Abstract: A polygon mirror includes: a base body having a plurality of side surfaces, a first surface adjacent to the plurality of side surfaces, and a second surface adjacent to the plurality of side surfaces and opposite to the first surface; and a film formed on the plurality of side surfaces and extending from the plurality of side surfaces over the first surface and the second surface, wherein the film includes: a first region formed on the first surface along the plurality of side surfaces; a second region formed on the second surface along the plurality of side surfaces, and wherein a first volume of the first region and a second volume of the second region are different from each other.

Abstract: An optical device includes a light source section configured to emit light; a converging reflector configured to converge and reflect the light from the light source section to an irradiation surface having a curvature; and a position detector configured to detect a light-receptive position of the light reflected from the irradiation surface.

Abstract: Techniques for directing light from a movable stage in an additive fabrication device are provided. According to some aspects, the movable stage may include a parabolic mirror onto which light may be directed at various different incident angles to produce light along different positions along an axis. In some cases, this axis may be perpendicular to a direction of motion of the movable stage.

Abstract: Systems, devices, and methods for additive manufacturing as disclosed allow for improved optical access to a build platform. In at least some embodiments a multiplexing optic of an additive manufacturing device is configured to multiplex an arbitrary number of optical paths to a build platform along a substantially common optical axis by dividing a theoretical input aperture of the multiplexing optic into a plurality of sub-apertures. Each sub-aperture can independently receive and direct an optical path to the build platform. An optical path can be a light path from a light source or an optical process monitoring path from an optical process monitoring system or optical process monitoring device. In some embodiments, an optical path can enter the multiplexing optic off-axis and/or off-angle with respect to an optical axis of the multiplexing optic. The multiplexing optic can include one or more lens elements and/or one or more mirror elements.

Abstract: A head-mounted display includes a display device, a projection optical member, a prism member, and a light condensing and reflecting surface. The prism member includes a first prism, and a second prism that is disposed further toward an exit pupil side than the first prism. The first prism includes an incident surface, a reflection surface that totally reflects the image light, and a first joining surface that is joined with the second prism via a semi-transmissive reflection surface. The second prism includes a second joining surface that is joined with the first joining surface, and an opposing flat surface that is disposed parallel to the reflection surface to face the reflection surface and configured to transmit the image light, reflected by the semi-transmissive reflection surface and then by the light condensing and reflecting surface and thereafter passing through the semi-transmissive reflection surface.

Abstract: A near-eye display (NED) includes a source assembly, a waveguide outside a field-of-view of a user, and a main optic within the field-of-view. The waveguide expands light emitted from the source assembly in at least one dimension and out-couple the expanded light. The main optic is partially transparent and is positioned such that the user of the NED looks through the main optic to view a local area surrounding the NED. The main optic receives light from the local area, combines the received light with the expanded light to generate combined light, and directs the combined light to the user's eye-box.

Abstract: Disclosed is a method of performing a measurement in an inspection apparatus, and an associated inspection apparatus and HHG source. The method comprises configuring one or more controllable characteristics of at least one driving laser pulse of a high harmonic generation radiation source to control the output emission spectrum of illumination radiation provided by the high harmonic generation radiation source; and illuminating a target structure with said illuminating radiation. The method may comprise configuring the driving laser pulse so that the output emission spectrum comprises a plurality of discrete harmonic peaks. Alternatively the method may comprise using a plurality of driving laser pulses of different wavelengths such that the output emission spectrum is substantially monochromatic.

Abstract: An apparatus executes an acquisition process for acquiring pixel value information items from a sensor that outputs the pixel value information items obtained at multiple sampling angles by executing a reciprocation scan with a measurement wave in a scan direction; executes a calculation process for calculating, based on the pixel value information items for one reciprocating motion in the reciprocation scan for each of multiple different arrangement orders in which a chronological pixel value information item on a forward path and a reverse-chronological pixel value information item on a backward path are alternately assigned, differences between the chronological pixel value information item and the reverse-chronological pixel value information item which are adjacent to each other in an arrangement direction; and executes a generation process for generating, based on the differences, a correction information item related to the pixel value information items for the one reciprocating motion in the reciproca

Abstract: The present invention provides a scanning system (100) comprising a first port for receiving or emitting a stationary beam (60) of electromagnetic radiation, a second port for emitting or receiving a scanning beam of electromagnetic radiation, the scanning beam scanning in a main scanning direction, a scanning element (61) for relaying the stationary beam (60) into the scanning beam or vice versa, an optical system between the scanning element (61) and the second port, wherein the optical system comprises at least a first mirror (63) and a second mirror (64) having a rotationally symmetric curved mirror surface around their optical axis, at least one of the first and the second curved mirror surface having an aspheric shape, and wherein the first and the second mirror (63, 64) have an off-axis decentered aperture and are offset in position in a direction perpendicular to the main scanning direction.

Abstract: An illumination optical unit for EUV projection lithography illuminates an illumination field with illumination light from a light source. A first facet mirror of the illumination optical unit has a plurality of first facets for the reflective guidance of partial beams of a beam of the EUV illumination light. Disposed downstream of the first facet mirror is a second facet mirror with a plurality of second facets for further reflective guidance of the partial beams. As a result of this, the reflective beam guidance that the two facets predetermines object field illumination channels, by which the whole object field is illuminable by the illumination light in each case and to which exactly one first facet and exactly one second facet is assigned in each case.

Abstract: An optical source for a photolithography tool includes a source configured to emit a first beam of light and a second beam of light, the first beam of light having a first wavelength, and the second beam of light having a second wavelength, the first and second wavelengths being different; an amplifier configured to amplify the first beam of light and the second beam of light to produce, respectively, a first amplified light beam and a second amplified light beam; and an optical isolator between the source and the amplifier, the optical isolator including: a plurality of dichroic optical elements, and an optical modulator between two of the dichroic optical elements.

Abstract: A divergence-changing device, comprising a ray source, a substantially telecentric arrangement, having an optical system, which has a first focal point and a first system region and a second system region, and having a ray-deflecting device, which is designed such that the beam of rays from the ray source hits the ray-deflecting device, wherein the main ray would hit/hits the ray-deflecting device at the first focal point or close to the first focal point, and that the ray-deflecting device can feed the beam of rays from the ray source to the first system region at different angles of incidence, wherein the beam of rays imaged by the first system region is deflected onto the second system region by a ray-folding device, wherein the beam of rays is imaged by the second system region such that the beam of rays hits the ray-deflecting device again and leaves the divergence-changing device with a constant position.

Abstract: An image reading optical system, including: an imaging optical system used for imaging a slit area of a document and includes an optical element having different cross section shapes in a main scanning direction and in a sub-scanning direction; an aperture stop; and an optical phase changing filter disposed adjacent to the aperture stop and including a phase lead area and a phase delay area, in which the optical phase changing filter includes a surface shape component that is symmetric only with respect to a predetermined plane including a surface normal at the center of the incident beam and one of the main scanning direction and the sub-scanning direction, and with respect to a surface that includes the surface normal at the center of the incident beam and is perpendicular to the predetermined plane, one side is the phase lead area, and another side is the phase delay area.

Abstract: An optical system for a scanner according to one example embodiment includes a light source for illuminating a target area and a plurality of mirrors that includes a first mirror positioned to receive a light beam traveling along a first optical path and to reflect the beam along a second optical path. A second mirror receives the beam traveling along the second optical path and reflects the beam along a third optical path. A third mirror receives the beam traveling along the third optical path and reflects the beam along a fourth optical path. A fourth mirror receives the beam traveling along the fourth optical path and reflects the beam along a fifth optical path. A fifth mirror receives the beam traveling along the fifth optical path and reflects the beam along a sixth optical path. An image sensor receives the beam and senses an image of the target area.

Abstract: Provided are a resinous reflecting optical element that achieves high mirror surface precision by mitigating the warping effects associated with contraction during resin hardening and suppressing the distortion of a mirror surface that results from resistance to mold release, and a scanning optical device that uses said reflecting optical element.

Abstract: A disclosed optical scanner apparatus can include a member having spaced apart proximal and distal portions. An optical scanning device can be configured to direct optical radiation, which is moveably coupled to the proximal portion of the member and can be configured to rotate in a plane of movement to a first position to direct the optical radiation along a first path and can be configured to rotate in the plane of movement to a second position to direct the optical radiation along a second path. A MicroElectroMechanical Systems (MEMS) actuator can be coupled to the optical scanning device, where the MEMS actuator can be configured to move in a first direction to move the optical scanning device to the first position and can be configured to move in a second direction to move the optical scanning device to the second position.

Abstract: A beam-steering system having high positional resolution and fast switching speed is disclosed. Embodiments of the beam-steering system comprise a diffraction limited optical system that includes a reflective imager and two controllably rotatable MEMS elements. The optical system is characterized by a folded optical path, wherein light propagating on the path is incident on each MEMS element more than once. Each MEMS element imparts an optical effect, such as angular change, on the output beam. By virtue of the fact that the optical system is multi-bounce optical system, the optical effect at each MEMS element is multiplied by the number of times the light hits that MEMS element.

Abstract: An optical device is provided for projecting a light beam. The device comprises a first planar reflector movable about a first axis is disposed in a path of a focused light beam for deflecting the incident light beam; a concave reflective surface fixed in position located in the path of the deflected light beam, has a circular shape extending along at least one of its axis and is spaced apart from the planar reflector by a distance which is approximately equal to the radius of that circular shape; and a second planar reflector moveable about a second axis located in a plane substantially vertical to a plane comprising the first axis and wherein the second planar reflector is positioned in the path of the light reflected by the concave reflective surface such that the light beam is projected onto a target plane with a substantially flat field of focus.

Abstract: A mirror includes a substrate, a reflection layer, and a protection layer. The substrate includes a surface having an attachment area and a reflection area. The reflection layer is formed on the reflection area. The protection layer is formed on the reflection area on which the reflection layer is formed and the attachment area. Material of the protection layer is homogeneous across the reflection area and the attachment area.

Abstract: A beam-steering system having high positional resolution and fast switching speed is disclosed. Embodiments of the beam-steering system comprise a diffraction limited optical system that includes a reflective imager and two controllably rotatable MEMS elements. The optical system is characterized by a folded optical path, wherein light propagating on the path is incident on each MEMS element more than once. Each MEMS element imparts an optical effect, such as angular change, on the output beam. By virtue of the fact that the optical system is multi-bounce optical system, the optical effect at each MEMS element is multiplied by the number of times the light hits that MEMS element.

Abstract: Improvement of speckling noise is discussed in which a central light beam received at a double-sided mirror is divided into a plurality of sub-beams. An intensity of these sub-beams decays from a second sub-beam to a last sub-beam of the plurality. Each sub-beam is also separated at the double-sided mirror by at least a first length, such as the coherence length or intrinsic divergence, and reflected toward a display screen. The configuration of the double-sided mirror focuses the sub-beams to converge with a first sub-beam on the display screen at different angles. The decreasing intensity and different angles of impact with the screen decreases the spatial coherence of the display light. The angle diversity and combination of multiple sub-beams having different intensities offers a non-time-averaging means to decrease speckle noise without downgrading the beam quality or display resolution.

Abstract: The present invention provides an optical scanning device that prevents a disadvantageous increase in device size. Transfer optical system 17 includes at least concave mirrors 19 and 20. Furthermore, transfer optical system 17 allows a light beam scanned by scan mirror 16 to enter the scan mirror again at least via concave mirrors 19 and 20. Then, scan mirror 16 scans and emits the laser light beam received via concave mirrors 19 and 20, to a plane of projection.

Abstract: At least one exemplary embodiment is directed to an image display apparatus which displays an image on a surface to be scanned and includes a light source configured to emit a light beam modulated on the basis of image information, a scanner configured to scan the surface to be scanned with the light beam emitted from the light source, a light receiver configured to receive the light beam that is incident upon a particular area of the surface to be scanned when the surface to be scanned is scanned with the light beam, a first determiner configured to determine whether or not an output signal from the light receiver are output at a predetermined time interval, and a controller configured to control driving of the light source on the basis of a determination signal from the determiner.

Abstract: In an image forming apparatus provided with an optical beam scanning apparatus according to the invention, an optical beam scanning apparatus of an overillumination scanning optical system includes a semiconductor laser device as a light source, a pre-deflection optical system, a polygon mirror, and a post-deflection optical system, with a width of the luminous flux made incident on the polygon mirror being wider than a width of one reflecting surface forming the polygon mirror, wherein at least two sheets of flat plate for transmitting the luminous flux scanned by the polygon mirror are provided in the post-deflection optical system. In accordance with an image forming apparatus provided with an optical beam scanning apparatus according to the invention, not only a wave front aberration on a photoconductive drum can be suitably corrected, but suitable beam diameter and beam profile can be obtained on the photoconductive drum.

Abstract: The present invention provides an optical scanning device that prevents a disadvantageous increase in device size. Transfer optical system 17 includes at least concave mirrors 19 and 20. Furthermore, transfer optical system 17 allows a light beam scanned by scan mirror 16 to enter the scan mirror again at least via concave mirrors 19 and 20. Then, scan mirror 16 scans and emits the laser light beam received via concave mirrors 19 and 20, to a plane of projection.

Abstract: An afocal beam relay has a concave reflective surface having a first center of curvature and a first vertex that define an optical axis. A convex reflective surface has a second center of curvature that is substantially coincident with the first center of curvature and a second vertex that lies along the optical axis. The convex reflective surface faces toward the concave reflective surface to relay a decentered entrance pupil to a decentered exit pupil. An aspheric corrector element is disposed in the path of input light that is directed to the decentered entrance pupil and has correction values that are substantially centered on the first center of curvature.

Abstract: The present invention is a scanning system having spherical mirrors to operate a two-dimensional scanning. Aberration owing to oblique incident light is compensated to reach diffraction limit.

Abstract: An image forming apparatus provided with an optical beam scanning apparatus according to the invention includes a semiconductor laser device, a pre-deflection optical system, a polygon mirror, and a post-deflection optical system, wherein at least one imaging lens for imaging the luminous flux is provided in the post-deflection optical system includes; at least one projection on a vertical surface to a sub-scanning direction axis is provided in the imaging lens; and at least one positioning member having an engaging groove into which the projection is interfitted and which is engaged in a concave-convex shape is provided in the housing unit of the optical beam scanning apparatus. In accordance with an image forming apparatus according to the invention, in a scanning optical system using an imaging lens or an imaging mirror, influences against optical characteristics following an environmental fluctuation or a change with time can be reduced.

Abstract: The present invention is a scanning system having spherical mirrors to operate a two-dimensional scanning. Aberration owing to oblique incident light is compensated to reach diffraction limit.

Abstract: A disclosed scanner apparatus includes a member having spaced apart proximal and distal portions. An electromagnetic radiation device is configured to direct electromagnetic radiation therefrom and is movably coupled to the distal portion of the member. The electromagnetic radiation device is configured to move in a first plane of movement to a first position to direct the electromagnetic radiation along a first path and configured to move in the plane of movement to a second position to direct the electromagnetic radiation along a second path. A MicroElectroMechanical Systems (MEMS) actuator is coupled to the electromagnetic radiation device, wherein the MEMS actuator is configured to move in a first direction to move the electromagnetic radiation device to the first position and configured to move in a second direction to move the electromagnetic radiation device to the second position. Other scanning and robotic structure devices are disclosed.

Abstract: An illumination light source uses a beam to scan while a relatively small mirror, such as an MEMS mirror, is oscillated at or in the vicinity of the resonance frequency. In this instance, the scan angle is corrected with the use of a correction optical system for uniform illumination to be achieved.

Abstract: A wide angle display system, comprising a scanner having at least one reflective surface and an axis of rotation, a dome having a reflective inner surface, the inner surface having an axis of revolution which is coincident with the axis of rotation of the scanner, at least one linear arrangement of light sources producing beams of light. The reflective surface of the scanner reflects the beams of light towards the reflective inner surface of the dome which in turn collimates the beams of light and reflects them towards an observer positioned within the wide angle display system.

Abstract: In an image forming apparatus provided with an optical beam scanning apparatus according to the invention, an optical beam scanning apparatus of an overillumination scanning optical system includes a semiconductor laser device as a light source, a pre-deflection optical system, a polygon mirror, and a post-deflection optical system, with a width of the luminous flux made incident on the polygon mirror being wider than a width of one reflecting surface forming the polygon mirror, wherein at least two sheets of flat plate for transmitting the luminous flux scanned by the polygon mirror are provided in the post-deflection optical system. In accordance with an image forming apparatus provided with an optical beam scanning apparatus according to the invention, not only a wave front aberration on a photoconductive drum can be suitably corrected, but suitable beam diameter and beam profile can be obtained on the photoconductive drum.

Abstract: Disclosed is a projection image display apparatus to display an image by projecting a light from a light source to a screen including a scan mirror to scan the light from the light source by vibrating in a sine vibration manner at least in an one-dimensional direction and a correction lens which is disposed between the scan mirror and the screen and which corrects a deflection angle of the light scanned by the scan mirror at least in the one-dimensional direction, and the correction lens carries out a correction so that the larger a scan angle of the scan mirror is, the larger the deflection angle is to be by the correction.

Abstract: An image display apparatus that displays an image by scanning of coherent light includes: a light source portion that emits the coherent light; a scanning portion that scans the coherent light; a concave reflection portion having a concave surface from which the coherent light is reflected; and an incident position changing unit that changes an incident position of the coherent light onto the concave surface in a curvature direction of the concave surface.

Abstract: A concave mirror optical system for a scanner and a method for compensating image distortion. In this invention, the more expensive lens assembly in a conventional optical system is replaced by a concave mirror made from simple low-cost material so that production cost and chromatic dispersion are reduced. Moreover, different magnifications can be obtained due to a difference in focusing power of the concave mirror along XY axis direction.