Abstract: Various embodiments of a multi-laser system are disclosed. In some embodiments, the multi-laser system includes a plurality of lasers, a plurality of laser beams, a beam positioning system, a thermally stable enclosure, and a temperature controller. The thermally stable enclosure is substantially made of a material with high thermal conductivity such as at least 5 W/(m K). The thermally stable enclosure can help maintain alignment of the laser beams to a target object over a range of ambient temperatures. Various embodiments of an optical system for directing light for optical measurements such laser-induced fluorescence and spectroscopic analysis are disclosed. In some embodiments, the optical system includes a thermally conductive housing and a thermoelectric controller, a plurality of optical fibers, and one or more optical elements to direct light emitted by the optical fibers to illuminate a flow cell. The housing is configured to attach to a flow cell.

Abstract: A jig assembly for laser welding includes a jig body having a first penetration portion through which laser light for welding is capable of passing; a contact member connected to the jig body to contact a welding target, the contact member having a second penetration portion through which the laser light passing through the first penetration portion is capable of passing toward the welding target; a tilting unit having a hinge structure to connect the jig body and the contact member to each other; and an elastic member interposed between the jig body and the contact member to apply an elastic force to provide close contact between the contact member and the welding target.

Abstract: A sight system is provided that includes an optical mode providing an optical image of a field of view and a video display mode providing video of the field of view acquired by an image sensor. The sight system can include optical components configured to present the field of view to the image sensor and to present substantially the field of view to a user through an eyepiece coupled to the sight system. The sight system can include a display configured to display to the user, through the eyepiece, video of the field of view acquired by the image sensor. The sight system can include a user interface feature configured to change from the optical mode to the video display mode when actuated by the user. Thus, the sight system can be configured to provide bore-sighted optical and video data to the user.

Abstract: An offset aperture two-axis gimbaled optical system comprises a two-axis gimbal and an optics assembly that is mounted on the inner gimbal and offset radially from the rotation axis of the outer gimbal. The optics assembly is suitably offset so that its optical aperture does not overlap the rotation axis of the outer gimbal and its optical aperture is symmetric about the rotation axis of the inner gimbal. In different applications, the offset aperture provides for reduced optical aberrations and improved utilization of the available packaging volume to accommodate multiple offset aperture optics assemblies.

Abstract: An offset aperture gimbaled optical system comprises a gimbal and an optics assembly that is mounted on an inner gimbal and offset radially from an axis of symmetry (and rotation axis) of a conformal dome. An optical corrector adjacent the inner surface of the conformal dome encompasses the field-of-view of the optics assembly as the inner gimbal rotates about its rotation axis. The corrector is fixed with respect to the inner gimbal's rotation axis while it rotates about the axis of symmetry. The optical corrector comprises an aspheric transparent arch having an optical corrector shape and position responsive to a shape of the conformal dome at the offset position of the optics assembly. In different applications, the offset aperture provides for reduced optical aberrations and improved utilization of the available packaging volume to accommodate multiple offset aperture optics assemblies.

Abstract: A MEMS apparatus is provided for scanning an optical beam. The MEMS apparatus is formed out of a pre-fabricated multi-layer device and comprises at least one tilting micro-mirror formed in a first active layer of that pre-fabricated multi-layer device and a support structure formed in a second layer of the pre-fabricated multi-layer device, and wherein the support structure is preferably formed by etching parts of the second layer to obtain a pre-determined shape of the supporting structure.

Abstract: Apparatuses with actuators having actuator-side attachment areas disposed thereon, an optical element having mirror-side attachment areas disposed thereon and springs are described, wherein an optical element is connected to actuators via two or four springs.

Abstract: An endoscope includes: a first objective lens that causes an image of a first object to be observed to be formed; a second objective lens that causes an image of a second object to be observed to be formed; a light guide that guides illuminating light from a light source to an insertion portion; a light distribution member that distributes light from the light guide between a first observation direction and a second observation direction; a light amount varying portion for changing light amount proportions with respect to light emitted in the first observation direction and light emitted in the second observation direction; a distance detection portion that measures a second distance between the second objective lens and an object to be observed in the second observation direction; and a control portion that controls the light amount varying portion based on a second distance signal.

Abstract: A micromechanical mirror arrangement comprising a mirror plate (1) which forms a translation mirror, which is connected via at least one holding element (2), preferably two or more holding elements, to a frame structure (3) and is movable in translation relative to this frame structure, characterized in that the connection region (4) of at least one holding element (2), preferably of all holding elements, with the mirror plate (1) is arranged inwardly offset, viewed from the outer margin (5) of the mirror plate toward to the center (6) of the mirror plate.

Abstract: An optical scanner includes: a light reflecting section having light reflectivity; a movable section which includes the light reflecting section and can be displaced; two link sections connected to positions of ends of the movable section, the positions facing each other; a supporting section supporting the link sections; and a displacement providing section turning the two link sections, wherein each link section includes a turnable drive section, and a shaft section connecting the movable section and the drive section and bending in a thickness direction of the movable section by turning of the drive section.

Abstract: An illumination system of a microlithographic projection exposure apparatus comprises an optical raster plate having a light entrance surface. An irradiance distribution on the light entrance surface determines an angular light distribution of projection light when it impinges on a mask to be illuminated. The illumination system further comprises a control unit and a spatial light modulator which produces on the light entrance surface of the optical raster plate a plurality of light spots whose positions can be varied. At least some of the light spots have, along a reference direction (X), a spatial irradiance distribution comprising a portion in which the irradiance varies periodically with a spatial period P.

Abstract: Irradiance control systems (“ICSs”) that control the irradiance of a beam of light are disclosed. ICSs include in a beam translator and a beam launch. The beam translator translates the beam substantially perpendicular to the propagating direction of the beam with a desired displacement so that the beam launch can remove a portion of the translated beam and the beam can be output with a desired irradiance. The beam launch attenuates the irradiance of the beam based on the amount by which the beam is translated. ISCs can be incorporated into fluorescent microscopy instruments to provide high-speed, fine-tune control over the irradiance of excitation beams.

Abstract: A fluorescence measurement system comprising a broadband light source and acousto-optical turnable filter (AOTF) controlled by a control unit using an acoustic RF signal provided by a Voltage Controlled Oscillator (VCO).

Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

Abstract: The present invention is a sweeping or reciprocating laser scanning device. The reciprocation or sweeping motion is cam driven. As the cam rotates, a lever arm is reciprocated or oscillated between two positions, which causes the laser or beam of light to move linearly, thus creating a triangular plane of light resulting in a reciprocating linear reference across the hypotenuse of the triangular plane of light.

Abstract: A MEMS mirror is disclosed having thickness correlated with the intensity profile of an impinging optical beam, so as to reduce moment of inertia of the MEMS mirror while preserving optical quality of the reflected beam. It is the mirror edges that contribute the most to the moment of inertia, while it is generally the mirror center that contributes the most to a reduction of the quality of an optical beam reflected from the mirror. Accordingly, by providing a mirror having laterally varying thickness matched to the local variation of the intensity of the optical beam, the quality of the latter may be preserved while the moment of inertia of the mirror may be significantly reduced. The thickness of MEMS mirrors may be varied continuously or stepwise; in one direction or in two mutually orthogonal directions.

Abstract: An apparatus for modulating an incident beam includes a body that is non-transmissive and rotatable about an axis perpendicular to a surface of the body. The body has a first set of features including transmissive features with respect to the incident beam along a first radial path at a first radial distance from the axis and a second set of features including data storage features along a second radial path at a second radial distance from the axis. The apparatus also includes a reference sensor disposed over a first position along the second radial path. In the apparatus. the radial distances are different and the numbers of transmissive features and data storage features are relatively prime. When the body is rotating, the first set of features modulate the incident beam and the reference sensor generates a reference signal based on the data storage features traversing the first position.

Abstract: A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.

Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

Abstract: A light scanning apparatus, including: a light source; a light deflector configured to deflect a light beam emitted from the light source to scan a photosensitive member; an optical member configured to guide the light beam the photosensitive member; a housing configured to contain the light source, the light deflector, and the optical member; a cover member configured to be attached to a side wall of the housing so as to keep dust out of the light scanning apparatus; and an elastic member having a first abutment portion which is attached to the cover member and is elastically deformed by abutting the side wall, and a second abutment portion which is elastically deformed to abut the side wall according to elastic deformation of the first abutment portion when the cover member is attached to the housing.

Abstract: In accordance with the teachings of the present invention, a system and method for increasing the bit-depth of a video display system using a pulse lamp are provided. In one embodiment, the method includes illuminating a digital micro-mirror device with a light source having a variable power supply, receiving a signal indicating the light output provided to the digital micro-mirror device by the light source should be reduced to a target level during a predetermined time period, reducing a power supplied to the light source by the variable power supply in response to the signal such that the light output of the light source is reduced to about a target level during the predetermined time period, displaying a least significant bit on the digital micro-mirror device during the predetermined time period, and decreasing a speed of a master clock controlling the digital micro-mirror device in response to the light output of the light source deviating below the target level during the predetermined time period.

Abstract: The subject of the invention is a mechanical device for inserting one out of a multitude of optical components (such as filters) in an optical path and changing the angle of incidence between the incoming light and the selected optical component independently of the optical component selection.

Abstract: A MEMS device, a printer and a method of printing is presented including providing a light source producing a modulated beam of light, positioning a mirror with a reflective surface to intercept the modulated beam of light. Allowing the mirror to rotate on a single-axis hinge structure such that the resultant reflected beam is swept in a scan plane and creating an image at an intersection of the scan plane and an image plane. Causing the mirror to rotate about the single-axis hinge structure and to oscillate at a tilt about the single-axis hinge structure, wherein the resultant reflected beam of light forms a lemniscate pattern along the image plane, and wherein the lemniscate pattern has an inner angle between a left sweep segment and a right sweep segment of the image.

Abstract: An optical fiber switch (16) for alternatively redirecting an input beam (14) comprises a redirector (18) and a redirector mover (20). The redirector (18) redirects the input beam (14) so that a redirected beam (46) alternatively launches from the redirector (18) (i) along a first redirected axis (354) that is spaced apart from a directed axis (344A) when the redirector (18) is positioned at a first position (348), and (ii) along a second redirected axis (356) that is spaced apart from the directed axis (344A) when the redirector (18) is positioned at a second position (350) that is different from the first position (348). The redirector mover (20) moves the redirector (18) about a movement axis (366) between the first position (348) and the second position (350).

Abstract: Disclosed herein are a piezo-type scanning apparatus and a touch screen using the same. The preferred embodiments of the present invention provides the scanning apparatus including a light source; an optical fiber of which one end is connected to the light source to provide a transmission line; a support that supports the side surface of the optical fiber; and a driving body that is positioned between the support and the light source to provide driving force rotating the optical fiber using piezoelectric force, and the touch screen using the same.

Abstract: A vibrating mirror element includes a base member, a substrate made of metal, integrally formed with a mirror portion, a movable portion swingably supporting the mirror portion from both sides and functioning as a lower electrode, and a mounting portion supporting the movable portion and mounted on the base member, a piezoelectric film provided on the movable portion of the substrate and vibrating the mirror portion by application of a periodic voltage, and an upper electrode provided on the piezoelectric film.

Abstract: A mirror control device includes a pivotally supported mirror (230), electrodes (340a-340d) spaced apart from the mirror (230), a driving voltage generation means (401) for generating a driving voltage corresponding to the desired tilt angle of the mirror (230) for each electrode, a bias voltage generation means (402) for generating, as a bias voltage for each electrode, a voltage which causes the tilt angle of the mirror (230) to have the same predetermined value upon being independently applied to each of the electrodes (340a-340d), and an electrode voltage applying means (403) for adding, for each electrode, the bias voltage to the driving voltage and applying the voltage after addition to a corresponding one of the electrodes (340a-340d).

Abstract: A beam-steering system having high positional resolution and fast switching speed is disclosed. Embodiments of the beam-steering system comprise a diffraction limited optical system that includes a reflective imager and two controllably rotatable MEMS elements. The optical system is characterized by a folded optical path, wherein light propagating on the path is incident on each MEMS element more than once. Each MEMS element imparts an optical effect, such as angular change, on the output beam. By virtue of the fact that the optical system is multi-bounce optical system, the optical effect at each MEMS element is multiplied by the number of times the light hits that MEMS element.

Abstract: An optical device including: a laser light emitting portion that emits laser light; a polygon mirror having a reflective surface that reflects the laser light, the polygon mirror being driven to rotate and deflecting the laser light emitted from the laser light emitting portion; a first lens through which the laser light reflected by the polygon mirror is transmitted, the first lens refracting the laser light; a second lens through which the laser light having passed through the first lens is transmitted, the second lens refracting the laser light; and an adjustment unit that adjusts at least one of a length of a first optical path between the polygon mirror and the first lens, and a length of a second optical path between the first lens and the second lens.

Abstract: An optical reflection device includes a flexible substrate, an elastic portion connected with an end of the flexible substrate, an optical reflector coupled with the flexible substrate via the elastic portion, a first electrode layer provided on the flexible substrate, and a piezoelectric layer provided on the first electrode layer. The optical reflection device may have a small size.

Abstract: A method for creating a pixel image in a two-dimensional display coordinate system from sampled data derived from a collector of a scanned beam imager adapted to transmit a beam of radiation which traces a trajectory in a two-dimensional acquisition coordinate system. The trajectory contains datum locations in the acquisition coordinate system associated with the sampled data. The method includes receiving the sampled data. The method also includes adjusting a mathematical model of the trajectory based on a function of at least one of rotation, translation, and desired scaling of the model of the trajectory. The method also includes constructing the pixel image in the display coordinate system from the adjusted model of the trajectory.

Abstract: A wafer-level manufacturing method produces stress compensated x-y gimbaled comb-driven MEMS mirror arrays using two SOI wafers and a single carrier wafer. MEMS structures such as comb drives, springs, and optical surfaces are formed by processing front substrate layer surfaces of the SOI wafers, bonding together the processed surfaces, and removing the unprocessed SOI layers to expose second surfaces of the front substrate layers for further wafer-level processing. The bonded SOI wafers are mounted to a surface of the carrier wafer that has been separately processed. Processing wafer surfaces may include formation of a stress compensation layer to counteract physical effects of MEMS mirrors. The method may form multi-layered conductive spring structures for the mirrors, each spring having a first conducting layer for energizing a comb drive, a second conducting layer imparting a restoring force, and an insulating layer between the first and second conducting layers.

Abstract: An optical deflecting device including a mirror member having a light reflective area. The optical deflecting device includes a plurality of electrodes that are formed on a substrate, a fulcrum member that functions as an electrode and a regulation member. The range of movement to a respect direction of the substrate is regulated by the regulation member, which includes a conductive material at least in the surface thereof.

Abstract: A laser system employs a window integrated in the surface of a weapon platform. A high energy laser is mounted in the weapon platform to provide a laser beam which is received by a Coude' path for internal direction of the beam. A beam director receives the laser beam from the Coude' path and employs an outer steering assembly and an inner steering assembly to cooperatively provide pointing of a centerline of the laser beam at a substantially single location on the window for a full conical field of regard.

Abstract: A method and apparatus for producing high frequency dynamically focused oblique laser illumination for a spinning wafer inspection system. The focus is changed by changing the beam direction incidence angle so as to bring focal spot onto the wafer surface. Disclosed herein is a system and method for automatic beam shaping (i.e., spot size) and steering (i.e., position) for a spinning wafer inspection system, combined into a single module. Also disclosed is a method and system for measuring the beam position/size/shape and angle with sufficient resolution to make corrections using feedback from the monitor.

Abstract: A support member and an optical fiber are disposed side by side inside a tubular outer envelope of an optical probe to extend in the longitudinal direction of the outer envelope. A light deflectors which deflects light emitted from the front end of the optical fiber in the circumferential direction of the outer envelope is provided and the light deflector is rotated in response rotation of the support member by a drive means such as a motor, whereby an optical probe which can deflect light emitted from the circumferential surface of the outer envelope in the circumferential direction of the outer envelope and is easy to make thinner and down its cost can be obtained.

Abstract: An optical fiber switch (16) for alternatively directing an input beam (14) to a plurality of different locations (18A) (18B) (18C) (18D) includes an input fiber (30), a redirector (32), a redirector mover (382), a first output fiber (34), and a second output fiber (36). The input fiber (30) launches the input beam (14) along an input axis (30A). The redirector (32) is positioned in the path of the input beam (14). The redirector (32) redirects the input beam (14) so that a redirected beam (42) launches from the redirector (32) along a first redirected axis (360) that is spaced apart from the input axis (30A) when the redirector (32) is positioned at a first position (346), and launches from the redirector (32) along a second redirected axis (362) that is spaced apart from the input axis (30A) when the redirector (32) is positioned at a second position (348) that is different from the first position (346).

Abstract: A method and apparatus is provided for scanning an object, featuring scanning an incident beam in a substantially curved scan pattern; and moving an object at a predetermined rate along an axis substantially orthogonal to a plane of the curved scan pattern so that a two dimensional image can be formed by successive passes of a circularly scanned spot. In particular, a laser beam scans around an objective lens at a fixed radius RL with a fixed input angle ?d. When scanned in this manner, the laser beam before the objective lens forms a “cone” of directions (so herein it is referred to as a “conical scan”). Scanning in this fashion produces the curved scan pattern at the object (substrate). By moving the object (substrate) at the predetermined rate along the axis orthogonal to the plane of the curved scan pattern, the two dimensional image can be formed by successive passes of the circularly scanned spot.

Abstract: A method and apparatus involve: using beam influencing structure to cause a converging beam of radiation to propagate along a first portion of a path of travel; supporting an optical part so that the path of travel extends through the optical part, the converging beam arriving at the optical part along the first portion of the path of travel, and the path of travel having a second portion along which the converging beam travels away from the optical part; and selectively tilting the optical part about a pivot axis lying in an imaginary plane extending transversely to the first portion of the path of travel, pivotal movement of the optical part about the pivot axis causing a change in the orientation of the second portion of the path of travel with respect to the first portion thereof.

Abstract: An energy signal processing system (10) includes a first shaft assembly (14) rotatable about an azimuth axis (16), and a second shaft assembly (18) coaxially mounted for rotation about the azimuth axis (16). The first shaft assembly (14) defines a zenith plane (20) inclined with respect to the azimuth axis (16). The system (10) includes an energy signal processing element (22) rotatable about a processing element axis (24) that intersects and is generally perpendicular to the azimuth axis (16), as well as a means for rotating the element (22) about the element axis (24) such that: energy signals travelling substantially along a preselected path axis (12) and impinging the energy signal processing element (22) are processed or deflected substantially along the azimuth axis (16); or vice versa; or energy signals generated by the energy signal processing element (22) are directed substantially along the preselected path axis (12).

Abstract: An apparatus for providing a modulated pulsed radiation beam (20) has a radiation source (16) for providing a pulsed radiation beam (10) at a constant pulse repetition frequency and a number of beam intensity modulators (18a-18e). A beam-deflecting element (12) in the path of the pulsed radiation beam and rotatable about an axis redirects the pulsed radiation beam cyclically towards each of the plurality of beam intensity modulators in turn. A beam-recombining element rotatable about the axis in synchronization with the beam-deflecting element combines modulated light, from each of the beam intensity modulators in order to form the modulated pulsed radiation beam at the constant pulse repetition frequency. At least one beam-pointing correction apparatus optically conjugates the beam-deflecting element and the beam recombining element at least one rotational position about the axis.

Abstract: A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.

Abstract: Data concerning misalignment of beams is measured and held in an optical scanning apparatus before the optical scanning apparatus is incorporated in an image forming apparatus. The optical scanning apparatus includes a light source for emitting multiple beams, an optical lens for converting the multiple beams to parallel lights and a rotating polygon mirror for rotary-deflecting the multiple beams. Furthermore, the measurement apparatus measures main scanning direction misalignment among the multiple beams on a photosensitive member provided for the image forming apparatus, which has been determined by detecting the multiple beams from the rotating polygon mirror (and an f? lens). The optical scanning apparatus includes a holding unit for holding the data concerning misalignment. The image forming apparatus in which the optical scanning apparatus is incorporated corrects the misalignment with the use of the data concerning misalignment inputted directly or indirectly from the holding unit.

Abstract: A diffuser-reflector assembly for use with a photographic flash lamp (800) comprises, in one aspect, an elastic base (100) having rigid first inserts (125 and 130), two arms (105 and 110), a shaft (135), a pivot assembly (150), and one or more frames (116, 121) that hold second inserts (115, 120). The diffuser-reflector assembly installs slidably onto the light-emitting end of a flash lamp (800). The second inserts can have various optical properties. They can be specular or diffuse reflectors, color or neutral density filters, or a combination. The frames and inserts can be swung on the arms and independently pivoted over a wide range of angles above the lamp, thereby providing a wide range of lighting effects. The frames and arms are held in place by friction and can be adjusted by manual force. The entire assembly can be made of simple parts that snap together.

Abstract: The invention relates to arrangements of micromechanical elements, preferably microoptical elements, which are each held by means of spring elements. In this respect, they can be pivoted or also deflected in translation around a rotational axis by the effect of electrostatic forces. It is the object of the invention to provide an arrangement having micromechanical elements which can be operated over a long time period without drift without any frequent recalibration being necessary. The arrangement in accordance with the invention having micromechanical elements is made in this connection such that electrodes are likewise arranged beneath micromechanical elements, that is, on the side onto which no electromagnetic radiation can be directly incident. In this respect, a respective electrode is arranged and made such that it is associated with at least two micromechanical elements. It can in this connection effect a deflection of the micromechanical elements associated with it by electrostatic force effect.

Abstract: A system and method for reducing speckle and smearing phenomena caused by a coherent light source. The light beam from the coherent light source is preferably refracted by a rotating refractive element. The refracted beam is focused and projected through a light valve by a plurality of optical components. The rotation of the refractive element causes the beam to scroll across the surface of a light receiving element, which reduces the smearing effect. The rotation of the refractive element also causes the propagation path of the beam to vary, causing rays of the light beam to undergo relative phase shift, varying the interference pattern on the light receiving element, resulting in a reduction in the appearance of the speckle phenomenon.

Abstract: A beam-steering system having high positional resolution and fast switching speed is disclosed. Embodiments of the beam-steering system comprise a diffraction limited optical system that includes a reflective imager and two controllably rotatable MEMS elements. The optical system is characterized by a folded optical path, wherein light propagating on the path is incident on each MEMS element more than once. Each MEMS element imparts an optical effect, such as angular change, on the output beam. By virtue of the fact that the optical system is multi-bounce optical system, the optical effect at each MEMS element is multiplied by the number of times the light hits that MEMS element.