Abstract: An exposure apparatus has a field stop, disposed in a position conjugate to a reticle, for regulating an illumination area on the reticle. The field stop is constructed of two aperture members including light shielding portions, rectangular first and second apertures and light reducing portions formed at sides of these apertures. The exposure apparatus also has a drive system for shifting positions of light reducing portions and relatively moving the two aperture members during the projection.

Abstract: A deformable mirror light valve comprised of an array of silicon nitride ribbons, metalized to reflect light. Each ribbon is electrostatically deformed to form a cylindrical mirror. Each deformable ribbon modulates the light of one pixel by focusing the reflected light through a slit. An alternative embodiment focuses the light onto a stop. The ribbon structure has a fast response time combined with high contrast.

Abstract: A grating light valve is configured to either reflect or diffract an incident beam of light from a light source. Each grating light valve includes a plurality of deformable reflective ribbon structures. Preferably, the grating light valve is located within a vacuum chamber. A directable low power electron gun is also positioned within the chamber. To form an image the gun is scanned across an array of grating light valves and selectably irradiates predetermined ones of the ribbons to charge each such ribbon to a predetermined level. Depending upon the amount of charge so deposited onto the ribbon, it will deflect a predetermined distance toward an underlying substrate. The ribbons are preferably erased in one of two ways. According to the preferred embodiment, each ribbon includes a path of impedance to allow the charge to bleed into the substrate. The impedance is selected to discharge a fully charged ribbon in a period of a single frame.

Abstract: The present invention relates to a window tinting apparatus (10) which comprises an outer window (16A) and an inner window (16B) having a window cavity (16C) there between. The window tinting apparatus (10) further comprises a first primary polarized panel (12A) securely affixed to the window (16A, 16B). The first primary polarized panel (12A) comprises a plurality of first primary polarized panel longitudinal polarization lines (12AA) therein. The window tinting apparatus (10) further comprises a secondary polarized panel (14) slidably mounted within the window cavity (16C). The secondary polarized panel (14) comprises a plurality of secondary polarized panel longitudinal polarization lines (14B). The secondary polarized panel (14) further comprises a secondary polarized panel ledge (14A) attached at a distal edge. The secondary polarized panel longitudinal polarization lines (14B) and the first primary polarized panel longitudinal polarization lines (12AA) are parallel to one another.

Abstract: An electrostatic shutter includes an input window, an electrical contact connected to the voltage source, a metallized polymer scroll having one end electrically connected to the electrical contact, an electrically and thermally conductive heat sink selectably connected to the voltage source and so that a potential difference exists between the electrical contact and the heat sink and an electrical insulator covering the heat sink. When a sufficient voltage potential exists between the scroll and the heat sink, the scroll unrolls so that the scroll is in direct contact with the input window and thermally coupled to the heat sink through the insulator and the input window.

Abstract: An optical test instrument, for testing response of an optical medium to optical energy, comprises a light source for emitting optical energy in response to electrical energy, a detector for providing an electrical output signal in response to incident optical energy, and a propagation path for delivering optical energy from the light source to the medium under test and for delivering optical energy from the medium under test to the detector. A positioning mechanism displaces an optical attenuator element between a first position, in which it is out of the propagation path, and a second position, in which it is interposed in a segment of the path in which the optical energy is propagated as a beam.

Abstract: This invention relates generally to slits used in optics that must be precisely aligned and adjusted. The optical slits of the present invention are useful in x-ray optics, x-ray beam lines, optical systems in which the entrance slit is critical for high wavelength resolution. The invention is particularly useful in ultra high vacuum systems where lubricants are difficult to use and designs which avoid the movement of metal parts against one another are important, such as monochrometers for high wavelength resolution with ultra high vacuum systems. The invention further relates to optical systems in which temperature characteristics of the slit materials is important. The present invention yet additionally relates to precision slits wherein the opposing edges of the slit must be precisely moved relative to a center line between the edges with each edge retaining its parallel orientation with respect to the other edge and/or the center line.