by an optically active substance, while enabling the subtraction of background signals, are provided.

Abstract: A method to calibrate a polarizer in polarized optical system at any angle of incidence, by decoupling the calibration from a polarization effect of the system, by providing a calibration apparatus that includes a substrate having a polarizer disposed on a surface thereof, with an indicator on the substrate for indicating a polarization orientation of the polarizer, loading the calibration apparatus in the polarized optical system with the indicator in a desired position, determining an initial angle between the polarization orientation and a reference of the polarized optical system, acquiring spectra using the polarized optical system at a plurality of known angles between the polarization orientation and the reference of the polarized optical system, using the spectra to plot a curve indicating an angle of the polarizer in the polarized optical system, and when the angle of the polarizer is outside of a desired range, adjusting the angle of the polarizer, and repeating the steps of acquiring the spectra, a

Abstract: The present invention provides a tool for and method of using an infrared transmission technique to extract the full stress components of the in-plane residual stresses in thin, multi crystalline silicon wafers including in situ measurement of residual stress for large cast wafers. The shear difference method is used to obtain full stress components by integrating the shear stress map from the boundaries. System ambiguity at the boundaries is resolved completely by introducing a new analytical function. A new anisotropic stress optic law is provided, and stress optic coefficients are calibrated for different crystal grain orientations and stress orientations.

Abstract: An imaging system for imaging skin includes a light source to illuminate a subject and a first polarizer to polarize light provided by the light source to illuminate the subject. The imaging system also includes a photodetector to acquire an image of the subject as illuminated by the light source and an adjustable second polarizer, coupled to the photodetector, to provide an adjustable degree of polarization of light received by the photodetector.

Abstract: A wireless sub-surface soil sensor having a switchable configuration antenna that can be optimized for various soils is disclosed herein. The wireless sub-surface sensor also measures the moisture and salinity of a material. The wireless sub-surface sensor preferably includes a cover for protecting circuitry of the sensor. The wireless soil sensor is designed to be buried underground and to transmit to above ground receivers, which provide feedback for configuring the switchable antenna.

Abstract: A method to calibrate a polarizer in polarized optical system at any angle of incidence, by decoupling the calibration from a polarization effect of the system, by providing a calibration apparatus that includes a substrate having a polarizer disposed on a surface thereof, with an indicator on the substrate for indicating a polarization orientation of the polarizer, loading the calibration apparatus in the polarized optical system with the indicator in a desired position, determining an initial angle between the polarization orientation and a reference of the polarized optical system, acquiring spectra using the polarized optical system at a plurality of known angles between the polarization orientation and the reference of the polarized optical system, using the spectra to plot a curve indicating an angle of the polarizer in the polarized optical system, and when the angle of the polarizer is outside of a desired range, adjusting the angle of the polarizer, and repeating the steps of acquiring the spectra, a

Abstract: The present invention provides a tool for and method of using an infrared transmission technique to extract the full stress components of the in-plane residual stresses in thin, multi crystalline silicon wafers including in situ measurement of residual stress for large cast wafers. The shear difference method is used to obtain full stress components by integrating the shear stress map from the boundaries. System ambiguity at the boundaries is resolved completely by introducing a new analytical function. A new anisotropic stress optic law is provided, and stress optic coefficients are calibrated for different crystal grain orientations and stress orientations.

Abstract: A device (2) for evaluating the state of wetting of a surface (8) includes an emitter (4) emitting a beam (F, F1, F2) which is incident in the direction of the surface (8) and a single element (12) for receiving the beam reflected by the surface (8). The device includes: A polarization (10, 13, 14) including a first polarization zone (13) and a second polarization zone (14) designed to polarize a first part (F1) and a second part (F2) of the beam in a first and a second polarization direction; and a evaluation element (28) for calculating a polarization ratio between the polarizations of the first part of the reflected beam and the second part of the reflected beam to evaluate the state of wetting of the surface (8). Also described is an evaluation process and an associated indicator device.

Abstract: The present invention provides a tool for and method of using an infrared transmission technique to extract the full stress components of the in-plane residual stresses in thin, multi crystalline silicon wafers including in situ measurement of residual stress for large cast wafers. The shear difference method is used to obtain full stress components by integrating the shear stress map from the boundaries. System ambiguity at the boundaries is resolved completely by introducing a new analytical function. A new anisotropic stress optic law is provided, and stress optic coefficients are calibrated for different crystal grain orientations and stress orientations.

Abstract: An apparatus for detecting an edge of a transparent substrate includes a light source provided on a rear side of the edge of the transparent substrate, a first polarizer provided between the transparent substrate and the light source and arranged to convert light from the light source to linearly polarized light, a light receiving unit provided on a front side of the edge of the transparent substrate, and a second polarizer provided between the transparent substrate and the light receiving unit, and having a polarization axis that is perpendicular or substantially perpendicular to a polarization axis of the first polarizer.

Abstract: A method measuring the birefringence of an object. A measurement beam having a defined input polarization state is generated, the measurement beam being directed onto the object. Polarization properties of the measurement beam after interaction with the object are detected in order to generate polarization measurement values representing an output polarization state of the measurement beam after interaction with the object. The input polarization state of the measurement beam is modulated into at least four different measurement states in accordance with a periodic modulation function of an angle parameter ?, and the polarization measurement values associated with the at least four measurement states are processed to form a measurement function dependent on the angle parameter ?. A two-wave portion of the measurement function is determined and analysed in order to derive at least one birefringence parameter describing the birefringence, preferably by double Fourier transformation of the measurement function.

Abstract: A multi-layer overlay target for use in imaging based metrology is disclosed. The overlay target includes a plurality of target structures including three or more target structures, each target structure including a set of two or more pattern elements, wherein the target structures are configured to share a common center of symmetry upon alignment of the target structures, each target structure being invariant to N degree rotation about the common center of symmetry, wherein N is equal to or greater than 180 degrees, wherein each of the two or more pattern elements has an individual center of symmetry, wherein each of the two or more pattern elements of each target structure is invariant to M degree rotation about the individual center of symmetry, wherein M is equal to or greater than 180 degrees.

Abstract: A variety of toy polariscopes are simpler in design and less costly than precision instruments used in scientific research and stress analysis of materials and structures. The toy polariscopes are designed for a variety of objects that may exhibit photoelastic properties such as glass, plastic, Plexiglas, gel candle material and other gels, and even edible photoelastic objects. They are specially designed for objects of various sizes with a variety of purposes such as objects to enhance learning in a variety of conditions and experiences. Special objects are designed to go with the toy polariscopes such as edible and inedible photoelastic objects, photoelastic candle material, a variety of photoelastic/photoplastic stands capable of a variety of displays in interaction with other designed photoelastic objects capable of a variety of interaction and displays. Other optical phenomena may also be observed.

Abstract: An apparatus and method for detecting the presence of anisotropic crystals within a biologic fluid sample is provided. The method includes the steps of: a) disposing the sample within a sample chamber in a sample layer having a height riot greater than about fifteen microns (15?); b) disposing the sample layer within the sample chamber between a polarizing filter and an analyzing filter; a) disposing the polarizing filter, sample chamber, and analyzing filter in a configuration relative to a light source such that polarized light passes through the sample, and subsequently impinges on the analyzing filter; and d) wherein polar orientations of the polarizing filter and the analyzing filter are such that the polarized light will not pass through the analyzing filter, and light passing through an anisotropic crystal disposed within the sample will pass through the analyzing filter and appear as a point of light.

Abstract: A sensor for measuring living body information and a keypad assembly including the sensor includes a light guide panel for guiding a first light. A light extracting pattern is provided on the light guide panel for outputting the first light guided by the light guide panel to an exterior of the light guide panel. A light coupling pattern is provided on the light guide panel for changing a proceeding direction of a second light incident from the exterior of the light guide panel, so that the second light is guided by the light guide panel.

Abstract: A variety of toy polariscopes are simpler in design and less costly than precision instruments used in scientific research and stress analysis of materials and structures. The toy polariscopes are designed for a variety of objects that may exhibit photoelastic properties such as glass, plastic, Plexiglas, gel candle material and other gels, and even edible photoelastic objects. They are specially designed for objects of various sizes with a variety of purposes such as objects to enhance learning in a variety of conditions and experiences. Special objects are designed to go with the toy polariscopes such as edible and inedible photoelastic objects, photoelastic candle material, a variety of photoelastic/photoplastic stands capable of a variety of displays in interaction with other designed photoelastic objects capable of a variety of interaction and displays. Other optical phenomena may also be observed.

Abstract: In embodiments of the present invention a second, different waveplate is introduced into a single rotating compensator normal incidence ellipsometer. The second waveplate provides a quarter wavelength retardation that is different from and complementary to that of the first waveplate in order to increase the spectral range for which useful retardation is available, especially towards the deep UV spectrum. The sensitivity for the system may also be increased in the conventional spectral range, since each of the two waveplates may be optimized for its own, somewhat more narrow spectral range of operation. With the proper choice of two waveplates of different retardation, the useful spectral range may be extended from typically 190-820 nm to 150-1000 nm, and beyond if necessary, while increasing the sensitivity within the conventional wavelength range at the same time.

Abstract: Ellipsometry using two waveplates of complementary retardation in a dual rotating compensator configuration is disclosed. Two waveplates of complementary retardation may be used to increase the useful spectral range of a rotating compensator ellipsometer, in particular towards the deep Ultraviolet (UV) spectrum. The improved rotating compensating ellipsometer disclosed herein enables a user to select specific and different waveplate retardations for the purpose of increasing the operating wavelength range of the rotating compensating ellipsometer.

Abstract: An imaging polarimeter optics unit comprising: a first polarization-sensitive beam-splitter optic, a retarder, a second polarization-sensitive beam-splitter optic, and an analyzer, through which input light passes in sequence, wherein the retarder and polarization-sensitive beam-splitters cause the input light to have optical components that provide different information about the state of polarization of the input beam is provided.

Abstract: An imaging system for imaging skin includes a light source to illuminate a subject and a first polarizer to polarize light provided by the light source to illuminate the subject. The imaging system also includes a photodetector to acquire an image of the subject as illuminated by the light source and an adjustable second polarizer, coupled to the photodetector, to provide an adjustable degree of polarization of light received by the photodetector.

Abstract: Disclosed embodiments pertain to optical assemblies which impart a spatially dependent rotation to linearly polarized light. A pair of optical assemblies may be used to apply a spatially dependent rotation to linearly polarized light in the region between the optical assemblies, and produce a spatially independent rotation after traversing the second optical assembly. A pair of optical assemblies may be used in combination with a wave plate to allow a determination of the Stokes parameters of an elliptically polarized beam of light.

Abstract: Many suppliers claimed their products have been Tachyonized™ since the discovery and commercialization of Tachyonized™ products by Advanced Tachyon Technologies International. Genuine materials that have been Tachyonized have demonstrated a range of beneficial properties to biological organisms and processes. However, the market has been saturated with competitors making such claims without any foundation. Accordingly, the inventive process provides a simple and rapid test method to confirm the authenticity of Tachyonized materials.

Abstract: An inspecting method using an electro-optical detecting device is disclosed. The electro-optical detecting device includes: an upper substrate and a lower substrate; a nematic liquid crystal layer interposed between the upper substrate and the lower substrate; a transparent electrode interposed between the nematic liquid crystal layer and the upper substrate, the transparent electrode connected to a device under test (DUT) via a power supply; a polarizing plate located over the nematic liquid crystal layer; and a reflecting plate located under the nematic liquid crystal layer.

Abstract: A phase retardance inspection instrument, comprising: a light source module for generating a single-wavelength light beam; a circularly polarized light generating module, comprising a polarizer and a first phase retarder, for receiving the single-wavelength light beam as it is guided to passe through the polarizer and the first phase retarder in order; and a detecting module, comprising a second phase retarder, a polarizing beam splitter, a first image sensor and a second image sensor, for receiving and guiding a circularly polarized light beam to travel through the second phase retarder and the polarizing beam splitter in order after it passes through a substrate under inspection, wherein the polarizing beam splitter splits an elliptically polarized light beam into intensity vector components of a left-hand circularly polarized light beam and a right-hand circularly polarized light beam, which are to be emitted into the first image sensor and the second image sensor, respectively.

Abstract: The present invention relates to an optical device for assessing optical depth (D) in a sample (100) illuminated by polarized radiation (20) from a source (10). A first and a second radiation guide have their end portions (3Oa?, 30b?) arranged for capturing reflected radiation (25a, 25b) from the sample. A detector (40) measures a first polarization (P1) and a second polarization (P—2) of the reflected radiation (25), and a first and a second intensity (II, 12) of the reflected radiation (25a, 25b) in the first (30a) and the second (30b) radiation guide, respectively. Processing means (60) then calculates a first (f) and a second (g) spectral function, both spectral functions (f, g) being indicative of single scattering events in the sample.

Abstract: A sensor unit for measuring a response characteristic of a polarization rotation liquid crystal cell, includes a measurement light source which emits measurement light, a first polarization plate which has a first polarization direction and receives the measurement light from the measurement light source to output measurement light having the first polarization direction to a polarization rotation liquid crystal cell, a second polarization plate which has a second polarization direction and receives measurement light passed through the polarization rotation liquid crystal cell, a light receiving unit which receives measurement light passed through the second polarization plate, and a measurement unit which determines a response characteristic of the polarization rotation liquid crystal cell on the basis of a drive signal of the polarization rotation liquid crystal cell and the amount of measurement light received by the light receiving unit.

Abstract: Simultaneous measurement of two orthogonally polarized beams upon diffraction from a substrate is done to determine properties of the substrate. Linearly polarized light sources with their radiation polarized in orthogonal directions are passed via two non-polarizing beamsplitters, one rotated by 90° with respect to the other. The combined beam is then diffracted off a substrate before being passed back through a non-polarizing beamsplitter and through a phase shifter and a Wollaston prism before being measured by a CCD camera. In this way, the phase and intensities for various phase steps of the two polarized beams may thereby be measured and the polarization state of the beams may be determined. If the phase shifter is turned to zero (i.e. with no phase shifting), the grating of the substrate has its parameters measured with TE and TM polarized light simultaneously with the same detector system.

Abstract: Disclosed embodiments pertain to optical assemblies which impart a spatially dependent rotation to linearly polarized light. A pair of optical assemblies may be used to apply a spatially dependent rotation to linearly polarized light in the region between the optical assemblies, and produce a spatially independent rotation after traversing the second optical assembly. A pair of optical assemblies may be used in combination with a wave plate to allow a determination of the Stokes parameters of an elliptically polarized beam of light.

Abstract: Many suppliers claimed their products have been Tachyonized™ since the discovery and commercialization of Tachyonized™ products by Advanced Tachyon Technologies International. Genuine materials that have been Tachyonized have demonstrated a range of beneficial properties to biological organisms and processes. However, the market has been saturated with competitors making such claims without any foundation. Accordingly, the inventive process provides a simple and rapid test method to confirm the authenticity of Tachyonized materials.

Abstract: An underwater imaging system includes an underwater imaging polarimeter that captures images of the water surface. The captured images are indicative of the captured light, and are equivalent to four-component Stokes vector S=(I,Q,U,V) data. Advantageously, the passive imaging technique of the present invention utilizes polarmetric data. In contrast, conventional optical remote sensing techniques rely on light amplitude and frequency to carry information about the scattering surface. The imaging technique of the present invention exploits these properties, as well as the polarization properties of light to sense information about the scattering media. The two-dimensional slope field of surface wave can be recovered from a distance without interfering with the fluid dynamics of the air or water. By employing the physics of light scattering by a specular surface, the geometry of the surface can be found by measuring the polarimetric properties of the reflected and/or refracted light.

Abstract: An optical fiber sensor system includes an optical fiber. A linear polarizing component is configured to communicate with the optical fiber. The linear polarizing component includes a polarization sensing fiber to be disposed adjacent to and preferably collinear with the optical fiber. A light source communicates with the linear polarizing component for generating a light signal along the optical fiber. A reflector is disposed along the optical fiber for reflecting back the light signal along the optical fiber. An optical detector communicates with the linear polarizing component. A signal processor communicating with the optical detector and configured for determining from the reflected light signal dynamic events along the optical fiber.

Abstract: A fiber polarimeter has one or more oblique fiber Bragg gratings disposed one behind the other in a fiber. The fiber Bragg gratings couple out portions of a light wave input to the fiber depending on its polarization. For more than one fiber Bragg grating a wave plate is disposed in the fiber between consecutive fiber Bragg gratings. The portions of the light wave from the fiber Bragg grating(s) are detected to produce measurement data that is used to calculate four Stokes parameters for determining polarization, degree of polarization and/or power of the light wave.

Abstract: A sensor for measuring living body information and a keypad assembly including the sensor includes a light guide panel for guiding a first light. A light extracting pattern is provided on the light guide panel for outputting the first light guided by the light guide panel to an exterior of the light guide panel. A light coupling pattern is provided on the light guide panel for changing a proceeding direction of a second light incident from the exterior of the light guide panel, so that the second light is guided by the light guide panel.

Abstract: A variety of toy polariscopes are simpler in design and less costly than precision instruments used in scientific research and stress analysis of materials and structures. The toy polariscopes are designed for a variety of objects that may exhibit photoelastic properties such as glass, plastic, Plexiglas, gel candle material and other gels, and even edible photoelastic objects. They are specially designed for objects of various sizes with a variety of purposes such as objects to enhance learning in a variety of conditions and experiences. Special objects are designed to go with the toy polariscopes such as edible and inedible photoelastic objects, photoelastic candle material, a variety of photoelastic/photoplastic stands capable of a variety of displays in interaction with other designed photoelastic objects capable of a variety of interaction and displays. Other optical phenomena may also be observed.

Abstract: The inventive subject matter relates to a method for detecting the presence of a biological substance of interest in a test sample of saliva or oral fluid, comprising combining said test sample with a fluorescence-labeled ligand to said biological substance and detecting a change in the fluorescence polarization of said test sample produced by binding of said fluorescence-labeled ligand to said biological substance. In one aspect of the inventive subject matter, said method comprises additional steps for comparing the fluorescence polarization of said test sample with the fluorescence polarization of a control solution. Also provided is a miniaturized, portable apparatus for measuring the fluorescence polarization of a liquid sample.

Abstract: The invention relates to a method of performing an optical measurement on a sample, such as an ellipticity measurement. The sample is irradiated with a polarized irradiation beam and a return beam is linearly polarized. The irradiation or return beam is modulated with a birefringence modulator, such as a photoelastic modulator, in accordance with a primary modulation signal. The return beam is directed onto a multichannel detector. Typically the detector is a slow detector, such as a CCD, having a response time greater than a period of the primary modulation signal. Detection values are generated simultaneously at each detection element and processed to determine a plurality of measurements. Various measurement techniques are described, including detector signal averaging over gated intervals; a design employing coherent modulation of the gain of an ICCD , and a modulator-coherent flash lamp design.

Abstract: Improved methodology for monitoring deposition or removal of material to or from a process and/or wittness substrate which demonstrates a negative e1 at some wavelength. The method involves detection of changes in P-polarized electromagnetism ellipsometric DELTA at SPR Resonance Angle-of-Incidence (AOI) to monitor deposition of and/or removal of minute amounts of materials onto, or from, said process and/or witness substrate. The methodology can optionally monitor ellipsometric PSI, and involves simultaneously or sequentially applying non-P-polarized electromagnetism at the same angle of incidence, or electromagnetic radiation of any polarization at a different angle-of-incidence and wavelength to the process or wittness substrate and application of conventional ellipsometric analysis.

Abstract: A fiber polarimeter has one or more oblique fiber Bragg gratings disposed one behind the other in a fiber. The fiber Bragg gratings couple out portions of a light wave input to the fiber depending on its polarization. For more than one fiber Bragg grating a wave plate is disposed in the fiber between consecutive fiber Bragg gratings. The portions of the light wave from the fiber Bragg grating(s) are detected to produce measurement data that is used to calculate four Stokes parameters for determining polarization, degree of polarization and/or power of the light wave.