Abstract: A Mid-Wave Infrared (MWIR) objective lens having an F # of 2.64 and a 33.6° angular field of view. It is deployed, with a focal plane and scanning system, on an airborne platform for remote sensing applications. Focal length is 9 inches, and the image is formed on a focal plane constituting CCD or CMOS with micro lenses. The lens has, from object to image, three optical element groups with a cold shield/aperture stop. Group 1 has a positive optical power and three optical elements; Group 2 has a positive optical power and four optical elements; Group 3 has a positive optical power and three optical elements. The objective lens is made of two Germanium and Silicon. The lens is both apochromatic and orthoscopic, and corrected for monochromatic and chromatic aberrations over 3.3 to 5.1 micrometers.

Abstract: An imaging lens includes a first lens with a negative refractive power, a second lens with a positive refractive power, a third lens with a positive refractive power and a fourth lens with a refractive power arranged in order from a first side to a second side, and an aperture stop is disposed between the first lens and the third lens. The first lens, the second lens, the third lens and the fourth lens are made from glass, a total number of lenses with refractive powers in the imaging lens is less than 5, the second lens and the third lens are aspheric glass lenses, and a full field of view of the imaging lens is greater than 120 degrees.

Abstract: An optical image capturing system includes, along the optical axis in order from an object side to an image side, a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, and a seventh lens. At least one lens among the first to the sixth lenses has positive refractive power. The seventh lens has negative refractive power, wherein both surfaces thereof can be aspheric, and at least one surface thereof has an inflection point. The lenses in the optical image capturing system which have refractive power include the first to the seventh lenses. The optical image capturing system can increase aperture value and improve the imaging quality for use in compact cameras.

Abstract: An infrared imaging lens system comprises, in order from an object side, a first lens formed of silicon whose minimum transmittance of infrared rays with a wavelength of 8 ?m to 13 ?m is at least 40% for a thickness of 1 mm, and a second lens formed of chalcogenide glass. The silicon whose minimum transmittance of infrared rays with a wavelength of 8 ?m to 13 ?m is at least 40% for a thickness of 1 mm can be obtained at low cost for example by controlling the oxygen concentration in CZ method.

Abstract: A short wavelength infrared (SWIR) energy emitting unit, and device having a SWIR emitting unit, for producing SWIR energy from an emission source emitting electromagnetic energy. The SWIR energy unit comprises a phosphor material, an electromagnetic energy blocking member, a substrate for delivering the system or material to an electromagnetic energy emission source, and optionally, an attachment member.

Abstract: A four-piece infrared single wavelength lens system includes, in order from the object side to the image side: a first lens element with a positive refractive power having an object-side surface being convex near an optical axis and an image-side surface being concave near the optical axis, a stop, a second lens element with a refractive power, a third lens element with a positive refractive power having an object-side surface being concave near the optical axis and an image-side surface being convex near the optical axis, a fourth lens element with a negative refractive power having an object-side surface being convex near the optical axis and an image-side surface being concave near the optical axis. Such arrangements can provide a four-piece infrared single wavelength lens system which has a wide field of view, high resolution, short length and less distortion.

Abstract: An optical imaging system includes, in the given order from the object side to the image side, a first lens element, a second lens element, a third lens element, and a fourth lens element arranged along an optical axis. The lens elements of the optical imaging systems may be made of the same material having absorption in visible wavelengths and high transmission in near infrared radiation. The lens elements may be coated with an antireflective coating that is optimized for near infrared radiation. The optical imaging system satisfies the relations 2.13°?HFOV/Fno?8.75°, and 0.56?G23/T1?1.54, where HFOV is the half field of view and Fno is the F number of the optical imaging system, G23 is an air gap between the second and third lens elements along the optical axis, and T1 is a thickness of the first lens element along the optical axis.

Abstract: The imaging optical system consists of first and second optical systems in order from a magnified side. The second optical system forms an image on an image display surface as an intermediate image. The first optical system forms the intermediate image on a magnified-side conjugate plane. A height H of a principal ray of light having a maximum angle of view becomes maximum on a lens surface of the whole system (having focal length f) on the most magnified side, among heights of principal rays of light having a maximum angle of view on respective lens surfaces, satisfying predetermined Conditional Expressions (1) and (2): 0.03<H×|f|/(L×I)<0.09??(1) 0.35<I/dl??(2) Where L is an optical axis distance between lens surfaces on the most magnified and reduced sides, I is a reduced side maximum image height, and dl is a maximum air spacing on the optical axis within the system.

Abstract: The invention discloses a four-piece optical lens for capturing image and a four-piece optical module for capturing image. In order from an object side to an image side, the optical lens along the optical axis comprises a first lens with refractive power; a second lens with refractive power; a third lens with refractive power; and a fourth lens with refractive power; and at least one of the image-side surface and object-side surface of each of the four lenses are aspheric. The optical lens may increase aperture value and improve the imagining quality for use in compact cameras.

Abstract: An optical image capturing system includes, along the optical axis in order from an object side to an image side, a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, and a seventh lens. At least one lens among the first to the sixth lenses has positive refractive force. The seventh lens have negative refractive force, wherein both surfaces thereof can be aspheric, and at least one surface thereof has an inflection point. The lenses in the optical image capturing system which have refractive power include the first to the seventh lenses. The optical image capturing system can increase aperture value and improve the imagining quality for use in compact cameras.

Abstract: An illumination system for EUV projection lithography has a beam shaping optical unit for generating an EUV collective output beam from an EUV raw beam of a synchrotron-radiation-based light source. An output coupling optical unit serves for generating a plurality of EUV individual output beams from the EUV collective output beam. In each case a beam guiding optical unit serves for guiding the respective EUV individual output beam toward an object field in which a lithography mask is arrangable. The result is an illumination system with which EUV light of a synchrotron-radiation-based light source is guided to the greatest possible extent without losses and at the same time flexibly.

Abstract: An optical imaging module used in portable devices is described. In order from an object side to an image side, the module comprises an aperture stop, a first lens element with positive refractive power having a convex object-side surface and a convex image-side surface; a second lens element with negative refractive power having a concave image-side surface and a object-side surface being convex in a peripheral region; a third lens element with refractive power; a fourth lens element with refractive power having a convex image-side surface; a fifth lens element with positive refractive power having an image-side surface being concave in a paraxial region and convex in a peripheral region; and wherein the optical imaging module used in the portable devices satisfies: 0.052 mm?D?0.082 mm, where D represents a maximum effective focus shifts range under all the defocus curves at 0.4 modulus of the OTF (optical transfer function).

Abstract: An electronic device may have light-based components. The light-based components may include light sources, light detectors, and image sensors. The light-based components may be aligned with a window in the device. The window may be formed within an inactive area of a display or within other device structures. The window may have one or more window members mounted within an opening in a display layer in the inactive area. Visible light blocking material such as chalcogenide glass may be incorporated into the window to provide the window with an opaque appearance that matches the opaque appearance of surrounding portions of the inactive portion of the display. In configurations in which the light-based components include a visible image sensor or other visible light detecting component, the window may be provided with a portion that is transparent at visible wavelengths.

Abstract: Provided is an imaging optical system including, in order from an enlargement conjugate side to a reduction conjugate side: a first lens unit having a negative refractive power; a second lens unit having a positive refractive power; a third lens unit having a positive refractive power; a fourth lens unit having a negative refractive power; and a fifth lens unit having a positive refractive power. In the imaging optical system, both of an enlargement conjugate point on the enlargement conjugate side and a reduction conjugate point on the reduction conjugate side are conjugate with an internal intermediate imaging position. The first lens unit and the fifth lens unit are stationary for focusing. The second lens unit, the third lens unit, and the fourth lens unit move on loci different from one another during the focusing.

Abstract: A five-piece optical lens for capturing image and a five-piece optical module for capturing image, along the optical axis in order from an object side to an image side, include a first lens with positive refractive power having a convex object-side surface; a second lens with refractive power; a third lens with refractive power; a fourth lens with refractive power; and a fifth lens with negative refractive power; and at least one of the image-side surface and object-side surface of each of the five lens elements are aspheric. The optical lens can increase aperture value and improve the imagining quality for use in compact cameras.

Abstract: An imaging lens includes first to fourth lens elements arranged from an object side to an image side in the given order. Through designs of surfaces of the lens elements and relevant lens parameters, a short system length of the imaging lens may be achieved while maintaining good optical performance.

Abstract: A catadioptric objective configured to inspect a specimen is provided. The catadioptric objective includes a Mangin element having one surface at a first axial location and an extension element positioned together with the Mangin element. The extension element provides a second surface at a second axial location. Certain light energy reflected from the specimen passes to the second surface of the extension element, the Mangin element, and through a plurality of lenses. An aspheric surface may be provided, and light energy may be provided to the specimen using diverting elements such as prisms or reflective surfaces.

Abstract: There is provided a miniaturized optical system including a protection cover, a light source, an image sensor and at least one interference film. The protection cover has a first surface and a second surface. The light source and the image sensor are disposed opposite to the first surface of the protection cover. The interference film is disposed between the light source and the protection cover to allow the light source to form a predetermined light shape in front of the second surface of the protection cover and/or disposed between the image sensor and the protection cover to allow the image sensor to receive light of a predetermined range in front of the second surface of the protection cover.

Abstract: This invention provides an optical lens system comprising: a first lens element with negative refractive power having a convex object-side surface; a second lens element with negative refractive power having a concave object-side surface and a convex image-side surface; a third lens element with positive refractive power; a plastic fourth lens element with negative refractive power having a concave object-side surface and a convex image-side surface, with both the object-side and image-side surfaces thereof being aspheric, and having at least one inflection point positioned on at least one of the object-side and image-side surfaces thereof; wherein the number of lens elements with refractive power is limited to four. By such arrangement, especially by the first and the second lens elements with negative refractive power, the system has sufficient back focal length for arranging required optical elements, and thereby is suitable for various applications.

Abstract: An optical unit includes a plurality of lenses arranged along an optical path from an object side toward an image side, the plurality of lenses including at least one lens including an image side surface and an object side surface, one of which is formed to be an aspheric surface at wafer level, the aspheric surface of the at least one lens being formed to serve as one of an aperture stop surface having an aperture stop function and a light-shielding surface having a light-shielding function.

Abstract: An image capturing system lens assembly includes, in order from an object side to an image side, a first lens element, a second lens element, a third lens element and a fourth lens element. The first lens element with positive refractive power has a convex object-side surface and a convex image-side surface. The second lens element has positive refractive power. The third lens element has positive refractive power. The fourth lens element with positive refractive power has a convex object-side surface and an image-side surface being concave at a paraxial region and convex away from the paraxial region. The fourth lens element has both of the object-side surface and the image-side surface being aspheric.

Abstract: The present invention discloses a near infrared lens, comprising four groups of lenses along the optical axis from the object space to the image space, wherein, the first lens is a meniscus-shaped lens with negative focal power, with the convex side facing the object space, and has aspherical surfaces; the second lens is a meniscus-shaped lens with positive or negative focal power, with the convex side facing the image space; the third lens is a convexo-convex, convexo-plane, or meniscus-shaped lens with positive focal power, and the convex side of the lens faces the object space if the lens is a convexo-plane or meniscus-shaped lens; the fourth lens is a lens with positive focal power, and has aspherical surfaces. With the above design, the near infrared lens can achieve high imaging quality and low distortion effects with large aperture and wide viewing angle.

Abstract: The present invention relates to an imaging lens and a camera module, the imaging lens including a first lens having positive (+) refractive power, a second lens having negative (?) refractive power, a third lens having positive (+) refractive power, a fourth lens having positive (+) refractive power, a fifth lens having negative (?) refractive power, and a sixth lens having negative (?) refractive power, wherein the sixth lens is formed with an infrared filter coated film.

Abstract: An image capturing lens assembly includes, in order from an object side to an image side, a first lens element, a second lens element, a third lens element and a fourth lens element. The first lens element with negative refractive power has an object-side surface being convex and an image-side surface being concave. The second lens element with positive refractive power has an object-side surface and an image-side surface being both convex. The third lens element with positive refractive power has an object-side surface being concave and an image-side surface being convex. The fourth lens element with positive refractive power has an object-side surface being convex, and an image-side surface being concave at a paraxial region and being convex at a peripheral region, wherein the surfaces of the fourth lens element are aspheric.

Abstract: This invention provides a photographing optical lens system comprising: a first lens element with negative refractive power; a second lens element with positive refractive power having a concave object-side surface at paraxial region and a convex image-side surface at paraxial region; a third lens element with positive refractive power having a concave object-side surface at paraxial region and a convex image-side surface at paraxial region; and a fourth lens element with positive refractive power having a convex object-side surface at paraxial region and a concave image-side surface at paraxial region and a convex shape at peripheral region, and both surfaces being aspheric. The photographing optical lens system further satisfies conditional expressions as specified.

Abstract: A lens optical system including first, second, third, fourth, and fifth lenses sequentially arranged between an object and an image sensor on which an image of the object is formed, in order from a side of the object. The first lens has a positive (+) refractive power and is biconvex. The second lens has a negative (?) refractive power and a meniscus shape convex toward the object. The third lens has a negative (?) refractive power. The fourth lens has a positive (+) refractive power and a meniscus shape convex toward the image sensor. The fifth lens has a negative (?) refractive power, and at least one of an incident surface and an exit surface of the fifth lens is an aspherical surface. A focal length f1 of the first lens and a total length TL of the lens optical system satisfies inequality: 0.5<f1/TL<1.0.

Abstract: The present invention is directed to an infrared zoom lens that consists merely of optical components of germanium so as to implement an optical system that is capable of reducing variation in brightness during varying a magnification rate and is quite bright and that facilitates compensating for aberration, especially spherical aberration that is generally hard to do, thereby producing a clear and vivid image. The infrared zoom lens comprises first to fourth groups of lens pieces arranged in series from the foremost position closest to the object; each of the lens groups having all the lens pieces made of germanium, and at least one of the lens groups consisting simply of a single lens piece.

Abstract: Multilayer anti-reflective coatings having four or more layers are disclosed. In one aspect, the multilayer anti-reflective coating comprises a first layer having a refractive index n1, where n1<1.4, and an optical thickness of (0.25±5%) ?o nm; a second layer adjacent to the first layer, the second layer having a refractive index n2, where n2?1.8, and an optical thickness of (0.5±5%) ?o nm; a third layer adjacent to the second layer, the third layer having a refractive index n3, where 1.4?n3<1.6, and an optical thickness of (0.1±5%) ?o nm; and a fourth layer adjacent to the third layer, the fourth layer having a refractive index n4, where n4?1.8, and an optical thickness of (0.05±10%) ?o nm; where ?o is a wavelength in the visible light range.

Abstract: An infrared optical system includes: a first optical element, a second optical element, a third optical element, and a fourth optical element arranged along a direction from an object side toward an image plane side, wherein the fourth optical element has positive refracting power, an aperture is provided between the second optical element and the third optical element, the first and fourth optical elements are made of any one of silicon (Si), chalcogenide glass, and zinc sulfide (ZnS), and the second and third optical elements are made of a resin material, and at least one of a surface facing the object and a surface facing the image plane of each of the second and third optical elements is an aspheric surface.

Abstract: This invention provides an optical lens system comprising: a first lens element with negative refractive power having a convex object-side surface; a second lens element with negative refractive power having a concave object-side surface and a convex image-side surface; a third lens element with positive refractive power; a plastic fourth lens element with negative refractive power having a concave object-side surface and a convex image-side surface, with both the object-side and image-side surfaces thereof being aspheric, and having at least one inflection point positioned on at least one of the object-side and image-side surfaces thereof; wherein the number of lens elements with refractive power is limited to four. By such arrangement, especially by the first and the second lens elements with negative refractive power, the system has sufficient back focal length for arranging required optical elements, and thereby is suitable for various applications.

Abstract: Provided is an optical system for a thermal image microscope. The optical system includes an image forming unit and a relay unit. The image forming unit forms a focus. The relay unit elongates an optical path. Here, the image forming unit includes six lenses. The relay unit includes two lenses. Aspherical surfaces of the lenses are all convex surfaces.

Abstract: An infrared imaging optical system for focusing infrared radiation on an infrared detector, including: a front lens group having a negative optical power to receive infrared radiation and including a first front lens and a second front lens each with at least one aspherical surface; an intermediate lens group that receives the infrared radiation from the front lens group and includes a first intermediate lens, a second intermediate lens, and a third intermediate lens each with at least one aspherical surface; and a rear lens group having positive optical power, wherein the rear lens group receives the infrared radiation from the intermediate lens group and includes a first rear lens and a second rear lens each with at least one aspherical surface, and a third rear lens, wherein the imaging optical system has a stop between the rear lens group and a focal plane at said infrared detector.

Abstract: The invention relates to a dual-field (NF and WF) imaging system comprising an optronic detector (1) and an optical combination of narrow-field focal length FNF having, an optical axis a front lens, a narrow-field entrance pupil situated in the vicinity of the front lens, a real wide-field entrance pupil, that is to say situated upstream of the front lens, an intermediate focal plane (IFP). The optical combination has, on the optical axis, the following refractive groups: a convergent front group G1 of focal length F, where F<FNF/2, this group G1 comprising the front lens, a divergent field-change group G2 that can move along the optical axis, this group being situated upstream of the IFP in NF configuration and downstream of the IFP in WF configuration, a relay group G3 imaging the IFP on the focal plane of the detector.

Abstract: Provided is an imaging lens. The imaging lens includes a first lens having a positive (+) power, a second lens having a positive (+) power, a third lens having a negative (?) power, and a fourth lens having a positive (+) power. The first lens, the second lens, the third lens, and the fourth lens are sequentially disposed from an object to transmit an image of light having a wavelength band of about 400 nm to about 1,000 nm. Thus, powers, distances, and Abbe's numbers of the first to fourth lenses may be controlled to photograph an image of visible light and infrared light.

Abstract: An optical system including a first lens group configured to correct for lateral chromatic aberration, and an adjacent second lens group configured to correct for axial chromatic aberration. The optical system includes a detector disposed behind the second lens group, a mechanism for switching the optical system between a narrow field of view configuration and a wide field of view configuration, and a ray path steering system including a pair of counter-rotating grisms disposed in front of the first lens group. The optical system also includes a stabilization system configured to suppress image jitter and including a mechanism for decentering at least one lens in the first or second lens groups orthogonal to an optical axis of the optical system. A pupil of the optical system is located external to the first and second lens groups for location of a cold shield within a cryo-vac Dewar enclosing the detector.

Abstract: Various embodiments provide an optical system including a first lens group having a plurality of lenses, the first lens group being configured to correct for an axial chromatic aberration; a second lens group having a least one lens, the second lens group being disposed adjacent the first lens group; and a third lens group having a plurality of lenses, the third lens group being configured to correct for a lateral chromatic aberration and field curvature, the third lens group being disposed adjacent the second lens group. The first, second and third lens groups are configured to provide a wide field of view greater than approximately 20 deg., and an f-number of less than approximately F/2 in a wavelength range between approximately 8 ?m and approximately 12 ?m.

Abstract: A lithographic apparatus includes an illumination system configured to condition a radiation beam, a projection system configured to project the radiation beam onto a substrate, and a filter system for filtering debris particles out of the radiation beam. The filter system includes a plurality of foils for trapping the debris particles, a support for holding the plurality of foils, and a cooling system having a surface that is arranged to be cooled. The cooling system and the support are positioned with respect to each other such that a gap is formed between the surface of the cooling system and the support. The cooling system is further arranged to inject gas into the gap.

Abstract: The present invention is directed to an infrared lens that ensures sufficient quantity of light incident on light receiving elements so as to produce a clear infrared picture. The infrared lens comprises a first or leading lens unit of positive refractivity closer to an object, and a trailing lens unit. The trailing lens unit consists of at least a second group of lens pieces located closer to an imaging plane than the first lens unit, and a third group of lens pieces located closer to the imaging plane than the second group of lens pieces. The trailing lens unit is displaced in any direction perpendicular to the optical axis for compensating for image vibration.

Abstract: An infrared optical system includes: a first optical element, a second optical element, a third optical element, and a fourth optical element arranged along a direction from an object side toward an image plane side, wherein the fourth optical element has positive refracting power, an aperture is provided between the second optical element and the third optical element, the first and fourth optical elements are made of any one of silicon (Si), chalcogenide glass, and zinc sulfide (ZnS), and the second and third optical elements are made of a resin material, and at least one of a surface facing the object and a surface facing the image plane of each of the second and third optical elements is an aspheric surface.

Abstract: A single focus wide-angle lens module includes a fixed aperture diaphragm, a first, a second, a third and a forth lens arranged from an object side to an image side in the following sequence: the first lens, the fixed aperture diaphragm, the second lens, the third lens and the forth lens. The first lens has a negative refractive power, a concave surface toward the image side, and at least one aspheric surface. The second lens has a positive refractive power and a concave surface toward the object side, and said second lens is made of glass. Further, the third lens has a meniscus shape, a positive refractive power, a concave surface toward the object side, and at least one aspheric surface. The forth lens has a positive refractive power, a convex surface toward the object side, and at least one aspheric surface.

Abstract: A re-imaging optical system includes a front objective lens group, a relay lens and a Dewar assembly. The front objective lens group includes at least three lenses for focusing light entering an entrance pupil and forming a first image located adjacent or near a field stop. The relay lens group includes at least three lenses for focusing light from the first image toward the Dewar assembly. The Dewar assembly includes a cold stop and a cooled detector array for forming a second image. Advantageously, the second image is a magnified version of the first image. Also advantageously, the distance between the entrance pupil and the detector array is less than or equal to 201 millimeters. Furthermore, the lenses of the front objective lens group and the lenses of the relay lens group are made from readily available material, such as silicon and/or germanium.

Abstract: An IR camera comprising an optical system further comprises an additional optical element arranged in the form of a disk that is transparent to the infrared radiation in the beam path and at least a first motor arranged to tilt the additional optical element around a first axis substantially perpendicular to the beam path, and a control device for controlling said at least first motor in dependence of a first registered movement of the camera.

Abstract: The present invention is directed to an infrared zoom lens that consists merely of optical components of germanium so as to implement an optical system that is capable of reducing variation in brightness during varying a magnification rate and is quite bright and that facilitates compensating for aberration, especially spherical aberration that is generally hard to do, thereby producing a clear and vivid image. The infrared zoom lens comprises first to fourth groups of lens pieces arranged in series from the foremost position closest to the object; each of the lens groups having all the lens pieces made of germanium, and at least one of the lens groups consisting simply of a single lens piece.

Abstract: The present invention is directed to an infrared zoom lens that has one or more of its lens pieces made of chalcogenide tractable in processing such as press-molding, grinding, and the like, so as to facilitate compensating for spherical aberration that is generally hard to do, thereby producing a clear and vivid image. The infrared zoom lens has first to fourth lens elements arranged in series from the foremost position closest to the object; each of the first to fourth lens elements being of a single lens piece, and at least one of the first to fourth elements is made of chalcogenide.

Abstract: A mid infrared spectral band continuous zoom system is described herein that can provide a continuous zoom range with a focal length change greater than 25× when thermally imaging a distant object. In addition, a method is described herein for using the mid infrared spectral band continuous zoom system to thermally image the distant object.

Abstract: A single focus wide-angle lens module includes a fixed aperture diaphragm, a first lens, a second lens, a third lens and a fourth lens arranged from an object side to an image side in a sequence of: the first lens, the diaphragm, the second lens, the third lens and the fourth lens. The first lens has a concave surface on the image side and at least one aspheric surface. The second lens has a positive refractive power, a concave surface on the object side and at least one aspheric surface. The third lens has a meniscus shape, a negative refractive power, a concave surface on the object side and at least one aspheric surface. The fourth lens has a positive refractive power, a convex surface on the object side and at least one aspheric surface.

Abstract: The invention relates to solar energy shielding window film laminates exhibiting visual light transmittance in the range of 5 to 80% with minimum progressive fading or degradation of reflective quality wherein base polyester films have a layer of adhesive sandwiched there between, the adhesive layer containing dispersed mixed metal oxides as solar-energy-screen particles optionally in combination with rare earth hexaborides, antimony containing metal oxide, indium containing metal oxide, titanium nitride, or carbon particles either singly or in combinations thereof.

Abstract: An ultra-broadband ultraviolet (UV) catadioptric imaging microscope system with wide-range zoom capability. The microscope system, which includes a catadioptric lens group and a zooming tube lens group, has high optical resolution in the deep UV wavelengths, continuously adjustable magnification, and a high numerical aperture. The system integrates microscope modules such as objectives, tube lenses and zoom optics to reduce the number of components, and to simplify the system manufacturing process. The preferred embodiment offers excellent image quality across a very broad deep ultraviolet spectral range, combined with an all-refractive zooming tube lens. The zooming tube lens is modified to compensate for higher-order chromatic aberrations that would normally limit performance.

Abstract: Very high aperture microlithography projection objectives operating at the wavelengths of 248 nm, 193 nm and also 157 nm, suitable for optical immersion or near-field operation with aperture values that can exceed 1.4 are made feasible with crystalline lenses and crystalline end plates P of NaCl, KCl, KI, RbI, CsI, and MgO, YAG with refractive indices up to and above 2.0. These crystalline lenses and end plates are placed between the system aperture stop AS and the wafer W, preferably as the last lenses on the image side of the objective.

Abstract: The invention relates to an objective, particularly for infrared light and/or visible light, for imaging an object in an image plane, wherein the objective comprises an objective lens to be directed toward the object and an image lens directed toward the image plane, wherein the following applies with regard to imaging an object for each point within the image circle of the objective or for at least one point within the image circle of the objective: Formula (I), wherein Pmax represents the maximum light output of a point in the image plane for imaging a point on the object, and wherein Pmin represents the light output of an additional point in the image plane for imaging the point on the object, the light output of which with regard to imaging the point on the object is greater than the light output of each additional point in the image plane with regard to imaging the point on the object.