Including Full Reflection And Transmission Of A Beam At Different Portions Of A Beam Divider Patents (Class 359/636)
  • Patent number: 6774366
    Abstract: An apparatus and method for enhancing an image relayed by a central beam of collimated light centered on the optical axis of a lens with an aperture area of A and focused on the focal plane of the lens. The apparatus having an aperture at least n times as big as A centered on the optical axis of the lens to admit a collimated relay beam including the central beam and a diverter means for separating the relay beam into n collimated facet beams equal to the central beam, but exclusive thereof, and redirecting them through the lens aperture to produce n additional images on the same focal plane. The apparatus also including a processor with a separate opto-electronic device for each image that converts it between electronic and photonic states, the electronic images being stored in the processor.
    Type: Grant
    Filed: August 7, 2003
    Date of Patent: August 10, 2004
    Assignee: The United States of America as represented by the Secretary of the Army
    Inventors: Melvin H. Friedman, John M. Hall
  • Patent number: 6765725
    Abstract: A partially mirror coated parallelepipedal form is oriented to divide collimated beams along the longitudinal axes from a plurality of diode lasers arranged side-by-side along their transverse axis. The divided partial beams are subsequently recombined and arranged side-by-side along their transverse axis using the same rhomboidal form, where the parallelepipedal form and the polarization state of the collimated diode laser beams are oriented to minimize the insertion loss of the device. The side by side arranged partial beams are further coupled into an optical fiber positioned downstream of the parallelepipedal form to deliver a beam with high optical brightness.
    Type: Grant
    Filed: October 11, 2001
    Date of Patent: July 20, 2004
    Assignee: Boston Laser, Inc.
    Inventors: Martin E. Fermann, Valery Kozlov, Douglas Bull
  • Publication number: 20040095652
    Abstract: In a light beam sensor (40) of a position adjuster, a light beam irradiated from a cross dichroic prism (150) is directly received by a CCD camera (41) via a beam splitter (451), so that the position adjuster can be adjusted without using a conventional projection screen and great size reduction of the position adjuster is possible, and, since only small space is required for installing the position adjuster, workspace can be efficiently utilized.
    Type: Application
    Filed: March 6, 2003
    Publication date: May 20, 2004
    Inventors: Masashi Kitabayashi, Koichi Kojima
  • Patent number: 6710924
    Abstract: A spectroscope has a body having a front surface, a rear surface, and a concavity provided in the rear surface. The concavity is defined by a plurality of angled reflective surfaces. A laser beam directed at the front surface is divided into a plurality of branch laser beams, with one branch laser beam generated for each of the plurality of reflective surfaces.
    Type: Grant
    Filed: June 6, 2003
    Date of Patent: March 23, 2004
    Assignee: Quarton, Inc.
    Inventor: Kevin Weng
  • Patent number: 6704144
    Abstract: This invention discloses a color separation prism assembly. The prism assembly includes three triangular-shaped prisms having identical shape and size. Each of the three triangular-shaped prisms has two triangular surfaces as interfacing surfaces bonded to two identical triangular surfaces of two other prisms. At least two triangular surfaces of the three triangular-shaped prisms are coated with color separation filtering films for reflecting a first color light and transmitting a second color light therethrough. At least two triangular surfaces of the three triangular-shaped prisms are coated with a total reflective coating constituting at least two total internal reflective (TIR) surfaces for reflecting a light projected thereon. Each of the TIR surfaces further comprising a phase-shift compensating coating coated thereon.
    Type: Grant
    Filed: May 30, 2002
    Date of Patent: March 9, 2004
    Inventor: Junejei Huang
  • Publication number: 20040017613
    Abstract: In an optical device (44), an optical axis (A) of a projection lens (46) is shifted relative to a central axis (C) of an image formation area of a liquid crystal panel (441), and a central axis (B) of a light-incident side of the cross dichroic prism (444) is shifted relative to a central axis (C) of the image formation area of a liquid crystal panel (441) to be located between the optical axis (A) of the projection lens (46) and the central axis (C) of the image formation area of the liquid crystal panel (441).
    Type: Application
    Filed: March 27, 2003
    Publication date: January 29, 2004
    Applicant: SEIKO EPSON CORPORATION
    Inventor: Yasunori Ogawa
  • Patent number: 6680798
    Abstract: An optical reduction system with polarization dose sensitive output for use in the photolithographic manufacture of semiconductor devices having variable compensation for reticle retardation before the long conjugate end. The variable compensation component(s) before the reticle provides accurate adjustment of the polarization state at or near the reticle. The variable compensation components can be variable wave plates, layered wave plates, opposing mirrors, a Berek's compensator and/or a Soleil-Babinet compensator. The catadioptric optical reduction system provides a relatively high numerical aperture of 0.7 capable of patterning features smaller than 0.25 microns over a 26 mm×5 mm field. The optical reduction system is thereby well adapted to a step and scan microlithographic exposure tool as used in semiconductor manufacturing. Several other embodiments combine elements of different refracting power to widen the spectral bandwidth which can be achieved.
    Type: Grant
    Filed: April 25, 2001
    Date of Patent: January 20, 2004
    Assignee: ASML Holding N.V.
    Inventor: Justin L. Kreuzer
  • Patent number: 6665124
    Abstract: The invention relates to a geometrical beam splitter, e.g. in a sensor, for transversally dividing a radiation beam (4) into at least one reflected beam portion (5R) and at least one passing beam portion (5T). The beam splitter (1) is composed of a piece (11) of rigid material having a non-transparent reflective surface (3) at an angle (&agr;) deviating from the right angle in respect to the incident direction (RI) of said radiation beam. The beam splitter has a width (W) and a height (H) extending over a total effective cross-sectional area (A*) of the radiation beam (4) and e.g. two holes (2a, 2b) extending through said piece of rigid material. The holes allow passing of at least two beam portions (5T), and simultaneously the non-transparent reflective surface divert at least one reflected beam portion (5R) so that said beam portions have substantially similar wavelength distributions.
    Type: Grant
    Filed: August 14, 2002
    Date of Patent: December 16, 2003
    Assignee: Instrumentarium Corp.
    Inventor: Kurt Weckstrom
  • Patent number: 6642995
    Abstract: A modified beam splitter that has a hole pattern that is symmetric in one axis and anti-symmetric in the other can be employed in a mask-to-wafer alignment device. The device is particularly suited for rough alignment using visible light. The modified beam splitter transmits and reflects light from a source of electromagnetic radiation and it includes a substrate that has a first surface facing the source of electromagnetic radiation and second surface that is reflective of said electromagnetic radiation. The substrate defines a hole pattern about a central line of the substrate. In operation, an input beam from a camera is directed toward the modified beam splitter and the light from the camera that passes through the holes illuminates the reticle on the wafer. The light beam from the camera also projects an image of a corresponding reticle pattern that is formed on the mask surface of the that is positioned downstream from the camera.
    Type: Grant
    Filed: November 7, 2001
    Date of Patent: November 4, 2003
    Assignee: EUV LLC
    Inventors: William C. Sweatt, Daniel A. Tichenor, Steven J. Haney
  • Patent number: 6639743
    Abstract: A support member (311) for supporting liquid crystal panels (441R, 441G, 441B) is disposed parallel to a cooling air flow channel formed between a light-incident end of a cross dichroic prism (45) and the respective liquid crystal panels and is constructed by a pair of components for supporting a neighborhood of the ends of the respective liquid crystal panels, so that the gap between the light-incident end of the cross dichroic prism and the respective liquid crystal panels facing the cooling air flow channel can be enlarged, thereby flowing cooling air sufficient for cooling a polarizer (446) and the respective liquid crystal panels in a direction of the cooling air flow channel for efficiently cooling them.
    Type: Grant
    Filed: September 27, 2001
    Date of Patent: October 28, 2003
    Assignee: Seiko Epson Corporation
    Inventor: Nobuo Watanabe
  • Publication number: 20030184871
    Abstract: An optical device includes a first input port, a first output port, a second output port, at least one filter, at least one reflector, a first reflection unit and a second reflection unit. The filter receives optical signals having wavelengths of &lgr;1 to &lgr;n from the first input port, selectively transmits the optical signal having a wavelength of &lgr;i, and reflects other optical signals, wherein 1≦i≦n. The first reflection unit reflects the optical signal having the wavelength of &lgr;i back to the filter, so that the optical signal having the wavelength of &lgr;i can pass through the filter and can be output from the first output port. The reflector reflects the optical signals having the wavelengths of &lgr;1 to &lgr;n except for &lgr;i from the filter.
    Type: Application
    Filed: July 22, 2002
    Publication date: October 2, 2003
    Inventors: Sean Chang, Hawk Chen, Martin Chu
  • Publication number: 20030165017
    Abstract: The invention provides an optical device, including a light-transmitting substrate, optical means for coupling light into the substrate by total internal reflection, and a plurality of partially reflecting surfaces carried by the substrate, characterized in that the partially reflecting surfaces are parallel to each other and are not parallel to any of the edges of the substrate.
    Type: Application
    Filed: April 11, 2003
    Publication date: September 4, 2003
    Inventor: Yaakov Amitai
  • Patent number: 6603443
    Abstract: A compact virtual image electronic display system including a beamsplitting magnification optic on which a source object is projected, the beamsplitting magnification optic having a refractive surface and a partially reflective surface for magnifying and reflecting the source object as a magnified virtual image, and a reflective element positioned for receiving and reflecting the magnified virtual image back to the beamsplitting magnification optic. The beamsplitting magnification optic receives the reflected magnified virtual image and magnifies and transmits it through the beamsplitting magnification optic as a compound magnified image of the magnified virtual image to an observer.
    Type: Grant
    Filed: October 29, 1998
    Date of Patent: August 5, 2003
    Assignee: Three-Five Systems, Inc.
    Inventors: Alfred P. Hildebrand, Gregory J. Kintz
  • Patent number: 6583940
    Abstract: A projection system that is capable of providing a high-performance projection system and producing a high contrast projection image by using an optical modulation element, which can be positioned a predetermined distance away from an illumination optical system and a projection optical system. The optical modulation element is capable of modulating light received from the illumination optical system and projecting the modulated light to a projection optical system in the direction of a projection surface.
    Type: Grant
    Filed: June 20, 2001
    Date of Patent: June 24, 2003
    Assignee: Minolta Co., Ltd.
    Inventors: Jun Nishikawa, Shigeru Sawamura, Katsuhiro Takamoto
  • Patent number: 6580561
    Abstract: A variable beamsplitter (10) for use with quasi-optical millimeter-wave beams. The beamsplitter (10) consists of a circular metal plate (20) into which a periodic array (30) of rectangular slots is cut. The plate (20) is arranged so that the incident millimeter-wave beam is incident at an angle of 45° relative to the surface of the plate (20). The polarization of the incident beam is parallel to the surface of the plate (20). When the orientation of the plate (20) is such that the electric field is perpendicular to the slots (i.e., the electric field is directed across the narrow dimension of the slots), the plate (20) transmits nearly 100% of the incident power. If the plate is rotated about its axis by 90° (while maintaining a 45° angle between the incident beam and the plate) so that the incident electric field is parallel to the slots, then the plate (20) transmits 0% and reflects nearly 100% of the incident power at an angle of 90° relative to the incident beam.
    Type: Grant
    Filed: August 23, 2001
    Date of Patent: June 17, 2003
    Assignee: Raytheon Company
    Inventors: David D. Crouch, William E. Dolash
  • Patent number: 6572233
    Abstract: A mirror includes a housing, an electrochromic mirror subassembly in the housing including front and rear transparent elements, a layer of electrochromic material associated with the front and rear transparent elements, a reflector layer associated with the rear transparent element, with a portion of the reflector layer defining an opening, and an indicia panel covering the opening and configured to form a visual display. The visual display includes a panel with a discrete number of pre-formed letters and symbols. At least one light source is positioned in the housing to pass light through the indicia panel and the opening of the mirror subassembly to selectively illuminate the visual display. The plurality of light-emitting devices being a number that is equal to or less than the discrete number. The at least one light source emits a light matched in color to the indicia panel so that a maximum of light from the at least one light source passes through the indicia panel and is visible to a vehicle driver.
    Type: Grant
    Filed: September 18, 2000
    Date of Patent: June 3, 2003
    Assignee: Gentex Corporation
    Inventors: Bradley L. Northman, John W. Carter, Frederick T. Bauer
  • Patent number: 6563646
    Abstract: A laser beam projecting instrument primarily for construction purposes, and preferably self-leveling, produces four or five orthogonal output beams. The high-intensity central portion of a collimated elliptical beam from a laser diode is partially diverted by a beam splitter periscope device to produce one output beam, and the remainder of that central beam region is transmitted to produce another output beam in the straight-a-head direction. Two additional beams are produced from outer portions the beam's long dimension. In another embodiment, a five-beam instrument utilized two such periscopes in succession, thus producing three beams from the high intensity central region of the collimated beam.
    Type: Grant
    Filed: December 28, 2001
    Date of Patent: May 13, 2003
    Assignee: Trimble Navigation Limited
    Inventor: Timothy J. Litvin
  • Patent number: 6556351
    Abstract: A method and apparatus is provide for receiving a first set of optical data from a first field of view and receiving a second set of optical data from a second field of view. A portion of the first set of optical data is communicated and a portion of the second set of optical data is reflected, both toward an optical combiner. The optical combiner then focuses the portions onto the image plane such that information at the image plane that is associated with the first and second fields of view is received by an optical detector and used to determine an attitude characteristic.
    Type: Grant
    Filed: October 10, 2001
    Date of Patent: April 29, 2003
    Assignee: The Texas A&M University System
    Inventors: John L. Junkins, Thomas C. Pollock, Daniele Mortari
  • Patent number: 6545814
    Abstract: An integrating rod (100) for combining light beams from two or more sources. A first light beam (104) enters the integrating rod 100 through a first entrance face (102) to a first reflecting face (110). The light is reflected by the first reflecting face (110) and travels along the major axis (114) of the integrating rod (100) to an exit face (116). A second light beam (108) from a second light source enters the integrating rod (100) through a second entrance face (106). The second light beam may be reflected by a second reflecting face (112) and travels along the major axis (114) to the exit face (116). The two light beams experience multiple reflections as they travel along the integrating rod and leave the integrating rod (100) through the exit face (116) as a single homogenous light beam.
    Type: Grant
    Filed: December 28, 2000
    Date of Patent: April 8, 2003
    Assignee: Texas Instruments Incorporated
    Inventors: Terry A. Bartlett, Keith H. Elliott, D. J. Segler
  • Publication number: 20030058530
    Abstract: A high-performance microscope allows total internal reflection fluorescence microscopy, fluorescence microscopy and interference reflection microscopy (or reflection contrast microscopy) to be selectively performed by using the same objective. The microscope has an objective optical system and an image-forming optical system for imaging light from a sample passing through the objective optical system onto an image pickup device. An optical member is provided in a viewing optical path extending from the objective optical system to the image-forming optical system. The optical member reflects illuminating light from an illuminating optical system so that the illuminating light enters the objective optical system, and allows the light from the sample passing through the objective optical system to pass through the image-forming optical system.
    Type: Application
    Filed: September 25, 2002
    Publication date: March 27, 2003
    Inventor: Yoshihiro Kawano
  • Patent number: 6525884
    Abstract: A beam splitter has a support frame made of silicon that has a membrane inside made of silicon. The membrane has in particular openings with bridges formed between them. On the side of membrane facing the incident beam is an aluminum coating to increase the reflectability or degree of reflection of the membrane. An incident beam bundle contacts the beam splitter at angle of incidence &phgr;. A portion of the incident beam is reflected off the bridges, and the remaining portion of the beam freely passes through the openings. The beam is correspondingly divided into a reflective portion and transmitted portion.
    Type: Grant
    Filed: March 15, 2001
    Date of Patent: February 25, 2003
    Assignee: Agilent Technologies, Inc.
    Inventors: Karsten Kraiczek, Beno Mueller
  • Patent number: 6517209
    Abstract: A color-separating prism for producing narrow-spectral light from broader spectral light includes first, second, and third component prisms that form first and second adjacent pairs of faces. The color-separating prism also includes first and second reflective layers disposed between the prisms. The first and second reflective layers each reflect separate portions of input light back toward the front surface. In operation, a first portion of a light beam in a first wavelength range is reflected from the first reflective layer back toward the front face of the prism, and a second portion of the light beam in a second wavelength range is reflected from the second reflective layer back toward the front face of the prism. The first and second portions are totally internally reflected from the front face and exit the color-separating prism. The color-separating prism can be used in display systems.
    Type: Grant
    Filed: May 29, 2001
    Date of Patent: February 11, 2003
    Assignee: Duke University
    Inventor: Austin L. Huang
  • Patent number: 6493149
    Abstract: A single plate type optical unit and display device to utilize light with high efficiency in a simple method is configured so a dichroic mirror separates light into a plurality of colors, and the plurality of colors of light reflected by the dichroic mirror are beamed onto a rotating multisurface element, the plurality of colors of light emitted from the rotating multisurface element are each beamed onto different locations on the display element, and by rotating the rotating multisurface element, the plurality of colors of light are moved in one direction along the display element, and a color image is beamed from a projection lens.
    Type: Grant
    Filed: September 4, 2001
    Date of Patent: December 10, 2002
    Assignee: Hitachi, Ltd.
    Inventor: Satoshi Ouchi
  • Publication number: 20020181118
    Abstract: An integrated light—transmission optical module for a safetyoptoelectronic barrier, comprises a condenser element having a first lens, and an objective having a second lens which are located respectively at a first end and a second end. The module comprises a single-piece entity made of transparent material, and having an intermediate zone provided with deflectors formed by a succession of dioptric surfaces distributed along the direction of light flux propagation between the first lens and the second lens. The deflectors ensure a deflection outside the optical module of stray rays reflected inside the module, so as to prevent transmission of strays rays, either through the second lens of the objective if it is a light transmission coming from the condenser element, or through the first lens when receiving light coming from the second lens.
    Type: Application
    Filed: June 5, 2002
    Publication date: December 5, 2002
    Inventors: Didier Lenoire, Dominique Godfroy, Marek Gierczak
  • Publication number: 20020167734
    Abstract: There is provided a catadioptric projection objective that includes (a) an object plane having a rectangular object field, and (b) a beam splitter situated in a light path after the object plane, having a rectangular surface adapted to the object field and having an aspect ratio not equal to 1.
    Type: Application
    Filed: April 3, 2002
    Publication date: November 14, 2002
    Applicant: Carl Zeiss Semiconductor Manfacturing Technologies AG
    Inventor: Karl-Heinz Schuster
  • Publication number: 20020163735
    Abstract: Disclosed are systems for, and methods of forming and applying 40 micron or greater diameter, substantially radially homogeneous, relatively high, (eg. 30-60 or greater J/cm 2), energy density, preferably 200-380 nm UV wavelength, (typically Nd-YAG Iraser produced 213 nm or 266 nm wavelength), electromagnetic radiation laser pulse(s), or equivalent in a continuous wave, to uniformly substantially purely optically ablate material from sample systems; coupled with analysis thereof in (ICP-OES), (ICP-MS), (MIP-OES), (MIP-MS) or other plasma based analysis systems, with relative freedom from calibration errors arising from element fractionation.
    Type: Application
    Filed: January 10, 2001
    Publication date: November 7, 2002
    Inventors: Gunther Detlef, Ingo Horn, Marcel Guillong
  • Publication number: 20020149854
    Abstract: A reflecting type of zoom optical system comprises a plurality of optical elements each of which includes a transparent body and two refracting surfaces and a plurality of reflecting surfaces formed on the transparent body and is arranged so that a light beam enters the transparent body from one of the two refracting surfaces, repeatedly undergoes reflection by the plurality of reflecting surfaces, and exits from the other of the two refracting surfaces, and/or a plurality of optical elements on each of which a plurality of reflecting surfaces made from surface reflecting mirrors are integrally formed, and each of which is arranged so that an entering light beam repeatedly undergoes reflection by the plurality of reflecting surfaces and exits from the optical element.
    Type: Application
    Filed: October 2, 2001
    Publication date: October 17, 2002
    Inventors: Tsunefumi Tanaka, Toshiya Kurihashi, Shigeo Ogura, Keisuke Araki, Makoto Sekita, Nobuhiro Takeda, Yoshihiro Uchino, Kenichi Kimura, Toshikazu Yanai, Norihiro Nanba, Hiroshi Saruwatari, Takeshi Akiyama
  • Publication number: 20020141071
    Abstract: An illumination system for wavelengths ≦193 nm comprises (a) a first raster element upon which a light bundle emitted from a light source impinges, for producing a convergent light bundle having a focal point, and (b) a second raster element. The convergent light bundle impinges on the second raster element outside the focal point. There is also provided an illumination system for wavelengths ≦193 nm, comprising (a) a first plurality of raster elements upon which a light bundle emitted from a light source impinges, for producing a plurality of convergent light bundles, where a member of the first plurality of raster elements produces a member of the plurality of convergent light bundles having a focal point, and (b) a second plurality of raster elements. The member of the plurality of convergent light bundles impinges on a member of the second plurality of raster elements outside the focal point.
    Type: Application
    Filed: October 25, 2001
    Publication date: October 3, 2002
    Inventors: Wolfgang Singer, Wilhelm Ulrich, Martin Antoni
  • Publication number: 20020131181
    Abstract: There is provided an illumination system for lithography with wavelengths of ≦193 mn. The system comprises a first optical element, which is divided into first raster elements and lies in a first plane. The first plane defines an x-direction and a y-direction, the first raster elements each have an x-direction and a y-direction with an aspect ratio, and at least two of the first raster elements have aspect ratios of different magnitude.
    Type: Application
    Filed: January 7, 2002
    Publication date: September 19, 2002
    Inventors: Wolfgang Singer, Wilhelm Ulrich, Martin Antoni
  • Publication number: 20020122260
    Abstract: A color laser display apparatus which contains a laser light source which emits ultraviolet laser light, a modulation unit which modulates the ultraviolet laser light, a display unit which includes a fluorescent screen, and a scanning unit which two-dimensionally scans the fluorescent screen with the ultraviolet laser light. The fluorescent screen includes, for each pixel, red fluorescent material which emits red light in response to the ultraviolet laser light, green fluorescent material which emits green light in response to the ultraviolet laser light, and blue fluorescent material which emits blue light in response to the ultraviolet laser light. The laser light source may be, for example, a semiconductor laser or a fiber laser.
    Type: Application
    Filed: November 13, 2001
    Publication date: September 5, 2002
    Applicant: FUJI PHOTO FILM CO., LTD.
    Inventors: Yoji Okazaki, Kazuhiko Nagano
  • Patent number: 6445507
    Abstract: A compact, bright and high-performance viewing optical system capable of color display has a reflection type image display device, an ocular optical system and an illuminating device formed from a plurality of juxtaposed illuminating light sources of different colors. An illuminating light guide optical device is placed between the entrance pupil and the reflection type image display device. The ocular optical system includes a decentered prism formed from a medium surrounded by three optical surfaces and having a refractive index larger than 1. A chromatic aberration producing device is placed between the entrance pupil and the illuminating light guide optical device. The chromatic aberration producing device is arranged to superimpose the images of the plurality of illuminating light sources on one another in the exit pupil.
    Type: Grant
    Filed: March 2, 2001
    Date of Patent: September 3, 2002
    Assignee: Olympus Optical Co., Ltd.
    Inventors: Takayoshi Togino, Tetsuhide Takeyama
  • Patent number: 6421184
    Abstract: An optical path splitting element for splitting a light beam from a single object into two optical paths (left and right) is made compact in size and given a power to reduce the number of components thereof. An image display apparatus uses the optical path splitting element. The left and right optical paths are not in plane symmetry with each other but in 180-degree rotational symmetry with respect to only a straight line passing through the center of the object. When a pair of reflecting surfaces (left and right) closest to the object side are defined as first reflecting surfaces and a pair of reflecting surfaces (left and right) closest to the exit side are defined as final reflecting surfaces, axial principal rays incident on the first reflecting surfaces and those exiting from the final reflecting surfaces are not coplanar with each other in either of the left and right optical paths.
    Type: Grant
    Filed: August 24, 2001
    Date of Patent: July 16, 2002
    Assignee: Olympus Optical Co., Ltd.
    Inventor: Takayoshi Togino
  • Publication number: 20020080497
    Abstract: A laser irradiation apparatus having a low running cost compared to the conventional, and a laser irradiation method using the laser irradiation apparatus, are provided. Crystal grains having a size in the same order as, or greater than, conventional grains are formed. The cooling speed of a semiconductor film is made slower, and it becomes possible to form crystal grains having a grain size in the same order as, or greater than, the size of grains formed in the case of irradiating laser light having a long output time to the semiconductor film. This is achieved by delaying one laser light with respect to another laser light, combining the laser lights, and performing irradiation to the semiconductor film in the case of irradiating laser light using a solid state laser as a light source, which has a short output time.
    Type: Application
    Filed: December 21, 2001
    Publication date: June 27, 2002
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Koichiro Tanaka, Setsuo Nakajima, Takehito Yagi, Mikito Ishii, Kenichiro Nishida, Norihito Kawaguchi, Miyuki Masaki, Atsushi Yoshinouchi
  • Patent number: 6407870
    Abstract: An optical system comprising a first array of individual beam shaping elements and a second array of beam shaping elements placed between a light source, e.g., a linear array of individual laser diodes and a reshaped beam receiver, e.g., an optical fiber cable. The inhomogeneous beams emitted from the laser diodes are passed in sequence through the first and second stages so that the first stage reshaped the cross section of the beam, e.g., in the fast-axis direction and the second stage reshapes the cross section of the beam, e.g., in the slow-axis direction. As a result, the output beams of the system may have a cross section reshaped to any desired configuration, e.g., suitable for inputting into the optical fiber cable and having divergences individually adjusted in mutually perpendicular directions.
    Type: Grant
    Filed: October 28, 1999
    Date of Patent: June 18, 2002
    Inventors: Ihar Hurevich, Dimitri Velikov, James Ritter, Andrey Shalapenok, Alexander Shkolnik
  • Patent number: 6404556
    Abstract: This invention discloses an optical system which comprises first positioning and connecting portions which are formed by an integral molding on left and right side surfaces of an incidence surface of a second prism while having steps above an incidence surface and includes small bolt holes and positioning pins and second positioning and connecting portions which are formed by an integral molding at both left and right sides of a projection surface of the first prism such that they extend from the both left and right sides from the projection surface and includes small bolt holes and small bolt fitting holes, wherein the positioning pins are fitted into the positioning pin fitting holes and the lower surfaces of the second positioning and connecting portions are brought into contact with the upper surfaces of the first positioning and connecting portions, and thereafter, small bolts are made to pass through and are threaded into the small bolt holes thus integrally connecting the first prism and the second pri
    Type: Grant
    Filed: May 16, 2000
    Date of Patent: June 11, 2002
    Assignee: Olympus Optical Co., Ltd.
    Inventor: Hiroyoshi Kobayashi
  • Publication number: 20020060852
    Abstract: An optical path splitting element for splitting a light beam from a single object into two optical paths (left and right) is made compact in size and given a power to reduce the number of components thereof. An image display apparatus uses the optical path splitting element. The left and right optical paths are not in plane symmetry with each other but in 180-degree rotational symmetry with respect to only a straight line passing through the center of the object. When a pair of reflecting surfaces (left and right) closest to the object side are defined as first reflecting surfaces and a pair of reflecting surfaces (left and right) closest to the exit side are defined as final reflecting surfaces, axial principal rays incident on the first reflecting surfaces and those exiting from the final reflecting surfaces are not coplanar with each other in either of the left and right optical paths.
    Type: Application
    Filed: August 24, 2001
    Publication date: May 23, 2002
    Inventor: Takayoshi Togino
  • Patent number: 6381073
    Abstract: A segmented mirror with alternating reflective and transmissive surfaces and a refractive tilt place which laterally displaces two parallel beams are used as a beam spacer. A first beam is reflected by the segmented mirror and a second beam is transmitted by the segmented mirror. A third beam is refracted and laterally displaced by the tilt plate then reflected by the segmented mirror while a fourth beam is beam is refracted and laterally displaced by the tilt plate then transmitted by the segmented mirror. The segmented mirror and the refractive tilt plate closely space four parallel laser beams.
    Type: Grant
    Filed: December 5, 2000
    Date of Patent: April 30, 2002
    Assignee: Xerox Corporation
    Inventor: James M. Wilson
  • Publication number: 20020041447
    Abstract: A lightweight and homogeneous optical element exhibiting favorably weak birefringence and hygroscopicity as well as superior productivity and producing minimal chromatic aberrations is formed by using an organic-inorganic composite material having both the properties of a glass material and those of a plastic material. The optical element has at least one entrance refracting surface and at least one exit refracting surface. The optical element is formed from an organic-inorganic composite material having an inorganic phase dispersed in the three-dimensional network (matrix) of an organic phase.
    Type: Application
    Filed: August 1, 2001
    Publication date: April 11, 2002
    Inventors: Takayoshi Togino, Yuko Morita, Hiroaki Kinoshita
  • Publication number: 20020027719
    Abstract: An optical reduction system with polarization dose sensitive output for use in the photolithographic manufacture of semiconductor devices having variable compensation for reticle retardation before the long conjugate end. The variable compensation component(s) before the reticle provides accurate adjustment of the polarization state at or near the reticle. The variable compensation components can be variable wave plates, layered wave plates, opposing mirrors, a Berek's compensator and/or a Soleil-Babinet compensator. The catadioptric optical reduction system provides a relatively high numerical aperture of 0.7 capable of patterning features smaller than 0.25 microns over a 26 mm×5 mm field. The optical reduction system is thereby well adapted to a step and scan microlithographic exposure tool as used in semiconductor manufacturing. Several other embodiments combine elements of different refracting power to widen the spectral bandwidth which can be achieved.
    Type: Application
    Filed: April 25, 2001
    Publication date: March 7, 2002
    Applicant: Silicon Valley Group, Inc.
    Inventor: Justin L. Kreuzer
  • Publication number: 20020027718
    Abstract: An optical reduction system for use in the photolithographic manufacture of semiconductor devices having one or more quarter-wave plates operating near the long conjugate end. A quarter-wave plate after the reticle provides linearly polarized light at or near the beamsplitter. A quarter-wave plate before the reticle provides circularly polarized or generally unpolarized light at or near the reticle. Additional quarter-wave plates are used to further reduce transmission loss and asymmetries from feature orientation. The optical reduction system provides a relatively high numerical aperture of 0.7 capable of patterning features smaller than 0.25 microns over a 26 mm×5 mm field. The optical reduction system is thereby well adapted to a step and scan microlithographic exposure tool as used in semiconductor manufacturing. Several other embodiments combine elements of different refracting power to widen the spectral bandwidth which can be achieved.
    Type: Application
    Filed: April 25, 2001
    Publication date: March 7, 2002
    Applicant: Silicon Valley Group, Inc.
    Inventor: Justin L. Kreuzer
  • Publication number: 20020021498
    Abstract: An image display apparatus includes a light source for supplying illumination light, a reflection type display element for modulating the illumination light into image light by reflecting the light, an illumination optical system for guiding the illumination light to the reflection type display element, and a projection optical system for guiding the image light to an observer. The image light is incident on the projection optical system via at least a portion of the illumination optical system. The illumination optical system has a part, in an area where both the illumination light and the image light pass, which changes an optical action depending on a state of incident light. The part acts to deflect the illumination light to decrease an incident angle with respect to the reflection type display element as compared with a case where the part does not exist.
    Type: Application
    Filed: April 26, 2001
    Publication date: February 21, 2002
    Inventors: Keiji Ohtaka, Takashi Sudo
  • Publication number: 20020018300
    Abstract: A conventional interleaver, based on a stack of waveplates, relies on the orientation and the birefringence of the waveplates to differentiate the polarizations of one set of channels from another, so that the one set of channels can be separated from the other. The present invention relates to a virtual waveplate that is used to replace a birefringent waveplate. A virtual waveplate imposes a phase delay between the extraordinary ray and the ordinary ray by separating one from the other and differentiating the actual path lengths taken thereby, before recombining them. An interleaver constructed with the virtual waveplates of the present invention can be substantially a-thermal and potentially chromatic dispersion free.
    Type: Application
    Filed: July 31, 2001
    Publication date: February 14, 2002
    Inventor: Thomas Ducellier
  • Publication number: 20020003667
    Abstract: A virtual image display system is provided which comprises a non-emissive, reflective microdisplay which forms a source object; an optical system which forms a magnified, virtual image of the source object from light reflected off the microdisplay; a light source system which produces light to illuminate the display system; and an illumination system which forms at least two virtual light sources to illuminate the display system.
    Type: Application
    Filed: September 10, 1999
    Publication date: January 10, 2002
    Inventors: MICHAEL J. CURLEY, CHIH-LI CHUANG, ZHENG-WU LI, GREGORY J. KINTZ
  • Publication number: 20010055159
    Abstract: Disclosed is a color corner of a projection system including a dichroic filter having a flat plate type structure, other than a cube prism type structure, thereby being capable of achieving an improvement in color separation characteristics while allowing an easy manufacture of the dichroic filter, and thus, achieving an improvement in productivity.
    Type: Application
    Filed: March 2, 2001
    Publication date: December 27, 2001
    Applicant: SAMSUNG ELECTRO-MECHANICS CO. LTD.
    Inventors: Hark Lim Choi, Dong Ha Kim
  • Patent number: 6330114
    Abstract: A color mixing apparatus for reflective displays facilitating design of a projection lens is provided, in which a prism angle of each TIR prism is designed to have the magnitude of 37° through 38°, and an incident angle with respect to each color light is adjusted into the magnitude of 39° through 40°, to thereby facilitate the design of the projection lens. The color mixing apparatus is used for designing a three-plate projection television using reflective display devices.
    Type: Grant
    Filed: January 19, 2000
    Date of Patent: December 11, 2001
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Joon-Chan Park, Kwon-Euy Song
  • Publication number: 20010048562
    Abstract: An integrating rod (100) for combining light beams from two or more sources. A first light beam (104) enters the integrating rod 100 through a first entrance face (102) to a first reflecting face (110). The light is reflected by the first reflecting face (110) and travels along the major axis (114) of the integrating rod (100) to an exit face (116). A second light beam (108) from a second light source enters the integrating rod (100) through a second entrance face (106). The second light beam may be reflected by a second reflecting face (112) and travels along the major axis (114) to the exit face (116). The two light beams experience multiple reflections as they travel along the integrating rod and leave the integrating rod (100) through the exit face (116) as a single homogenous light beam.
    Type: Application
    Filed: December 28, 2000
    Publication date: December 6, 2001
    Inventors: Terry A. Bartlett, Keith H. Elliott, D. J. Segler
  • Patent number: 6327090
    Abstract: A system which is preferably employed in a laser alignment instrument produces up to five orthogonal beams from a single laser diode beam. In one embodiment the optics take advantage of the elliptical shape of the beam from a laser diode which when collimated produces a plurality of orthogonal beams by reflection off a plurality of 45°-angled reflective surfaces intercepting outer portions of the beam. In one preferred embodiment a solid reflective element was four 45°-angled facets to produce four beams from outer portions of a preferably non-elliptical beam, and a fifth orthogonal beam is produced by transmission of a central portion of the beam through the element. The element can be solid glass, or it can be glass or other material with a central hole.
    Type: Grant
    Filed: October 10, 2000
    Date of Patent: December 4, 2001
    Assignee: Levelite Technology, Inc.
    Inventors: Joseph F. Rando, Timothy J. Litvin
  • Publication number: 20010036016
    Abstract: The present invention relates to a separation prism assembly, comprising a plurality of optical lenses and a base. These optical lenses are assembled with a cross shape to form the separation prism and further to split incoming light into red, green and blue, by selectively reflecting and filtering, and these three colors are guided into each propagation direction. The base is formed by several mutually independent positioning components. These positioning components have trapezoid contours and are pasted onto the bottom of the separation prism to define the included angle between the optical lenses for setting up the relative positions thereof. An opening is formed by the surrounding area of the trapezoid's top contour and the optical lenses in order to further improve the separation prism's heat dissipation.
    Type: Application
    Filed: April 17, 2001
    Publication date: November 1, 2001
    Inventor: Hsiao-Chung Lu
  • Publication number: 20010024329
    Abstract: A beamsplitter, including numerous reflecting surface segments, by which a predetermined portion of an incident radiation is coupled-out, the reflecting surface segments being arranged at an angle to the incident radiation, wherein partially reflecting surface segments are provided as the reflecting surface segments, and are aligned mutually parallel and are arranged laterally displaced from each other in a plane arranged perpendicular to the incident radiation.
    Type: Application
    Filed: January 11, 2001
    Publication date: September 27, 2001
    Inventor: Jorg Dreistein
  • Publication number: 20010022690
    Abstract: In an optical pickup device, a first light source and a second light source, light emission points of which are not on an identical optical axis, are provided. A first laser light beam and a second laser light beam, wavelengths of which are different from each other, are respectively emitted from the first and second light sources. The first and second laser light-beams reflected from an optical recording medium are diffracted based on different diffraction order, such that the diffracted first and second laser light beams are received by a common light receiving element.
    Type: Application
    Filed: March 12, 2001
    Publication date: September 20, 2001
    Inventor: Tadashi Takeda