Abstract: Methods and systems for performing three-dimensional (3-D) LIDAR measurements with multiple illumination beams scanned over a 3-D environment are described herein. In one aspect, illumination light from each LIDAR measurement channel is emitted to the surrounding environment in a different direction by a beam scanning device. The beam scanning device also directs each amount of return measurement light onto a corresponding photodetector. In some embodiments, a beam scanning device includes a scanning mirror rotated in an oscillatory manner about an axis of rotation by an actuator in accordance with command signals generated by a master controller. In some embodiments, the light source and photodetector associated with each LIDAR measurement channel are moved in two dimensions relative to beam shaping optics employed to collimate light emitted from the light source. The relative motion causes the illumination beams to sweep over a range of the 3-D environment under measurement.

Abstract: A light detection and ranging (LIDAR) system includes a laser, a transceiver, and one or more optics. The laser source is configured to generate a beam. The transceiver is configured to transmit the beam as a transmit signal through a transmission waveguide and to receive a return signal reflected by an object through a receiving waveguide. The one or more optics are external to the transceiver and configured to optically change a distance between the transmit signal and the return signal by displacing one of the transmit signal or the return signal.

Abstract: A substrate processing system includes a laser triangulation sensor configured to transmit and receive light through a window of an exterior wall of a substrate processing chamber. A controller is configured to: position the laser triangulation sensor such that the laser triangulation sensor transmits light onto a measurement feature arranged between a first surface of a substrate support and a second surface of a gas distribution device, where the second surface faces the first surface; and while the laser triangulation sensor transmits light onto the measurement feature, determine a first distance between the first and second surfaces based on a difference between: a second distance between the laser triangulation sensor and the first surface measured using the laser triangulation sensor; and a third distance between the laser triangulation sensor and the second surface measured using the laser triangulation sensor.

Abstract: Embodiments of the present invention are directed to a method for performing non-contact based determination of the position of an implement. In one embodiment, the method includes using a non-contact based measurement system to determine a first measurement comprising the position of the implement relative to a mobile machine coupled with the implement, determining a second measurement comprising the geographic position of the mobile machine and determining the geographic position of the implement using the first measurement and the second measurement.

Abstract: Various embodiments of a time-of-flight (TOF) depth camera and methods for projecting illumination light into an image environment are disclosed. One example embodiment of a TOF depth camera includes a light source configured to generate coherent light; a first optical stage including an array of periodically-arranged lens elements positioned to receive at least a portion of the coherent light and to form divergent light; a second optical stage positioned to receive at least a portion of the divergent light and to reduce an intensity of one or more diffraction artifacts in the divergent light to form illumination light for projection into an illumination environment; and an image sensor configured to detect at least a portion of return illumination light reflected from the illumination environment.

Abstract: An optical rangefinder having a photosensor adapted to transform the image projected thereon into an electronic image, an imaging system for projecting an image of an object on the photosensor, an optical arrangement to modulate the incoming light forming the image on the photosensor, means for providing the spatial spectrum of the image and means for deriving the distance from the object to the rangefinder on the degree of defocus of the image, wherein the optical arrangement is adapted to modulate the incoming light such that the degree of defocus of the image on the photosensor relative to the in-focus image plane results in displacement of the spatial spectrum of the image relative to a reference pattern and wherein the rangefinder has means for deriving the degree of defocus from the degree of displacement.

Abstract: An autofocus system and method designed to account for instabilities in the system, e.g. due to instabilities of system components (e.g. vibrating mirrors, optics, etc) and/or environmental effects such as refractive index changes of air due to temperature, atmospheric pressure, or humidity gradients, is provided. An autofocus beam is split into a reference beam component (the split off reference channel) and a measurement beam component, by a beam splitting optic located a predetermined distance from (and in predetermined orientation relative to) the substrate, to create a first space between the beam splitting optic and the substrate. A reflector is provided that is spaced from the beam splitting optic by the predetermined distance, to create a second space between the reflector and the beam splitting optic.

Abstract: A method for calibrating a focus point for a camera lens may include capturing a reflection of a focus point measuring device that is affixed to the camera. The method may include evaluating a captured image of the reflection to measure a calibration amount for a focus point, and adjusting a focus point of a lens of the camera by the calibration amount. The focus point measuring device may include a substantially planar target surface defining a plane, and a ruled target surface inclined at substantially 45° to the substantially planar target and extending through the plane thereof, marked to indicate respective distances in front of and behind the plane. The device may further include a fixture for holding the substantially planar target surface and the ruled target surface in a defined orientation to the camera, enabling performance of the method.

Abstract: Focus assemblies for laser radar are situated to receive a measurement beam that is focused at or in the focus assemblies. In some examples, focus assemblies include a corner cube and a return reflector, and the measurement beam is focused on, at, or within the corner cube or return reflector. A polarizing beam splitter and a quarter wave plate can be situated so that an input measurement beam and an output measurement beam can be separated.

Abstract: A method is disclosed for operating a machine vision inspection system to determine a fluorescent imaging height for acquiring a fluorescent image for repeatably determining the location of a feature within the fluorescent material. The height of an exposed workpiece portion exposed outside of the fluorescent material is determined (e.g., using a height sensor or autofocus operations). The determined height is repeatable. The exposed portion has a characteristic height relative to the fluorescent material and/or features located therein. The fluorescent imaging height, which may be inside the fluorescent material, is determined relative to the determined height of the exposed portion. The fluorescent imaging height is determined such that it enhances the detection of the desired feature located within the fluorescent material in the resulting fluorescent image.

Abstract: A laser range finder includes: a light source emitting light from a linear light-emitting portion with making a divergent angle of the light larger in a transversal direction of the light-emitting portion than in a longitudinal direction thereof; an objective lens projecting the light onto a target object and converging reflection light; a partial reflection member disposed between the light source and the objective lens and having a partial reflection surface composed of a transmitting area transmitting light emitted from the light source and receiving areas reflecting reflection light; and a photodetector detecting the reflection light reflected by the receiving areas; wherein the light source and the partial reflection member are disposed with making the longitudinal direction of the light-emitting portion disposed substantially perpendicular to a longitudinal direction of the transmitting area as seen along an optical axis.

Abstract: A chromatic point sensor system configured to compensate for potential errors due to workpiece material effects comprises a first confocal optical path including a longitudinally dispersive element configured to focus different wavelengths at different distances proximate to a workpiece; a second optical path configured to focus different wavelengths at substantially the same distance proximate to the workpiece; a light source connected to the first confocal optical path; a light source connected to the second optical path; a first confocal optical path disabling element; a second optical path disabling element; and a CPS electronics comprising a CPS wavelength detector which provides output spectral profile data. The output spectral profile data from the second optical path is usable to compensate output spectral profile data from the first confocal optical path for a distance-independent profile component that includes errors due to workpiece material effects.

Abstract: A system for optical navigation includes a light source and an imaging system. The light source illuminates a navigation surface. The navigation surface reflects light from the light source. The imaging system is located approximately within a path of the reflected light. The imaging system includes a lens, a mask, and an image sensor. The lens receives reflected light from the navigation surface. The lens focuses a specular portion of the reflected light to a focus region. The mask is located at approximately the focus region. The mask filters out substantially all of the specular portion of the reflected light and passes at least some of a scatter portion of the reflected light outside of the focus region. The image sensor generates a navigation signal based on the scattered portion of the light that passes outside the focus region and is incident on the image sensor.

Abstract: A system and method of autofocusing an optical system uses transforms of images or portions of images formed by the optical system. A detector is used to capture images at different positions relative to the optical system. Transforms and blur spread parameters are calculated for the images for use in determining a position to which the detector should be moved to autofocus the system.

Abstract: A chromatic point sensor system configured to compensate for potential errors due to workpiece material effects comprises a first confocal optical path including a longitudinally dispersive element configured to focus different wavelengths at different distances proximate to a workpiece; a second optical path configured to focus different wavelengths at substantially the same distance proximate to the workpiece; a light source connected to the first confocal optical path; a light source connected to the second optical path; a first confocal optical path disabling element; a second optical path disabling element; and a CPS electronics comprising a CPS wavelength detector which provides output spectral profile data. The output spectral profile data from the second optical path is usable to compensate output spectral profile data from the first confocal optical path for a distance-independent profile component that includes errors due to workpiece material effects.

Abstract: An image taking system including: a lens apparatus; an image pickup apparatus; an operation angle detection unit detecting an operation angle; a direction storage unit storing an object direction relative to the lens apparatus; an angle-of-field calculation unit calculating an image taking angle of field based on zoom and focus positions; a ranging area setting unit calculating a position of at least one object in a screen based on the operation angle detected by the operation angle detection unit, the object direction stored in the direction storage unit, and the image taking angle of field calculated by the angle-of-field calculation unit, to set a ranging area at the position of the at least one object; an object distance calculation unit calculating an object distance in the ranging area; and an output image generation unit generating an output image and information based on the object distance.

Abstract: An image projection device includes: a variable-focus lens (2) in which focal length can be changed; scanning means (3) that scans a projection surface (12) by means of a light beam that is condensed by the variable-focus lens (2); distance-measuring means (9) that measures the distance from the variable-focus lens (2) to the projection surface (12); and control means (4) that controls the variable-focus lens (2) such that the focal length of the variable-focus lens (2) is greater than the distance measured by means of the distance-measuring means (9).

Abstract: Methods and systems for a hybrid optical device for high dynamic range high resolution remote sensing of object distance, object motion displacement, object three dimensional structure, object spatial profile, and measurement of liquid levels, and different matter interface positions. The device uses a hybrid digital-analog controlled variable focal length lens system to target both specular and diffuse objects. The spatial processing methods and systems can include time-frequency processing optical distance measurement methods to enable a robust hybrid-technique sensor.

Abstract: A vision measuring machine includes a stage for supporting a workpiece, an image capturing device movable relative to the stage, and a laser ranging module directed towards the stage. The laser ranging module is capable of emitting a laser beam to the workpiece to form a laser spot on the workpiece surface, and determining a distance between the laser spot and the laser ranging module.

Abstract: A measuring apparatus (1) for contactless detection of a distance between a surface (7) of a measurement object (8) and the measuring apparatus (1), and for simultaneous contactless visual detection of the surface (7), has a measuring head (2) holding a distance measuring device (4), a camera apparatus (5) and an illumination device (6), the illumination device (6) illuminating an operating point (9) on the surface (7) of the measurement object (8) that is simultaneously focused by the camera apparatus (5) and the distance measuring device (4). On an optical axis (10), between the illumination device (6) and the operating point (9), a mirror and filter device (11), that has at least one dichroic mirror (12) that transmits or reflects light beams as a function of wavelength, and thereby splits light reflected by the operating point (9) between the distance measuring device (4) and the camera apparatus (5), is provided.

Abstract: A distance measuring system includes a light source, an image capture apparatus, a light absorption member and a signal processing circuit. The image capture apparatus includes a first lens module, a second lens module and an image sensor. The lens modules respectively have a focus. The image sensor detects light from the light source at two optical spots of the two lens modules, respectively. The light absorption member is disposed generally between the two lens modules for absorbing light reflected from the lens modules and thereby reducing optical interference. The signal processing circuit is configured for calculating the ratios of the two distances to the focal lengths of the respective focuses. A perpendicular distance between the light source and a line passing through the centers of the first and second lens modules is obtained.

Abstract: A camera includes a light transmitter configured to transmit light pulses at a first rate, a light receiver configured to receive return signals corresponding to the light pulses transmitted by the light transmitter, and a sampler configured to sample electrical signals corresponding to the return signals received by the light receiver, wherein the sampler is configured to sample the electrical signals at a second rate that is lower than the first rate.

Abstract: An appropriate adjustment can be made on the basis of a gradation amplitude obtained from a photographing image even when the zoom position of a zoom lens is changed. According to exemplary embodiments a CPU obtains a zoom amount transmitted from a zoom lens position detecting section, and derives the width of a stripe element in a pattern image to be formed on a liquid crystal light valve on the basis of the obtained zoom amount by referring to a stripe element width table stored to a stripe element width table storing section. The CPU corrects the pattern image for an adjustment on the basis of the derived stripe element width and rewrites the contents of a pattern image memory and gives instructions of image projection to an image processing section, a liquid crystal light valve driving section, etc. Thus, the pattern image corrected with respect to the stripe element width is formed on the liquid crystal light valve.

Abstract: A range/speed finder can be incorporated into a personal electronic device. In one example, a personal electronic device includes an automatic focus system adapted to focus an image of an object and a processor in communication with the automatic focus system adapted to detect a distance of the object using the automatic focus system. The processor can be adapted to detect a speed of the object and/or a dimension of the object using the automatic focus system. Methods and systems for determining a distance, a dimension, and/or a speed of the object relative to the personal electronic device are also provided.

Abstract: A system to determine the distance to an object includes one or more aberrating elements to introduce aberration into light from the object. Image data is obtained at two different focus conditions, and used to determine the object distance.

Abstract: A focusing method is provided for the high speed digitalization of microscope slides using an imaging device, wherein the slide is divided into fields of view according to the imaging device and focusing is performed. During rough focusing, several images are captured within the focus range using large focus steps. On the basis of this set of images the position of the best contrast is determined. Fine focusing is performed by adjusting the focus according to the focus distance already determined for another field of view and by focusing with fine steps. A slide displacing device is provided, which enables the displacement of a slide parallel to the optical axis. The slide displacing device includes slide holding elements affixed to one side of a supporting member having two parallel sides, which are connected by stiffening elements defining at least two parallel planes.

Abstract: Disclosed is a LADAR system and a method for operating same. The LADAR system includes circuitry for generating the electrical signal with an optical signal detector using N discrete samples; a bank of M parallel sample/hold circuit unit cells individual ones of which operate with an associated sample/hold clock, where each sample/hold clock is shifted in time by a fixed or programmable amount ?t relative to a sample/hold clock of an adjacent sample/hold circuit unit cell; and further includes circuitry for sequentially coupling a sampled value of the electrical signal from a first output of individual ones of at least some of the M parallel sample/hold circuit unit cells to an analog to digital converter circuit. Each of the M parallel sample/hold circuit unit cells has a second output for outputting a digital signal for indicating the state (low or high) during a time that the associated sample/hold clock allowing for time of arrival determination.

Abstract: A distance measurement object is imaged by a pair of line sensors of an AF sensor, and sensor data showing the sensor images is generated. A CPU generates AF data showing the contrast of sensor images with the sensor data being sequentially acquired by the CPU for each cell. Then, the AF data is used to carry out calculation of correlation values or the like, thereby calculating the distance from the distance measurement object.

Abstract: In a lithographic projection apparatus, a measuring system configured to measure the position of the projection system relative to a reference frame includes sensors rigidly mounted in relation to counterpart sensors of a measuring system measuring the substrate table position. An angular encoder which sends light from a target down two optical paths having opposite sensitivities to tilt is used to measure rotation of the projection system about its optical axis.

Abstract: A laser-based altimeter for use on-board an aircraft comprises: a first housing including a hollow cavity and an exit aperture, and a second housing including a hollow cavity and an entrance aperture. A laser source and a plurality of first optical elements are fixedly supported in a compact configuration within the hollow cavity of the first housing. The plurality of first optical elements directs laser beams generated by the laser source from a first optical path to a second optical path which exits the first housing through the exit aperture. At least one second optical element is configured within the hollow cavity of the second housing to form a telescope with a predetermined field of view. The telescope receives at the entrance aperture reflections of the pulsed laser beams from objects within the field of view thereof and focuses the received reflections substantially to a focal point.

Abstract: An automatic surveying system is provided that comprises a surveying device, a collinear-line calculating processor, a sighting direction control processor, and an object-point searching processor. The collinear line calculating processor obtains a collinear line for an arbitrarily designated point on a schematic image of which the positional relation to the surveying device is known. The sighting direction control processor controls the surveying device to sight along the collinear line. The object point searching processor searches for an object point where the position of the object point can be determined as a point on the collinear line. This is executed by measuring the sighting direction with the surveying device while carrying out the sighting direction control process. Further, a position obtained by the object point searching processor coincides with an object point that corresponds to the designated point.

Abstract: Method for carrying out the non-contact measurement of geometries such as surfaces of objects, with a coordinate measuring machine with a laser beam that is projected onto a measuring point of the object via an optical system, and in which the light that is reflected or scattered by the measuring point is detected by a detector. The optical system includes a zoom lens, whose lens groups each are each motor-adjusted separately from each other in positions for working distance and/or resolution and/or measuring range.

Abstract: A surveying instrument includes a surveying instrument body which is rotatable about vertical and horizontal axes and has a telescope optical system for collimating the surveying instrument relative to a survey point; a collimator optical system for projecting first light rays toward the survey point and for receiving the first light rays reflected at the survey point; an auto-collimating system which rotates the surveying instrument body to position the survey point on an optical axis of the telescope optical system; a distance measuring optical system for projecting second light rays toward the survey point and for receiving the second light rays reflected at the survey point; and a distance measuring device for calculating a distance from the surveying instrument to the survey point. The optical axes of the collimator optical system and the distance measuring optical system are offset from each other.

Abstract: A surveying instrument having an AF apparatus, provided with a focusing lens and a collimation telescope, includes a focus detector for detecting a focus state through the collimation telescope, and a controller for moving the focusing lens of the collimation telescope to a focal position, based on the focus state detected by the focus detector. The surveying instrument includes a single focus mode at which only one detection of the output of the focus detector and only one control operation of the controller based on the detected output are carried out, and a continuous focus mode at which a plurality of detections of the output of the focus detector and a plurality of control operations of the controller based on the detected outputs are sequentially carried out, the single focus mode and the continuous mode being selectively performed.

Abstract: The present invention intends to provide an electronic leveling apparatus or the like in which a pattern image of a staff received on a photoelectric converting unit is converted into an electric signal, a peak of contrast is detected based on the obtained electric signal, and thus focusing control is carried out.

Abstract: The invention relates to a method for carrying out the non-contact measurement of geometries such as surfaces of objects. The measuring is carried out by a coordinate measuring machine with a laser beam, which is projected onto a measuring point of the object via an optical system, and light that is reflected or scattered by the measuring point is detected by a detector. The aim of the invention is to be able to expand the field of application by invoking the use of simple measures. To this end, the invention provides that the optical system comprises zoom optics whose lens groups are each motor-adjusted separately from one another in positions for working distance and/or resolution and/or measuring range.

Abstract: A distance-measuring apparatus is arranged to project light toward an object to be measured, receive reflected light from the measured object, and detect the distance to the measured object through arithmetic operation and integral operation. In the distance-measuring apparatus, a capacitance of an integrating capacitor 6 is set so as to discharge/charge the integrating capacitor 6 to the maximum when a time necessary for the first integral is minimum. In the detection of the distance to the measured object, when the time necessary for the first integral is longer than the minimum time, the first integral and second integral of the integrating capacitor are carried out repeatedly.

Abstract: A method for measuring the end point and for monitoring the real time kinetics of a bioaffinity reaction in biological fluids and suspensions, employing microparticles as bioaffinity binding solid phase, biospecific reagent labelled with a fluorescent label and a fluorescence detection system which is based on two-photon fluorescence excitation, contacting the analyte, the labelled reagent and the solid phase simultaneously, focusing a two-photon exciting laser beam into the reaction suspension and measuring the fluorescence signal emitted by the microparticles from one particle at a time when they randomly float through the focal volume of the laser beam. In this method the signal is monitored kinetically to obtain information about the analyte concentration before the reaction approaches the highest point of the response. Since the growth rate of the signal intensity is directly proportional to the analyte concentration, the analyte concentration can be predicted in the initial phase of the reaction.

Abstract: A homogeneous biospecific assay method for an analyte in solution or in a biological suspension, in which a biospecific reagent competitively binding an analyte and a ligand labeled with a fluorescent molecule, is reacted with and bound to a solid phase, and in which the free labeled ligand is extracted is excited with two-photon excitation by focusing a laser beam suitable for two-photon excitation into the sample volume; and the concentration of the analyte is calculated based on the photon emission contributed by the free labeled ligand.