Abstract: Micro device optical inspection and repairing equipment adopting an adhesion device is provided. The micro device optical inspection and repairing equipment includes a carrying stage, an optical inspection module and at least one adhesion device. The optical inspection module is arranged corresponding to the carrying stage so as to capture image information and obtain a position coordinate from the image information. The adhesion device includes a main body and an adhesive portion. The adhesive portion is connected to the main body. The adhesion device can move to a target position of the carrying stage according to the position coordinate. The main body is adapted to drive the adhesive portion to move to the target position along a moving axis. An optical inspection and repairing method adopting the micro device optical inspection and repairing equipment is also provided.

Abstract: An image measuring method performed with an image measuring device measuring a dimension of a measured object from an image of the measured object captured by an image capturer. The method executes a standard reference object measurement measuring a dimension of the standard reference object with the image measuring device; a standard reference dimension input inputting a dimension of the standard reference object specified by a device other than the image measuring device; a preset value calculation calculating a preset value from the dimension of the measured standard reference object and from a dimension of the standard reference object measured by a predetermined measurement tool; a measurement measuring a dimension of a measured object other than the standard reference object using the image measuring device; and a correction correcting the dimension of the measured object other than the standard reference object measured by the image measuring device.

Abstract: In accordance with some embodiments of the present disclosure, an inspection method of a photomask includes performing a first inspection process, unloading the photomask from the inspection system, and performing a second inspection process. In the first inspection process, a common Z calibration map of an objective lens of an optical module with respect to the photomask is generated and stored, and a first image of the photomask is captured by using an image sensor while focusing the objective lens of the optical module based on the common Z calibration map. The photomask is unloaded from the inspection system. In the second inspection process, the photomask is loaded on the inspection system and a second image of the photomask is captured by using an image sensor while focusing an objective lens of an optical module based on the common Z calibration map generated in the first inspection process.

Abstract: A method of determining topographical variation across a substrate on which one or more patterns have been applied. The method includes obtaining measured topography data representing a topographical variation across a substrate on which one or more patterns have been applied by a lithographic process; and combining the measured topography data with knowledge relating to intra-die topology to obtain derived topography data having a resolution greater than the resolution of the measured topography data. Also disclosed is a corresponding level sensor apparatus and lithographic apparatus having such a level sensor apparatus, and a more general method of determining variation of a physical parameter from first measurement data of variation of the physical parameter across the substrate and intra-die measurement data of higher resolution than the first measurement data and combining these.

Abstract: In one embodiment, a computer accessible storage medium stores a plurality of instructions which, when executed: group a set of reconstructed three dimensional (3D) points derived from image data into a plurality of groups based on one or more attributes of the 3D points; select one or more groups from the plurality of groups; and sample data from the selected groups, wherein the sampled data is input to a consensus estimator to generate a model that describes a 3D model of a scene captured by the image data. Other embodiments may bias sampling into a consensus estimator for any data set, based on relative quality of the data set.

Abstract: A mask inspection device and method thereof are provided. In the mask inspection device, an image capturing module is controlled to capture an image of the object to be inspected, and when the captured image does not match a predetermined correction image, a horizontal position of the bearing module which holds the object is adjusted; when the captured image matches the predetermined correction image, a light emission element projects a spot light towards the object, and the image capturing module captures an image in a mask region of the object, so as to produce a mask inspection image. The mask inspection information can be obtained from a two-dimensional image of the mask inspection image, and an abnormal image of the mask inspection image is inspected to generate mask abnormal information.

Abstract: A note image acquiring system includes: a fiber laser, a fiber beam splitter, a fiber collimator, a laser beam expander, a lithium niobate intensity modulator array, a waveform generator, a signal amplifier, a polarization beam splitter, a quarter-wave plate, an imaging lens group, a line-array photosensitive chip, an image information processing module and an image combining module. The note image acquiring system can improve resolution of details of a note image without needing to increase the number of photosensitive chip units per unit length of a linear array image sensor.

Abstract: Mechanisms for identifying energy received from a scene are provided. A coded aperture in an optical system receives energy from a scene. The coded aperture comprises a plurality of wavelength filter sets arranged in a predetermined pattern. Each wavelength filter set is configured to transmit energy in a corresponding wavelength band of a plurality of different wavelength bands. The coded aperture transmits the energy toward a detector array comprising a plurality of detector elements. The detector array generates sensor data that quantifies energy received by each detector element. The sensor data is processed based on the predetermined pattern to identify spatial locations of energy in each corresponding wavelength band with respect to the scene.

Abstract: In a device for producing and/or processing a workpiece, in particular circuit boards (1), in a work station (2), in particular for printing a corresponding blank or for checking finished circuit boards (1), at least one mark (15) is provided on the workpiece. In this arrangement, at least one reference (14), which can be brought into alignment with the mark (15), is provided in the work station (2).

Abstract: The present invention relates to a device and method for determining changes in the shape of a substrate parallel to its substrate surface. The device comprises at least one detection apparatus for detecting images of structures which are located on the substrate surface, and optics comprised of at least two optics apparatus with at least two different beam paths for imaging of the structures on the detection apparatus. The device is able to determine distances (dx1, dy1, dx2, dy2, dxn, dyn) of images of the structures and/or changes of the distances (dx1, dy1, dx2, dy2, dxn, dyn).

Abstract: Method for determining wheel alignment of a vehicle, which vehicle comprises at least one wheel axle (12, 13, 14) having an axle end with at least one wheel member (2a-b, 3a-b, 4a-b) at a respective longitudinal side of the vehicle. The method comprises steps for determining the out of square of the wheel axle in relation to the longitudinal geometric centerline of the vehicle. A system for carrying out the method is also described.

Abstract: A method for imaging using a flatbed imaging system includes providing first imaging data to a first imaging source; providing second imaging data to a second imaging source; imaging a first beam from the first imaging source at a first height on a rotating multi-facet spinner; imaging a second beam from the second imaging source at a second height on the rotating multi-facet spinner; distributing the first beam on a first location on a printing plate; and distributing the second beam on a second location on a the printing plate.

Abstract: In accordance with one embodiment of the present disclosure, a difference is detected between a first image and a second image. The second image can include at least a portion of the first image reflected from a display panel and light from an object passing through the display panel.

Abstract: A video calibration device comprising an elongated image tube having a length, a first opening at one end of the image tube and a second opening at the opposite end of the image tube. The device includes an elongated sensor tube having a length, a first opening at one end of the sensor tube and a second opening at the opposite end of the sensor tube. The first opening of the sensor tube is adapted to support a video calibration sensor. A video calibration sensor is disposed in the first opening of the sensor tube. The sensor tube is sealingly secured to the image tube at an angle whereby the second opening of the sensor tube and the second opening of the image tube are substantially juxtaposed.

Abstract: The invention in the preferred embodiment features a solar concentrator that can align and/or track based on images from a video camera, for example. The concentrator preferably includes one or more optical elements for directing light to a receiver, a camera for capturing an image of the optical elements, and a controller configured to: detect the orientation of the one or more optical elements from the one or more images, determine an orientation error based on the detected orientation, and automatically orient the one or more optical elements to minimize the orientation error. The optical elements generally comprise a plurality of mirrors or lenses arranged in a one or two dimensional array.

Abstract: Methods and apparatus for measuring ion implant dose in a material provide for: measuring a reflection spectrum through an implantation surface of the material, the implantation surface having been subjected to an ion implantation process to create a material layer from the implantation surface to a depth within the material and a layer of weakness below the material layer; storing magnitudes of the reflection spectrum as a function of respective wavelengths of incident light on the implantation surface; and computing an ion implant dose used during the ion implantation process based on comparisons of at least two magnitudes of the reflection spectrum at least two corresponding wavelengths of the incident light.

Abstract: A method for inspecting lenses, especially wet contact lenses provided in a volume of liquid inside a container is described. A first image of the lens at a first position in the container is obtained, the lens then being moved to a second position within the container where a second image is obtained. A computer algorithm processes the first and second images to compare features that have moved with the lens to those features that have not moved with the lens whereby lenses are rejected if a feature has moved with the lens but is not a normal feature of the lens.

Abstract: A method for calculating a correction amount to a focus amount or an exposure dose in exposing a substrate with an exposure apparatus includes a storing step of storing plural sets, each of which is a combination of a set focus amount, a set exposure dose, and first image information of a pattern formed on the substrate through an exposure with the set focus amount and the set exposure dose, the plural sets having different focus amounts and/or different exposure doses, an obtaining step of obtaining second image information of a pattern formed on the substrate through another exposure, and a selecting step of finding a correlation value between the second image information obtained in the obtaining step and the first image information in the plural sets stored in the storing step, and of selecting at least two sets having two highest correlation values among the plural sets.

Abstract: The present invention provides improved methods and systems for laser beam positioning, shape profile, size profile, drift, and/or deflection calibration using an image capture device, such as a microscope camera, for enhanced calibration accuracy and precision. The methods and systems are particularly suited for iris calibration and hysteresis measurement of a variable diameter aperture. One method for calibrating laser pulses from a laser eye surgery system using an image capture device comprises imaging a known object with an image capture device. A pulsed laser beam is directed onto a calibration surface so as to leave a mark on the calibration surface. The mark on the calibration surface is then imaged with the image capture device. The laser eye surgery system is calibrated by comparing the image of the mark on the calibration surface to the image of the known object.

Abstract: An optical element to be measured is irradiated with the light which has passed through an indicator, thereby to form an indicator image on an image pick-up surface. Maximum peak coordinates are specified and stored as a position of the indicator image relating to the first surface. Whether the second largest peak may be specified or not is determined. In case that this result is NO, the maximum peak indicator image is deleted, and maximum peak coordinates are specified again and stored as a position of the indicator image relating to the second surface.

Abstract: Methods and apparatus for spectrum-based endpointing. An endpointing method includes selecting a reference spectrum. The reference spectrum is a spectrum of white light reflected from a film of interest on a first substrate and has a thickness greater than a target thickness. The reference spectrum is empirically selected for particular spectrum-based endpoint determination logic so that the target thickness is achieved when endpoint is called by applying the particular spectrum-based endpoint logic. The method includes obtaining a current spectrum. The current spectrum is a spectrum of white light reflected from a film of interest on a second substrate when the film of interest is being subjected to a polishing step and has a current thickness that is greater than the target thickness. The method includes determining, for the second substrate, when an endpoint of the polishing step has been achieved. The determining is based on the reference and current spectra.

Abstract: A light detecting method and apparatus wherein non-projection imaging operation of a predetermined range is carried out once within a non-projection imaging operation time thereby to obtain background information. During a remaining time after the non-projection imaging operation, light is radiated. At least two imaging operations of a predetermined range are performed thereby to acquire projection information. Information on the radiated light is extracted based on the background information and the projection information. Accordingly, the dead time that may occur before extraction of reflected light can be suppressed.

Abstract: There is provided an optical imaging device (18) for splitting an initial image into at least two images with different optical characteristics. The device comprises a dichroic mirror (32) to create first and second optical pathways respectively incident on first and second mirrors (41, 41?) carried on a centrally pivoted rotatable arm, characterised in that the first and second reflective means are moveable along the arm (42) whilst held in fixed relationship to each other, thereby to adjust separation of the first and second optical pathways. A third mirror (46) in fixed relationship to the beam splitter (32) is positioned adjacent where the first and second optical pathways intersect, or just before the intersection of the first and second optical pathways, or just after the point of intersection.

Abstract: A pattern inspection apparatus which compares images of regions, corresponding to each other, of patterns that are formed so as to be identical and judges that non-coincident portions in the images are defects. The pattern inspection apparatus is equipped with an image comparing section which plots individual pixels of an inspection subject image in a feature space and detects excessively deviated points in the feature space as defects. Defects can be detected correctly even when the same patterns in images have a brightness difference due to a difference in the thickness of a film formed on a wafer.

Abstract: An exemplary system for calculating the number of conductive particles dispersed in an anisotropic conductive film includes an image capturing device and an image processing device. The image capturing device captures a color image of the anisotropic conductive film. The image processing device processes the color image to generate a first binary image. The second binary image includes a plurality of first objects. The first objects occupy a first area in the first binary image. The image processing device processes the first binary image to generate a second binary image having different size with respect to the first binary image by a predetermined value. The second binary image includes a plurality of second objects. The second objects occupy a second area in the second binary image. The image processing device calculates a number of the conductive particles according to the first area, the second area, and the predetermined value.

Abstract: A method of measuring a coating thickness involves projecting a pattern of light on a surface. A first reflection of the pattern of light is received by a first image capturing device. A second reflection of the pattern of light is received by an image capturing device which may be the same or a different image capturing device. The first reflection is compared with the second reflection. A first dated map of the surface is created by comparing the first reflection and the second reflection. A coating is deposited on the surface. A second data map of the surface with the coating is created by comparing reflections. The first data map and the second data map are then compared to determine a thickness of the coating.

Abstract: Image data is acquired, processed, and/or displayed in accordance with an embodiment of the present disclosure to display, monitor, and/or demonstrate the progress of an experiment substantially in real-time and with high sensitivity. In one embodiment, at least one time-resolved value of spatially distributed polarization change data is provided and displayed. Advantageously, real-time processing and display of data is provided such that discussion and collaboration about the experiment may occur, time-resolved data is not lost, and resources are not wasted.

Abstract: A system optically detects and measures release agent on a rotating image member in an ink jet printer. The system includes a collimated light source oriented to direct a collimated beam of light generated by the source towards a rotating image member, an image sensor for generating an image of a portion of the rotating image member from a portion of the collimated beam of light reflected by the rotating image member, an image differentiator for measuring a difference between a first image generated by the image sensor and a second image generated by the image sensor, and a release agent measurement generator that is coupled to the image differentiator to receive the difference between the two images and to generate a measurement of the release agent on the rotating image member.

Abstract: The automatic work apparatus extracts the target image of which photos are taken by the left and right CCD cameras, specifies the spatial position of the target and executes an operation to the target by the arm. Two regions, the central region and the peripheral ones, allocated to the image taken by the CCD camera so that if the target image stays in the peripheral region of the image then the cameras are rotated to take the target image in the central portion and the position determining module determines the spatial position of the target and then tasks are done for the targets. The relative distance from the target is adjusted by transfer equipment. This invention is applicable to an automatic work apparatus that can operate a predetermined operation for moving target and an automatic operation control program to carry out such operation.

Abstract: A method for generating a mask for use with a light measurement system that includes a light source for projecting light onto an object, and an imaging sensor for receiving light reflected from the object. The method includes determining a profile of the object to be inspected, and generating an electronic mask based on the determined object profile. The electronic mask has an electronic opening having a profile defined to substantially match the determined object profile as viewed from one of the light source and the imaging sensor.

Abstract: A method for improving accuracy of determining polish endpoint of chemical mechanical polish (CMP) process is provided. The method is performed before the CMP process. First, a test wafer with a to-be-polished layer and a material layer under the to-be-polished layer is provided. Then, a test beam with a wavelength is provided to irradiate the test wafer. The CMP process is performed to the test wafer to remove the to-be-polished layer until the material layer is exposed while the reflection of the test beam during the polish process is continuously detected. The reflection tendency is detected when the to-be-polished layer is to be completely removed and when the CMP process reaches the interface between the to-be-polished layer and the material layer. If the reflection tendency is gradually weakened, the test beam with the wavelength is chosen for the subsequent polish process.

Abstract: Methods and systems for measurements of a substrate are provided. One system includes a non-optical subsystem configured to perform first measurements on a substrate. The system also includes an optical subsystem coupled to the non-optical subsystem. The optical subsystem is configured to perform second measurements on the substrate. In addition, the system includes a processor coupled to the subsystems. The processor is configured to calibrate one of the subsystems using the measurements performed by the other subsystem. One method includes performing first measurements on a substrate using a non-optical subsystem and performing second measurements on the substrate using an optical subsystem that is coupled to the non-optical subsystem. The method also includes calibrating one of the subsystems using the measurements performed by the other subsystem.

Abstract: The invention relates to an apparatus and method for electromagnetic monitoring of products of tobacco-processing industry in a monitoring zone. An apparatus includes a first imaging device aligned to the monitoring zone, a second imaging device aligned to the monitoring zone from a direction different from the first imaging device, and an evaluating device structured and arranged to evaluate image data recorded by the first and second imaging devices. At least one of the first and second imaging devices is aligned to at least one product. The instant abstract is neither intended to define the invention disclosed in the specification nor intended to limit the scope of the invention in any way.

Abstract: An apparatus and method to inspect a display panel that can correctly detect a defect of the display panel itself. In the method of inspecting the display panel, a first image is captured from the display panel in a state in which no pattern is applied to the display panel. Light is then irradiated on the display panel in a state in which a pattern is applied to the display panel, and a second image is captured from the display panel. The first image can be compared with the second image, and a determination can be made as to whether or not a defect of the display panel is present.

Abstract: A method and apparatus for detection of a particular material, such as photoresist material, on a sample surface. A narrow beam of light is projected onto the sample surface and the fluoresced and/or reflected light intensity at a particular wavelength band is measured by a light detector. The light intensity is converted to a numerical value and transmitted electronically to a logic circuit which determines the proper disposition of the sample. The logic circuit controls a sample-handling robotic device which sequentially transfers samples to and from a stage for testing and subsequent disposition. The method is particularly useful for detecting photo-resist material on the surface of a semiconductor wafer.

Abstract: A machine vision system includes an apparatus for registering an input image of an object, such as an aircraft engine blade, to a reference image comprising ideal specifications for the object in order to detect flaws in the object. The system includes one or more imaging devices for obtaining the input image representing the object. The system further includes a processor for registering the input image to the reference image. The processor includes a patch determining device for identifying low curvature portions of the reference image off-line. A transformation estimator matches the low curvature portions of the reference image to corresponding low curvature portions of the object, and provides a transformation matrix which maps points on the reference image 11 to corresponding points on the input image for precise and fast registration.

Abstract: To calibrate a front-to-backside alignment system a transparent calibration substrate with reference markers on opposite sides is used. A plane plate is inserted to displace the focal position of the alignment system from the top to bottom surface of the calibration substrate.

Abstract: An optical apparatus and methods for efficiently determining the magnetization of a material at very high optical resolution are disclosed. Individual components of the magnetization may be determined. Components in the plane of the sample surface are imaged by illuminating the material obliquely with substantially parallel light of relatively high power and very well controlled uniformity and polarization, and using light scattered obliquely in a parallel beam in the opposite direction at the same angle as the angle of incidence to record an image. Reversing the illumination and observation directions allows subtraction of the two images and measurement of the magnetization in-plane. A second in-plane component orthogonal to the first, is obtained similarly after reorienting the plane of incidence 90 degrees.

Abstract: In order that blemish-erasing for an original can be carried out precisely and degradation of quality of read image does not occur, a light source device and an image reading apparatus comprising a first light source section that emits a first light for reading image information of an image recorded on a transparent original or a reflection original, a second light source section that emits a second light for detecting a defect portion on the original or an optical path, and a filter that blocks a light which is included in the first light and whose wavelength is substantially the same as that of the second light, are provided, thereby degradation of quality of read image caused by sub-emission energy is prevented.

Abstract: Topographic analysis apparatus consists of a light source (1) and associated optics (2) for illuminating a mirrored surface O with a parallel light beam. Light reflected from the mirrored surface is collected by a camera (4) that is mounted on a moveable carriage (5) so that images of the mirrored surface O may be recorded at a plurality of different distances from the surface. The Makyoh topograms produced using this apparatus are then analyzed using phase extraction software to iteratively determine the profile of the surface of the object and the object's reflectivity. In this way Makyoh topograms may be used for quantitative as well as qualitative analysis of a reflective surface such as a semiconductor wafer.

Abstract: A system within a self-service deposit terminal is arranged to recognize different denominations of bank notes. The system scans each side of a deposited note and produces a diffraction pattern of first one side and then the other side of the note. The diffraction pattern is compared against reference matched spatial filters associated with different denominations that are loaded into a Vander Lugt optical correlator. If the diffraction pattern and the matched spatial filter match then a correlation dot is produced, and if this occurs for both sides of a note then a denomination value can be assigned to that note. Reference matched spatial filters for all denominations of notes to be expected are first produced on a recording system and stored in a storage device which the self-service deposit terminal can access.

Abstract: A test slide for the calibration, characterization, standardization, use and study of photon and electron microscopes. The slide is created by forming patterns with specific types of geometries on suitable substrates and these slides provide a standard for comparison of image forming capability of any type of microscope imaging system including, without limitation, light, UV, and X-ray photon microscopical imaging systems operating in transmission or reflection modes, and other microscope techniques. Microscopists can employ one of these slides to compare images of the slide which have been produced by the microscope system under consideration with a known, accurate, image of the slide to better understand the fidelity and accuracy of the microscope system under consideration. The test patterns can also comprise reference images which can be images created by a graphic artist or the like or which can be actual images of samples, these images being either two dimensional or three dimensional.

Abstract: The invention provides an apparatus and method for imaging markings on cartridge cases. It provides for the taking of two images of the cartridge case with light for illumination projected at the cartridge case from two different predetermined angles. In a first version, two different light sources are set at the two different predetermined angles. In a second version, one light source is moved between two different positions to project light at the two different predetermined angles. In a third version, the device holding the cartridge case is rotated between two different positions so light projects at the cartridge case from the two different predetermined angles. In a fourth version, the holding device rotates the cartridge case between two different positions so that light projects at the cartridge case at the two different predetermined angles. In another aspect, the invention provides diffuse light for the taking of the images.

Abstract: Compensation data 10 distilled from image sample population volume 12 compensates pixel records 25R and 25L of related images 26R and 26L. Each pixel address stores a parameter code defining a parameter level for that pixel along a code scale of levels of a parameter such as greyscale common to both related images. The pixel records are enhanced through compensation of these parameter codes to provide enhanced disparity information. Pixel pairer 28P establishes a set of pixel pairs from the related pixel records in image correspondence. Sample generator 28G determines discrepancy between the code levels of each pixel pair to provide image population 12 of code discrepancy samples between the pixel records. Each pixel pair established from the two pixel records yields a difference sample in the image population. Profile extractor 28E extracts population profiles 12E of code discrepancy samples from image population 12. Each population profile is a vertical slice (see FIG.

Abstract: Method of checking for the presence of connection balls of components, in particular of ball grid arrays by projecting light obliquely onto the components to create reflections and shadows at the connection balls and any impurities, detecting the reflections and shadows and evaluating the detected shadows and reflections to determine which are from connection balls and which are from impurities.

Abstract: A method for characterizing a sample comprising the steps of depositing the sample on a substrate, measuring a first change in optical response of the sample, changing the lateral strain of the sample, measuring a second change in optical response of the sample, comparing the second change in optical response of with the first change in optical response and associating a difference between the second change and the first change in optical response with a property of interest in the sample. The measurement of the first change in optical response is made with the sample having an initial lateral strain. The measurement of the second change in optical response is made after the lateral strain in the sample is changed from the initial lateral strain to a different lateral strain. The second change in optical response is compared to the first change in optical response to find the difference between the second change and the first change.

Abstract: A pattern inspection method includes the steps of: obtaining first image data by optically picking up an actually formed pattern such as a reticle; aligning a position of the first image data with second image data of a pattern at a different layer from that of the first image data; and performing a first pattern inspection using the first and second image data. Defect inspection can be executed in a short time with a practically sufficient precision.

Abstract: In a process for determining the condition of a road surface, light is beamed onto the road surface and backscattered light is detected and spectrally analyzed. The light beam contains two light fractions, one having wavelength range which is not significantly absorbed by water/ice and another having a wavelength range which is significantly absorbed by these materials. The first light fraction contains light of several different wavelengths and the spectral analysis includes the determination of an approximation reference curve for the spectral plots of the backscattered light when the road is dry. This is accomplished by using the spectral data of the backscattered light fraction in the wavelength range without significant absorption, and the determination of the difference between the spectral data of the backscattered-light fraction in the other wavelength range and the corresponding data of the approximation reference curve for at least one wavelength.

Abstract: A method for characterizing a sample comprising the steps of depositing the sample on a substrate, measuring a first change in optical response of the sample, changing the lateral strain of the sample, measuring a second change in optical response of the sample, comparing the second change in optical response of with the first change in optical response and associating a difference between the second change and the first change in optical response with a property of interest in the sample. The measurement of the first change in optical response is made with the sample having an initial lateral strain. The measurement of the second change in optical response is made after the lateral strain in the sample is changed from the initial lateral strain to a different lateral strain. The second change in optical response is compared to the first change in optical response to find the difference between the second change and the first change.

Abstract: A bottle inspection method is provided which is capable of compensating for random variations in the orientation and position of objects being inspected, such as glass bottles on a conveyor. The inspection device creates an image of the object and then analyzes the image to determine the amount of variation in orientation and position. The desired measurements are made from the image and then adjusted relative to the variation previously determined. Also provided is an improved housing for the imaging devices which eliminates the need for clear panels which are prone to dirtying.