Abstract: A Fabry-Perot (FP) interferometer includes substantially parallel first and second reflecting surfaces spaced apart by an optical gap between the first and second reflecting surfaces. The FP interferometer also has a mechanism for controlling the optical gap. The mechanism includes a plurality of electrostatic control plates. Each electrostatic control plate has a fixed control-plate area. Each control plate is adapted to control the optical gap by application of a control-plate voltage. The control-plate areas are related by integral ratios.

Abstract: Provided is a Fabry-Perot type wavelength tunable optical filter, comprising a first mirror; a second mirror located over the first mirror; a driving body located over the first mirror, and having both ends fixed to the first mirror through a spacer; a plurality of electrodes, each formed on both ends of the driving body; a rod structure connecting a center of the driving body and the second mirror; a plurality of fixing means, each fixed to the first mirror at both sides of the rod structure through the spacer; and a plurality of elastic bodies connecting the rod structure with the plurality of fixing means and acting as a rotational axis. And the mirror is driven by the rod structure acting as a lever that has an elastic body as a rotational axis, when warping is generated by electro-thermal expansion, electromagnetic force or external force. Thereby the mirror can be driven in the larger wavelength tunable range and the low power consumption.

Abstract: Disclosed is a diffractive micromirror and a method of producing the same. More particularly, the present invention pertains to a diffractive micromirror, in which a recess having a desired depth and width is precisely formed in a piezoelectric operation manner, and a method of producing the same.

Abstract: In an optical element, a first mirror stack layer is formed on a substrate, and a spacer layer made of a paraelectric material having a secondary electrooptic effect is formed thereon through a first conductive thin film. Further, a second mirror stack layer is formed thereon through a second conductive thin film, and a coupling layer is formed thereon; thus, a basic structure of the optical element is formed. By changing a voltage to be applied between the first and second conductive thin films, it becomes possible to switch wavelengths of light to be transmitted through the optical element at a high speed.

Abstract: A wavelength-tunable optical filter includes a stationary mirror, a movable mirror disposed so as to face the stationary mirror, an actuating plate for actuating the movable mirror, and a peripheral supporting portion holding the actuating plate which are disposed above a base layer. The movable mirror is displaced by applying a voltage between the electrodes provided on the actuating plate and the base layer, and the actuating plate is disposed between the movable mirror and the peripheral supporting portion so as to be displaced due to an electrostatic force.

Abstract: A wavelength tunable filter capable of being driven such that reflecting mirrors move more distant as well as closer by using the principle that a direction of the electromagnetic forces changes depending on the direction of the current flowing perpendicular to the external magnetic field. According to the wavelength tunable filter of the present invention, when it is necessary to have the wavelength tuning range and mechanical structure similar to the conventional wavelength tunable filter driven in only one direction, it is possible to lower the maximum force needed to drive the filter to a half, and reduce a probability that a pull-in phenomenon occurs. On the other hand, it is possible to reduce a wavelength change time of the element by increasing a resonant frequency when the same wavelength tuning ranges are implemented by using the same maximum driving forces.

Abstract: A tunable optical resonator for use as a tunable laser or optical filter comprising a cavity in which the cavity is delimited by a reflection grating and a reflector in which the reflection grating is fixed to a flexible support, the resonator also comprising means for flexing the flexible support for causing the grating to mimic rotation about a selected point. A micro-mechanical tunable resonator as above providing mode-hop free tuning.

Abstract: The interferometric modulator of the invention includes a transparent substrate (refractive index: n0) 12, an optical thin film (complex index of refraction: N1=n1?i·k1) 13 provided on the transparent substrate 12, and an absorber layer (complex index of refraction: Ns=ns?i·ks) 14 opposed to the optical thin film 13, the distance of a gap to the optical thin film 13 being variable, wherein the relation n1>n0, k1?0 and ns>n0 is satisfied.

Abstract: A method for calibrating an interferometer uses an actuator adapted to control an optical gap in response to application of an electrical signal. The interferometer is illuminated with a beam of light having a predetermined substantially monochromatic wavelength, oriented at a first predetermined angle of incidence, and light reflected from the interferometer at a second predetermined angle is detected while varying an electrical signal applied to the actuator, thereby establishing a calibrated relationship between the applied electrical signal and an optical path length of the interferometer.

Abstract: A wavelength variable light source is provided with: a light emitting layer containing therein light emitting substance having a carbon-carbon inter-atomic bond; a pair of electrodes disposed on both sides of the light emitting layer while holding the light emitting layer therebetween; a pair of main reflectors disposed on both sides of the light emitting layer so as to hold the light emitting layer therebetween, thereby to constitute an optical resonator with respect to light emitted from the light emitting layer; and refractive index modulating means disposed on the optical path of the optical resonator, wherein the refractive index modulating means can reversibly vary the length of the optical path of the optical resonator so as to control the wavelength of the light emitted from the light source.

Abstract: A method of tuning a resonant cavity of an FP (Fabry-Perot) interferometer in a DLD (diffractive light device) MEMS (microelectromechanical system) device, wherein the FP interferometer has a top plate and a bottom plate, and wherein the method comprises; using first and second electromechanical transducers to independently change a distance between the top and bottom plates of the FP interferometer.

Abstract: An optical shutter including a multi-layer fixed filter and a multi-layer movable filter arranged with a gap therebetween controls the transmittance of light passing through the multi-layer filters. The optical shutter includes minute driving elements provided on the movable filter. Operating the minute driving elements varies a distance of the gap defined between the fixed filter and the movable filter. Operation of the movable filter is restricted by a stopper that comes into contact with the movable filter when the gap has the maximum distance and by a bump formed on the fixed filter. The minute driving elements are joined to the movable filter with elastic bonding layers therebetween.

Abstract: The present invention has an object to provide a control method and a control apparatus for a variable wavelength optical filter, which can reliably and stably control drive conditions of the variable wavelength optical filter, independent of the number of wavelengths to be selectively separated in collective.

Abstract: A tunable optical filter (30) includes a thin film waveguide (10) and a ring (308) surrounding the thin film waveguide. The ring can be mechanically pressed inwardly toward or pulled outwardly away from the thin film waveguide by external radial forces (306). A central wavelength of the tunable optical filter can be tuned according to the external radial forces. The thin film waveguide includes a substrate (102) and a multi-layered thin film (104) deposited on the substrate. The multi-layered thin film includes high refractive index layers (106) and low refractive index layers (108) alternately superposed on one another to form the multi-layered structure.

Abstract: A micro-optic Mach-Zehnder interferometer with a differential delay of n bit periods, where n is an integer number, and thermal bias control is useful as a spectral filter in front of a differential detection system to accomplish a balanced receiver. The interferometer may also be arranged as a Michelson interferometer or a dual-plate interferometer.

Abstract: The invention provides a tunable filter that can minimize adjacent channel cross talk despite an increase of a number of available wavelengths and quickly switch a wavelength to be used, and manufacturing method thereof, and also an optical switching device comprising such tunable filter. In a tunable filter having a Fabry-Perot etalon structure, not less than two cavity gaps 114 to 116 are provided and separation between the cavity gaps is controlled by any of electrostatic drive, electromagnetic drive or piezoelectric drive. In this case, the cavity gaps can be formed through the steps of forming a sacrificial layer in advance where a cavity gap is to be formed; forming a plurality of optical multilayer films 100 to 103; and removing the sacrificial layer by etching. Substrates 107 and 109 are combined through a supporting column 108.

Abstract: In a multilayered optical thin-film filter having multiple quarter wavelength thick optical thin films with different refractive indices, the filter includes a plurality of unit cavities that are stacked multiple times via a connection layer, each unit cavity including a first reflector layer, a spacer layer in contact with the first reflector layer, and a second reflector layer in contact with the spacer layer. The first reflector layer is a layered body and the second reflector layer is a layered body. The spacer layer is a multilayered optical thin film with a high refractive index obtained by layering even number of films, or is composed of a multilayered optical thin film with a low refractive index. The connection layer is a multilayered optical thin film with a low refractive index obtained by layering odd number of films.

Abstract: An optical shutter including a multi-layer fixed filter and a multi-layer movable filter arranged with a gap therebetween controls the transmittance of light passing through the multi-layer filters. The optical shutter includes minute driving elements provided on the movable filter. Operating the minute driving elements varies a distance of the gap defined between the fixed filter and the movable filter. Operation of the movable filter is restricted by a stopper that comes into contact with the movable filter when the gap has the maximum distance and by a bump formed on the fixed filter. The minute driving elements are joined to the movable filter with elastic bonding layers therebetween.

Abstract: A tuneable active microcavity and a process for manufacturing a tuneable active microcavity. The microcavity includes a first mirror, a second mirror, and a layer of an active material. A piezoelectric actuator placed outside the space located between the first and second mirrors modifies the relative distance separating the first and second mirrors under action of a control signal. The piezoelectric actuator includes a first face rigidly connected to the first mirror and a second face rigidly connected to the second mirror such that each of the first and second mirrors is free to move under action of the control signal applied to the piezoelectric actuator.

Abstract: A wavelength reference (10) including at least one gas-tunable etalons (12). Each etalon (12) has first and second reflective surfaces (20,22), making a reflecting surface pair (23). Each reflecting surface pair (23) surrounds a cavity (16) which is filled with a gas-tunable medium (19) having a variable optical index of refraction. The etalons (12) produce equally-spaced spectral lines (4) which are variable in response to changes in the gas-tunable medium (19) such as varying gas pressure or composition. The spectral lines (4) are tuned to align to an external wavelength standard, preferably an ITU reference grid (2). The properties of the gas-tunable medium (19) are then fixed, preferably by sealing an enclosure (14) which surrounds the etalons (12), so that they act as a wavelength reference (10). The etalon (12) can be a reflective etalon (29) or in an alternate embodiment (60), can be a transmissive etalon (29).

Abstract: In a multilayered optical thin-film filter having multiple quarter wavelength thick optical thin films with different refractive indices, the filter includes a plurality of unit cavities that are stacked multiple times via a connection layer, each unit cavity including a first reflector layer, a spacer layer in contact with the first reflector layer, and a second reflector layer in contact with the spacer layer. The first reflector layer is a layered body and the second reflector layer is a layered body. The spacer layer is a multilayered optical thin film with a high refractive index obtained by layering even number of films, or is composed of a multilayered optical thin film with a low refractive index. The connection layer is a multilayered optical thin film with a low refractive index obtained by layering odd number of films.

Abstract: An apparatus for filtering electromagnetic waves and sensing deposition of chemical species, the apparatus having a substrate having a surface relief structure containing at least one dielectric body with physical dimensions smaller than the wavelength of the filtered electromagnetic waves, such structures repeated in a two dimensional array covering at least a portion of the surface of the first substrate. The apparatus may include one, two, or more such arrays, spaced from one another to create one or more cavities between the arrays.

Abstract: A color shifting multilayer interference film is provided which may be used to produce foils or flakes for use in pigment compositions and colorants having color shifting properties. The flakes can be interspersed into a pigment medium to form paints, inks, or cosmetic preparations which can subsequently be applied to objects, papers, or people. Three and five layer designs of the interference film include alternating layers of a dielectric material and carbon in various configurations. The dielectric layers are formed to have an optical thickness at a design wavelength that provides a color shift as the angle of incident light or viewing angle changes.

Abstract: Thin film filters have been a basic building block of many wavelength division multiplexed (WDM) systems providing the means by which a signal, defined by a center wavelength, can be separated from a group of WDM signals. In an effort to maintain the same performance over a range of operating temperatures, thin film filters have been coated onto specially designed substrates, which expand and contract with the change in temperature to counteract the effects that the temperature change has on the thin film filters. Unfortunately, only very few materials provide the necessary thermal expansion characteristics to counteract the shift in center wavelength. Moreover, the application of a force onto only one side of the filter causes the thin film filter to bend or curve. Accordingly, the present invention solves the aforementioned problems by providing a thin film filter sandwiched between a substrate and a superstrate, which apply equal forces to each side of the filter.

Abstract: A thermally stabilized optical filter device includes a multilayer optical bandpass filter on a transparent substrate, with the transparent substrate being composed of a material having a first coefficient of thermal expansion. An encasement surrounds the transparent substrate such that the bandpass filter is exposed for transmission of predetermined optical wavelengths there through. The encasement is composed of a material having a second coefficient of thermal expansion that is different than the first coefficient of thermal expansion. The encasement provides thermal stability to the optical properties of the bandpass filter by compensating for changes in the filter that occur with temperature variations. In another embodiment, a collet assembly provides means for selectively compressing a filter chip to tune the filter response.

Abstract: The invention relates to polymer compositions which enable thermooptic control of signal attenuation in the ultraviolet, visible and near infrared (NIR) regions of the electromagnetic spectrum, and devices incorporating such compositions. The compositions are derived from polymer mixtures which exhibit a cloud point phase transition at a temperature in the range of a thermooptically controlled device such as a programmable waveguide attenuator, a programmable neutral density filter, or an optically absorbent switch. An especially preferred embodiment of the invention comprises a mixture of a high molecular weight chlorotrifluoroethylene fluid and a wax with an “ON-state” insertion loss of below 0.1 dB/cm and an extinction ratio of 22 dB/cm in the 1550 nm NIR telecommunication band.

Abstract: A wavelength characteristic control device capable of variably controlling a wavelength characteristic in a satisfactory manner. A polarized light wavelength characteristic changing element has a wavelength characteristic such that the transmittances or reflectances of P- and S-polarized rays vary differently with respect to wavelength. Polarization variable control means subjects the plane of polarization of the polarized light incident on the polarized light wavelength characteristic changing element to rotatory control to change the ratio of the P-polarized ray to the S-polarized ray, thereby variably controlling the wavelength characteristic.

Abstract: An electrically variable optical filter includes a first optical element including a first angled face and a second optical element including a second angled face. The second angled face is substantially parallel to and spaced apart from the first angled face. At least one separation actuator is affixed between the first optical element and the second optical element and is operable to change a separation distance D between the first angled face and the second angled face. Light waves transmitted through the first optical element are selectively transmitted through to or reflected away from the second optical element as a function of wavelength and the separation distance D.

Abstract: Optical systems are provided. A representative optical system includes an optical filter that incorporates an optical filter component and a tuning assembly. The optical filter component includes a propagation axis and exhibits a length of physical path along the optical path of the optical filter. The optical filter component is adapted to receive an optical signal so that, in response to the optical signal, the optical filter component propagates at least a first frequency of light. The tuning assembly engages the optical filter component and is adapted to alter the length of the physical path along the propagation axis. In this manner, the optical filter component propagates at least a second frequency of light in response to the optical signal. Methods and other systems also are provided.

Abstract: An electrically variable optical filter includes a first optical element including a first angled face and a second optical element including a second angled face. The second angled face is substantially parallel to and spaced apart from the first angled face. At least one separation actuator is affixed between the first optical element and the second optical element and is operable to change a separation distance D between the first angled face and the second angled face. Light waves transmitted through the first optical element are selectively transmitted through to or reflected away from the second optical element as a function of wavelength and the separation distance D.

Abstract: An actuator mechanism for a tunable optical filter unit that filters a selected wavelength band of the input light from a DWDM input light. The input light comprises a plurality of wavelength bands or optical channels of light, each of which are centered at a respective channel wavelength. The actuator mechanism exerts a substantially linear force to strain or stress a tunable optical filter element to a desire reflection wavelength(s). A controller, in accordance with a control algorithm, provides a drive signal to the actuator mechanism in response to a command signal and a feedback signal indicative of the center wavelength of the desired optical channel(s) to be filtered. The actuator mechanism includes a drive mechanism that translates linearly a slide in response to the drive signal.

Abstract: A Fabry-Perot filter device for selectively transmitting three wavelength bands of infrared radiation, including a reference light band, wherein the filter device comprises a fixed mirror formed on a substrate; a movable mirror arranged opposite to the fixed mirror with a gap formed therebetween so that the movable mirror is displaced with respect to the fixed mirror by applying an external force; a fixed electrode formed on the fixed mirror; and a movable electrode formed on the movable mirror and arranged opposite to the fixed electrode wherein the movable electrode is displaced by applying a potential difference across the fixed and movable electrodes so that the width of the gap is varied in at least three steps, whereby at least three wavelength bands of infrared radiation are selectively transmitted through the filter device.

Abstract: A transmission mechanism for an optical device is provided to change an angle of an optical element. The transmission mechanism includes a first member and a second member. The first member has a slanted surface and is capable of sliding back and forth along a first direction. The second member has a first part and a second part. The first part is contacted with the slanted surface of the first member. The second part has one end connected with the first part and the other end connected to the optical element. When the first member moves, the first part contacting the slant surface moves relative to the slanted surface, thereby causing the second part to rotate so as to change the angle of the optical element.

Abstract: Thin film filters have been a basic building block of many wavelength division multiplexed (WDM) systems providing the means by which a signal, defined by a center wavelength, can be separated from a group of WDM signals. In an effort to maintain the same performance over a range of operating temperatures, thin film filters have been coated onto specially designed substrates, which expand and contract with the change in temperature to counteract the effects that the temperature change has on the thin film filters. Unfortunately, only very few materials provide the necessary thermal expansion characteristics to counteract the shift in center wavelength. Moreover, the application of a force onto only one side of the filter causes the thin film filter to bend or curve. Accordingly, the present invention solves the aforementioned problems by providing a thin film filter sandwiched between a substrate and a superstrate, which apply equal forces to each side of the filter.

Abstract: A variable optical wavelength filter for making it possible to control the movement of an optical wavelength filter during a momentary loss of the optical input signal in the same way as when the optical input signal is present. Even when the input of the second direct current signal to an integrator is interrupted because of the momentary loss of the optical input signal, the integrator is able to place a dielectric multilayer filter at the position directly before the momentary loss of the optical input signal because of sustaining the voltage from directly before the momentary loss of the optical input signal.

Abstract: A tunable filter (4) includes a thin film filter (2) and an electric controller (3). The thin film filter includes a transparent substrate (28) and a thin film filter stack (20). The thin film filter stack is constructed as a Fabry-Perot etalon, including a central spacer (26) and two multi-reflective layers (22, 24) respectively on opposite sides of the spacer. One multi-reflective layer is an H(LH)P−1 film system, the other multi-reflective layer is an (HL)P−1H film system. The spacer includes a transparent dielectric film having an optical thickness equal to one half of a predetermined transmitting central wavelength. The transparent dielectric film is made of piezoelectric material whose optical thickness is controllably variable. The controller receives and analyzes optical signals, and automatically controls the thin film filter stack to allow passage of the transmitting central wavelength. The control is achieved by adjusting an optical thickness of the central spacer.

Abstract: The present invention relates to a micro-electromechanical optical attenuator and a method of operating the same. In prior art attenuators, the attenuation obtained from a deflection angle does not change uniformly over a range of interest. In addition, over a range of interest the required voltage to obtain a desired deflection changes as a nonlinear function. The cause of the poor control of prior art attenuators can be viewed graphically by examining the attenuation as a function of deflection, and the angle of deflection as a function of voltage. These functions combine to produce a very unstable voltage to attenuation response function. The present invention has found that by operating an electrostatic drive of a reflective optical attenuator in order to attain a low loss state with the mirror in a fully deflected position, the drive voltage can be reduced to increase attenuation in a very stable nearly linear attenuation vs. drive voltage response. The non-linearity of the attenuation vs.

Abstract: A method and system for filtering an optical signal is disclosed. The method and system comprise providing a polarization beam splitter, first and second rotators, a liquid crystal tunable filter, and first and second prisms. The polarization beam splitter splits the optical signal into two components based on polarization. The first rotator rotates a polarization 45 degrees in a first direction and is located between the liquid crystal tunable filter unit and the polarization beam splitter. The liquid crystal tunable filter unit includes liquid crystal molecules aligned 45 degrees clockwise relative to the vertical direction and is placed between the first rotator and the second rotator. The second rotator rotates the polarization 45 degrees opposite to the first direction. The first prism is located near the second rotator, while the second prism is near the beam splitter.

Abstract: An apparatus for filtering electromagnetic waves and sensing deposition of chemical species, the apparatus comprising a substrate having a surface relief structure containing at least one dielectric body with physical dimensions smaller than the wavelength of the filtered electromagnetic waves, such structures repeated in a two dimensional array covering at least a portion of the surface of the first substrate. The apparatus may include one, two, or more such arrays, spaced from one another to create one or more cavities between the arrays.

Abstract: An optical filter assembly is provided which includes a first optical filter and a first counteracting ring. The first optical filter is of a filter material that transmits a selected transmission range within a wider range of wavelength of light, and reflects another selected reflection range of the wavelengths. The filter material has a refractory index, whereby heating of the first optical filter tends to cause an increase in refractory index with a corresponding increase in the transmission range in a first direction. The counteracting ring is attached to the first optical filter so that at least some of the light transmits through an aperture in the counteracting ring. Heating of the first counteracting ring causes enlargement of the first counteracting ring, which stretches the first optical filter. The selected transmission range is thereby at least partially stabilized.

Abstract: A tunable optical filter is based on a conventional thin film optical filter. The thickness of the thin film optical filter determines the optical properties of the filter, specifically the pass band. The thin film optical filter is arranged within a hole extending through a layer of piezoelectric material such that the periphery of the thin film optical filter is secured to the periphery of the hole. Electrodes are provided on opposite surfaces of the piezoelectric layer such that different voltage levels can be applied. The resulting deformation of the piezoelectric layer causes a difference in the thickness of the thin film optical filter thereby permitting tuning of the optical filter.

Abstract: A process for fabricating an optical membrane device comprises providing a handle wafer and then oxidizing a surface of the handle wafer to form an insulating layer. A device wafer is then bonded to the handle wafer. An optical membrane structure is formed in this device wafer. The insulating layer is selectively removed to release the membrane structure. This device wafer can be manufactured from silicon wafer material. Such material typically has a low number of dislocations yielding a stable mechanical membrane structure. The insulating layer defines the electrical cavity across which electrical fields are established that are used to electrostatically deflect the membrane structure. The insulating layer is between 3 and 6 micrometers (&mgr;m) in thickness.

Abstract: A temperature compensated optical filter assembly including a plurality of thin films having temperature dependent indices of refraction which are deposited on a glass substrate so as to form a conventional interference filter thereon. The glass substrate is adhesively coupled to a metal holder such that the deposited thin film interference filter is interposed between the glass substrate and an adhesive layer distributed along a mounting surface of the holder. Thus, a first thermal mismatch stress is applied by the glass substrate onto an inner layer of the interference filter and a second mismatch stress is applied by the holder onto an outer layer of the interference filter, wherein the first and second mismatch stresses depend on the temperature of the filter assembly.

Abstract: Devices based on surface plasmon filters having at least one metal-dielectric interface to support surface plasmon waves. A multi-layer-coupled surface plasmon notch filter is provided to have more than two symmetric metal-dielectric interfaces coupled with one another to produce a transmission spectral window with desired spectral profile and bandwidth. Such notch filters can form various color filtering devices for color flat panel displays.

Abstract: The present invention relates to a variable optical filter that can be used to filter an incoming signal, attenuate an incoming signal or in one configuration switch an incoming signal from one path to another. The present invention has found that an accurate and economical variable optical filter can be created by using an elastomeric material having a high coefficient of expansion in cooperation with a means for locally varying the temperature of the elastomeric material as an actuator for moving a reflective surface within the optical filter. The actuator can be operated in a controlled manner for example, to effect a tilt of the reflective surface for switching or attenuating an optical signal, or to vary the resonant wavelengths of a resonant cavity between partially reflective surfaces.

Abstract: The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure the optical and physical properties of solids and fluids.

Abstract: A method of fabricating a modulator for modulating an incident beam of light includes a substrate having a cavity formed therein and a plurality of spaced-apart deformable elements formed in the cavity. The deformable elements each has a base layer, a poled magnetic layer formed in the base layer and a first light reflection layer deposited on the magnetic layer for reflecting an incident beam of light. Between adjacent deformable elements on the base of the cavity is arranged a second light reflection layer. A conductive element formed in the substrate electro-magnetically energizes the deformable elements to deflect in the cavity. Incident light passing through each one of the first light reflection layers is caused to destructively interfere with light reflected from the second light reflection layers thereby causing modulation of the incident light.

Abstract: An eye protection arrangement for protection against multispectral laser threats includes goggles or spectacles with a tunable etalon optical filter. In one embodiment, the optical filter is fixed-tuned to a safe frequency. In another embodiment, light from the laser being used is sensed, and used to set the protective goggles to a different wavelength than the laser. In yet another embodiment of the invention, the protective optical filters have a comb response, and additional protection is provided by optically cascading two filters, each having a somewhat different comb response, so as to reduce the number of transmission spectra.

Abstract: A modulator for modulating an incident beam of light uses a substantially planar light reflection surface formed by a light reflection layer associated with a plurality of deformable elements and a light reflection layer associated with a plurality of fixed elements. The fixed and deformable elements are arranged in a cavity of a substrate supporting the modulator. Light is modulated when a current is applied to a conductive element operably associated with the deformable elements causing the light reflective layer associated with the deformable element to deflect towards the base of the cavity from its substantial planar relations with the light reflecting layer of the fixed element.

Abstract: An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which are deposited separately, each deposition providing a different thickness of spacer. Or a patterned photoresist may be used to allow for an etching process to selectively etch back the thickness of a spacer which was deposited in a single deposition. A full-color static graphical image may be formed of combined patterns of interferometric modulator cavities. Each cavity includes a reflector, and an induced absorber, the induced absorber including a spacer having a thickness that defines a color associated with the cavity.