Having Significant Infrared Or Ultraviolet Property Patents (Class 359/350)
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Publication number: 20080185521Abstract: Systems and apparatus enhance transmission of electromagnetic energy through a sub-wavelength aperture. A metal film has an input surface and an output surface and forms the sub-wavelength aperture between the input and output surfaces, a first plurality of grooves on the input surface, and a cavity around the sub-wavelength aperture. The width of the cavity determines a resonant wavelength of electromagnetic energy transmitted through the sub-wavelength aperture. The patterned metal film provides plasmon coupling of electromagnetic energy incident upon the input surface transmit electromagnetic energy through the sub-wavelength aperture.Type: ApplicationFiled: February 5, 2007Publication date: August 7, 2008Applicant: ITN ENERGY SYSTEMS, INC.Inventor: Russell E. Hollingsworth
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Patent number: 7405871Abstract: A collector that includes a laser produced plasma (LPP) extreme ultra violet (EUV) light source and a first optical path from the source to a mirror. The mirror is the first mirror that light emitted from the source and traveling along the first optical path impinges upon. The collector also includes a second optical path from the source to another mirror. The other mirror is the first mirror that light emitted from the source and raveling along the second path impinges upon. The mirror and the other mirror are oriented relative to the source such that light from the source traveling along the first optical path travels in a direction opposite to light traveling from the source along the second optical path. A collector having a discharge extreme ultra violet (EUV) light source.Type: GrantFiled: February 8, 2005Date of Patent: July 29, 2008Assignee: Intel CorporationInventor: Jose Sasian
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Patent number: 7405417Abstract: A lithographic apparatus is disclosed. The apparatus includes a projection system configured to project a first radiation beam onto a target portion of a substrate, and at least one monitoring device for detecting contamination in a interior space. The monitoring device includes at least one dummy element having at least one contamination receiving surface. In an aspect of the invention, there is provided at least one dummy element which does not take part in transferring a radiation beam onto a target portion of a substrate, wherein it is monitored whether a contamination receiving surface of the dummy element has been contaminated.Type: GrantFiled: December 20, 2005Date of Patent: July 29, 2008Assignee: ASML Netherlands B.V.Inventors: Lucas Henricus Johannes Stevens, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn
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Patent number: 7403329Abstract: The electronic imaging apparatus comprises a first optical element A having a flat surface and a surface with refracting power, chemical substance which enables to change light transmittance by chemical change according to electric quantity, a second optical element having a transparent surface and a flat surface, and an optical system having an optical component arranged so as to sandwich the chemical substance by a surface of the first optical element and a surface of the second optical element. Here the spectrum transmittance at whole range of ?min??520??max satisfies the following conditions when the whole transmittance of the first optical element, the chemical substance and the second optical element at the wavelength of 520 nm is ?520, 0.70<?440/?520<1.20 0.80<?600/?520<1.30 where ?x (x is a number) is the transmittance at the wavelength of x nm.Type: GrantFiled: February 12, 2004Date of Patent: July 22, 2008Assignee: Olympus CorporationInventor: Shinichi Mihara
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Patent number: 7400445Abstract: Optical filters comprising a small concentration of visible light absorbing components optionally in combination with small concentrations of ultraviolet and infared absorbing components suitable for use in an illuminator for an accelerated weathering device and methods of accelerated weathering.Type: GrantFiled: May 31, 2005Date of Patent: July 15, 2008Assignee: 3M Innovative Properties CompanyInventors: Richard M. Fischer, Jr., Warren D. Ketola
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Publication number: 20080165414Abstract: An alignment tool for a laser beam delivery system includes a base having one or more registration elements and an alignment optic operably coupled to the base. The alignment optic has a fluorescent element and a front surface. The fluorescent element is configured to fluoresce when illuminated by electromagnetic radiation produced by a laser. The front surface includes a reflective surface and an alignment mark. The reflective surface is configured to specularly reflect the electromagnetic radiation, while the alignment mark, which is centrally disposed within the reflective surface, is configured to diffusely scatter the electromagnetic radiation.Type: ApplicationFiled: January 5, 2007Publication date: July 10, 2008Applicant: Advanced Medical Optics, Inc.Inventor: Michael S. Gray
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Publication number: 20080158661Abstract: A lens driving system configured to be mounted on a lens device has: a variable power lens driving section moves a variable power lens group in an optical axis direction; a focus lens driving section moves a focal lens group in the optical axis direction; a receiving section that receives an operation signal for remotely operating the variable power lens driving section and the focus lens driving section; a control section that generates a control signal for controlling the variable power lens driving section and the focus lens driving section based on the operation signal, and a power section that is charged with at least a part of the operation power supplied to a drive section from a camera device and supplies the charged power to the variable power lens driving section, the focus lens driving section, the receiving section, and the control section as operation power.Type: ApplicationFiled: December 13, 2007Publication date: July 3, 2008Inventors: Junichi TANAKA, Koshi KUWAKINO
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Publication number: 20080151360Abstract: Methods and devices for optimized ridge near field apertures for thermally assisted magnetic recording are disclosed. The aperture dimensions and supporting dielectric materials are optimized for maximum energy absorption at the magnetic recording layer for a light source having a wavelength of 780 nm, which can be produced by low cost laser diodes.Type: ApplicationFiled: December 26, 2006Publication date: June 26, 2008Inventor: Barry Cushing Stipe
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Patent number: 7391564Abstract: An infrared light condensing apparatus that focuses an infrared light of several tens microns in wavelength at a microfine area of submicron or less and also a near-field from a microfine area of submicron or less, and permits a scanning image to be obtained. It includes a solid immersion lens including a medium of high index of refraction for coupling an incident light or an outgoing light to an antenna, a measured specimen disposed on a base plane of the solid immersion lens, an antenna disposed away from the base plane at a distance ¼ of an effective wavelength of the light for causing the light to geometrically resonate therewith, a rod-like conductive probe having a sharply point end projecting from the antenna, and a position control means such as a triaxial XYZ mechanical stage for controlling the position of the probe with the intermediary of a cantilever.Type: GrantFiled: April 22, 2003Date of Patent: June 24, 2008Assignee: Japan Science and Technology AgencyInventors: Susumu Komiyama, Kenji Ikushima
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Patent number: 7387393Abstract: A process for producing a low-visibility retroreflective visual tag, which can be used to identify and/or determine the position of an object. This process involves placing an infra-red-blocking material over a retroreflective substrate to form the low-visibility retroreflective visual tag. This infra-red-blocking material is placed so as to form a pattern, which becomes visible to an infrared sensor when the low-visibility retroreflective visual tag is illuminated by an infra-red light source.Type: GrantFiled: December 19, 2005Date of Patent: June 17, 2008Assignee: Palo Alto Research Center IncorporatedInventors: James E. Reich, Patrick C. P. Cheung, Eric J. Shrader, Qingfeng Huang
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Publication number: 20080137181Abstract: Airfield lighting fixtures, systems, and methods are described, including covert lighting fixtures, systems, and methods.Type: ApplicationFiled: December 7, 2006Publication date: June 12, 2008Applicant: COOPER TECHNOLOGIES COMPANYInventors: Daniel A. That, James M. Mitsch
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Publication number: 20080137182Abstract: Airfield lighting fixtures, systems, and methods are described, including covert lighting fixtures, systems, and methods.Type: ApplicationFiled: December 7, 2006Publication date: June 12, 2008Applicant: Cooper Technologies CompanyInventors: Daniel A. That, James M. Mitsch
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Publication number: 20080121786Abstract: The present invention is a method of compacting an optical system comprising multiple optical channels. The method comprises providing one or more beam splitters and a plane mirror located one after the other along the principal ray in order to divert split-off beams into separate optical channels. Each of the separate optical channels is arranged on a consecutive level perpendicular to the principal ray. This arrangement allows the optical system to occupy a minimal volume and to fit into a confined space.Type: ApplicationFiled: April 20, 2007Publication date: May 29, 2008Inventor: Ehood Shoavi
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Publication number: 20080121824Abstract: In an EUV focusing mirror in which there are several thin concave nested high precision mirrors in the form of an ellipsoid of revolution, a paraboloid of revolution, a Wolter type or the like, the sides which do not constitute the reflection surfaces are made in the shape of a knife edge at the radiation incident ends of the respective mirrors in order not to be shielded by the thickness of the radiation incidence sides of the respective mirrors. Likewise, the radiation exit ends of the respective mirrors are made in the form of a knife edge. This yields an advantageous far-field distribution use of the mirrors for an EUV radiation source device and the degree of reduction of the light intensity can be made smaller than in the conventional case.Type: ApplicationFiled: April 18, 2007Publication date: May 29, 2008Applicant: USHIODENKI KABUSHIKI KAISHAInventors: Kiyoyuki KABUKI, Hiroto SATO
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Patent number: 7374822Abstract: A near-infrared ray shielding paint capable of forming a coating that exhibits high light transmission coefficient in visible light region while having high shielding capability in near-infrared region and exhibits little chromaticity change even in harsh environment, which near-infrared ray shielding paint comprises a first near-infrared ray-absorption coloring matter containing a compound composed of a diimonium compound cation and an anion of the formula (1), a second near-infrared ray-absorbing coloring matter of different type and a transparent resin in which a compound of the formula (2) is polymerized in an amount of 30% by mass or more. A near-infrared ray shielding laminate having a near-infrared ray shielding layer is produced with the use of this paint. (CF3SO2)2N? ??(1) [R is H or a —CH3 group, and X is a C6-C25 cyclohydrocarbon group].Type: GrantFiled: October 19, 2004Date of Patent: May 20, 2008Assignee: Sumitomo Osaka Cement Co., Ltd.Inventors: Tetsuya Nakabeppu, Tsutomu Tamura
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Patent number: 7359114Abstract: A night viewer (10) is adaptable to generate an enhanced image suitable for viewing through an optical scope (16). An input end (18) of the viewer (10) receives the image to be enhanced through an objective lens (20). An image enhancing unit (22) enhances the image. The enhanced image is optically transmitted from a display (28) to the ocular lens (24) of the scope (16). The display (28) is operably connected with the image enhancing unit (22) to display the enhanced image. A Risley prism (30) located in an image path (32) is used to controllably adjust and to maintain boresight alignment (36).Type: GrantFiled: June 13, 2006Date of Patent: April 15, 2008Assignee: Litton Systems, Inc.Inventors: Kenneth W. Sauter, Rodney L. Doster, Roland M. Morley
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Patent number: 7349151Abstract: An infrared (IR) light absorbing reflector is formed with a substrate that supports a first IR absorptive multilayer part having multiple layers of partial IR absorbing thin films. The first IR absorptive multi-layer part supports a second visible light reflecting multilayer part.Type: GrantFiled: July 12, 2005Date of Patent: March 25, 2008Assignee: Hewlett-Packard Development Company, L.P.Inventors: Kuohua Wu, Anurag Gupta
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Patent number: 7348575Abstract: A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging performance as well corrected for various aberrations, such as chromatic aberration and curvature of field, and being capable of securing a large effective image-side numerical aperture while suitably suppressing reflection loss on optical surfaces. The projection optical system comprises at least two reflecting mirrors (CM1, CM2), and a boundary lens (Lb) whose surface on the first surface side has a positive refracting power, and an optical path between the boundary lens and the second surface is filled with a medium (Lm) having a refractive index larger than 1.1.Type: GrantFiled: November 4, 2005Date of Patent: March 25, 2008Assignee: Nikon CorporationInventor: Yasuhiro Omura
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Patent number: 7345813Abstract: An optical element includes a light absorbing medium formed of a transparent material and light absorbing elements encapsulated within the transparent material. The light absorbing elements have an ultraviolet (UV) light-dependent absorption characteristic and UV light is applied to the light absorbing medium to change the attenuation of the light absorbing medium to a desired attenuation. UV light is applied to the light absorbing medium in a controlled manner to change the attenuation of the light absorbing medium from an initial attenuation to the desired attenuation. The application of UV light to the light absorbing medium can cause the light absorbing elements encapsulated within the light absorbing medium to degrade such that the amount of light absorbed by the light absorbing medium is reduced. Reducing the amount of light that is absorbed effectively reduces the attenuation of the light absorbing medium.Type: GrantFiled: July 21, 2005Date of Patent: March 18, 2008Assignee: Avago Technologies General IP Pte LtdInventors: Tom Sheau Tung Wong, Juay Sim Koh, Frank Flens, Arjan Van Haasteren
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Publication number: 20080049304Abstract: In a spectrometer, preferably in a spectrometric microscope, input light is provided from a light source to a specimen via a source objective element (e.g., a Schwarzchild objective), and the aperture of the light source is matched to the aperture of the source objective element to maximize light throughput to the specimen. The light from the specimen is then collected at a collector objective element and delivered to a camera element, which in turn provides the light to a photosensitive detector. The apertures of the camera element and the collector objective element are also matched to maximize light throughput from the specimen to the detector. As a result, light loss from vignetting effects is reduced, improving the intensity and uniformity of illumination and the sensitivity and accuracy of spectral measurements.Type: ApplicationFiled: August 28, 2007Publication date: February 28, 2008Inventor: Francis J. Deck
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Patent number: 7329856Abstract: An image sensing device is disclosed having a die formed with an array of photosensing sites and a structure of optical material having infrared absorbing characteristics formed over the photosensing sites. An embodiment is disclosed in which the structure of optical material having infrared absorbing characteristics is formed as an array of microlenses for directing visible image light onto the photosensing sites and at the same time filtering out infrared wavelengths that interfere with image capture. Alternatively, the structure may be designed to filter out other ranges of wavelengths outside of the visible spectrum.Type: GrantFiled: August 24, 2004Date of Patent: February 12, 2008Assignee: Micron Technology, Inc.Inventors: Guolin Ma, Jason Hartlove
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Patent number: 7319557Abstract: A fused thermal and a direct view aiming sight includes an optical gun sight, a thermal sight, and a beam combiner. The optical sight generates a direct view image of an aiming point or reticle superimposed on a target scene. The thermal sight generates a monochromic thermal image of the target scene. The combiner is positioned behind a 1× non-magnified optical sight and the thermal sight and in front of an exit pupil of the thermal sight. The combiner is positioned right behind the intermediate image plane of a magnified optical sight between an objective lens and an eyepiece. The combiner passes the direct view image and reflects the thermal image to the exit pupil to fuse the thermal image onto the direct view image for an operator to see at the exit pupil as a combined thermal and direct view optical image of the target scene together with the aiming reticle.Type: GrantFiled: January 26, 2005Date of Patent: January 15, 2008Assignee: EOTech Acquisition CorporationInventor: Anthony M. Tai
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Patent number: 7316869Abstract: A pellicle membrane is mounted between an outer frame and an inner frame. At least one of the frames is attached to the reticle without using conventional adhesives. The pellicle and reticle may be used in a lithography system. The pellicle allows radiation to pass through the pellicle to the reticle and may prevent particles from passing through the pellicle.Type: GrantFiled: August 26, 2003Date of Patent: January 8, 2008Assignee: Intel CorporationInventors: Florence Eschbach, Paul Zimmerman, Alexander Tregub, Fu-Chang Lo
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Patent number: 7312463Abstract: A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging performance as well corrected for various aberrations, such as chromatic aberration and curvature of field, and being capable of securing a large effective image-side numerical aperture while suitably suppressing reflection loss on optical surfaces. The projection optical system comprises at least two reflecting mirrors (CM1, CM2), and a boundary lens (Lb) whose surface on the first surface side has a positive refracting power, and an optical path between the boundary lens and the second surface is filled with a medium (Lm) having a refractive index larger than 1.1.Type: GrantFiled: October 20, 2006Date of Patent: December 25, 2007Assignee: Nikon CorporationInventor: Yasuhiro Omura
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Patent number: 7312434Abstract: A method is provided for suppressing a predetermined portion of an optical spectrum emanating from a light emitter. The optical spectrum illuminates an illumination area. The method includes the steps of fabricating a filter having a spectrophotometric transmittance and varying the spectrophotometric transmittance of the filter. The filter is positioned between the light emitter and the illumination area, such that the filter absorbs the predetermined portion of the optical spectrum.Type: GrantFiled: December 26, 2006Date of Patent: December 25, 2007Assignee: Eaton CorporationInventor: Robert P. Helstern
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Patent number: 7309870Abstract: A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging performance as well corrected for various aberrations, such as chromatic aberration and curvature of field, and being capable of securing a large effective image-side numerical aperture while suitably suppressing reflection loss on optical surfaces. The projection optical system comprises at least two reflecting mirrors (CM1, CM2), and a boundary lens (Lb) whose surface on the first surface side has a positive refracting power, and an optical path between the boundary lens and the second surface is filled with a medium (Lm) having a refractive index larger than 1.1.Type: GrantFiled: October 20, 2006Date of Patent: December 18, 2007Assignee: Nikon CorporationInventor: Yasuhiro Omura
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Publication number: 20070285766Abstract: An optical filter made from a borosilicate optical material is provided for flash lamps used in pulsed thermal imaging. The filter substantially eliminates the infrared radiation from flash lamps to allow for accurate detection of surface temperature during entire pulsed thermal imaging tests.Type: ApplicationFiled: June 13, 2006Publication date: December 13, 2007Inventor: Jiangang Sun
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Patent number: 7297393Abstract: Birefringent optical films have a Brewster angle (the angle at which reflectance of p-polarized light goes to zero) which is very large or is nonexistent. This allows for the construction of multilayer mirrors and polarizers whose reflectivity for p-polarized light decreases slowly with angle of incidence, are independent of angle of incidence, or increase with angle of incidence away from the normal. As a result, multilayer films having high reflectivity (for both planes of polarization for any incident direction in the case of mirrors, and for the selected direction in the case of polarizers) over a wide bandwidth can be achieved.Type: GrantFiled: July 31, 2006Date of Patent: November 20, 2007Assignee: 3M Innovative Properties CompanyInventors: James M. Jonza, Michael F. Weber, Andrew J. Ouderkirk, Carl A. Stover
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Patent number: 7294595Abstract: A silica glass containing from 3 to 10 mass % of TiO2, which has a coefficient of thermal expansion from 0 to 100° C., i.e. CTE0 to 100, of 0±300 ppb/° C. and an internal transmittance per mm in thickness within a wavelength region of from 200 to 700 nm, i.e. T200 to 700, of at most 80%.Type: GrantFiled: May 18, 2006Date of Patent: November 13, 2007Assignee: Asahi Glass Company, LimitedInventors: Yasutomi Iwahashi, Akio Koike
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Patent number: 7289264Abstract: Method for limiting the amount of radiation impinging on a radiation sensitive detector (RSD) responsive to signals having infrared wavelengths of approximately 3 to 14 microns. Method includes: directing radiation signal through prism toward RSD; permitting radiation signal to impinge upon RSD when radiation is below predetermined threshold; and directing radiation associated with radiation signal but of different wavelengths from signals of interest on path external to prism, to initiate limiting of radiation impinging upon RSD when predetermined threshold is exceeded. Also, Total Internal Reflection device including prism having thin film coated on back surface of prism. Material making up prism and thin film are selected so that, in presence of radiation having intensity less than certain threshold, refractive index of thin film is lower than that of prism, and when radiation has intensity higher than that certain threshold, refractive index of thin film is higher than that of prism.Type: GrantFiled: December 16, 2004Date of Patent: October 30, 2007Assignee: Lockheed Martin CorporationInventors: Pingfan Wu, George Dalakos, Brian Lawrence, Peter Lorraine
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Patent number: 7288775Abstract: It is an object of the present invention to provide synthetic quartz glass optical materials suitable for use in YAG of higher order harmonics. The damage threshold value in J/cm2 (energy density at which cracks occur generated by irradiation) is to be considered when synthetic quartz glass material is irradiated with YAG laser of third or higher order harmonics with single pulses or continuously. Regarding a synthetic quartz glass optical material in use for the optical parts constituting the prism and lens used in a laser beam machine, this invention provides a synthetic quartz glass material suitably used for the YAG laser with the third or higher order of harmonic, choosing the following conditions: OH group concentration is in the range of ?1 to ?300 ppm; contained hydrogen molecule concentration is in the range of ?2×1018 to ?2×1019 molecules/cm3; transmittance of ultraviolet rays at 245 nm of wavelength is 99.9% or more; and the fictive temperature is in the range of ?880 to ?990° C.Type: GrantFiled: July 19, 2003Date of Patent: October 30, 2007Assignees: Heraeus Quarzglas GmbH & Co. KG, Shin-Etsu Quartz Products Co., Ltd.Inventors: Akira Fujinoki, Hiroyuki Nishimura, Kunio Yoshida
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Patent number: 7286309Abstract: An infrared sight glass for aftermarket fitment around an opening of an enclosure which enables thermal inspection of electrical equipment within the enclosure. The mounting of the sight glass is performed externally which avoids having to access the interior of the enclosure. The infrared sight glass comprises an infrared transmitting medium to facilitate use of an external infrared thermal imaging camera for monitoring the electrical equipment. A removable protective cover is locked into a closed position by security key screws and is easily removed by a slight twist when the key screws are loosened.Type: GrantFiled: May 19, 2006Date of Patent: October 23, 2007Inventors: Graham R. Holliday, Antony J. Holliday
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Publication number: 20070229942Abstract: A method of producing a mold having an uneven structure and a mold for an optical element are provided. The method includes forming on a nickel substrate a mixed film using nickel and a material which phase separates from nickel simultaneously, the mixed film including a plurality of cylinders including nickel as a component thereof and a matrix region including the material which phase separates from nickel as a component thereof and surrounding the plurality of cylinders; and removing the matrix portion from the mixed film by etching to give a mold including nickel or a nickel alloy. The uneven structure is disposed in plurality on the substrate, and a pitch of the uneven structure is within a range of 30 nm or more and 500 nm or less and a depth of the uneven structure is within a range of 100 nm or more.Type: ApplicationFiled: March 15, 2007Publication date: October 4, 2007Applicant: Canon Kabushiki KaishaInventors: Ryoko HORIE, Yasuhiro MATSUO, Nobuhiro YASUI, Toru Den
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Patent number: 7271950Abstract: An apparatus and method for optimizing a pellicle for off-axis transmission are disclosed. A pellicle includes a thin film optimized for transmission of off-axis incident light at a desired angle. The pellicle further includes an optical thickness greater than a design thickness by less than or equal to approximately one-quarter of an exposure wavelength.Type: GrantFiled: February 15, 2001Date of Patent: September 18, 2007Assignee: Toppan Photomasks, Inc.Inventors: Joseph S Gordon, Gregory P Hughes, Franklin D Kalk, Hakki U Alpay
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Patent number: 7267781Abstract: A method of fabricating optical filter is disclosed. The method includes providing the substrate and selectively etching the substrate to form a plurality of freestanding layers. A plurality of dielectric layers is disposed over an outer surface of each of the freestanding layers. The resultant optical filters may be used in a variety of applications including etalon applications.Type: GrantFiled: June 2, 2004Date of Patent: September 11, 2007Assignee: Shipley Company, L.L.C.Inventors: Dan A. Steinberg, Mindaugas F. Dautartas, David W. Sherrer
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Patent number: 7262920Abstract: An optical element and a manufacturing method therefor, an exposure apparatus, and a device manufacturing method that can reduce the effect of intrinsic birefringence under high NA conditions. According to an optical element as one aspect of the present invention, an angle between a [0 0 1] axis of an isometric crystal and an optical axis is less than 10°, and preferably 0°.Type: GrantFiled: October 10, 2003Date of Patent: August 28, 2007Assignee: Canon Kabushiki KaishaInventors: Yasuyuki Unno, Seiji Takeuchi
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Patent number: 7256932Abstract: An optical system for ultraviolet light having wavelengths ??200 nm, which may be designed in particular as a catadioptric projection objective for microlithography, has a plurality of optical elements including optical elements made of synthetic quartz glass or a fluoride crystal material transparent to a wavelength ??200 nm. At least two of the optical elements are utilized for forming at least one liquid lens group including a first delimiting optical element, a second delimiting optical element, and a liquid lens, which is arranged in an interspace between the first delimiting optical element and the second delimiting optical element and contains a liquid transparent to ultraviolet light having wavelengths ??200 nm. This enables effective correction of chromatic aberrations even in the case of systems that are difficult to correct chromatically.Type: GrantFiled: October 19, 2005Date of Patent: August 14, 2007Assignee: Carl Zeiss SMT AGInventors: Alexander Epple, Toralf Gruner, Wolfgang Singer
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Publication number: 20070170367Abstract: The object of the invention is to provide a transmission filter for EUV radiation which has a sufficiently narrow transmission window to characterize EUV radiation in a narrowly defined spectral region. This object is met by providing a transmission layer system having at least one uranium-containing layer.Type: ApplicationFiled: January 16, 2007Publication date: July 26, 2007Inventors: Max Christian Schuermann, Thomas Missalla
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Patent number: 7247851Abstract: An optical lens 1 makes three components of visible light and near infrared light in different wavelength regions severally form images at different locations according to their wavelengths. An imaging element 2 has a plurality of pixels, which include pixels having a visible light detection section 6 and pixels having a near infrared light detection section 8. The visible light detection section 6 has three detectors 3, 4, and 5 which detect three components of visible light which form images at locations of different depths in the same pixel according to their wavelengths. The near infrared light detection section 8 has a near infrared light detector 7 which detects near infrared light which forms an image at a location of a depth different from the depths at which the three components of visible light form images.Type: GrantFiled: April 22, 2004Date of Patent: July 24, 2007Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Tsuyoshi Okada, Hirofumi Ishii, Kazufumi Mizusawa
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Patent number: 7247371Abstract: Physical characteristics of ATO fine particles capable of exhibiting such optical properties as a high visible light transmittance, a low solar radiation transmittance, and a low haze value when the ATO fine particles are formed on a transparent substrate or in the substrate are clarified, and the ATO fine particles having the physical characteristics thereof are manufactured. The ATO fine particles having such physical characteristics that a size of a crystallite constituting the ATO fine particles is 4 to 125 nm, and that a specific surface area of the fine particles of 5 to 110 m2/g can exhibit the above-described optical properties, and an example of a method for manufacturing thereof is to parallel-drop an antimony chloride alcoholic solution and an ammonium hydrogen carbonate aqueous solution in a tin chloride aqueous solution, thoroughly wash generated precipitates, dry and calcinate them in an atmosphere, thereby the ATO fine particles are manufactured.Type: GrantFiled: July 1, 2003Date of Patent: July 24, 2007Assignee: Sumitomo Metal Mining Co., Ltd.Inventors: Takeshi Chonan, Hiroko Kuno
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Patent number: 7233724Abstract: An apparatus in one example comprises one or more light sources, one or more long period Bragg gratings that are optically coupled with the one or more light sources, and one or more amplification fibers that are optically coupled with the one or more long period Bragg gratings. The one or more light sources send one or more pump optical signals to one or more of the one or more long period Bragg gratings. The one or more of the one or more long period Bragg gratings transmit the one or more pump optical signals to one or more of the one or more amplification fibers. The one or more of the one or more amplification fibers absorb one or more of the one or more pump optical signals and emit one or more output signals. The one or more of the one or more long period Bragg gratings attenuate one or more of the one or more output signals.Type: GrantFiled: November 20, 2003Date of Patent: June 19, 2007Assignee: Northrop Grumman CorporationInventor: George A. Pavlath
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Patent number: 7226177Abstract: A catoptric projection optical system for projecting a pattern on an object surface onto an image surface includes plural mirrors, wherein a second mirror from the image surface through the optical path receives convergent pencil of rays, and has a paraxial magnification of ?0.14 or smaller.Type: GrantFiled: November 2, 2005Date of Patent: June 5, 2007Assignee: Canon Kabushiki KaishaInventors: Takahiro Sasaki, Toshihiro Sunaga, Koshi Hatakeyama
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Patent number: 7223467Abstract: A biaxially oriented laminated polyester film which is a co-extruded laminated polyester film comprising at least three polyester layers with the intermediate layer containing a dye which is substantially dissolved in polyesters, said film having on one side thereof a resin layer containing metal-added metal oxide particles or metal oxide particles. This film is capable of preventing precipitation of the dye on the film surface, excels in heat insulation and aesthetic effect in use, and is suited for application to windows.Type: GrantFiled: September 22, 2003Date of Patent: May 29, 2007Assignee: Mitsubishi Polyester Film CorporationInventor: Kazuhiro Kunugihara
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Patent number: 7215466Abstract: An optical filter for screening out infrared and ultraviolet light includes a transparent substrate and a film stack formed on the substrate. The film stack includes a number of high refractive index layers and a number of low refractive index layers alternately stacked one on another. The film stack is represented as follows: (3.5H3.5L)7(2.5H2.5L)7(HL)6(0.76H0.76L)6, wherein, H represents a high refractive index layer having a base optical thickness equal to one fourth of a reference wavelength associated with the optical filter, L represents a low refractive index layer having a base optical thickness equal to one fourth of a reference wavelength associated with the optical filter, expressions enclosed in each parenthesis represent filter cavities, and superscripts represents the number of repetitions of the expression enclosed in that parenthesis.Type: GrantFiled: May 12, 2006Date of Patent: May 8, 2007Assignee: Hon Hai Precision Industry Co. LtdInventors: Ga-Lane Chen, Ching-Chou Chang
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Patent number: 7196343Abstract: An optical element including an anti-reflection (AR) coating is configured to reflect Extreme-Ultra-Violet (EUV) radiation only.Type: GrantFiled: December 30, 2004Date of Patent: March 27, 2007Assignee: ASML Netherlands B.V.Inventors: Maarten Marinus Johannes Wilhelmus Van Herpen, Levinus Pieter Bakker, Derk Jan Wilfred Klunder
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Patent number: 7196842Abstract: An attenuating filter provides a prescribed attenuation of the intensity of transmitted, short-wavelength, ultraviolet light, in particular, at wavelengths below 200 nm, that is governed by a predefinable spatial distribution of its spectral transmittance. The filter has a transparent substrate (3), e.g. fabricated from crystalline calcium fluoride. A filter coating (5) fabricated from a dielectric material that absorbs over a predefined wavelength range is applied to at least one surface (4) of the substrate. In the case of operating wavelengths of about 193 nm, the filter coating consists largely of tantalum pentoxide. Filters of the type, which may be inexpensively fabricated with high yields, are noted for their high abilities to withstand laser radiation and may be effectively antireflection coated employing simply designed antireflection coatings.Type: GrantFiled: November 29, 2004Date of Patent: March 27, 2007Assignee: Carl Zeiss SMT AGInventors: Bernhard Weigl, Hans-Jochen Paul, Eric Eva
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Patent number: 7190512Abstract: The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH? ions, ozone, O2? ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals.Type: GrantFiled: April 29, 2004Date of Patent: March 13, 2007Assignee: Mitsubishi Heavy Industries, Ltd.Inventors: Satoshi Sakai, Shigenori Tsuruga, Hideo Yamakoshi, Shizuma Kuribayashi, Minoru Danno, Hiroshi Futami, Noriko Yamazaki
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Patent number: 7184203Abstract: Up-conversion and down-conversion photo-luminescence in rare earth compounds are disclosed. Broadband, super-radiant, and discrete line emissions are observed. The rare earth compounds include a rare earth element and at least one other element selected from chalcogens, halogens, nitrogen, and phosphorus. The rare earth compounds include, but are not limited to, rare earth oxides, fluorides, and oxyfluorides. Doping and co-doping of rare earth compounds in an optical host material is not required. The compounds are irradiated with incident light having an incident wavelength that is selected to be highly absorbed by the rare earth compound. The up-conversion and down-conversion luminescence have been observed which may be caused by unknown electron transitions, particularly in the case of ytterbia.Type: GrantFiled: February 13, 2004Date of Patent: February 27, 2007Inventors: Robert H. Burgener, II, Roger L. Felix, Gary M. Renlund
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Patent number: RE39857Abstract: The infrared absorption filter of the present invention has a transmittance of not higher than 30% in the near-infrared region in the wavelength range of 800 to 1100 nm; a difference of 10% or less between a maximum value and a minimum value of transmittance in the visible light region in the wavelength range of 450 to 650 nm; and a transmittance of not lower than 50% at a wavelength of 550 nm, the filter being so excellent in environmental stability that after being left to stand in the air atmosphere at a temperature of 60° C. and a humidity of 95% for 1000 hours, the filter can maintain said spectral property in said range. Consequently, when used for a plasma display or the like, the filter can absorb the unwanted infrared rays radiated from the display, resulting in preventing erroneous operation of a remote control using infrared radiation even in such a high-temperature and high-humidity environment.Type: GrantFiled: May 17, 1999Date of Patent: September 25, 2007Assignee: Toyo Boseki Kabushiki KaishaInventors: Tetsuo Shimomura, Shinya Onomichi, Masanori Kobayashi, Yozo Yamada, Seiichiro Yokoyama
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Patent number: RE39858Abstract: The infrared absorption filter of the present invention has a transmittance of not higher than 30% in the near-infrared region in the wavelength range of 800 to 1100 nm; a difference of 10% or less between a maximum value and a minimum value of transmittance in the visible light region in the wavelength range of 450 to 650 nm; and a transmittance of not lower than 50% at a wavelength of 550 nm, the filter being so excellent in environmental stability that after being left to stand in the air atmosphere at a temperature of 60° C. and a humidity of 95% for 1000 hours, the filter can maintain said spectral property in said range. Consequently, when used for a plasma display or the like, the filter can absorb the unwanted infrared rays radiated from the display, resulting in preventing erroneous operation of a remote control using infrared radiation even in such a high-temperature and high-humidity environment.Type: GrantFiled: May 17, 1999Date of Patent: September 25, 2007Assignee: Toyo Boseki Kabushiki KaishaInventors: Tetsuo Shimomura, Shinya Onomichi, Masanori Kobayashi, Yozo Yamada, Seiichiro Yokoyama